CN107004621B - Nozzle lip cleaning device and slit type smearing device thereof - Google Patents
Nozzle lip cleaning device and slit type smearing device thereof Download PDFInfo
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- CN107004621B CN107004621B CN201580066153.9A CN201580066153A CN107004621B CN 107004621 B CN107004621 B CN 107004621B CN 201580066153 A CN201580066153 A CN 201580066153A CN 107004621 B CN107004621 B CN 107004621B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/16—Rigid blades, e.g. scrapers; Flexible blades, e.g. wipers
- B08B1/165—Scrapers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Cleaning By Liquid Or Steam (AREA)
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Abstract
本发明提供喷嘴唇口清洗装置及利用该喷嘴唇口清洗装置的狭缝式涂抹装置,其中所述喷嘴唇口清洗装置包括:清洗装置主体;刀片支撑单元,具有结合于所述清洗装置主体的第一刀片支撑部件;刀片单元,具有第一刀片,所述第一刀片后端结合于所述第一刀片支撑部件,而前端接触于所述喷嘴唇口的表面,以刮掉喷射药液之后附着于喷嘴唇口表面的药液;角度调节单元,具有第一角度调节部件,所述第一角度调节部件配置在所述清洗装置主体,并且使所述第一刀片支撑部件移动,同时调节所述第一刀片的前端与所述喷嘴唇口表面之间的相对位置;支撑销单元,具有第一支撑销部件,所述第一支撑销部件配置在所述第一刀片支撑部件与所述第一刀片之间,并且成为所述第一刀片的宽度方向的旋转中心,进而在所述第一刀片支撑部件移动时使所述第一刀片的前端平行地接触于所述喷嘴唇口表面。
The present invention provides a nozzle lip cleaning device and a slit-type coating device using the nozzle lip cleaning device, wherein the nozzle lip cleaning device comprises: a cleaning device main body; a blade supporting unit having a A first blade support member; a blade unit having a first blade, the rear end of the first blade is combined with the first blade support member, and the front end contacts the surface of the nozzle mouth to scrape off the spray liquid The chemical liquid adhered to the surface of the nozzle mouth; the angle adjustment unit has a first angle adjustment member, the first angle adjustment member is arranged in the cleaning device main body, and moves the first blade support member, and adjusts all the the relative position between the front end of the first blade and the surface of the nozzle mouth; the support pin unit has a first support pin member, and the first support pin member is arranged between the first blade support member and the first support pin. Between one blade and the center of rotation in the width direction of the first blade, when the first blade support member moves, the front end of the first blade is brought into parallel contact with the surface of the nozzle mouth.
Description
技术领域technical field
本发明涉及喷嘴唇口清洗装置以及利用该喷嘴唇口清洗装置的狭缝式涂抹装置,更详细地说,涉及的喷嘴唇口清洗装置以及利用该喷嘴唇口清洗装置的狭缝式涂抹装置,将用于清洗喷嘴唇口的刀片准确并快速地设置在所述喷嘴唇口的表面,同时还能够提高对喷嘴唇口的清洁力。The present invention relates to a nozzle lip cleaning device and a slit-type applicator using the nozzle lip cleaning device, and more specifically, the nozzle lip cleaning device and the slit-type application device using the nozzle lip cleaning device, The blade for cleaning the nozzle mouth is accurately and quickly arranged on the surface of the nozzle mouth, and at the same time, the cleaning power of the nozzle mouth can be improved.
背景技术Background technique
平板显示元件用基板制造工艺包括将各种药液涂抹于基板面的涂抹工艺,并且使用于所述涂抹工艺的涂抹设备主要使用具有狭缝式喷嘴(Slitnozzle)的夹缝式涂抹装置。The manufacturing process of the substrate for a flat panel display element includes a coating process of applying various chemical liquids to the surface of the substrate, and the coating device used for the coating process mainly uses a slit-type coating device with a slit nozzle.
所述狭缝式涂抹装置通过所述狭缝式喷嘴喷射药液的同时从所述基板的一侧向另一侧瞬间移动,进而将所述药液涂抹于所述基板面。The slit-type application device sprays the chemical solution through the slit-type nozzle and moves instantaneously from one side of the substrate to the other side, thereby applying the chemical solution to the substrate surface.
所述狭缝式涂抹装置应该将药液均匀地涂抹于所述基板面,为此必须在所述基板面涂抹药液之后在固定的时间点清除在所述狭缝式喷嘴的喷嘴唇口(nozzle lip)附着的药液。The slit type applicator should evenly apply the liquid medicine on the substrate surface, for this reason, it is necessary to clear the nozzle mouth of the slit nozzle ( Nozzle lip) attached to the liquid medicine.
为了清除附着于所述喷嘴唇口的药液,在所述狭缝式涂抹装置配置有喷嘴唇口清洗装置,在所述喷嘴唇口清洗装置具有多个刀片,以用于刮掉附着于所述喷嘴唇口的所述药液。In order to remove the chemical liquid adhering to the nozzle orifice, the slit type applicator is provided with a nozzle orifice cleaning device, and the nozzle orifice cleaning device has a plurality of blades for scraping off the nozzle orifice. The liquid medicine in the mouth of the spray mouth.
此时,所述刀片的前端应平行地接触于所述喷嘴唇口的表面,而在现有技术中存在为使所述刀片的前端平行地接触于所述喷嘴唇口的表面在设置上需要投入大量的时间与努力的问题。At this time, the front end of the blade should be in parallel contact with the surface of the spout mouth, but in the prior art, it is necessary to set the front end of the blade in parallel with the surface of the spout mouth Put a lot of time and effort into the problem.
