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CN107040209A - Circuit arrangement, oscillator, electronic equipment and moving body - Google Patents

Circuit arrangement, oscillator, electronic equipment and moving body Download PDF

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Publication number
CN107040209A
CN107040209A CN201611167368.2A CN201611167368A CN107040209A CN 107040209 A CN107040209 A CN 107040209A CN 201611167368 A CN201611167368 A CN 201611167368A CN 107040209 A CN107040209 A CN 107040209A
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processing
value
control data
frequency control
circuit
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CN107040209B (en
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米泽岳美
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Seiko Epson Corp
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Seiko Epson Corp
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    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03BGENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/02Details
    • H03B5/04Modifications of generator to compensate for variations in physical values, e.g. power supply, load, temperature
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03BGENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
    • H03B5/00Generation of oscillations using amplifier with regenerative feedback from output to input
    • H03B5/30Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
    • H03B5/32Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
    • H03B5/36Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device

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  • Oscillators With Electromechanical Resonators (AREA)
  • Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)

Abstract

电路装置、振荡器、电子设备以及移动体。电路装置包含:处理部,其对输入的频率控制数据进行信号处理,输出频率控制数据;以及振荡信号生成电路,其使用振子,生成通过频率控制数据设定的振荡频率的振荡信号。处理部在卡尔曼滤波处理的先验估计值的更新处理中,进行通过时间步k‑1的后验估计值x^(k‑1)与校正值D(k‑1)的相加处理来求出时间步k的先验估计值x^‑(k)的处理,并根据卡尔曼滤波处理的结果,进行频率控制数据的老化校正。

Circuit devices, oscillators, electronic equipment, and moving objects. The circuit device includes: a processing unit that performs signal processing on input frequency control data to output the frequency control data; and an oscillation signal generation circuit that uses a vibrator to generate an oscillation signal at an oscillation frequency set by the frequency control data. In the update process of the prior estimate value of the Kalman filtering process, the processing unit performs addition processing of the posterior estimate value x ^ (k-1) and the correction value D(k-1) at time step k-1 to obtain The process of obtaining the prior estimate value x ^‑ (k) of time step k, and according to the result of Kalman filter processing, performs aging correction of frequency control data.

Description

电路装置、振荡器、电子设备以及移动体Circuit devices, oscillators, electronic equipment, and moving objects

技术领域technical field

本发明涉及电路装置、振荡器、电子设备以及移动体。The present invention relates to a circuit device, an oscillator, electronic equipment, and a mobile body.

背景技术Background technique

一直以来,公知有OCXO(oven controlled crystal oscillator:恒温晶体振荡器)、TCXO(temperature compensated crystal oscillator:温度补偿晶体振荡器)等振荡器。例如OCXO作为基站、网络路由器、测量设备等中的基准信号源而被使用。Conventionally, oscillators such as an OCXO (oven controlled crystal oscillator) and a TCXO (temperature compensated crystal oscillator) have been known. For example, OCXOs are used as reference signal sources in base stations, network routers, measurement equipment, and the like.

在这样的OCXO、TCXO等振荡器中,期望较高的频率稳定度。但是,存在以下问题:在振荡器的振荡频率中存在称为老化的随时间的变化,振荡频率随时间经过而变动。例如,作为抑制不能接收GPS信号等基准信号、已成为所谓的保持模式(hold-over)状态的情况下的振荡频率的变动的现有技术,存在日本特开2015-82815号公报中公开的技术。在该现有技术中,设置存储部以及经过时间测量部,该存储部对振荡频率的控制电压的校正值与经过时间的对应关系信息(老化特性数据)进行存储。而且,在检测到保持模式的情况下,根据在存储部中存储的校正值与经过时间的对应关系信息、和由经过时间测量部测量的经过时间来执行老化校正。In oscillators such as such OCXOs and TCXOs, high frequency stability is desired. However, there is a problem that the oscillation frequency of the oscillator changes with time called aging, and the oscillation frequency fluctuates over time. For example, there is a technique disclosed in Japanese Patent Application Laid-Open No. 2015-82815 as a conventional technique for suppressing fluctuations in oscillation frequency when a reference signal such as a GPS signal cannot be received and a so-called hold-over state is reached. . In this prior art, a storage unit for storing correspondence relation information (aging characteristic data) between a correction value of a control voltage of an oscillation frequency and an elapsed time is provided, and an elapsed time measuring unit is provided. Also, when the hold mode is detected, burn-in correction is performed based on the correspondence relation information between the correction value and the elapsed time stored in the storage unit and the elapsed time measured by the elapsed time measuring unit.

但是,在该现有技术中,存在如下问题:作为存储校正值与经过时间的对应关系信息的存储部,需要具有大的存储容量的存储部,会导致电路装置的大规模化。例如,为了实现更高精度的老化校正,需要将更大的数据量的对应关系信息存储于存储部,导致电路装置大规模化。However, in this prior art, there is a problem that a storage unit having a large storage capacity is required as a storage unit for storing the correspondence relation information between the correction value and the elapsed time, leading to an increase in the size of the circuit device. For example, in order to achieve higher-precision burn-in correction, it is necessary to store a larger amount of correspondence information in a storage unit, resulting in an increase in the size of the circuit device.

发明内容Contents of the invention

根据本发明的几个方式,可提供一种能够以更小规模的电路实现更高精度的老化校正的电路装置、振荡器、电子设备以及移动体等。According to some aspects of the present invention, it is possible to provide a circuit device, an oscillator, an electronic device, a mobile body, and the like capable of achieving higher-precision burn-in correction with a smaller-scale circuit.

本发明的一个方式涉及电路装置,该电路装置包含:处理部,其对频率控制数据进行信号处理;以及振荡信号生成电路,其使用振子和来自所述处理部的所述频率控制数据,生成通过所述频率控制数据设定的振荡频率的振荡信号,所述处理部在卡尔曼滤波处理的先验估计值的更新处理中,进行通过上次的时刻的后验估计值与校正值的相加处理求出此次的时刻的先验估计值的处理,并根据所述卡尔曼滤波处理的结果,进行所述频率控制数据的老化校正。One aspect of the present invention relates to a circuit device including: a processing unit that performs signal processing on frequency control data; In an oscillation signal of an oscillation frequency set by the frequency control data, the processing unit adds an a posteriori estimated value and a corrected value at a previous time in update processing of the a priori estimated value in the Kalman filter process. Processing is performed to obtain a priori estimated value at this time, and aging correction of the frequency control data is performed based on the result of the Kalman filter processing.

根据本发明的一个方式,通过处理部对频率控制数据进行信号处理,使用振子和来自处理部的频率控制数据,生成通过频率控制数据设定的振荡频率的振荡信号。而且在本发明的一个方式中,在卡尔曼滤波处理的先验估计值的更新处理中,通过上次的时刻的后验估计值与校正值的相加处理,求出此次的时刻的先验估计值。而且,根据该卡尔曼滤波处理的结果,进行频率控制数据的老化校正。这样,例如与使用扩展卡尔曼滤波处理的情况相比,减轻了处理部的处理负荷并且抑制了电路装置的电路规模的增加等。因此,能够以更小规模的电路实现更高精度的老化校正。According to one aspect of the present invention, the frequency control data is signal-processed by the processing unit, and an oscillation signal having an oscillation frequency set by the frequency control data is generated using the vibrator and the frequency control data from the processing unit. Furthermore, in one aspect of the present invention, in the updating process of the priori estimated value in the Kalman filtering process, the priori estimated value at the previous time is added to the corrected value to obtain the priori estimated value at the current time. test estimate. Then, based on the result of the Kalman filter processing, aging correction of the frequency control data is performed. In this way, for example, compared with the case of using extended Kalman filter processing, the processing load on the processing unit is reduced, and an increase in the circuit scale of the circuit device is suppressed. Therefore, burn-in correction with higher accuracy can be realized with a smaller-scale circuit.

此外,在本发明的一个方式中,可以是,所述处理部根据所述卡尔曼滤波处理中的观测残差求出所述校正值。Furthermore, in one aspect of the present invention, the processing unit may obtain the correction value from an observation residual in the Kalman filtering process.

这样,能够使用反映了卡尔曼滤波处理中的观测残差而更新的校正值实现老化校正,能够实现更高精度的老化校正。In this way, burn-in correction can be realized using a correction value updated to reflect the observation residual in the Kalman filter process, and more accurate burn-in correction can be realized.

此外,在本发明的一个方式中,所述处理部进行所述上次的时刻即时间步k-1的所述后验估计值x^(k-1)与所述校正值D(k-1)的相加处理,通过x^-(k)=x^(k-1)+D(k-1)求出所述此次的时刻即时间步k的所述先验估计值x^-(k)。In addition, in one aspect of the present invention, the processing unit performs the a posteriori estimated value x^(k-1) and the correction value D(k- 1) Addition process, by x^ - (k)=x^(k-1)+D(k-1) to obtain the said a priori estimated value x^ of the time step k at this time - (k).

这样,能够通过x^-(k)=x^(k-1)+D(k-1)这样的处理负荷轻的简单的运算处理求出时间步k的先验估计值x^-(k),实现了电路装置的小规模化等。In this way, a priori estimated value x^ - ( k ), realizing miniaturization of circuit devices, etc.

此外,在本发明的一个方式中,可以是,所述处理部根据所述时间步k-1的所述校正值D(k-1)和所述卡尔曼滤波处理中的观测残差,求出所述时间步k的校正值D(k)。In addition, in one aspect of the present invention, the processing unit may obtain the correction value D(k-1) at the time step k-1 and the observation residual error in the Kalman filter processing. Get the correction value D(k) of the time step k.

这样,能够使用反映了卡尔曼滤波处理中的观测残差并且在各时间步中更新的校正值D(k)实现老化校正。In this way, burn-in correction can be realized using the correction value D(k) that reflects the observation residual in the Kalman filter process and is updated at each time step.

此外,在本发明的一个方式中,可以是,在设所述观测残差为ek、常数为E的情况下,所述处理部通过D(k)=D(k-1)+E·ek求出所述校正值D(k)。In addition, in one aspect of the present invention, when the observation residual is ek and the constant is E, the processing unit may use D(k)=D(k-1)+E·ek The correction value D(k) is obtained.

这样,能够通过D(k)=D(k-1)+E·ek这样的简单的运算处理求出校正值D(k),能够减轻处理部的处理负荷。In this way, the correction value D(k) can be obtained by simple arithmetic processing such as D(k)=D(k-1)+E·ek, and the processing load on the processing unit can be reduced.

此外,在本发明的一个方式中,可以是,该电路装置包含存储所述常数E的存储部。Furthermore, in one aspect of the present invention, the circuit device may include a storage unit that stores the constant E.

这样,例如能够使用与各产品等对应的适当的常数E实现校正值D(k)=D(k-1)+E·ek的更新处理,能够实现更高精度的老化校正。In this way, for example, update processing of the correction value D(k)=D(k-1)+E·ek can be realized using an appropriate constant E corresponding to each product, and more accurate burn-in correction can be realized.

此外,在本发明的一个方式中,可以是,所述处理部对基于输入信号和基准信号的相位比较结果的所述频率控制数据进行所述信号处理,其中,所述输入信号基于所述振荡信号,所述处理部在检测到由所述基准信号的消失或者异常引起的保持模式之前的期间,进行如下处理:通过卡尔曼滤波处理,估计针对基于所述相位比较结果的所述频率控制数据的观测值的真值,在检测到所述保持模式的情况下,保存与检测到所述保持模式的时刻对应的时刻的所述真值,通过进行基于所述真值的运算处理,生成老化校正后的所述频率控制数据。Furthermore, in one aspect of the present invention, the processing unit may perform the signal processing on the frequency control data based on a phase comparison result of an input signal based on the oscillation signal, the processing unit performs the process of estimating the frequency control data based on the phase comparison result by Kalman filter processing until the hold mode is detected due to the disappearance or abnormality of the reference signal. The true value of the observed value of , when the hold mode is detected, the true value at the time corresponding to the time when the hold mode is detected is stored, and by performing arithmetic processing based on the true value, an aging The corrected frequency control data.

这样,能够根据通过卡尔曼滤波处理估计出、并且在与保持模式的检出时刻对应的时刻保存的真值实现老化校正。因此,能够实现以往无法实现的高精度的老化校正。In this way, burn-in correction can be realized based on the true value estimated by the Kalman filter process and stored at the time corresponding to the detection time of the hold mode. Therefore, highly accurate burn-in correction that has not been possible conventionally can be realized.

此外,在本发明的一个方式中,可以是,所述处理部通过进行对所述真值加上所述校正值的所述运算处理,生成老化校正后的所述频率控制数据。Furthermore, in one aspect of the present invention, the processing unit may generate the aging-corrected frequency control data by performing the arithmetic processing of adding the correction value to the true value.

这样,进行对通过卡尔曼滤波处理估计出的真值加上补偿例如由老化速率导致的频率变化的校正值的运算处理,由此,实现老化校正。因此,能够以简单的处理实现高精度的老化校正。In this way, an arithmetic process of adding a correction value for compensating for, for example, a frequency change due to an aging rate to the true value estimated by the Kalman filter processing is performed, whereby burn-in correction is realized. Therefore, highly accurate burn-in correction can be realized with simple processing.

此外,在本发明的一个方式中,可以是,所述处理部进行对所述真值加上滤波处理后的所述校正值的所述运算处理。Furthermore, in one aspect of the present invention, the processing unit may perform the arithmetic processing of adding the corrected value obtained by filtering to the true value.

这样,能够有效抑制如下情况:由于将存在变动的波动的校正值与真值相加而导致老化校正的精度下降。In this way, it is possible to effectively suppress a decrease in the accuracy of burn-in correction due to adding the correction value with fluctuating fluctuations to the true value.

此外,在本发明的一个方式中,该电路装置可以还包含存储部,该存储部存储所述卡尔曼滤波处理的系统噪声的设定用的系统噪声常数、和所述卡尔曼滤波处理的观测噪声的设定用的观测噪声常数。In addition, in one aspect of the present invention, the circuit device may further include a storage unit that stores a system noise constant for setting the system noise of the Kalman filtering process and an observation value of the Kalman filtering process. Observed noise constant for noise setting.

这样,能够实现降低了系统噪声和观测噪声的元件偏差的影响的老化校正。In this way, burn-in correction that reduces the influence of element variations of system noise and observation noise can be realized.

此外,在本发明的一个方式中,可以是,该电路装置包含用于监测所述先验估计值和观测值的数字接口部。Furthermore, in one aspect of the present invention, the circuit device may include a digital interface unit for monitoring the a priori estimated value and the observed value.

这样,例如检查装置等外部装置能够经由数字接口部监测先验估计值和观测值。由此,能够实现使相当于例如观测值与先验估计值的差分值的观测误差成为更小的值的设定处理等。In this way, an external device such as an inspection device can monitor a priori estimated values and observed values via the digital interface unit. Thereby, for example, setting processing for making the observation error corresponding to the difference value between the observed value and the a priori estimated value smaller, etc. can be realized.

此外,本发明的另一个方式涉及振荡器,该振荡器包含:上述任意一个方式所述的电路装置;以及所述振子。Furthermore, another aspect of the present invention relates to an oscillator including: the circuit device described in any one of the above aspects; and the vibrator.

此外,本发明的另一个方式涉及电子设备,该电子设备包含上述任意一个方式所述的电路装置。Furthermore, another aspect of the present invention relates to electronic equipment including the circuit device described in any one of the above-mentioned aspects.

此外,本发明的另一个方式涉及移动体,该移动体包含上述任意一个方式所述的电路装置。Furthermore, another aspect of the present invention relates to a moving body including the circuit device described in any one of the above-mentioned aspects.

附图说明Description of drawings

图1是针对老化特性的元件偏差的说明图。FIG. 1 is an explanatory diagram of element variation with respect to aging characteristics.

图2是本实施方式的电路装置的基本的结构例。FIG. 2 is a basic configuration example of a circuit device according to this embodiment.

图3是本实施方式的方法的说明图。FIG. 3 is an explanatory diagram of the method of this embodiment.

图4是本实施方式的方法的说明图。FIG. 4 is an explanatory diagram of the method of this embodiment.

图5是针对保持模式时的老化校正的说明图。FIG. 5 is an explanatory diagram for burn-in correction in hold mode.

图6是针对保持模式的说明图。FIG. 6 is an explanatory diagram for a hold mode.

图7是针对保持模式的说明图。FIG. 7 is an explanatory diagram for a hold mode.

图8是针对保持模式的说明图。FIG. 8 is an explanatory diagram for a hold mode.

图9是本实施方式的电路装置的详细结构例。FIG. 9 is a detailed configuration example of the circuit device of this embodiment.

图10是使用了卡尔曼滤波处理的老化校正的说明图。FIG. 10 is an explanatory diagram of burn-in correction using Kalman filter processing.

图11是使用了卡尔曼滤波处理的老化校正的说明图。FIG. 11 is an explanatory diagram of burn-in correction using Kalman filter processing.

图12是处理部的详细结构例。Fig. 12 is a detailed configuration example of a processing unit.

图13是温度补偿处理的说明图。FIG. 13 is an explanatory diagram of temperature compensation processing.

图14是温度补偿处理的说明图。FIG. 14 is an explanatory diagram of temperature compensation processing.

图15是温度补偿处理的说明图。FIG. 15 is an explanatory diagram of temperature compensation processing.

图16是处理部的动作说明图。FIG. 16 is an explanatory diagram of the operation of the processing unit.

图17是处理部的动作说明图。FIG. 17 is an explanatory diagram of the operation of the processing unit.

图18是老化校正部的结构例。Fig. 18 is a configuration example of a burn-in correction unit.

图19是卡尔曼滤波的模型例。Fig. 19 is a model example of Kalman filtering.

图20是卡尔曼滤波部的结构例。FIG. 20 is a configuration example of a Kalman filter unit.

图21是示出本实施方式的预测频率偏差与实测频率偏差的例子的图。FIG. 21 is a diagram showing an example of a predicted frequency deviation and a measured frequency deviation according to the present embodiment.

图22是温度传感器的结构例。Fig. 22 is a structural example of a temperature sensor.

图23是振荡电路的结构例。FIG. 23 is a configuration example of an oscillation circuit.

图24是本实施方式的变形例的说明图。FIG. 24 is an explanatory diagram of a modified example of the present embodiment.

图25是本实施方式的变形例的说明图。FIG. 25 is an explanatory diagram of a modified example of the present embodiment.

图26是振荡器的结构例。Fig. 26 is a structural example of an oscillator.

图27是电子设备的结构例。Fig. 27 is a configuration example of an electronic device.

图28是移动体的结构例。Fig. 28 is a structural example of a mobile body.

图29是振荡器的详细结构例。Fig. 29 is a detailed configuration example of an oscillator.

图30是作为电子设备之一的基站的结构例。Fig. 30 is a configuration example of a base station as one of electronic devices.

具体实施方式detailed description

以下,针对本发明的优选实施方式详细地进行说明。此外,以下说明的本实施方式并非对权利要求书中记载的本发明的内容进行不当限定,在本实施方式中说明的所有结构并非都必须是本发明的解决手段。Hereinafter, preferred embodiments of the present invention will be described in detail. In addition, the present embodiment described below does not unduly limit the content of the present invention described in the claims, and not all configurations described in the present embodiment are necessarily solutions of the present invention.

1.由老化导致的振荡频率变动1. Oscillation frequency changes due to aging

在OCXO、TCXO等振荡器中,由于称为老化的随时间的变化,振荡频率变动。而且,在振荡器的个体间的振荡频率的老化变动的特性中,存在由构成振荡器的部件的性能、部件和振荡器的安装状态、或者振荡器的使用环境等的个体偏差(以下,称为元件偏差)引起的差异。In oscillators such as OCXO and TCXO, the oscillation frequency fluctuates due to time-dependent changes called aging. In addition, in the characteristics of the aging fluctuation of the oscillation frequency among individual oscillators, there are individual variations due to the performance of the components constituting the oscillator, the mounting state of the components and the oscillator, or the environment in which the oscillator is used (hereinafter referred to as is the difference caused by component deviation).

图1的A1~A5是关于出货批号相同或者不同的多个振荡器的老化特性的测量结果的一例。如图1的A1~A5所示,在老化变动的方式中存在伴随着元件偏差的差异。A1 to A5 in FIG. 1 are examples of measurement results of aging characteristics of a plurality of oscillators having the same or different shipment lot numbers. As shown in A1 to A5 of FIG. 1 , there is a difference in the form of aging variation due to element variation.

由老化导致的振荡频率的变动的原因被认为是在气密密封容器内产生的粉尘向振子的脱落和附着、基于某些逸出气体的环境变化、或者在振荡器中使用的粘接剂的随时间的变化。The cause of the change in oscillation frequency due to aging is considered to be the shedding and adhesion of dust generated in the hermetically sealed container to the vibrator, environmental changes based on some outgassing, or the adhesive used in the vibrator. changes over time.

作为用于抑制这样的由老化导致的振荡频率的变动的对策,存在如下方法:在出货前实施使振荡器工作一定期间的初始老化,使振荡频率初始变动之后再出货。但是,对于要求高频率稳定度的用途,仅采取这样的初始老化的对策是不够的,期望补偿由老化导致的振荡频率的变动的老化校正。As a countermeasure for suppressing such a change in oscillation frequency due to aging, there is a method of performing initial burn-in of operating the oscillator for a certain period of time before shipment, and then shipping the oscillator after initially changing the oscillation frequency. However, for applications that require high frequency stability, it is not enough to take such an initial aging countermeasure, and aging correction that compensates for fluctuations in the oscillation frequency due to aging is desired.

除此以外,在将振荡器用作基站的基准信号源的情况下,存在所谓的保持模式的问题。例如在基站中,通过使用PLL电路将振荡器的振荡信号(输出信号)与来自GPS或网络的基准信号同步,抑制频率变动。但是,当产生来自GPS或网络(互联网)的基准信号成为消失或者异常的保持模式时,无法得到用于同步的基准信号。如果以GPS为例,则在由于GPS天线的设置位置或设置方向而未能接收定位信号、由于干扰波而未能准确地接收到定位信号、或者未从定位用卫星发送来定位信号的情况下,产生保持模式,无法执行使用了基准信号的同步处理。In addition, when an oscillator is used as a reference signal source of a base station, there is a problem of so-called hold mode. For example, in a base station, frequency fluctuations are suppressed by using a PLL circuit to synchronize the oscillation signal (output signal) of an oscillator with a reference signal from GPS or a network. However, when the reference signal from the GPS or the network (Internet) disappears or becomes abnormal in a hold mode, a reference signal for synchronization cannot be obtained. Taking GPS as an example, when the positioning signal cannot be received due to the installation position or direction of the GPS antenna, the positioning signal cannot be received accurately due to interference waves, or the positioning signal is not transmitted from the positioning satellite , a hold mode occurs, and synchronization processing using the reference signal cannot be performed.

