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CN107036711B - On-line measurement device and method for multi-wavelength compound light field - Google Patents

On-line measurement device and method for multi-wavelength compound light field Download PDF

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CN107036711B
CN107036711B CN201710167297.4A CN201710167297A CN107036711B CN 107036711 B CN107036711 B CN 107036711B CN 201710167297 A CN201710167297 A CN 201710167297A CN 107036711 B CN107036711 B CN 107036711B
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phase plate
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ccd detector
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CN107036711A (en
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刘诚
董学
潘兴臣
陶华
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Shanghai Institute of Optics and Fine Mechanics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam

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Abstract

一种多波长复合光场在线测量装置和测量方法,该装置包括三台阶随机相位板和CCD探测器并通过连接套筒固定在一起,所述的三台阶随机相位板面和CCD探测器靶面平行,所述的CCD探测器的输出端与计算机的输入端相连,所述的计算机具有相应数据记录采集与处理软件,用来记录光斑与数据处理。本发明通过记录一幅衍射光斑,就能快速实时地得到基频、倍频、三倍频三种不同波长光场的振幅和相位,为高功率激光驱动器的运行提供可靠的相应参数,解决目前无法同时测量复合光场的技术难题。特别适用于高功率激光驱动中脉冲光束的波前测量。本发明具有结构简单、体积小、对环境要求较低、收敛速度快和测量精度高的特点。

An on-line measurement device and method for multi-wavelength composite light field, the device includes a three-step random phase plate and a CCD detector fixed together by a connecting sleeve, the three-step random phase plate surface and the CCD detector target surface In parallel, the output end of the CCD detector is connected to the input end of the computer, and the computer has corresponding data recording acquisition and processing software for recording light spots and data processing. By recording a diffraction spot, the present invention can quickly and real-time obtain the amplitude and phase of light fields with three different wavelengths: fundamental frequency, double frequency, and triple frequency, and provide reliable corresponding parameters for the operation of high-power laser drivers. The technical difficulty of not being able to simultaneously measure the composite light field. Especially suitable for wavefront measurement of pulsed beams in high power laser drives. The invention has the characteristics of simple structure, small volume, low environmental requirements, fast convergence speed and high measurement precision.

Description

多波长复合光场在线测量装置和测量方法On-line measurement device and method for multi-wavelength compound light field

技术领域technical field

本发明涉及高功率激光驱动器,特别是一种多波长复合光场在线测量装置和测量方法。The invention relates to a high-power laser driver, in particular to an on-line measurement device and method for multi-wavelength composite light field.

背景技术Background technique

高功率激光驱动装置系统中,光束质量的好坏直接决定着物理实验的成败,因此对光束质量进行监控测量十分必要。然而由于高功率激光器庞大复杂的系统及成千上万的光学元件,对光束的波前进行测量面临着许多难以操作的困难。相对其它装置,大型高功率激光驱动器的两个较为突出的特点为:一是测量空间有限,体积较大的测量仪器难以使用;二是被测光束为脉冲光束,一般方法难以测量。受限于上述两点,很多用于波前检测的仪器及方法在高功率激光驱动中使用受限,如常见的干涉仪、剪切干涉仪、哈特曼传感器等。In the high-power laser drive system, the quality of the beam directly determines the success or failure of the physical experiment, so it is necessary to monitor and measure the beam quality. However, due to the large and complex system of high-power lasers and thousands of optical components, the measurement of the wavefront of the beam faces many difficult operational difficulties. Compared with other devices, large-scale high-power laser drivers have two prominent features: first, the measurement space is limited, and larger measuring instruments are difficult to use; second, the measured beam is a pulsed beam, which is difficult to measure by general methods. Limited by the above two points, many instruments and methods for wavefront detection are limited in the use of high-power laser drive, such as common interferometers, shearing interferometers, Hartmann sensors, etc.

相干衍射成像(Coherent Diffractive Imaging,简称为CDI)是利用衍射理论和卷积定理,在满足Nyquist抽样定理的条件下,记录一幅或多幅衍射面上的光强信息,然后通过计算机反复迭代来满足不同的限制条件,使计算的波函数逐次逼近真实的分布,最终得到满足精度要求的相位分布的方法。由于其具有结构简单、理论上精度能够达到衍射极限等特点,在X射线、电子束、荧光及可见激光成像等领域得到越来越多的关注和应用,而2010年基于相位调制法的相位恢复算法(Coherent Modulation Imaging,简称为CMI)被提出,该方法只需要一幅衍射光斑依然可以保证较快的收敛速度,结构简单,对环境稳定性要求较低,特别适用于高功率激光驱动器中脉冲光束的波前测量和诊断。Coherent Diffractive Imaging (CDI) uses the diffraction theory and the convolution theorem to record the light intensity information on one or more diffraction planes under the condition of satisfying the Nyquist sampling theorem, and then iterates through the computer repeatedly. Satisfy different constraints, make the calculated wave function approach the real distribution successively, and finally obtain the phase distribution that meets the accuracy requirements. Due to its simple structure and theoretical precision reaching the diffraction limit, it has attracted more and more attention and applications in the fields of X-ray, electron beam, fluorescence, and visible laser imaging. In 2010, the phase recovery method based on phase modulation Algorithm (Coherent Modulation Imaging, referred to as CMI) was proposed. This method only needs one diffraction spot and can still guarantee a fast convergence speed. It has a simple structure and low requirements for environmental stability. Wavefront measurement and diagnostics of beams.

