CN107180780A - A kind of wafer magazine positioner - Google Patents
A kind of wafer magazine positioner Download PDFInfo
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- CN107180780A CN107180780A CN201710618106.1A CN201710618106A CN107180780A CN 107180780 A CN107180780 A CN 107180780A CN 201710618106 A CN201710618106 A CN 201710618106A CN 107180780 A CN107180780 A CN 107180780A
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- 239000000463 material Substances 0.000 claims abstract description 22
- 238000001514 detection method Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 12
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000002788 crimping Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 230000005571 horizontal transmission Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
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Abstract
本发明公开一种晶圆料盒定位装置，定位底座用于承托载料盒，板面上的按载料盒的尺寸、在不同位置贯通设置连接孔；限位块通过连接孔可拆卸固定于定位底座的上表面，载料盒的每个边缘至少对应设置一个限位块，通过改变限位块的固定位置，可以与不同尺寸的载料盒相互匹配，从而使限位块能够紧紧地与载料盒的边缘紧贴固定，通过多个限位块的相互配合将载料盒卡接定位。因本发明中的限位块的位置可改变，并且定位底座上的连接孔根据载料盒的尺寸相应设定，从而使限位块的相对间距可以与不同的载料盒相匹配，因而能够对应匹配不同规格尺寸的载料盒，仅需一个定位装置即可定位多种载料盒，不需要更换载料盒，节省了更换的时间，提高生产效率。
The invention discloses a positioning device for a wafer material box. The positioning base is used to support the material box. Connection holes are provided on the board surface at different positions according to the size of the material box; the limit block is detachable and fixed through the connection hole. On the upper surface of the positioning base, at least one limit block is provided on each edge of the material carrier box. By changing the fixed position of the limit block, it can be matched with different size carrier boxes, so that the limit block can be tightly The ground is in close contact with the edge of the material-carrying box, and the material-carrying box is clamped and positioned through the mutual cooperation of a plurality of limit blocks. Because the position of the limiting block in the present invention can be changed, and the connection holes on the positioning base are set correspondingly according to the size of the carrier box, so that the relative spacing of the limiting block can be matched with different material carrier boxes, thus being able to Corresponding to the matching of loading boxes of different specifications and sizes, only one positioning device is needed to locate various loading boxes, and there is no need to replace the loading boxes, which saves the time for replacement and improves production efficiency.
Description
技术领域technical field
本发明涉及半导体生产技术领域，更进一步涉及一种晶圆料盒定位装置。The invention relates to the technical field of semiconductor production, and further relates to a wafer magazine positioning device.
背景技术Background technique
晶圆是指硅半导体集成电路制作所用的硅芯片，是最常用的半导体材料，由于其形状为圆形，故称为晶圆，晶圆是生产集成电路所用的载体。晶圆需要放置在载料盒中，生产时需要通过机械臂将晶圆从载料盒中取出，目前市场上存在适用于各尺寸晶圆载料盒的定位和固定装置，但是这些装置的尺寸唯一确定，只能应用于同一尺寸的载料盒，其通用性较差，同一个定位装置不能同时适用于不同尺寸的晶圆载料盒，故而在实际生产过程中，如果需要使用不同尺寸的晶圆料盒，就需要匹配对应定位和固定晶圆料盒的装置。生产过程中换装这些装置会消耗多余的时间，降低生产效率，而且需要单独存放不使用的定位装置，占用场地空间，且制造多种定位装置还会消耗大量的资源与资金。Wafer refers to the silicon chip used in the production of silicon semiconductor integrated circuits. It is the most commonly used semiconductor material. Because of its circular shape, it is called a wafer. The wafer is the carrier used in the production of integrated circuits. The wafer needs to be placed in the carrier box, and the wafer needs to be taken out of the carrier box by a robotic arm during production. Currently, there are positioning and fixing devices suitable for wafer carrier boxes of various sizes on the market, but the size of these devices The only certainty is that it can only be applied to the carrier boxes of the same size, and its versatility is poor. The same positioning device cannot be applied to wafer carrier boxes of different sizes at the same time. For the wafer magazine, it is necessary to match the corresponding device for positioning and fixing the wafer magazine. Replacing these devices during the production process will consume extra time and reduce production efficiency, and it is necessary to store unused positioning devices separately, occupying space on the site, and manufacturing multiple positioning devices will also consume a lot of resources and funds.
综上所述，对于本领域的技术人员来说，需要设计一种通用性强的载料盒定位装置，可同时用于不同尺寸的载料盒。To sum up, for those skilled in the art, it is necessary to design a highly versatile magazine positioning device that can be used for magazines of different sizes at the same time.
