CN107105372A - Electroacoustic transducer - Google Patents
Electroacoustic transducer Download PDFInfo
- Publication number
- CN107105372A CN107105372A CN201610099042.4A CN201610099042A CN107105372A CN 107105372 A CN107105372 A CN 107105372A CN 201610099042 A CN201610099042 A CN 201610099042A CN 107105372 A CN107105372 A CN 107105372A
- Authority
- CN
- China
- Prior art keywords
- electroacoustic transducer
- vibration section
- layer
- piezoelectricity conversion
- conversion layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006243 chemical reaction Methods 0.000 claims abstract description 39
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 25
- 239000000463 material Substances 0.000 claims description 22
- 230000005611 electricity Effects 0.000 description 4
- 239000012212 insulator Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000010354 integration Effects 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000708 deep reactive-ion etching Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R9/00—Transducers of moving-coil, moving-strip, or moving-wire type
- H04R9/06—Loudspeakers
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Piezo-Electric Transducers For Audible Bands (AREA)
Abstract
The present invention provides a kind of electroacoustic transducer, including pedestal and multiple vibration sections.Each vibration section includes piezoelectricity conversion layer and with two connection ends and free end.These connection ends are connected to pedestal, and these free ends are separated each other.These piezoelectricity conversion layers are suitable to receive electric signal and deform, and corresponding sound wave is produced to drive these vibration sections to vibrate.These vibration sections are suitable to receive sound wave and vibrate, and corresponding electric signal is produced to drive these piezoelectricity conversion layers to deform.The present invention can make electroacoustic transducer have good electroacoustic conversion quality.
Description
Technical field
The present invention relates to a kind of electroacoustic transducer, more particularly to a kind of electroacoustic transducer of piezoelectric type.
Background technology
Electroacoustic transducer (electro-acoustic transducer) can be using audios such as microphones (microphone)
Input equipment, and can be applied to the voice outputs such as loudspeaker (speaker).Turned with the electroacoustic of piezoelectric type
For parallel operation, apply electric signal is made in the upper/lower electrode of piezoelectric using the piezo-electric effect of piezoelectric
It is deformed, and is used the corresponding vibrating membrane vibration of drive and produced corresponding sound wave.Conversely, can also apply
Sound wave deforms corresponding piezoelectric material vibration in vibrating membrane, with the piezo-electric effect using piezoelectric
Produce corresponding electric signal.
Consumption electronic products, such as intelligent mobile phone (smart phone), notebook computer (notebook
Computer), tablet personal computer (tablet PC) etc., is typically all equipped with microphone and loudspeaker, and in consumer
Under the trend for pursuing high-quality and multifunction consumption electronic products, in order to which the market for improving product is competing
Power is striven, industrial circle all wishes to develop and manufacture the electricity for being applied to microphone and loudspeaker using advanced technology
Acoustical convertor.Therefore, the electroacoustic for how effectively lifting sound input/output device changes efficiency into electroacoustic turn
Parallel operation researches and develops the important issue in field.
The content of the invention
The present invention provides a kind of electroacoustic transducer, with good electroacoustic conversion quality.
The electroacoustic transducer of the present invention includes pedestal and multiple vibration sections.Each vibration section includes piezoelectricity conversion layer
And with two connection ends and free end.These connection ends are connected to pedestal, and these free ends are separated each other.
These piezoelectricity conversion layers are suitable to receive electric signal and deform, and correspondence is produced to drive these vibration sections to vibrate
Sound wave.These vibration sections are suitable to receive sound wave and vibrate, and are produced with driving these piezoelectricity conversion layers to deform
Raw corresponding electric signal.
In one embodiment of this invention, above-mentioned pedestal has opening, and these vibration sections are located in opening,
These connection ends are connected to the inner edge of opening.
In one embodiment of this invention, there is breach between above-mentioned each vibration section and the inner edge of opening,
Breach is located between two connection ends.
In one embodiment of this invention, above-mentioned pedestal has multiple extensions, the connection of these extensions
It is pointed in the inner edge of opening and respectively these breach and is located away from these vibration sections.