当产生这样的保持模式时,由振荡器的自激振荡而产生的振荡信号成为基站的基准信号源。因此,要求如下的保持模式性能:在从保持模式的产生时刻到从保持模式恢复的时刻(解除时刻)为止的保持模式期间,抑制由振荡器的自激振荡导致的振荡频率的变动。When such a hold mode occurs, the oscillation signal generated by the self-oscillation of the oscillator becomes a reference signal source of the base station. Therefore, hold mode performance is required that suppresses fluctuations in oscillation frequency due to self-oscillation of the oscillator during the hold mode period from when the hold mode is generated to when the hold mode returns (release time).

但是,如上述那样,由于振荡器的振荡频率存在由老化导致的无法忽略的程度的变动,因此,由于此而存在无法实现高的保持模式性能的课题。例如在24小时等保持模式期间内,在规定了容许的频率偏差(Δf/f)的情况下,如果存在由老化导致的振荡频率的较大变动,则无法满足该容许频率偏差的规定。However, as described above, since the oscillation frequency of the oscillator fluctuates to a non-negligible degree due to aging, there is a problem that high hold mode performance cannot be realized due to this. For example, during a hold mode period such as 24 hours, when an allowable frequency deviation (Δf/f) is specified, if there is a large fluctuation in the oscillation frequency due to aging, the allowable frequency deviation cannot be satisfied.

例如作为基站与通信终端的通信方式,提出了FDD(Frequency Division Duplex:频分双工)、TDD(Time Division Duplex:时分双工)等各种方式。而且,在TDD方式中,上行和下行使用相同的频率按照时分方式收发数据,在分配给各设备的时隙之间设定有保护时间。因此,为了实现适当的通信,需要在各设备中进行时刻同步,要求有准确的绝对时刻的计时。即,为了提供移动电话、地面数字广播等在大范围区域内通信的无线通信系统,需要设置多个基站,当计时时刻在这些基站之间发生偏差时,无法实现适当的通信。但是,在产生了来自GPS或网络的基准信号消失或者异常的保持模式的情况下,在振荡器侧需要在没有基准信号的状态下对绝对时刻进行计时,如果该计时时刻发生偏差,则通信失败。因此,对于在基站等中使用的振荡器,在保持模式期间也要求非常高的频率稳定度。因此,对于补偿由老化导致的频率变动的老化校正,也要求高精度的校正。For example, various methods such as FDD (Frequency Division Duplex) and TDD (Time Division Duplex) have been proposed as communication methods between a base station and a communication terminal. In addition, in the TDD method, uplink and downlink use the same frequency to transmit and receive data in a time-division manner, and a guard time is set between time slots allocated to each device. Therefore, in order to realize appropriate communication, it is necessary to perform time synchronization in each device, and accurate absolute time measurement is required. That is, in order to provide a wireless communication system for communication over a wide area, such as mobile phones and terrestrial digital broadcasting, it is necessary to install a plurality of base stations, and if the counting time varies between these base stations, appropriate communication cannot be realized. However, when the reference signal from GPS or the network disappears or an abnormal hold mode occurs, the oscillator needs to time the absolute time in the absence of the reference signal. If the counted time deviates, communication will fail. . Therefore, for an oscillator used in a base station or the like, very high frequency stability is required also during the holdover mode. Therefore, high-precision correction is also required for aging correction that compensates for frequency fluctuations due to aging.

2.电路装置的结构2. The structure of the circuit device

图2示出本实施方式的电路装置的基本电路结构。如图2所示,本实施方式的电路装置包含处理部50和振荡信号生成电路140。另外,本实施方式的电路装置的结构不限于图2的结构,能够实施省略其中一部分结构要素、或追加其他结构要素等各种变形。FIG. 2 shows the basic circuit configuration of the circuit device of this embodiment. As shown in FIG. 2 , the circuit device of the present embodiment includes a processing unit 50 and an oscillation signal generating circuit 140 . In addition, the configuration of the circuit device according to the present embodiment is not limited to the configuration of FIG. 2 , and various modifications such as omitting some components or adding other components are possible.

处理部50进行各种信号处理。例如对频率控制数据DFCI(频率控制码)进行信号处理。具体而言,处理部50(数字信号处理部)进行例如老化校正处理、卡尔曼滤波处理,并根据需要进行温度补偿处理等信号处理(数字信号处理)。并且,输出信号处理后的频率控制数据DFCQ。处理部50能够包含:卡尔曼滤波部54(卡尔曼滤波处理的电路或程序模块)和老化校正部56(老化校正处理的电路或程序模块)。该处理部50可以由门阵列等ASIC电路实现,也可以由处理器(DSP、CPU)和在处理器上工作的程序(程序模块)来实现。The processing unit 50 performs various signal processing. For example, signal processing is performed on frequency control data DFCI (frequency control code). Specifically, the processing unit 50 (digital signal processing unit) performs, for example, burn-in correction processing, Kalman filter processing, and, if necessary, signal processing (digital signal processing) such as temperature compensation processing. And, the signal-processed frequency control data DFCQ is output. The processing unit 50 can include a Kalman filter unit 54 (circuit or program module for Kalman filter processing) and a burn-in correction unit 56 (circuit or program module for burn-in correction processing). The processing unit 50 may be realized by an ASIC circuit such as a gate array, or may be realized by a processor (DSP, CPU) and a program (program module) operating on the processor.

振子XTAL例如是AT切类型、或SC切类型等厚度剪切振动类型的石英振子等或弯曲振动类型等的压电振子。作为一例,振子XTAL是设置于恒温槽型振荡器(OCXO)的恒温槽内的类型,但是不限于此,可以是不具有恒温槽的类型的TCXO用的振子。振子XTAL也可以是谐振器(机电的谐振器或者电气式的谐振电路)。另外,作为振子XTAL,能够采用SAW(SurfaceAcoustic Wave:表面声波)谐振器、作为硅制振子的MEMS(Micro Electro MechanicalSystems:微电子机械系统)振子等作为压电振子。作为振子XTAL的基板材料,可使用石英、钽酸锂、铌酸锂等压电单晶体、锆钛酸铅等压电陶瓷等压电材料或硅半导体材料等。作为振子XTAL的激励手段,既可以使用基于压电效应的手段,也可以使用基于库仑力的静电驱动。The vibrator XTAL is, for example, a quartz vibrator of a thickness-shear vibration type such as an AT cut type or an SC cut type, or a piezoelectric vibrator of a bending vibration type or the like. As an example, the vibrator XTAL is of a type installed in a constant temperature bath of an oven-controlled oscillator (OCXO), but it is not limited thereto, and may be a vibrator for a TCXO of a type that does not have a constant temperature bath. The oscillator XTAL can also be a resonator (electromechanical resonator or electrical resonant circuit). In addition, as the vibrator XTAL, a SAW (Surface Acoustic Wave: Surface Acoustic Wave) resonator, a MEMS (Micro Electro Mechanical Systems: Micro Electro Mechanical Systems) vibrator which is a silicon vibrator, or the like can be used as a piezoelectric vibrator. As the substrate material of the vibrator XTAL, piezoelectric single crystals such as quartz, lithium tantalate, and lithium niobate, piezoelectric materials such as piezoelectric ceramics such as lead zirconate titanate, or silicon semiconductor materials can be used. As the excitation means of the vibrator XTAL, either means based on piezoelectric effect or electrostatic drive based on Coulomb force can be used.

振荡信号生成电路140生成振荡信号OSCK。例如,振荡信号生成电路140使用来自处理部50的频率控制数据DFCQ(信号处理后的频率控制数据)和振子XTAL,生成通过频率控制数据DFCQ设定的振荡频率的振荡信号OSCK。作为一例,振荡信号生成电路140使振子XTAL按照通过频率控制数据DFCQ设定的振荡频率进行振荡,生成振荡信号OSCK。The oscillation signal generation circuit 140 generates an oscillation signal OSCK. For example, oscillation signal generation circuit 140 generates oscillation signal OSCK having an oscillation frequency set by frequency control data DFCQ using frequency control data DFCQ (signal-processed frequency control data) from processing unit 50 and oscillator XTAL. As an example, the oscillation signal generating circuit 140 oscillates the vibrator XTAL at an oscillation frequency set by the frequency control data DFCQ to generate an oscillation signal OSCK.

另外,振荡信号生成电路140可以是以直接数字合成器方式生成振荡信号OSCK的电路。例如也可以将振子XTAL(固定振荡频率的振荡源)的振荡信号作为参考信号,以数字方式生成通过频率控制数据DFCQ设定的振荡频率的振荡信号OSCK。In addition, the oscillating signal generation circuit 140 may be a circuit for generating the oscillating signal OSCK by means of a direct digital synthesizer. For example, the oscillation signal OSCK of the oscillation frequency set by the frequency control data DFCQ may be digitally generated by using the oscillation signal of the oscillator XTAL (an oscillation source with a fixed oscillation frequency) as a reference signal.

振荡信号生成电路140可包含D/A转换部80和振荡电路150。但是,振荡信号生成电路140不限于这样的结构,能够实施省略其中一部分结构要素、或追加其他结构要素等各种变形。The oscillation signal generation circuit 140 may include a D/A conversion unit 80 and an oscillation circuit 150 . However, the oscillation signal generating circuit 140 is not limited to such a configuration, and various modifications such as omitting some of the constituent elements or adding other constituent elements can be implemented.

D/A转换部80进行来自处理部50的频率控制数据DFCQ(处理部的输出数据)的D/A转换。被输入到D/A转换部80的频率控制数据DFCQ是处理部50的信号处理后(例如老化校正、温度补偿、或者卡尔曼滤波的处理后)的频率控制数据(频率控制码)。作为D/A转换部80的D/A转换方式,例如可采用电阻串型(电阻分割型)。但是,D/A转换方式不限于此,也可采用电阻梯型(R-2R梯型等)、电容阵列型或者脉宽调制型等各种方式。此外,D/A转换部80除了D/A转换器以外,还可以包含其控制电路、调制电路(抖动调制或者PWM调制等)、滤波电路等。The D/A conversion unit 80 performs D/A conversion of the frequency control data DFCQ (output data of the processing unit) from the processing unit 50 . The frequency control data DFCQ input to the D/A converter 80 is frequency control data (frequency control code) after signal processing by the processing unit 50 (for example, aging correction, temperature compensation, or Kalman filter processing). As the D/A conversion method of the D/A conversion unit 80, for example, a resistor series type (resistor division type) can be employed. However, the D/A conversion method is not limited to this, and various methods such as a resistance ladder type (R-2R ladder type, etc.), a capacitor array type, or a pulse width modulation type may be employed. In addition, the D/A converter 80 may include its control circuit, modulation circuit (dither modulation, PWM modulation, etc.), filter circuit, etc. in addition to the D/A converter.

振荡电路150使用D/A转换部80的输出电压VQ和振子XTAL,生成振荡信号OSCK。振荡电路150经由第1、第2振子用端子(振子用焊盘)而连接于振子XTAL。例如,振荡电路150通过使振子XTAL(压电振子、谐振器等)振荡而生成振荡信号OSCK。具体而言,振荡电路150使振子XTAL以将D/A转换部80的输出电压VQ作为频率控制电压(振荡控制电压)的振荡频率进行振荡。例如,在振荡电路150是利用电压控制对振子XTAL的振荡进行控制的电路(VCO)的情况下,振荡电路150可以包含电容值根据频率控制电压而变化的可变电容式电容器(变容二极管等)。The oscillation circuit 150 generates an oscillation signal OSCK using the output voltage VQ of the D/A converter 80 and the oscillator XTAL. The oscillation circuit 150 is connected to the transducer XTAL via the first and second terminals for the transducer (pads for the transducer). For example, the oscillation circuit 150 generates an oscillation signal OSCK by oscillating a vibrator XTAL (piezoelectric vibrator, resonator, etc.). Specifically, the oscillation circuit 150 oscillates the vibrator XTAL at an oscillation frequency using the output voltage VQ of the D/A converter 80 as a frequency control voltage (oscillation control voltage). For example, when the oscillation circuit 150 is a circuit (VCO) that controls the oscillation of the vibrator XTAL by voltage control, the oscillation circuit 150 may include a variable capacitance capacitor (varicap diode, etc.) whose capacitance value changes according to the frequency control voltage. ).

另外,如上所述,振荡电路150可以通过直接数字合成器方式而实现,在该情况下,振子XTAL的振荡频率成为参考频率,成为不同于振荡信号OSCK的振荡频率的频率。In addition, as described above, the oscillation circuit 150 can be realized by a direct digital synthesizer method. In this case, the oscillation frequency of the oscillator XTAL is a reference frequency, which is different from the oscillation frequency of the oscillation signal OSCK.

这样,本实施方式的电路装置包含:处理部50,其对频率控制数据DFCI进行信号处理;以及振荡信号生成电路140,其使用来自处理部50的频率控制数据DFCQ和振子XTAL,生成通过频率控制数据DFCQ设定的振荡频率的振荡信号OSCK。In this way, the circuit device of this embodiment includes: a processing unit 50 that performs signal processing on the frequency control data DFCI; The oscillation signal OSCK of the oscillation frequency set by the data DFCQ.

而且,处理部50在卡尔曼滤波处理的先验估计值的更新处理中,进行通过上次的时刻的后验估计值与校正值的相加处理来求出此次的时刻的先验估计值的处理。而且,根据该卡尔曼滤波处理的结果进行频率控制数据的老化校正。另外,本实施方式的相加处理包含加上负值的处理即减法处理。In addition, the processing unit 50 performs the process of adding the a priori estimated value and the correction value at the previous time in the update process of the a priori estimated value in the Kalman filtering process to obtain the a priori estimated value at the current time. processing. Then, aging correction of the frequency control data is performed based on the result of the Kalman filter processing. In addition, the addition process of this embodiment includes the process of adding a negative value, ie, the subtraction process.

即,在卡尔曼滤波处理中,反复进行观测更新和时间更新来估计状态。在观测更新中,根据观测值和时间更新的结果进行卡尔曼增益、后验估计值、后验协方差的更新等。在时间更新中,进行如下的预测处理:根据观测更新的结果,求出此次的时刻(时间步k)的先验估计值、先验协方差。That is, in the Kalman filter process, observation update and time update are repeated to estimate the state. In the observation update, Kalman gain, posterior estimated value, posterior covariance, etc. are updated according to the observation value and time update results. In the time update, prediction processing is performed in which a priori estimated value and a priori covariance at this time (time step k) are obtained from the results of the observation update.

而且,在本实施方式中,如图3所示,处理部50在进行卡尔曼滤波处理的先验估计值的更新处理的时间更新中,通过上次的时刻(时间步k-1)的后验估计值与校正值的相加处理,求出此次的时刻(时间步k)的先验估计值。而且根据卡尔曼滤波处理的结果(真值,或者真值以及校正值等)进行频率控制数据的老化校正。Furthermore, in the present embodiment, as shown in FIG. 3 , the processing unit 50 passes through the time after the previous time (time step k-1) in the time update of the update process of the prior estimate value of the Kalman filter process. The prior estimation value at this time (time step k) is obtained by adding the prior estimation value and the correction value. Furthermore, the aging correction of the frequency control data is performed according to the result of the Kalman filtering process (true value, or a true value and a corrected value, etc.).

在该情况下,处理部50根据卡尔曼滤波处理中的观测残差求出该校正值。观测残差与观测值和先验估计值的差分值对应。例如,进行如下的预测处理:通过进行将在基于卡尔曼滤波处理中的观测残差的更新处理中得到的校正值与上次的时刻的后验估计值相加的处理,求出此次的时刻的先验估计值。这样,能够使用反映了卡尔曼滤波处理中的观测残差并且被更新的校正值实现老化校正,能够实现更高精度的老化校正。In this case, the processing unit 50 obtains the correction value from the observation residual in the Kalman filtering process. The observation residuals correspond to the difference between the observed value and the prior estimate. For example, a prediction process is performed in which the correction value obtained in the update process based on the observation residual in the Kalman filter process is added to the posterior estimated value at the previous time to obtain the current A priori estimate of time. In this way, burn-in correction can be realized using an updated correction value that reflects the observation residual in the Kalman filtering process, and higher-precision burn-in correction can be realized.

更具体而言,如图4所示,处理部50进行上次的时刻即时间步k-1的后验估计值x^(k-1)与校正值D(k-1)的相加处理,通过x^-(k)=x^(k-1)+D(k-1)求出此次的时刻即时间步k的先验估计值x^-(k)。另外,这里,将表示是估计值的帽形的符号“^”适当地排列成2个字符来进行记载。More specifically, as shown in FIG. 4 , the processing unit 50 performs addition processing of the posterior estimated value x^(k-1) and the correction value D(k-1) at the previous time step k-1. , through x^ - (k)=x^(k-1)+D(k-1) to obtain the prior estimate x^ - (k) of time step k at this moment. In addition, here, a hat-shaped symbol " ^ " indicating an estimated value is appropriately arranged and described in two characters.

即,如后述那样,在通常的卡尔曼滤波处理中,通过基于x^-(k)=Ax^(k-1)的时间更新处理来求出时间步k的先验估计值x^-(k)。这里,A将不存在系统噪声的情况下的时间步k的系统的状态与时间步k+1的系统的状态关联起来,被称为系统矩阵。在该情况下,为了准确求出该A的值,需要被称为扩展卡尔曼滤波处理的处理。That is, as will be described later, in normal Kalman filter processing , a priori estimated value x^ - (k). Here, A relates the state of the system at time step k to the state of the system at time step k+1 in the absence of system noise, and is called the system matrix. In this case, in order to obtain the value of A accurately, processing called extended Kalman filter processing is required.

扩展卡尔曼滤波处理有时处理负荷非常重。在该情况下,当要实现扩展卡尔曼滤波处理时,处理部50的电路面积容易变得非常大,当对内置于振荡器的电路装置强烈要求小型化的状况下,是不恰当的。另一方面,当使用固定值作为A的值时,实现恰当的老化校正时的难易度提高。Extended Kalman filter processing sometimes has a very heavy processing load. In this case, the circuit area of the processing unit 50 tends to be very large when the extended Kalman filter process is to be realized, which is not suitable in a situation where miniaturization of the circuit device built in the oscillator is strongly demanded. On the other hand, when a fixed value is used as the value of A, the difficulty in realizing appropriate burn-in correction increases.

因此,作为需要避免这样的状况的情况下的解决手段,在本实施方式中,如下文详细叙述那样,替代x^-(k)=Ax^(k-1),而使用x^-(k)=x^(k-1)+D(k-1),实现求出时间步k的先验估计值x^-(k)的时间更新处理。使用该x^-(k)=x^(k-1)+D(k-1)的处理能够通过将校正值D(k-1)与后验估计值x^(k-1)相加这样的轻负荷的处理来实现。因此,由于无需进行扩展卡尔曼滤波处理那样的负荷重的处理,因此,减轻了处理部50的处理负荷、抑制了电路装置的电路规模的增加等。即,能够通过更小规模的电路实现更高精度的老化校正。Therefore, as a solution when it is necessary to avoid such a situation, in this embodiment, as will be described in detail below, instead of x^ - (k) = Ax^(k-1), x^ - (k )=x^(k-1)+D(k-1), realizing the time update process of obtaining the prior estimate value x^ - (k) of time step k. The process using this x^ - (k)=x^(k-1)+D(k-1) can be done by adding the correction value D(k-1) to the posterior estimated value x^(k-1) Such light-load processing is achieved. Therefore, since there is no need to perform heavy processing such as extended Kalman filter processing, the processing load on the processing unit 50 is reduced, and an increase in the circuit scale of the circuit device is suppressed. That is, more accurate burn-in correction can be realized with a smaller-scale circuit.

而且,在本实施方式中,如图4所示,处理部50根据时间步k-1的校正值D(k-1)和卡尔曼滤波处理中的观测残差,求出时间步k的校正值D(k)。具体而言,在设观测残差为ek、常数为E的情况下,通过D(k)=D(k-1)+E·ek求出校正值D(k)。另外,在设卡尔曼增益为G(k)的情况下,也可以通过D(k)=D(k-1)+G(k)·ek求出校正值D(k)。这里,在设为了观测值y(k)的情况下,观测残差能够表示为ek=y(k)-x^-(k)。Furthermore, in this embodiment, as shown in FIG. 4 , the processing unit 50 obtains the correction value D(k-1) at time step k-1 and the observation residual error in the Kalman filtering process, and obtains the correction value D(k-1) at time step k. Value D(k). Specifically, when the observation residual is ek and the constant is E, the correction value D(k) is obtained by D(k)=D(k-1)+E·ek. In addition, when the Kalman gain is G(k), the correction value D(k) can also be obtained by D(k)=D(k-1)+G(k)·ek. Here, when the observed value y(k) is assumed, the observation residual can be expressed as ek=y(k)-x^ - (k).

例如如后述那样,校正值D(k)是用于消除并补偿由相当于图10的C3的斜率的老化速率导致的频率变化的校正值。而且,由图1的A1~A5、图10可知,该老化速率随着时间经过而变动。因此,当使用固定值作为老化校正的校正值时,无法实现适当的老化校正。For example, as described later, the correction value D(k) is a correction value for canceling and compensating for a frequency change due to an aging rate corresponding to the slope of C3 in FIG. 10 . Furthermore, it can be seen from A1 to A5 in FIG. 1 and FIG. 10 that the aging rate fluctuates with time. Therefore, when a fixed value is used as a correction value for burn-in correction, proper burn-in correction cannot be achieved.

