CN107063432B - Optical means and device a kind of while that measure ultrasonic wave direction, the sound intensity and frequency - Google Patents

Abstract

The invention discloses an optical method and device for simultaneously measuring the direction, sound intensity and frequency of ultrasonic waves. The invention illuminates the dynamic ultrasonic phase grating formed by the ultrasonic wave in the liquid medium by illuminating a laser beam perpendicular to the propagation direction of the ultrasonic wave, and the diffracted light forms the diffraction spectrum of the dynamic ultrasonic phase grating on the image plane of the lens; The detector is set at the image plane of the lens, and records the direction of the diffraction spectrum, the first-order diffraction light intensity and the distance between adjacent diffraction spectra; through data processing, the propagation direction, sound intensity and frequency of the ultrasonic wave to be measured are obtained. The device includes a light source, an optical fiber, a lens, a lens holder, a flat glass, a hybrid photodiode array detector, a detector holder, a driving and scanning amplifying circuit, and a computer; The device is arranged on the imaging surface of the lens, and the driving and scanning amplifying circuits are respectively connected with the detector and the computer.

Description

An optical method and device for simultaneously measuring ultrasonic direction, sound intensity and frequency

technical field

The invention belongs to the technical field of optical measurement and measurement, and particularly relates to an optical method and device for simultaneously measuring the direction, sound intensity and frequency of ultrasonic waves.

Background technique

The detection of ultrasonic propagation direction, sound intensity and frequency in liquid has important practical value for underwater sound source localization and quantitative analysis of sound source signals. At present, the positioning device for the propagation direction of the underwater sound source and the device for measuring the sound intensity are mainly based on electrical and electromagnetic methods, such as moving coil type, electrostatic type, variable reluctance type, magnetostrictive type and piezoelectric type. such as hydrophones or ultrasonic detectors. Ultrasound causes changes in the relevant electrical quantities in the circuit, and then the sound pressure or sound intensity is measured according to the relationship between the electrical quantities and sound pressure. Measurement methods or single devices based on electrical or electromagnetics are difficult to determine the direction of the sound source. Multi-directional comprehensive detection or array devices (devices) are required to determine the specific direction and position of the sound source; Low sensitivity and poor impact resistance are insufficient. In addition, the method of measuring ultrasonic sound pressure or sound intensity based on optical methods is mainly based on the principle of optical interference, and its structure is generally complex, often requiring double beam splitting or multiple beams, and the cost is high, and it is often difficult for a single device to quickly judge the sound in real time. source direction. The underwater sonar fiber array detection system is a relatively practical underwater sound intensity measurement and positioning system.

The patent application with the application number of 201510860847.1 and the invention titled "An Optical Method and Device for Measuring Ultrasonic Sound Pressure and Sound Intensity and its Application" is based on the principle of light diffraction and uses 0-order diffraction to propose a method for measuring sound intensity in water, but The ultrasonic propagation direction and frequency cannot be measured at the same time, and the device structure is relatively complex.

SUMMARY OF THE INVENTION

The primary purpose of the present invention is to overcome the shortcomings and deficiencies of the prior art, and to provide an optical method for simultaneously measuring the direction, sound intensity and frequency of ultrasonic waves.

Another object of the present invention is to provide a device for simultaneously measuring the direction, sound intensity and frequency of ultrasonic waves, which is designed according to the optical method for measuring the direction, sound intensity and frequency of ultrasonic waves.

Another object of the present invention is to provide the application of the device for simultaneously measuring the direction, intensity and frequency of ultrasonic waves.

The object of the present invention is achieved through the following technical solutions: an optical method for simultaneously measuring ultrasonic direction, sound intensity and frequency, comprising the steps:

(1) illuminating the dynamic ultrasonic phase grating formed by the ultrasonic wave in the liquid medium with a beam of laser light perpendicular to the propagation direction of the ultrasonic wave, and the diffracted light forms the diffraction spectrum of the dynamic ultrasonic phase grating on the image plane of the lens;

(2) Set the hybrid photodiode array detector at the image plane of the lens, and record the direction in which the diffraction spectrum appears, the first-order diffraction light intensity and the distance between adjacent diffraction spectra (maximum points);

(3) Through data processing and analysis, the propagation direction, sound intensity and frequency of the measured ultrasonic wave are obtained.

The laser light described in step (1) is preferably a laser light emitted from an optical fiber port and passed through a lens.

The lens is preferably a convex lens.