In one embodiment of this invention, above-mentioned each vibration section also includes bearing bed, and piezoelectricity conversion layer is matched somebody with somebody
It is placed on bearing bed, piezoelectricity conversion layer is adapted to bearing bed deformation to drive vibration section to vibrate, and shakes
Dynamic portion is suitable to vibration to drive piezoelectricity conversion layer to deform relative to bearing bed.
In one embodiment of this invention, the material of above-mentioned bearing bed is non-piezoelectric material.
In one embodiment of this invention, above-mentioned each piezoelectricity conversion layer includes upper electrode layer, piezoelectric
Layer and lower electrode layer, piezoelectric material layer are configured between upper electrode layer and lower electrode layer.
In one embodiment of this invention, above-mentioned upper electrode layer is pointed to connection end.
Based on above-mentioned, in the electroacoustic transducer of the present invention, each vibration section is except the company by its two connection end
Pedestal is connected to, with more free end.Thereby, after the pedestal of integration and vibration section are produced out,
Unexpected internal stress in its overall structure can be released by the free end.So as to when input electricity
When signal drives vibration section to vibrate and produces corresponding sound wave to piezoelectricity conversion layer, not planted agent described in reason
Power and influence sound wave export the degree of accuracy.In addition, driving piezoelectricity conversion layer to become when vibration section receives sound wave
Shape and when producing corresponding electric signal, not internal stress described in reason and influence the degree of accuracy of electric signal output.
Consequently, it is possible to can make electroacoustic transducer that there is good electroacoustic conversion quality.
For the features described above and advantage of the present invention can be become apparent, special embodiment below, and coordinate
Accompanying drawing is described in detail below.
Brief description of the drawings
Fig. 1 is the top view of the electroacoustic transducer of one embodiment of the invention；
Fig. 2 is profile of Fig. 1 electroacoustic transducer along I-I lines；
Fig. 3 is the top view of the electroacoustic transducer of another embodiment of the present invention；
Fig. 4 A to Fig. 4 C are the manufacturing flow charts of Fig. 1 electroacoustic transducer.
Reference：
50：Base material
100、200：Electroacoustic transducer
110、210：Pedestal
112、212：Opening
114th, 214 extension
120、220：Vibration section
120a、220a：Connection end
120b、220b：Free end
122：Piezoelectricity conversion layer
122a、222a：Upper electrode layer
122b：Piezoelectric material layer
122c：Lower electrode layer
124：Bearing bed
E3、E4、E3’、E4’：Electrode
N、N’：Breach
T、T’：Groove
Embodiment
Fig. 1 is the top view of the electroacoustic transducer of one embodiment of the invention.Fig. 2 is Fig. 1 electroacoustic conversion
Profile of the device along I-I lines.Fig. 1 and Fig. 2 is refer to, the electroacoustic transducer 100 of the present embodiment is, for example,
Electroacoustic transducer produced by micro electronmechanical processing procedure, can be applied to the audio inputs such as microphone (microphone)
The voice outputs such as equipment, loudspeaker (speaker) or ultrasound sensors (ultrasound transducer).
Electroacoustic transducer 100 includes pedestal 110 and multiple vibration sections 120 (being shown as four).Each vibration section 120
Including piezoelectricity conversion layer 122 (being shown in Fig. 2).These piezoelectricity conversion layers 122 are suitable to receive electric signal and become
Shape, corresponding sound wave is produced to drive these vibration sections 120 to vibrate.In addition, these vibration sections 120
Vibrated suitable for receiving sound wave, corresponding electric signal is produced to drive these piezoelectricity conversion layers 122 to deform.
