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CN107101974B - A Novel Three-Step Lensless Coherent Diffraction Imaging Method - Google Patents

A Novel Three-Step Lensless Coherent Diffraction Imaging Method Download PDF

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CN107101974B
CN107101974B CN201710530777.2A CN201710530777A CN107101974B CN 107101974 B CN107101974 B CN 107101974B CN 201710530777 A CN201710530777 A CN 201710530777A CN 107101974 B CN107101974 B CN 107101974B
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李拓
刘丹
刘辉
代饶
张芝琳
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Abstract

一种新型三步无透镜相干衍射成像的方法。应用经准直和扩束的激光束照明待测物体,分别记录下在CCD前端无平行平晶、有一块平行平晶和有两块平行平晶的三幅衍射图样;用本发明所提出的滤波与相干衍射衍射成像相结合的算法对采集的三幅衍射图样进行处理,重建待测样品的的复振幅图像。该发明有效的解决了传统的相干衍射成像方法存在的需多次移动CCD或待测样品的瓶颈问题,同时也解决在移动过程的随机误差以及实验的可操作性问题。本发明实验操作简单快捷,可操作性强,以及相干衍射成像算法与滤波的有效结合,提高了收敛速度与样本的恢复效果。

A novel three-step lensless method for coherent diffraction imaging. Use the collimated and expanded laser beam to illuminate the object to be tested, and record three diffraction patterns without parallel flat crystals, one parallel flat crystal and two parallel flat crystals at the front end of the CCD respectively; The algorithm combining filtering and coherent diffraction diffraction imaging processes the collected three diffraction patterns to reconstruct the complex amplitude image of the sample to be tested. The invention effectively solves the bottleneck problem of the traditional coherent diffraction imaging method that needs to move the CCD or the sample to be tested many times, and also solves the random error in the moving process and the operability of the experiment. The invention has simple and fast experimental operation, strong operability, and effective combination of coherent diffraction imaging algorithm and filtering, which improves the convergence speed and the recovery effect of the sample.

Description

一种新型三步无透镜相干衍射成像方法A Novel Three-Step Lensless Coherent Diffraction Imaging Method

技术领域technical field

本发明涉及光学衍射成像技术领域,具体涉及一种新型三步无透镜相干衍射成像方法。The invention relates to the technical field of optical diffraction imaging, in particular to a novel three-step lensless coherent diffraction imaging method.

背景技术Background technique

无透镜相干衍射成像近年来已经有了许多的发展,该方法技术一般采用迭代算法。从物体的衍射强度图样中重现出物体的复振幅信息而不需要参考光,具有非常宽广的波长适用范围,已经广泛运用于X射线和电子束的无透镜相干衍射成像中。参见(Opt.Lett.31,3095-3097(2006);J.Opt.Soc.Am.A25,416-422(2008);Nat.Phys.,4,394-398(2008);Appl.Opt.21,2758-2769(1982);J.Opt.Soc.Am.A 23,1179-1200(2006))由一束相干光照射样品后,在CCD上接收到由样品产生的衍射图样。为了获得更加精确的振幅与相位信息,通过不断的改变CCD与样品的相对距离以获得更多不同衍射距离的衍射图样。参见(Opt.Lett.30(8),833-5(2005))但上这些技术方案,它们有如下技术缺陷:需要获得多个不同距离的衍射面,在实施过程中采取移动样品或CCD的方式来改变距离,这种方法需要不断重复的改变样品或CCD的摆放位置,需要大量的重复工作,与此同时引入了直接影响实验结果的随机误差,所获得采样图样精度不高,且需要过采样,实验操作周期长以及可操作性弱,成像的时效性很差。There have been many developments in lensless coherent diffraction imaging in recent years, and this method generally adopts an iterative algorithm. The complex amplitude information of the object can be reconstructed from the diffraction intensity pattern of the object without the need for reference light. See (Opt. Lett. 31, 3095-3097 (2006); J. Opt. Soc. Am. A25, 416-422 (2008); Nat. Phys., 4, 394-398 (2008); Appl. Opt. 21, 2758-2769 (1982); J. Opt. Soc. Am. A 23, 1179-1200 (2006)) After irradiating the sample with a beam of coherent light, the diffraction pattern produced by the sample was received on the CCD. In order to obtain more accurate amplitude and phase information, more diffraction patterns with different diffraction distances can be obtained by continuously changing the relative distance between the CCD and the sample. See (Opt.Lett.30(8), 833-5(2005)), but these technical solutions have the following technical defects: it is necessary to obtain a plurality of diffractive surfaces with different distances, and during the implementation process, a moving sample or CCD is used. This method needs to repeatedly change the position of the sample or CCD, which requires a lot of repeated work. At the same time, it introduces random errors that directly affect the experimental results. The obtained sampling pattern is not accurate, and requires Oversampling, long experimental operation period and weak operability, and poor timeliness of imaging.

