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CN107134946A - A kind of ultralow rotating speed travelling wave supersonic motor with curved surface stator tooth - Google Patents

A kind of ultralow rotating speed travelling wave supersonic motor with curved surface stator tooth Download PDF

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CN107134946A
CN107134946A CN201710374265.1A CN201710374265A CN107134946A CN 107134946 A CN107134946 A CN 107134946A CN 201710374265 A CN201710374265 A CN 201710374265A CN 107134946 A CN107134946 A CN 107134946A
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stator
curved surface
waveform
stator tooth
rotating speed
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CN107134946B (en
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李锦棒
崔玉国
刘硕
项四通
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Ningbo University
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Ningbo University
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    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/12Constructional details
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02NELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/16Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using travelling waves, i.e. Rayleigh surface waves
    • H02N2/163Motors with ring stator

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

A kind of ultralow rotating speed travelling wave supersonic motor with curved surface stator tooth, it is related to a kind of ultrasound electric machine, the rotating speed continuously run with solving current ultrasound electric machine is difficult to be reduced to the ultralow range of speeds, and the problem of can not avoid the harmful effect brought by frequency modulation, phase modulation and amplitude modulation mode of speed regulation to stator vibrational state, it includes flexible shaft, top nut, lower nut, pedestal, shell, upper angular contact ball bearing, lower angular contact ball bearing, rotor and stator;Top nut and lower nut are screwed in the top and bottom of flexible shaft respectively, the end face of the stator is circumferentially machined with multiple stator tooths, space between two neighboring stator tooth is teeth groove, the upper surface of multiple stator tooths is linked as an annular surface, one layer of annular friction material with the curved face contact of stator tooth is equipped with the end face of the wheel rim of rotor, the other end of stator is equipped with ring-shaped piezo ceramic layer.The present invention is used for precision actuation.

Description

一种具有曲面定子齿的超低转速行波超声电机An ultra-low speed traveling wave ultrasonic motor with curved stator teeth

技术领域technical field

本发明涉及一种超声电机,具体涉及一种具有曲面定子齿的超低转速行波超声电机,属于压电驱动技术领域。The invention relates to an ultrasonic motor, in particular to an ultra-low speed traveling wave ultrasonic motor with curved stator teeth, and belongs to the field of piezoelectric drive technology.

背景技术Background technique

超声电机是一种利用压电材料的逆压电效应将电能转化为机械能的新型驱动器,其定子通常由压电陶瓷和金属弹性体组成,通过给压电陶瓷施加超声频率的交流电压实现定子弹性体中同频机械振动的激励,进而在定子驱动区域内的质点形成具有驱动作用的运动轨迹,通过定子和转子的摩擦耦合,实现转子宏观运动的输出。由于超声电机的驱动频率在超声频,其转速范围一般为几十转到数千转每分钟,通过调频、调相和调幅三种调速方式只能将超声电机的转速降低到几转每分钟,难以满足要求低速0.5r/min以下或更低驱动转速的场合,因此,研制出超低转速超声电机具有重要的应用价值。Ultrasonic motor is a new type of drive that uses the inverse piezoelectric effect of piezoelectric materials to convert electrical energy into mechanical energy. Its stator is usually composed of piezoelectric ceramics and metal elastomers. Stator elasticity is achieved by applying an AC voltage of ultrasonic frequency to piezoelectric ceramics. The excitation of mechanical vibration of the same frequency in the body, and then the particles in the driving area of the stator form a motion trajectory with a driving effect, and the output of the macroscopic motion of the rotor is realized through the friction coupling between the stator and the rotor. Since the driving frequency of the ultrasonic motor is at the ultrasonic frequency, its speed range is generally tens to thousands of revolutions per minute. The speed of the ultrasonic motor can only be reduced to a few revolutions per minute through frequency modulation, phase modulation and amplitude modulation. , It is difficult to meet the requirements of low-speed 0.5r/min or lower driving speed occasions, therefore, the development of ultra-low speed ultrasonic motor has important application value.

