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CN107037275B - A kind of device measuring single charged particle charge-mass ratio - Google Patents

A kind of device measuring single charged particle charge-mass ratio Download PDF

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CN107037275B
CN107037275B CN201610943343.0A CN201610943343A CN107037275B CN 107037275 B CN107037275 B CN 107037275B CN 201610943343 A CN201610943343 A CN 201610943343A CN 107037275 B CN107037275 B CN 107037275B
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charged particle
electric field
mass ratio
uniform electric
charge
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CN107037275A (en
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富庆飞
杨立军
谢络
覃粒子
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Beihang University
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    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/24Arrangements for measuring quantities of charge

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Abstract

本发明提供一种测量单个带电颗粒荷质比的装置,能够测量单个带电颗粒的荷质比,结构简单,易于操作,相比于现有技术测量对象都是荷电群滴的测量荷质比的装置,能够得到更加准确的测量结果。包括匀强电场产生装置以及光栅测距系统,匀强电场产生装置用于使带电颗粒在匀强电场产生装置产生的匀强电场中做匀加速运动,光栅测距系统用于获得带电颗粒在匀强电场运动的轨迹,基于匀加速运动的轨迹与所受外力的对应关系,确定带电颗粒的荷质比。

The invention provides a device for measuring the charge-to-mass ratio of a single charged particle, which can measure the charge-to-mass ratio of a single charged particle, has a simple structure and is easy to operate. The device can get more accurate measurement results. It includes a uniform electric field generating device and a grating ranging system. The uniform electric field generating device is used to make the charged particles move uniformly in the uniform electric field generated by the uniform electric field generating device. The grating ranging system is used to obtain the charged particles in the uniform electric field. Based on the trajectory of the strong electric field motion, the charge-to-mass ratio of the charged particles is determined based on the corresponding relationship between the trajectory of the uniformly accelerated motion and the external force.

Description

一种测量单个带电颗粒荷质比的装置A device for measuring the charge-to-mass ratio of a single charged particle

技术领域technical field

本发明涉及荷质比测量技术领域,特别是一种测量单个带电颗粒荷质比的装置。The invention relates to the technical field of charge-to-mass ratio measurement, in particular to a device for measuring the charge-to-mass ratio of a single charged particle.

背景技术Background technique

带电水雾在航空、航天、舰船等重要场所的防火中有重要的应用前景,其中的本质就是荷电液滴与火焰的相互复杂作用,研究单个荷电液滴与火焰的相互作用,对于认识荷电细水雾灭火机理,提高带电细水雾灭火效果,促进带电细水雾灭火技术的实用化具有重要意义。而荷质比是衡量荷电液滴的重要指标,因此单个荷电液滴的荷质比的准确测量是一个关键问题。Charged water mist has important application prospects in the fire prevention of important places such as aviation, aerospace, ships, etc. The essence of which is the complex interaction between charged droplets and flames. Studying the interaction between a single charged droplet and flames is important for It is of great significance to understand the fire extinguishing mechanism of charged water mist, improve the fire extinguishing effect of charged water mist, and promote the practical application of charged water mist fire extinguishing technology. The charge-to-mass ratio is an important index to measure the charged droplets, so the accurate measurement of the charge-to-mass ratio of a single charged droplet is a key issue.

国内外研究人员就荷质比的测量装置有过不少的研究,根据原理,大致可以分为两种:一种是法拉第筒法,利用静电感应原理测量雾滴荷电量,同时利用天平测量雾滴质量,从而获得雾滴荷质比,比如申请号为201310359398.3,名称为“一种易拆装荷电雾滴荷质比实时测量装置”就是基于法拉第筒法;另外一种是网状目标法,利用测量微电流以及收集沉积雾滴测出流量的原理来研究荷质比,比如申请号为201420831496.2,名称为“一种静电喷头雾滴荷质比检测装置”。但是基于上述原理得到的荷质比测量装置,测量对象都是荷电群滴,对于带个荷电液滴,尤其是荷电量较小的液滴,上述方法难以得到准确的测量结果。Researchers at home and abroad have done a lot of research on the measurement device of the charge-to-mass ratio. According to the principle, it can be roughly divided into two types: one is the Faraday cylinder method, which uses the principle of electrostatic induction to measure the charge of the droplet, and uses a balance to measure the charge of the droplet. mass, so as to obtain the charge-to-mass ratio of droplets. For example, the application number is 201310359398.3, and the name is "a real-time measurement device for the charge-to-mass ratio of charged droplets that is easy to disassemble." It is based on the Faraday cage method; the other is the mesh target method. The charge-to-mass ratio is studied by using the principle of measuring the micro-current and collecting the deposited droplets to measure the flow rate. For example, the application number is 201420831496.2, and the name is "a detection device for the charge-to-mass ratio of electrostatic nozzle droplets". However, the charge-to-mass ratio measuring device obtained based on the above-mentioned principle is all charged droplets. For a charged droplet, especially a droplet with a small charge, it is difficult to obtain accurate measurement results by the above-mentioned method.

发明内容Contents of the invention

本发明的目的就是提供一种测量单个带电颗粒荷质比的装置,针对单个带电颗粒,提出一种能够测量单个微小带电颗粒荷质比的测量装置。The object of the present invention is to provide a device for measuring the charge-to-mass ratio of a single charged particle, and propose a measuring device capable of measuring the charge-to-mass ratio of a single tiny charged particle for a single charged particle.

本发明的技术方案是:Technical scheme of the present invention is:

1.一种测量单个带电颗粒荷质比的装置,其特征在于,包括匀强电场产生装置以及光栅测距系统,所述匀强电场产生装置用于使带电颗粒在匀强电场产生装置产生的匀强电场中做匀加速运动,所述光栅测距系统用于获得带电颗粒在匀强电场运动的轨迹;所述光栅测距系统产生具有一定间距的光轴阵列,当带电颗粒在匀强电场中运动时,将带电颗粒通过第1根光轴的时刻记为0,测得带电颗粒通过第i+1根光轴的时刻ti(i=1,2,3...)以及带电颗粒通过第j+1根光轴的时刻tj(j=1,2,3...)1. A device for measuring the charge-to-mass ratio of a single charged particle is characterized in that it comprises a uniform electric field generating device and a grating distance measuring system, and the uniform electric field generating device is used to make the charged particle generate in a uniform electric field generating device Performing uniform acceleration motion in a uniform electric field, the grating ranging system is used to obtain the trajectory of the charged particles moving in the uniform electric field; the grating ranging system produces an array of optical axes with a certain distance, when the charged particles When moving in middle, the moment when the charged particle passes the first optical axis is recorded as 0, and the time t i (i=1,2,3...) and the moment when the charged particle passes the i+1th optical axis are measured and Time t j (j=1,2,3...) when passing the j+1th optical axis

由公式:By the formula:

即可得出单个带电颗粒的荷质比:其中,q为单个带电颗粒的电量,m为单个带电颗粒的质量,E为匀强电场的电场强度,d0为相邻两根光轴之间的距离。The charge-to-mass ratio of a single charged particle can be obtained: where, q is the charge of a single charged particle, m is the mass of a single charged particle, E is the electric field intensity of a uniform electric field, and d 0 is the distance between two adjacent optical axes the distance.

2.所述匀强电场产生装置包括直流高压发生器、静电电压表、两个相互平行的平板电极;所述直流高压发生器的输出端通过导线与一个平板电极相连接,另一个平板电极接地,从而产生匀强电场;所述静电电压表与高压发生器并联。2. The uniform electric field generating device comprises a direct-current high-voltage generator, an electrostatic voltmeter, and two flat-plate electrodes parallel to each other; the output end of the direct-current high-voltage generator is connected with one flat-plate electrode by a wire, and the other flat-plate electrode is grounded , thereby generating a uniform electric field; the electrostatic voltmeter is connected in parallel with the high voltage generator.

3.所述两个相互平行的平板电极产生的匀强电场方向与重力方向相垂直,所述带电颗粒自由落体滴入匀强电场。3. The direction of the uniform electric field generated by the two parallel flat electrodes is perpendicular to the direction of gravity, and the charged particles drop freely into the uniform electric field.

4.所述两个相互平行的平板电极为紫铜板,每个紫铜板的外侧面依次镶嵌聚四氟乙烯和绝缘有机玻璃。4. The two parallel flat electrodes are copper plates, and the outer surface of each copper plate is sequentially inlaid with polytetrafluoroethylene and insulating plexiglass.

5.所述两个紫铜板之间的距离D≥5cm。5. The distance D between the two copper plates is ≥ 5cm.

6.所述带电颗粒的直径≤5%D,以保证带电颗粒所带电荷产生的电场对匀强电场的影响可以忽略。6. The diameter of the charged particles is ≤5%D, so as to ensure that the influence of the electric field generated by the charges on the charged particles on the uniform electric field can be ignored.

7.所述光栅测距系统包括发射器、收光器、计算机或控制器、同步计时器,所述发射器和收光器平行放置,所述发射器和收光器之间产生等间距的光轴阵列,所述收光器与计算机相连,计算机/控制器和同步计时器相连。7. The grating ranging system includes a transmitter, a light receiver, a computer or a controller, and a synchronous timer. The transmitter and the light receiver are placed in parallel, and equidistant distances are generated between the transmitter and the light receiver. The optical axis array, the optical receiver is connected with the computer, and the computer/controller is connected with the synchronous timer.

8.所述发射器为激光发射器,产生的等间距的激光光轴阵列垂直于所述匀强电场产生装置产生的匀强电场方向,所述带电颗粒可以通过激光。8. The emitter is a laser emitter, and the laser optical axis array at equal intervals generated is perpendicular to the direction of the uniform electric field generated by the uniform electric field generating device, and the charged particles can pass through the laser.

9.所述光轴阵列的光轴距d0可以根据带电颗粒的直径进行调节,所述光轴距d0与带电颗粒直径的关系是:带电颗粒的直径≤10%d09. The optical axis distance d 0 of the optical axis array can be adjusted according to the diameter of the charged particles, and the relationship between the optical axis distance d 0 and the diameter of the charged particles is: the diameter of the charged particles ≤ 10% d 0 .

10.所述带电颗粒为带电液滴,包括绝缘的电介质液滴或导电的电解质液滴。10. The charged particles are charged droplets, including insulating dielectric droplets or conductive electrolyte droplets.

本发明的技术效果:Technical effect of the present invention:

本发明提出的一种测量单个带电颗粒荷质比的装置,能够测量单个带电颗粒的荷质比,结构简单,易于操作,相比于现有技术测量对象都是荷电群滴的测量荷质比的装置,能够得到更加准确的测量结果。A device for measuring the charge-to-mass ratio of a single charged particle proposed by the present invention can measure the charge-to-mass ratio of a single charged particle, and has a simple structure and is easy to operate. Compared with the device, more accurate measurement results can be obtained.

附图说明Description of drawings

图1为本发明的测量单个带电颗粒荷质比的装置测量原理示意图。Fig. 1 is a schematic diagram of the measurement principle of the device for measuring the charge-to-mass ratio of a single charged particle of the present invention.

图2为本发明的测量单个带电颗粒荷质比的装置实施例结构示意图。Fig. 2 is a schematic structural diagram of an embodiment of a device for measuring the charge-to-mass ratio of a single charged particle of the present invention.

图3为平板电极结构示意图。Fig. 3 is a schematic diagram of the structure of the plate electrode.

附图标记列示如下:1-直流高压发生器,2-静电电压表,3-平板电极,4-发射器,5-收光器,6-计算机,7-同步计时器,33-紫铜板,32-聚四氟乙烯板,31-绝缘有机玻璃板。Reference signs are listed as follows: 1-DC high voltage generator, 2-electrostatic voltmeter, 3-plate electrode, 4-emitter, 5-receiver, 6-computer, 7-synchronous timer, 33-copper plate , 32-polytetrafluoroethylene plate, 31-insulated plexiglass plate.

具体实施方式Detailed ways

以下结合附图对本发明的实施例做具体说明,但不用来限制本发明的范围。Embodiments of the present invention will be specifically described below in conjunction with the accompanying drawings, but they are not used to limit the scope of the present invention.

一种测量单个带电颗粒荷质比的装置,包括匀强电场产生装置以及光栅测距系统,所述匀强电场产生装置用于使带电颗粒在匀强电场产生装置产生的匀强电场中做匀加速运动,所述光栅测距系统用于获得带电颗粒在匀强电场运动的轨迹;所述光栅测距系统产生具有一定间距的光轴阵列,当带电颗粒在匀强电场中运动时,将带电颗粒通过第1根光轴的时刻记为0,测得带电颗粒通过第i+1根光轴的时刻ti(i=1,2,3...)以及带电颗粒通过第j+1根光轴的时刻tj(j=1,2,3...)A device for measuring the charge-to-mass ratio of a single charged particle, comprising a uniform electric field generating device and a grating ranging system, the uniform electric field generating device is used to make the charged particles uniformly move in the uniform electric field generated by the uniform electric field generating device Accelerated movement, the grating ranging system is used to obtain the trajectory of charged particles moving in a uniform electric field; the grating ranging system produces an optical axis array with a certain distance, when the charged particles move in a uniform electric field, the charged particles will The moment when the particle passes through the first optical axis is recorded as 0, and the time t i (i=1,2,3...) when the charged particle passes through the i+1th optical axis and the time when the charged particle passes through the j+1th optical axis are measured. Time t j of optical axis (j=1,2,3...)

由公式:By the formula:

即可得出单个带电颗粒的荷质比:其中,q为单个带电颗粒的电量,m为单个带电颗粒的质量,E为匀强电场的电场强度,d0为相邻两根光轴之间的距离。The charge-to-mass ratio of a single charged particle can be obtained: where, q is the charge of a single charged particle, m is the mass of a single charged particle, E is the electric field intensity of a uniform electric field, and d 0 is the distance between two adjacent optical axes the distance.

如图1所示,为本发明的测量原理示意图。假设所述单个带电颗粒为带电液滴,带电液滴进入由两个平行放置的电极板产生的匀强电场中,在重力和电场力共同作用下,其运动轨迹是一条抛物线;由于重力和电场力互相垂直,则带电液滴的运动可以分解为垂直方向匀加速直线运动(重力作用)和水平方向的均加速直线运动(电场力作用);利用水平方向的运动轨迹就可以求出带电液滴所受的电场力,从而得到荷质比。若两极板间的电压差是U,两极板间的水平间距是D,E0为两极板间形成的匀强电场的强度,光栅测距系统产生的光轴阵列的光轴距为d0,将带电液滴通过第1根光轴的时刻记为0,ti(i=1,2,3...)是带电液滴通过第i+1根光轴的时刻,tj(j=1,2,3...)是带电液滴通过第j+1根光轴的时刻,假设液滴荷电量为q,质量为m,则液滴水平方向的加速度为:As shown in FIG. 1 , it is a schematic diagram of the measurement principle of the present invention. Assuming that the single charged particle is a charged droplet, the charged droplet enters the uniform electric field generated by two parallel electrode plates, and under the joint action of gravity and electric field force, its trajectory is a parabola; due to gravity and electric field If the forces are perpendicular to each other, the motion of the charged droplet can be decomposed into uniformly accelerated linear motion in the vertical direction (gravity action) and uniformly accelerated linear motion in the horizontal direction (action by electric field force); The electric field force received, thereby obtaining the charge-to-mass ratio. If the voltage difference between the two polar plates is U, the horizontal distance between the two polar plates is D, E 0 is the intensity of the uniform electric field formed between the two polar plates, and the optical axis distance of the optical axis array generated by the grating ranging system is d 0 , The moment when the charged droplet passes through the first optical axis is recorded as 0, t i (i=1,2,3...) is the moment when the charged droplet passes through the i+1th optical axis, t j (j= 1,2,3...) is the moment when the charged droplet passes through the j+1th optical axis, assuming that the charge amount of the droplet is q and the mass is m, then the horizontal acceleration of the droplet is:

对于匀强电场,由电场力与加速度的关系得:For a uniform electric field, from the relationship between electric field force and acceleration:

上述两个方程联立则得出该荷电单液滴的荷质比为:Combining the above two equations, the charge-to-mass ratio of the charged single droplet is obtained as:

式中,d0、U、D可以直接准确设置,只需测得带电液滴通过第i+1根光轴的时刻ti(i=1,2,3...)以及带电液滴通过第j+1根光轴的时刻tj(j=1,2,3...)即可。In the formula, d 0 , U, D can be directly and accurately set, only need to measure the time t i (i=1,2,3...) when the charged droplet passes through the i+1th optical axis and the The time t j (j=1, 2, 3 . . . ) of the j+1th optical axis is sufficient.

如图2所示,为本发明的测量单个带电颗粒荷质比的装置实施例结构示意图。As shown in FIG. 2 , it is a schematic structural diagram of an embodiment of a device for measuring the charge-to-mass ratio of a single charged particle of the present invention.

本发明实施例的测量装置主要由匀强电场产生装置、光栅测距系统两部分组成。其中匀强电场产生装置包括:静电电压表2、直流高压发生器1、两个相互平行的平板电极3;直流高压发生器1的输出端通过导线与一个平板电极相连接,另一个平板电极接地,使两个相互平行的平板电极3之间产生匀强电场;静电电压表2的输出端也与高压发生器并联,接地接头接地;导线均采用40kV的高压屏蔽线。光栅测距系统包括:发射器4、收光器5、计算机(或控制器)6、同步计时器7,发射器4和收光器5平行放置,发射器4和收光器5之间产生等间距的光轴阵列,收光器5与计算机6相连,计算机6和同步计时器7相连。本实施例中,平板电极3是由两块平行的紫铜板33组成,如图3所示,为平板电极结构示意图,每个紫铜板外侧面镶嵌聚四氟乙烯板32和绝缘有机玻璃板31;两个紫铜板之间的距离D可以适当调节,本实施例中,设计两个紫铜板之间的距离D≥5cm。在两块紫铜板间施加U的高压静电,形成一个匀强电场。测量时,平板电极产生的匀强电场方向要与重力方向相垂直,带电液滴自由落体滴入匀强电场。所述带电液滴可以是绝缘的电介质(如超纯水),也可以是导电的电解质(如不同浓度的NaCl溶液)。本实施例的发射器4为激光发射器,产生的等间距的激光光轴阵列垂直于匀强电场产生装置产生的匀强电场方向,滴入匀强电场的带电液滴可以通过激光光轴阵列形成的激光光幕。带电液滴遮挡发射器4发出的激光光幕,收光器5接收不到光信号,通过计算机(或控制器)6将这一反应反馈给同步计时器7,从而得到带电液滴通过每根光轴的时间。另外,带电液滴的直径≤5%D,以保证带电颗粒所带电荷产生的电场对匀强电场的影响可以忽略;光轴阵列的光轴距d0可以根据带电颗粒的直径进行调节,本实施例中,光轴距d0与带电颗粒直径的关系是:带电颗粒的直径≤10%d0The measuring device in the embodiment of the present invention is mainly composed of a uniform electric field generating device and a grating ranging system. The uniform electric field generating device includes: electrostatic voltmeter 2, DC high-voltage generator 1, and two parallel plate electrodes 3; the output end of DC high-voltage generator 1 is connected to one plate electrode through a wire, and the other plate electrode is grounded , so that a uniform electric field is generated between two parallel plate electrodes 3; the output terminal of the electrostatic voltmeter 2 is also connected in parallel with the high-voltage generator, and the grounding joint is grounded; the wires are all 40kV high-voltage shielded wires. The grating distance measuring system includes: a transmitter 4, a receiver 5, a computer (or controller) 6, a synchronous timer 7, the transmitter 4 and the receiver 5 are placed in parallel, and the distance between the transmitter 4 and the receiver 5 is generated. Equidistant optical axis array, optical receiver 5 is connected with computer 6, and computer 6 is connected with synchronous timer 7. In this embodiment, the flat electrode 3 is made up of two parallel red copper plates 33, as shown in Figure 3, which is a schematic diagram of the flat electrode structure, and the outer surface of each red copper plate is inlaid with a polytetrafluoroethylene plate 32 and an insulating plexiglass plate 31 The distance D between the two copper plates can be adjusted appropriately. In this embodiment, the distance D between the two copper plates is designed to be greater than or equal to 5cm. A high-voltage static electricity of U is applied between two copper plates to form a uniform electric field. During measurement, the direction of the uniform electric field generated by the plate electrode should be perpendicular to the direction of gravity, and the charged liquid droplet falls freely into the uniform electric field. The charged droplet can be an insulating dielectric (such as ultrapure water), or a conductive electrolyte (such as NaCl solutions of different concentrations). The emitter 4 of this embodiment is a laser emitter, and the laser optical axis array with equal intervals produced is perpendicular to the direction of the uniform electric field generated by the uniform electric field generating device, and the charged liquid droplets dropped into the uniform electric field can pass through the laser optical axis array Formed laser light curtain. The charged drop blocks the laser light curtain emitted by the emitter 4, and the light receiver 5 cannot receive the light signal. The computer (or controller) 6 feeds back this reaction to the synchronous timer 7, so that the charged drop passes through each laser light curtain. The time of the optical axis. In addition, the diameter of the charged droplet is ≤5% D, so as to ensure that the influence of the electric field generated by the charges on the charged particles on the uniform electric field can be ignored; the optical axis distance d 0 of the optical axis array can be adjusted according to the diameter of the charged particles. In an embodiment, the relationship between the optical axis distance d 0 and the diameter of the charged particle is: the diameter of the charged particle≤10%d 0 .

在此指明,以上叙述有助于本领域技术人员理解本发明创造,但并非限制本发明创造的保护范围。任何没有脱离本发明创造实质内容的对以上叙述的等同替换、修饰改进和/或删繁从简而进行的实施,均落入本发明创造的保护范围。It is pointed out here that the above description is helpful for those skilled in the art to understand the present invention, but does not limit the protection scope of the present invention. Any equivalent replacement, modification and improvement and/or simplified implementation of the above descriptions without departing from the essence of the present invention shall fall within the protection scope of the present invention.

Claims (10)

1. a kind of device for measuring single charged particle charge-mass ratio, which is characterized in that including uniform electric field generation device and light Grid range-measurement system, the uniform electric field that the uniform electric field generation device is used to that charged particle to be made to generate in uniform electric field generation device In do uniformly accelerated motion, the grating range-measurement system is for obtaining charged particle in the track that uniform electric field moves;The grating Range-measurement system generates tool optical axis array at regular intervals and leads to charged particle when charged particle moves in uniform electric field It is denoted as 0 at the time of crossing the 1st optical axis, charged particle is measured and passes through t at the time of i+1 root optical axisiAnd charged particle passes through jth T at the time of+1 optical axisj
By formula:
The charge-mass ratio of you can get it single charged particle: where q is the electricity of single charged particle, and m is single charged particle Quality, E are the electric field strength of uniform electric field, d0For the distance between adjacent two optical axises.
2. the device of the single charged particle charge-mass ratio of measurement according to claim 1, which is characterized in that the uniform electric field Generation device includes high voltage direct current generator, electrostatic voltmeter, two plate electrodes being parallel to each other;The high direct voltage occurs The output end of device is connected by conducting wire with a plate electrode, another plate electrode ground connection, to generate uniform electric field;Institute It is in parallel with high pressure generator to state electrostatic voltmeter.
3. the device of the single charged particle charge-mass ratio of measurement according to claim 2, which is characterized in that described two mutual The uniform electric field direction and gravity direction that parallel plate electrode generates are perpendicular, and the charged particle freely falling body instills even strong Electric field.
4. the device of the single charged particle charge-mass ratio of measurement according to claim 3, which is characterized in that described two mutual Parallel plate electrode be copper plate, the outside of each copper plate successively inlaid polytetrafluoroethylsliders and insulation organic glass.
5. the device of the single charged particle charge-mass ratio of measurement according to claim 4, which is characterized in that described two red coppers The distance between plate D >=5cm.
6. the device of the single charged particle charge-mass ratio of measurement according to claim 5, which is characterized in that the charged particle Diameter≤5%D, with guarantee charged particle influence of the electric field to uniform electric field of electrically charged generation can ignore.
7. the device of the single charged particle charge-mass ratio of measurement according to claim 1, which is characterized in that the grating ranging System includes transmitter, light receiving device, computer or controller, synchrotimer, and the transmitter and light receiving device are placed in parallel, institute It states and generates equidistant optical axis array between transmitter and light receiving device, the light receiving device is connected with computer or controller, calculates Machine or controller are connected with synchrotimer.
8. the device of the single charged particle charge-mass ratio of measurement according to claim 7, which is characterized in that the transmitter is Laser emitter, the uniform electric field that the equidistant laser beam axis array of generation is generated perpendicular to the uniform electric field generation device Direction, the charged particle can pass through laser.
9. the device of the single charged particle charge-mass ratio of measurement according to claim 7 or 8, which is characterized in that the optical axis The optical axis of array is away from d0It can be adjusted according to the diameter of charged particle, the optical axis is away from d0With the relationship of charged particle diameter It is: diameter≤10%d of charged particle0
10. the device of the single charged particle charge-mass ratio of measurement according to claim 1, which is characterized in that the electrification Grain is charged drop, the electrolyte drop of dielectric drop or conduction including insulation.
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