对此,在本实施方式中,如D(k)=D(k-1)+E·ek那样,进行使用卡尔曼滤波处理中的观测残差更新老化校正的校正值的处理。因此,即使在如图1的A1~A5、图10那样,老化速率根据时间经过而变动的情况下,也能够通过D(k)=D(k-1)+E·ek的更新处理求出补偿基于变动的老化速率的频率变化的校正值。因此,能够以更小规模的电路实现更高精度的老化校正。In contrast, in the present embodiment, a process of updating the correction value of burn-in correction using the observation residual in the Kalman filtering process is performed as D(k)=D(k-1)+E·ek. Therefore, even when the aging rate fluctuates with the passage of time as shown in A1 to A5 in FIG. 1 and FIG. 10 , it is possible to obtain A correction value that compensates for frequency changes based on a varying aging rate. Therefore, burn-in correction with higher accuracy can be realized with a smaller-scale circuit.

另外,D(k)=D(k-1)+E·ek中的常数E期望预先存储于后述的图9的存储部34。例如在产品(振荡器等)的制造、出货时,通过将与产品对应的适当的常数E写入例如通过非易失性存储器等实现的存储部34中而存储。由此,能够使用与各产品对应的适当的常数E实现校正值D(k)=D(k-1)+E·ek的更新处理,能够实现更高精度的老化校正。In addition, the constant E in D(k)=D(k-1)+E·ek is desirably stored in advance in the storage unit 34 in FIG. 9 described later. For example, when a product (oscillator, etc.) is manufactured or shipped, an appropriate constant E corresponding to the product is written in the storage unit 34 realized by, for example, a nonvolatile memory, and stored. Thereby, updating processing of the correction value D(k)=D(k-1)+E·ek can be realized using an appropriate constant E corresponding to each product, and more accurate burn-in correction can be realized.

3.保持模式3. Hold mode

接着,详细说明保持模式。图5是说明保持模式时的老化校正的图。频率控制数据生成部40进行基于振荡信号的输入信号(输入时钟信号)、和来自GPS或网络的基准信号(基准时钟信号)的相位比较(比较运算),生成频率控制数据。在通常动作时,选择器48将来自频率控制数据生成部40的频率控制数据输出到振荡信号生成电路140。振荡信号生成电路140的D/A转换部80将该频率控制数据转换为频率控制电压,输出到振荡电路150。振荡电路150使振子XTAL以与该频率控制电压对应的振荡频率进行振荡,生成振荡信号。由频率控制数据生成部40和振荡信号生成电路140形成了PLL电路的环路,能够使基于振荡信号的输入信号和基准信号同步。Next, the hold mode will be described in detail. FIG. 5 is a diagram illustrating burn-in correction in a hold mode. The frequency control data generating unit 40 performs phase comparison (comparison operation) between an input signal (input clock signal) based on an oscillation signal and a reference signal (reference clock signal) from GPS or a network to generate frequency control data. During normal operation, the selector 48 outputs the frequency control data from the frequency control data generation unit 40 to the oscillation signal generation circuit 140 . The D/A converter 80 of the oscillation signal generation circuit 140 converts the frequency control data into a frequency control voltage, and outputs it to the oscillation circuit 150 . The oscillation circuit 150 oscillates the oscillator XTAL at an oscillation frequency corresponding to the frequency control voltage to generate an oscillation signal. A loop of the PLL circuit is formed by the frequency control data generation unit 40 and the oscillation signal generation circuit 140, and an input signal based on the oscillation signal and a reference signal can be synchronized.

检测电路47进行基准信号的检测动作,检测基准信号消失或异常的保持模式。在检测到保持模式后,老化校正部56进行用于对保存于寄存器49中的频率控制数据补偿由老化导致的频率变动的老化校正。并且,振荡信号生成电路140使振子XTAL按照与该老化校正后的频率控制数据对应的振荡频率进行振荡,生成振荡信号。由此,能够供给自激振荡中的振荡信号,作为基站等电子设备的基准信号源。The detection circuit 47 performs a detection operation of a reference signal, and detects a hold pattern in which the reference signal disappears or is abnormal. When the hold mode is detected, the burn-in correcting unit 56 performs burn-in correction for compensating frequency fluctuations due to burn-in to the frequency control data stored in the register 49 . Then, the oscillation signal generation circuit 140 oscillates the vibrator XTAL at the oscillation frequency corresponding to the aging-corrected frequency control data to generate an oscillation signal. Thus, an oscillation signal in self-oscillation can be supplied as a reference signal source for electronic equipment such as a base station.

图6的B1表示产生了保持模式的情况下的理想的振荡频率的老化的特性。另一方面,B2(虚线)表示由于老化而导致振荡频率变动的特性。B3是由老化导致的振荡频率的变动幅度。此外,图7的B4表示产生了保持模式的情况下的用于接近B1的特性的频率控制电压的推移。另一方面,B5(虚线)表示从产生了基准信号消失或者异常的时刻起频率控制电压为恒定的状态。B1 in FIG. 6 shows the aging characteristics of the ideal oscillation frequency when the hold mode occurs. On the other hand, B2 (dotted line) shows the characteristics of fluctuations in the oscillation frequency due to aging. B3 is the fluctuation width of the oscillation frequency due to aging. In addition, B4 in FIG. 7 shows transition of the frequency control voltage for approaching the characteristic of B1 when the hold mode occurs. On the other hand, B5 (dotted line) indicates a state in which the frequency control voltage is constant from the time when the reference signal disappears or an abnormality occurs.

为了进行使图6的B2所示的特性与B1所示的理想的特性接近的校正,进行老化校正。例如,如果通过老化校正,而如图7的B4所示那样使频率控制电压变化,则能够进行使图6的B2所示的特性接近B1所示的理想的特性的校正,例如,如果提高校正精度,则能够将B2所示的特性校正为B1所示的理想的特性。另一方面,在如图7的B5所示那样未进行老化校正的情况下,如图6的B2所示那样,在保持模式期间,振荡频率变动,例如,如果对保持模式性能的要求规格是图6所示的B1,则无法满足该要求。Burn-in correction is performed in order to correct the characteristic indicated by B2 in FIG. 6 to the ideal characteristic indicated by B1. For example, if the frequency control voltage is changed as shown in B4 in FIG. 7 by aging correction, then it is possible to correct the characteristic shown in B2 in FIG. 6 close to the ideal characteristic shown in B1. For example, if the correction Accuracy, the characteristic shown in B2 can be corrected to the ideal characteristic shown in B1. On the other hand, when aging correction is not performed as shown in B5 of FIG. 7, as shown in B2 of FIG. B1 shown in Figure 6 cannot meet this requirement.

例如表示保持模式期间的基于振荡频率的变动的时间的偏移量(总量)的保持模式时间θtot能够如下式(1)那样表示。For example, the hold mode time θ tot representing the amount of time shift (total amount) due to fluctuations in the oscillation frequency during the hold mode period can be represented by the following equation (1).

这里,T1表示由保持模式导致的老化的经过时间。f0是标称振荡频率,Δf/f0是频率偏差。在上式(1)中,T1×f0表示总时钟数,(Δf/f0)×(1/f0)表示1时钟内的时刻的偏移量。而且,频率偏差Δf/f0能够使用保持模式时间θtot和经过时间T1,如上式(2)那样表示。Here, T 1 represents the elapsed time of aging caused by the hold mode. f 0 is the nominal oscillation frequency, and Δf/f 0 is the frequency deviation. In the above formula (1), T 1 ×f 0 represents the total number of clocks, and (Δf/f 0 )×(1/f 0 ) represents the amount of time shift within one clock. Furthermore, the frequency deviation Δf/f 0 can be expressed as in the above formula (2) using the hold mode time θ tot and the elapsed time T 1 .

如图8的B6所示,假设频率偏差Δf/f0相对于经过时间呈1次函数地以恒定的斜率变化。在该情况下,如图8的B7所示,随着经过时间T1变长,保持模式时间θtot呈2次函数地变长。As shown in B6 of FIG. 8 , it is assumed that the frequency deviation Δf/f 0 changes with a constant slope as a linear function with respect to the elapsed time. In this case, as shown in B7 of FIG. 8 , as the elapsed time T1 becomes longer, the hold mode time θ tot becomes longer according to a quadratic function.

例如,在TDD方式的情况下,为了防止设定了保护时间的时隙重叠,要求保持模式时间为例如θtot<1.5μs。因此,由上式(2)可知,作为振荡器所容许的频率偏差Δf/f0,要求非常小的值。特别地,经过时间T1越长,该容许频率偏差要求越小的值。例如,在作为从保持模式的产生时刻起、到利用维护作业从保持模式恢复的时刻为止的时间而假设的时间为例如T1=24小时的情况下,作为容许频率偏差,要求非常小的值。而且,由于在频率偏差Δf/f0中包含例如温度依赖的频率偏差和由老化导致的频率偏差,因此,为了满足上述要求,需要非常高精度的老化校正。For example, in the case of the TDD scheme, in order to prevent overlapping of slots for which a guard time is set, the hold mode time is required to be, for example, θ tot <1.5 μs. Therefore, it can be seen from the above formula (2) that a very small value is required as the allowable frequency deviation Δf/f 0 of the oscillator. In particular, the longer the elapsed time T1 is, the smaller the value of the allowable frequency deviation is required. For example, when the time assumed as the time from the generation of the hold mode to the time of recovery from the hold mode by maintenance work is, for example, T 1 =24 hours, a very small value is required as the allowable frequency deviation . Furthermore, since the frequency deviation Δf/f 0 includes, for example, a temperature-dependent frequency deviation and a frequency deviation caused by aging, very high-accuracy aging correction is required in order to satisfy the above-mentioned requirements.

4.电路装置的详细结构例4. Detailed structure example of circuit device

图9示出本实施方式的电路装置的详细结构例。在图9中,对图2的结构进一步设置了温度传感器10、A/D转换部20、I/F部30、寄存器部32、存储部34和频率控制数据生成部40(广义来说是相位比较部)。另外,电路装置的结构不限于图9的结构,能够实施省略其一部分结构要素(例如频率控制数据生成部)、或追加其他结构要素等各种变形。例如,可以采用设置于电路装置的外部的温度传感器作为温度传感器10。FIG. 9 shows a detailed configuration example of the circuit device of this embodiment. In FIG. 9, the structure of FIG. 2 is further provided with a temperature sensor 10, an A/D conversion unit 20, an I/F unit 30, a register unit 32, a storage unit 34, and a frequency control data generation unit 40 (in a broad sense, a phase comparison section). In addition, the configuration of the circuit device is not limited to the configuration of FIG. 9 , and various modifications such as omitting some of its constituent elements (for example, a frequency control data generation unit) or adding other constituent elements can be implemented. For example, a temperature sensor provided outside the circuit device may be used as the temperature sensor 10 .

温度传感器10输出温度检测电压VTD。具体而言,输出根据环境(电路装置)的温度而变化的温度依赖电压,作为温度检测电压VTD。关于温度传感器10的具体结构例将后述。The temperature sensor 10 outputs a temperature detection voltage VTD. Specifically, a temperature-dependent voltage that changes according to the temperature of the environment (circuit device) is output as temperature detection voltage VTD. A specific configuration example of the temperature sensor 10 will be described later.

A/D转换部20进行来自温度传感器10的温度检测电压VTD的A/D转换,输出温度检测数据DTD。例如输出与温度检测电压VTD的A/D转换结果对应的数字的温度检测数据DTD(A/D结果数据)。作为A/D转换部20的A/D转换方式,例如可采用逐次比较方式、或与逐次比较方式类似的方式等。并且,A/D转换方式不限于这种方式,可采用各种方式(计数型、并联比较型或串并联型等)。The A/D conversion unit 20 performs A/D conversion of the temperature detection voltage VTD from the temperature sensor 10, and outputs temperature detection data DTD. For example, digital temperature detection data DTD (A/D result data) corresponding to the A/D conversion result of the temperature detection voltage VTD is output. As the A/D conversion method of the A/D conversion unit 20, for example, a successive comparison method or a method similar to the successive comparison method can be employed. Also, the A/D conversion method is not limited to this method, and various methods (counting type, parallel comparison type, series-parallel type, etc.) can be adopted.

数字I/F部(接口部)30是用于在电路装置与外部装置(微型计算机、控制器等)之间输入输出数字数据的接口。数字I/F部30例如能够通过使用了串行时钟线和串行数据线的同步式的串行通信方式来实现。具体而言,能够通过I2C(Inter-Integrated Circuit:内部集成电路)方式、3线或者4线的SPI(Serial Peripheral Interface:串行外设接口)方式等实现。I2C方式是通过串行时钟线SCL、和双向的串行数据线SDA这2根信号线来进行通信的同步式的串行通信方式。在I2C的总线上能够连接多个从器件,主器件在指定单独确定的从器件的地址,选择从器件之后,与该从器件进行通信。SPI方式是通过串行时钟线SCK和单向的2根串行数据线SDI、SDO进行通信的同步式的串行通信方式。在SPI的总线上能够连接多个从器件,而为了确定这些从器件,主器件需要使用从器件选择线来选择从器件。数字I/F部30由实现这些通信方式的输入输出缓冲电路和控制电路等构成。The digital I/F unit (interface unit) 30 is an interface for inputting and outputting digital data between the circuit device and an external device (microcomputer, controller, etc.). The digital I/F unit 30 can be realized by, for example, a synchronous serial communication method using a serial clock line and a serial data line. Specifically, it can be realized by an I2C (Inter-Integrated Circuit) method, a 3-wire or 4-wire SPI (Serial Peripheral Interface: Serial Peripheral Interface) method, or the like. The I2C method is a synchronous serial communication method that communicates through two signal lines, a serial clock line SCL and a bidirectional serial data line SDA. Multiple slave devices can be connected to the I2C bus, and the master device communicates with the slave device after specifying the address of the independently determined slave device and selecting the slave device. The SPI method is a synchronous serial communication method that communicates through a serial clock line SCK and two unidirectional serial data lines SDI and SDO. Multiple slave devices can be connected on the SPI bus, and in order to determine these slave devices, the master device needs to use the slave device selection line to select the slave device. The digital I/F unit 30 is composed of an input/output buffer circuit, a control circuit, and the like that realize these communication methods.

寄存器部32是由状态寄存器、命令寄存器、数据寄存器等多个寄存器构成的电路。电路装置的外部装置经由数字I/F部30访问寄存器部32的各个寄存器。而且外部装置能够使用寄存器部32的寄存器来确认电路装置的状态、对电路装置发出命令,对电路装置传送数据、并且从电路装置读出数据等。The register unit 32 is a circuit composed of a plurality of registers such as a status register, a command register, and a data register. An external device of the circuit device accesses each register of the register unit 32 via the digital I/F unit 30 . Furthermore, the external device can use the registers of the register unit 32 to confirm the status of the circuit device, issue a command to the circuit device, transmit data to the circuit device, read data from the circuit device, and the like.

存储部34存储电路装置的各种处理和动作所需的各种信息。该存储部34例如能够通过非易失性存储器来实现。作为非易失性存储器,例如能够使用EEPROM等。作为EEPROM,例如能够使用MONOS(Metal-Oxide-Nitride-Oxide-Silicon:金属氧化-氮氧化硅)型存储器等。例如能够使用利用了MONOS型的存储器的闪存。或者作为EEPROM,可以使用浮栅型等其他类型的存储器。另外,存储部34只要是即使不供给电源也能够保存并存储信息的存储器即可,例如也能够通过熔丝电路等来实现。The storage unit 34 stores various information necessary for various processes and operations of the circuit device. This storage unit 34 can be realized by, for example, a nonvolatile memory. As the nonvolatile memory, for example, EEPROM or the like can be used. As the EEPROM, for example, a MONOS (Metal-Oxide-Nitride-Oxide-Silicon: Metal-Oxide-Nitride-Oxide-Silicon) type memory or the like can be used. For example, a flash memory using a MONOS type memory can be used. Alternatively, as the EEPROM, other types of memory such as a floating gate type can be used. In addition, the memory|storage part 34 should just be a memory which can store and memorize information even if a power supply is not supplied, and it can implement|achieve also by a fuse circuit etc., for example.

在该情况下,处理部50除了卡尔曼滤波部54、老化校正部56以外,还具有保持模式处理部52(保持模式处理的电路或程序模块)、温度补偿部58(温度补偿处理的电路或程序模块)。保持模式处理部52进行与保持模式相关的各种处理。温度补偿部58(处理部50)根据来自A/D转换部20的温度检测数据DTD,进行振荡频率的温度补偿处理。具体而言,温度补偿部58根据对应于温度而变化的温度检测数据DTD(温度依赖数据)、以及温度补偿处理用的系数数据(近似函数的系数数据)等,进行用于在存在温度变化的情况下减小振荡频率的变动的温度补偿处理。In this case, in addition to the Kalman filter unit 54 and the burn-in correction unit 56, the processing unit 50 further includes a hold mode processing unit 52 (circuit or program module for hold mode processing), and a temperature compensation unit 58 (circuit or program module for temperature compensation processing). program module). The hold mode processing unit 52 performs various processes related to the hold mode. The temperature compensation unit 58 (processing unit 50 ) performs temperature compensation processing of the oscillation frequency based on the temperature detection data DTD from the A/D conversion unit 20 . Specifically, the temperature compensator 58 performs calculation for the presence of a temperature change based on temperature detection data DTD (temperature dependent data) that changes in accordance with the temperature, coefficient data (coefficient data of an approximation function) for temperature compensation processing, and the like. In this case, the temperature compensation process reduces the fluctuation of the oscillation frequency.

基准信号RFCK经由作为电路装置的外部连接端子的端子TRFCK(焊盘)输入到电路装置。对外部PLL电路是否处于锁定状态进行通知的信号PLOCK经由作为电路装置的外部连接端子的端子TPLOCK(焊盘)输入到电路装置。The reference signal RFCK is input to the circuit device via a terminal TRFCK (pad) which is an external connection terminal of the circuit device. A signal PLOCK notifying whether or not the external PLL circuit is in the locked state is input to the circuit device via a terminal TPLOCK (pad) which is an external connection terminal of the circuit device.

而且,存储部34存储卡尔曼滤波处理的系统噪声的设定用的系统噪声常数(V)和卡尔曼滤波处理的观测噪声的设定用的观测噪声常数(W)。例如在产品(振荡器等)的制造、出货时,进行用于监测振荡频率等各种信息的测量(检查)。而且根据该测量结果确定系统噪声常数和观测噪声常数,并写入例如由非易失性存储器等实现的存储部34中。这样,能够实现降低了由元件偏差导致的不良影响的系统噪声常数和观测噪声常数的设定。Furthermore, the storage unit 34 stores a system noise constant (V) for setting the system noise of the Kalman filter process and an observation noise constant (W) for setting the observation noise of the Kalman filter process. For example, measurement (inspection) for monitoring various information such as oscillation frequency is performed during manufacture and shipment of products (oscillators, etc.). Then, a system noise constant and an observation noise constant are determined based on the measurement results, and written into the storage unit 34 realized by, for example, a nonvolatile memory. In this way, it is possible to set the system noise constant and the observation noise constant in which adverse effects due to element variations are reduced.

在该情况下,本实施方式的电路装置具有用于监测先验估计值和观测值的数字I/F部30。即,外部装置能够经由数字I/F部30监测卡尔曼滤波处理中的先验估计值x^-(k)和观测值y(k)。In this case, the circuit device of the present embodiment has a digital I/F unit 30 for monitoring a priori estimated values and observed values. That is, the external device can monitor the a priori estimated value x ̂− (k) and the observed value y(k) in the Kalman filtering process via the digital I/F section 30 .

具体而言,在产品的制造、出货时的检查工序中,作为外部装置的检查装置经由数字I/F部30监测先验估计值x^-(k)和观测值y(k)。例如在后述的图20所示的卡尔曼滤波部54中,检查装置能够经由数字I/F部30监测先验估计值x^-(k)的节点的信号值和观测值y(k)的节点的信号值。例如将用于监测先验估计值x^-(k)的节点的信号值和观测值y(k)的节点的信号值的监测寄存器设置于寄存器部32。而且检查装置通过经由数字I/F部30访问该监测寄存器,能够取得先验估计值x^-(k)和观测值y(k)。Specifically, in the inspection process at the time of product manufacture and shipment, the inspection device as an external device monitors the a priori estimated value x̂ (k) and the observed value y(k) via the digital I/F unit 30 . For example, in the Kalman filter unit 54 shown in FIG. 20 described later, the inspection device can monitor the signal value and the observed value y(k) of the node of the prior estimated value x^ - (k) via the digital I/F unit 30. The signal value of the node. For example, monitoring registers for monitoring the signal value of the node of the a priori estimated value x̂−(k) and the signal value of the node of the observed value y (k) are provided in the register unit 32 . Furthermore, by accessing the monitoring register via the digital I/F unit 30, the inspection device can acquire a priori estimated value x^ - (k) and observed value y(k).

而且,检查装置能够根据取得的先验估计值x^-(k)和观测值y(k),例如求出观测残差ek=y(k)-x^-(k)。而且求出使得观测残差ek成为更小的值的系统噪声常数V和观测噪声常数W。或者,求出校正值D(k)=D(k-1)+E·ek的运算处理中的最佳常数E。而且,在产品的制造、出货时的检查工序中,将所求出的系统噪声常数V、观测噪声常数W或者常数E写入存储部34。由此,在各产品中,能够将最佳常数V、W、E写入存储部34。而且,在通常动作时,通过执行使用了这些常数V、W、E的本实施方式的卡尔曼滤波处理,能够实现更高精度的老化校正。Furthermore, the inspection device can obtain, for example, the observation residual ek=y(k)-x^ - (k) from the acquired a priori estimated value x^ - (k) and the observed value y(k). Furthermore, the system noise constant V and the observation noise constant W that make the observation residual ek smaller are obtained. Alternatively, the optimum constant E in the arithmetic processing of correction value D(k)=D(k-1)+E·ek is obtained. In addition, the system noise constant V, observed noise constant W, or constant E obtained is written in the storage unit 34 in the inspection process at the time of product manufacture and shipment. Thereby, in each product, the optimum constants V, W, and E can be written in the storage unit 34 . Further, during normal operation, by executing the Kalman filter processing of the present embodiment using these constants V, W, and E, it is possible to realize more accurate burn-in correction.