将相干衍射成像理论应用于高功率激光驱动器中进行波前及元件面型的测量已经有相关的专利技术及实际应用,由于相干衍射成像理论需要满足待测光为相干光这一条件,因此之前的应用只是针对单一波长的光场,然而在高功率激光驱动器中最终进入靶室的光场是由基频光、倍频光和三倍频光构成的复合光场,我们需要对这三种光场同时进行测量。为此,我们提出多波长复合光场波前在线测量的装置及方法。The application of coherent diffraction imaging theory to the measurement of wavefront and element surface shape in high-power laser drivers has related patented technologies and practical applications. Since the theory of coherent diffraction imaging needs to meet the condition that the light to be measured is coherent light, so before However, the light field that finally enters the target chamber in the high-power laser driver is a compound light field composed of fundamental frequency light, frequency doubled light and triple frequency light. We need to analyze these three The light field is measured simultaneously. To this end, we propose a device and method for on-line measurement of multi-wavelength composite optical field wavefronts.

发明内容Contents of the invention

本发明提供一种多波长复合光场在线测量装置和测量方法,通过记录一幅衍射光斑,就能快速实时地得到基频、倍频、三倍频三种不同波长光场的振幅和相位,为高功率激光驱动器的运行提供可靠的相应参数,解决目前无法同时测量复合光场的技术难题。特别适用于高功率激光驱动中脉冲光束的波前测量。本发明具有结构简单、体积小、对环境要求较低、收敛速度快和测量精度高的特点。The present invention provides an on-line measurement device and method for multi-wavelength composite light field. By recording a diffraction spot, the amplitude and phase of three different wavelength light fields of fundamental frequency, multiplied frequency and tripled frequency can be obtained quickly and in real time. Provide reliable corresponding parameters for the operation of high-power laser drivers, and solve the current technical problem that the composite light field cannot be measured simultaneously. Especially suitable for wavefront measurement of pulsed beams in high power laser drives. The invention has the characteristics of simple structure, small volume, low environmental requirements, fast convergence speed and high measurement precision.

本发明的技术解决方案Technical solution of the present invention

一种多波长复合光场在线测量装置,其特点在于该装置包括三台阶随机相位板和CCD探测器并通过连接套筒固定在一起,所述的三台阶随机相位板面和CCD探测器靶面平行,所述的三台阶随机相位板面和CCD探测器靶面之间的距离为L,所述的三台阶随机相位板的相位分布为Pm,所述的CCD探测器的输出端与计算机的输入端相连,所述的计算机具有相应数据记录采集与处理软件,用来记录光斑与数据处理。A multi-wavelength composite light field online measurement device is characterized in that the device includes a three-step random phase plate and a CCD detector and is fixed together by a connecting sleeve, and the three-step random phase plate surface and the CCD detector target surface Parallel, the distance between the three-step random phase plate surface and the target surface of the CCD detector is L, the phase distribution of the three-step random phase plate is P m , the output of the CCD detector is connected to the computer The input terminal is connected, and the computer has corresponding data recording acquisition and processing software, which is used for recording light spots and data processing.

所述的三台阶随机相位板对不同的光场均有较强的散射能力及较高的透过率,通过在石英玻璃上面进行深度差异化刻蚀,对每一种波长的光相位延迟量有三个分量,并且随机分布,若对基频光的三种相位延迟量为[a b c],则相应对倍频、三倍频光的相位延迟量分别为[2a 2b 2c]、[3a 3b 3c]。The three-step random phase plate has strong scattering ability and high transmittance for different light fields. By performing depth differential etching on the quartz glass, the optical phase retardation of each wavelength There are three components, and they are randomly distributed. If the three phase delays of the fundamental frequency light are [a b c], then the corresponding phase delays of the frequency multiplier and triple frequency light are [2a 2b 2c], [3a 3b 3c] ].