并且,所述喷嘴唇口清洗装置高速移动的同时刮掉所述药液的情况下,通过某一刀片从所述喷嘴唇口分离的药液趁着该刀片移动,影响到其他刀片,因此存在清洁不合格的问题。In addition, when the spray lip cleaning device moves at a high speed and scrapes off the chemical liquid, the chemical liquid separated from the spray mouth by a certain blade moves with the blade and affects other blades, so there is a problem. The problem of unqualified cleaning.
发明内容SUMMARY OF THE INVENTION
(要解决的课题)(issue to be solved)
本发明要解决的技术课题是提供如下的喷嘴唇口清洗装置以及其狭缝式涂抹装置:使刀片的前端与喷嘴唇口的表面快速且准确地构成平行的同时接触,进而能够提高装置的产能利用率。The technical problem to be solved by the present invention is to provide the following nozzle lip cleaning device and its slit type applicator: the front end of the blade and the surface of the nozzle lip can be brought into parallel contact with each other quickly and accurately, and the productivity of the device can be improved. utilization.
本发明要解决的另一技术问题是提供如下的喷嘴唇口清洗装置以及其狭缝式涂抹装置:提高喷嘴唇口清洗装置的清洁力,进而能够缩减产品生产时间。Another technical problem to be solved by the present invention is to provide the following nozzle lip cleaning device and its slit type applicator, which can improve the cleaning power of the nozzle lip cleaning device, thereby reducing product production time.
本发明要解决的另其他一技术问题是提供如下的喷嘴唇口清洗装置以及其狭缝式涂抹装置:不使从喷嘴唇口表面分离的药液通过某一刀片影响其它刀片,进而能够防止清洁不合格。Another technical problem to be solved by the present invention is to provide the following nozzle lip cleaning device and its slit type applicator: the liquid medicine separated from the nozzle lip surface does not pass through a certain blade to affect other blades, thereby preventing cleaning. Failed.
(解决问题的手段)(means to solve the problem)
本发明为了解决如上所述的课题,提供一种喷嘴唇口清洗装置,包括:清洗装置主体;刀片支撑单元,具有结合于所述清洗装置主体的第一刀片支撑部件;刀片单元,具有第一刀片,所述第一刀片后端结合于所述第一刀片支撑部件,而前端接触于所述喷嘴唇口的表面,以刮掉喷射药液之后附着于喷嘴唇口表面的药液;角度调节单元,具有第一角度调节部件,所述第一角度调节部件配置在所述清洗装置主体,并且使所述第一刀片支撑部件移动,同时调节所述第一刀片的前端与所述喷嘴唇口表面之间的相对位置;支撑销单元,具有第一支撑销部件,所述第一支撑销部件配置在所述第一刀片支撑部件与所述第一刀片之间,并且成为所述第一刀片的宽度方向的旋转中心,进而在所述第一刀片支撑部件移动时使所述第一刀片的前端平行地接触于所述喷嘴唇口表面。In order to solve the above-mentioned problems, the present invention provides a nozzle lip cleaning device, comprising: a cleaning device main body; a blade supporting unit having a first blade supporting member coupled to the cleaning device main body; and a blade unit having a first blade supporting member Blade, the rear end of the first blade is combined with the first blade support member, and the front end is in contact with the surface of the nozzle mouth, so as to scrape off the liquid medicine attached to the surface of the nozzle mouth after spraying the liquid medicine; angle adjustment A unit including a first angle adjustment member that is disposed in the cleaning apparatus body and that moves the first blade support member and adjusts the front end of the first blade and the nozzle mouth at the same time Relative position between surfaces; a support pin unit having a first support pin member that is arranged between the first blade support member and the first blade and becomes the first blade The center of rotation in the width direction of the first blade support member is moved so that the front end of the first blade is in parallel contact with the surface of the nozzle opening.
所述第一刀片包括:结合于所述第一刀片支撑部件的刀片紧固部;从所述刀片紧固部延伸形成的刀片头部。所述第一支撑销部件可包括:结合于所述第一刀片支撑部件的销紧固部;从所述销紧固部延伸形成的同时支撑所述刀片头部的部分区域的销支撑部。The first blade includes: a blade fastening part coupled to the first blade support member; and a blade head extending from the blade fastening part. The first support pin part may include: a pin fastening part coupled to the first blade support part; and a pin support part extending from the pin fastening part while supporting a partial area of the blade head.
所述的喷嘴唇口清洗装置还包括结合单元,所述结合单元具有第一结合部件,所述第一结合部件用于将所述第一刀片与所述第一支撑销部件同时结合于所述第一刀片支撑部件,所述销支撑部的宽度具有小于所述刀片头部的宽度的值。The nozzle lip cleaning device further includes a coupling unit, the coupling unit has a first coupling part, and the first coupling part is used for coupling the first blade and the first support pin part to the In the first blade support member, the width of the pin support portion has a value smaller than the width of the blade head.
在所述销紧固部可形成有紧固位置可变区域,所述紧固位置可变区域用于改变结合于所述第一刀片支撑部件的所述第一支撑销部件的结合位置。A fastening position variable region for changing the coupling position of the first support pin member coupled to the first blade supporting member may be formed in the pin fastening portion.
所述销支撑部的宽度小于所述销紧固部的宽度,所述销支撑部可从所述销紧固部宽度方向的中心区域延伸形成。The width of the pin supporting portion is smaller than the width of the pin fastening portion, and the pin supporting portion may be formed to extend from a central region in the width direction of the pin fastening portion.
所述第一支撑销部件的长度小于所述第一刀片的长度,所述第一支撑销部件的强度可具有大于所述第一刀片的强度的值。The length of the first support pin member is smaller than the length of the first blade, and the strength of the first support pin member may have a value greater than that of the first blade.