The structure of the hybrid photodiode array detector described in step (2) is as follows: the light receiving plane of the hybrid photodiode array detector is circular and divided into three areas: the left semicircle is composed of semicircular photodiode arrays with different radii; the right semicircle is composed of semicircular photodiode arrays with different radii; It is composed of fan-shaped photodiode arrays arranged in sequence, and the central photodiode is an independent photodiode.

The radius difference between adjacent semi-ring photodiodes in the semi-ring photodiodes is preferably 5-15 microns.

The sector-shaped photodiode is preferably a sector-shaped photodiode with an apex angle of 1-3°.

The light-receiving area of the central photodiode is a perfect circle with a diameter of 100-200 microns, and the surface is coated with a light-reducing film. The center photodiode acts as beam centering and is used to determine that the center of the hybrid photodiode array detector is strictly on the optical axis, which coincides with the 0th order diffraction spectrum.

The propagation direction of the ultrasonic wave to be measured in step (3) can be determined according to the direction in which the diffraction spectrum appears, that is, the propagation direction of the ultrasonic wave to be measured is the same as the direction in which the diffraction spectrum appears.

The sound intensity of the measured ultrasonic wave described in the step (3) is calculated by formula (A):

I _n ∝P (A);

In is the light intensity of the _n -order of the diffraction spectrum of the dynamic ultrasonic phase grating, and P is the sound intensity of the ultrasonic wave to be measured.

The frequency of the measured ultrasonic wave described in the step (3) is determined by the formula (B) by the distance x between the 0-level spectrum and the 1-level spectrum:

x∝f(B);

x is proportional to the ultrasonic frequency f.

Step (3) also includes a calibration step, which is specifically as follows: use a standard ultrasonic intensity detector to measure the ultrasonic intensity P, change different ultrasonic intensities, and experimentally obtain the +1 or -1 order diffraction spectrum intensities In and P of this method. The relationship or curve to realize the calibration of ultrasonic sound intensity.

A device for measuring ultrasonic direction, sound intensity and frequency at the same time is designed according to the above-mentioned optical method for measuring ultrasonic direction, sound intensity and frequency, including light source, optical fiber, lens, lens holder, flat glass, hybrid photodiode array detector , detector seat, driving and scanning amplifying circuit and computer; wherein, the light source is connected to one end of the optical fiber; along the advancing direction of the light beam, the light-emitting port of the optical fiber, the lens, the flat glass, and the hybrid photodiode array detector are arranged in sequence, and the light-emitting port of the optical fiber is arranged in sequence. The port, the lens, the plate glass and the hybrid photodiode array detector are coaxial, the hybrid photodiode array detector is arranged on the imaging surface of the lens, and the driving and scanning amplifying circuits are respectively connected with the hybrid photodiode array detector and the computer; the lens seat is Hollow structure, one side is provided with a hole for the optical fiber to pass through, and the other side is provided with a structure for placing the lens. The lens holder, the optical fiber and the lens form a sealed and waterproof space; the detector holder is a hollow structure, and one side is provided with a For the structure where the flat glass is placed, the detector base and the flat glass form another airtight and waterproof space, and the hybrid photodiode array detector is located in this space;

The structure of the hybrid photodiode array detector is as follows: the light receiving plane of the hybrid photodiode array detector is circular and divided into three areas: the left semicircle is composed of semicircular photodiode arrays with different radii; the right semicircle is composed of fan-shaped arrays arranged in sequence It is composed of photodiode array, and the central photodiode is an independent photodiode.

The radius difference between adjacent semi-ring photodiodes in the semi-ring photodiodes is preferably 5-15 microns.

The sector-shaped photodiode is preferably a sector-shaped photodiode with an apex angle of 1-3°.

The light-receiving area of the central photodiode is a perfect circle with a diameter of 100-200 microns, and the surface is coated with a light-reducing film. The center photodiode acts as beam centering and is used to determine that the center of the hybrid photodiode array detector is strictly on the optical axis, which coincides with the 0th order diffraction spectrum.

For better waterproof effect, the device for simultaneously measuring the ultrasonic direction, sound intensity and frequency also includes a waterproof sleeve, a waterproof washer A and a waterproof washer B; the waterproof sleeve is arranged between the optical fiber and the lens holder, which wraps the optical fiber; The waterproof gasket A is arranged between the lens and the lens holder, and the waterproof gasket B is arranged between the flat glass and the detector holder.

Preferably, the lens holder and the detector holder are connected and fixed by two thin columns, and the connection direction thereof is consistent with the semicircular boundary line of the hybrid photodiode array detector.

The light source can be various low-power semiconductor lasers, such as continuous semiconductor lasers with wavelengths of 532, 635, 650 or 780, 808 nm.

The optical fiber is preferably a multimode silica optical fiber or a plastic optical fiber.

The optical fiber is preferably arranged in an optical fiber sleeve, so that the optical fiber can be better protected.

The lens is a convex lens, preferably a convex lens made of glass or a convex lens made of fiber.

The described method of using the device for simultaneously measuring the direction, sound intensity and frequency of ultrasonic waves comprises the following steps:

(1) Adjustment device: adjust the port of the optical fiber, the lens, the flat glass and the hybrid photodiode array detector to be coaxial, so that the light receiving surface of the hybrid photodiode array detector is located on the imaging surface of the port of the optical fiber, and fine-tune its position to make the hybrid photodiode array detector coaxial. The center diode output of the photodiode array detector is the largest;

(2) Calibration: The adjusted device is packaged and waterproofed, placed in water, and irradiated with ultrasonic waves of known frequency and sound intensity perpendicular to the optical axis. Each diode in the hybrid photodiode array detector is separately Perform sound intensity and frequency calibration; the left semicircle of the hybrid photodiode array detector measures the intensity and frequency of ultrasound, and the right semicircle judges the ultrasonic propagation direction; the output signal of the hybrid photodiode array detector is processed by computer to realize Simultaneous measurement of the propagation direction, sound intensity and frequency of ultrasonic waves;

(3) Measurement: The calibrated device can simultaneously measure the propagation direction, sound intensity and frequency of the ultrasonic wave to be measured.

The principle of the invention: ultrasonic waves, as longitudinal waves, will cause periodic changes in the refractive index of the liquid medium during the propagation process in the liquid medium, forming a dynamic ultrasonic phase grating. When the light is irradiated vertically along the ultrasonic propagation direction, a series of diffracted light maxima, that is, the diffraction spectrum, will be generated on the lens image plane in the ultrasonic propagation direction. As shown in Figure 1, the ultrasonic waves propagating along the X, Y and 45° directions appear diffraction spectrum in all directions of the image plane, and the light intensity energy distribution is mainly concentrated in the 0th order and ±1st order. By determining the direction in which the spectrum appears, the propagation direction of the ultrasound can be determined.

According to the diffraction theory of the grating, the light intensity of the nth order of the diffraction spectrum of the dynamic ultrasonic phase grating is

I _n =J ² _n (δφ _m ) (1)

In the formula, n is the diffraction grade, taking integers such as 0, 1, 2, etc., and _δφm is the amplitude of the phase change caused by ultrasound. When n=1 (that is, corresponding to the first-order diffraction spectrum), the distribution of the relationship between the light intensity I _n and _δφm is shown in FIG. 2 . It can be seen that the light intensity of the first-order diffraction spectrum is proportional to the amplitude of the phase change. When 0.1π< _δφm <0.5π, the relationship between I _n and _δφm can be approximately regarded as a linear relationship. which is,

I _n ∝δφ _m (2)

Since the amplitude of the phase change of the grating is proportional to the ultrasonic sound intensity P, we have

δφ _m ∝P (3)

From equations (1), (2) and (3), it can be known that

I _n ∝P (4)

That is, the ultrasonic sound intensity can be obtained by detecting the intensity of the +1-order or -1-order diffraction spectrum. The specific form or proportional coefficient of formula (4) can be calibrated through experiments. Use a standard ultrasonic intensity detector to measure the ultrasonic intensity P, change different ultrasonic intensities, and experimentally obtain the relationship or curve of the ₊ 1-order or -1-order diffraction spectral intensity In and P of this method. Realize the calibration of ultrasonic sound intensity.

In addition, the distance x between the 0-level spectrum and the 1-level spectrum is proportional to the ultrasonic frequency f, which is described by equation (5):

x∝f (5)

Its specific functional relationship is also easily determined by system parameters, such as the distance between the optical fiber exit port and the lens, the focal length of the lens, and the laser wavelength. Therefore, x can also be measured to obtain the frequency f of the ultrasound.

Compared with the prior art, the present invention has the following advantages and effects:

(1) The method and single device provided by the present invention can realize the simultaneous measurement or detection of ultrasonic direction, sound intensity and frequency.

