CN107063122A - The detection method and its device of surface shape of optical aspheric surface - Google Patents
The detection method and its device of surface shape of optical aspheric surface Download PDFInfo
- Publication number
- CN107063122A CN107063122A CN201710293334.6A CN201710293334A CN107063122A CN 107063122 A CN107063122 A CN 107063122A CN 201710293334 A CN201710293334 A CN 201710293334A CN 107063122 A CN107063122 A CN 107063122A
- Authority
- CN
- China
- Prior art keywords
- aspheric surface
- tested
- aspherical
- modulation
- surface shape
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 48
- 238000001514 detection method Methods 0.000 title claims abstract description 24
- 238000000034 method Methods 0.000 claims abstract description 32
- 238000003384 imaging method Methods 0.000 claims abstract description 29
- 238000000605 extraction Methods 0.000 claims description 12
- 230000010363 phase shift Effects 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 230000008859 change Effects 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- 238000003786 synthesis reaction Methods 0.000 claims description 3
- 241001269238 Data Species 0.000 claims 1
- 230000011514 reflex Effects 0.000 claims 1
- 230000009466 transformation Effects 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 10
- 238000005305 interferometry Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 238000000691 measurement method Methods 0.000 description 2
- 238000001028 reflection method Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 238000004441 surface measurement Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 238000001314 profilometry Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2433—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures for measuring outlines by shadow casting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/2504—Calibration devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
- G01B11/254—Projection of a pattern, viewing through a pattern, e.g. moiré
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
本发明公开了一种光学非球面面形的检测方法，该方法包括：将逆向补偿条纹从投影方向照射到被测非球面上后，经被测非球面反射成像由成像系统获得携带被测非球面面形信息的调制条纹，根据所述调制条纹获得非球面的面形偏差，根据所述面形偏差确定被测非球面的加工情况；还公开了一种旋转对称光学非球面面形的检测装置。
The invention discloses a method for detecting the surface shape of an optical aspheric surface. The method includes: after irradiating reverse compensation fringes from the projection direction onto the measured aspheric surface, the measured aspheric surface is reflected and imaged by an imaging system to obtain the measured aspheric surface. The modulation fringes of the spherical surface shape information, the surface shape deviation of the aspheric surface is obtained according to the modulation fringes, and the processing condition of the measured aspheric surface is determined according to the surface shape deviation; a detection of the rotationally symmetric optical aspheric surface shape is also disclosed device.
Description
技术领域technical field
本发明属于光学元件面形的检测技术领域，具体涉及一种光学非球面面形的检测方法及其装置。The invention belongs to the technical field of detecting the surface shape of an optical element, and in particular relates to a method and a device for detecting the surface shape of an optical aspheric surface.
背景技术Background technique
光学非球面具有许多优良的光学性能，因此越来越多的应用到各类光学和光电系统中；但是，由于非球面上各点的曲率半径不同，不能用传统的球面测量方法完成非球面测量。不仅如此，随着光学/光电系统性能的不断提升，对光学非球面的要求也越来越高；不仅要求非球面有很好的面形精度，而且对非球面度的要求也逐渐增大；因此，非球面测量一直是光学技术领域的热点研究问题，而且一直没有得到很好的解决。Optical aspheric surface has many excellent optical properties, so it is more and more used in various optical and photoelectric systems; however, due to the different radii of curvature of each point on the aspheric surface, it is impossible to use the traditional spherical surface measurement method to complete the measurement of the aspheric surface . Not only that, with the continuous improvement of the performance of optical/optoelectronic systems, the requirements for optical aspheric surfaces are getting higher and higher; not only the aspheric surfaces are required to have good surface shape accuracy, but also the requirements for asphericity are gradually increasing; Therefore, aspheric surface measurement has always been a hot research issue in the field of optical technology, and it has not been well resolved.
目前，光学非球面的主要测量方法有轮廓法、几何光线法和干涉法。At present, the main measurement methods of optical aspheric surface are profilometry, geometric ray method and interferometry.
轮廓法是利用探针对整个被测面进行接触式扫描，只能测量直径方向上的二维面形结果，并且非常费时，受探针尺寸、运动机构影响特别大，测量精度不高，容易损伤被测件表面。The contour method uses a probe to scan the entire measured surface by contact. It can only measure the two-dimensional surface shape in the diameter direction, and it is very time-consuming. It is greatly affected by the size of the probe and the movement mechanism. Damage the surface of the tested part.