为了防止从所述喷嘴唇口表面分离的药液通过所述刀片头部移动到所述刀片紧固部,所述刀片头部具有大于所述刀片紧固部的宽度,同时能够向所述刀片紧固部的下部方向形成阶梯状。In order to prevent the liquid medicine separated from the nozzle surface from moving to the blade fastening portion through the blade head, the blade head has a width larger than that of the blade fastening portion while being able to move toward the blade The lower direction of the fastening portion is formed in a stepped shape.
所述刀片头部的下部区域中的至少一部分可具有倒角形状,以防止与邻接的其他刀片发生干涉。At least a portion of the lower region of the blade head may have a chamfered shape to prevent interference with other adjacent blades.
所述刀片头部可包括:从所述刀片紧固部延伸的头部后方部;从所述头部后方部延伸形成并且倾斜形成表面,进而越向所述刀片头部的前端厚度越薄的刀片前方部。The blade head may include: a head rear part extending from the blade fastening part; a surface extending from the head rear part and being inclined to form a surface so as to be thinner toward the front end of the blade head Front of blade.
另外,作为所述第一刀片的另一实施形态,所述第一刀片可包括:刀片紧固部,结合于所述第一刀片支撑部件;刀片头部,从所述刀片紧固部延伸形成。所述刀片头部可包括:头部后方部,从所述刀片紧固部延伸;头部前方部,从所述头部后方部延伸形成;头部凸起,从所述头部后方部与所述头部前方部的边界区域凸出到所述刀片头部的表面。In addition, as another embodiment of the first blade, the first blade may include: a blade fastening part coupled to the first blade support member; and a blade head extending from the blade fastening part . The blade head may include: a rear part of the head extending from the blade fastening part; a front part of the head extending from the rear part of the head; a head protrusion extending from the rear part of the head and The boundary area of the front portion of the head protrudes to the surface of the blade head.
所述第一角度调节部件配置在所述第一刀片支撑部件的后方,并且加压所述第一刀片支撑部件的后面的同时使所述第一刀片支撑部件移动,并且以所述第一支撑销部件的宽度方向中心为基准可分别上下配置。The first angle adjusting member is arranged behind the first blade support member, and moves the first blade support member while pressing the rear face of the first blade support member, and supports the first blade support member with the first support member. The pin members can be arranged up and down, respectively, based on the center in the width direction.
所述清洗装置主体包括:基块、第一侧面块以及第二侧面块,其中所述第一侧面块以及第二侧面块配置在所述基块两侧,在所述第一侧面块可形成有插入所述第一角度调节部件而贯通的两列以上的贯通孔。The cleaning device main body includes: a base block, a first side block and a second side block, wherein the first side block and the second side block are arranged on both sides of the base block, and can be formed on the first side block There are two or more rows of through holes through which the first angle adjusting member is inserted.
根据本发明另一实施形态,本发明提供一种狭缝式涂抹装置,包括:工作台,放置有待涂抹药液的基板;喷嘴单元,具有喷嘴与喷嘴固定器,所述喷嘴用于在所述基板上面涂抹药液,所述喷嘴固定器固定所述喷嘴的上部区域;喷嘴移动单元,用于移动所述喷嘴单元;上述的喷嘴唇口清洗装置;清洗装置移动单元,使所述喷嘴唇口清洗装置沿着所述喷嘴的长度方向移动;清洗装置清洗单元,用于清洗所述喷嘴唇口清洗装置;料桶单元,至少一部分配置在所述喷嘴唇口清洗装置以及所述清洗装置清洗单元的下部,并收容通过所述喷嘴唇口清洗装置分离的药液与从所述清洗装置清洗单元排放的清洗液。According to another embodiment of the present invention, the present invention provides a slit-type coating device, comprising: a worktable, on which a substrate to be coated with a medicinal liquid is placed; a nozzle unit, which has a nozzle and a nozzle holder, the nozzle is used for The liquid medicine is applied on the substrate, and the nozzle holder fixes the upper area of the nozzle; the nozzle moving unit is used to move the nozzle unit; the above-mentioned nozzle lip cleaning device; the cleaning device moving unit is used to make the nozzle lip The cleaning device moves along the length direction of the nozzle; the cleaning device cleaning unit is used for cleaning the nozzle lip cleaning device; the bucket unit is at least partially arranged in the nozzle lip cleaning device and the cleaning device cleaning unit The lower part of the lip port contains the chemical liquid separated by the nozzle cleaning device and the cleaning liquid discharged from the cleaning unit of the cleaning device.
(发明的效果)(effect of invention)
根据本发明的喷嘴唇口清洗装置以及其狭缝式涂抹装置的效果如下:The effects of the nozzle mouth cleaning device and the slit-type applicator thereof according to the present invention are as follows:
第一,为使刀片的前端平行地接触于喷嘴唇口的表面,设置有作为刀片宽度方向旋转中心的支撑销部件,进而具有能够将所述刀片准确并快速地设置在所述喷嘴唇口表面的优点。因此,可缩减设置在喷嘴唇口清洗装置的刀片的设置时间,进而可提高装置的产能利用率。First, in order to make the front end of the blade contact the surface of the nozzle mouth in parallel, a support pin member is provided as the center of rotation in the width direction of the blade, and further, the blade can be accurately and quickly set on the surface of the nozzle mouth. The advantages. Therefore, the setting time of the blade provided in the nozzle lip cleaning device can be shortened, and the capacity utilization rate of the device can be improved.