公开号为CN201742324U,公开日为2011年02月09日,专利名称为“旋转型行波超声电机”没有采用曲面齿结构,难以适用于超低速工况。公开号为CN202111634U,公开日为2012年01月11日,专利名称为“螺母调节预压力的旋转型行波超声电机”的发明专利在输出轴上加工有一段螺纹,通过旋转预紧螺母将固联在转轴上的转子向定子的方向拉紧,通过控制预紧螺母在转轴的中心线沿定子的方向移动距离控制定子与转子之间的预压力,其不足之处在于没有采用曲面齿结构,转速难以降低到超低转速范围。公开号为CN102904482A,公开日为2013年01月30日,专利名称为“一种超声电机超低转速控制方法”的发明专利采用间断式激励控制超声电机运行于超低转速,且具有良好的转速控制性能,其实现超低转速的方式是间断式驱动而不是连续驱动,无法避免由调频、调相和调幅调速方式对定子振动状态带来的不良影响。The publication number is CN201742324U, and the publication date is February 09, 2011. The patent name is "Rotary Traveling Wave Ultrasonic Motor", which does not use a curved tooth structure, so it is difficult to apply to ultra-low speed conditions. The publication number is CN202111634U, and the publication date is January 11, 2012. The invention patent titled "Rotary Traveling Wave Ultrasonic Motor with Nut Adjusting Preload" has a section of thread processed on the output shaft. The rotor connected to the rotating shaft is tensioned towards the stator, and the preload between the stator and the rotor is controlled by controlling the movement distance of the pre-tightening nut on the center line of the rotating shaft along the direction of the stator. It is difficult to reduce the speed to the ultra-low speed range. The publication number is CN102904482A, and the publication date is January 30, 2013. The invention patent titled "A Method for Ultra-low Speed Control of Ultrasonic Motors" uses intermittent excitation to control the operation of ultrasonic motors at ultra-low speeds, and has good speed Control performance, the way to achieve ultra-low speed is intermittent drive instead of continuous drive, which cannot avoid the adverse effects of frequency modulation, phase modulation and amplitude modulation on the vibration state of the stator.

发明内容Contents of the invention

本发明提供一种具有曲面定子齿的超低转速行波超声电机,为解决目前超声电机连续运行的转速难以降低到超低转速范围,以及无法避免由调频、调相和调幅调速方式对定子振动状态带来的不良影响的问题。The invention provides an ultra-low speed traveling wave ultrasonic motor with curved stator teeth, in order to solve the problem that the continuous operation speed of the current ultrasonic motor is difficult to reduce to the ultra-low speed range, and it is unavoidable that the frequency modulation, phase modulation and amplitude modulation speed regulation methods will affect the stator The problem of adverse effects brought about by the vibration state.

本发明为解决上述问题采取的技术方案是:一种具有曲面定子齿的超低转速行波超声电机,它包括柔性轴、上螺母、下螺母、基座、外壳、上角接触球轴承、下角接触球轴承、转子和定子;The technical solution adopted by the present invention to solve the above problems is: an ultra-low speed traveling wave ultrasonic motor with curved stator teeth, which includes a flexible shaft, an upper nut, a lower nut, a base, a housing, an upper angular contact ball bearing, a lower angle contact ball bearings, rotor and stator;

外壳和基座可拆卸连接,基座上安装有上角接触球轴承,外壳上安装有下角接触球轴承,柔性轴安装在上角接触球轴承和下角接触球轴承上,上角接触球轴承与下角接触球轴承之间布置有转子和定子,转子与外壳相邻设置并且安装在柔性轴上,定子安装于基座上,位于转子和定子之间的柔性轴的轴段上加工有柔性铰链结构;The casing and the base are detachably connected, the upper angular contact ball bearing is installed on the base, the lower angular contact ball bearing is installed on the casing, the flexible shaft is installed on the upper angular contact ball bearing and the lower angular contact ball bearing, the upper angular contact ball bearing is connected with the A rotor and a stator are arranged between the lower angular contact ball bearings, the rotor is arranged adjacent to the casing and installed on a flexible shaft, the stator is installed on the base, and a flexible hinge structure is processed on the shaft section of the flexible shaft between the rotor and the stator ;