几何光线检测法主要有哈特曼法、光栅法和刀口法，其设备简单，但是测量精度不高或者不能定量测量。Geometric light detection methods mainly include Hartmann method, grating method and knife-edge method. The equipment is simple, but the measurement accuracy is not high or quantitative measurement is not possible.
干涉法的测量精度高，但光学系统和机械结构复杂，对环境的要求严格。常用干涉法测量的就是补偿干涉方法(透镜补偿或计算全息补偿，也叫零位检验方法)，可实现非球面定量化检测，检测精度较高。但是，这种方法的需要补偿器件(补偿透镜或计算全息补偿元件)，制造非常复杂，而且一个补偿器只适用于某一类非球面的检测，通用性差。The measurement accuracy of interferometry is high, but the optical system and mechanical structure are complex, and the requirements for the environment are strict. The commonly used interferometry measurement is the compensation interferometry method (lens compensation or computational holographic compensation, also known as the zero inspection method), which can realize quantitative detection of aspheric surfaces with high detection accuracy. However, this method requires a compensation device (compensation lens or computational holographic compensation element), which is very complicated to manufacture, and a compensator is only suitable for the detection of a certain type of aspheric surface, which has poor versatility.
发明内容Contents of the invention
有鉴于此，本发明的主要目的在于提供一种光学非球面面形的检测方法及其装置。In view of this, the main purpose of the present invention is to provide a method and device for detecting the shape of an optical aspheric surface.
为达到上述目的，本发明的技术方案是这样实现的：In order to achieve the above object, technical solution of the present invention is achieved in that way:
本发明实施例提供一种光学非球面面形的检测方法，其特征在于，该方法包括：将逆向补偿条纹从投影方向照射到被测非球面上后，经被测非球面反射成像由成像系统获得携带被测非球面面形信息的调制条纹，根据所述调制条纹获得非球面的面形偏差，根据所述面形偏差确定被测非球面的加工情况。An embodiment of the present invention provides a method for detecting the shape of an optical aspheric surface, which is characterized in that the method includes: after the reverse compensation fringe is irradiated from the projection direction onto the measured aspheric surface, the measured aspheric surface is reflected and imaged by the imaging system The modulation stripes carrying the surface shape information of the measured aspheric surface are obtained, the surface shape deviation of the aspheric surface is obtained according to the modulation stripes, and the processing condition of the measured aspheric surface is determined according to the surface shape deviation.
上述方案中，所述逆向补偿条纹的生成过程为：将一个或多个相移的直条纹投影到理想非球面反射后成像，获得由理想非球面调制的变形条纹；将所述变形条纹以投影的直条纹为对称轴翻转生成逆向补偿条纹。In the above scheme, the generation process of the reverse compensation fringes is as follows: project one or more phase-shifted straight fringes onto an ideal aspheric surface for reflection and imaging to obtain deformed fringes modulated by an ideal aspheric surface; project the deformed fringes to The straight fringes of generate reverse compensating fringes for symmetry axis flips.
上述方案中，该方法还包括：当所述被测非球面的位置与逆向补偿条纹投影的位置不对应时，对所述调制条纹进行校准，具体为：根据傅里叶变换或者相移技术对获取的条纹进行相位提取处理，获得相位数据；之后，旋转被测非球面一个角度，同样对获取的调制条纹进行相位提取处理，获得相位数据；最后，旋转被测非球面一周，对获取的一系列调制条纹进行相位提取处理，获得一系列相位数据；在所述一系列相位数据中相位变化最小的调制条纹对应的位置为被测非球面校准最好的位置。In the above solution, the method further includes: when the position of the measured aspheric surface does not correspond to the position of the reverse compensation fringe projection, calibrating the modulation fringes, specifically: calibrate the modulation fringes according to Fourier transform or phase shift technology Phase extraction processing is performed on the obtained fringes to obtain phase data; after that, the measured aspheric surface is rotated by an angle, and phase extraction processing is also performed on the obtained modulated fringes to obtain phase data; finally, the measured aspheric surface is rotated for one week, and the obtained one The series of modulation fringes are subjected to phase extraction processing to obtain a series of phase data; in the series of phase data, the position corresponding to the modulation fringe with the smallest phase change is the best position for calibration of the measured aspheric surface.