第二,刀片的头部具有大于刀片紧固部的宽度,同时向所述刀片紧固部的下部方向形成阶梯状,因此具有能够防止从喷嘴唇口表面分离的药液通过所述刀片头部移动到所述刀片紧固部的优点。Second, the head of the blade has a width larger than that of the blade fastening part, and at the same time, it is stepped toward the lower direction of the blade fastening part, so that the liquid medicine separated from the surface of the nozzle mouth can be prevented from passing through the blade head The advantage of moving to the blade fastening part.
尤其是,所述药液具有高粘度,并且即使是在高速运转所述刀片的情况,通过第一刀片分离的药液也不会掉落到邻接配置的其他刀片,因此能够防止对所述喷嘴唇口的清洁不合格,因此具有能够缩减产品生产时间的优点。In particular, the chemical liquid has a high viscosity, and even when the blades are operated at a high speed, the chemical liquid separated by the first blade does not drop to other blades arranged adjacently, so that the spraying can be prevented. The cleaning of the mouth of the lips is not acceptable, so there is an advantage that the production time of the product can be shortened.
第三,为了倾斜加工表面以形成越向刀片头部的前端厚度越薄,尖锐地形成与喷嘴唇口的表面接触的刀片前端,进而具有能够提高对所述喷嘴唇口表面的清洁力的优点。Third, in order to incline the machined surface so that the thickness becomes thinner toward the tip of the tip of the blade head, the tip of the blade that is in contact with the surface of the nozzle mouth is formed sharply, and there is an advantage that the cleaning power on the surface of the nozzle mouth can be improved. .
第四,加压刀片支撑部件的后面的同时以上下两列以上配置使所述刀片支撑部件移动的角度调节部件,进而具有能够更加准确并容易调节所述刀片的设置角度的优点。Fourth, an angle adjusting member for moving the blade supporting member is arranged in two or more rows up and down while pressing the rear face of the blade supporting member, which has the advantage of being able to adjust the installation angle of the blade more accurately and easily.
附图说明Description of drawings
图1是示出本发明的狭缝式涂抹装置的一实施例的立体图。FIG. 1 is a perspective view showing an embodiment of the slit-type applicator of the present invention.
图2是示出设置在图1的狭缝式涂抹装置的喷嘴与喷嘴唇口清洗装置的立体图。FIG. 2 is a perspective view showing a nozzle and a nozzle lip cleaning device provided in the slit type applicator of FIG. 1 .
图3是示出在图2的喷嘴唇口表面设置喷嘴唇口清洗装置的状态的正面图。FIG. 3 is a front view showing a state in which a nozzle lip port cleaning device is installed on the nozzle port surface of FIG. 2 .
图4是扩大示出图2的喷嘴唇口清洗装置的主要部分的立体图。FIG. 4 is an enlarged perspective view showing a main part of the jet lip port cleaning device of FIG. 2 .
图5是设置在图4的喷嘴唇口清洗装置的第一刀片的平面图。FIG. 5 is a plan view of a first blade provided in the nozzle lip port cleaning device of FIG. 4 .
图6是示出在图4的喷嘴唇口清洗装置设置的清洗装置主体结合第一刀片、第一刀片支撑部件以及第一支撑销部件的状态的图面。6 is a view showing a state in which the first blade, the first blade support member, and the first support pin member are coupled to the cleaning device main body provided in the nozzle lip cleaning device of FIG. 4 .
图7是示出图6的第一刀片支撑部件、第一支撑销部件以及第一刀片的结合状态的平面图。7 is a plan view showing a coupled state of the first blade support member, the first support pin member, and the first blade of FIG. 6 .
具体实施方式Detailed ways
以下参照附图说明具体实现上述要解决的课题的本发明的优选实施例。在说明本实施例时,对于相同的结构使用相同的名称以及相同符号,并且在以下省略据此的附加说明。Hereinafter, preferred embodiments of the present invention that specifically achieve the above-mentioned problems to be solved will be described with reference to the accompanying drawings. In describing the present embodiment, the same names and the same symbols are used for the same structures, and additional explanations thereon are omitted below.
参照图1至图7,说明根据本发明的喷嘴唇口清洗装置以及利用该清洗装置的狭缝式涂抹装置的一实施例。Referring to FIGS. 1 to 7 , an embodiment of a nozzle mouth cleaning device and a slit-type applicator using the cleaning device according to the present invention will be described.
如图1以及图2所示,所述狭缝式涂抹装置包括:工作台1、喷嘴单元100、喷嘴移动单元2、喷嘴唇口清洗装置200、清洗装置移动单元4、清洗装置清洗单元5、料桶单元3以及大气腔室6。As shown in FIG. 1 and FIG. 2 , the slit type coating device includes: a table 1, a
具体地说,在所述工作台1放置有待涂抹药液的基板,所述喷嘴单元100移动于所述基板的上面,同时将所述药液涂抹于所述基板。Specifically, a substrate to be applied with a chemical liquid is placed on the worktable 1 , the
所述喷嘴单元100包括:用于将药液涂抹于所述基板上面的喷嘴110;固定所述喷嘴110的上部区域的喷嘴固定器120。The
所述喷嘴110包括:结合于所述喷嘴固定器120的喷嘴主体111;向所述喷嘴主体111的下部区域凸出并喷射药液的喷嘴唇口113。The
所述喷嘴移动单元2设置在所述喷嘴固定器120的两侧并使所述喷嘴固定器120移动,进而使所述喷嘴110移动。The
所述喷嘴唇口清洗装置200用于清除附着于所述喷嘴唇口113的药液,所述喷嘴唇口清洗装置的刀片以接触于所述喷嘴唇口113表面的状态下刮掉所述药液。对于所述喷嘴唇口清洗装置200的结构,将在后述的内容中进行详细说明。The nozzle
所述清洗装置移动单元4使所述喷嘴唇口清洗装置200沿着所述喷嘴110的长度方向移动。即,所述喷嘴110保持静止的状态下,所述清洗装置移动单元4使所述喷嘴唇口清洗装置200移动,进而所述喷嘴唇口清洗装置200清除附着于所述喷嘴唇口113的药液。The cleaning
所述清洗装置清洗单元5对在清除附着于所述喷嘴唇口113的药液的过程中使用过的所述喷嘴唇口清洗装置200进行清洗。The cleaning device cleaning unit 5 cleans the nozzle
并且,所述料桶单元3的至少一部分配置在所述喷嘴唇口清洗装置200以及所述清洗装置清洗单元5的下部。在所述料桶单元3收容被所述喷嘴唇口清洗装置200分离的药液与从所述清洗装置清洗单元5排放的清洗液。In addition, at least a part of the
所述大气腔室6是在使用所述喷嘴110之前收容所述喷嘴110的场所,在不使用所述喷嘴110时,为了防止所述喷嘴的药液喷射口干燥,在所述大气腔室6始终装有清洗液。The
参照图2至图7,如下说明根据本发明的喷嘴唇口清洗装置的一实施例。Referring to FIGS. 2 to 7 , an embodiment of a nozzle lip port cleaning device according to the present invention will be described as follows.