发明内容Contents of the invention
本发明提供一种晶圆料盒定位装置，能够夹装定位不同尺寸的载料盒，节省了更换的时间，提高生产效率，具体方案如下：The present invention provides a wafer cassette positioning device, which can clamp and position cassettes of different sizes, saves the time for replacement, and improves production efficiency. The specific scheme is as follows:
一种晶圆料盒定位装置，包括：A wafer magazine positioning device, comprising:
定位底座，用于承托载料盒，板面上按载料盒的尺寸、在不同位置贯通设置连接孔；The positioning base is used to support the loading box, and the board surface is provided with connection holes at different positions according to the size of the loading box;
限位块，通过所述连接孔可拆卸固定于所述定位底座的上表面；载料盒的每个边缘至少对应设置一个所述限位块，多个所述限位块相互配合将载料盒卡接定位。A limit block is detachably fixed on the upper surface of the positioning base through the connecting hole; each edge of the material loading box is provided with at least one limit block, and a plurality of limit blocks cooperate with each other to load the material The box snaps into position.
可选地，所述限位块为矩形方块，所述限位块至少设置一个与载料盒贴合接触的侧面。Optionally, the limiting block is a rectangular block, and the limiting block is provided with at least one side surface that is in contact with the carrier box.
可选地，所述限位块上设置腰形孔，通过调整螺栓在所述腰形孔中的位置调节所述限位块的位置。Optionally, a waist-shaped hole is provided on the limit block, and the position of the limit block is adjusted by adjusting the position of the bolt in the waist-shaped hole.
可选地，所述定位底座的上表面固定设置限位条，所述限位条具有与载料盒的一整条侧边贴合的侧面。Optionally, a limit bar is fixedly provided on the upper surface of the positioning base, and the limit bar has a side surface that is attached to a whole side of the material carrier box.
可选地，所述定位底座的下方至少设置两个传感器，通过两个传感器检测值判断所述定位底座是否水平。Optionally, at least two sensors are arranged below the positioning base, and whether the positioning base is level is judged based on the detection values of the two sensors.
可选地，所述传感器为压力传感器，所述定位底座的下表面连接弹簧，通过弹簧压接在所述压力传感器上。Optionally, the sensor is a pressure sensor, the lower surface of the positioning base is connected to a spring, and is pressed against the pressure sensor through the spring.
可选地，所述定位底座包括左侧底座和右侧底座，在所述左侧底座和所述右侧底座之间的连接段上固定连接水平传感触动条，所述水平传感触动条固定后与所述左侧底座、所述右侧底座的上表面齐平；所述水平传感触动条的下表面通过弹簧压接所述压力传感器。Optionally, the positioning base includes a left base and a right base, and a horizontal sensing touch bar is fixedly connected to the connection section between the left base and the right base, and the horizontal sensing touch bar After being fixed, it is flush with the upper surfaces of the left base and the right base; the lower surface of the horizontal sensing touch bar is pressed against the pressure sensor through a spring.
可选地，所述水平传感触动条的两侧贯穿设置套筒，在套筒的内部设置与压力传感器配合压接的弹簧，弹簧的一端设置用于与压力传感器接触的压块。Optionally, a sleeve is provided through both sides of the horizontal sensing strip, and a spring is provided inside the sleeve for crimping with the pressure sensor, and one end of the spring is provided with a pressure block for contacting the pressure sensor.
可选地，所述水平传感触动条设置在多个所述限位块之间。Optionally, the horizontal sensing touch bar is arranged between a plurality of the limit blocks.
本发明公开了一种晶圆料盒定位装置，包括定位底座和限位块，定位底座用于承托载料盒，作为载料盒的承托结构，板面上的按载料盒的尺寸、在不同位置贯通设置连接孔；限位块通过连接孔可拆卸固定于定位底座的上表面，载料盒的每个边缘至少对应设置一个限位块，由于限位块的位置可以调节更改，通过改变限位块的固定位置，可以与不同尺寸的载料盒相互匹配，从而使限位块能够紧紧地与载料盒的边缘紧贴固定，通过多个限位块的相互配合将载料盒卡接定位。因本发明中的限位块的位置可改变，并且定位底座上的连接孔根据载料盒的尺寸相应设定，从而使限位块的相对间距可以与不同的载料盒相匹配，因而能够对应匹配不同规格尺寸的载料盒，仅需一个定位装置即可定位多种载料盒，不需要更换载料盒，节省了更换的时间，提高生产效率。The invention discloses a positioning device for a wafer material box, which includes a positioning base and a limit block. The positioning base is used to support the loading box as a supporting structure for the loading box. The size of the loading box on the board surface is , Connecting holes are set through at different positions; the limit block is detachably fixed on the upper surface of the positioning base through the connection hole, and at least one limit block is set on each edge of the loading box. Since the position of the limit block can be adjusted and changed, By changing the fixed position of the limit block, it can be matched with different sizes of material boxes, so that the limit block can be tightly fixed to the edge of the material box, and the load can be fixed through the mutual cooperation of multiple limit blocks. The material box is clamped and positioned. Because the position of the limiting block in the present invention can be changed, and the connection holes on the positioning base are set correspondingly according to the size of the carrier box, so that the relative spacing of the limiting block can be matched with different material carrier boxes, thus it can Corresponding to match the loading boxes of different specifications and sizes, only one positioning device is needed to position various loading boxes, and there is no need to replace the loading boxes, which saves replacement time and improves production efficiency.