上述方案中，所述根据所述调制条纹获得非球面的面形偏差，具体为：对所述调制条纹进行相位提取获得所述调制条纹的相位值根据相位值与波前W的对应关系式，获得面形偏差W，即 In the above solution, the obtaining the aspherical surface shape deviation according to the modulation fringe is specifically: performing phase extraction on the modulation fringe to obtain the phase value of the modulation fringe According to the phase value The corresponding relationship with the wavefront W, the surface deviation W is obtained, that is
上述方案中，所述根据所述面形偏差确定被测非球面的加工情况，具体为：根据被测非球面相对于理想非球面的面形偏差，通过面形偏差与理想非球面的合成，最后获得被测非球面的实际测量面形。In the above solution, the determination of the processing condition of the measured aspheric surface according to the surface shape deviation is specifically: according to the surface shape deviation of the measured aspheric surface relative to the ideal aspheric surface, through the synthesis of the surface shape deviation and the ideal aspheric surface, Finally, the actual measured surface shape of the measured aspheric surface is obtained.
本发明实施例还提供一种旋转对称光学非球面面形的检测装置，该装置包括逆向补偿条纹生成装置、分束装置、标准镜头、被测非球面、成像系统，所述逆向补偿条纹生成装置、分束装置、标准镜头、被测非球面依次在光轴上从左到右设置，所述被测非球面、成像系统位于分束装置的上下任意一侧并且其成像光轴垂直于光轴。An embodiment of the present invention also provides a detection device for a rotationally symmetric optical aspheric surface. The device includes a reverse compensation fringe generation device, a beam splitter, a standard lens, a measured aspheric surface, and an imaging system. The reverse compensation fringe generation device , the beam splitter, the standard lens, and the measured aspheric surface are arranged on the optical axis from left to right in turn, and the measured aspheric surface and the imaging system are located on either side of the beam splitting device up and down and its imaging optical axis is perpendicular to the optical axis .
上述方案中，所述成像系统包括沿光轴依次设置的成像透镜和CCD相机。In the above solution, the imaging system includes an imaging lens and a CCD camera arranged in sequence along the optical axis.
本发明实施例还提供一种非旋转对称光学非球面面形的检测装置，该装置包括逆向补偿条纹生成装置、分束装置、标准镜头、被测非球面、平面反射镜、成像系统，所述逆向补偿条纹生成装置发出的光束经标准镜头投影到被测非球面，所述被测球面发出的反射光束经标准镜头、平面反射镜反射到成像系统。An embodiment of the present invention also provides a non-rotationally symmetric optical aspheric surface detection device, which includes a reverse compensation fringe generation device, a beam splitter, a standard lens, a measured aspheric surface, a plane mirror, and an imaging system. The light beam emitted by the reverse compensation fringe generating device is projected onto the measured aspheric surface through the standard lens, and the reflected light beam emitted by the measured spherical surface is reflected to the imaging system through the standard lens and the plane mirror.
上述方案中，所述成像系统包括沿光轴依次设置的成像透镜和CCD相机。In the above solution, the imaging system includes an imaging lens and a CCD camera arranged in sequence along the optical axis.
与现有技术相比，本发明的有益效果：Compared with prior art, the beneficial effect of the present invention:
1.本发明不同于干涉法，不需要标准参考镜，对环境要求低；也不同于传统的投影法，其成像系统的光轴是在入射光线的反射方向。本发明的优点是结构简单，测量精度高，测量动态范围大，通用性强。1. The present invention is different from interferometry in that it does not require a standard reference mirror and has low environmental requirements; it is also different from traditional projection methods in that the optical axis of its imaging system is in the reflection direction of the incident light. The invention has the advantages of simple structure, high measurement precision, large measurement dynamic range and strong versatility.
2.本发明无需昂贵的干涉相移器就能获得相移条纹，只需要对反射条纹进行成像，通过简单的计算就可以获得所测非球面的面形。由于是对反射条纹进行成像，不同于传统的条纹投影测量方法，因此测量精度高。2. The present invention can obtain phase shift fringes without an expensive interferometric phase shifter, and only needs to image the reflection fringes, and the surface shape of the measured aspheric surface can be obtained through simple calculation. Since the reflection fringe is imaged, which is different from the traditional fringe projection measurement method, the measurement accuracy is high.