利用上述在线测量装置对基频、倍频和三倍频多波长复合光场的测量方法,包括下列步骤:Utilize above-mentioned on-line measuring device to the measurement method of multi-wavelength composite light field of fundamental frequency, double frequency and triple frequency, comprise the following steps:

1)根据实际待测光波场的尺寸大小选择相应的缩束器使待记录光斑能被所述的CCD探测器完全接收;1) Select the corresponding beam reducer according to the size of the actual optical wave field to be measured so that the light spot to be recorded can be completely received by the CCD detector;

2)将所述的在线测量装置置于待测光路中并使所述的三台阶随机相位板面与光束垂直,入射光波为球面波且焦平面称为入射面,该入射面位于所述的三台阶随机相位板面之前,确定距离为T,若待测光波为脉冲光,应为所述的CCD探测器添加外部触发信号;2) Place the on-line measurement device in the optical path to be measured and make the three-step random phase plate perpendicular to the light beam, the incident light wave is a spherical wave and the focal plane is called the incident plane, which is located at the Before the three-step random phase plate surface, determine the distance as T. If the light wave to be measured is pulsed light, an external trigger signal should be added to the CCD detector;

3)待测复合光场经三台阶随机相位板散射后被CCD探测器探测一幅衍射光斑送所述的计算机存储,该计算机利用编写的软件进行下列迭代运算,包括以下步骤:3) After the compound light field to be measured is scattered by the three-step random phase plate, a diffraction spot is detected by the CCD detector and sent to the computer for storage. The computer uses the software written to perform the following iterative calculations, including the following steps:

①第一次迭代时,我们初始猜测焦平面处三束光的分布为φ1,m,①In the first iteration, we initially guess that the distribution of the three beams of light at the focal plane is φ 1,m ,

②令n=n+1,进行第n次迭代过程描述如下:②Let n=n+1, the nth iteration process is described as follows:

根据衍射理论将焦平面S1处光场φn,m传播到相位板面得到三台阶随机相位板面上的入射光场分布为ψn,mAccording to the diffraction theory, the light field φ n,m at the focal plane S1 is propagated to the phase plate surface to obtain the incident light field distribution on the three-step random phase plate surface as ψ n,m ;

其中,下标m表示不同波长的光场:m=1代表基频光,m=2代表倍频光,m=3代表三倍频光,下标n表示第n次迭代,例如φ3,1代表第3次迭代过程中基频光的光场复振幅分布;Wherein, the subscript m represents the light field of different wavelengths: m=1 represents the fundamental frequency light, m=2 represents the double frequency light, m=3 represents the triple frequency light, and the subscript n represents the nth iteration, such as φ 3, 1 represents the light field complex amplitude distribution of the fundamental frequency light in the third iteration;

③相位板面后的出射光场为Wn,m=ψn,m*Pm③The outgoing light field behind the phase plate is W n,mn,m *P m ;

④相位板后出射光场传播到CCD靶面得到衍射光斑为 ④ After the phase plate, the outgoing light field propagates to the CCD target surface to obtain the diffraction spot as

其中,表示光场Wn,m传输距离L的过程,表示傅里叶变换,计算第n次迭代的误差Enin, Indicates the process of light field W n,m traveling distance L, Represents the Fourier transform and calculates the error E n of the nth iteration:

其中,I为记录的光斑强度,∑u表示对矩阵的行列求和;Wherein, I is the recorded spot intensity, and ∑u represents the summation of the rows and columns of the matrix;

⑤利用记录的实际光斑I对计算得到的每种光的波前振幅进行修正并保持相位不变,即⑤ Use the recorded actual spot I to correct the calculated wavefront amplitude of each light and keep the phase unchanged, that is

与单波长更新不同,这里我们在振幅更新时,根据每种光在迭代过程中的能量比例乘了相应的系数; Different from single-wavelength update, here we multiply the corresponding coefficient according to the energy ratio of each light in the iterative process when updating the amplitude;

⑥将⑤中更新后的波前逆传播到三台阶随机相位板面,我们用表示沿光的入射方向逆向传播距离L,消除相位板相位调制得到修正后的相位板前照明光ψ′n,m⑥To inversely propagate the updated wavefront in ⑤ to the three-step random phase plate surface, we use Represents the reverse propagation distance L along the incident direction of light, and eliminates the phase plate phase modulation to obtain the corrected phase plate front illumination light ψ′ n,m ;

⑦逆传播到焦平面根据焦平面上焦斑通常集中在中心区域的特点引入焦平面限制,得到修正后的焦平面三束光的波前分布:φn+1,m=SR(n,m)φ′n,m+γ(1-SR(n,m))(φ′n,mn,m)并作为下一次迭代的初始值,其中SR(n,m)为一个直径随迭代次数逐渐变大的孔函数,达到最大值后不再增加,更新权重值γ在[0,1]之间;⑦ Backpropagation to the focal plane According to the feature that the focal spot is usually concentrated in the central area on the focal plane, the focal plane limitation is introduced, and the wavefront distribution of the three beams of light at the focal plane is obtained after correction: φ n+1,m = S R(n,m) φ′ n, m +γ(1-S R(n,m) )(φ′ n,mn,m ) is used as the initial value of the next iteration, where S R(n,m) is a diameter that gradually increases with the number of iterations The enlarged hole function will no longer increase after reaching the maximum value, and the updated weight value γ is between [0,1];

⑧返回步骤①,当衍射斑平面误差小于10-3,结束迭代过程。⑧Return to step ①, when the diffraction spot plane error If it is less than 10-3, the iterative process ends.

本发明的技术效果及优势Technical effects and advantages of the present invention

本发明通过记录一幅衍射光斑,就能快速实时地得到基频、倍频、三倍频三种不同波长光场的振幅和相位,为高功率激光驱动器的运行提供可靠的相应参数,解决目前无法同时测量复合光场的技术难题。特别适用于高功率激光驱动中脉冲光束的波前测量。By recording a diffraction spot, the present invention can quickly and real-time obtain the amplitude and phase of light fields with three different wavelengths: fundamental frequency, double frequency, and triple frequency, and provide reliable corresponding parameters for the operation of high-power laser drivers. The technical difficulty of not being able to simultaneously measure the composite light field. Especially suitable for wavefront measurement of pulsed beams in high power laser drives.

本发明具有结构简单、体积小、对环境要求较低、收敛速度快和测量精度高的特点。The invention has the characteristics of simple structure, small volume, low environmental requirements, fast convergence speed and high measurement precision.

附图说明Description of drawings

图1是本发明多波长复合光场在线测量装置示意图Fig. 1 is a schematic diagram of the multi-wavelength compound light field online measurement device of the present invention

图2是多波长复合光场在线测量方法迭代平面示意图Figure 2 is a schematic diagram of the iterative plane of the multi-wavelength compound light field online measurement method

图中:1-三台阶随机相位板,2-CCD探测器,3-固定连接套筒,4-计算机,S1-入射面,S2-相位板面,S3-CCD探测器靶面In the figure: 1-three-step random phase plate, 2-CCD detector, 3-fixed connecting sleeve, 4-computer, S1-incidence surface, S2-phase plate surface, S3-CCD detector target surface

图3是本发明利用衍射传输理论通过计算机迭代运算实现波前重建的流程图Fig. 3 is a flow chart of the present invention utilizing the diffraction transmission theory to realize wavefront reconstruction through computer iterative operations

具体实施方式Detailed ways

先请参阅图1、图2,由图可见,本发明多波长复合光场在线测量装置,包括三台阶随机相位板1和CCD探测器2并通过连接套筒3固定在一起,所述的三台阶随机相位板面S2和CCD探测器靶面S3平行,所述的三台阶随机相位板面S2和CCD探测器靶面S3之间的距离为L,所述的三台阶随机相位板1的相位分布为Pm,所述的CCD探测器2的输出端与计算机4的输入端相连,所述的计算机4具有相应数据记录采集与处理软件,用来记录光斑与数据处理。Please refer to Fig. 1 and Fig. 2 first, it can be seen from the figures that the multi-wavelength compound light field online measuring device of the present invention includes a three-step random phase plate 1 and a CCD detector 2 and is fixed together by a connecting sleeve 3, the three The step random phase plate surface S2 is parallel to the CCD detector target surface S3, the distance between the three-step random phase plate surface S2 and the CCD detector target surface S3 is L, and the phase of the three-step random phase plate 1 The distribution is P m , the output end of the CCD detector 2 is connected to the input end of the computer 4, and the computer 4 has corresponding data recording acquisition and processing software for recording light spots and data processing.

所述的三台阶随机相位板1对不同的光场均有较强的散射能力及较高的透过率,通过在石英玻璃上面进行深度差异化刻蚀,对每一种波长的光相位延迟量有三个分量,并且随机分布,若对基频光的三种相位延迟量为[a b c],则相应对倍频、三倍频光的相位延迟量分别为[2a 2b 2c]、[3a 3b 3c]。The three-step random phase plate 1 has strong scattering ability and high transmittance for different light fields, and the optical phase retardation for each wavelength is achieved by performing differential etching on the quartz glass. There are three components and they are randomly distributed. If the three phase delays of the fundamental frequency light are [a b c], then the corresponding phase delays of the doubled and tripled light are [2a 2b 2c], [3a 3b 3c].

利用上述在线测量装置对基频、倍频和三倍频多波长复合光场的测量方法,包括下列步骤:Utilize above-mentioned on-line measuring device to the measurement method of multi-wavelength composite light field of fundamental frequency, double frequency and triple frequency, comprise the following steps:

1)根据实际待测光波场的尺寸大小选择相应的缩束器使待记录光斑能被所述的CCD探测器2完全接收;1) Select a corresponding beam reducer according to the size of the actual optical wave field to be measured so that the light spot to be recorded can be completely received by the CCD detector 2;

2)将所述的在线测量装置置于待测光路中并使所述的三台阶随机相位板面S2与光束垂直,入射光波为球面波且焦平面称为入射面S1,该入射面S1位于所述的三台阶随机相位板面S2之前,确定距离为T,若待测光波为脉冲光,应为所述的CCD探测器2添加外部触发信号;2) Place the online measurement device in the optical path to be measured and make the three-step random phase plate surface S2 perpendicular to the light beam, the incident light wave is a spherical wave and the focal plane is called the incident surface S1, and the incident surface S1 is located at Before the three-step random phase plate surface S2, determine the distance as T, if the light wave to be measured is pulsed light, an external trigger signal should be added to the CCD detector 2;

3)待测复合光场经三台阶随机相位板散射后被CCD探测器2探测一幅衍射光斑送所述的计算机4存储,该计算机利用编写的软件进行下列迭代运算,包括以下步骤(参见图3):3) After the compound light field to be measured is scattered by the three-step random phase plate, a diffraction spot is detected by the CCD detector 2 and sent to the computer 4 for storage. The computer uses the software written to perform the following iterative calculations, including the following steps (see Fig. 3):

①第一次迭代时,我们初始猜测焦平面处三束光的分布为φ1,m,①In the first iteration, we initially guess that the distribution of the three beams of light at the focal plane is φ 1,m ,

②令n=n+1,进行第n次迭代过程描述如下:②Let n=n+1, the nth iteration process is described as follows:

根据衍射理论将焦平面S1处光场φn,m传播到相位板面得到三台阶随机相位板面S2上的入射光场分布为ψn,mAccording to the diffraction theory, the light field φ n,m at the focal plane S1 is propagated to the phase plate surface to obtain the incident light field distribution on the three-step random phase plate surface S2 as ψ n,m ;

其中,下标m表示不同波长的光场:m=1代表基频光,m=2代表倍频光,m=3代表三倍频光,下标n表示第n次迭代,例如φ3,1代表第3次迭代过程中基频光的光场复振幅分布;Wherein, the subscript m represents the light field of different wavelengths: m=1 represents the fundamental frequency light, m=2 represents the double frequency light, m=3 represents the triple frequency light, and the subscript n represents the nth iteration, such as φ 3, 1 represents the light field complex amplitude distribution of the fundamental frequency light in the third iteration;

③相位板面S2后的出射光场为Wn,m=ψn,m*Pm③The outgoing light field behind the phase plate surface S2 is W n,mn,m *P m ;

④相位板后出射光场传播到CCD靶面S3得到衍射光斑为 ④ After the phase plate, the outgoing light field propagates to the CCD target surface S3 to obtain the diffraction spot as

其中,表示光场Wn,m传输距离L的过程,表示傅里叶变换,计算第n次迭代的误差Enin, Indicates the process of light field W n,m traveling distance L, Represents the Fourier transform and calculates the error E n of the nth iteration:

其中,I为记录的光斑强度,∑u表示对矩阵的行列求和;Wherein, I is the recorded spot intensity, and ∑u represents the summation of the rows and columns of the matrix;

⑤利用记录的实际光斑I对计算得到的每种光的波前振幅进行修正并保持相位不变,即⑤ Use the recorded actual spot I to correct the calculated wavefront amplitude of each light and keep the phase unchanged, that is

与单波长更新不同,这里我们在振幅更新时,根据 Different from single-wavelength update, here we update the amplitude according to

每种光在迭代过程中的能量比例乘了相应的系数;The energy ratio of each light in the iteration process is multiplied by the corresponding coefficient;

⑥将⑤中更新后的波前逆传播到三台阶随机相位板面S2,我们用表示沿光的入射方向逆向传播距离L,消除相位板相位调制得到修正后的相位板前照明光ψ′n,m⑥ Backpropagating the updated wavefront in ⑤ to the three-step random phase plate surface S2, we use Represents the reverse propagation distance L along the incident direction of light, and eliminates the phase plate phase modulation to obtain the corrected phase plate front illumination light ψ′ n,m ;

⑦逆传播到焦平面根据焦平面上焦斑通常集中在中心区域的特点引入焦平面限制,得到修正后的焦平面三束光的波前分布:φn+1,m=SR(n,m)φ′n,m+γ(1-SR(n,m))(φ′n,mn,m)并作为下一次迭代的初始值,其中SR(n,m)为一个直径随迭代次数逐渐变大的孔函数,达到最大值后不再增加,更新权重值γ在[0,1]之间;⑦ Backpropagation to the focal plane According to the feature that the focal spot is usually concentrated in the central area on the focal plane, the focal plane limitation is introduced, and the wavefront distribution of the three beams of light at the focal plane is obtained after correction: φ n+1,m = S R(n,m) φ′ n, m +γ(1-S R(n,m) )(φ′ n,mn,m ) is used as the initial value of the next iteration, where S R(n,m) is a diameter that gradually increases with the number of iterations The enlarged hole function will no longer increase after reaching the maximum value, and the updated weight value γ is between [0,1];

⑧返回步骤①,当衍射斑平面误差小于10-3,结束迭代过程。⑧Return to step ①, when the diffraction spot plane error If it is less than 10 -3 , end the iterative process.

下面是本发明一个实施例的参数:The following are the parameters of one embodiment of the invention:

测量光场包含基频光、倍频光、三倍频光的复合光场。三台阶随机相位板1对基频光的相位延迟量为[0,π/2,π],对倍频光的相位延迟量为[0,π,2π],对三倍频光的相位延迟量为[0,3π/2,3π]。相位板1到CCD探测器2的距离为70mm,CCD探测器2的分辨率为4008*2672,最小单元为9um。记录一幅衍射光斑,通过衍射理论计算传播过程。具体步骤包括:The measurement light field includes a compound light field of fundamental frequency light, double frequency light and triple frequency light. The phase delay of the three-step random phase plate 1 to the fundamental frequency light is [0, π/2, π], the phase delay to the double frequency light is [0, π, 2π], and the phase delay to the triple frequency light The quantity is [0,3π/2,3π]. The distance between the phase plate 1 and the CCD detector 2 is 70mm, the resolution of the CCD detector 2 is 4008*2672, and the smallest unit is 9um. Record a diffraction spot, and calculate the propagation process through diffraction theory. Specific steps include:

初始猜测焦平面处三束光的分布为φ1,m,下标m表示不同波长的光场(m=1代表基频光,m=2代表倍频光,m=3代表三倍频光),下标n表示第n次迭代:The initial guess is that the distribution of the three beams of light at the focal plane is φ 1,m , and the subscript m represents the light field of different wavelengths (m=1 represents the fundamental frequency light, m=2 represents the double frequency light, m=3 represents the triple frequency light ), the subscript n indicates the nth iteration:

第一次迭代时,我们初始猜测焦平面处三束光的分布为φ1,m,第n次迭代过程描述如下:In the first iteration, we initially guess that the distribution of the three beams of light at the focal plane is φ 1,m , and the nth iteration process is described as follows:

根据衍射理论将焦平面S1处光场φn,m传播到相位板面得到三台阶随机相位板面S2上的光场分布为ψn,mAccording to the diffraction theory, the optical field φ n,m at the focal plane S1 is propagated to the phase plate surface, and the optical field distribution on the three-step random phase plate surface S2 is ψ n,m .

三台阶随机相位板的相位分布为Pm,相位分布提前通过测量为已知信息,因此相位板面S2后的出射光场可表示为Wn,m=ψn,m*PmThe phase distribution of the three-step random phase plate is P m , and the phase distribution is known information through measurement in advance, so the outgoing light field behind the phase plate surface S2 can be expressed as W n,mn,m *P m .

我们用表示光场Wn,m传输距离L的过程,表示傅里叶变换,相位板后出射光场传播到CCD靶面得到衍射光斑其中L为相位板面S2到CCD靶面S3的距离。在这一步过程中,我们同时计算本次迭代的误差En其中,I为记录的光斑强度,∑u表示对矩阵的行列求和。we use Indicates the process of light field W n,m traveling distance L, Indicates Fourier transform, after the phase plate, the outgoing light field propagates to the CCD target surface to obtain a diffraction spot in L is the distance from the phase plate surface S2 to the CCD target surface S3. During this step, we simultaneously calculate the error E n of this iteration, Among them, I is the recorded spot intensity, and Σu represents the summation of the rows and columns of the matrix.

利用记录的实际光斑I对计算得到的每种光的波前振幅进行修正并保持相位不变,即Use the recorded actual spot I to correct the calculated wavefront amplitude of each light and keep the phase constant, that is,

与单波长更新不同,这里我们在振幅更新时根据每种光在迭代过程中的能量比例乘以了相应的系数。Different from single-wavelength update, here we multiply the corresponding coefficient according to the energy ratio of each light in the iterative process when updating the amplitude.

将4)中更新后的波前逆传播到三台阶随机相位板面S2,我们用表示沿光的入射方向逆向传播距离L,消除相位板相位调制得到修正后的相位板前照明光ψ′n,mTo backpropagate the updated wavefront in 4) to the three-step random phase plate surface S2, we use Represents the reverse propagation distance L along the incident direction of the light, and eliminates the phase plate phase modulation to obtain the corrected phase plate front illumination light ψ′ n,m .