附图说明Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的一些实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据这些附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only These are some embodiments of the present invention. Those skilled in the art can also obtain other drawings based on these drawings without creative work.
图1为本发明晶圆料盒定位装置一种具体实施例的结构图；Fig. 1 is a structural diagram of a specific embodiment of the wafer cassette positioning device of the present invention;
图2为本发明晶圆料盒定位装置各个部件的爆炸结构图；Fig. 2 is an exploded structure diagram of each component of the wafer cassette positioning device of the present invention;
图3为晶圆料盒定位装置的俯视图；FIG. 3 is a top view of the wafer cassette positioning device;
图4为图3中A-A段的剖面图；Fig. 4 is the sectional view of section A-A among Fig. 3;
图5为套筒的剖面结构图。Fig. 5 is a cross-sectional structure diagram of the sleeve.
其中包括：These include:
定位底座1、左侧底座11、右侧底座12、连接段13、限位块2、腰形孔21、限位条3、水平传感触动条4、套筒5。Positioning base 1, left base 11, right base 12, connecting section 13, limit block 2, waist-shaped hole 21, limit bar 3, horizontal sensing touch bar 4, sleeve 5.
具体实施方式detailed description
本发明的核心在于提供一种晶圆料盒定位装置，能够夹装定位不同尺寸的载料盒，节省了更换的时间，提高生产效率。The core of the present invention is to provide a wafer magazine positioning device, capable of clamping and positioning magazines of different sizes, saving replacement time and improving production efficiency.
为了使本领域的技术人员更好地理解本发明的技术方案，下面将结合附图及具体的实施方式，对本发明的晶圆料盒定位装置进行详细的介绍说明。In order to enable those skilled in the art to better understand the technical solutions of the present invention, the wafer cassette positioning device of the present invention will be described in detail below in conjunction with the accompanying drawings and specific implementation methods.
本发明公开了一种晶圆料盒定位装置，如图1所示，为一种具体实施例的结构图，包括定位底座1与限位块2，定位底座1用于承托载料盒，板面上按载料盒的尺寸、在不同位置贯通设置连接孔；限位块2通过连接孔可拆卸固定于定位底座1的上表面，将限位块2通过不同的连接孔与定位底座1固定连接，可以将限位块2定位在不同的位置，以改变限位块2之间的距离；载料盒的每个边缘至少对应设置一个限位块2，每个限位块2均具有一个侧面与载料盒的侧边接触，通过调节限位块2之间的距离，通过多个限位块2相互配合将载料盒卡接定位。The invention discloses a wafer magazine positioning device, as shown in Figure 1, which is a structural diagram of a specific embodiment, including a positioning base 1 and a limit block 2, the positioning base 1 is used to support the loading magazine, According to the size of the loading box, connection holes are provided on the board at different positions; the limit block 2 is detachably fixed on the upper surface of the positioning base 1 through the connection holes, and the limit block 2 is connected to the positioning base 1 through different connection holes. Fixedly connected, the limit block 2 can be positioned at different positions to change the distance between the limit blocks 2; each edge of the loading box is provided with at least one limit block 2, and each limit block 2 has One side is in contact with the side of the material carrier box, and the distance between the limit blocks 2 is adjusted, and the material carrier box is clamped and positioned through the mutual cooperation of a plurality of limit blocks 2 .