3.本发明采用的照明条纹是根据被测非球面的参数用计算机生成的，只要知道非球面参数，就可以生成任意的照明条纹，因此通用性强。3. The lighting stripes used in the present invention are generated by a computer according to the parameters of the measured aspheric surface. As long as the parameters of the aspheric surface are known, any lighting stripes can be generated, so the versatility is strong.
4.本发明采用的照明条纹是根据被测非球面的参数用计算机生成的，可以根据非球面度生成逆向补偿照明条纹，因此测量范围大。4. The lighting stripes used in the present invention are generated by computer according to the parameters of the measured aspheric surface, and can generate reverse compensation lighting stripes according to the asphericity, so the measurement range is large.
附图说明Description of drawings
图1为本发明实施例1提供一种非旋转对称光学非球面面形的检测装置的结构示意图；1 is a schematic structural view of a non-rotationally symmetric optical aspheric surface detection device provided by Embodiment 1 of the present invention;
图2为本发明实施例1提供一种非旋转对称光学非球面面形的检测装置中逆向补偿条纹生成装置的第一种结构示意图；2 is a schematic diagram of the first structure of a reverse compensation fringe generating device in a non-rotationally symmetric optical aspheric surface detection device provided in Embodiment 1 of the present invention;
图3为本发明实施例1提供一种非旋转对称光学非球面面形的检测装置中逆向补偿条纹生成装置的第二种结构示意图；3 is a schematic diagram of a second structure of a reverse compensation fringe generating device in a non-rotationally symmetric optical aspheric surface detection device provided in Embodiment 1 of the present invention;
图4为本发明实施例1提供一种非旋转对称光学非球面面形的检测装置中逆向补偿条纹生成装置的第三种结构示意图Fig. 4 is a schematic diagram of the third structure of the reverse compensation fringe generating device in a non-rotationally symmetric optical aspheric surface detection device provided by Embodiment 1 of the present invention
图5为本发明实施例2提供一种非旋转对称光学非球面面形的检测装置的结构示意图。FIG. 5 is a schematic structural diagram of a non-rotationally symmetric optical aspheric surface detection device provided by Embodiment 2 of the present invention.
具体实施方式detailed description
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
本发明实施例提供一种光学非球面面形的检测方法，该方法包括：将逆向补偿条纹从投影方向照射到被测非球面上后，经被测非球面反射成像由成像系统获得携带被测非球面面形信息的调制条纹，根据所述调制条纹获得非球面的面形偏差，根据所述面形偏差确定被测非球面的加工情况。An embodiment of the present invention provides a method for detecting the shape of an optical aspheric surface. The method includes: after the reverse compensation fringes are irradiated from the projection direction onto the measured aspheric surface, the measured aspheric surface is reflected and imaged by the imaging system to obtain the The modulation fringes of the aspheric surface shape information, the surface shape deviation of the aspheric surface is obtained according to the modulation fringes, and the processing condition of the measured aspheric surface is determined according to the surface shape deviation.
所述逆向补偿条纹的生成过程为：将一个或多个相移的直条纹投影到理想非球面反射后成像，获得由理想非球面调制的变形条纹；将所述变形条纹以投影的直条纹为对称轴翻转生成逆向补偿条纹。The generation process of the reverse compensation fringes is as follows: project one or more phase-shifted straight fringes onto an ideal aspheric surface for reflection and imaging to obtain deformed fringes modulated by an ideal aspheric surface; Flipping the axis of symmetry generates reverse compensating fringes.
该方法还包括：当所述被测非球面的位置与逆向补偿条纹投影的位置不对应时，对所述调制条纹进行校准，具体为：根据傅里叶变换或者相移技术对获取的条纹进行相位提取处理，获得相位数据；之后，旋转被测非球面一个角度，同样对获取的调制条纹进行相位提取处理，获得相位数据；最后，旋转被测非球面一周，对获取的一系列调制条纹进行相位提取处理，获得一系列相位数据；在所述一系列相位数据中相位变化最小的调制条纹对应的位置为被测非球面校准最好的位置。The method also includes: when the position of the measured aspheric surface does not correspond to the position of the reverse compensation fringe projection, calibrating the modulated fringes, specifically: performing the obtained fringes according to Fourier transform or phase shift technology Phase extraction processing to obtain phase data; after that, rotate the measured aspheric surface by an angle, and perform phase extraction processing on the obtained modulation stripes to obtain phase data; finally, rotate the measured aspheric surface for one week, and perform a series of modulation fringes obtained The phase extraction process obtains a series of phase data; in the series of phase data, the position corresponding to the modulation fringe with the smallest phase change is the best position for calibration of the measured aspheric surface.