所述喷嘴唇口清洗装置200包括:清洗装置主体210;配置在所述清洗装置主体210的后方区域的淋浴单元220;结合于所述清洗装置主体210的内侧面的刀片支撑单元;结合于所述刀片支撑单元的刀片单元;用于调节设置在所述刀片单元的刀片的设置角度的角度调节单元;用于使所述刀片的前端与喷嘴唇口的表面平行的支撑销单元;用于将所述支撑销单元与所述刀片单元结合于所述刀片支撑单元的结合单元(未示出)。The
所述清洗装置主体210通过所述清洗装置移动单元4移动,并且在所述清洗装置主体210安装所述刀片单元、刀片支撑单元、所述角度调节单元、所述支撑销单元以及所述淋浴单元220。The cleaning device
具体地说,所述清洗装置主体210包括:基块215、配置在所述基块215的两侧面的第一侧面块211以及第二侧面块213。以图3为基准,所述第一侧面块211配置在所述基块215的左侧,所述第二侧面块213配置在所述基块215的右侧。Specifically, the cleaning device
所述基块215、所述第一侧面块211以及所述第二侧面块213形成一体,并且所述第一侧面块211的内侧面与所述第二侧面块213的内侧面对于所述基块215的上面以上部方向倾斜形成。The
所述刀片支撑单元包括:配置在所述第一侧面块211内侧面的第一刀片支撑部件230;配置在所述第二侧面块213的内侧面的第二刀片支撑部件23;配置在所述基块215上面的第三刀片支撑部件26。The blade support unit includes: a first
所述第一刀片支撑部件230支撑所述刀片单元的第一刀片250,所述第二刀片支撑部件23支撑所述刀片单元的第二刀片25,所述第三刀片支撑部件26支撑所述刀片单元的第三刀片28。The first
所述第一刀片支撑部件230与所述第二刀片支撑部件23的结构实际上相同,因此只限于所述第一刀片支撑部件230来如下进行说明。The structures of the first
所述第一刀片支撑部件230包括:结合于所述第一侧面块211内侧面的第一支撑部231;从所述第一支撑部231延伸形成并且与所述第一刀片250的下部区域结合的第二支撑部233。The first
在所述第一支撑部231形成有插入另外的紧固部件(未示出)的第一紧固孔(未示出),其中所述紧固部件用于将所述第一刀片支撑部件230结合于所述第一侧面块211内侧面。A first fastening hole (not shown) into which another fastening member (not shown) for inserting the first
所述第二支撑部233对于所述第一支撑部231向上部方向倾斜形成,并且在所述第二支撑部233形成有用于结合所述结合单元的第一结合部件(未示出)的第二紧固孔233a。The
所述第一结合部件将所述第一刀片250与所述支撑销单元的第一支撑销部件240同时结合于所述第一刀片支撑部件230。The first coupling part couples the
具体地说,所述第一结合部件贯通所述第一刀片的紧固狭缝251a与所述第一支撑销部件的紧固位置可变区域245的同时紧固于所述第二紧固孔233a,进而将所述第一刀片的后方与所述第一支撑销部件240的后方区域结合于所述第二支撑部233。Specifically, the first coupling member is fastened to the second fastening hole while penetrating the
另一方面,所述刀片单元包括:结合于所述第一刀片支撑部件230的第一刀片250;结合于所述第二刀片支撑部件23的第二刀片25;结合于所述第三刀片支撑部件26的第三刀片28。On the other hand, the blade unit includes: a
所述第一刀片250的前端接触于所述喷嘴唇口的第一侧面113a,所述第二刀片25的前端接触于所述喷嘴唇口的第二侧面113b,所述第三刀片28的前端接触于形成所述喷嘴唇口药液排放口的喷嘴尖端(未示出)。The front end of the
所述第一刀片250与所述第二刀片25相互以斜角进行设置,所述第三刀片28以上部方向倾斜配置。The
所述第一刀片250刮掉附着所述喷嘴唇口的第一侧面113a的药液,所述第二刀片25刮掉附着于所述喷嘴唇口的第二侧面113b的药液,所述第三刀片28刮掉附着于所述喷嘴尖端的药液。The
所述第一刀片250与所述第二刀片25的结构实际上相同,因此限于所述第一刀片250进行说明。The structures of the
所述第一刀片250的后端结合于所述第一刀片支撑部230,而前端则接触于所述喷嘴唇口的第一侧面113a,以刮掉在排放药液之后的喷嘴唇口的表面,即刮掉附着于喷嘴唇口的第一侧面113a的药液。The rear end of the
具体地说,参照图5,所述第一刀片250包括:结合于所述第一刀片支撑部件230的刀片紧固部251;从所述刀片紧固部251延伸形成的刀片头部253。Specifically, referring to FIG. 5 , the
在所述刀片紧固部251形成有用于结合所述第一刀片支撑部件230的紧固狭缝251a。The
所述刀片头部253包括:从所述刀片紧固部251延伸的头部后方部253a;从所述头部后方部253a延伸形成的头部前方部253b。The
尤其是,参照图5,所述头部前方部253b表面形成倾斜,进而越向所述刀片头部253的前端厚度越薄。In particular, referring to FIG. 5 , the surface of the front portion of the
在本实施例中,通过倒角加工来加工所述头部前方部253b,但是本发明并不限定于此,而是能够通过各种方法进行加工。In the present embodiment, the