In the present embodiment, each vibration section 120 has two connection end 120a and free end 120b.These
Connection end 120a is connected to pedestal 110, and these free ends 120b is separated each other.Under this configuration mode,
It is unexpected in its overall structure after the pedestal 110 of integration and vibration section 120 are produced out
Internal stress can be released by the free end 120b.So as to when input electrical signal to piezoelectricity conversion layer
122 and when driving the vibration section 120 to vibrate and produce corresponding sound wave, not internal stress described in reason and influence
The degree of accuracy of sound wave output.In addition, driving piezoelectricity conversion layer 122 to become when vibration section 120 receives sound wave
Shape and when producing corresponding electric signal, not internal stress described in reason and influence the degree of accuracy of electric signal output.
Consequently, it is possible to can make electroacoustic transducer 100 that there is good electroacoustic conversion quality.
In the present embodiment, pedestal 110 has opening 112, these vibration sections 120 as shown in Figure 1
In in opening 112, these connection ends 120a is connected to the inner edge of opening 112.Each vibration section 120 is with opening
There is breach N, breach N to be located between the inner edge of mouth 112 between two connection end 120a, make vibration section
120 turn into the vibrational structure that two ends are supported by the two connection end 120a separated each other.Pedestal 110 has
There are multiple extensions 114 (being shown as four), these extensions 114 are connected to the inner edge of opening 112 and divided
These breach N is not pointed to and is located away from these vibration sections 120.Two companies are covered by extension 114
The breach N between the 120a of end is met, sound wave can be avoided to be lost by breach N.
In addition, each vibration section 120 of the present embodiment also includes bearing bed 124 as shown in Figure 2, piezoelectricity turns
Layer 122 is changed to be configured on bearing bed 124, piezoelectricity conversion layer 122 be suitable to receive electric signal and relative to holding
The dilatation of carrier layer 124 is to drive vibration section 120 to vibrate, and vibration section 120 is suitable to receive sound wave and shake
Move to drive piezoelectricity conversion layer 122 relative to the dilatation of bearing bed 124, piezoelectricity conversion layer 122 is made according to this
Produce electric signal.Bearing bed 124 is, for example, brilliant (silicon on insulator, the SOI) form of silicon-on-insulator
Structure sheaf (device layer) or be made up of other appropriate non-piezoelectric materials, so the present invention not as
Limit.Pedestal 110 is also, for example, the substrate layer of brilliant (silicon on insulator, the SOI) form of silicon-on-insulator
(handle layer) or it is made up of other suitable materials, the present invention is any limitation as not to this.
More specifically, each piezoelectricity conversion layer 122 of the present embodiment includes upper electrode layer 122a, piezoresistive material
Bed of material 122b and lower electrode layer 122c, piezoelectric material layer 122b are configured at upper electrode layer 122a and bottom electrode
Between layer 122c.Upper electrode layer 122a material is, for example, but is not limited to golden (Au), upper electrode layer 122a
It is pointed to connection end 120a.Lower electrode layer 122c material is, for example, but is not limited to platinum (Pt).In addition,
Upper electrode layer 122a and lower electrode layer 122c further extend to pedestal 110 and had respectively at pedestal 110
Electrode E3 and electrode E4.Electroacoustic transducer 100 can be by upper electrode layer 122a, upper electrode layer 122a
Electrode E3, lower electrode layer 122c electrode E4 and input or export electric signal.
Fig. 3 is the top view of the electroacoustic transducer of another embodiment of the present invention.In Fig. 3 electroacoustic transducer
In 200, pedestal 210, opening 212, extension 214, vibration section 220, connection end 220a, freedom
Hold 220b, upper electrode layer 222a, electrode E3 ', electrode E4 ', breach N ', groove T ' configuration and work
With the similar Fig. 1 of mode pedestal 110, opening 112, extension 114, vibration section 120, connection end 120a,
Free end 120b, upper electrode layer 122a, electrode E3, electrode E4, breach N, groove T configuration with
The mode of action, is repeated no more in this.The difference of electroacoustic transducer 200 and electroacoustic transducer 100 be in,
Breach N ' and extension 214 are shaped as semicircle rather than are triangle as shown in Figure 1.In other implementations
In example, breach and extension can be other suitable shapes, and the present invention is any limitation as not to this.
Its manufacturing process will be illustrated by taking electroacoustic transducer 100 shown in Fig. 1 as an example below.Fig. 4 A extremely scheme
4C is the manufacturing flow chart of Fig. 1 electroacoustic transducer, and it corresponds to Fig. 1 electroacoustic transducer 100 along I-I
The section of line.First, lower electrode layer 122c and piezoelectric material layer are formed on base material 50 as shown in Figure 4 A
122b.Then, upper electrode layer 122a, Top electrode are formed on piezoelectric material layer 122b as shown in Figure 4 B
Layer 122a, piezoelectric material layer 122b and lower electrode layer 122c constitute piezoelectricity conversion layer 122, and Top electrode
Layer 122a and lower electrode layer 122c has electrode E3 and electrode E4, upper electrode layer 122a, upper electricity respectively
Pole layer 122a electrode E3, lower electrode layer 122c electrode E4 are for example, coplanar.Exist as shown in Figure 4 C
Base material 50 and the formation groove T of piezoelectricity conversion layer 122, and part thereof 50 is removed as shown in Figure 2, with area
It is separated out vibration section 120 and extension 114.E.g. ditch is formed by dry ecthing (dry etching) processing procedure
Groove T, makes groove T that there is smaller width to avoid sound wave from being lost by groove T.So the present invention not with
This is limited, and (ion milling) processing procedure or deep reactive ion etch (deep reactive can be also ground by ion
Ion etch, DRIE) processing procedure forms groove T.
In summary, in the electroacoustic transducer of the present invention, each vibration section is except the company by its two connection end
Pedestal is connected to, with more free end.Thereby, after the pedestal of integration and vibration section are produced out,
Unexpected internal stress in its overall structure can be released by the free end.So as to when input electricity
When signal drives vibration section to vibrate and produces corresponding sound wave to piezoelectricity conversion layer, not planted agent described in reason
Power and influence sound wave export the degree of accuracy.In addition, driving piezoelectricity conversion layer to become when vibration section receives sound wave
Shape and when producing corresponding electric signal, not internal stress described in reason and influence the degree of accuracy of electric signal output.
Consequently, it is possible to can make electroacoustic transducer that there is good electroacoustic conversion quality.
Although the present invention is disclosed as above with embodiment, so it is not limited to the present invention, any affiliated
Those of ordinary skill in technical field, it is without departing from the spirit and scope of the present invention, a little when that can make
Change with retouching, therefore protection scope of the present invention ought be defined depending on appended claims confining spectrum.
Claims (8)
1. a kind of electroacoustic transducer, it is characterised in that including：
Pedestal；And
Multiple vibration sections, each vibration section includes piezoelectricity conversion layer and with two connection ends and free end,
The multiple connection end is connected to the pedestal, and the multiple free end is separated each other, the multiple piezoelectricity
Conversion layer is suitable to receive electric signal and deform, and corresponding sound is produced to drive the multiple vibration section to vibrate
Ripple, and the multiple vibration section is suitable to receive sound wave and vibrate, to drive the multiple piezoelectricity conversion layer to become
Shape and produce corresponding electric signal.
2. electroacoustic transducer according to claim 1, it is characterised in that the pedestal, which has, to be opened
Mouthful, the multiple vibration section is located in the opening, and the multiple connection end is connected to the interior of the opening
Edge.
3. electroacoustic transducer according to claim 2, it is characterised in that each vibration section and institute
Stating has breach between the inner edge of opening, and the breach is located between two connection end.
4. electroacoustic transducer according to claim 3, it is characterised in that the pedestal has multiple
Extension, the multiple extension is connected to the inner edge of the opening and is pointed to the multiple breach respectively
And it is located away from the multiple vibration section.
5. electroacoustic transducer according to claim 1, it is characterised in that also wrap each vibration section
Bearing bed is included, the piezoelectricity conversion layer is configured on the bearing bed, the piezoelectricity conversion layer is suitable to relative
In bearing bed deformation to drive the vibration section to vibrate, and the vibration section is suitable to vibration to drive
Piezoelectricity conversion layer is stated to deform relative to the bearing bed.
6. electroacoustic transducer according to claim 5, it is characterised in that the material of the bearing bed
For non-piezoelectric material.
7. electroacoustic transducer according to claim 1, it is characterised in that each piezoelectricity conversion layer
Including upper electrode layer, piezoelectric material layer and lower electrode layer, the piezoelectric material layer is configured at the Top electrode
Between layer and the lower electrode layer.
8. electroacoustic transducer according to claim 7, it is characterised in that the upper electrode layer contraposition
In the connection end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610099042.4A CN107105372A (en) | 2016-02-23 | 2016-02-23 | Electroacoustic transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610099042.4A CN107105372A (en) | 2016-02-23 | 2016-02-23 | Electroacoustic transducer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107105372A true CN107105372A (en) | 2017-08-29 |
Family
ID=59658538
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610099042.4A Pending CN107105372A (en) | 2016-02-23 | 2016-02-23 | Electroacoustic transducer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107105372A (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1829395A (en) * | 2005-03-01 | 2006-09-06 | 株式会社电装 | Ultrasonic sensor having transmission device and reception device of ultrasonic wave |
| CN103460721A (en) * | 2011-03-31 | 2013-12-18 | 巴克-卡琳公司 | Acoustic transducer with gap-controlling geometry and method of manufacturing an acoustic transducer |
| US20150350792A1 (en) * | 2008-06-30 | 2015-12-03 | Karl Grosh | Piezoelectric mems microphone |
-
2016
- 2016-02-23 CN CN201610099042.4A patent/CN107105372A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1829395A (en) * | 2005-03-01 | 2006-09-06 | 株式会社电装 | Ultrasonic sensor having transmission device and reception device of ultrasonic wave |
| US20150350792A1 (en) * | 2008-06-30 | 2015-12-03 | Karl Grosh | Piezoelectric mems microphone |
| CN103460721A (en) * | 2011-03-31 | 2013-12-18 | 巴克-卡琳公司 | Acoustic transducer with gap-controlling geometry and method of manufacturing an acoustic transducer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4249778B2 (en) | Ultra-small microphone having a leaf spring structure, speaker, speech recognition device using the same, speech synthesis device | |
| KR101562339B1 (en) | Piezoelectric microspeaker and its fabrication method | |
| KR101520070B1 (en) | Piezoelectric microspeaker and its fabrication method | |
| EP1398298A3 (en) | Process of making an all-silicon microphone | |
| JP2011055474A (en) | Piezoelectric micro speaker having piston diaphragm and method of manufacturing the same | |
| WO2005055119A3 (en) | Composite piezoelectric apparatus and method | |
| CN108419189A (en) | Piezoelectric sensor | |
| US20100150381A1 (en) | Micro-speaker and manufacturing method thereof | |
| CN107431863A (en) | Piezoelectric speaker | |
| US8858447B2 (en) | Ultrasonic transducer and method of manufacturing the same | |
| US20180035190A1 (en) | Mems device and process | |
| CN101931850A (en) | Microspeaker and its manufacturing method | |
| Cheng et al. | Piezoelectric MEMS microspeaker with suspension springs and dual electrode to enhance sound pressure level | |
| US9756428B1 (en) | Electro-acoustic transducer | |
| JP2012029107A (en) | Electronic apparatus | |
| CN107105376B (en) | Electroacoustic transducer | |
| CN107105372A (en) | Electroacoustic transducer | |
| US20180376251A1 (en) | Electro-acoustic transducer | |
| TWI637639B (en) | Electro-acoustic transducer | |
| CN109328464A (en) | bone conduction device | |
| CN206620295U (en) | MEMS sonic transducers | |
| TWI595789B (en) | Electro-acoustic transducer | |
| CN112689227B (en) | Piezoelectric MEMS loudspeaker imitating cochlea spiral vibrating membrane and preparation method | |
| US20190100429A1 (en) | Mems devices and processes | |
| CN109121049A (en) | Electroacoustic transducer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170829 |
|
| WD01 | Invention patent application deemed withdrawn after publication |