频率控制数据生成部40生成频率控制数据DFCI。例如将基于振荡信号OSCK的输入信号与基准信号RFCK进行比较,生成频率控制数据DFCI。所生成的频率控制数据DFCI被输入到处理部50。这里,基于振荡信号OSCK的输入信号可以是振荡信号OSCK本身,也可以是由振荡信号OSCK生成的信号(例如分频后的信号)。以下,主要以输入信号是振荡信号OSCK本身的情况为例进行说明。The frequency control data generator 40 generates frequency control data DFCI. For example, an input signal based on the oscillation signal OSCK is compared with the reference signal RFCK to generate frequency control data DFCI. The generated frequency control data DFCI is input to the processing unit 50 . Here, the input signal based on the oscillating signal OSCK may be the oscillating signal OSCK itself, or a signal generated from the oscillating signal OSCK (such as a frequency-divided signal). Hereinafter, the case where the input signal is the oscillating signal OSCK itself is mainly used as an example for description.

频率控制数据生成部40包含相位比较部41和数字滤波部44。相位比较部41(比较运算部)是进行作为输入信号的振荡信号OSCK与基准信号RFCK的相位比较(比较运算)的电路,包含计数器42、TDC 43(时间数字转换器)。The frequency control data generation unit 40 includes a phase comparison unit 41 and a digital filter unit 44 . The phase comparison unit 41 (comparison operation unit) is a circuit that performs phase comparison (comparison operation) between the oscillation signal OSCK as an input signal and the reference signal RFCK, and includes a counter 42 and a TDC 43 (time-to-digital converter).

计数器42生成数字数据,该数字数据与用基准信号RFCK的基准频率(例如1Hz)除以振荡信号OSCK的振荡频率而得的结果的整数部对应。TDC 43生成与该除法结果的小数部对应的数字数据。TDC 43例如包含:多个延迟元件;多个锁存电路,它们在基准信号RFCK的边缘(高)定时将由多个延迟元件输出的多个延迟时钟信号锁存;以及电路,其通过进行多个锁存电路的输出信号的编码,生成与除法结果的小数部对应的数字数据。而且,相位比较部41将来自计数器42的与整数部对应的数字数据和来自TDC 43的与小数部对应的数字数据相加,检测与设定频率之间的相位误差。而且,数字滤波部44通过进行相位误差的平滑化处理,生成频率控制数据DFCI。例如在设振荡信号OSCK的频率为FOS、基准信号RFCK的频率为FRF、与设定频率对应的分频数(分频比)为FCW的情况下,以使FOS=FCW×FRF的关系成立的方式生成频率控制数据DFCI。或者,计数器42可以对振荡信号OSCK的时钟数进行计数。即,计数器42通过基于振荡信号OSCK的输入信号进行计数动作。并且,相位比较部41可以通过整数,将基准信号RFCK的n个周期(n是可设定为2以上的整数)中的计数器42的计数值、和计数值的期望值(n×FCW)进行比较。从相位比较部41输出例如期望值和计数器42的计数值的差分,作为相位误差数据。The counter 42 generates digital data corresponding to the integer part of the result obtained by dividing the reference frequency (for example, 1 Hz) of the reference signal RFCK by the oscillation frequency of the oscillation signal OSCK. The TDC 43 generates digital data corresponding to the fractional part of the division result. The TDC 43 includes, for example: a plurality of delay elements; a plurality of latch circuits which latch a plurality of delayed clock signals outputted from the plurality of delay elements at the edge (high) timing of the reference signal RFCK; The encoding of the output signal of the latch circuit generates digital data corresponding to the fractional part of the division result. Then, the phase comparator 41 adds the digital data corresponding to the integer part from the counter 42 and the digital data corresponding to the fractional part from the TDC 43 to detect a phase error with the set frequency. Furthermore, the digital filter unit 44 generates frequency control data DFCI by performing smoothing processing of the phase error. For example, when the frequency of the oscillation signal OSCK is FOS, the frequency of the reference signal RFCK is FRF, and the frequency division number (division ratio) corresponding to the set frequency is FCW, the relationship of FOS=FCW×FRF is established. The frequency control data DFCI is generated in a manner. Alternatively, the counter 42 may count the number of clocks of the oscillation signal OSCK. That is, the counter 42 performs a counting operation based on an input signal of the oscillation signal OSCK. In addition, the phase comparison unit 41 may compare the count value of the counter 42 in n cycles (n is an integer that can be set to 2 or more) of the reference signal RFCK with an expected value (n×FCW) of the count value using an integer. . For example, the difference between the expected value and the count value of the counter 42 is output from the phase comparison unit 41 as phase error data.

另外,频率控制数据生成部40的结构不限于图9所示的结构,能够实施各种变形。例如可以由模拟电路的相位比较器构成相位比较部41、或者由模拟电路的滤波部(环路滤波器)构成数字滤波部44。此外,处理部50可以进行数字滤波部44的处理(相位误差数据的平滑化处理)。例如处理部50与其他处理(保持模式处理、卡尔曼滤波处理等)时分地进行数字滤波部44的处理。例如,由处理部50进行针对相位比较部41的相位比较结果(相位误差数据)的滤波处理(平滑化处理)。In addition, the structure of the frequency control data generation part 40 is not limited to the structure shown in FIG. 9, Various modifications are possible. For example, the phase comparison unit 41 may be constituted by a phase comparator of an analog circuit, or the digital filter unit 44 may be constituted by a filter unit (loop filter) of an analog circuit. In addition, the processing unit 50 may perform the processing of the digital filter unit 44 (smoothing processing of phase error data). For example, the processing unit 50 performs the processing of the digital filter unit 44 time-divisionally with other processing (hold mode processing, Kalman filter processing, etc.). For example, the processing unit 50 performs filtering processing (smoothing processing) on the phase comparison result (phase error data) of the phase comparison unit 41 .

此外,在图9中,电路装置是内置有频率控制数据生成部40的结构,但是频率控制数据生成部也可以是设置于电路装置的外部的电路。在该情况下,只要从设置于外部的频率控制数据生成部经由数字I/F部30将频率控制数据DFCI输入到处理部50即可。In addition, in FIG. 9 , the circuit device has a built-in frequency control data generation unit 40 , but the frequency control data generation unit may be a circuit provided outside the circuit device. In this case, the frequency control data DFCI may be input to the processing unit 50 via the digital I/F unit 30 from an external frequency control data generating unit.

这样,在本实施方式中,处理部50(处理器)进行针对基于输入信号和基准信号RFCK的相位比较结果的频率控制数据DFCI的信号处理,该输入信号基于振荡信号OSCK。即,处理部50针对基于相位比较部41中的相位比较结果的频率控制数据DFCI进行信号处理。例如,在处理部50中输入来自频率控制数据生成部40的频率控制数据DFCI,该频率控制数据生成部40将基于振荡信号OSCK的输入信号与基准信号RFCK相比较而生成频率控制数据DFCI。处理部50可以输入相位比较部41的相位比较结果,进行针对相位比较结果的滤波处理(数字滤波部44的处理)。并且,处理部50(处理器)在检测到由基准信号的消失或者异常引起的保持模式之前的期间内,进行如下处理:通过卡尔曼滤波处理估计针对基于相位比较结果的频率控制数据DFCI的观测值的真值。该真值是通过卡尔曼滤波处理估计出的真值,不限于真正的真值。卡尔曼滤波处理由卡尔曼滤波部54执行。此外,基于保持模式检出的控制处理由保持模式处理部52执行。Thus, in the present embodiment, the processing unit 50 (processor) performs signal processing on the frequency control data DFCI based on the phase comparison result of the input signal based on the oscillation signal OSCK and the reference signal RFCK. That is, the processing unit 50 performs signal processing on the frequency control data DFCI based on the phase comparison result in the phase comparison unit 41 . For example, frequency control data DFCI from frequency control data generator 40 that compares an input signal based on oscillation signal OSCK with reference signal RFCK to generate frequency control data DFCI is input to processing unit 50 . The processing unit 50 may input the phase comparison result from the phase comparison unit 41 and perform filtering processing (processing by the digital filter unit 44 ) on the phase comparison result. In addition, the processing unit 50 (processor) performs a process of estimating an observation of the frequency control data DFCI based on a phase comparison result by Kalman filter processing until the hold mode due to disappearance or abnormality of the reference signal is detected. The truth value of the value. This true value is a true value estimated by Kalman filter processing, and is not limited to a true true value. The Kalman filter processing is executed by the Kalman filter unit 54 . In addition, the control processing based on the hold mode detection is executed by the hold mode processing unit 52 .

而且,处理部50(处理器)在检测到保持模式的情况下,保存与保持模式的检出时刻对应的时刻的真值。保存该真值的时刻可以是保持模式的检出时刻本身,也可以是该时刻之前的时刻等。而且,处理部50通过进行基于所保存的真值的运算处理,生成被老化校正后的频率控制数据DFCQ。生成的频率控制数据DFCQ被输出到振荡信号生成电路140。该老化校正后的频率控制数据DFCQ的生成处理通过老化校正部56来执行。Furthermore, the processing unit 50 (processor) stores the truth value at the time corresponding to the detection time of the hold mode when the hold mode is detected. The timing at which this true value is stored may be the detection timing of the hold mode itself, or may be a timing before that timing, or the like. Furthermore, the processing unit 50 generates aging-corrected frequency control data DFCQ by performing arithmetic processing based on the stored true value. The generated frequency control data DFCQ is output to the oscillation signal generation circuit 140 . The aging corrected frequency control data DFCQ generation process is executed by the aging correction unit 56 .

例如在通常动作期间内,处理部50对基于相位比较结果的频率控制数据DFCI进行例如温度补偿处理等信号处理,并将信号处理后的频率控制数据DFCQ输出到振荡信号生成电路140。振荡信号生成电路140使用来自处理部50的频率控制数据DFCQ和振子XTAL,生成振荡信号OSCK,并输出到频率控制数据生成部40(相位比较部41)。由此,形成了基于频率控制数据生成部40(相位比较部41)、振荡信号生成电路140等的PLL电路的环路,从而能够生成与基准信号RFCK的相位同步的准确的振荡信号OSCK。For example, during normal operation, the processing unit 50 performs signal processing such as temperature compensation processing on the frequency control data DFCI based on the phase comparison result, and outputs the signal-processed frequency control data DFCQ to the oscillation signal generation circuit 140 . The oscillation signal generation circuit 140 generates an oscillation signal OSCK using the frequency control data DFCQ and the oscillator XTAL from the processing unit 50, and outputs it to the frequency control data generation unit 40 (phase comparison unit 41). Thus, a loop is formed by the PLL circuit such as the frequency control data generation unit 40 (phase comparison unit 41 ), the oscillation signal generation circuit 140 , and an accurate oscillation signal OSCK synchronized with the phase of the reference signal RFCK can be generated.

而且在本实施方式中,即使在检测到保持模式之前的通常动作期间内,处理部50的卡尔曼滤波部54也进行动作,对频率控制数据DFCI执行卡尔曼滤波处理。即,进行如下处理:通过卡尔曼滤波处理估计针对频率控制数据DFCI的观测值的真值。Furthermore, in the present embodiment, even during the normal operation period before the hold mode is detected, the Kalman filter unit 54 of the processing unit 50 operates to perform Kalman filter processing on the frequency control data DFCI. That is, a process of estimating the true value of the observed value for the frequency control data DFCI by Kalman filter processing is performed.

当检测到保持模式时,将与保持模式的检出时刻对应的时刻的真值保存到处理部50中。具体而言,老化校正部56保存该真值。而且,老化校正部56通过进行基于所保存的真值的运算处理,生成老化校正后的频率控制数据DFCQ。When the hold mode is detected, the true value at the time corresponding to the detection time of the hold mode is stored in the processing unit 50 . Specifically, the burn-in correcting unit 56 holds the true value. Then, the burn-in correcting unit 56 generates burn-in-corrected frequency control data DFCQ by performing arithmetic processing based on the stored true value.

这样,由于根据与保持模式的检出时刻对应的时刻的真值进行老化校正,因此,能够大幅度提高老化校正的精度。即,能够实现考虑了观测噪声和系统噪声的影响的老化校正。In this way, since burn-in correction is performed based on the true value at the time corresponding to the detection time of the hold mode, the accuracy of burn-in correction can be greatly improved. That is, it is possible to implement burn-in correction that takes into account the effects of observation noise and system noise.

另外,振荡信号生成电路140在从保持模式恢复的情况下,根据基于相位比较结果的频率控制数据DFCQ,生成振荡信号OSCK。例如根据从频率控制数据生成部40(相位比较部41)经由处理部50输入的频率控制数据DFCQ,生成振荡信号OSCK。例如当消除了基准信号RFCK的消失状态或异常状态时,保持模式的状态被解除,从保持模式恢复。在该情况下,电路装置的动作恢复到通常动作。而且振荡信号生成电路140不根据处理部50通过进行老化校正而生成的频率控制数据DFCQ,而根据从频率控制数据生成部40经由处理部50输入的频率控制数据DFCQ(温度补偿处理等信号处理后的频率控制数据),生成振荡信号OSCK。Also, when returning from the hold mode, the oscillation signal generation circuit 140 generates the oscillation signal OSCK based on the frequency control data DFCQ based on the phase comparison result. For example, the oscillation signal OSCK is generated based on the frequency control data DFCQ input from the frequency control data generation unit 40 (phase comparison unit 41 ) via the processing unit 50 . For example, when the disappearance state or abnormal state of the reference signal RFCK is eliminated, the state of the hold mode is canceled and the state of the hold mode is restored. In this case, the operation of the circuit device returns to normal operation. Moreover, the oscillation signal generating circuit 140 is not based on the frequency control data DFCQ generated by the processing unit 50 by performing aging correction, but based on the frequency control data DFCQ input from the frequency control data generating unit 40 via the processing unit 50 (after signal processing such as temperature compensation processing). frequency control data) to generate the oscillation signal OSCK.

此外,处理部50通过进行对所保存的真值加上校正值的运算处理(补偿由老化导致的频率变化的运算处理),生成老化校正后的频率控制数据DFCQ。例如通过在每个规定的时刻依次将与老化速率(老化的梯度、老化系数)对应的校正值(消除由老化速率导致的频率变化的校正值)和与保持模式的检出时刻对应的时刻的真值相加,生成老化校正后的频率控制数据DFCQ。Furthermore, the processing unit 50 generates age-corrected frequency control data DFCQ by performing arithmetic processing of adding a correction value to the stored true value (calculation processing of compensating for a frequency change due to aging). For example, at each predetermined time, the correction value corresponding to the aging rate (gradient of aging, aging coefficient) (the correction value for eliminating the frequency change caused by the aging rate) and the time corresponding to the detection time of the hold mode are sequentially combined. The true values are added to generate aging-corrected frequency control data DFCQ.

例如设时间步k的校正值为D(k)、时间步k的老化校正后的频率控制数据为AC(k)。在该情况下,处理部50通过AC(k+1)=AC(k)+D(k)求出时间步k+1的老化校正后的频率控制数据AC(k+1)。处理部50进行这样的各个时间步的校正值D(k)的相加处理,直至从保持模式恢复的时刻(解除时刻)为止。For example, let the correction value of time step k be D(k), and the aging-corrected frequency control data of time step k be AC(k). In this case, the processing unit 50 obtains aging-corrected frequency control data AC(k+1) at time step k+1 by AC(k+1)=AC(k)+D(k). The processing unit 50 performs such addition processing of the correction value D(k) at each time step until the time of return from the hold mode (release time).

此外,处理部50进行对真值加上滤波处理后的校正值的运算处理。例如,对校正值D(k)进行低通滤波处理等滤波处理,进行对真值依次加上滤波处理后的校正值D’(k)的运算处理。具体而言,进行AC(k+1)=AC(k)+D’(k)的运算处理。In addition, the processing unit 50 performs arithmetic processing of adding a corrected value after filtering processing to the true value. For example, filter processing such as low-pass filter processing is performed on the correction value D(k), and arithmetic processing is performed in which the filter-processed correction value D'(k) is sequentially added to the true value. Specifically, calculation processing of AC(k+1)=AC(k)+D'(k) is performed.

此外,处理部50根据卡尔曼滤波处理中的观测残差,求出校正值。例如,处理部50在检测到保持模式之前的期间,进行根据观测残差估计老化校正的校正值的处理。例如在设观测残差为ek的情况下,通过进行D(k)=D(k-1)+E·ek的处理,估计校正值D(k)。这里E例如是常数,但也可以替代常数E,而使用卡尔曼增益。而且,保存与保持模式的检出时刻对应的时刻的校正值,并进行将保存的校正值与真值相加的运算处理,由此生成老化校正后的频率控制数据DFCQ。Furthermore, the processing unit 50 obtains a correction value based on the observation residual in the Kalman filtering process. For example, the processing unit 50 performs a process of estimating the correction value of the burn-in correction from the observation residual before the hold mode is detected. For example, when the observation residual is ek, the correction value D(k) is estimated by performing a process of D(k)=D(k-1)+E·ek. Here E is, for example, a constant, but it is also possible to use a Kalman gain instead of the constant E. Then, the correction value at the time corresponding to the detection time of the hold mode is stored, and arithmetic processing of adding the stored correction value to the true value is performed to generate aging-corrected frequency control data DFCQ.

此外,处理部50根据输入有保持模式的检测信号的输入端子的电压或者经由数字I/F部30输入的保持模式的检测信息,判断是否已成为保持模式的状态。这些判断处理由保持模式处理部52进行。例如保持模式处理部52具有状态机的电路,该状态机的状态转变是根据各种信号和信息来执行的。而且,当根据输入有保持模式的检测信号的输入端子的电压、和经由数字I/F部30而输入的保持模式的检测信息等而判断出处于保持模式的状态时,状态机的状态转变为保持模式的状态。然后执行保持模式时的各种处理(老化校正等)。Furthermore, the processing unit 50 determines whether or not the hold mode is in the hold mode based on the voltage of the input terminal to which the hold mode detection signal is input or the hold mode detection information input via the digital I/F unit 30 . These determination processes are performed by the hold mode processing unit 52 . For example, the hold mode processing unit 52 has a circuit of a state machine whose state transition is performed based on various signals and information. And, when it is judged to be in the state of the hold mode based on the voltage of the input terminal to which the detection signal of the hold mode is input and the detection information of the hold mode input via the digital I/F section 30, etc., the state of the state machine changes to Holds the state of the schema. Various processing (burn-in correction, etc.) in the hold mode is then performed.

例如能够假设基准信号RFCK和信号PLOCK,作为保持模式的检测信号。在该情况下,处理部50根据输入有基准信号RFCK的端子TRFCK的电压、输入有信号PLOCK的端子TPLOCK的电压,判断是否已成为保持模式的状态。For example, a reference signal RFCK and a signal PLOCK can be assumed as detection signals of the hold mode. In this case, the processing unit 50 determines whether or not the hold mode is in the state based on the voltage of the terminal TRFCK to which the reference signal RFCK is input and the voltage of the terminal TPLOCK to which the signal PLOCK is input.

例如,在通过设置于电路装置的内部的频率控制数据生成部40形成PLL电路的情况下,能够根据输入有基准信号RFCK的端子TRFCK的电压,判断是否处于保持模式的状态。例如处理部50在根据端子TRFCK的电压而检测到基准信号RFCK处于消失或者异常的状态的情况下,判断出处于保持模式的状态。For example, when a PLL circuit is formed by the frequency control data generator 40 provided inside the circuit device, it can be determined whether or not it is in the hold mode based on the voltage of the terminal TRFCK to which the reference signal RFCK is input. For example, when the processing unit 50 detects that the reference signal RFCK has disappeared or is in an abnormal state based on the voltage of the terminal TRFCK, it determines that the state is in the hold mode.

另一方面,在由设置于电路装置的外部的频率控制数据生成部形成PLL电路的情况下,能够根据输入有信号PLOCK的端子TPLOCK的电压,判断是否已成为保持模式的状态。例如外部装置(控制外部PLL电路的装置)将通知外部PLL电路是否已成为锁定状态的信号PLOCK输出到电路装置。而且例如在通过信号PLOCK判断为外部PLL电路未成为锁定状态的情况下,处理部50判断为处于保持模式的状态。另外,除了信号PLOCK之外,还可以使用基准信号RFCK,来判断是否已成为保持模式的状态。此外,外部PLL电路例如是由设置于电路装置的外部的频率控制数据生成部、和电路装置的振荡信号生成电路140等构成的PLL电路。On the other hand, when the PLL circuit is formed by a frequency control data generator provided outside the circuit device, it can be determined whether or not the hold mode is in the state based on the voltage of the terminal TPLOCK to which the signal PLOCK is input. For example, an external device (a device that controls an external PLL circuit) outputs a signal PLOCK that notifies whether or not the external PLL circuit is locked, to the circuit device. Furthermore, for example, when it is determined by the signal PLOCK that the external PLL circuit is not in the locked state, the processing unit 50 determines that it is in the hold mode. In addition, in addition to the signal PLOCK, it is also possible to use the reference signal RFCK to determine whether or not the state is in the hold mode. In addition, the external PLL circuit is a PLL circuit constituted by, for example, a frequency control data generating unit provided outside the circuit device, an oscillation signal generating circuit 140 of the circuit device, and the like.

此外,在通过设置于电路装置的外部的频率控制数据生成部形成PLL电路的情况下,可以根据经由数字I/F部30输入的保持模式的检测信息,判断是否已成为保持模式的状态。例如在控制外部PLL电路的外部装置(例如微型计算机)根据基准信号的消失或者异常而判断为已成为保持模式的状态的情况下,将保持模式的检测信息经由数字I/F部30而设定于寄存器部32的寄存器(通知寄存器)。处理部50通过读出设定于该寄存器的保持模式的检测信息来判断是否已成为保持模式的状态。这样,不需要新设置保持模式的检测用的端子,实现了电路装置的端子数的削减等。In addition, when the PLL circuit is formed by a frequency control data generating unit provided outside the circuit device, it is possible to determine whether or not the hold mode is in the hold mode based on the hold mode detection information input via the digital I/F unit 30 . For example, when an external device (for example, a microcomputer) controlling an external PLL circuit determines that it has entered the state of the hold mode based on the disappearance or abnormality of the reference signal, the detection information of the hold mode is set via the digital I/F section 30. Registers in the register section 32 (notification registers). The processing unit 50 judges whether or not it is in the hold mode by reading the hold mode detection information set in the register. In this way, there is no need to newly provide a terminal for detecting the hold mode, and reduction in the number of terminals of the circuit device can be realized.