因本发明中的限位块2通过螺栓与定位底座1连接固定，通过改变螺栓所连接的位置，限位块2之间的距离分别与载料盒的长宽对应，一般情况下载料盒为矩形，因此至少应设定两对限位块2，一对用于限定载料盒的长度，另一对用于限定载料盒的宽度。采用本发明的晶圆料盒定位装置，仅需一个定位装置即可定位多种载料盒，不需要更换载料盒，节省了更换的时间，提高生产效率。Because the limiting block 2 in the present invention is connected and fixed with the positioning base 1 by bolts, by changing the positions connected by the bolts, the distance between the limiting blocks 2 corresponds to the length and width of the loading box respectively, and the loading box is generally Rectangular, so at least two pairs of limit blocks 2 should be set, one pair is used to limit the length of the material carrier box, and the other pair is used to limit the width of the material carrier box. By adopting the wafer magazine positioning device of the present invention, only one positioning device is needed to locate various magazines, and there is no need to replace the magazines, which saves replacement time and improves production efficiency.
在上述方案的基础上，本发明中的限位块2为矩形方块，所述限位块2至少设置一个与载料盒贴合接触的侧面。限位块2具有一个表面与载料盒接触，使载料盒的限位更加稳定。当然，本发明也不排除与载料盒采用点接触形式的限位块2，只要能够通过组合将载料盒卡止定位即可。On the basis of the above solution, the limiting block 2 in the present invention is a rectangular block, and the limiting block 2 is provided with at least one side surface that is in contact with the material carrier box. The limiting block 2 has a surface in contact with the loading box, so that the positioning of the loading box is more stable. Of course, the present invention does not exclude the limit block 2 that is in point contact with the carrier box, as long as the carrier box can be locked and positioned through combination.
限位块2除了通过与不同螺栓孔相互配合限定位置之外，在限位块2上设置腰形孔21，通过调整螺栓在腰形孔21中的位置调节限位块2的位置。调节位置时，将螺栓松开，沿腰形孔21的长度方向移动限位块2，位置确定后再将螺栓固定拧紧即可。本发明中限位块固定在不同的螺栓孔中，以大范围调节位置，通过腰形孔21的设置微调位置，螺栓孔的调节是间断不连续的，腰形孔的调节是连续的，两种调节方式相互配合可以连续调节多个不同的尺寸。In addition to restricting the position of the limit block 2 by cooperating with different bolt holes, a waist-shaped hole 21 is provided on the limit block 2 , and the position of the limit block 2 is adjusted by adjusting the position of the bolt in the waist-shaped hole 21 . When adjusting the position, the bolts are loosened, and the limit block 2 is moved along the length direction of the waist-shaped hole 21. After the position is determined, the bolts are fixed and tightened. In the present invention, the limit block is fixed in different bolt holes, and the position can be adjusted in a large range. By setting the waist-shaped hole 21 and fine-tuning the position, the adjustment of the bolt hole is discontinuous, and the adjustment of the waist-shaped hole is continuous. Multiple adjustment methods cooperate with each other to continuously adjust multiple different sizes.
为了使固定效果更加稳定，在限位块2上优选地应设置两个腰形孔，至少通过两个螺栓固定一个限位块，可避免限位块2发生旋转。In order to make the fixing effect more stable, two waist-shaped holes should preferably be provided on the limiting block 2, at least one limiting block is fixed by two bolts, which can prevent the limiting block 2 from rotating.
更进一步，本发明中定位底座1的上表面固定设置限位条3，限位条3具有与载料盒的一整条侧边贴合的侧面。限位条3与起的作用与限位块2相同，限位条3与载料盒贴合的长度更长，在限位条3上同样设置两个腰形长孔，通过螺栓固定，并可微调固定的位置。Furthermore, in the present invention, the upper surface of the positioning base 1 is fixedly provided with a limiting bar 3 , and the limiting bar 3 has a side surface that is attached to a whole side of the material loading box. Limiting bar 3 is the same as the function of limiting block 2, and the length of limiting bar 3 and the loading box is longer, and two waist-shaped long holes are also set on limiting bar 3, fixed by bolts, and The fixed position can be fine-tuned.
在上述任一技术方案及其相互组合的基础上，本发明中定位底座1的下方至少设置两个传感器，通过两个传感器检测值判断定位底座1是否水平。比较两个传感器的数据，若数据相同，则代表定位底座1保持水平。On the basis of any of the above-mentioned technical solutions and their mutual combinations, at least two sensors are arranged under the positioning base 1 in the present invention, and whether the positioning base 1 is horizontal is judged by the detection values of the two sensors. Compare the data of the two sensors, if the data are the same, it means that the positioning base 1 is kept level.
具体地，本发明中的传感器为压力传感器，定位底座1的下表面连接弹簧，通过弹簧压接在压力传感器上。两个压力传感器分别位于定位底座1两个相对的边缘附近，当压力数值在误差范围之内，差值很小时，认为定位底座1保持水平，否则认为其不水平，需要重新调节位置。Specifically, the sensor in the present invention is a pressure sensor, and the lower surface of the positioning base 1 is connected to a spring, and is crimped on the pressure sensor through the spring. The two pressure sensors are respectively located near the two opposite edges of the positioning base 1. When the pressure value is within the error range and the difference is very small, the positioning base 1 is considered to be level; otherwise, it is considered not to be level and the position needs to be readjusted.
如图2所示，为各个部件的爆炸结构图，图3为晶圆料盒定位装置的俯视图。本发明中定位底座1包括左侧底座11和右侧底座12，左侧底座11和右侧底座12的上表面保持齐平，两者之间具有连接段13，连接段13的厚度小于左侧底座11和右侧底座12；在左侧底座11和右侧底座12之间固定连接水平传感触动条4，水平传感触动条4的厚度小于所述左侧底座11和所述右侧底座12，水平传感触动条4固定在左侧底座11和右侧底座12之间的连接段13上，水平传感触动条4通过螺栓与连接段13固定，固定后水平传感触动条4与左侧底座11、右侧底座12的高度齐平。As shown in FIG. 2 , it is an exploded structure diagram of each component, and FIG. 3 is a top view of the wafer cassette positioning device. In the present invention, the positioning base 1 includes a left base 11 and a right base 12. The upper surfaces of the left base 11 and the right base 12 are kept flush, and there is a connecting section 13 between them, and the thickness of the connecting section 13 is smaller than that of the left side. The base 11 and the right base 12; the horizontal sensing touch bar 4 is fixedly connected between the left base 11 and the right base 12, and the thickness of the horizontal sensing touch bar 4 is smaller than that of the left base 11 and the right base 12. The horizontal sensing touch bar 4 is fixed on the connection section 13 between the left base 11 and the right base 12. The horizontal sensing touch bar 4 is fixed to the connecting section 13 by bolts. After fixing, the horizontal sensing touch bar 4 and the The heights of the left base 11 and the right base 12 are equal.
水平传感触动条4的下表面通过弹簧压接压力传感器，水平传感触动条4的长度大于连接段13，连接段13的长度也小于左侧底座11、右侧底座12，因此在水平传感触动条4两端部的下方设置压力传感器，根据水平传感触动条4对两个压力传感器所施加的压力判断是否水平。The lower surface of the horizontal sensing touch strip 4 is crimped to the pressure sensor by a spring, the length of the horizontal sensing touch strip 4 is greater than the connection section 13, and the length of the connection section 13 is also smaller than the left base 11 and the right base 12, so in the horizontal transmission Pressure sensors are arranged below the two ends of the touch strip 4, and whether the level is determined according to the pressure applied by the level sensing touch strip 4 to the two pressure sensors.
具体地，水平传感触动条4的两侧贯穿设置套筒5，在套筒5的内部设置与压力传感器配合压接的弹簧，弹簧的一端设置用于与压力传感器接触的压块。如图4所示，为图3中A-A段的剖面图，中间部分通过螺栓与连接段13固定，两侧的空间X处设置套筒5。如图5所示，为套筒的剖面结构图，套筒5呈螺柱状，在柱状结构的中心掏空，在空腔中设置弹簧，中间的空腔可对压块进行限位。Specifically, a sleeve 5 is provided through both sides of the horizontal sensing touch bar 4 , and a spring is provided inside the sleeve 5 for crimping with the pressure sensor, and one end of the spring is provided with a pressure block for contacting the pressure sensor. As shown in FIG. 4 , it is a section view of section A-A in FIG. 3 , the middle part is fixed with the connecting section 13 by bolts, and the sleeve 5 is arranged at the space X on both sides. As shown in Figure 5, it is a cross-sectional structure diagram of the sleeve. The sleeve 5 is in the shape of a stud, hollowed out in the center of the columnar structure, and a spring is arranged in the cavity, and the middle cavity can limit the pressure block.
本发明中的水平传感触动条4设置在多个限位块2之间，载料盒放置后压在水平传感触动条4上。The horizontal sensing touch strip 4 in the present invention is arranged between a plurality of limit blocks 2 , and the material carrier is placed and pressed on the horizontal sensing touch strip 4 .
对所公开的实施例的上述说明，使本领域专业技术人员能够实现或使用本发明。对这些实施例的多种修改对本领域的专业技术人员来说将是显而易见的，本文中所定义的一般原理，可以在不脱离本发明的精神或范围的情况下，在其它实施例中实现。因此，本发明将不会被限制于本文所示的这些实施例，而是要符合与本文所公开的原理和新颖特点相一致的最宽的范围。The above description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the present invention will not be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (9)
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| CN201710618106.1A CN107180780B (en) | 2017-07-26 | 2017-07-26 | Wafer magazine positioner |
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