所述头部前方部253b作为接触于所述喷嘴唇口113表面的部分,所述头部前方部253b的末端(即,所述刀片头部的前端)越尖,则能够更加有效清除附着于所述喷嘴唇口的第一侧面113a的药液,因此能够提高对所述喷嘴唇口的清洁力。The front part of the
另外,所述头部前方部的下部区域253d具有倒角形状,以防止与邻接的其他刀片(即,第二刀片25的头部前方部以及第三刀片28的头部前方部)的干涉。In addition, the
通常刀片头部的下端部位于低于所述喷嘴唇口113下端面的位置,若所述刀片头部253的下端部不是倒角形状,则与邻接的另一刀片的刀片头部下端部发生干涉。Usually, the lower end of the blade head is located lower than the lower end surface of the
如图5所示,所述头部前方部253b的倒角形状可具有一条直线的形状,但是本发明并不限定于此,而是也可具有圆角形状。As shown in FIG. 5 , the chamfered shape of the
当然,本发明并不限定于此,而是也对所述第三刀片28的头部前方部进行倒角加工,可倾斜形成所述第三刀片28的头部前方部,进而越向所述第三刀片28的前端厚度越薄。Of course, the present invention is not limited to this, but the front part of the head of the
一般,若从喷嘴唇口的表面分离高粘度的药液,则因所述药液的自重向刀片的下部方向掉落,若所述刀片的移动速度过快,则所述药液不向所述刀片的下部方向掉落,而是沿着所述刀片的长度方向移动的同时向掉落到与所述刀片邻接配置的其他刀片的上部,同时导致清洁不合格。Generally, when a high-viscosity chemical liquid is separated from the surface of the nozzle mouth, the chemical liquid will drop toward the lower part of the blade due to its own weight. If the moving speed of the blade is too fast, the chemical liquid will not reach the target The lower part of the blade falls, but moves along the length direction of the blade and falls to the upper part of other blades arranged adjacent to the blade, resulting in unqualified cleaning.
为了防止上述问题,配置在本发明的所述刀片头部253的宽度大于现有的刀片头部的宽度,进而能够确保从所述喷嘴唇口113分离的药液向所述第一刀片250的下部方向掉落的空间。In order to prevent the above problems, the width of the
不仅如此,所述刀片头部253具有大于所述刀片紧固部251的宽度,同时向所述刀片紧固部251的下部方向形成阶梯状,进而更加有效防止所述药液从所述刀片头部253移动到所述刀片紧固部251。Not only that, the
具体地说,所述刀片头部253的宽度大于所述刀片紧固部251的宽度,所述刀片头部253的下部区域比所述刀片紧固部251的下部区域进一步向下部延伸的同时形成阶梯区域253c,进而即使所述药液的粘性大,从所述喷嘴唇口113的表面分离药液因自重沿着所述刀片头部253的表面向下部方向移动之后掉落到所述第一刀片250的下部,或者沿着所述刀片头部253的下部区域移动之后不向所述刀片紧固部251的下部区域移动,而是掉落到所述刀片头部253的下部。Specifically, the width of the
最终,所述刀片紧固部251的宽度保持与现有的刀片紧固部相同的宽度,同时所述刀片头部253的宽度比现有的刀片头部大,进而能够将与所述刀片紧固部251紧固的附属组件的大小保持不变,因此可将装置小型化,同时不使分离的药液通过所述刀片头部253移动到所述刀片紧固部251。因此,不会污染其他刀片(即,第二刀片25与第三刀片28),进而能够防止对喷嘴唇口的清洁不合格,进而能够缩减产品生产时间。Finally, the width of the
当然,本发明不限定于上述的实施例,而是所述刀片头部253也可包括:从所述刀片紧固部延伸的头部后方部;从所述头部后方部延伸形成的头部前方部;从所述头部后方部与所述头部前方部的边界区域凸出到所述刀片头部的表面的头部凸起(未示出)。Of course, the present invention is not limited to the above-mentioned embodiments, but the
通过所述头部前方部从所述喷嘴唇口表面分离的药液在刀片移动时与所述头部凸起碰撞的同时不向所述头部后方部移动,而是掉落到所述刀片的下部。The liquid medicine separated from the surface of the nozzle mouth by the front part of the head does not move to the rear part of the head while colliding with the head projection when the blade moves, but falls to the blade the lower part.