上螺母和下螺母分别旋拧在柔性轴的上端和下端,所述定子的一端面沿周向加工有多个定子齿,相邻两个定子齿之间的空间为齿槽,多个定子齿的上表面连为一个环形曲面,环形曲面展开后呈曲面波形,曲面波形的幅值为行波波形振幅的0.2-50倍,转子的轮缘的端面上铺设有与定子齿的曲面接触的一层环形摩擦材料,定子的另一端面铺设有环形压电陶瓷层。The upper nut and the lower nut are respectively screwed on the upper end and the lower end of the flexible shaft. One end surface of the stator is processed with a plurality of stator teeth along the circumferential direction. The space between two adjacent stator teeth is a tooth groove, and the plurality of stator teeth The upper surface of the upper surface of the rotor is connected to form a ring-shaped curved surface. After the ring-shaped curved surface is unfolded, it becomes a curved surface waveform. The amplitude of the curved surface waveform is 0.2-50 times the amplitude of the traveling wave waveform. A layer of ring-shaped friction material, and the other end surface of the stator is laid with a ring-shaped piezoelectric ceramic layer.

本发明的有益效果是:本发明采用曲面状的定子齿来调节行波超声电机的转速,避免了由调频、调相和调幅调速方式对定子振动状态带来的不良影响,是一种行波超声电机的新型调速方式,可突破现有超声电机转速的调节极限,可以大幅度降低超声电机的转速,使超声电机具有超低转速运行的性能,本发明超声电机连续运行的转速可以降低到超低转速0.5r/min以下,可以在超低转速下连续运行,适用于需要超低速驱动的场合。由于曲面状的定子齿结构尺寸微小,不会对定子振型有较大的影响,同时发挥超声电机高频驱动的特性,保证超声电机的运行稳定性,真正实现超声电机的超低转速驱动性能。The beneficial effects of the present invention are: the present invention uses curved stator teeth to adjust the speed of the traveling wave ultrasonic motor, avoiding the adverse effects on the vibration state of the stator caused by frequency modulation, phase modulation and amplitude modulation, and is a practical The new speed regulation method of the wave ultrasonic motor can break through the adjustment limit of the existing ultrasonic motor speed, can greatly reduce the speed of the ultrasonic motor, and makes the ultrasonic motor have the performance of ultra-low speed operation, and the continuous operation speed of the ultrasonic motor of the present invention can be reduced When the ultra-low speed is below 0.5r/min, it can run continuously at ultra-low speed, and is suitable for occasions that require ultra-low speed drive. Due to the small size of the curved stator tooth structure, it will not have a great impact on the stator vibration shape. At the same time, the high-frequency drive characteristics of the ultrasonic motor can be used to ensure the operation stability of the ultrasonic motor and truly realize the ultra-low speed drive performance of the ultrasonic motor. .

附图说明Description of drawings

图1为本发明的整体结构示意图;Fig. 1 is the overall structure schematic diagram of the present invention;

图2为曲面状的定子结构示意图;Fig. 2 is a schematic diagram of a curved stator structure;

图3为一个实施例中定子展开后曲面波形为正弦波形局部示意图;Fig. 3 is a partial schematic diagram of a sinusoidal waveform after the stator is unfolded in an embodiment;

图4为另一个实施例中定子展开后曲面波形为余弦波形与方波组合示意图;Fig. 4 is a schematic diagram showing the combination of a cosine waveform and a square wave after the stator is unfolded in another embodiment;

图5为另一个实施例中定子展开后曲面波形为余弦波形和方波的叠加示意图;Fig. 5 is a superimposed schematic diagram of a cosine waveform and a square wave in which the curved surface waveform of the stator is unfolded in another embodiment;

图6为另一个实施例中定子齿的齿根部加工有微孔的局部示意图;Fig. 6 is a partial schematic diagram of micro-holes processed at the tooth root of the stator tooth in another embodiment;

图7为时间为零时三种波形状态图;Figure 7 is three waveform state diagrams when the time is zero;

图8为四分之一行波周期下的三种波形状态示意图;Figure 8 is a schematic diagram of three waveform states under a quarter traveling wave period;

图9为二分之一行波周期下的三种波形状态示意图;Fig. 9 is a schematic diagram of three waveform states under 1/2 traveling wave period;

图10为四分之三行波周期下的三种波形状态示意图。Fig. 10 is a schematic diagram of three waveform states under a three-quarter traveling wave period.