(2) The single device provided by the present invention can simultaneously detect the intensity of multiple beams of ultrasonic waves, and can easily realize multi-channel secure communication in different directions or detection of multiple ultrasonic sources.

(3) The single device provided by the present invention can realize the judgment of the sound source direction without scanning, the data processing is simple and fast, and is suitable for real-time measurement.

(4) The device provided by the present invention has low cost and simple structure, and is easy to realize miniaturization or miniaturization.

Description of drawings

Figure 1 is a diagram showing the relationship between the propagation direction of ultrasonic waves and the diffraction spectrum of ultrasonic phase gratings.

FIG. 2 is a graph showing the relationship between the first-order diffraction intensity of an ultrasonic phase grating and the amplitude of the phase change.

FIG. 3 is a schematic diagram of a typical structure of the device provided by the present invention.

FIG. 4 is a schematic cross-sectional view of the connection between the lens holder and the detector holder.

FIG. 5 is a schematic diagram of the distribution of photodiodes on the light-receiving surface of the hybrid photodiode array detector.

Among them, 1-light source, 2-fiber, 3-waterproof sleeve, 4-fastening screw, 5-lens, 6-waterproof washer, 7-waterproof washer, 8-plate glass, 9-fastening screw10- Hybrid photodiode array detector, 11-drive and scanning amplifying circuit, 12-lens holder, 13-detector holder, 14-waterproof cable, 15-computer.

Detailed ways

The present invention will be described in further detail below with reference to the embodiments and the accompanying drawings, but the embodiments of the present invention are not limited thereto.

Example 1

A device for simultaneously measuring the direction, sound intensity and frequency of ultrasonic waves, as shown in Figure 3, including a light source 1, an optical fiber 2, a waterproof sleeve 3, a tightening screw 4, a lens 5, a waterproof gasket 6, a waterproof gasket 7, a flat glass 8. Fastening coil 9 , hybrid photodiode array detector 10 , driving and scanning amplifying circuit 11 , lens holder 12 , detector holder 13 , waterproof cable 14 and computer 15 . The light source 1 is connected to one end of the optical fiber 2; along the light beam advancing direction, the light-emitting port of the optical fiber 2, the lens 5, the flat glass 8, and the hybrid photodiode array detector 10 are arranged in sequence, and the light-emitting port of the optical fiber 2, the lens 5, the flat glass 8 Coaxial with the hybrid photodiode array detector 10, the hybrid photodiode array detector 10 is arranged on the imaging surface of the lens 5, the driving and scanning amplifying circuit 11 is respectively connected with the hybrid photodiode array detector 10 and the computer 15, and the waterproof cable 14 It is arranged between the driving and scanning amplifying circuit 11 and the computer 15; the lens holder 12 is a hollow structure, one side is provided with a hole for the optical fiber 2 to pass through, and the other side is provided with a structure for placing the lens 5, the lens holder 12, the optical fiber 2 and the The lens 5 forms an airtight and waterproof space; the detector seat 13 is a hollow structure, and a structure for placing the flat glass 8 is arranged on one of the surfaces. The detector seat 13 and the flat glass 8 form another airtight and waterproof space. The diode array detector 10 is located in this space; the waterproof cover 3 is arranged between the optical fiber 2 and the lens holder 12, which wraps the optical fiber 2 to prevent the device from seeping water; the waterproof gasket 6 is arranged between the lens 5 and the lens holder 12, and the waterproof gasket 7 is arranged between the plate glass 8 and the detector base 13 .

Light source 1 can be a variety of low-power semiconductor lasers with optical fibers, such as continuous semiconductor lasers with wavelengths of 532, 635, 650 or 780, 808 nm, etc.; optical fiber 2 is preferably multi-mode quartz or plastic optical fiber, and a layer is added outside optical fiber 2 The protective function of the optical fiber sleeve; the lens 5 can be selected as a convex lens of glass or fiber material; the lens holder 12 and the detector holder 13 can be designed in cylindrical shape, processed with metal materials such as stainless steel, copper, and aluminum, and the surface is blackened; the lens holder 12 And the detector seat 13 is connected and fixed by two thin columns, and the direction of the connecting line is consistent with the semicircle boundary line of the hybrid photodiode array detector 10, so as not to interfere with the propagation of ultrasonic waves. The cross-section of the two thin columns is shown in Figure 4;