5.使用了卡尔曼滤波处理的老化校正5. Aging correction using Kalman filter processing

在本实施方式中,采用了使用卡尔曼滤波处理的老化校正方法。具体而言,在本实施方式中,在检测到保持模式之前的期间内,通过卡尔曼滤波处理估计针对频率控制数据(振荡频率)的观测值的真值。而且,在检测到保持模式的情况下,保存与保持模式的检出时刻对应的时刻(时间点)下的真值,并进行基于所保存的真值的运算处理,由此,实现老化校正。In this embodiment, a burn-in correction method using Kalman filter processing is employed. Specifically, in the present embodiment, the true value of the observed value of the frequency control data (oscillating frequency) is estimated by Kalman filter processing until the hold mode is detected. Then, when the hold mode is detected, a true value at a time (time point) corresponding to the detection time of the hold mode is stored, and arithmetic processing based on the stored true value is performed, whereby burn-in correction is realized.

图10是示出由老化导致的振荡频率的变动的测量结果例的图。横轴是经过时间(老化时间),纵轴是振荡频率的频率偏差(Δf/f0)。如图10的C1所示,在作为观测值的测量值中存在由系统噪声、观测噪声引起的大的偏差。在该偏差中还包含由环境温度引起的偏差。FIG. 10 is a graph showing an example of measurement results of fluctuations in oscillation frequency due to aging. The horizontal axis represents the elapsed time (aging time), and the vertical axis represents the frequency deviation (Δf/f 0 ) of the oscillation frequency. As shown by C1 in FIG. 10 , there are large variations in the measured values as observed values due to system noise and observation noise. The deviation due to the ambient temperature is also included in this deviation.

当这样在测量值中存在大的偏差的状况下,为了正确地求出真值,在本实施方式中,进行基于卡尔曼滤波处理(例如线性卡尔曼滤波处理)的状态估计。In such a situation where there is a large variation in the measured value, in order to accurately obtain the true value, in this embodiment, state estimation by Kalman filter processing (for example, linear Kalman filter processing) is performed.

图11示出时间序列的状态空间模型,该模型的离散时间状态方程式通过下式(3)、(4)的状态方程式、观测方程式来给出。FIG. 11 shows a state-space model of time series, and the discrete-time state equation of the model is given by the state equation and observation equation of the following equations (3) and (4).

x(k+1)=A·x(k)+v(k)···(3)x(k+1)=A·x(k)+v(k)···(3)

y(k)=x(k)+w(k)···(4)y(k)=x(k)+w(k)···(4)

x(k)是时刻k的状态,y(k)是观测值。v(k)是系统噪声,w(k)是观测噪声,A是系统矩阵。在x(k)是振荡频率(频率控制数据)的情况下,A例如相当于老化速率(老化系数)。老化速率表示振荡频率相对于经过期间的变化率。x(k) is the state at time k, and y(k) is the observed value. v(k) is the system noise, w(k) is the observation noise, and A is the system matrix. When x(k) is an oscillation frequency (frequency control data), A corresponds to, for example, an aging rate (aging coefficient). The aging rate indicates the rate of change of the oscillation frequency with respect to the elapsed period.

例如,设为在图10的C2所示的时刻产生了保持模式。在该情况下,根据基准信号RFCK中断的C2的时刻的真实状态x(k)、和相当于图10的C3所示的斜率的老化速率(A)执行老化校正。具体而言,作为用于减小由C3所示的老化速率导致的频率变化的补偿(校正),例如以消除(抵消)该频率变化的校正值,进行使C2的时刻的振荡频率(频率控制数据)的真值x(k)依次变化的老化校正。即,消除图6的B2所示的老化速率下的频率变化,以使得成为B1所示的理想的特性的校正值使真值x(k)变化。这样,例如在保持模式的期间为24小时的情况下,能够通过老化校正来补偿作为经过24小时后的振荡频率的变动的图10的FDV。For example, it is assumed that the hold mode occurs at the timing indicated by C2 in FIG. 10 . In this case, burn-in correction is performed based on the actual state x(k) at the time C2 when the reference signal RFCK is interrupted, and the burn-in rate (A) corresponding to the slope shown by C3 in FIG. 10 . Specifically, as compensation (correction) for reducing the frequency change caused by the aging rate shown by C3, for example, the oscillation frequency at the time of C2 is adjusted (frequency control) with a correction value that cancels (cancels) the frequency change. Aging correction for sequential changes in the true value x(k) of the data). That is, the correction value that eliminates the frequency change at the aging rate shown by B2 in FIG. 6 so that the ideal characteristic shown by B1 changes the true value x(k). In this way, for example, when the hold mode period is 24 hours, the FDV in FIG. 10 , which is a change in the oscillation frequency after 24 hours has elapsed, can be compensated by aging correction.

这里,在图10的C1所示的振荡频率(频率偏差)的变动中包含由温度变动引起的变动以及由老化引起的变动。因此,在本实施方式中,例如通过采用具有恒温槽的恒温槽结构的振荡器(OCXO),将由温度变动引起的振荡频率的变动抑制为最小限度。此外,使用图9的温度传感器10等执行降低由温度变动引起的振荡频率的变动的温度补偿处理。Here, the fluctuations in the oscillation frequency (frequency deviation) indicated by C1 in FIG. 10 include fluctuations due to temperature fluctuations and fluctuations due to aging. Therefore, in this embodiment, for example, by employing an oscillator (OCXO) having a constant temperature bath structure with a constant temperature bath, fluctuations in the oscillation frequency due to temperature fluctuations are suppressed to a minimum. In addition, temperature compensation processing for reducing fluctuations in the oscillation frequency due to temperature fluctuations is performed using the temperature sensor 10 in FIG. 9 or the like.

而且,在PLL电路(内部PLL电路、外部PLL电路)与基准信号RFCK同步的期间(通常动作期间)内,监测频率控制数据(频率控制码),求出去除误差(系统噪声、观测噪声)后的真值,并保存于寄存器。而且,在由于基准信号RFCK的消失或者异常而解除了PLL电路的锁定的情况下,根据在锁定解除的时刻保存的真值(针对频率控制数据的观测值的真值)来执行老化校正。例如,作为用于减小由图10的C3的斜率即老化速率导致的频率变化的补偿,进行对所保存的频率控制数据的真值依次加上例如消除该频率变化的校正值的处理,由此,生成保持模式期间的自激振荡时的频率控制数据DFCQ,使振子XTAL振荡。这样,由于能够以最小误差求出进入保持模式的时刻的真值,并执行老化校正,因此,能够实现将由老化变动导致的不良影响抑制为最小限度的保持模式性能。Furthermore, during the period in which the PLL circuit (internal PLL circuit, external PLL circuit) is synchronized with the reference signal RFCK (normal operation period), the frequency control data (frequency control code) is monitored, and the error (system noise, observation noise) is calculated The true value of and stored in the register. Also, when the lock of the PLL circuit is released due to disappearance or abnormality of the reference signal RFCK, burn-in correction is performed based on the true value (true value of the observed value for the frequency control data) held at the time of the lock release. For example, as compensation for reducing the frequency change caused by the slope of C3 in FIG. Here, the frequency control data DFCQ at the time of self-oscillation during the hold mode is generated, and the vibrator XTAL is oscillated. In this way, since the truth value at the time of entering the hold mode can be obtained with the minimum error and aging correction can be performed, it is possible to realize hold mode performance in which adverse effects due to aging fluctuations are minimized.

6.处理部的结构6. Structure of processing department

图12示出处理部50的详细结构例。另外,处理部50的结构不限于图12的结构,能够实施省略其中一部分结构要素、或追加其他结构要素等各种变形。FIG. 12 shows a detailed configuration example of the processing unit 50 . In addition, the configuration of the processing unit 50 is not limited to the configuration of FIG. 12 , and various modifications such as omitting some of the constituent elements or adding other constituent elements can be implemented.

如图12所示,处理部50包含卡尔曼滤波部54、老化校正部56、温度补偿部58、选择器62、63和加法器65。As shown in FIG. 12 , the processing unit 50 includes a Kalman filter unit 54 , an aging correction unit 56 , a temperature compensation unit 58 , selectors 62 and 63 , and an adder 65 .

卡尔曼滤波部54输入有频率控制数据DFCI(去除了环境变动成分的频率控制数据),执行卡尔曼滤波处理。而且,输出相当于通过卡尔曼滤波处理估计出的真值的后验估计值x^(k)。另外,在本说明书中,将表示是估计值的帽形的符号“^”适当地排列成2个字符来进行记载。The Kalman filter unit 54 is input with frequency control data DFCI (frequency control data from which environmental fluctuation components have been removed), and executes Kalman filter processing. Furthermore, an a posteriori estimated value x^(k) corresponding to the true value estimated by the Kalman filtering process is output. In addition, in this specification, the hat-shaped symbol " ^ " indicating an estimated value is appropriately arranged and described in two characters.

卡尔曼滤波处理是指如下处理:假设在观测值和表示系统的状态的变量中包含噪声(误差),使用从过去至现在取得的观测值来估计系统的最佳状态。具体而言,反复进行观测更新(观测过程)与时间更新(预测过程),估计状态。观测更新是使用观测值与时间更新的结果来更新卡尔曼增益、估计值、误差协方差的过程。时间更新是使用观测更新的结果来预测下一时刻的估计值、误差协方差的过程。另外,在本实施方式中,主要说明了使用线性卡尔曼滤波处理的方法,但也能够采用扩展卡尔曼滤波处理。关于本实施方式的卡尔曼滤波处理的详情,将在后文进行叙述。The Kalman filtering process refers to a process of estimating the optimal state of the system using observed values obtained from the past to the present, assuming that noise (error) is included in observed values and variables representing the state of the system. Specifically, observation update (observation process) and time update (prediction process) are repeated to estimate the state. Observation update is the process of updating Kalman gains, estimates, and error covariances using the results of observations and time updates. Time updating is the process of using the results of observation updates to predict the estimated value and error covariance of the next moment. In addition, in this embodiment, a method using linear Kalman filter processing is mainly described, but extended Kalman filter processing can also be used. The details of the Kalman filter processing in this embodiment will be described later.

老化校正部56从卡尔曼滤波部54输入后验估计值x^(k)和校正值D’(k)。而且,通过进行对相当于频率控制数据的真值的后验估计值x^(k)加上校正值D’(k)的运算处理,生成老化校正后的频率控制数据即AC(k)。这里D’(k)是滤波处理后(低通滤波处理后)的校正值D(k)。即,在设时间步k(时刻k)的校正值(滤波处理后的校正值)为D’(k)、时间步k的老化校正后的频率控制数据为AC(k)的情况下,老化校正部56通过AC(k+1)=AC(k)+D’(k)求出时间步k+1(时刻k+1)的老化校正后的频率控制数据AC(k+1)。The burn-in correcting unit 56 receives the a posteriori estimated value x^(k) and the corrected value D'(k) from the Kalman filter unit 54. Then, AC(k), which is aging-corrected frequency control data, is generated by performing an arithmetic process of adding a correction value D'(k) to an a posteriori estimated value x^(k) corresponding to the true value of the frequency control data. Here, D'(k) is a correction value D(k) after filtering (after low-pass filtering). That is, when the correction value (correction value after filtering) at time step k (time k) is D'(k), and the aging-corrected frequency control data at time step k is AC(k), the aging The correction unit 56 obtains aging-corrected frequency control data AC(k+1) at time step k+1 (time k+1) by AC(k+1)=AC(k)+D′(k).

温度补偿部58输入有温度检测数据DTD,进行温度补偿处理,生成用于使振荡频率相对于温度变动保持为恒定的温度补偿数据TCODE(温度补偿码)。温度检测数据DTD是通过由图9的A/D转换部20将来自温度传感器10的温度检测电压VTD进行A/D转换而得到的数据。The temperature compensation unit 58 receives temperature detection data DTD as input, performs temperature compensation processing, and generates temperature compensation data TCODE (temperature compensation code) for keeping the oscillation frequency constant with respect to temperature fluctuations. The temperature detection data DTD is data obtained by A/D converting the temperature detection voltage VTD from the temperature sensor 10 by the A/D conversion unit 20 of FIG. 9 .

例如,在图13、图14、图15中示出初始振荡频率温度特性的例子。在这些图中,横轴是周围温度,纵轴是振荡频率的频率偏差。如图13~图15所示,振荡频率的温度特性根据每个产品的样本而有较大偏差。因此,在产品(振荡器)的制造、出货时的检查工序中,测量振荡频率的温度特性、和与周围温度对应的温度检测数据的变化特性。而且根据测量结果来求出下式(5)的多项式(近似函数)的系数A0~A5,将求得的系数A0~A5的信息写入到图9的存储部34(非易失性存储器)中进行存储。For example, examples of initial oscillation frequency temperature characteristics are shown in FIG. 13 , FIG. 14 , and FIG. 15 . In these figures, the horizontal axis is the ambient temperature, and the vertical axis is the frequency deviation of the oscillation frequency. As shown in FIGS. 13 to 15 , the temperature characteristics of the oscillation frequency vary greatly depending on the samples of each product. Therefore, the temperature characteristics of the oscillation frequency and the change characteristics of the temperature detection data corresponding to the ambient temperature are measured in the inspection process at the time of manufacture and shipment of the product (oscillator). Furthermore, the coefficients A 0 to A 5 of the polynomial (approximate function) of the following formula (5) are obtained based on the measurement results, and the information of the obtained coefficients A 0 to A 5 is written into the storage unit 34 of FIG. 9 (non-volatile stored in volatile memory).

TCODE=A5·X5+A4·X4+A3·X3+A2·X2+A1·X+A0···(5)TCODE=A 5 X 5 +A 4 X 4 +A 3 X 3 +A 2 X 2 +A 1 X+A 0 (5)

在上式(5)中,X相当于由A/D转换部20得到的温度检测数据DTD(A/D转换值)。由于还测量了相对于周围温度变化的温度检测数据DTD的变化,因此,通过上式(5)的多项式所表示的近似函数,能够将周围温度与振荡频率对应起来。温度补偿部58从存储部34读出系数A0~A5的信息,根据该系数A0~A5和温度检测数据DTD(=X)进行上式(5)的运算处理,生成温度补偿数据TCODE(温度补偿码)。由此,能够实现用于使振荡频率相对于周围温度的变化保持为恒定的温度补偿处理。In the above formula (5), X corresponds to the temperature detection data DTD (A/D conversion value) obtained by the A/D conversion unit 20 . Since the change in the temperature detection data DTD with respect to the change in the ambient temperature is also measured, the ambient temperature can be associated with the oscillation frequency by the approximate function represented by the polynomial of the above equation (5). The temperature compensating unit 58 reads the information of the coefficients A 0 to A 5 from the storage unit 34 , performs the calculation processing of the above formula (5) based on the coefficients A 0 to A 5 and the temperature detection data DTD (=X), and generates temperature compensation data. TCODE (Temperature Compensation Code). Thereby, temperature compensation processing for keeping the oscillation frequency constant with respect to changes in ambient temperature can be realized.

选择器62、63在选择端子S的输入信号的逻辑电平为“1”(有效)的情况下,选择“1”侧的端子的输入信号,并作为输出信号而输出。此外,在选择端子S的输入信号的逻辑电平为“0”(无效)的情况下,选择“0”侧的端子的输入信号,并作为输出信号而输出。The selectors 62 and 63 select the input signal of the terminal on the "1" side when the logic level of the input signal of the selection terminal S is "1" (active), and output it as an output signal. In addition, when the logic level of the input signal of the selection terminal S is "0" (inactive), the input signal of the terminal on the "0" side is selected and output as an output signal.

信号KFEN是卡尔曼滤波处理的使能信号。卡尔曼滤波部54在信号KFEN为逻辑电平“1”(以下,简记为“1”)的情况下执行卡尔曼滤波处理。信号PLLLOCK是在PLL电路为锁定状态的情况下成为“1”的信号。信号HOLDOVER是在检测到保持模式的保持模式期间成为“1”的信号。这些信号PLLLOCK、HOLDOVER是通过图9的保持模式处理部52的状态机的电路生成的。Signal KFEN is an enable signal for Kalman filter processing. Kalman filter unit 54 executes Kalman filter processing when signal KFEN is at logic level “1” (hereinafter, abbreviated as “1”). The signal PLLLOCK is a signal that becomes "1" when the PLL circuit is in the locked state. The signal HOLDOVER is a signal that becomes "1" during the hold mode in which the hold mode is detected. These signals PLLLOCK and HOLDOVER are generated by the circuit of the state machine of the hold mode processing unit 52 in FIG. 9 .

信号TCEN是温度补偿处理的使能信号。以下,主要以信号TCEN为“1”、且选择器63选择“1”侧的输入信号的情况为例进行说明。此外,信号KFEN也是“1”。Signal TCEN is an enable signal for temperature compensation processing. Hereinafter, the case where the signal TCEN is “1” and the selector 63 selects an input signal on the “1” side will be described as an example. In addition, the signal KFEN is also "1".

在通常动作期间,由于信号HOLDOVER为逻辑电平“0”((以下,简记为“0”),因此,选择器62选择“0”端子侧的频率控制数据DFCI。而且,通过加法器65对该频率控制数据DFCI加上温度补偿数据TCODE,温度补偿处理后的频率控制数据DFCQ被输出到后级的振荡信号生成电路140。During normal operation, since the signal HOLDOVER is logic level "0" (hereinafter, abbreviated as "0"), the selector 62 selects the frequency control data DFCI on the side of the "0" terminal. Furthermore, the adder 65 The temperature compensation data TCODE is added to the frequency control data DFCI, and the temperature compensation-processed frequency control data DFCQ is output to the subsequent oscillation signal generation circuit 140 .

另一方面,在保持模式期间,信号HOLDOVER为“1”,选择器62选择“1”端子侧的AC(k)。AC(k)是老化校正后的频率控制数据。On the other hand, during the hold mode, the signal HOLDOVER is "1", and the selector 62 selects AC(k) on the "1" terminal side. AC(k) is the age-corrected frequency control data.

图16是说明卡尔曼滤波部54的动作的真值表。在信号PLLLOCK、KFEN都是“1”的情况下,卡尔曼滤波部54执行真值估计处理(卡尔曼滤波处理)。即,在通常动作期间内PLL电路(内部或者外部的PLL电路)处于锁定状态的情况下,持续进行作为观测值的频率控制数据DFCI的真值估计处理。FIG. 16 is a truth table illustrating the operation of the Kalman filter unit 54 . When the signals PLLLOCK and KFEN are both "1", the Kalman filter unit 54 executes a truth value estimation process (Kalman filter process). That is, when the PLL circuit (internal or external PLL circuit) is in the locked state during the normal operation period, the process of estimating the true value of the frequency control data DFCI as the observed value continues.

而且,在成为保持模式的状态,解除PLL电路的锁定,从而信号PLLLOCK为“0”的情况下,卡尔曼滤波部54保持上次的输出状态。例如在图12中,保存并持续输出保持模式的检出时刻(PLL电路的锁定解除的时刻)下的值,作为估计为频率控制数据DFCI的真值的后验估计值x^(k)和老化校正的校正值D’(k)。Furthermore, when the lock of the PLL circuit is released and the signal PLLLOCK is "0" in the state of the hold mode, the Kalman filter unit 54 holds the previous output state. For example, in FIG. 12, the value at the detection time of the hold mode (the time when the lock of the PLL circuit is released) is stored and continuously output as the a posteriori estimated value x^(k) and the true value of the frequency control data DFCI. Correction value D'(k) for aging correction.

老化校正部56在保持模式期间内,使用来自卡尔曼滤波部54的后验估计值x^(k)、校正值D’(k)进行老化校正。具体而言,保存保持模式的检出时刻的后验估计值x^(k)、校正值D’(k),进行老化校正。The burn-in correction unit 56 performs burn-in correction using the a posteriori estimated value x^(k) and the correction value D'(k) from the Kalman filter unit 54 during the hold mode period. Specifically, the a posteriori estimated value x^(k) and the corrected value D'(k) at the time of detection of the hold mode are stored, and burn-in correction is performed.

此外,在图12中,在卡尔曼滤波部54中输入去除了温度变动成分(广义上说是环境变动成分)和老化变动成分中的温度变动成分的频率控制数据DFCI。卡尔曼滤波部54对去除了温度变动成分(环境变动成分)的频率控制数据DFCI进行卡尔曼滤波处理,估计针对频率控制数据DFCI的真值。即,求出后验估计值x^(k)。而且,老化校正部56根据估计出的真值即后验估计值x^(k)进行老化校正。更具体而言,根据来自卡尔曼滤波部54的后验估计值x^(k)和校正值D’(k)求出老化校正后的频率控制数据AC(k)。而且,老化校正后的频率控制数据即AC(k)经由选择器62输入到加法器65,加法器65进行对AC(k)加上温度补偿数据TCODE(环境变动成分的补偿用数据)的处理。In addition, in FIG. 12 , the frequency control data DFCI from which temperature variation components (environmental variation components in a broad sense) and aging variation components are removed are input to the Kalman filter unit 54 . The Kalman filter unit 54 performs Kalman filter processing on the frequency control data DFCI from which the temperature fluctuation component (environmental fluctuation component) has been removed, and estimates the true value of the frequency control data DFCI. That is, the posterior estimated value x^(k) is obtained. Furthermore, the burn-in correcting unit 56 performs burn-in correction based on the estimated true value, that is, the a posteriori estimated value x^(k). More specifically, aging-corrected frequency control data AC(k) is obtained from the a posteriori estimated value x^(k) and the corrected value D'(k) from the Kalman filter unit 54. Then, AC(k), which is the frequency control data after aging correction, is input to the adder 65 via the selector 62, and the adder 65 adds temperature compensation data TCODE (data for compensating environmental fluctuation components) to AC(k). .

例如,如图17的示意图所示,当温度变动时,如E1所示,频率控制数据也与其对应地变动。因此,当使用像E1那样伴随着温度变动而变动的频率控制数据来进行卡尔曼滤波处理时,保持模式检出时刻的真值也产生波动。For example, as shown in the schematic diagram of FIG. 17 , when the temperature fluctuates, the frequency control data also fluctuates correspondingly as shown in E1 . Therefore, when Kalman filter processing is performed using frequency control data that fluctuates with temperature fluctuations like E1 , the true value at the time of holding the mode detection also fluctuates.