所述根据所述调制条纹获得非球面的面形偏差，具体为：对所述调制条纹进行相位提取获得所述调制条纹的相位值根据相位值与波前W的对应关系式，获得面形偏差W，即 The obtaining the surface shape deviation of the aspheric surface according to the modulation fringe is specifically: performing phase extraction on the modulation fringe to obtain the phase value of the modulation fringe According to the phase value The corresponding relationship with the wavefront W, the surface deviation W is obtained, that is
所述根据所述面形偏差确定被测非球面的加工情况，具体为：根据被测非球面相对于理想非球面的面形偏差，通过面形偏差与理想非球面的合成，最后获得被测非球面的实际测量面形。The determination of the processing condition of the measured aspheric surface according to the surface shape deviation is specifically: according to the surface shape deviation of the measured aspheric surface relative to the ideal aspheric surface, through the synthesis of the surface shape deviation and the ideal aspheric surface, finally the measured aspheric surface is obtained. The actual measured shape of an aspheric surface.
如果被测非球面度过大，则设计的逆向投影条纹将会过密或者条纹弯曲超过一个条纹间距，这时要适当考虑条纹的处理能力问题，比如在设计的理想非球面上减去一个轻度非球面；成像系统获得的调制条纹是相对于理想非球面(或者标准非球面加上补偿的轻度非球面)的调制变形条纹，最后根据调制变形条纹确定被测非球面的面形。If the measured aspheric surface is too large, the designed reverse projection fringes will be too dense or the fringes will be bent beyond a fringe spacing. At this time, the processing capacity of the fringes should be properly considered, such as subtracting a light from the ideal aspheric surface designed. The modulation fringe obtained by the imaging system is the modulation deformation fringe relative to the ideal aspheric surface (or the standard aspheric surface plus a compensated mild aspheric surface), and finally the surface shape of the measured aspheric surface is determined according to the modulation deformation fringe.
本发明实施例1提供一种光学非球面面形的检测装置，如图1所示，该装置包括逆向补偿条纹生成装置、分束装置、标准镜头、被测非球面、成像系统，所述逆向补偿条纹生成装置、分束装置、标准镜头、被测非球面依次在光轴上从左到右设置，所述被测非球面、成像系统位于分束装置的上下任意一侧并且其成像光轴垂直于光轴。Embodiment 1 of the present invention provides an optical aspheric surface detection device, as shown in Figure 1, the device includes a reverse compensation fringe generation device, a beam splitter, a standard lens, a measured aspheric surface, and an imaging system. The compensation fringe generation device, the beam splitting device, the standard lens, and the measured aspheric surface are sequentially arranged from left to right on the optical axis. perpendicular to the optical axis.
所述成像系统包括沿光轴依次设置的成像透镜和CCD相机。The imaging system includes an imaging lens and a CCD camera arranged in sequence along the optical axis.
所述逆向补偿条纹生成装置可采用三种结构：液晶空间光调制法、DMD反射式空间光调制法、显示器反射法。The device for generating reverse compensation stripes can adopt three structures: liquid crystal spatial light modulation method, DMD reflective spatial light modulation method, and display reflection method.
液晶空间光调制法：激光通过扩束准直照射到液晶空间光调制器，该调制器由计算机控制，透射得到逆向补偿条纹，如图2所示。Liquid crystal spatial light modulation method: The laser is irradiated to the liquid crystal spatial light modulator through beam expansion and collimation. The modulator is controlled by a computer, and the reverse compensation stripes are obtained by transmission, as shown in Figure 2.
DMD反射式空间光调制法：激光通过扩束准直照射在DMD空间光调制器上，计算机控制DMD空间光调制器，反射得到逆向补偿条纹的方法，如图3所示。DMD reflective spatial light modulation method: the laser is irradiated on the DMD spatial light modulator through beam expansion and collimation, the computer controls the DMD spatial light modulator, and the method of reflection obtains reverse compensation fringes, as shown in Figure 3.