另一方面,所述角度调节单元包括:设置在所述清洗装置主体210并且使所述第一刀片支撑部件230移动的第一角度调节部件270;设置在所述清洗装置主体210并且使所述第二刀片支撑部件23移动的第二角度调节部件(未示出)。On the other hand, the angle adjusting unit includes: a first
所述第一角度调节部件270与所述第二角度调节部件的结构实际上相同,因此限于所述第一角度调节部件270进行说明。The structures of the first
所述第一角度调节部件270配置在所述第一刀片支撑部件230的后方,并且加压所述第一刀片支撑部件230的后面,进而使所述第一刀片支撑部件230移动的同时调节所述第一刀片250的前端与所述喷嘴唇口113表面之间的相对位置。The first
所述第一角度调节部件270贯通所述第一侧面块211的同时加压所述第一刀片支撑部件230。The first
具体地说,所述第一角度调节部件270包括:以所述第一支撑销部件240的宽度方向中心为基准加压所述第一刀片支撑部件230的上部区域的上部角度调节部件272;加压所述第一刀片支撑部件230的下部区域的下部角度调节部件271。Specifically, the first
在此,在所述第一侧面块211形成有两列以上的贯通孔,该贯通孔包括插入所述上部角度调节部件272而被贯通的第一贯通孔211a、插入所述下部角度调节部件271而被贯通的第二贯通孔211b。Here, two or more rows of through holes are formed in the
所述角度调节部件为了加压刀片支撑部件来调节刀片的设置角度而上下配置两列以上,进而能够更加准确并容易地调节所述刀片的设置角度。The angle adjustment members are arranged in two or more rows up and down in order to press the blade support member to adjust the installation angle of the blades, so that the installation angle of the blades can be adjusted more accurately and easily.
另一方面,所述支撑销单元包括:配置在所述第一刀片支撑部件230上面的第一支撑销部件240;与配置在所述第二刀片支撑部件23上面的第二支撑销部件24。On the other hand, the support pin unit includes: a first
所述第一支撑销部件240配置在所述第一刀片支撑部件230与所述第一刀片250之间,并且成为所述第一刀片250的宽度方向旋转中心,进而在所述第一刀片支撑部件230移动时,使所述第一刀片250的前端平行地接触于所述喷嘴唇口113的表面。The first
所述第一支撑销部件240与所述第二支撑销部件24的结构实际上相同,因此限于所述第一支撑销部件240进行说明。The structures of the first
所述第一支撑销部件240包括:结合于所述第一刀片支撑部件230的销紧固部241;从所述紧固部241延伸形成的同时支撑所述刀片头部253的部分区域的销支撑部243。The first
在所述销紧固部241形成有紧固位置可变区域245,以用于改变结合于所述第一刀片支撑部件230的所述第一支撑销部件240的结合位置。A fastening position
在本实施例中,所述紧固位置可变区域245配置成一个长孔形状,但是本发明并不限定于此,而是也可配置成间隔固定距离的多个孔形状,并且也可配置成固定长度的狭缝形状。In the present embodiment, the fastening position
所述销支撑部243的宽度小于所述销紧固部241的宽度,所述销支撑部243可从所述销紧固部宽度方向的中心区域延伸形成。并且,销支撑部243的宽度具有小于所述刀片头部253的宽度的值。The width of the
当然,本发明并不限定于此,而是所述销支撑部243与销紧固部241具有相同宽度,并且也可具有小于所述刀片头部253的宽度的值。Of course, the present invention is not limited to this, but the
所述销支撑部243的宽度具有小于所述刀片头部253的宽度的值,进而所述销支撑部243是所述刀片头部的宽度方向的旋转中心。The width of the
具体地说,参照图7,与相当于在图7示出的A区域的刀片头部的表面紧贴地接触于喷嘴唇口的表面相反,在所述刀片头部253的剩余区域远离所述喷嘴唇口113的表面的情况下,即所述第一刀片250的前端并未平行地接触于喷嘴唇口13表面的情况下,使用者为使所述第一刀片250的前端与所述喷嘴唇口113的表面平行,首先推动所述下部角度调节部件271,同时加压所述第一刀片支撑部件230的部分区域(即,加压第二支撑部233的下部区域)。Specifically, referring to FIG. 7 , the remaining area of the
另外,使用者调节结合于所述第一支撑部231的第一紧固孔(未示出)的紧固部件,同时可使所述第一刀片支撑部件230对所述第一侧面块211进行移动。In addition, the user adjusts the fastening member coupled to the first fastening hole (not shown) of the first supporting
如此,所述第二支撑部233的下部区域同时加压所述销紧固部241的下部区域后面与所述刀片紧固部251的下部区域后面。In this way, the lower region of the
并且,所述刀片紧固部251的下部区域与延伸形成的所述刀片头部253的下部区域受到从图7的底面向上拉起的方向的力。In addition, the lower region of the
此时,所述销支撑部243支撑所述刀片头部253的同时成为所述刀片头部253的宽度方向旋转中心,所述刀片头部253的上部区域以所述销支撑部243为中心受到图7的底面内侧方向的力的同时进行旋转。At this time, the
最终,所述销支撑部243作用如下:加压所述刀片头部253的后面的同时,使所述刀片头部253带着弹性恢复力被压在所述喷嘴唇口113的表面,同时成为所述刀片头部253的宽度方向的旋转中心,也有助于所述第一刀片250的前端与所述喷嘴唇口113的表面容易构成平行。Finally, the
即,所述销支撑部243对于所述第一刀片250的宽度方向起到与杠杆相同的作用,同时帮助所述第一刀片250的前端与所述喷嘴唇口113的表面平行。That is, the
在此,所述第一支撑销部件240的长度小于所述第一刀片250的长度,并且所述第一支撑销部件240的强度可具有大于所述第一刀片250的强度的值。Here, the length of the first
所述第一支撑销部件240的强度具有大于所述第一刀片250的强度的值,进而所述第一刀片250具有弹性恢复力并且保持被稳定地按压的状态,同时可安装在所述喷嘴唇口表面。The strength of the first
例如,所述第一支撑销部件240由不锈钢制作而成,所述第一刀片250可由树脂制作而成。For example, the first
当然,本发明并不限于上述的实施例,而是所述支撑销部件也可适用于设置有固定宽度的刀片的喷嘴唇口清洗装置。Of course, the present invention is not limited to the above-mentioned embodiment, but the support pin member can also be applied to a nozzle lip cleaning device provided with a blade of a fixed width.