A schematic diagram of the structure and composition of the hybrid photodiode array detector 10 is shown in FIG. 5 . The light receiving plane of the photodiode array is divided into three areas: the left semicircle is composed of semi-ring photodiode arrays with different radii; the right semicircle is composed of fan-shaped photodiode arrays arranged in sequence, and the central photodiode is an independent photodiode. The independent center photodiode (shaded area) acts as beam centering and is used to determine that the center of the hybrid photodiode array detector 10 is strictly on the optical axis, coinciding with the 0th order diffraction spectrum. The radius of the central photodiode is 100-200 microns, and the surface is coated with a light-reducing film; the radius difference between adjacent semi-ring photodiodes is 5-15 microns, the smaller the radius difference, the higher the measurement frequency accuracy; Take 1 to 3°, the smaller the vertex angle, the higher the accuracy of measuring the ultrasonic direction. All the photodiodes are arranged and connected in sequence, and the serial output of the voltage signals of the diodes is realized through the driving and scanning amplifying circuit 11 . The optoelectronic properties of each photodiode must be independently scaled for assembly. The driving and scanning amplifying circuit 11 is designed and manufactured according to the structure of the hybrid photodiode array detector 10, considering the number of photodiode arrays and their specific structure.

The adjustment, assembly and calibration process of the device of the present invention is as follows: adjust the port of the optical fiber 2, the lens 5, the flat glass 8 and the hybrid photodiode array detector 10 to be coaxial, so that the light-receiving surface of the detector 10 is located on the imaging surface of the port, and fine-tune its position to maximize the output of the central diode of the hybrid photodiode array detector 10, and the device has been adjusted in place; finally, the device is packaged and waterproofed. The device is placed in water, and ultrasonic waves with known frequency and sound intensity are used to irradiate perpendicular to the direction of the optical axis to calibrate the sound intensity and frequency of each diode in the hybrid photodiode array detector 10 respectively. The left semicircle of the detector 10 measures the intensity and frequency of the ultrasound, and the right semicircle judges the propagation direction of the ultrasound. After the output signal of the detector 10 is processed by the computer 15, the simultaneous measurement of the propagation direction, sound intensity and frequency of the ultrasonic wave is realized.

The above-mentioned embodiments are preferred embodiments of the present invention, but the embodiments of the present invention are not limited by the above-mentioned embodiments, and any other changes, modifications, substitutions, combinations, The simplification should be equivalent replacement manners, which are all included in the protection scope of the present invention.

Claims (8)