显示器反射法：由计算机生成逆向补偿条纹，在显示器上显示，经反射镜反射，经准直镜准直得到测量需要的逆向补偿条纹，如图4所示。Display reflection method: The reverse compensation fringes are generated by the computer, displayed on the monitor, reflected by the mirror, and collimated by the collimating mirror to obtain the reverse compensation fringes required for measurement, as shown in Figure 4.
本发明实施例2提供一种光学非球面面形的检测装置，如图5所示，该装置包括逆向补偿条纹生成装置、分束装置、标准镜头、被测非球面、平面反射镜、成像系统，所述逆向补偿条纹生成装置发出的光束经标准镜头投影到被测非球面，所述被测球面发出的反射光束经标准镜头、平面反射镜反射到成像系统。Embodiment 2 of the present invention provides an optical aspheric surface detection device, as shown in Figure 5, the device includes a reverse compensation fringe generation device, a beam splitter, a standard lens, an aspheric surface to be tested, a plane mirror, and an imaging system The light beam emitted by the reverse compensation fringe generating device is projected onto the measured aspheric surface through the standard lens, and the reflected light beam emitted by the measured spherical surface is reflected to the imaging system through the standard lens and the plane mirror.
以上所述，仅为本发明的较佳实施例而已，并非用于限定本发明的保护范围。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the protection scope of the present invention.
Claims (9)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710293334.6A CN107063122B (en) | 2017-04-28 | 2017-04-28 | The detection method and its device of surface shape of optical aspheric surface |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710293334.6A CN107063122B (en) | 2017-04-28 | 2017-04-28 | The detection method and its device of surface shape of optical aspheric surface |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107063122A true CN107063122A (en) | 2017-08-18 |
| CN107063122B CN107063122B (en) | 2019-11-29 |
Family
ID=59604366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710293334.6A Active CN107063122B (en) | 2017-04-28 | 2017-04-28 | The detection method and its device of surface shape of optical aspheric surface |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107063122B (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108286950A (en) * | 2017-12-27 | 2018-07-17 | 中国科学院长春光学精密机械与物理研究所 | A kind of online test method of reflecting mirror surface shape |
| CN108917652A (en) * | 2018-07-09 | 2018-11-30 | 中国科学院光电技术研究所 | Pose optimization method for off-axis aspheric surface of structured light detection |
| CN109708591A (en) * | 2019-03-13 | 2019-05-03 | 茂莱（南京）仪器有限公司 | A kind of detection device of aspherical optical element |
| CN110487205A (en) * | 2019-07-31 | 2019-11-22 | 北京理工大学 | In conjunction with the aspherical parameter error interferometric method of the confocal positioning of dispersion |
| CN111288929A (en) * | 2020-03-16 | 2020-06-16 | 苏州依诺维视智能科技有限公司 | Three-dimensional high-precision vision measurement method for workpiece with large curvature surface |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003014659A2 (en) * | 2001-08-08 | 2003-02-20 | Nova Measuring Instruments Ltd. | Method and system for measuring the topography of a sample |
| CN102506759A (en) * | 2011-11-16 | 2012-06-20 | 四川大学 | Lonky detection method of aspheric surface with heavy calibre |
| CN104729428A (en) * | 2015-02-27 | 2015-06-24 | 湖北文理学院 | Coaxial structural light based mirror face part three-dimensional shape measuring system and measuring method |
| CN106017358A (en) * | 2016-08-10 | 2016-10-12 | 边心田 | Three-dimensional surface shape measurement method based on precorrected grating projection |
| CN106123807A (en) * | 2016-06-30 | 2016-11-16 | 苏州图锐智能科技有限公司 | A kind of product 3D detecting system and corresponding method of detection |
| CN106257995A (en) * | 2016-07-25 | 2016-12-28 | 深圳大学 | A kind of light field three-D imaging method and system thereof |
-
2017
- 2017-04-28 CN CN201710293334.6A patent/CN107063122B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003014659A2 (en) * | 2001-08-08 | 2003-02-20 | Nova Measuring Instruments Ltd. | Method and system for measuring the topography of a sample |
| CN102506759A (en) * | 2011-11-16 | 2012-06-20 | 四川大学 | Lonky detection method of aspheric surface with heavy calibre |
| CN104729428A (en) * | 2015-02-27 | 2015-06-24 | 湖北文理学院 | Coaxial structural light based mirror face part three-dimensional shape measuring system and measuring method |
| CN106123807A (en) * | 2016-06-30 | 2016-11-16 | 苏州图锐智能科技有限公司 | A kind of product 3D detecting system and corresponding method of detection |