逆传播到焦平面根据焦平面上焦斑通常集中在中心区域的特点引入焦平面限制,得到修正后的焦平面三束光的波前分布Backpropagation to the focal plane According to the characteristics that the focal spot is usually concentrated in the central area on the focal plane, the focal plane limitation is introduced, and the wavefront distribution of the three beams of light at the focal plane is obtained after correction

φn+1,m=SR(n,m)φ′n,m+γ(1-SR(n,m))(φ′n,mn,m)φ n+1,m =SR (n,m) φ′ n,m +γ(1- SR(n,m) )(φ′ n,mn,m )

并作为下一次迭代的初始值,其中SR(n,m)为一个直径随迭代次数逐渐变大的孔函数,达到最大值后不再增加,更新权重值γ在[0,1]之间。And as the initial value of the next iteration, where S R(n,m) is a hole function whose diameter gradually increases with the number of iterations, and will not increase after reaching the maximum value, and the update weight value γ is between [0,1] .

重复上述步骤直到衍射斑平面误差达到足够小,结束迭代过程。Repeat the above steps until the diffraction spot plane error is sufficiently small, and the iterative process ends.

实验表明,本发明通过记录一幅衍射光斑,可快速实时地得到基频、倍频、三倍频三种不同波长光场的振幅和相位,为高功率激光驱动器的运行提供可靠的相应参数,解决目前无法同时测量复合光场的技术难题。特别适用于高功率激光驱动中脉冲光束的波前测量。本发明具有结构简单、体积小、对环境要求较低、收敛速度快和测量精度高的特点。Experiments show that, by recording a diffraction spot, the present invention can quickly and real-time obtain the amplitude and phase of three different wavelength light fields of fundamental frequency, double frequency and triple frequency, and provide reliable corresponding parameters for the operation of high-power laser drivers. Solve the current technical problem that it is impossible to measure the composite light field at the same time. Especially suitable for wavefront measurement of pulsed beams in high power laser drives. The invention has the characteristics of simple structure, small volume, low environmental requirements, fast convergence speed and high measurement precision.

Claims (2)