具体实施方式detailed description

下面结合附图并通过具体实施方式来进一步说明本发明的技术方案。The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and through specific implementation methods.

结合图1-图6说明,一种具有曲面定子齿的超低转速行波超声电机,它包括柔性轴1、上螺母2、下螺母6、基座7、外壳10、上角接触球轴承4、下角接触球轴承11、转子5和定子9;In conjunction with Figures 1-6, an ultra-low speed traveling wave ultrasonic motor with curved stator teeth includes a flexible shaft 1, an upper nut 2, a lower nut 6, a base 7, a housing 10, and an upper angular contact ball bearing 4 , lower angular contact ball bearing 11, rotor 5 and stator 9;

外壳10和基座7可拆卸连接,基座7上安装有上角接触球轴承4,外壳10上安装有下角接触球轴承11,柔性轴1安装在上角接触球轴承4和下角接触球轴承11上,上角接触球轴承4与下角接触球轴承11之间布置有转子5和定子9,转子5与外壳10相邻设置并且安装在柔性轴1上,定子9安装于基座7上,位于转子5和定子9之间的柔性轴1的轴段上加工有柔性铰链结构;The housing 10 and the base 7 are detachably connected, the upper angular contact ball bearing 4 is installed on the base 7, the lower angular contact ball bearing 11 is installed on the housing 10, and the flexible shaft 1 is installed on the upper angular contact ball bearing 4 and the lower angular contact ball bearing 11, a rotor 5 and a stator 9 are arranged between the upper angular contact ball bearing 4 and the lower angular contact ball bearing 11, the rotor 5 is arranged adjacent to the housing 10 and installed on the flexible shaft 1, and the stator 9 is installed on the base 7, A flexible hinge structure is processed on the shaft section of the flexible shaft 1 located between the rotor 5 and the stator 9;

上螺母2和下螺母6分别旋拧在柔性轴1的上端和下端,所述定子9的一端面沿周向加工有多个定子齿9-1,相邻两个定子齿9-1之间的空间为齿槽,多个定子齿9-1的上表面连为一个环形曲面,环形曲面展开后呈曲面波形,曲面波形的幅值为行波波形振幅的0.2-50倍,转子5的轮缘的端面上铺设有与定子齿的曲面接触的一层环形摩擦材料8,定子9的另一端面铺设有环形压电陶瓷层13。The upper nut 2 and the lower nut 6 are respectively screwed on the upper end and the lower end of the flexible shaft 1, and one end surface of the stator 9 is processed with a plurality of stator teeth 9-1 along the circumferential direction, between two adjacent stator teeth 9-1 The space in the space is a tooth slot, and the upper surfaces of a plurality of stator teeth 9-1 are connected to form an annular curved surface. After the annular curved surface is unfolded, it becomes a curved surface waveform. The amplitude of the curved surface waveform is 0.2-50 times the amplitude of the traveling wave waveform. The wheel of the rotor 5 A layer of annular friction material 8 in contact with the curved surface of the stator teeth is laid on the end surface of the stator 9 , and an annular piezoelectric ceramic layer 13 is laid on the other end surface of the stator 9 .

行波的振幅在微米级,定子齿的曲面波形的振幅也在微米级,曲面状定子齿结构不会对定子的振型有较大的改变,保证定子具有良好的振动特性。另外,相对于常用的调频调速方式,本项目的调速方式不影响定子的工作频率,可以使定子工作在最优的驱动频率下,实现电机转速的调节。采用角接触轴承消除轴承的游隙,提高了超声电机的运行稳定性,增强了电机的负载能力。柔性铰链结构在弯矩的作用下能够产生一定的变形,能够传递扭矩,免装配,无摩擦磨损。为了保证上角接触球轴承4和下角接触球轴承11牢靠稳定,柔性轴1的上端和下端分别旋拧上挡圈3和下挡圈12。The amplitude of the traveling wave is at the micron level, and the amplitude of the curved surface waveform of the stator teeth is also at the micron level. The curved stator tooth structure will not greatly change the mode shape of the stator, ensuring that the stator has good vibration characteristics. In addition, compared with the commonly used frequency modulation speed regulation method, the speed regulation method of this project does not affect the working frequency of the stator, and can make the stator work at the optimal driving frequency to realize the adjustment of the motor speed. Angular contact bearings are used to eliminate the clearance of the bearings, which improves the operation stability of the ultrasonic motor and enhances the load capacity of the motor. The flexible hinge structure can produce a certain deformation under the action of bending moment, can transmit torque, is free of assembly, and has no friction and wear. In order to ensure the firmness and stability of the upper angular contact ball bearing 4 and the lower angular contact ball bearing 11 , the upper end and the lower end of the flexible shaft 1 are respectively screwed with the upper retaining ring 3 and the lower retaining ring 12 .