因此,在本实施方式中,取得去除了温度变动成分的频率控制数据,并输入到卡尔曼滤波部54。即,将去除了温度变动成分(环境变动成分)和老化变动成分中的温度变动成分的频率控制数据输入到卡尔曼滤波部54。即,输入图17的E2所示的频率控制数据。E2的频率控制数据为去除了温度变动成分而残留有老化变动成分的频率控制数据。Therefore, in the present embodiment, the frequency control data from which the temperature variation component has been removed is acquired and input to the Kalman filter unit 54 . That is, the frequency control data from which temperature fluctuation components (environmental fluctuation components) and aging fluctuation components have been removed are input to the Kalman filter unit 54 . That is, the frequency control data indicated by E2 in FIG. 17 is input. The frequency control data of E2 is frequency control data in which the temperature fluctuation component is removed and the aging fluctuation component remains.

卡尔曼滤波部54通过对这样去除了温度变动成分而残留有老化变动成分的频率控制数据DFCI进行卡尔曼滤波处理,求出被估计真值的后验估计值x^(k)、老化校正的校正值D’(k)。而且,将在保持模式的检出时刻估计出的真值即后验估计值x^(k)、校正值D’(k)保存到老化校正部56,用于执行老化校正。The Kalman filter unit 54 performs Kalman filter processing on the frequency control data DFCI with the temperature variation component removed and the aging variation component remaining in this way, to obtain the posterior estimated value x^(k) of the estimated true value and the aging-corrected Correction value D'(k). Furthermore, the a posteriori estimated value x^(k) and the corrected value D'(k), which are true values estimated at the detection time of the hold mode, are stored in the burn-in correcting unit 56, and are used for burn-in correction.

例如通过加法器65进行加上温度补偿数据TCODE的处理,频率控制数据DFCQ成为被温度补偿后的频率控制数据。因此,输入有频率控制数据DFCQ的振荡信号生成电路140输出温度补偿后的振荡频率的振荡信号OSCK。因此,与该振荡信号生成电路140一起构成PLL电路的图9的频率控制数据生成部40将如图17的E2所示那样去除了温度变动成分的频率控制数据DFCI供给到处理部50。而且,如图17的E2所示,在去除了该温度变动成分的频率控制数据DFCI中残留有随着经过时间而变化的老化变动成分。因此,处理部50的卡尔曼滤波部54对残留有该老化变动成分的频率控制数据DFCI进行卡尔曼滤波处理,如果老化校正部56根据卡尔曼滤波处理的结果进行老化校正,则能够实现高精度的老化校正。For example, the temperature compensation data TCODE is added by the adder 65, and the frequency control data DFCQ becomes temperature-compensated frequency control data. Therefore, the oscillation signal generating circuit 140 to which the frequency control data DFCQ is input outputs the oscillation signal OSCK of the temperature-compensated oscillation frequency. Therefore, the frequency control data generation unit 40 of FIG. 9 constituting a PLL circuit together with the oscillation signal generation circuit 140 supplies the frequency control data DFCI from which the temperature fluctuation component has been removed as shown in E2 of FIG. 17 to the processing unit 50 . Then, as shown in E2 of FIG. 17 , the frequency control data DFCI from which this temperature fluctuation component has been removed remains an aging fluctuation component that changes with the elapse of time. Therefore, the Kalman filter unit 54 of the processing unit 50 performs Kalman filter processing on the frequency control data DFCI in which the aging fluctuation component remains, and if the aging correction unit 56 performs aging correction based on the result of the Kalman filter processing, high accuracy can be achieved. aging correction.

另外,作为图12的变形例,可以不进行加法器65中的加上温度补偿数据TCODE的处理,而进行用于去除频率控制数据DFCI的温度变动成分(环境变动成分)的运算处理,并将运算处理后的频率控制数据DFCI输入到卡尔曼滤波部54。例如省略图12的加法器65以及选择器63的结构,在卡尔曼滤波部54的前级设置从频率控制数据DFCI中减去温度补偿数据TCODE的减法器,将该减法器的输出输入到卡尔曼滤波部54。此外,在老化校正部56与选择器62之间设置将老化校正部56的输出与温度补偿数据TCODE相加的加法器,将加法器的输出输入到选择器62的“1”侧的端子。通过这样的结构,也能够将去除了温度变动成分而仅残留有老化变动成分的频率控制数据DFCI输入到卡尔曼滤波部54。12, instead of adding the temperature compensation data TCODE in the adder 65, calculation processing for removing the temperature fluctuation component (environmental fluctuation component) of the frequency control data DFCI may be performed, and the The calculated frequency control data DFCI is input to the Kalman filter unit 54 . For example, the structure of the adder 65 and the selector 63 in FIG. 12 is omitted, and a subtracter for subtracting the temperature compensation data TCODE from the frequency control data DFCI is provided in the preceding stage of the Kalman filter unit 54, and the output of the subtracter is input to the Kalman filter unit 54. Mann filter unit 54 . Also, an adder for adding the output of burn-in corrector 56 to temperature compensation data TCODE is provided between burn-in corrector 56 and selector 62 , and the output of the adder is input to the “1” side terminal of selector 62 . With such a configuration, it is also possible to input the frequency control data DFCI from which the temperature variation component has been removed and only the aging variation component remains, to the Kalman filter unit 54 .

图18示出老化校正部56的详细结构例。由于在通常动作期间内,信号HOLDOVER为“0”,因此,选择器360、361选择“0”端子侧。由此,在通常动作期间内,由卡尔曼滤波部54运算出的后验估计值x^(k)、校正值D’(k)(滤波处理后的校正值)被分别保存到寄存器350、351。FIG. 18 shows a detailed configuration example of the burn-in correction unit 56 . Since the signal HOLDOVER is "0" during the normal operation period, the selectors 360 and 361 select the "0" terminal side. Thus, during the normal operation period, the a posteriori estimated value x^(k) calculated by the Kalman filter unit 54 and the corrected value D′(k) (corrected value after filter processing) are stored in the register 350, respectively. 351.

当检测到保持模式,从而信号HOLDOVER为“1”时,选择器360、361选择“1”端子侧。由此,选择器361在保持模式期间中,持续输出在保持模式的检出时刻保存于寄存器351的校正值D’(k)。When the hold mode is detected and the signal HOLDOVER is "1", the selectors 360, 361 select the "1" terminal side. Thus, the selector 361 continuously outputs the correction value D'(k) stored in the register 351 at the time of detection of the hold mode during the hold mode period.

而且,加法器340进行如下处理:按照各时间步,对在保持模式的检出时刻保存于寄存器350的后验估计值x^(k)依次加上保存于寄存器351并从选择器361输出的校正值D’(k)(校正值)。由此,实现了下式(6)所示的老化校正。Furthermore, the adder 340 performs a process of sequentially adding the a posteriori estimated value x^(k) stored in the register 351 and output from the selector 361 to the a posteriori estimated value x^(k) stored in the register 350 at the time of detection of the hold mode for each time step. Correction value D'(k) (correction value). Thereby, burn-in correction represented by the following formula (6) is realized.

AC(k+1)=AC(k)+D′(k)···(6)AC(k+1)=AC(k)+D'(k)···(6)

即,进行如下处理来实现老化校正:对在图10的C2的时刻保存的真值即后验估计值x^(k)依次加上校正值D’(k),该校正值D’(k)用于消除(补偿)由相当于C3的斜率的老化速率导致的频率变化。That is, aging correction is realized by performing the following process: adding a correction value D'(k) sequentially to the true value stored at the time point C2 in FIG. ) is used to cancel (compensate) the frequency change caused by the aging rate corresponding to the slope of C3.

7.卡尔曼滤波处理7. Kalman filter processing

接下来,对本实施方式的卡尔曼滤波处理的详情进行说明。图19示出卡尔曼滤波的模型例。图19的模型的状态方程式、观测方程式如下式(7)、(8)那样表示。Next, details of the Kalman filter processing in this embodiment will be described. FIG. 19 shows a model example of Kalman filtering. The state equation and observation equation of the model in FIG. 19 are represented by the following equations (7) and (8).

x(k+1)=A·x(k)+v(k)···(7)x(k+1)=A·x(k)+v(k)···(7)

y(k)=CT·x(k)+w(k)···(8)y(k)=C T x(k)+w(k)···(8)

K表示作为离散的时间的时间步。x(k)是时间步k(时刻k)的系统的状态,例如是n维的向量。A被称为系统矩阵。具体而言,A是n×n的矩阵,将不存在系统噪声的情况下的时间步k的系统的状态与时间步k+1的系统的状态关联起来。v(k)是系统噪声。y(k)是观测值,w(k)是观测噪声。C是观测系数向量(n维),T表示转置矩阵。K represents a time step as discrete time. x(k) is the state of the system at time step k (time k), and is, for example, an n-dimensional vector. A is called the system matrix. Specifically, A is an n×n matrix that relates the state of the system at time step k to the state of the system at time step k+1 in the absence of system noise. v(k) is the system noise. y(k) is the observed value and w(k) is the observation noise. C is the observation coefficient vector (n dimension), T represents the transpose matrix.

在上式(7)、(8)的模型的卡尔曼滤波处理中,进行下式(9)~(13)的处理,估计真值。In the Kalman filter processing of the models of the above equations (7) and (8), the processing of the following equations (9) to (13) is performed to estimate the true value.

P-(k)=A·P(k-1)·AT+v(k)···(10)P - (k) = A·P(k-1)· AT +v(k)···(10)

P(k)=(1-G(k)·CT)·P-(k)···(13)P(k)=(1-G(k)·C T )·P - (k)···(13)

x^(k):后验估计值x^(k): Posterior estimate

x^-(k):先验估计值x^ - (k): prior estimate

P(k):后验协方差P(k): posterior covariance

P-(k):先验协方差P - (k): prior covariance

G(k):卡尔曼增益G(k): Kalman gain

上式(9)、(10)是时间更新(预测过程)的式子,上式(11)~(13)是观测更新(观测过程)的式子。作为离散的时间的时间步k每前进1个,则进行1次卡尔曼滤波处理的时间更新(式(9)、(10))以及观测更新(式(11)~(13))。The above formulas (9) and (10) are expressions of time update (prediction process), and the above formulas (11) to (13) are formulas of observation update (observation process). Each time the time step k that is a discrete time advances by one, time update (Equations (9), (10)) and observation update (Equations (11) to (13)) of the Kalman filter process are performed once.

x^(k)、x^(k-1)是时间步k、k-1的卡尔曼滤波处理的后验估计值。x^-(k)是得到观测值之前预测的先验估计值。P(k)是卡尔曼滤波处理的后验协方差,P-(k)是得到观测值之前预测的先验协方差。G(k)是卡尔曼增益。x^(k), x^(k-1) are the posterior estimates of the Kalman filtering process at time steps k and k-1. x^ - (k) is an a priori estimate of the forecast before the observations are made. P(k) is the posterior covariance of the Kalman filtering process, and P-(k) is the prior covariance predicted before the observations are obtained. G(k) is the Kalman gain.

在卡尔曼滤波处理中,在观测更新中,通过上式(11)求出卡尔曼增益G(k)。此外,根据观测值y(k),通过上式(12),更新后验估计值x^(k)。此外,通过上式(13),更新误差的后验协方差P(k)。In the Kalman filtering process, the Kalman gain G(k) is obtained by the above equation (11) in the observation update. In addition, according to the observed value y(k), the posterior estimated value x^(k) is updated through the above formula (12). In addition, the posteriori covariance P(k) of the error is updated through the above formula (13).

此外,在卡尔曼滤波处理中,在时间更新中,如上式(9)所示,根据时间步k-1的后验估计值x^(k-1)和系统矩阵A,预测下一时间步k的先验估计值x^-(k)。此外,如上式(10)所示,根据时间步k-1的后验协方差P(k-1)、系统矩阵A、系统噪声v(k),预测下一时间步k的先验协方差P-(k)。In addition, in the Kalman filtering process, in the time update, as shown in the above formula (9), the next time step is predicted according to the posterior estimated value x^(k-1) of time step k-1 and the system matrix A The prior estimate of k x^ - (k). In addition, as shown in the above formula (10), according to the posterior covariance P(k-1) of time step k-1, the system matrix A, and the system noise v(k), the prior covariance of the next time step k is predicted P-(k).

另外,当要执行上式(9)~(13)的卡尔曼滤波处理时,有时处理部50的处理负荷过大,导致电路装置的大规模化。例如为了求出上式(9)的x^-(k)=Ax^(k-1)的A,需要扩展卡尔曼滤波处理。而且,扩展卡尔曼滤波处理的处理负荷非常重,当要通过能够进行扩展卡尔曼滤波处理的硬件来实现处理部50时,处理部50的电路面积容易变得非常大。因此,当对内置于振荡器的电路装置强烈要求小型化的状况下,是不恰当的。另一方面,当使用固定值的标量值作为系统矩阵A时,实现恰当的老化校正时的难易度提高。In addition, when the Kalman filter processing of the above expressions (9) to (13) is to be performed, the processing load of the processing unit 50 may be too large, resulting in an increase in the size of the circuit device. For example, in order to obtain A of x^ - (k)=Ax^(k-1) in the above formula (9), extended Kalman filter processing is required. Furthermore, the processing load of the extended Kalman filter processing is very heavy, and when the processing unit 50 is realized by hardware capable of performing the extended Kalman filter processing, the circuit area of the processing unit 50 tends to become very large. Therefore, it is not suitable in a situation where miniaturization of a circuit device built in an oscillator is strongly required. On the other hand, when a scalar value of a fixed value is used as the system matrix A, the degree of difficulty in realizing appropriate burn-in correction increases.

因此,作为需要避免这样的状况时的解决手段,在本实施方式中,不通过上式(9)~(13),而通过基于下式(14)~(19)的处理来实现卡尔曼滤波处理。即,处理部50(卡尔曼滤波部54)执行基于下式(14)~(19)的卡尔曼滤波处理。Therefore, as a solution when it is necessary to avoid such a situation, in this embodiment, Kalman filtering is realized by processing based on the following expressions (14) to (19) instead of the above expressions (9) to (13). deal with. That is, the processing unit 50 (Kalman filter unit 54 ) executes Kalman filter processing based on the following expressions (14) to (19).

P-(k)=P(k-1)+v(k)···(15)P- ( k)=P(k-1)+v(k)···(15)

P(k)=(1-G(k))·P-(k)···(18)P(k)=(1-G(k))·P- ( k)···(18)

另外,在本实施方式中,作为真值的估计处理的对象的x(k)是频率控制数据,观测值y(k)也是频率控制数据,因此,C=1。此外,由于A的标量值无限接近于1,因此,能够使用上式(15)来替代上式(10)。In addition, in the present embodiment, x(k) which is the target of the estimation process of the true value is frequency control data, and observed value y(k) is also frequency control data, therefore, C=1. In addition, since the scalar value of A is infinitely close to 1, the above equation (15) can be used instead of the above equation (10).

如上所述,与采用扩展卡尔曼滤波处理来作为卡尔曼滤波处理的情况相比,在本实施方式的卡尔曼滤波处理中,如上式(14)所示,通过时间步k-1的后验估计值x^(k-1)与校正值D(k-1)的相加处理来求出时间k的先验估计值x^-(k)。因此,不需要使用扩展卡尔曼滤波处理,在实现处理部50的处理负荷的减轻、电路规模的增加抑制等方面优异。As described above, compared with the case where the extended Kalman filter is used as the Kalman filter, in the Kalman filter of this embodiment, as shown in the above formula (14), the posteriori of time step k-1 The estimated value x^(k-1) and the correction value D(k-1) are added to obtain the prior estimate value x^ - (k) of time k. Therefore, there is no need to use extended Kalman filter processing, which is excellent in reducing the processing load on the processing unit 50 and suppressing an increase in circuit scale.

在本实施方式中,通过下述式子的变形导出上式(14)。In the present embodiment, the above formula (14) is derived by modifying the following formula.

例如上式(20)能够如上式(21)那样变形。这里,由于上式(21)的(A-1)是非常小的数,因此,如上式(22)、(23)所示,能够采用将(A-1)·x^(k-1)置换为(A-1)·F0的近似。然后,将该(A-1)·F0置换为校正值D(k-1)。For example, the above formula (20) can be modified like the above formula (21). Here, since (A-1) in the above formula (21) is a very small number, as shown in the above formulas (22) and (23), it is possible to use (A-1)·x^(k-1) The substitution is an approximation of (A-1)·F 0 . Then, this (A-1)·F 0 is replaced with the correction value D(k-1).

而且如上式(19)所示,在从时间步k-1向时间步k的时间更新时,进行校正值D(k)=D(k-1)+E·(y(k)-x^-(k))=D(k-1)+E·ek的更新处理。这里,ek=y(k)-x^-(k)被称为卡尔曼滤波处理中的观测残差。此外,E是常数。另外,也能够替代常数E,而实施使用卡尔曼增益G(k)的变形。即,可以是D(k)=D(k-1)+G(k)·ek。And as shown in the above formula (19), when updating from time step k-1 to time step k, the correction value D(k)=D(k-1)+E·(y(k)-x^ - (k))=D(k-1)+E·ek update process. Here, ek=y(k)-x^ - (k) is called an observation residual in the Kalman filtering process. Also, E is a constant. In addition, instead of the constant E, a modification using the Kalman gain G(k) can also be implemented. That is, it may be D(k)=D(k-1)+G(k)·ek.

这样,在式(19)中,在设观测残差为ek、常数为E的情况下,通过D(k)=D(k-1)+E·ek求出校正值D(k)。这样,能够进行反映了卡尔曼滤波处理中的观测残差ek的、校正值D(k)的更新处理。In this way, in Equation (19), when the observation residual is ek and the constant is E, the correction value D(k) is obtained by D(k)=D(k-1)+E·ek. In this way, it is possible to perform update processing of the correction value D(k) reflecting the observation residual ek in the Kalman filter processing.

图20示出卡尔曼滤波部54的结构例。卡尔曼滤波部54包含加法器300、301、302、303、304、乘法器305、寄存器310、311、312、313、选择器320、321、滤波器330、331和运算器332、333。另外,卡尔曼滤波部54的结构不限于图20所示的结构,能够实施省略其中一部分结构要素、或追加其他结构要素等各种变形。例如,可以通过1个运算器的时分处理来实现加法器300~304等的处理。FIG. 20 shows a configuration example of the Kalman filter unit 54 . Kalman filter unit 54 includes adders 300 , 301 , 302 , 303 , 304 , multiplier 305 , registers 310 , 311 , 312 , 313 , selectors 320 , 321 , filters 330 , 331 , and arithmetic units 332 , 333 . In addition, the configuration of the Kalman filter unit 54 is not limited to the configuration shown in FIG. 20 , and various modifications such as omitting some of the constituent elements or adding other constituent elements can be implemented. For example, the processing of the adders 300 to 304 and the like can be realized by time-division processing of one arithmetic unit.

通过加法器304和寄存器312,执行上式(14)的运算处理。此外,系统噪声的设定用的系统噪声常数V和观测噪声的设定用的观测噪声常数W的信息被从图9的存储部34读出,并输入到卡尔曼滤波部54(处理部50)。并且,通过加法器300和寄存器310,执行上式(15)的运算处理。此外,运算器332执行上式(16)的运算处理,求出卡尔曼增益G(k)。并且,根据求出的卡尔曼增益G(k),通过加法器301、乘法器305和加法器302,执行上式(17)的运算处理。此外,运算器333执行上式(18)的运算处理,求出后验协方差P(k)。With the adder 304 and the register 312, the arithmetic processing of the above formula (14) is executed. In addition, information on the system noise constant V for setting the system noise and the observed noise constant W for setting the observed noise is read from the storage unit 34 in FIG. 9 and input to the Kalman filter unit 54 (processing unit 50 ). And, the arithmetic processing of the above formula (15) is executed by the adder 300 and the register 310 . In addition, the arithmetic unit 332 executes the arithmetic processing of the above formula (16) to obtain the Kalman gain G(k). Then, based on the calculated Kalman gain G(k), the adder 301 , the multiplier 305 , and the adder 302 execute the arithmetic processing of the above formula (17). In addition, the arithmetic unit 333 executes the arithmetic processing of the above formula (18) to obtain the posterior covariance P(k).

此外,通过加法器303、寄存器311和滤波器330,执行上式(19)的运算处理。输入到滤波器330中的常数E的信息被从图9的存储部34读出。常数E相当于老化速率的校正系数(滤波常数)。例如,滤波器330根据常数E来进行增益調整等,由此能够实现上式(19)的E·(y(k)-x^-(k))。In addition, the arithmetic processing of the above formula (19) is executed by the adder 303 , the register 311 and the filter 330 . Information on the constant E input to the filter 330 is read from the storage unit 34 in FIG. 9 . The constant E corresponds to a correction coefficient (filter constant) for the aging rate. For example, the filter 330 can realize E·( y (k)-x̂-(k)) in the above formula (19) by performing gain adjustment and the like according to the constant E.

在信号PLLLOCK、KFEN分别为“1”的情况下,选择器320、321选择“1”侧的端子的输入信号。将选择器320的输出信号保存到寄存器313中。因此,在成为保持模式的状态且信号PLLLOCK从“1”变为“0”以后,将保持模式的检出时刻的真值即x^(k)保存到寄存器313中。When the signals PLLLOCK and KFEN are respectively "1", the selectors 320 and 321 select the input signal of the terminal on the "1" side. The output signal of the selector 320 is saved in the register 313 . Therefore, after the state of the hold mode is entered and the signal PLLLOCK changes from “1” to “0”, x̂(k), which is a true value at the time of detection of the hold mode, is stored in the register 313 .

滤波器331对校正值D(k)进行滤波处理。具体而言,对校正值D(k)进行数字低通滤波处理,将滤波处理后的校正值D’(k)输入到图18的老化校正部56。常数J是滤波器331的滤波常数。根据常数J,设定了滤波器331的最佳截止频率。The filter 331 performs filter processing on the correction value D(k). Specifically, digital low-pass filtering is performed on the correction value D(k), and the filtered correction value D'(k) is input to the burn-in correction unit 56 in FIG. 18 . The constant J is a filter constant of the filter 331 . According to the constant J, the optimum cut-off frequency of the filter 331 is set.

例如,根据图10可知,在补偿由老化速率导致的频率变化的校正值D(k)中存在细微的变动的波动。因此,在将这样存在波动的校正值D(k)与真值相加后,老化校正的精度下降。For example, as can be seen from FIG. 10 , there are fine fluctuations in the correction value D(k) for compensating for the frequency change due to the aging rate. Therefore, when the correction value D(k) fluctuates in this way is added to the true value, the accuracy of burn-in correction decreases.

关于此点,在本实施方式中,将滤波处理后的校正值D’(k)与真值相加,所以能够实现更高精度的老化校正。In this regard, in the present embodiment, the corrected value D'(k) after the filtering process is added to the true value, so more accurate burn-in correction can be realized.

如上所述,在本实施方式中,如上式(14)所示,处理部50在卡尔曼滤波处理的先验估计值的更新处理(时间更新)中,进行如下处理:通过上次的时刻的后验估计值x^(k-1)与校正值D(k-1)的相加处理,求出此次的时刻的先验估计值x^-(k)。而且,根据卡尔曼滤波处理的结果,进行频率控制数据的老化校正。即,进行上次的时刻即时间步k-1的后验估计值x^(k-1)与校正值D(k-1)的相加处理,通过x^-(k)=x^(k-1)+D(k-1)求出此次的时刻即时间步k的先验估计值x^-(k)。As described above, in the present embodiment, as shown in the above formula (14), the processing unit 50 performs the following process in the update process (time update) of the a priori estimated value of the Kalman filter process: The process of adding the a posteriori estimated value x^(k-1) and the correction value D(k-1) obtains the a priori estimated value x^ - (k) at this time. Furthermore, based on the result of the Kalman filter processing, aging correction of the frequency control data is performed. That is, the addition process of the posterior estimated value x^(k-1) and the correction value D(k-1) at the last time, that is, time step k-1, is performed by x^ - (k)=x^( k-1)+D(k-1) Calculate the prior estimate x^ - (k) of time step k at this moment.

而且,处理部50(老化校正部56)根据该卡尔曼滤波处理的结果(真值、校正值)来进行老化校正。即,在设时间步k的校正值为D(k)(或者D’(k))、时间步k的老化校正后的频率控制数据为AC(k)的情况下,通过AC(k+1)=AC(k)+D(k)(或者AC(k)+D’(k))求出时间步k+1的老化校正后的频率控制数据AC(k+1)。Then, the processing unit 50 (burn-in correcting unit 56 ) performs burn-in correction based on the result (true value, corrected value) of the Kalman filter processing. That is, when the correction value of time step k is D(k) (or D'(k)), and the aging-corrected frequency control data of time step k is AC(k), by AC(k+1 )=AC(k)+D(k) (or AC(k)+D'(k)) Calculate aging-corrected frequency control data AC(k+1) at time step k+1.

此外,处理部50如上式(19)所示那样根据上次的时刻的校正值D(k-1)和卡尔曼滤波处理中的观测残差ek,求出此次的时刻的校正值D(k)。例如,通过进行对上次的时刻的校正值D(k-1)加上基于观测残差的值即E·ek(或者G(k)·ek)的处理,求出此次的时刻的校正值D(k)。具体而言,根据上次的时刻即时间步k-1的校正值D(k-1)和卡尔曼滤波处理中的观测残差ek,求出此次的时刻即时间步k的校正值D(k)。例如,在设观测残差为ek、常数为E的情况下,通过D(k)=D(k-1)+E·ek求出校正值D(k)。Furthermore, the processing unit 50 obtains the correction value D( k). For example, the correction at this time is obtained by adding E·ek (or G(k)·ek), which is a value based on the observation residual, to the correction value D(k-1) at the previous time. Value D(k). Specifically, based on the correction value D(k-1) at time step k-1 at the previous time and the observation residual ek in the Kalman filtering process, the correction value D at time step k at this time is obtained (k). For example, when the observation residual is ek and the constant is E, the correction value D(k) is obtained by D(k)=D(k-1)+E·ek.

例如在本实施方式中,如图17中说明的那样,取得温度变动成分信息等环境变动成分信息,并利用取得的环境变动成分信息,取得去除了环境变动成分和老化变动成分中的环境变动成分的频率控制数据。这里,环境变动成分信息可以是电源电压变动成分、气压变动成分或者重力变动成分等。然后,根据去除了环境变动成分的频率控制数据,进行老化校正。具体而言,设环境变动成分为温度。根据温度检测数据DTD,取得作为环境变动成分信息的温度变动成分信息,该温度检测数据DTD是通过来自用于取得环境变动成分信息的作为环境变动信息取得部的图9的温度传感器10的温度检测电压VTD而求出的。而且,使用取得的温度变动成分信息,取得去除了温度变动成分的频率控制数据。例如图12的温度补偿部58取得温度补偿数据TCODE,通过加法器65进行温度补偿数据TCODE的相加处理,由此,去除了温度变动成分的频率控制数据DFCI从频率控制数据生成部40输入,并由处理部50取得。即,如图17的E2所示,取得去除了温度变动成分而残留有老化变动成分的频率控制数据DFCI,并输入到卡尔曼滤波部54。For example, in this embodiment, as described in FIG. 17 , environmental change component information such as temperature change component information is obtained, and the environmental change component from which the environmental change component and the aging change component have been removed is obtained by using the acquired environmental change component information. frequency control data. Here, the environmental variation component information may be a power supply voltage variation component, an air pressure variation component, a gravity variation component, or the like. Then, burn-in correction is performed based on the frequency control data from which the environmental fluctuation component has been removed. Specifically, the environmental variation component is assumed to be temperature. The temperature fluctuation component information as the environmental fluctuation component information is acquired based on the temperature detection data DTD obtained by the temperature detection from the temperature sensor 10 as the environmental fluctuation information acquisition unit of FIG. It is obtained from the voltage VTD. Then, using the acquired temperature variation component information, frequency control data from which the temperature variation component has been removed is acquired. For example, the temperature compensation unit 58 in FIG. 12 acquires the temperature compensation data TCODE, and the temperature compensation data TCODE is added by the adder 65, whereby the frequency control data DFCI from which the temperature fluctuation component has been removed is input from the frequency control data generation unit 40, and acquired by the processing unit 50 . That is, as shown in E2 of FIG. 17 , the frequency control data DFCI in which the temperature variation component is removed and the aging variation component remains is acquired and input to the Kalman filter unit 54 .

另外,去除了环境变动成分的频率控制数据除了包含完全去除了环境变动成分的适当状态的频率控制数据之外,还包含在频率控制数据内存在能够忽略的程度的环境变动成分的状态的频率控制数据。In addition, the frequency control data from which environmental fluctuation components have been removed includes not only frequency control data in an appropriate state in which environmental fluctuation components have been completely removed, but also frequency control data in which there are negligible environmental fluctuation components in the frequency control data. data.

例如,能够通过检测环境变动成分信息的作为环境变动信息取得部的温度传感器、电压检测电路等取得温度变动成分信息或者电源电压变动成分信息等环境变动成分信息。另一方面,老化变动成分是随时间经过而变化的振荡频率的变动成分,难以通过传感器等直接检测该老化变动成分的信息。For example, environmental variation component information such as temperature variation component information and power supply voltage variation component information can be acquired by a temperature sensor, a voltage detection circuit, etc. as an environmental variation information acquisition unit that detects the environmental variation component information. On the other hand, the aging variation component is a variation component of the oscillation frequency that changes with time, and it is difficult to directly detect information of the aging variation component with a sensor or the like.

因此,在本实施方式中,取得能够由传感器等检测的温度变动成分信息等环境变动成分信息,并利用该环境变动成分信息,取得去除了环境变动成分和老化变动成分中的环境变动成分的频率控制数据。即,通过进行从频率控制数据的变动成分中去除环境变动成分的处理(例如加法器65的加法处理),能够如图17的E2所示那样,取得仅残留有老化变动成分的频率控制数据。然后,如果根据残留有老化变动成分的频率控制数据进行卡尔曼滤波处理等,则能够估计针对频率控制数据的老化变动成分的真值。而且,如果根据这样估计出的真值来进行老化校正,则能够实现在现有例中无法实现的高精度的老化校正。Therefore, in the present embodiment, environmental change component information such as temperature change component information that can be detected by a sensor or the like is obtained, and the environmental change component information is used to obtain a frequency with the environmental change component removed from the environmental change component and the aging change component. control data. That is, by performing processing (for example, adding processing by the adder 65 ) to remove the environmental variation component from the variation component of the frequency control data, frequency control data in which only the aging variation component remains can be obtained as shown in E2 of FIG. 17 . Then, by performing Kalman filter processing or the like on the frequency control data in which the aging fluctuation component remains, the true value of the aging fluctuation component with respect to the frequency control data can be estimated. Furthermore, if burn-in correction is performed based on the true value estimated in this way, high-accuracy burn-in correction that cannot be realized in conventional examples can be realized.

这样,在本实施方式中,在卡尔曼滤波部54中输入去除了温度变动成分(环境变动成分)、而残留有老化变动成分的频率控制数据DFCI。而且如图1、图10所示,如果限定期间,则在该期间内,能够假设振荡频率以恒定的老化速率变化。能够假设例如以图10的C3所示的恒定的斜率变化。Thus, in the present embodiment, the frequency control data DFCI from which the temperature variation component (environmental variation component) has been removed and the aging variation component remains is input to the Kalman filter unit 54 . Furthermore, as shown in FIG. 1 and FIG. 10 , if a period is limited, it can be assumed that the oscillation frequency changes at a constant aging rate within the period. It is possible to assume, for example, a constant slope change as indicated by C3 in FIG. 10 .

在本实施方式中,通过D(k)=D(k-1)+E·ek的式子,求出了用于补偿(消除)由这样的老化变动成分导致的恒定的老化速率下的频率变化的校正值。即,求出了用于补偿由相当于图10的C3的斜率的老化速率导致的频率变化的校正值D(k)。这里,老化速率不是恒定的,而是如图1、图10所示,随着经过时间而变化。In the present embodiment, the frequency for compensating (eliminating) the constant aging rate due to such an aging fluctuation component is obtained by the formula of D(k)=D(k-1)+E·ek Changed correction value. That is, the correction value D(k) for compensating the frequency change due to the aging rate corresponding to the slope of C3 in FIG. 10 was obtained. Here, the aging rate is not constant, but changes with time as shown in Fig. 1 and Fig. 10 .

对此,在本实施方式中,如D(k)=D(k-1)+E·ek那样,根据卡尔曼滤波处理的观测残差ek=y(k)-x^-(k),进行与老化速率对应的校正值D(k)的更新处理。因此,能够实现还反映了与经过时间对应的老化速率的变化的、校正值D(k)的更新处理。因此,能够实现更高精度的老化校正。On the other hand, in this embodiment, as D(k)=D(k-1)+E·ek, the observation residual ek=y(k)-x^ - (k) from the Kalman filtering process, Update processing of the correction value D(k) corresponding to the aging rate is performed. Therefore, it is possible to realize update processing of the correction value D(k) that also reflects the change in the aging rate corresponding to the elapsed time. Therefore, burn-in correction with higher accuracy can be realized.

在例如图21中,将实测频率偏差和预测频率偏差进行对比并示出。D1是实测的振荡频率的频率偏差,D2是通过本实施方式的卡尔曼滤波的估计处理而预测的振荡频率的频率偏差。D2所示的预测频率偏差相对于D1所示的实测频率偏差,落入到容许误差范围内,表示通过本实施方式实现了高精度的老化校正。For example, in FIG. 21 , the measured frequency deviation and the predicted frequency deviation are compared and shown. D1 is the frequency deviation of the actually measured oscillation frequency, and D2 is the frequency deviation of the oscillation frequency predicted by the estimation process of the Kalman filter in this embodiment. The predicted frequency deviation indicated by D2 falls within the allowable error range with respect to the measured frequency deviation indicated by D1 , indicating that high-accuracy burn-in correction is realized by this embodiment.

8.温度传感器、振荡电路8. Temperature sensor, oscillation circuit

图22示出温度传感器10的结构例。图22的温度传感器10具有电流源IST、以及集电极被提供来自电流源IST的电流的双极晶体管TRT。双极晶体管TRT成为其集电极与基极被连接的二极管连接,向双极晶体管TRT的集电极的节点输出具有温度特性的温度检测电压VTDI。温度检测电压VTDI的温度特性是由于双极晶体管TRT的基极-发射极间电压的温度依赖性而产生的。该温度传感器10的温度检测电压VTDI例如具有负的温度特性(具有负的梯度的1次温度特性)。FIG. 22 shows a configuration example of the temperature sensor 10 . The temperature sensor 10 of FIG. 22 has a current source IST, and a bipolar transistor TRT whose collector is supplied with a current from the current source IST. The bipolar transistor TRT is diode-connected with its collector and base connected, and outputs a temperature detection voltage VTDI having a temperature characteristic to the node of the collector of the bipolar transistor TRT. The temperature characteristic of the temperature detection voltage VTDI is caused by the temperature dependence of the base-emitter voltage of the bipolar transistor TRT. The temperature detection voltage VTDI of the temperature sensor 10 has, for example, a negative temperature characteristic (primary temperature characteristic with a negative gradient).

图23示出振荡电路150的结构例。该振荡电路150具有电流源IBX、双极晶体管TRX、电阻RX、可变电容式电容器CX1、电容器CX2、CX3。FIG. 23 shows a configuration example of the oscillation circuit 150 . This oscillation circuit 150 has a current source IBX, a bipolar transistor TRX, a resistor RX, a variable capacitance capacitor CX1, and capacitors CX2 and CX3.

电流源IBX向双极晶体管TRX的集电极提供偏置电流。电阻RX设置于双极晶体管TRX的集电极与基极之间。The current source IBX supplies a bias current to the collector of the bipolar transistor TRX. The resistor RX is disposed between the collector and the base of the bipolar transistor TRX.

电容可变的可变电容式电容器CX1的一端与振子XTAL的一端连接。具体而言,可变电容式电容器CX1的一端经由电路装置的第1振子用端子(振子用焊盘)而连接于振子XTAL的一端。电容器CX2的一端与振子XTAL的另一端连接。具体而言,电容器CX2的一端经由电路装置的第2振子用端子(振子用焊盘)而连接于振子XTAL的另一端。电容器CX3的一端与振子XTAL的一端连接,另一端与双极晶体管TRX的集电极连接。One end of the variable capacitance capacitor CX1 with variable capacitance is connected to one end of the vibrator XTAL. Specifically, one end of the variable capacitance capacitor CX1 is connected to one end of the oscillator XTAL via the first terminal for the oscillator (pad for the oscillator) of the circuit device. One end of the capacitor CX2 is connected to the other end of the vibrator XTAL. Specifically, one end of the capacitor CX2 is connected to the other end of the oscillator XTAL via the second terminal for the oscillator (pad for the oscillator) of the circuit device. One end of the capacitor CX3 is connected to one end of the vibrator XTAL, and the other end is connected to the collector of the bipolar transistor TRX.

双极晶体管TRX内流过通过振子XTAL的振荡而产生的基极-发射极间电流。并且,当基极-发射极间电流增大时,双极晶体管TRX的集电极-发射极间电流增大,从电流源IBX向电阻RX分支的偏置电流减小,因此,集电极电压VCX降低。另一方面,当双极晶体管TRX的基极-发射极间电流减小时,集电极-发射极间电流减小,从电流源IBX向电阻RX分支的偏置电流增大,因此,集电极电压VCX上升。该集电极电压VCX经由电容器CX3而反馈给振子XTAL。A base-emitter current generated by oscillation of the oscillator XTAL flows through the bipolar transistor TRX. And, when the base-emitter current increases, the collector-emitter current of the bipolar transistor TRX increases, and the bias current branched from the current source IBX to the resistor RX decreases. Therefore, the collector voltage VCX reduce. On the other hand, when the base-emitter current of the bipolar transistor TRX decreases, the collector-emitter current decreases, and the bias current branched from the current source IBX to the resistor RX increases, so the collector voltage VCX rises. This collector voltage VCX is fed back to the oscillator XTAL via the capacitor CX3.

振子XTAL的振荡频率具有温度特性,该温度特性通过D/A转换部80的输出电压VQ(频率控制电压)进行补偿。即,输出电压VQ被输入到可变电容式电容器CX1,并且利用输出电压VQ对可变电容式电容器CX1的电容值进行控制。在可变电容式电容器CX1的电容值发生变化时,振荡环路的谐振频率会发生变化,因此振子XTAL的温度特性造成的振荡频率的变动得到补偿。可变电容式电容器CX1可由例如可变电容二极管(varactor:变容二极管)等实现。The oscillation frequency of the vibrator XTAL has a temperature characteristic, and this temperature characteristic is compensated by the output voltage VQ (frequency control voltage) of the D/A converter 80 . That is, the output voltage VQ is input to the variable capacitance capacitor CX1, and the capacitance value of the variable capacitance capacitor CX1 is controlled by the output voltage VQ. When the capacitance value of the variable capacitance capacitor CX1 changes, the resonant frequency of the oscillation loop changes, so the fluctuation in the oscillation frequency caused by the temperature characteristics of the oscillator XTAL is compensated. The variable capacitance capacitor CX1 can be realized by, for example, a variable capacitance diode (varactor: variable capacitance diode) or the like.

另外,本实施方式的振荡电路150不限于图23的结构,可实施各种变形。例如在图23中以CX1为可变电容式电容器的情况为例进行了说明,但是,也可以将CX2或者CX3设为利用输出电压VQ控制的可变电容式电容器。此外,也可以将CX1~CX3中的多个设为利用VQ控制的可变电容式电容器。In addition, the oscillation circuit 150 of the present embodiment is not limited to the structure shown in FIG. 23 , and various modifications can be made. For example, in FIG. 23 , the case where CX1 is a variable capacitance capacitor has been described as an example. However, CX2 or CX3 may be a variable capacitance capacitor controlled by the output voltage VQ. In addition, a plurality of CX1 to CX3 may be variable capacitance capacitors controlled by VQ.

此外,振荡电路150可以不用包含用于使振子XTAL振荡的全部电路要素。例如,也可以采用如下结构:由设置于电路装置500的外部的分立式部件构成一部分的电路要素,并经由外部连接端子与振荡电路150连接。In addition, the oscillation circuit 150 does not need to include all circuit elements for oscillating the vibrator XTAL. For example, a configuration may be employed in which a part of the circuit element is constituted by a discrete component provided outside the circuit device 500 and connected to the oscillator circuit 150 via an external connection terminal.

9.变形例9. Modification

接着,说明本实施方式的各种变形例。图24示出本实施方式的变形例的电路装置的结构例。Next, various modified examples of the present embodiment will be described. FIG. 24 shows a configuration example of a circuit device according to a modified example of the present embodiment.

在图24中,与图2、图9不同,在振荡信号生成电路140中未设置D/A转换部80。并且,由振荡信号生成电路140生成的振荡信号OSCK的振荡频率根据来自处理部50的频率控制数据DFCQ而被直接控制。即,不经由D/A转换部地控制振荡信号OSCK的振荡频率。In FIG. 24 , unlike FIGS. 2 and 9 , the D/A converter 80 is not provided in the oscillation signal generation circuit 140 . Furthermore, the oscillation frequency of the oscillation signal OSCK generated by the oscillation signal generation circuit 140 is directly controlled according to the frequency control data DFCQ from the processing unit 50 . That is, the oscillation frequency of the oscillation signal OSCK is controlled without going through the D/A conversion unit.

例如在图24中,振荡信号生成电路140具有可变电容电路142和振荡电路150。在该振荡信号生成电路140中未设置图2、图9的D/A转换部80。并且,取代图23的可变电容式电容器CX1而设置该可变电容电路142,可变电容电路142的一端与振子XTAL的一端连接。For example, in FIG. 24 , an oscillation signal generation circuit 140 has a variable capacitance circuit 142 and an oscillation circuit 150 . The D/A converter 80 shown in FIGS. 2 and 9 is not provided in this oscillation signal generation circuit 140 . In addition, this variable capacitance circuit 142 is provided instead of the variable capacitance capacitor CX1 of FIG. 23 , and one end of the variable capacitance circuit 142 is connected to one end of the vibrator XTAL.

该可变电容电路142的电容值根据来自处理部50的频率控制数据DFCQ而被控制。例如,可变电容电路142具有多个电容器(电容器阵列)、根据频率控制数据DFCQ控制各开关元件的接通及断开的多个开关元件(开关阵列)。这多个开关元件的各开关元件与多个电容器的各电容器电连接。并且,通过接通或断开这多个开关元件,多个电容器中的、一端与振子XTAL的一端连接的电容器的个数发生变化。由此,可变电容电路142的电容值被控制,振子XTAL的一端的电容值发生变化。因此,可利用频率控制数据DFCQ直接控制可变电容电路142的电容值,控制振荡信号OSCK的振荡频率。The capacitance value of the variable capacitance circuit 142 is controlled based on the frequency control data DFCQ from the processing unit 50 . For example, the variable capacitance circuit 142 has a plurality of capacitors (capacitor array), and a plurality of switching elements (switch array) for controlling on and off of each switching element based on frequency control data DFCQ. Each of the plurality of switching elements is electrically connected to each of the plurality of capacitors. And, by turning on or off the plurality of switching elements, the number of capacitors whose one end is connected to one end of the vibrator XTAL among the plurality of capacitors changes. As a result, the capacitance value of the variable capacitance circuit 142 is controlled, and the capacitance value at one end of the vibrator XTAL changes. Therefore, the capacitance value of the variable capacitance circuit 142 can be directly controlled by using the frequency control data DFCQ, and the oscillation frequency of the oscillation signal OSCK can be controlled.

此外,在使用本实施方式的电路装置构成PLL电路的情况下,也能够成为直接数字合成器方式的PLL电路。图25示出直接数字合成器方式的情况下的电路结构例。In addition, when a PLL circuit is configured using the circuit device of this embodiment, it can also be a PLL circuit of a direct digital synthesizer system. FIG. 25 shows an example of a circuit configuration in the case of a direct digital synthesizer method.