1. an optical method for measuring ultrasonic direction, sound intensity and frequency simultaneously, is characterized in that comprising the steps: (1) illuminating the dynamic ultrasonic phase grating formed by the ultrasonic wave in the liquid medium with a beam of laser light perpendicular to the propagation direction of the ultrasonic wave, and the diffracted light forms the diffraction spectrum of the dynamic ultrasonic phase grating on the image plane of the lens; (2) Set the hybrid photodiode array detector at the image plane of the lens, and record the direction in which the diffraction spectrum appears, the first-order diffraction light intensity and the distance between adjacent diffraction spectra; (3) Through data processing and analysis, the propagation direction, sound intensity and frequency of the measured ultrasonic wave are obtained; The structure of the hybrid photodiode array detector described in step (2) is as follows: the light receiving plane of the hybrid photodiode array detector is circular and divided into three areas: the left semicircle is composed of semicircular photodiode arrays with different radii; the right semicircle is composed of semicircular photodiode arrays with different radii; It is composed of fan-shaped photodiode arrays arranged in sequence, and the central photodiode is an independent photodiode; The propagation direction of the ultrasonic wave described in step (3) can be judged according to the direction in which the diffraction spectrum appears; The sound intensity of the measured ultrasonic wave described in the step (3) is calculated by formula (A): I _n ∝P (A); I _n is the light intensity of the n-order of the diffraction spectrum of the dynamic ultrasonic phase grating, and P is the sound intensity of the measured ultrasonic wave; The frequency of the measured ultrasonic wave described in the step (3) is determined by the formula (B) by the distance x between the 0-level spectrum and the 1-level spectrum: x∝f(B); x is proportional to the ultrasonic frequency f. 2. the optical method of measuring ultrasonic wave direction, sound intensity and frequency simultaneously according to claim 1, is characterized in that: The laser described in step (1) is the laser emitted from the optical fiber port and passed through the lens; The lens is a convex lens. 3. the optical method of measuring ultrasonic wave direction, sound intensity and frequency simultaneously according to claim 1, is characterized in that: The radius difference between adjacent semi-ring photodiodes in the semi-ring photodiodes is 5-15 microns; The fan-shaped photodiode is a fan-shaped photodiode with an apex angle of 1-3°; The light-receiving area of the central photodiode is a perfect circle with a diameter of 100-200 microns, and the surface is coated with a light-reducing film. 4. A device for simultaneously measuring ultrasonic wave direction, sound intensity and frequency is designed according to the optical method for measuring ultrasonic wave direction, sound intensity and frequency according to any one of claims 1 to 3, and is characterized in that: comprising a light source, Optical fiber, lens, lens holder, flat glass, hybrid photodiode array detector, detector holder, driving and scanning amplifying circuit, and computer; wherein, the light source is connected to one end of the optical fiber; along the advancing direction of the light beam, the light-emitting port of the optical fiber, the lens , flat glass, and hybrid photodiode array detectors are arranged in sequence, the light exit port of the optical fiber, the lens, the flat glass and the hybrid photodiode array detector are coaxial, and the hybrid photodiode array detector is arranged on the imaging surface of the lens. The circuit is respectively connected with the hybrid photodiode array detector and the computer; the lens holder is a hollow structure, one side is provided with a hole for the optical fiber to pass through, and the other side is provided with a structure for placing the lens, the lens holder, the optical fiber and the lens form a sealed waterproof space; the detector seat is a hollow structure, and a structure for placing flat glass is arranged on one of the surfaces, the detector seat and the flat glass form another airtight and waterproof space, and the hybrid photodiode array detector is located in this space; The structure of the hybrid photodiode array detector is as follows: the light receiving plane of the hybrid photodiode array detector is circular and divided into three areas: the left semicircle is composed of semicircular photodiode arrays with different radii; the right semicircle is composed of fan-shaped arrays arranged in sequence It is composed of photodiode array, and the central photodiode is an independent photodiode. 5. the device that simultaneously measures ultrasonic wave direction, sound intensity and frequency according to claim 4, is characterized in that: The radius difference between adjacent semi-ring photodiodes in the semi-ring photodiodes is 5-15 microns; The fan-shaped photodiode is a fan-shaped photodiode with an apex angle of 1-3°; The light-receiving area of the central photodiode is a perfect circle with a diameter of 100-200 microns, and the surface is coated with a light-reducing film. 6. the device that simultaneously measures ultrasonic wave direction, sound intensity and frequency according to claim 4, is characterized in that: The light source is a continuous semiconductor laser with a wavelength of 532nm, 635nm, 650nm, 780nm or 808nm; The optical fiber is a multimode silica optical fiber or a plastic optical fiber; The lens is a convex lens; The lens holder and the detector holder are connected and fixed by two thin columns, and the direction of the connection line is consistent with the semicircular boundary line of the hybrid photodiode array detector. 7. The device for simultaneously measuring ultrasonic direction, sound intensity and frequency according to any one of claims 4 to 6, characterized in that: it further comprises a waterproof cover, a waterproof gasket A and a waterproof gasket B; the waterproof cover is arranged on the optical fiber and the lens Between the seats, it wraps the optical fiber; the waterproof gasket A is arranged between the lens and the lens seat, and the waterproof gasket B is arranged between the flat glass and the detector seat. 8. The using method of the device for simultaneously measuring ultrasonic direction, sound intensity and frequency according to any one of claims 4 to 7, characterized in that it comprises the following steps: (1) Adjustment device: adjust the port of the optical fiber, the lens, the flat glass and the hybrid photodiode array detector to be coaxial, so that the light receiving surface of the hybrid photodiode array detector is located on the imaging surface of the port of the optical fiber, and fine-tune its position to make the hybrid photodiode array detector coaxial. The center diode output of the photodiode array detector is the largest; (2) Calibration: The adjusted device is packaged and waterproofed, placed in water, and irradiated with ultrasonic waves of known frequency and sound intensity perpendicular to the optical axis. Each diode in the hybrid photodiode array detector is separately Perform sound intensity and frequency calibration; the left semicircle of the hybrid photodiode array detector measures the intensity and frequency of ultrasound, and the right semicircle judges the ultrasonic propagation direction; the output signal of the hybrid photodiode array detector is processed by computer to realize Simultaneous measurement of the propagation direction, sound intensity and frequency of ultrasonic waves; (3) Measurement: The calibrated device can simultaneously measure the propagation direction, sound intensity and frequency of the ultrasonic wave to be measured.