不仅如此,所述支撑销部件也可适用于所述角度调节部件在所述刀片支撑部件的后面中央配置成一列的情况。即,所述支撑销部件作用如下:在所述刀片的前端并未平行地配置于所述喷嘴唇口表面的状态下,若所述角度调节部件加压所述刀片支撑部件的中央后面,则所述支撑销部件的销支撑部成为所述刀片的宽度方向的旋转中心,同时有助于可使所述刀片的前端与喷嘴唇口表面构成平行。In addition, the support pin member can be applied to the case where the angle adjustment members are arranged in a row at the center of the rear of the blade support member. That is, the support pin member functions as follows: when the angle adjustment member presses the center rear of the blade support member in a state where the front end of the blade is not arranged in parallel with the surface of the nozzle mouth, the The pin support portion of the support pin member becomes the center of rotation in the width direction of the blade, and at the same time contributes to making the front end of the blade parallel to the surface of the nozzle mouth.
如上所述,本发明并不限定于上述特定的优选实施例,并且本发明所属技术领域具有通常知识的技术人员在不超出权利要求范围保护的本发明的要点下可实施多种变形,并且该变形属于本发明的范围。As described above, the present invention is not limited to the above-mentioned specific preferred embodiments, and those skilled in the art to which the present invention pertains can implement various modifications without departing from the gist of the present invention protected by the scope of the claims, and the Variations are within the scope of the present invention.
商业利用可能性Commercial availability
本发明能够准确并快速设置用于清除在排放药液之后附着于喷嘴唇口的药液的刀片,同时也能够提高喷嘴唇口的清洁力,因此可利用于狭缝式涂抹装置,因此利用于狭缝式涂抹装置,而该狭缝式涂抹装置使用于在平板显示用基板制造工艺中将各种药液涂抹于基板面的涂抹工艺。The present invention can accurately and quickly set a blade for removing the chemical liquid adhered to the nozzle mouth after discharging the chemical liquid, and at the same time can improve the cleaning power of the nozzle mouth, so it can be used in a slit type applicator, so it can be used in The slit type coating device is used in the coating process of coating various chemical liquids on the substrate surface in the manufacturing process of the substrate for flat panel display.
Claims (12)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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KR10-2014-0172646 | 2014-12-04 | ||
KR1020140172646A KR101578368B1 (en) | 2014-12-04 | 2014-12-04 | Apparatus for cleaning nozzle lip and Slit coater using the same |
PCT/KR2015/013149 WO2016089132A1 (en) | 2014-12-04 | 2015-12-03 | Nozzle lip cleaner and slit coater using same |
Publications (2)
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CN107004621A CN107004621A (en) | 2017-08-01 |
CN107004621B true CN107004621B (en) | 2020-03-17 |
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CN201580066153.9A Active CN107004621B (en) | 2014-12-04 | 2015-12-03 | Nozzle lip cleaning device and slit type smearing device thereof |
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KR (1) | KR101578368B1 (en) |
CN (1) | CN107004621B (en) |
WO (1) | WO2016089132A1 (en) |
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KR102324882B1 (en) * | 2014-12-08 | 2021-11-12 | 주식회사 디엠에스 | Unit for cleaning nozzle lip cleaner |
CN110124920B (en) * | 2019-05-30 | 2020-07-10 | 昆山国显光电有限公司 | Nozzle cleaning device and coating equipment |
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JP3835549B2 (en) * | 2003-03-07 | 2006-10-18 | 株式会社ミヤコシ | Latent image carrier cleaning device |
JP4324538B2 (en) * | 2004-10-04 | 2009-09-02 | 大日本スクリーン製造株式会社 | Substrate processing apparatus and substrate processing method |
JP4578381B2 (en) * | 2005-10-19 | 2010-11-10 | 東京エレクトロン株式会社 | Coating method and coating apparatus |
JPWO2007099848A1 (en) | 2006-03-02 | 2009-07-16 | 株式会社東芝 | Cleaning device, cleaning method, pattern forming device, and pattern forming method |
JP4857193B2 (en) * | 2007-05-28 | 2012-01-18 | 大日本スクリーン製造株式会社 | Nozzle cleaning device |
KR100893670B1 (en) * | 2007-08-10 | 2009-04-20 | 주식회사 케이씨텍 | Nozzle cleaning device and cleaning method |
KR100975129B1 (en) * | 2008-06-27 | 2010-08-11 | 주식회사 디엠에스 | Slit coater with nozzle lip cleaner |
JP5258811B2 (en) * | 2010-02-17 | 2013-08-07 | 東京エレクトロン株式会社 | Slit nozzle cleaning device and coating device |
JP5258812B2 (en) * | 2010-02-17 | 2013-08-07 | 東京エレクトロン株式会社 | Slit nozzle cleaning device and coating device |
KR101328730B1 (en) * | 2012-03-28 | 2013-11-11 | 주식회사 디엠에스 | Slit Coater |
-
2014
- 2014-12-04 KR KR1020140172646A patent/KR101578368B1/en active Active
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2015
- 2015-12-03 CN CN201580066153.9A patent/CN107004621B/en active Active
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KR101578368B1 (en) | 2015-12-18 |
CN107004621A (en) | 2017-08-01 |
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