发明内容SUMMARY OF THE INVENTION

为了克服现有技术的上述问题,本发明的目的是提供一种新型三步无透镜相干衍射成像方法。本发明提高成了像系统的时效性与可操作性,简化实施操作的步骤,改进需要通过改变CCD或样品的摆放位置来改变它们之间相对距离的方法,克服大量改变相对距离的重复性工作,降低由于实验操作所带的随机误差,避免过采样,能对复振幅型物体做到快速且成像质量好的恢复重建,使具体实验操作简单易实现。In order to overcome the above problems of the prior art, the purpose of the present invention is to provide a novel three-step lensless coherent diffraction imaging method. The invention improves the timeliness and operability of the imaging system, simplifies the steps of implementing operations, improves the method that needs to change the relative distance between the CCD or the sample by changing the placement position, and overcomes the repetition of a large number of changes in the relative distance. It can reduce the random error caused by the experimental operation, avoid oversampling, and can restore and reconstruct the complex amplitude object quickly and with good imaging quality, so that the specific experimental operation is simple and easy to implement.

本发明的目的可通过以下技术方案实现,一种新型三步无透镜相干衍射成像的方法,包括以下步骤:The object of the present invention can be achieved through the following technical solutions, a novel three-step lensless coherent diffraction imaging method, comprising the following steps:

1)搭建三步无透镜相干衍射成像系统的光路,加入待测样品;1) Build the optical path of the three-step lensless coherent diffraction imaging system, and add the sample to be tested;

2)以一束可见平行光束照射待测样品,利用CCD采集到第一幅衍射图样;2) Irradiate the sample to be tested with a visible parallel beam, and use the CCD to collect the first diffraction pattern;

3)在待测样品与CCD之间加入第一块平行平晶,利用CCD采集到第二幅衍射图样;3) Add the first parallel flat crystal between the sample to be tested and the CCD, and use the CCD to collect the second diffraction pattern;

4)在待测样品与CCD之间加入第二块平行平晶,利用CCD采集到第三幅衍射图样;4) Add a second parallel flat crystal between the sample to be tested and the CCD, and use the CCD to collect the third diffraction pattern;

5)利用步骤2)~4)得到的三幅不同距离的衍射图样,以相干衍射算法与滤波的有效融合的方法,对待测样品的图像振幅与相位恢复重建,得到无透镜的相干衍射成像图像;5) Using the three diffraction patterns at different distances obtained in steps 2) to 4), the image amplitude and phase of the sample to be tested are restored and reconstructed by an effective fusion method of coherent diffraction algorithm and filtering, and a lensless coherent diffraction imaging image is obtained ;

其中,所述步骤5)中的相干衍射算法与滤波的有效融合的方法,物平面上的初始的复振幅分布为g0(x0,y0)任意的复振幅分布。Wherein, in the effective fusion method of the coherent diffraction algorithm and filtering in the step 5), the initial complex amplitude distribution on the object plane is an arbitrary complex amplitude distribution of g 0 (x 0 , y 0 ).

所述待测样品为纯振幅型,第k+1次迭代后物平面上的复振幅分布如公式(10)所示:The sample to be tested is of pure amplitude type, and the complex amplitude distribution on the object plane after the k+1 iteration is shown in formula (10):

g(k+1)(x0,y0)=|g(k)(x0,y0)| (10)。g (k+1) (x 0 , y 0 )=|g (k) (x 0 , y 0 )| (10).

所述待测样品为为复振幅型,第k+1次迭代后物平面上的复振幅分布如公式(11)所示:The sample to be tested is of complex amplitude type, and the complex amplitude distribution on the object plane after the k+1 iteration is shown in formula (11):

g(k+1)(x0,y0)=g(k)(x0,y0) (11)。g (k+1) (x 0 , y 0 )=g (k) (x 0 , y 0 ) (11).