1.一种多波长复合光场在线测量装置,其特征在于该装置包括三台阶随机相位板(1)和CCD探测器(2)并通过连接套筒(3)固定在一起,所述的三台阶随机相位板面(S2)和CCD探测器靶面(S3)平行,所述的三台阶随机相位板面(S2)和CCD探测器靶面(S3)之间的距离为L,所述的三台阶随机相位板(1)的相位分布为Pm,所述的CCD探测器(2)的输出端与计算机(4)的输入端相连,所述的计算机(4)具有相应数据记录采集与处理软件,用来记录光斑与数据处理;所述的三台阶随机相位板(1)对不同的光场均有较强的散射能力及较高的透过率,通过在石英玻璃上面进行深度差异化刻蚀,对每一种波长的光相位延迟量有三个分量,并且随机分布,若对基频光的三种相位延迟量为[a b c],则相应对倍频、三倍频光的相位延迟量分别为[2a 2b 2c]、[3a 3b 3c]。1. A multi-wavelength composite optical field online measuring device is characterized in that the device includes three steps random phase plate (1) and CCD detector (2) and is fixed together by connecting sleeve (3), and the three The step random phase plate surface (S2) is parallel to the CCD detector target surface (S3), and the distance between the three-step random phase plate surface (S2) and the CCD detector target surface (S3) is L, and the described The phase distribution of the three-step random phase plate (1) is P m , the output end of the CCD detector (2) is connected with the input end of the computer (4), and the computer (4) has corresponding data record acquisition and Processing software, used to record light spots and data processing; the three-step random phase plate (1) has strong scattering ability and high transmittance to different light fields, and the depth difference There are three components to the optical phase delay of each wavelength, and they are randomly distributed. If the three phase delays of the fundamental frequency light are [abc], then the corresponding phases of the frequency-doubled and triple-frequency light The delay amounts are [2a 2b 2c], [3a 3b 3c], respectively. 2.利用权利要求1所述的在线测量装置对基频、倍频和三倍频多波长复合光场的测量方法,其特征在于该方法包括下列步骤:2. Utilize the on-line measuring device described in claim 1 to the measuring method of fundamental frequency, double frequency and triple frequency multi-wavelength composite light field, it is characterized in that the method comprises the following steps: 1)根据实际待测光波场的尺寸大小选择相应的缩束器使待记录光斑能被所述的CCD探测器(2)完全接收;1) Select a corresponding beam reducer according to the size of the actual optical wavefield to be measured so that the light spot to be recorded can be completely received by the CCD detector (2); 2)将所述的在线测量装置置于待测光路中并使所述的三台阶随机相位板面(S2)与光束垂直,入射光波为球面波且焦平面称为入射面(S1),该入射面(S1)位于所述的三台阶随机相位板面(S2)之前,确定距离为T,若待测光波为脉冲光,应为所述的CCD探测器(2)添加外部触发信号;2) Place the online measurement device in the optical path to be measured and make the three-step random phase plate surface (S2) perpendicular to the light beam, the incident light wave is a spherical wave and the focal plane is called the incident surface (S1), the The incident surface (S1) is located in front of the three-step random phase plate (S2), and the distance is determined to be T. If the light wave to be measured is pulsed light, an external trigger signal should be added to the CCD detector (2); 3)待测复合光场经三台阶随机相位板散射后被CCD探测器(2)探测一幅衍射光斑送所述的计算机(4)存储,该计算机利用编写的软件进行下列迭代运算,包括以下步骤:3) After the compound light field to be measured is scattered by the three-step random phase plate, a diffraction spot is detected by the CCD detector (2) and sent to the computer (4) for storage. The computer uses the software written to perform the following iterative calculations, including the following step: ①第一次迭代时,初始猜测焦平面处三束光的分布为φ1,m,①In the first iteration, the initial guess distribution of the three beams of light at the focal plane is φ 1,m , ②令n=n+1,进行第n次迭代过程描述如下:②Let n=n+1, the nth iteration process is described as follows: 根据衍射理论将焦平面S1处光场φn,m传播到相位板面得到三台阶随机相位板面S2上的入射光场分布为ψn,mAccording to the diffraction theory, the light field φ n,m at the focal plane S1 is propagated to the phase plate surface to obtain the incident light field distribution on the three-step random phase plate surface S2 as ψ n,m ; 其中,下标m表示不同波长的光场:m=1代表基频光,m=2代表倍频光,m=3代表三倍频光,下标n表示第n次迭代,φ3,1代表第3次迭代过程中基频光的光场复振幅分布;Among them, the subscript m represents the light field of different wavelengths: m=1 represents the fundamental frequency light, m=2 represents the double frequency light, m=3 represents the triple frequency light, the subscript n represents the nth iteration, φ 3,1 Represents the light field complex amplitude distribution of the fundamental frequency light in the third iteration process; ③相位板面S2后的出射光场为Wn,m=ψn,m*Pm③The outgoing light field behind the phase plate surface S2 is W n,mn,m *P m ; ④相位板后出射光场传播到CCD靶面得到衍射光斑为 ④ After the phase plate, the outgoing light field propagates to the CCD target surface to obtain the diffraction spot as 其中,表示光场Wn,m传输距离L的过程,表示傅里叶变换,计算第n次迭代的误差Enin, Indicates the process of light field W n,m traveling distance L, Represents the Fourier transform and calculates the error E n of the nth iteration: 其中,I为记录的光斑强度,∑u表示对矩阵的行列求和;Wherein, I is the recorded spot intensity, and ∑u represents the summation of the rows and columns of the matrix; ⑤利用记录的实际光斑I对计算得到的每种光的波前振幅进行修正并保持相位不变,即⑤ Use the recorded actual spot I to correct the calculated wavefront amplitude of each light and keep the phase unchanged, that is 与单波长更新不同,在振幅更新时,根据每种光在迭代过程中的能量比例乘了相应的系数; Different from single-wavelength update, when the amplitude is updated, the corresponding coefficient is multiplied according to the energy ratio of each light in the iterative process; ⑥将⑤中更新后的波前逆传播到三台阶随机相位板面S2,用表示沿光的入射方向逆向传播距离L,消除相位板相位调制得到修正后的相位板前照明光ψ′n,m⑥ Backpropagate the updated wavefront in ⑤ to the three-step random phase plate surface S2, using Represents the reverse propagation distance L along the incident direction of light, and eliminates the phase plate phase modulation to obtain the corrected phase plate front illumination light ψ′ n,m ; ⑦逆传播到焦平面根据焦平面上焦斑通常集中在中心区域的特点引入焦平面限制,得到修正后的焦平面三束光的波前分布:⑦ Backpropagation to the focal plane According to the characteristics that the focal spot is usually concentrated in the central area on the focal plane, the focal plane limitation is introduced, and the wavefront distribution of the three beams of light at the focal plane is obtained after correction: φn+1,m=SR(n,m)φ′n,m+γ(1-SR(n,m))(φ′n,mn,m)并作为下一次迭代的初始值,其中SR(n,m)为一个直径随迭代次数逐渐变大的孔函数,达到最大值后不再增加,更新权重值γ在[0,1]之间;φ n+1,m =SR (n,m) φ′ n,m +γ(1- SR(n,m) )(φ′ n,mn,m ) and as the next iteration Initial value, where S R(n,m) is a hole function whose diameter gradually increases with the number of iterations, and does not increase after reaching the maximum value, and the update weight value γ is between [0,1]; ⑧返回步骤①,当衍射斑平面误差小于10-3,结束迭代过程。⑧Return to step ①, when the diffraction spot plane error If it is less than 10 -3 , end the iterative process.
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