参见图2说明,单个定子齿9-1的横截面为扇形。如此设置,扇形定子齿保证了与定子整体结构的匹配,定子齿的宽度接近相同,相邻齿槽宽度接近相同。更好底实现电机转速的调节。Referring to Fig. 2, the cross section of a single stator tooth 9-1 is fan-shaped. In this way, the fan-shaped stator teeth ensure the matching with the overall structure of the stator, the widths of the stator teeth are almost the same, and the widths of adjacent tooth slots are almost the same. It is better to realize the adjustment of the motor speed.

根据不同的低转速需求,通过不同形式的曲面波形与行波波形的叠加调整摩擦界面输出力的大小,进而获得超声电机不同的转速,曲面波形的形式有以下3种:According to different low-speed requirements, the output force of the friction interface is adjusted by superimposing different forms of curved surface waveforms and traveling wave waveforms, and then different speeds of ultrasonic motors are obtained. There are three types of curved surface waveforms:

参见图3说明,所述曲面波形为正弦波形或余弦波形。这种形式适合超低转速的工况。Referring to FIG. 3 for illustration, the curved surface waveform is a sine waveform or a cosine waveform. This form is suitable for ultra-low speed working conditions.

参见图4说明,所述曲面波形为正弦波形和方波组合或余弦波形和方波的组合。这种形式适合转速稍高的工况。Referring to FIG. 4, the curved surface waveform is a combination of a sine waveform and a square wave or a combination of a cosine waveform and a square wave. This form is suitable for working conditions with a slightly higher speed.

参见图5说明,所述曲面波形为余弦波形和方波的叠加。这种形式适合转速稍高的工况且有助于改善电机的启动性能。Referring to FIG. 5 for illustration, the curved surface waveform is a superposition of a cosine waveform and a square wave. This form is suitable for working conditions with a slightly higher speed and helps to improve the starting performance of the motor.

参见图6说明,为了保证行波的稳定性,定子齿9-1的齿根部加工有微孔9-2,微孔9-2的孔径由曲面波形的最大幅值向最小幅值方向逐渐减小。定子齿根部加工孔径不相同的微孔,以调节定子中性层的位置,保证由压电陶瓷逆压电效应产生的行波不发生畸变。Referring to Fig. 6, in order to ensure the stability of the traveling wave, the root of the stator tooth 9-1 is processed with a microhole 9-2, and the diameter of the microhole 9-2 gradually decreases from the maximum amplitude to the minimum amplitude of the curved surface waveform. small. Microholes with different diameters are processed at the root of the stator tooth to adjust the position of the neutral layer of the stator and ensure that the traveling wave generated by the inverse piezoelectric effect of piezoelectric ceramics is not distorted.

参见图1说明,为了提高电机的运转稳定性,柔性铰链结构主要由柔性轴1径向上加工的N条整圈圆弧槽1-1构成,其中N≥1。采用柔性铰链结构,实现转子与定子接触的自适应调节,柔性铰链的尺寸由给定工况要求计算得出,可以避免由于柔性轴两端固定带来转子与定子的接触不均,使定子和转子的接触可以根据接触情况进行自适应调节,增加了电机的运转稳定性。Referring to Fig. 1, in order to improve the running stability of the motor, the flexible hinge structure is mainly composed of N circular arc grooves 1-1 processed radially on the flexible shaft 1, where N≥1. The flexible hinge structure is used to realize the self-adaptive adjustment of the contact between the rotor and the stator. The size of the flexible hinge is calculated according to the requirements of the given working conditions, which can avoid the uneven contact between the rotor and the stator due to the fixed ends of the flexible shaft. The contact of the rotor can be adaptively adjusted according to the contact situation, which increases the running stability of the motor.

参见图1说明,为了提高电机再启动能力,提高电机的使用说明,环形摩擦材料8采用含油摩擦材料,该含油摩擦材料包括以重量百分比计的如下:Referring to Fig. 1, in order to improve the restartability of the motor and improve the use instructions of the motor, the annular friction material 8 adopts oil-containing friction material, and the oil-containing friction material includes the following in weight percentage:

聚合物基体:45%-80%;Polymer matrix: 45%-80%;

摩擦调节剂:10%-30%;Friction modifier: 10%-30%;

碳微米管:1%-30%;Carbon microtubes: 1%-30%;

所述的聚合物基体为聚四氟乙烯与聚苯酯、聚酰亚胺或双马来酰胺任意一种的组合;The polymer matrix is any combination of polytetrafluoroethylene and polyphenylester, polyimide or bismaleimide;

所述的摩擦调节剂为铜粉、镍粉、氧化铜、二硫化钼、石墨、纳米金刚石粉、碳纤维、玻璃纤维和稀土粉中的一种或几种的组合。The friction modifier is one or a combination of copper powder, nickel powder, copper oxide, molybdenum disulfide, graphite, nano-diamond powder, carbon fiber, glass fiber and rare earth powder.

碳微米管为含油载体,可以精确控制摩擦材料的含油量,并提高其含油保持率,不限制含油材料的基体材料种类,可制备出适合不同工况下超声电机用摩擦材料;该摩擦材料还使超声电机的运转平稳、输出力矩大,有效避免经过长期存储后定转子的粘结;提高了超声电机的运转稳定性,增强了电机的负载能力。摩擦系数为0.07-0.18,磨损率为1.0×10-8mm3/Nm-2×10-8mm3/Nm。The carbon microtube is an oil-containing carrier, which can precisely control the oil content of the friction material and improve its oil retention rate. The type of matrix material of the oil-containing material is not limited, and the friction material suitable for ultrasonic motors under different working conditions can be prepared; the friction material is also The operation of the ultrasonic motor is stable, the output torque is large, and the bonding of the stator and rotor after long-term storage is effectively avoided; the operation stability of the ultrasonic motor is improved, and the load capacity of the motor is enhanced. The friction coefficient is 0.07-0.18, and the wear rate is 1.0×10 -8 mm 3 /Nm-2×10 -8 mm 3 /Nm.

工作机理working mechanism

以定子齿的曲面波形的振幅等于行波振幅为例,分析曲面定子齿和转子接触界面在一个周期内的运动和受力,如图7所示。W、W1和W2分别为定子表面的实际波形、行波波形和定子齿的曲面波形。其中定子齿的曲面波形W2是固定的,不随时间的变化而改变,行波波形W1随时间的沿x轴的正向传递,定子表面实际波形W是由行波波形W1与定子齿的曲面波形W2叠加而来。行波波形决定定子齿表面质点的运动;实际波形决定定子齿面变形的形状,进而决定定子和转子的实际接触状态。图7为时间t=0时,三个波形的状态。纵坐标的位移单位是mm,此时,定子齿的曲面波形与行波波形重合,实际波形振幅增大,接触区内压强升高,实际接触区变小(意味着粘滞区减少),接触界面的摩擦驱动力增大。图8为t=T/4时,三个波形的状态,T为行波的周期。此时,行波波形与定子齿的曲面波形不再重合,实际波形决定着定子和转子的接触,在实际接触区内存在驱动区和反驱动区,两个区域内的摩擦力方向相反。驱动区的范围变小,接触界面的摩擦驱动力变小。图9为t=T/2时,三个波形的状态。此时,行波波形与定子齿的曲面波形相互抵消,定子表面的实际波形为平面,此时在一个波长内的摩擦驱动力为0。图10为t=3T/4时,三个波形的状态,与图8所示的状态相似。Taking the amplitude of the curved surface waveform of the stator tooth equal to the amplitude of the traveling wave as an example, the motion and force of the contact interface between the curved stator tooth and the rotor in one cycle are analyzed, as shown in Figure 7. W, W 1 and W 2 are the actual waveform of the stator surface, the traveling wave waveform and the curved surface waveform of the stator teeth, respectively. The surface waveform W 2 of the stator tooth is fixed and does not change with time. The traveling wave waveform W 1 passes along the positive direction of the x-axis with time. The actual waveform W of the stator surface is composed of the traveling wave waveform W 1 and the stator tooth The surface waveform W 2 is superimposed. The traveling wave waveform determines the motion of the stator tooth surface particles; the actual waveform determines the deformation shape of the stator tooth surface, and then determines the actual contact state between the stator and the rotor. Fig. 7 shows the states of the three waveforms at time t=0. The displacement unit of the ordinate is mm. At this time, the curved surface waveform of the stator tooth coincides with the traveling wave waveform, the actual waveform amplitude increases, the pressure in the contact area increases, and the actual contact area becomes smaller (meaning that the viscous area decreases), and the contact The frictional driving force of the interface increases. Figure 8 shows the states of the three waveforms when t=T/4, where T is the period of the traveling wave. At this time, the traveling wave waveform and the curved surface waveform of the stator teeth no longer overlap, and the actual waveform determines the contact between the stator and the rotor. In the actual contact area, there is a driving area and a counter-driving area, and the friction direction in the two areas is opposite. The range of the driving zone becomes smaller, and the frictional driving force of the contact interface becomes smaller. Figure 9 shows the states of the three waveforms when t=T/2. At this time, the traveling wave waveform and the curved surface waveform of the stator tooth cancel each other, and the actual waveform on the stator surface is a plane, and the friction driving force within one wavelength is 0 at this time. Figure 10 shows the state of the three waveforms when t=3T/4, which is similar to the state shown in Figure 8 .

从上述分析可见,通过改变定子的定子齿的环形曲面结构,可以控制摩擦驱动力的大小,进而控制超声电机的转速。还可通过继续增大定子齿的曲面波形的幅值,使在某些时间段内定子产生与转子转动方向相反的摩擦力,进一步降低电机的转速,还可通过设计两种以上波形(如余弦波形和方波)的叠加对电机的转速和力矩进行调节。以往的研究中,由于超声电机驱动频率位于超声频段,其转速较快,通过传统调频、调相和调幅的调速方式难以实现超低速的要求,本项目提出的通过定子曲面齿结构的调速方式能够很好的克服这一问题。由于行波的振幅在微米级,曲面波形的振幅也在微米级,曲面状的定子齿结构不会对定子的振型有较大的改变,保证定子具有良好的振动特性。另外,相对于常用的调频调速方式,本发明的调速方式不影响定子的工作频率,可以使定子工作在最优的驱动频率下,实现电机转速的调节。It can be seen from the above analysis that by changing the annular surface structure of the stator teeth of the stator, the magnitude of the friction driving force can be controlled, and then the speed of the ultrasonic motor can be controlled. It is also possible to further reduce the speed of the motor by continuing to increase the amplitude of the curved surface waveform of the stator teeth, so that the stator generates friction in the opposite direction to the rotor in a certain period of time, and it is also possible to design two or more waveforms (such as cosine The superposition of waveform and square wave) adjusts the speed and torque of the motor. In the previous research, because the driving frequency of the ultrasonic motor is in the ultrasonic frequency band, its speed is relatively fast, and it is difficult to achieve the ultra-low speed requirement through the traditional frequency modulation, phase modulation and amplitude modulation speed regulation methods. The speed regulation through the stator surface tooth structure proposed in this project way to overcome this problem. Since the amplitude of the traveling wave is at the micron level, the amplitude of the curved surface waveform is also at the micron level. The curved stator tooth structure will not greatly change the mode shape of the stator, ensuring that the stator has good vibration characteristics. In addition, compared with the commonly used frequency modulation speed regulation method, the speed regulation method of the present invention does not affect the working frequency of the stator, and can make the stator work at the optimal driving frequency to realize the adjustment of the motor speed.

本发明已以较佳实施案例揭示如上,然而并非用以限定本发明,任何熟悉本专业的技术人员,在不脱离本发明技术方案范围内,当可以利用上述揭示的结构及技术内容做出些许的更动或修饰为等同变化的等效实施案例,但是凡是未脱离本发明技术方案的内容,依据本发明的技术实质对以上实施案例所做的任何简单修改、等同变化与修饰,均仍属本发明技术方案范围。The present invention has been disclosed above with preferred implementation examples, but it is not intended to limit the present invention. Any skilled person who is familiar with the profession can use the structure and technical content disclosed above to make some The changes or modifications are equivalent implementation cases with equivalent changes, but any simple modifications, equivalent changes and modifications made to the above implementation cases according to the technical essence of the present invention without departing from the content of the technical solutions of the present invention are still The scope of the technical solutions of the present invention.

Claims (8)

1. a kind of ultralow rotating speed travelling wave supersonic motor with curved surface stator tooth, it is characterised in that:It include flexible shaft (1), on Nut (2), lower nut (6), pedestal (7), shell (10), upper angular contact ball bearing (4), lower angular contact ball bearing (11), rotor And stator (9) (5);
Shell (10) and pedestal (7) are detachably connected, and are provided with angular contact ball bearing (4), shell (10) and are pacified on pedestal (7) Equipped with lower angular contact ball bearing (11), flexible shaft (1) is arranged on upper angular contact ball bearing (4) and lower angular contact ball bearing (11) On, be disposed with rotor (5) and stator (9) between upper angular contact ball bearing (4) and lower angular contact ball bearing (11), rotor (5) with Shell (10) is disposed adjacent and on flexible shaft (1), stator (9) is installed on pedestal (7), positioned at rotor (5) and calmly Flexible hinge structure is machined with the shaft part of flexible shaft (1) between sub (9);
It is characterized in that:Top nut (2) and lower nut (6) are screwed in the top and bottom of flexible shaft (1), the stator respectively (9) space that end face is circumferentially machined between multiple stator tooths (9-1), two neighboring stator tooth (9-1) is teeth groove, many The upper surface of individual stator tooth (9-1) is linked as an annular surface, waveform in curved surface, the amplitude of curved surface waveform after annular surface expansion For 0.2-50 times of traveling-wave waveform amplitude, one layer with the curved face contact of stator tooth is equipped with the end face of the wheel rim of rotor (5) Annular friction material (8), the other end of stator (9) is equipped with ring-shaped piezo ceramic layer (13).
2. a kind of ultralow rotating speed travelling wave supersonic motor with curved surface stator tooth according to claim 1, it is characterised in that:It is single The cross section of individual stator tooth (9-1) is sector.
3. a kind of ultralow rotating speed travelling wave supersonic motor with curved surface stator tooth according to claim 2, it is characterised in that:Institute Curved surface waveform is stated for sinusoidal waveform or cosine waveform.
4. a kind of ultralow rotating speed travelling wave supersonic motor with curved surface stator tooth according to claim 2, it is characterised in that:Institute It is sinusoidal waveform and square wave combination or the combination of cosine waveform and square wave to state curved surface waveform.
5. a kind of ultralow rotating speed travelling wave supersonic motor with curved surface stator tooth according to claim 2, it is characterised in that:Institute State superposition of the curved surface waveform for cosine waveform and square wave.
6. a kind of ultralow rotating speed travelling wave supersonic motor with curved surface stator tooth according to claim 3, it is characterised in that:It is fixed The root portion of sub- tooth (9-1) is machined with micropore (9-2), the aperture of micropore (9-2) from curved surface waveform maximum amplitude to most small size Value direction is gradually reduced.
7. a kind of ultralow rotating speed traveling-wave ultrasonic with curved surface stator tooth according to any one of claim 1 to 6 claim Motor, it is characterised in that:Main whole circle arc groove (1-1) structure of N bars radially processed by flexible shaft (1) of flexible hinge structure Into wherein N >=1.
8. a kind of ultralow rotating speed travelling wave supersonic motor with curved surface stator tooth according to claim 7, it is characterised in that:Ring Shape friction material (8) is oil-containing friction material, and the oil-containing friction material includes by weight percentage as follows:
Polymeric matrix:45%-80%;
Friction modifier:10%-30%;
Carbon micron tube:1%-30%;
Described polymeric matrix is polytetrafluoroethylene (PTFE) and polybenzoate, polyimides or double maleic amides combinations of any one;
Described friction modifier is copper powder, nickel powder, cupric oxide, molybdenum disulfide, graphite, nano-diamond powder, carbon fiber, glass One or more of combinations in fiber and rare earth powder.
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