相位比较部380(比较运算部)进行基准信号RFCK与振荡信号OSCK(基于振荡信号的输入信号)的相位比较(比较运算)。数字滤波部382进行相位误差的平滑化处理。相位比较部380的结构、动作与图9的相位比较部41相同,能够包含计数器和TDC(时间数字转换器)。数字滤波部382相当于图9的数字滤波部44。数值控制型振荡器384是使用来自具有振子XTAL的基准振荡器386的基准振荡信号,对任意的频率和波形进行数字合成的电路。即,不是像VCO那样根据来自D/A转换器的控制电压来控制振荡频率,而是使用数字的频率控制数据和基准振荡器386(振子XTAL),通过数字运算处理生成任意的振荡频率的振荡信号OSCK。通过图25的结构,能够实现直接数字合成器方式的ADPLL电路。The phase comparison unit 380 (comparison operation unit) performs phase comparison (comparison operation) of the reference signal RFCK and the oscillation signal OSCK (input signal based on the oscillation signal). The digital filter unit 382 performs smoothing processing of the phase error. The configuration and operation of the phase comparison unit 380 are the same as those of the phase comparison unit 41 in FIG. 9 , and can include a counter and a TDC (time-to-digital converter). The digital filter unit 382 corresponds to the digital filter unit 44 in FIG. 9 . The numerically controlled oscillator 384 is a circuit for digitally synthesizing an arbitrary frequency and waveform using a reference oscillation signal from a reference oscillator 386 having a vibrator XTAL. That is, instead of controlling the oscillation frequency according to the control voltage from the D/A converter like VCO, digital frequency control data and the reference oscillator 386 (oscillator XTAL) are used to generate an oscillation of an arbitrary oscillation frequency through digital operation processing. Signal OSCK. With the configuration of FIG. 25, an ADPLL circuit of a direct digital synthesizer method can be realized.

此外,在以上说明的本实施方式的方法中,对通过从频率控制数据的变动成分中去除环境变动成分而得的老化变动成分进行卡尔曼滤波处理,估计出去除偏差后的真值。而且,进一步算出用于老化校正的校正值(振荡特性变动系数),使用真值和校正值进行老化校正,由此,实现了使振荡频率为恒定的控制。但是,本实施方式的方法不限于这样的方法,能够实施各种变形。In addition, in the method of the present embodiment described above, Kalman filter processing is performed on the aging fluctuation component obtained by removing the environmental fluctuation component from the fluctuation component of the frequency control data, and the true value after removing the bias is estimated. Further, by calculating a correction value (oscillation characteristic variation coefficient) for burn-in correction, and performing burn-in correction using the true value and the corrected value, control to keep the oscillation frequency constant is realized. However, the method of this embodiment is not limited to such a method, and various modifications are possible.

在例如本实施方式的第1变形例的方法中,将从计测值中去除环境变动成分后的老化变动成分的值保存到存储部(存储器)中。而且,可以根据所存储的多个老化变动成分的值、和预先准备的1次线性式或多次多项式的近似式,控制振荡频率。For example, in the method of the first modified example of this embodiment, the value of the aging fluctuation component obtained by removing the environmental fluctuation component from the measured value is stored in the storage unit (memory). Furthermore, the oscillation frequency can be controlled based on the stored values of a plurality of aging fluctuation components and an approximate expression of a first-order linear expression or a multi-degree polynomial prepared in advance.

此外,在本实施方式的第2变形的方法中,例如可以是,在从计测值中去除环境变动成分后的老化变动成分的值为给定的值以上的情况下,通过切换到作为预备而设置的另一个振荡器,将老化的影响抑制在某个恒定范围内。In addition, in the method of the second modification of this embodiment, for example, when the value of the aging fluctuation component obtained by removing the environmental fluctuation component from the measured value is greater than or equal to a predetermined value, switching to Another oscillator is set to suppress the aging effect within a constant range.

此外,本实施方式的电路装置不仅作为构成PLL电路的环路的电路装置,也能够作为自激的振荡器用的电路装置使用。In addition, the circuit device of this embodiment can be used not only as a circuit device constituting a loop of a PLL circuit but also as a circuit device for a self-excited oscillator.

10.振荡器、电子设备、移动体10. Oscillators, electronic equipment, moving objects

图26示出包含本实施方式的电路装置500的振荡器400的结构例。如图26所示,振荡器400包含振子420和电路装置500。振子420和电路装置500安装于振荡器400的封装410内。并且,振子420的端子和电路装置500(IC)的端子(焊盘)利用封装410的内部布线而电连接。FIG. 26 shows a configuration example of an oscillator 400 including the circuit device 500 of this embodiment. As shown in FIG. 26 , the oscillator 400 includes a vibrator 420 and a circuit device 500 . The vibrator 420 and the circuit device 500 are installed in the package 410 of the oscillator 400 . Furthermore, the terminals of the vibrator 420 and the terminals (pads) of the circuit device 500 (IC) are electrically connected by internal wiring of the package 410 .

图27示出包含本实施方式的电路装置500的电子设备的结构例。该电子设备包含本实施方式的电路装置500、石英振子等振子420、天线ANT、通信部510和处理部520。另外,还可以包含操作部530、显示部540和存储部550。由振子420和电路装置500构成振荡器400。此外,电子设备不限于图27的结构,可以实施省略其中一部分的结构要素、或追加其他结构要素等各种变形。FIG. 27 shows a configuration example of electronic equipment including the circuit device 500 of this embodiment. This electronic device includes the circuit device 500 of this embodiment, a vibrator 420 such as a quartz resonator, an antenna ANT, a communication unit 510 , and a processing unit 520 . In addition, an operation unit 530 , a display unit 540 , and a storage unit 550 may be further included. The oscillator 400 is constituted by the vibrator 420 and the circuit arrangement 500 . In addition, the electronic device is not limited to the configuration of FIG. 27 , and various modifications such as omitting some of the constituent elements or adding other constituent elements can be implemented.

作为图27的电子设备,例如能够假设基站或者路由器等网络相关设备、高精度的测量设备、GPS内置时钟、活体信息测量设备(脉搏计、步数计等)或者头部佩戴式显示装置等可佩戴设备、智能手机、移动电话、便携式游戏装置、笔记本PC或者平板PC等便携信息终端(移动终端)、发布内容的内容提供终端、数字照相机或者摄像机等影像设备等各种设备。As the electronic equipment shown in FIG. 27 , for example, network-related equipment such as base stations or routers, high-precision measurement equipment, GPS built-in clocks, vital information measurement equipment (pulse meter, pedometer, etc.), or head-mounted display devices, etc. can be assumed Various devices such as wearable devices, smartphones, mobile phones, portable game devices, portable information terminals (mobile terminals) such as notebook PCs and tablet PCs, content providing terminals for distributing content, and video equipment such as digital cameras and video cameras.

通信部510(无线电路)进行经由天线ANT而从外部接收数据、或向外部发送数据的处理。处理部520进行电子设备的控制处理、以及对经由通信部510而收发的数据的各种数字处理等。该处理部520的功能例如可通过微型计算机等处理器而实现。The communication unit 510 (wireless circuit) performs processing of receiving data from the outside or transmitting data to the outside via the antenna ANT. The processing unit 520 performs control processing of electronic devices, various digital processing of data transmitted and received via the communication unit 510 , and the like. The function of the processing unit 520 can be realized by a processor such as a microcomputer, for example.

操作部530用于供用户进行输入操作,可通过操作按钮、触摸面板显示器等来实现。显示部540用于显示各种信息,可通过液晶、有机EL等的显示器来实现。另外,在使用触摸面板显示器来作为操作部530的情况下,该触摸面板显示器兼具操作部530以及显示部540的功能。存储部550用于存储数据,其功能可通过RAM、ROM等半导体存储器或HDD(硬盘驱动器)等实现。The operation unit 530 is used for the user to perform an input operation, and can be realized by operating buttons, a touch panel display, and the like. The display unit 540 is used to display various information, and can be realized by a display such as liquid crystal or organic EL. In addition, when a touch-panel display is used as operation unit 530 , the touch-panel display functions as both operation unit 530 and display unit 540 . The storage unit 550 is used to store data, and its function can be realized by a semiconductor memory such as RAM and ROM, or an HDD (Hard Disk Drive).

图28示出包含本实施方式的电路装置的移动体的例子。本实施方式的电路装置(振荡器)例如可以组装到车辆、飞机、摩托车、自行车或者船舶等各种移动体中。移动体例如是具有发动机或马达等驱动机构、方向盘或舵等转向机构以及各种电子设备(车载设备),且在陆地上、空中或海上移动的设备或装置。图28概要性示出作为移动体的具体例的汽车206。汽车206中组装了具有本实施方式的电路装置和振子的振荡器(未图示)。控制装置208根据由该振荡器生成的时钟信号而进行动作。控制装置208按照例如车体207的姿态对悬架的软硬度进行控制,或者对各个车轮209的制动进行控制。例如可以利用控制装置208实现汽车206的自动运转。此外,组装有本实施方式的电路装置或振荡器的设备不限于这种控制装置208,也可以组装在汽车206等移动体所设置的各种设备(车载设备)中。FIG. 28 shows an example of a mobile object including the circuit device of this embodiment. The circuit device (oscillator) of this embodiment can be incorporated into various mobile bodies such as vehicles, airplanes, motorcycles, bicycles, and ships, for example. A mobile body is, for example, a device or device that has a driving mechanism such as an engine or a motor, a steering mechanism such as a steering wheel or a rudder, and various electronic devices (vehicle devices), and moves on land, in the air, or at sea. FIG. 28 schematically shows a car 206 as a specific example of a mobile object. An oscillator (not shown) including a circuit device and a vibrator according to the present embodiment is incorporated in the automobile 206 . The control device 208 operates based on the clock signal generated by this oscillator. The control device 208 controls the stiffness of the suspension or controls the braking of the individual wheels 209 according to, for example, the attitude of the vehicle body 207 . For example, the automatic operation of vehicle 206 can be realized by means of control device 208 . In addition, the device incorporating the circuit device or the oscillator according to the present embodiment is not limited to such a control device 208 , and may be incorporated in various devices (vehicle devices) installed in mobile bodies such as automobile 206 .

图29是振荡器400的详细结构例。图29的振荡器400是双恒温槽结构(广义上说是恒温槽结构)的振荡器。FIG. 29 is a detailed configuration example of the oscillator 400 . The oscillator 400 in FIG. 29 is an oscillator with a double constant temperature bath structure (in a broad sense, a constant temperature bath structure).

封装410由基板411和壳体412构成。在基板411上搭载有未图示的各种电子部件。在壳体412的内部设有第2容器414,在第2容器414的内部设有第1容器413。并且,在第1容器413的上表面的内侧面(下侧面)安装有振子420。此外,在第1容器413的上表面的外侧面(上侧面)安装有本实施方式的电路装置500、加热器450和温度传感器460。能够通过加热器450(发热元件),调整例如第2容器414的内部的温度。并且,能够通过温度传感器460,检测例如第2容器414的内部的温度。The package 410 is composed of a substrate 411 and a case 412 . Various electronic components not shown are mounted on the substrate 411 . The second container 414 is provided inside the casing 412 , and the first container 413 is provided inside the second container 414 . Furthermore, a vibrator 420 is attached to the inner surface (lower surface) of the upper surface of the first container 413 . In addition, the circuit device 500 of this embodiment, the heater 450 and the temperature sensor 460 are mounted on the outer surface (upper surface) of the upper surface of the first container 413 . For example, the temperature inside the second container 414 can be adjusted by the heater 450 (heating element). Furthermore, for example, the temperature inside the second container 414 can be detected by the temperature sensor 460 .

第2容器414设置在基板416上。基板416是能够搭载各种电子部件的电路基板。在基板416中的、设置有第2容器414的面的反面安装有加热器452和温度传感器462。能够通过例如加热器452(发热元件),调整壳体412和第2容器414之间的空间的温度。并且,能够通过温度传感器462,检测壳体412和第2容器414之间的空间的温度。The second container 414 is provided on the substrate 416 . The substrate 416 is a circuit substrate on which various electronic components can be mounted. A heater 452 and a temperature sensor 462 are mounted on the surface of the substrate 416 opposite to the surface on which the second container 414 is provided. The temperature of the space between the casing 412 and the second container 414 can be adjusted by, for example, the heater 452 (heating element). Furthermore, the temperature of the space between the casing 412 and the second container 414 can be detected by the temperature sensor 462 .

作为加热器450、452的发热元件,例如,能够使用发热功率双极晶体管、发热式加热器MOS晶体管、发热电阻体、珀尔帖元件等。这些加热器450、452的发热的控制例如能够通过电路装置500的恒温槽控制电路来实现。作为温度传感器460、462,例如能够使用热敏电阻、二极管等。As heating elements of the heaters 450 and 452 , for example, heating power bipolar transistors, heating heater MOS transistors, heating resistors, Peltier elements, and the like can be used. Control of heat generation by these heaters 450 and 452 can be realized by, for example, a thermostat control circuit of the circuit device 500 . As the temperature sensors 460 and 462, for example, a thermistor, a diode, or the like can be used.

在图29中,由于能够通过双恒温槽结构的恒温槽实现振子420等的温度调整,因此,实现了振子420的振荡频率的稳定化等。In FIG. 29 , since the temperature adjustment of the vibrator 420 and the like can be realized by the constant temperature bath of the double constant temperature bath structure, the stabilization of the oscillation frequency of the vibrator 420 and the like are achieved.

图30是作为电子设备之一的基站(基站装置)的结构例。物理层电路600进行经由网络的通信处理中的物理层的处理。网络处理器602进行比物理层靠上位层的处理(链路层等)。开关部604进行通信处理的各种切换处理。DSP 606进行通信处理所需的各种数字信号处理。RF电路608包含:由低噪声放大器(LNA)构成的接收电路;由功率放大器构成的发送电路;D/A转换器以及A/D转换器等。FIG. 30 shows a configuration example of a base station (base station device) as one of electronic devices. The physical layer circuit 600 performs physical layer processing in communication processing via a network. The network processor 602 performs processing of layers higher than the physical layer (link layer, etc.). The switch unit 604 performs various switching processes of communication processing. The DSP 606 performs various digital signal processing necessary for communication processing. The RF circuit 608 includes: a receiving circuit constituted by a low noise amplifier (LNA); a transmitting circuit constituted by a power amplifier; a D/A converter, an A/D converter, and the like.

选择器612将来自GPS 610的基准信号RFCK1、来自物理层电路600的基准信号RFCK2(来自网络的时钟信号)中的任意一个作为基准信号RFCK而输出到本实施方式的电路装置500。电路装置500进行使振荡信号(基于振荡信号的输入信号)与基准信号RFCK同步的处理。而且生成频率不同的各种时钟信号CK1、CK2、CK3、CK4、CK5,并供给到物理层电路600、网络处理器602、开关部604、DSP 606、RF电路608。The selector 612 outputs any one of the reference signal RFCK1 from the GPS 610 and the reference signal RFCK2 (clock signal from the network) from the physical layer circuit 600 to the circuit device 500 of this embodiment as the reference signal RFCK. The circuit device 500 performs a process of synchronizing the oscillation signal (an input signal based on the oscillation signal) with the reference signal RFCK. Furthermore, various clock signals CK1 , CK2 , CK3 , CK4 , and CK5 with different frequencies are generated and supplied to the physical layer circuit 600 , the network processor 602 , the switching unit 604 , the DSP 606 , and the RF circuit 608 .

根据本实施方式的电路装置500,在图30所示的基站中,能够使振荡信号与基准信号RFCK同步,将根据该振荡信号而生成的频率稳定度高的时钟信号CK1~CK5供给到基站的各电路。According to the circuit device 500 of this embodiment, in the base station shown in FIG. 30 , the oscillation signal can be synchronized with the reference signal RFCK, and the clock signals CK1 to CK5 with high frequency stability generated based on the oscillation signal can be supplied to the base station of the base station. each circuit.

另外,如上述那样对本实施方式进行了详细说明,而对本领域技术人员而言,应能容易理解未实际脱离本发明的新事项和效果的多种变形。因此,这样的变形例全部包含在本发明的范围内。例如,在说明书或者附图中,至少一次与更加广义或者同义的不同用语(环境变动成分等)一同描述的用语(温度变动成分等)在说明书或者附图的任意部分都可以置换为该不同用语。另外,本实施方式和变形例的所有组合也包含于本发明的范围内。此外,电路装置、振荡器、电子设备、移动体的结构或动作、老化校正处理、卡尔曼滤波处理、保持模式处理、温度补偿处理等也不限于本实施方式中说明的内容,可实施各种变形。In addition, although this embodiment was described in detail as mentioned above, it should be easy for those skilled in the art to understand various modifications which do not actually deviate from the novel matter and effect of this invention. Therefore, all such modified examples are included in the scope of the present invention. For example, in the specification or drawings, at least once a term (temperature variation component, etc.) described together with a different term (environmental variation component, etc.) in a broader or synonymous sense can be replaced by the different term in any part of the specification or drawings. term. In addition, all combinations of the present embodiment and modifications are also included in the scope of the present invention. In addition, the circuit device, oscillator, electronic equipment, structure or operation of the mobile body, burn-in correction processing, Kalman filter processing, hold mode processing, temperature compensation processing, etc. are not limited to those described in this embodiment, and various out of shape.

Claims (14)

1.一种电路装置,其中,该电路装置包含:1. A circuit arrangement, wherein the circuit arrangement comprises: 处理部,其对输入的频率控制数据进行信号处理,输出频率控制数据;以及a processing unit, which performs signal processing on the input frequency control data, and outputs the frequency control data; and 振荡信号生成电路,其使用振子,生成通过所述频率控制数据设定的振荡频率的振荡信号,an oscillating signal generating circuit that generates an oscillating signal at an oscillating frequency set by the frequency control data using a vibrator, 所述处理部在卡尔曼滤波处理的先验估计值的更新处理中,进行通过时间步k-1的后验估计值x^(k-1)与校正值D(k-1)的相加来求出时间步k的先验估计值x^-(k)的处理,并根据所述卡尔曼滤波处理的结果,进行所述频率控制数据的老化校正。The processing unit performs an addition of a posterior estimated value x^(k-1) and a correction value D(k-1) at time step k-1 in update processing of the prior estimated value in the Kalman filtering process. The process of obtaining the prior estimation value x ̂- (k) of time step k, and performing the aging correction of the frequency control data according to the result of the Kalman filtering process. 2.根据权利要求1所述的电路装置,其中,2. The circuit arrangement according to claim 1, wherein, 所述处理部根据所述卡尔曼滤波处理中的观测残差,求出所述校正值D(k-1)。The processing unit obtains the correction value D(k-1) from the observation residual in the Kalman filtering process. 3.根据权利要求1所述的电路装置,其中,3. The circuit arrangement according to claim 1 , wherein, 所述处理部进行所述时间步k-1的所述后验估计值x^(k-1)与所述校正值D(k-1)的相加,通过x^-(k)=x^(k-1)+D(k-1),求出所述时间步k的所述先验估计值x^-(k)。The processing section adds the posterior estimated value x^(k-1) of the time step k-1 to the correction value D(k-1), by x ^- (k)=x ^(k-1)+D(k-1), to obtain the prior estimate x ^- (k) of the time step k. 4.根据权利要求3所述的电路装置,其中,4. The circuit arrangement according to claim 3, wherein, 所述处理部根据所述时间步k-1的所述校正值D(k-1)和所述卡尔曼滤波处理中的观测残差ek,求出所述时间步k的校正值D(k)。The processing unit calculates the correction value D(k-1) at the time step k based on the correction value D(k-1) at the time step k-1 and the observation residual ek in the Kalman filtering process. ). 5.根据权利要求4所述的电路装置,其中,5. The circuit arrangement according to claim 4, wherein, 在设常数为E的情况下,所述处理部通过D(k)=D(k-1)+E·ek求出所述校正值D(k)。When the constant is E, the processing unit obtains the correction value D(k) by D(k)=D(k-1)+E·ek. 6.根据权利要求5所述的电路装置,其中,6. The circuit arrangement according to claim 5, wherein, 该电路装置还包含存储所述常数E的存储部。The circuit device further includes a storage unit storing the constant E. 7.根据权利要求1所述的电路装置,其中,7. The circuit arrangement according to claim 1, wherein, 所述处理部对基于输入信号和基准信号的相位比较结果的所述输入的频率控制数据进行所述信号处理,其中,所述输入信号基于所述振荡信号,The processing section performs the signal processing on the input frequency control data based on a phase comparison result of an input signal and a reference signal, wherein the input signal is based on the oscillation signal, 在检测到由所述基准信号的消失或者异常引起的保持模式之前的期间,进行如下处理:通过所述卡尔曼滤波处理,估计针对所述输入的频率控制数据的观测值的真值,During a period until the hold mode caused by the disappearance or abnormality of the reference signal is detected, processing is performed to estimate a true value of an observed value of the input frequency control data by the Kalman filter processing, 在检测到所述保持模式的情况下,保存与检测到所述保持模式的时刻对应的时刻的所述真值,进行基于所述真值的运算处理,由此,生成老化校正后的所述频率控制数据。When the hold mode is detected, the true value at the time corresponding to the time at which the hold mode is detected is stored, and arithmetic processing based on the true value is performed, thereby generating the burn-in-corrected Frequency control data. 8.根据权利要求7所述的电路装置,其中,8. The circuit arrangement according to claim 7, wherein, 所述处理部通过进行对所述真值加上所述校正值的所述运算处理,生成所述老化校正后的频率控制数据。The processing unit generates the aging-corrected frequency control data by performing the arithmetic processing of adding the corrected value to the true value. 9.根据权利要求8所述的电路装置,其中,9. The circuit arrangement according to claim 8, wherein, 所述处理部进行对所述真值加上滤波处理后的所述校正值的所述运算处理。The processing unit performs the arithmetic processing of adding the filtered correction value to the true value. 10.根据权利要求1所述的电路装置,其中,10. The circuit arrangement according to claim 1, wherein, 该电路装置还包含存储部,该存储部存储所述卡尔曼滤波处理的系统噪声的设定用的系统噪声常数、和所述卡尔曼滤波处理的观测噪声的设定用的观测噪声常数。The circuit device further includes a storage unit storing a system noise constant for setting the system noise of the Kalman filtering process and an observed noise constant for setting the observed noise of the Kalman filtering process. 11.根据权利要求1所述的电路装置,其中,11. The circuit arrangement of claim 1 , wherein, 该电路装置还包含用于监测所述先验估计值和观测值的数字接口部。The circuit arrangement also includes a digital interface for monitoring said a priori estimates and observations. 12.一种振荡器,其中,该振荡器包含:12. An oscillator, wherein the oscillator comprises: 权利要求1所述的电路装置;以及A circuit arrangement as claimed in claim 1 ; and 所述振子。the vibrator. 13.一种电子设备,其中,该电子设备包含权利要求1所述的电路装置。13. An electronic device, wherein the electronic device comprises the circuit device according to claim 1. 14.一种移动体,其中,该移动体包含权利要求1所述的电路装置。14. A moving body comprising the circuit device according to claim 1.
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