所述g(k)(x0,y0)表示第k次迭代获得的物函数的复振幅分布,g(k)(x0,y0)由公式(1)-公式(9)迭代得到:The g (k) (x 0 , y 0 ) represents the complex amplitude distribution of the object function obtained by the k-th iteration, and g (k) (x 0 , y 0 ) is iteratively obtained by formula (1)-formula (9) :

Figure GDA0002321178890000021
Figure GDA0002321178890000021

Figure GDA0002321178890000023
Figure GDA0002321178890000023

Figure GDA0002321178890000024
Figure GDA0002321178890000024

Figure GDA0002321178890000025
Figure GDA0002321178890000025

Figure GDA0002321178890000026
Figure GDA0002321178890000026

式中,FrT表示菲涅耳衍射正变换,IFrT表示菲涅耳衍射逆变换,

Figure GDA0002321178890000032
分别为第1、第2、第3衍射平面上第k次迭代后的复振幅分布,|F1(x1,y1)|、|F2(x2,y2)|、|F3(x3,y3)|分别为在第1、第2、第3衍射平面上实际测得的振幅分布,φ1(x,y)、φ2(x,y)、φ3(x,y)分别表示第1、第2、第3衍射平面上第k次迭代后的相位分布,G1 (k)'(x1,y1)、G2 (k)'(x2,y2)、G3 (k)'(x3,y3)分别为第1、第2、第3衍射平面上第k次迭代振幅部分经过校正的复振幅分布。其中(1)-(9)为一个循环,初始k=0,随着迭代次数k的增加,直至输出理想的物体的复振幅重建图样。In the formula, FrT represents the forward transformation of Fresnel diffraction, IFrT represents the inverse transformation of Fresnel diffraction,
Figure GDA0002321178890000032
are the complex amplitude distributions after the k-th iteration on the 1st, 2nd, and 3rd diffraction planes, respectively, |F 1 (x 1 , y 1 )|, |F 2 (x 2 , y 2 )|, |F 3 (x 3 , y 3 )| are the amplitude distributions actually measured on the first, second, and third diffraction planes, respectively, φ 1 (x, y), φ 2 (x, y), φ 3 (x, y) represents the phase distribution after the k-th iteration on the 1st, 2nd, and 3rd diffraction planes, respectively, G 1 (k) '(x 1 , y 1 ), G 2 (k) '(x 2 , y 2 ) and G 3 (k) '(x 3 , y 3 ) are the corrected complex amplitude distributions of the k-th iteration amplitude part on the first, second, and third diffraction planes, respectively. Among them (1)-(9) is a cycle, the initial k=0, with the increase of the number of iterations k, until the ideal complex amplitude reconstruction pattern of the object is output.

所述无透镜相干衍射成像系统的光路,包括氦氖激光器、第一平行平晶和第二平行平晶,氦氖激光器的光源产生激光后,光线经准直扩束系统扩束后,平行光依次经待测样品所处的第一衍射平面、第一平行平晶所处的第二衍射平面、以及第二平行平晶所处的第三衍射平面后,由CCD图像传感器记录成像图像、并将成像图像传输给计算机,计算机对CCD图像传感器记录的成像图像进行处理。The optical path of the lensless coherent diffraction imaging system includes a helium-neon laser, a first parallel flat crystal and a second parallel flat crystal. After passing through the first diffraction plane where the sample to be tested is located, the second diffraction plane where the first parallel flat crystal is located, and the third diffraction plane where the second parallel planar crystal is located, the imaging image is recorded by the CCD image sensor, and the image is recorded by the CCD image sensor. The imaging image is transmitted to the computer, and the computer processes the imaging image recorded by the CCD image sensor.

所述氦氖激光器的光源产生波长为632nm的红光。The light source of the helium-neon laser produces red light with a wavelength of 632 nm.

本发明与现有的技术方案相比存在以下有益效果:Compared with the existing technical scheme, the present invention has the following beneficial effects:

1)将“想要得到多距离衍射面上的不同衍射图样,而需重复的移动CCD或移动待测样品的相对距离”这样的实验操作方式进行了根本的变比,使得实验实施性得到质的提升。1) The experimental operation method of “repeatedly moving the CCD or moving the relative distance of the sample to be tested” is fundamentally changed to obtain different diffraction patterns on the multi-distance diffraction surface, so that the experimental implementation can be qualitatively improved. improvement.

2)通过插入平行平晶来获得不同距离的衍射面上的衍射图样,避免在移动过程所带来的随机误差,实验操作时效性很大幅提升,增强实验的可操作性。2) Diffraction patterns on diffractive surfaces at different distances are obtained by inserting parallel flat crystals to avoid random errors caused by the moving process, greatly improving the timeliness of experimental operations and enhancing the operability of experiments.

3)在算法中引入了滤波处理,将滤波和相干衍射算法进行了有效的融合,使得在图像恢复过程中,收敛速度与精确度大幅度提升。3) The filtering process is introduced into the algorithm, and the filtering and the coherent diffraction algorithm are effectively integrated, so that the convergence speed and accuracy are greatly improved during the image restoration process.

4)所述的待测样品,可以为纯振幅或复振幅型样品,且对复振幅样品的恢复效果更具有优势。4) The sample to be tested can be a pure amplitude sample or a complex amplitude sample, and the recovery effect of the complex amplitude sample is more advantageous.

由于采取本发明提出的依次加入平行平晶的方法,使得人为引起的随机误差减小,不需要过采样,利用三幅衍射图样,完成对样品的图样的恢复重建,采用本发明的所提出的三步无透镜相干衍射成像系统,大大的简化实验操作步骤。Due to the method of adding parallel flat crystals in sequence proposed by the present invention, the random errors caused by human beings are reduced, no oversampling is required, and three diffraction patterns are used to complete the restoration and reconstruction of the pattern of the sample. The three-step lensless coherent diffraction imaging system greatly simplifies the experimental operation steps.

附图说明Description of drawings

图1是本发明的新型三步无透镜相干衍射成像方法原理图;1 is a schematic diagram of a novel three-step lensless coherent diffraction imaging method of the present invention;

图2是本发明的新型三步无透镜相干衍射成像方法的光路原理图;2 is a schematic diagram of the optical path of the novel three-step lensless coherent diffraction imaging method of the present invention;

图3是本发明的无平行平晶时图像采集器CCD接收第一幅衍射图样;Fig. 3 is that the image collector CCD of the present invention receives the first diffraction pattern when there is no parallel flat crystal;

图4是本发明插入一块平行平晶后图像采集器CCD接收第二幅衍射图样;Fig. 4 is that after the present invention inserts a parallel flat crystal, the image collector CCD receives the second diffraction pattern;

图5是本发明插入两块平行平晶后图像采集器CCD接收第三幅衍射图样;Fig. 5 is that after the present invention inserts two parallel flat crystals, the image collector CCD receives the third diffraction pattern;

图6是本发明对纯振幅型样品的仿真实验系列图;Fig. 6 is the simulation experiment series diagram of the present invention to pure amplitude type sample;

图7是本发明对复振幅型样品的仿真实验系列图。FIG. 7 is a series of diagrams of simulation experiments of the present invention on complex-amplitude type samples.

图中,1为氦氖激光器;2为准直扩束系统;3为待测样品;4为第一平行平晶;5为第二平行平晶;6为CCD图像传感器;7为计算机。In the figure, 1 is a helium-neon laser; 2 is a collimated beam expansion system; 3 is a sample to be tested; 4 is a first parallel flat crystal; 5 is a second parallel flat crystal; 6 is a CCD image sensor; 7 is a computer.

具体实施方式Detailed ways

为了更好的理解本发明的具体内容及实施过程,下面将结合说明书附图,对实施新型三步无透镜相干衍射成像方法的具体过程进行详细说明。In order to better understand the specific content and implementation process of the present invention, the specific process of implementing the novel three-step lensless coherent diffraction imaging method will be described in detail below with reference to the accompanying drawings.

参照图1~图5,一种新型三部无透镜相干衍射成像方法的光路系统,包括氦氖激光器、第一平行平晶和第二平行平晶,氦氖激光器的光源产生激光后,光线经准直扩束系统扩束后,平行光依次经待测样品所处的第一衍射平面、第一平行平晶所处的第二衍射平面、以及第二平行平晶所处的第三衍射平面后,由CCD图像传感器记录成像图像、并将成像图像传输给计算机,计算机对CCD图像传感器记录的成像图像进行处理。Referring to Figures 1 to 5, a new optical path system of a three-part lensless coherent diffraction imaging method includes a He-Ne laser, a first parallel flat crystal and a second parallel flat crystal. After the light source of the He-Ne laser generates laser light, the light passes After the collimating beam expanding system expands the beam, the parallel light passes through the first diffraction plane where the sample to be tested is located, the second diffraction plane where the first parallel flat crystal is located, and the third diffraction plane where the second parallel planar crystal is located. Then, the imaging image is recorded by the CCD image sensor, and the imaging image is transmitted to the computer, and the computer processes the imaging image recorded by the CCD image sensor.

参照图2,搭建实验光路图,使用,氦氖激光器波长为632nm的红光,安装准直扩束系统,然后摆放待测样品,分别准备纯振幅型与复振幅型的样品以便在实验中可以形成样品对比,相隔距离Z0后摆放CCD图像传感器,并将CCD图像传感器连接至计算机,并且准备实验所需要的两块平行平晶、以便在实验过程中使用。Referring to Figure 2, build the experimental optical path diagram, use the red light with the wavelength of 632nm of the He-Ne laser, install the collimated beam expander system, and then place the sample to be tested, and prepare pure-amplitude and complex-amplitude samples separately for use in the experiment. A sample comparison can be formed, a CCD image sensor is placed after a distance Z 0 , and the CCD image sensor is connected to the computer, and two parallel flat crystals required for the experiment are prepared for use in the experiment.

参照图3,搭建好光路图后,第一步,打开图像采集器CCD采集第一幅样品衍射图样,并保存。Referring to Figure 3, after building the optical path diagram, the first step is to open the image collector CCD to collect the first sample diffraction pattern and save it.

如图4所示,第二步,在与样品的的距离为Z1处插入第一块平行平晶,CCD采集第二幅衍射图样,并保存。As shown in Figure 4, in the second step, insert a first parallel flat crystal at a distance Z 1 from the sample, and the CCD collects the second diffraction pattern and saves it.

如图5所示,第三步,在与平行平晶的距离为Z2处插入第二块平行平晶,CCD采集第三幅衍射图样,并保存。按上述过程实施具体的操作步骤,然后利用计算机对采集的到图样进行处理。As shown in Figure 5, in the third step, insert a second parallel flat crystal at a distance Z 2 from the parallel flat crystal, and the CCD collects the third diffraction pattern and saves it. The specific operation steps are implemented according to the above process, and then the collected patterns are processed by the computer.

本发明实施所使用的算法:设

Figure GDA0002321178890000051
分别为第1、第2、第3衍射平面上第k次迭代后的复振幅分布,|F1(x1,y1)|、|F2(x2,y2)|、|F3(x3,y3)|分别为在第1、第2、第3衍射平面上实际测得的振幅分布,φ1(x,y)、φ2(x,y)、φ3(x,y)分别表示第1、第2、第3衍射平面上第k次迭代后的相位分布,G1 (k)'(x1,y1)、G2 (k)'(x2,y2)、G3 (k)'(x3,y3)分别为第1、第2、第3衍射平面上第k次迭代振幅部分经过校正的复振幅分布。其中(1)-(9)为一个循环,初始k=0,随着迭代次数k的增加,直至输出理想的物体的复振幅重建图样:The algorithm used in the implementation of the present invention: let
Figure GDA0002321178890000051
are the complex amplitude distributions after the k-th iteration on the 1st, 2nd, and 3rd diffraction planes, respectively, |F 1 (x 1 , y 1 )|, |F 2 (x 2 , y 2 )|, |F 3 (x 3 , y 3 )| are the amplitude distributions actually measured on the first, second, and third diffraction planes, respectively, φ 1 (x, y), φ 2 (x, y), φ 3 (x, y) represents the phase distribution after the k-th iteration on the 1st, 2nd, and 3rd diffraction planes, respectively, G 1 (k) '(x 1 , y 1 ), G 2 (k) '(x 2 , y 2 ) and G 3 (k) '(x 3 , y 3 ) are the corrected complex amplitude distributions of the k-th iteration amplitude part on the first, second, and third diffraction planes, respectively. Among them (1)-(9) is a cycle, the initial k=0, with the increase of the number of iterations k, until the complex amplitude reconstruction pattern of the ideal object is output:

Figure GDA0002321178890000052
Figure GDA0002321178890000052

Figure GDA0002321178890000053
Figure GDA0002321178890000053

Figure GDA0002321178890000054
Figure GDA0002321178890000054

Figure GDA0002321178890000056
Figure GDA0002321178890000056

Figure GDA0002321178890000058
Figure GDA0002321178890000058

Figure GDA00023211788900000510
Figure GDA00023211788900000510

若物体为纯振幅型,则g(k+1)(x0,y0)=|g(k)(x0,y0)|,若物体为复振幅型,则g(k+1)(x0,y0)=g(k)(x0,y0)。If the object is of pure amplitude type, then g (k+1) (x 0, y 0 )=|g (k) (x 0, y 0 )|, if the object is of complex amplitude type, then g (k+1) (x 0 , y 0 )=g (k) (x 0 , y 0 ).

一束激光经过准直扩束系统后,在探针后面放置待测样品,在与样品有一段距离的位置上安装CCD,然后保持CCD与样品的距离位置不变,分步骤的在CCD与待测样品之间,采用本发明提出的技术方法:依次加入两块平行平晶,在CCD上接收到第一幅,第二幅,第三幅,三幅样品衍射图样,最终实现对样品恢复重建。After a laser beam passes through the collimating beam expander system, place the sample to be tested behind the probe, install the CCD at a distance from the sample, and then keep the distance between the CCD and the sample unchanged, step by step between the CCD and the sample to be tested Between the test samples, the technical method proposed by the present invention is adopted: two parallel flat crystals are added in sequence, and the first, second, third and three sample diffraction patterns are received on the CCD, and the sample is finally restored and reconstructed. .

实施例1Example 1

纯振幅型样品的成像效果如图6所示,图6的系列图中,6a为待测的纯振幅型图样,6b为距离样品300mm处的第1衍射平面上的衍射图样,6c为距离第1衍射平面50mm的第2衍射平面上衍射图样,6d为距离第2衍射平面50mm处的第3衍射平面上衍射图样,6e为三步衍射迭代算法迭代100次的恢复结果。6a和6e的相关系数为0.9991,说明该方法可以对纯振幅物体实现良好的成像效果。The imaging effect of the pure amplitude sample is shown in Figure 6. In the series of Figure 6, 6a is the pure amplitude pattern to be measured, 6b is the diffraction pattern on the first diffraction plane at a distance of 300mm from the sample, and 6c is the distance from the first diffraction pattern. 1 is the diffraction pattern on the second diffraction plane at a distance of 50 mm from the diffraction plane, 6d is the diffraction pattern on the third diffraction plane at a distance of 50 mm from the second diffraction plane, and 6e is the recovery result of 100 iterations of the three-step diffraction iterative algorithm. The correlation coefficient between 6a and 6e is 0.9991, indicating that this method can achieve good imaging effect for pure amplitude objects.

实施例2Example 2

复振幅型样品的成像效果如图7所示,图7的系列图中,7a为原复振幅型物体的振幅部分,7b为原复振幅型物体的相位部分,7c为距离物体300mm处的第1衍射平面上衍射图样,7d为距离第1衍射平面50mm处的第2衍射平面上衍射图样,7e为距离第2衍射平面50mm处的第3衍射平面上衍射图样,7f和7g分别为三步相干衍射算法迭代100次重建的振幅部分和相位部分。7a和7f的相关系数为0.9982,7b和7g的相关系数为0.9763。说明该方法可以对复振幅物体实现良好的成像效果。The imaging effect of the complex amplitude type sample is shown in Figure 7. In the series of pictures in Figure 7, 7a is the amplitude part of the original complex amplitude type object, 7b is the phase part of the original complex amplitude type object, and 7c is the first 300mm away from the object. 1 The diffraction pattern on the diffraction plane, 7d is the diffraction pattern on the second diffraction plane at a distance of 50mm from the first diffraction plane, 7e is the diffraction pattern on the third diffraction plane at a distance of 50mm from the second diffraction plane, 7f and 7g are three steps respectively The coherent diffraction algorithm iterates 100 times the amplitude and phase components of the reconstruction. The correlation coefficient of 7a and 7f was 0.9982, and the correlation coefficient of 7b and 7g was 0.9763. It shows that this method can achieve good imaging effect for complex amplitude objects.

上述方法和实施例都是通过本发明提出的新型三步无透镜相干衍射成像方法,通过依次插入平行平晶的方法获取不同距离的三幅衍射图样,最终实现对待测样品的振幅和位相信息恢复重建的目的。本发明的实施不局限于上述具体实施方案。只要是通过插入平行平晶获取不同衍射距离的衍射成像方法、装置、和系统,后者采用本发明所提出的恢复算法,均属于发明的保护范围。The above-mentioned methods and embodiments all use the novel three-step lensless coherent diffraction imaging method proposed by the present invention, and obtain three diffraction patterns at different distances by inserting parallel flat crystals in sequence, and finally realize the recovery of the amplitude and phase information of the sample to be tested. purpose of reconstruction. The practice of the present invention is not limited to the specific embodiments described above. As long as it is a diffraction imaging method, device, and system that obtains different diffraction distances by inserting a parallel flat crystal, the latter adopts the recovery algorithm proposed by the present invention, and belongs to the protection scope of the invention.

Claims (5)

1.一种新型三步无透镜相干衍射成像的方法,包括以下步骤:1. A novel three-step lensless coherent diffraction imaging method, comprising the following steps: 1)搭建三步无透镜相干衍射成像系统的光路,加入待测样品;1) Build the optical path of the three-step lensless coherent diffraction imaging system, and add the sample to be tested; 2)以一束可见平行光束照射待测样品,利用CCD采集到第一幅衍射图样;2) Irradiate the sample to be tested with a visible parallel beam, and use the CCD to collect the first diffraction pattern; 3)在待测样品与CCD之间加入第一块平行平晶,利用CCD采集到第二幅衍射图样;3) Add the first parallel flat crystal between the sample to be tested and the CCD, and use the CCD to collect the second diffraction pattern; 4)在待测样品与CCD之间加入第二块平行平晶,利用CCD采集到第三幅衍射图样;4) Add a second parallel flat crystal between the sample to be tested and the CCD, and use the CCD to collect the third diffraction pattern; 5)利用步骤2)~4)得到的三幅不同距离的衍射图样,以相干衍射算法与滤波的有效融合的方法,对待测样品的图像振幅与相位恢复重建,得到无透镜的相干衍射成像图像;5) Using the three diffraction patterns at different distances obtained in steps 2) to 4), the image amplitude and phase of the sample to be tested are restored and reconstructed by an effective fusion method of coherent diffraction algorithm and filtering, and a lensless coherent diffraction imaging image is obtained ; 其中,所述步骤5)中的相干衍射算法与滤波的有效融合的方法,物平面上的初始的复振幅分布为g0(x0,y0)任意的复振幅分布。Wherein, in the effective fusion method of the coherent diffraction algorithm and filtering in the step 5), the initial complex amplitude distribution on the object plane is an arbitrary complex amplitude distribution of g 0 (x 0 , y 0 ). 2.根据权利要求1所述的一种新型三步无透镜相干衍射成像的方法,其特征在于,g(k)(x0,y0)表示物平面上的复振幅分布,由任意选取的物平面上初始复振幅分布公式g(0)(x0,y0),代入(1)~(9)迭代k次后计算得到迭代得到(初始迭代次数k=0):2. The method for a novel three-step lensless coherent diffraction imaging according to claim 1, wherein g (k) (x 0 , y 0 ) represents the complex amplitude distribution on the object plane, which is arbitrarily selected by The initial complex amplitude distribution formula g (0) (x 0 , y 0 ) on the object plane is substituted into (1) to (9) after k iterations to obtain iteratively (initial iteration number k=0):
Figure FDA0002321178880000011
Figure FDA0002321178880000011
Figure FDA0002321178880000012
Figure FDA0002321178880000012
Figure FDA0002321178880000013
Figure FDA0002321178880000013
Figure FDA0002321178880000016
Figure FDA0002321178880000016
Figure FDA0002321178880000018
Figure FDA0002321178880000018
Figure FDA0002321178880000021
Figure FDA0002321178880000021
式中,FrT表示菲涅耳衍射正变换,IFrT表示菲涅耳衍射逆变换,
Figure FDA0002321178880000022
分别为第1、第2、第3衍射平面上第k次迭代后的复振幅分布,|F1(x1,y1)|、|F2(x2,y2)|、|F3(x3,y3)|分别为在第1、第2、第3衍射平面上实际测得的振幅分布,φ1(x,y)、φ2(x,y)、φ3(x,y)分别表示第1、第2、第3衍射平面上第k次迭代后的相位分布,G1 (k)'(x1,y1)、G2 (k)'(x2,y2)、G3 (k)'(x3,y3)分别为第1、第2、第3衍射平面上第k次迭代振幅部分经过校正的复振幅分布。其中(1)-(9)为一个循环,初始k=0,随着迭代次数k的增加,直至输出理想的物体的复振幅重建图样。
In the formula, FrT represents the forward transformation of Fresnel diffraction, IFrT represents the inverse transformation of Fresnel diffraction,
Figure FDA0002321178880000022
are the complex amplitude distributions after the k-th iteration on the 1st, 2nd, and 3rd diffraction planes, respectively, |F 1 (x 1 , y 1 )|, |F 2 (x 2 , y 2 )|, |F 3 (x 3 , y 3 )| are the amplitude distributions actually measured on the first, second, and third diffraction planes, respectively, φ 1 (x, y), φ 2 (x, y), φ 3 (x, y) represents the phase distribution after the k-th iteration on the 1st, 2nd, and 3rd diffraction planes, respectively, G 1 (k) '(x 1 , y 1 ), G 2 (k) '(x 2 , y 2 ) and G 3 (k) '(x 3 , y 3 ) are the corrected complex amplitude distributions of the k-th iteration amplitude part on the first, second, and third diffraction planes, respectively. Among them (1)-(9) is a cycle, the initial k=0, with the increase of the number of iterations k, until the ideal complex amplitude reconstruction pattern of the object is output.
3.根据权利要求2所述的一种新型三步无透镜相干衍射成像的方法,其特征在于,所述待测样品为纯振幅型,第k+1次迭代后物平面上的复振幅分布如公式(10)所示:3. A novel three-step lensless coherent diffraction imaging method according to claim 2, wherein the sample to be tested is of pure amplitude type, and the complex amplitude distribution on the object plane after the k+1th iteration As shown in formula (10): g(k+1)(x0,y0)=|g(k)(x0,y0)| (10)。g (k+1) (x 0 , y 0 )=|g (k) (x 0 , y 0 )| (10). 4.根据权利要求2所述的一种新型三步无透镜相干衍射成像的方法,其特征在于,所述待测样品为为复振幅型,第k+1次迭代后物平面上的复振幅分布如公式(11)所示:4 . A novel three-step lensless coherent diffraction imaging method according to claim 2 , wherein the sample to be tested is a complex amplitude type, and the complex amplitude on the object plane after the k+1 iteration The distribution is shown in formula (11): g(k+1)(x0,y0)=g(k)(x0,y0) (11)。g (k+1) (x 0 , y 0 )=g (k) (x 0 , y 0 ) (11). 5.根据权利要求1所述的一种新型三步无透镜相干衍射成像的方法,其特征在于,所述无透镜相干衍射成像系统的光路,包括激光器(1)、第一平行平晶(4)和第二平行平晶(5),氦氖激光器(1)的光源产生激光后,光线经准直扩束系统(2)扩束后,平行光依次经待测样品(3)、第一平行平晶(4)、以及第二平行平晶(5)所处的第三衍射平面后,由CCD图像传感器(6)记录成像图像、并将成像图像传输给计算机(7),计算机(7)对CCD图像传感器(6)记录的成像图像进行处理。5. A novel three-step lensless coherent diffraction imaging method according to claim 1, wherein the optical path of the lensless coherent diffraction imaging system comprises a laser (1), a first parallel flat crystal (4). ) and the second parallel flat crystal (5), after the light source of the helium-neon laser (1) generates laser light, after the light is expanded by the collimating beam expanding system (2), the parallel light passes through the sample to be tested (3), the first After the parallel flat crystal (4) and the third diffraction plane where the second parallel flat crystal (5) is located, the imaging image is recorded by the CCD image sensor (6), and the imaging image is transmitted to the computer (7), and the computer (7 ) processes the imaged images recorded by the CCD image sensor (6).
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