| CN106257995A (en) * | 2016-07-25 | 2016-12-28 | 深圳大学 | A kind of light field three-D imaging method and system thereof |
| CN106017358A (en) * | 2016-08-10 | 2016-10-12 | 边心田 | Three-dimensional surface shape measurement method based on precorrected grating projection |
Non-Patent Citations (1)
| Title |
|---|
| 师途等: "光学非球面面形非零位检测的回程误差校正", 《光学学报》 * |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108286950A (en) * | 2017-12-27 | 2018-07-17 | 中国科学院长春光学精密机械与物理研究所 | A kind of online test method of reflecting mirror surface shape |
| CN108917652A (en) * | 2018-07-09 | 2018-11-30 | 中国科学院光电技术研究所 | Pose optimization method for off-axis aspheric surface of structured light detection |
| CN108917652B (en) * | 2018-07-09 | 2020-04-10 | 中国科学院光电技术研究所 | Pose optimization method for off-axis aspheric surface of structured light detection |
| CN109708591A (en) * | 2019-03-13 | 2019-05-03 | 茂莱（南京）仪器有限公司 | A kind of detection device of aspherical optical element |
| CN110487205A (en) * | 2019-07-31 | 2019-11-22 | 北京理工大学 | In conjunction with the aspherical parameter error interferometric method of the confocal positioning of dispersion |
| CN111288929A (en) * | 2020-03-16 | 2020-06-16 | 苏州依诺维视智能科技有限公司 | Three-dimensional high-precision vision measurement method for workpiece with large curvature surface |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107063122B (en) | 2019-11-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106840027B (en) | Astigmatism-compensated interference detection device and detection method for optical free-form surface | |
| CN107063122B (en) | The detection method and its device of surface shape of optical aspheric surface | |
| Su et al. | SCOTS: a reverse Hartmann test with high dynamic range for Giant Magellan Telescope primary mirror segments | |
| CN104121867B (en) | Aspheric lens computer-generated holography interference detecting method based on liquid crystal spatial light modulator | |
| CN105300307B (en) | The optical mirror plane deformation measuring device and method of Two-Dimensional Speckle digital correlation techniques | |
| CN102735184B (en) | Optical surface shape detection device and detection method | |
| CN102589416A (en) | Wavelength scanning interferometer and method for aspheric measurement | |
| CN206627077U (en) | A kind of freeform optics surface detection means for heavy caliber depth rise | |
| CN102494634A (en) | Off-axis aspherical mirror detection method based on fringe reflection | |
| CN102506759A (en) | Lonky detection method of aspheric surface with heavy calibre | |
| Trivedi et al. | Measurement of focal length using phase shifted moiré deflectometry | |
| WO2016183874A1 (en) | Digital phase shift point diffraction interferometer and optical system wave aberration measuring method | |
| Zhu et al. | 600-mm aperture simultaneous phase-shifting Fizeau interferometer | |
| Nguyen et al. | Real-time 3D measurement of freeform surfaces by dynamic deflectometry based on diagonal spatial carrier-frequency pattern projection | |
| CN204479018U (en) | Based on the aspheric surface interference checking device of stitching interferometry and calculation holographic method | |
| Wu et al. | Precise 3-D microscopic profilometry using diffractive image microscopy and artificial neural network in single-exposure manner | |
| CN108061514A (en) | It is a kind of that aspherical dynamic modelling method is detected using axial scan optical interferometry | |
| Xiong et al. | Specular surface deformation measurement based on projected-speckle deflectometry with digital image correlation | |
| CN103134443B (en) | Large-caliber large-diameter-thickness ratio reflector surface shape auto-collimation detection device and method | |
| Flores et al. | A panoramic fringe projection system | |
| Li et al. | Interferometry with flexible point source array for measuring complex freeform surface and its design algorithm | |
| CN104729431A (en) | Method for measuring surface curvature radius of spherical optical element with small curvature and small caliber | |
| CN108267094B (en) | A non-cylindrical surface interferometric splicing measurement system and method based on rotating CGH | |
| Zhang et al. | Full-field 3D shape measurement of specular object having discontinuous surfaces | |
| Chen et al. | Wavefront measurement of a multilens optical system based on phase measuring deflectometry |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |