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CN106970273B - Spiralism type surface potential measurement device based on Electro-optical Modulation - Google Patents

Spiralism type surface potential measurement device based on Electro-optical Modulation Download PDF

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CN106970273B
CN106970273B CN201710201796.0A CN201710201796A CN106970273B CN 106970273 B CN106970273 B CN 106970273B CN 201710201796 A CN201710201796 A CN 201710201796A CN 106970273 B CN106970273 B CN 106970273B
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electro
signal
optic modulator
optic
surface potential
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CN106970273A (en
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张凯
彭吉龙
于钱
聂翔宇
马子良
冯桃君
刘宇明
李蔓
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Beijing Institute of Spacecraft Environment Engineering
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Beijing Institute of Spacecraft Environment Engineering
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/12Measuring electrostatic fields or voltage-potential
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R15/00Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
    • G01R15/14Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks
    • G01R15/24Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using light-modulating devices
    • G01R15/241Adaptations providing voltage or current isolation, e.g. for high-voltage or high-current networks using light-modulating devices using electro-optical modulators, e.g. electro-absorption

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Current Or Voltage (AREA)
  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)

Abstract

The invention discloses a kind of Spiralism type surface potential measurement device based on Electro-optical Modulation, including laser, optical fiber, electrooptic modulator, rotating vane, fixed blade etc., when carrying out potential measurement to measured surface, under the action of tested electrical body, when being grounded rotating vane rotation, periodically cover or open fixed blade, fixed blade is set to induce lasting AC signal, and it exports to electro-optic modulation system and is detected, the optical transport that laser issues is to electrooptic modulator, electric signal is converted to via photodetector is transmitted to after the AC signal modulation loaded, show that electric signal is carried out output observation by output device eventually by signal, and by calculating the final potential value for obtaining testee surface.The present invention combines Spiralism type measurement method with integrated light guide technology, final to realize highly sensitive, high stability and high-precision surface potential measurement.

Description

基于电光调制的旋叶式表面电位测量装置Rotary vane surface potential measurement device based on electro-optic modulation

技术领域technical field

本发明属于航天器空间环境探测技术领域,具体来说,本发明涉及一种基于电光调制的旋叶式表面电位测量装置。The invention belongs to the technical field of spacecraft space environment detection, in particular, the invention relates to a rotary vane surface potential measuring device based on electro-optical modulation.

背景技术Background technique

运行于太空中的卫星由于等离子体中的孤立体效应,导致卫星表面的电位与卫星的结构体以及周遭环境电位不一致,造成卫星表面充电。当卫星表面充电后,可以影响到卫星搭载科学探测设备的测量,甚至发生放电现象。对卫星表面充电的高精度监测有助于进一步了解太空环境对卫星造成的影响,并进一步改善卫星对太空环境的避防措施。另一方面,在探月任务中,月球表面积聚着厚重的月尘,其受太阳及宇宙射线等的照射而呈带电状态,很容易被吸附到探月仪器设备中,对设备的各项功能造成严重的影响。因此,为保证各种设备在登月后的安全使用,在进行登月探测之前,必须对月面各种危害因素进行论证及月球环境进行模拟试验,其中一项较重要的试验项目为月尘表面静电电位的测量,研究月尘的带电性质具有十分重要的工程价值。Due to the isolated body effect in the plasma of satellites operating in space, the potential on the surface of the satellite is inconsistent with the structure of the satellite and the potential of the surrounding environment, causing the surface of the satellite to be charged. When the surface of the satellite is charged, it can affect the measurement of the scientific detection equipment carried by the satellite, and even discharge. High-precision monitoring of satellite surface charging can help further understand the impact of the space environment on satellites and further improve satellites' defenses against the space environment. On the other hand, during lunar exploration missions, thick moon dust accumulates on the surface of the moon, which is charged by the sun and cosmic rays, and is easily absorbed into lunar exploration instruments and equipment, which affects the functions of the equipment. cause serious impact. Therefore, in order to ensure the safe use of various equipment after landing on the moon, before the lunar exploration, it is necessary to demonstrate various hazards on the lunar surface and simulate the lunar environment. One of the more important test items is lunar dust. The measurement of surface electrostatic potential and the study of the charging properties of lunar dust have very important engineering value.

测量物体表面电位的仪器通常分为接触式和非接触式两种,由于接触式仪器在与被测物体接触时会使带电物体静电放电,而使电荷量减少或使带电物体的电容增加,这两个因素都使物体的表面电位降低,因而测出的结果与物体真实带电情况相差较大,所以在测量许多物体的表面电位时更常用的方法是用非接触式测量方法。旋叶式静电计属于常用非接触式测量装置,测试探头部位有一个多等分的扇形旋转叶片,将固定叶片上的感应直流信号变为交流信号。Instruments for measuring the surface potential of objects are usually divided into two types: contact type and non-contact type. Since the contact type instrument will cause the electrostatic discharge of the charged object when it is in contact with the measured object, the charge will be reduced or the capacitance of the charged object will be increased. Both factors reduce the surface potential of the object, so the measured result is quite different from the real charge of the object. Therefore, the non-contact measurement method is more commonly used when measuring the surface potential of many objects. The rotary vane electrometer is a commonly used non-contact measuring device. There is a fan-shaped rotating vane with multiple equal parts at the test probe, which converts the induced DC signal on the fixed vane into an AC signal.

对于表面电位的测量,由于测量过程易受到外界条件影响,因而测量极易出现误差。在对被测位置进行电位测量时,测量读数随时间以指数规律衰减,因此要求测量装置具有很高的输入阻抗,以减小测试误差。For the measurement of surface potential, since the measurement process is easily affected by external conditions, the measurement is prone to errors. When measuring the potential of the measured position, the measurement reading decays exponentially with time, so the measurement device is required to have a high input impedance to reduce the test error.

此外,上述测量方法其探头部分以及输出设备组成的信号传输通路可能成为发射源,从而对被测区域电位产生干扰,同时空间电场在这些设备会产生电磁感应现象,将导致测量结果严重偏离真实值。采用电光调制技术可以有效地使探头部分与信号处理单元进行光电隔离,同时电光晶体具有极高的输入阻抗,因此将旋叶式探头与电光调制器相结合而成的表面电位测量装置可以实现表面电位的高稳定度、高精度测量。In addition, the signal transmission path composed of the probe part and the output device of the above measurement method may become a source of emission, thereby causing interference to the potential of the measured area, and at the same time, the space electric field will generate electromagnetic induction in these devices, which will cause the measurement results to seriously deviate from the true value. . The use of electro-optic modulation technology can effectively isolate the probe part from the signal processing unit. At the same time, the electro-optic crystal has a very high input impedance, so the surface potential measurement device combined with the rotary vane probe and the electro-optic modulator can realize the surface potential. High stability and high precision measurement of potential.

发明内容Contents of the invention

针对表面电位测量中存在的问题,本发明提出一种基于电光调制的旋叶式表面电位测量装置,将电光调制技术与旋叶式探头相结合,可以实现高灵敏度、高稳定度和高精度的空间电场测量能力。Aiming at the problems existing in the surface potential measurement, the present invention proposes a rotary vane surface potential measurement device based on electro-optic modulation, combining the electro-optic modulation technology with the rotary vane probe, which can achieve high sensitivity, high stability and high precision Space electric field measurement capability.

基于电光调制的旋叶式表面电位测量装置,包括激光器、光纤、电光调制器、电极、光电探测器、信号显示输出装置、电机、固定叶片、旋转叶片,其中,用于产生激光的激光器通过光纤传输给电光调制器,经其调制后由光纤传输至光电探测器并转换为电信号,最终通过信号显示输出装置将电信号进行输出观测,并通过计算最终获得被测物体表面的电位值;其中,电光调制器的一对电极分别与旋叶式测试探头相连,测试探头上具有两个金属叶片即固定叶片和旋转叶片,其中旋转叶片为多等份的扇形旋转金属叶片,将固定叶片上的感应直流信号变为交流信号,旋转叶片上有开孔并固定在微型电动机上,由其带动做旋转运动;固定叶片与旋转叶片互补,呈现出整圆的等份叶片,固定安装在电机前并与电光调制器的输入端相连,旋转叶片与电机以及电光调制器的输出端接地,当对被测表面进行电位测量时,在被测带电体的作用下,当接地旋转叶片旋转时,周期性地遮盖或打开固定叶片,使固定叶片感应出持续的交流信号。Rotary vane surface potential measurement device based on electro-optic modulation, including laser, optical fiber, electro-optic modulator, electrode, photodetector, signal display output device, motor, fixed blade, rotating blade, wherein the laser used to generate laser passes through the optical fiber It is transmitted to the electro-optic modulator, and after being modulated, it is transmitted to the photodetector by the optical fiber and converted into an electrical signal, and finally the electrical signal is output and observed through the signal display output device, and the potential value of the surface of the measured object is finally obtained through calculation; , a pair of electrodes of the electro-optic modulator are respectively connected with the rotary vane test probe. There are two metal vanes on the test probe, that is, the fixed vane and the rotary vane. The induced DC signal is converted into an AC signal, and the rotating blade has a hole and is fixed on the micro motor, which is driven to rotate; the fixed blade and the rotating blade complement each other, presenting a full circle of equal parts, fixedly installed in front of the motor and It is connected to the input end of the electro-optic modulator, and the rotating blade is grounded to the motor and the output end of the electro-optic modulator. When the potential measurement is performed on the surface to be measured, under the action of the charged body to be measured, when the grounding rotating blade rotates, periodic Cover or open the fixed vane in a timely manner, so that the fixed vane can induce a continuous AC signal.

其中,固定叶片固定于电动机和旋转叶片之间,随着旋转叶片周期性的遮挡和打开,所测量到的被测表面电压进行周期性变化,最终得到交流信号。Among them, the fixed vane is fixed between the motor and the rotating vane. As the rotating vane is periodically blocked and opened, the measured surface voltage is periodically changed, and finally an AC signal is obtained.

其中,旋转叶片和固定叶片具有四等分的扇形叶片结构。Wherein, the rotating blade and the fixed blade have a quadrant fan-shaped blade structure.

其中,探头上的电压变化,加载在电光调制器信号电极上的电压发生变化,同时电光调制器中的电光晶体的折射率随之改变,导致激光器输出的光在经过电光调制器时产生相位延迟。Among them, the voltage on the probe changes, the voltage loaded on the signal electrode of the electro-optic modulator changes, and the refractive index of the electro-optic crystal in the electro-optic modulator changes accordingly, resulting in a phase delay of the light output by the laser when passing through the electro-optic modulator .

其中,随着电光调制器内两个臂的光会聚发生干涉,其相位的改变将导致光的振幅变化,实现对光强的调制。Among them, as the light convergence of the two arms in the electro-optic modulator interferes, the change of its phase will lead to the change of the amplitude of the light, thereby realizing the modulation of the light intensity.

其中,电光调制器为波导型电光调制器,将交流信号加载到波导型电光调制器上,对经过电光调制器的激光进行调制,然后再经光电探测器将光信号转换为电信号,经处理后即可得到测量值。Among them, the electro-optic modulator is a waveguide-type electro-optic modulator. The AC signal is loaded onto the waveguide-type electro-optic modulator, and the laser light passing through the electro-optic modulator is modulated, and then the optical signal is converted into an electrical signal by a photodetector. Then the measured value can be obtained.

其中,电光调制器为Mach-Zehnder(M-Z)型集成光波导电光强度调制器。Wherein, the electro-optical modulator is a Mach-Zehnder (M-Z) type integrated optical waveguide optical intensity modulator.

本发明中的电光调制器具有输入阻抗高,响应速度快、灵敏度高等优点,且不会对被测区域的电场产生干扰。本发明采用Mach-Zehnder(M-Z)型集成光波导电光强度调制器,具有调制效率高、温度稳定性好、体积小等优点。因此将旋叶式探头与电光调制器的信号电极相连,将旋叶式测量方法与集成光波导技术相结合,最终实现高灵敏度、高稳定度和高精度的表面电位测量。The electro-optic modulator in the invention has the advantages of high input impedance, fast response speed, high sensitivity, etc., and does not generate interference to the electric field in the measured area. The invention adopts a Mach-Zehnder (M-Z) type integrated optical waveguide light intensity modulator, which has the advantages of high modulation efficiency, good temperature stability, small volume and the like. Therefore, the rotary vane probe is connected to the signal electrode of the electro-optic modulator, and the rotary vane measurement method is combined with the integrated optical waveguide technology to finally realize the surface potential measurement with high sensitivity, high stability and high precision.

本发明的基于电光调制的旋叶式表面电位测量装置,将电光调制技术应用于表面电位测量中,具有以下优点:(1)由于电光晶体具有极高的输入阻抗(>1GΩ),所以测量读数随时间的衰减较慢,测量稳定度高,可以有效减小测试误差;(2)由于电光晶体的光电隔离效果,探头部分以及输出设备对被测位置的电位也不会造成影响,同时空间电场也不会对信号输出设备产生电磁干扰;(3)电光调制器具有响应速度快、灵敏度高的特点,本发明中所选用的M-Z型集成光波导型电光强度调制器还具有调制效率高、温度稳定性好、体积小等优点,因此基于电光调制技术结合旋叶式探头可以实现高灵敏度、高稳定性的表面电位测量能力。The electro-optic modulation-based rotary vane surface potential measurement device of the present invention applies the electro-optic modulation technology to the surface potential measurement, and has the following advantages: (1) Since the electro-optic crystal has a very high input impedance (>1GΩ), the measurement reading The attenuation over time is slow and the measurement stability is high, which can effectively reduce the test error; (2) Due to the photoelectric isolation effect of the electro-optic crystal, the probe part and the output device will not affect the potential of the measured position, and the space electric field Also can not produce electromagnetic interference to signal output equipment; (3) electro-optic modulator has the characteristics of fast response speed and high sensitivity, and the M-Z type integrated optical waveguide type electro-optic intensity modulator selected for use in the present invention also has modulation efficiency height, temperature With the advantages of good stability and small size, high-sensitivity and high-stability surface potential measurement capabilities can be achieved based on electro-optical modulation technology combined with a rotary vane probe.

附图说明Description of drawings

图1为本发明的基于电光调制的旋叶式表面电位测量装置的结构示意图。FIG. 1 is a schematic structural diagram of a rotary vane surface potential measuring device based on electro-optic modulation according to the present invention.

图中:1-激光器,2-光纤,3-电光调制器,4-电极,5-光电探测器,6-信号显示输出装置,7-电机,8-固定叶片,9-旋转叶片,10-被测表面。In the figure: 1-laser, 2-fiber, 3-electro-optic modulator, 4-electrode, 5-photodetector, 6-signal display output device, 7-motor, 8-fixed blade, 9-rotating blade, 10- measured surface.

具体实施方式Detailed ways

以下介绍的是作为本发明所述内容的具体实施方式,下面通过具体实施方式对本发明的所述内容作进一步的阐明。当然,描述下列具体实施方式只为示例本发明的不同方面的内容,而不应理解为限制本发明范围。The following is a specific implementation manner of the content of the present invention, and the content of the present invention will be further clarified through the specific implementation mode below. Of course, the following specific embodiments are described only to illustrate different aspects of the present invention, and should not be construed as limiting the scope of the present invention.

参见图1,图1显示了基于电光调制的旋叶式表面电位测量装置的结构示意图。其中,本发明的基于电光调制的旋叶式表面电位测量装置,包括激光器1、光纤2、电光调制器3、电极4、光电探测器5、信号显示输出装置6、电机7、固定叶片8、旋转叶片9,固定叶片8固定于电动机7和旋转叶片9之间,旋转叶片和固定叶片具有四等分的扇形叶片结构,随着旋转叶片9周期性的遮挡和打开,所测量到的被测表面10的电压进行周期性变化,最终得到交流信号。其中,用于产生激光的激光器1通过光纤2传输给电光调制器3,经其调制后由光纤2传输至光电探测器5并转换为电信号,最终通过信号显示输出装置6将电信号进行输出观测,并通过计算最终获得被测物体10表面的电位值;其中,电光调制器3的一对电极分别与旋叶式测试探头相连,测试探头上具有两个金属叶片即固定叶片8和旋转叶片9,其中旋转叶片9为4等份的扇形旋转叶片,将固定叶片8上的感应直流信号变为交流信号,旋转叶片9上有开孔并固定在微型电动机7上,由其带动做旋转运动;固定叶片8与旋转叶片9互补,呈现出整圆的等份叶片,固定安装在电机7前并与电光调制器3的输入端相连,旋转叶片9与电机7以及电光调制器3的输出端接地,当对被测表面进行电位测量时,在被测带电体的作用下,当接地旋转叶片9旋转时,周期性地遮盖或打开固定叶片,使固定叶片8感应出持续的交流信号。Referring to FIG. 1 , FIG. 1 shows a schematic structural diagram of a rotary vane surface potential measurement device based on electro-optical modulation. Among them, the rotary vane surface potential measuring device based on electro-optic modulation of the present invention includes a laser 1, an optical fiber 2, an electro-optic modulator 3, an electrode 4, a photodetector 5, a signal display output device 6, a motor 7, a fixed blade 8, The rotating blade 9 and the fixed blade 8 are fixed between the motor 7 and the rotating blade 9. The rotating blade and the fixed blade have a quadrant fan-shaped blade structure. As the rotating blade 9 is periodically blocked and opened, the measured measured The voltage on the surface 10 changes periodically, and finally an AC signal is obtained. Among them, the laser 1 used to generate laser light is transmitted to the electro-optic modulator 3 through the optical fiber 2, and after being modulated by the optical fiber 2, it is transmitted to the photodetector 5 and converted into an electrical signal, and finally the electrical signal is output through the signal display output device 6 Observe, and finally obtain the potential value of the surface of the measured object 10 through calculation; wherein, a pair of electrodes of the electro-optic modulator 3 are connected to the rotary vane test probe respectively, and the test probe has two metal vanes, namely, the fixed vane 8 and the rotating vane 9, wherein the rotating blade 9 is a fan-shaped rotating blade of 4 equal parts, which converts the induced DC signal on the fixed blade 8 into an AC signal, and the rotating blade 9 has a hole and is fixed on the micro-motor 7, which is driven to rotate ; The fixed blade 8 is complementary to the rotating blade 9, presents a full circle equal portion blade, is fixedly installed in front of the motor 7 and is connected with the input end of the electro-optic modulator 3, and the rotating blade 9 is connected with the output end of the motor 7 and the electro-optic modulator 3 Grounding, when measuring the potential of the surface under test, under the action of the charged body under test, when the grounding rotating blade 9 rotates, the fixed blade is periodically covered or opened, so that the fixed blade 8 induces a continuous AC signal.

在具体的实施方式中,探头上的电压变化,加载在电光调制器3信号电极上的电压发生变化,同时电光调制器3中的电光晶体的折射率随之改变,导致激光器输出的光在经过电光调制器3中的两个臂时,分别产生了大小相同符号相反的相位延迟。随着两个臂的光会聚发生干涉,其相位的改变将导致光的振幅变化,实现对光强的调制。In a specific embodiment, the voltage on the probe changes, the voltage applied to the signal electrode of the electro-optic modulator 3 changes, and at the same time, the refractive index of the electro-optic crystal in the electro-optic modulator 3 changes accordingly, causing the light output by the laser to pass through When the two arms in the electro-optic modulator 3 respectively generate phase delays with the same magnitude and opposite signs. As the light convergence of the two arms interferes, a change in its phase will result in a change in the amplitude of the light, enabling modulation of the light intensity.

测量系统通过探头来感知被测物表面的电位,探头部分采用旋叶式设计,属于非接触式测量。电光调制器(3)的一对电极(4)与旋叶式探头相连。电光调制器选取集成光波导强度调制器例如Mach-Zehnder(M-Z)型集成光波导电光强度调制器,被检测信号对光强的调制不受自然双折射产生的位相延迟的影响,因此其具有良好的温度特性。同时,由于检测的地电极与接收电路的地相隔离,基于电光调制器的表面电位检测可以实现低噪声、抗干扰测量。The measurement system senses the potential on the surface of the measured object through the probe, and the probe part adopts a rotary vane design, which belongs to non-contact measurement. A pair of electrodes (4) of the electro-optic modulator (3) is connected with the rotary vane probe. The electro-optical modulator chooses an integrated optical waveguide intensity modulator such as a Mach-Zehnder (M-Z) type integrated optical waveguide optical intensity modulator. The modulation of the light intensity by the detected signal is not affected by the phase delay caused by natural birefringence, so it has good performance. temperature characteristics. At the same time, since the ground electrode of the detection is isolated from the ground of the receiving circuit, the surface potential detection based on the electro-optic modulator can realize low-noise and anti-interference measurement.

尽管上文对本发明的具体实施方式给予了详细描述和说明,但是应该指明的是,本领域的技术人员可以依据本发明的精神对上述实施方式进行各种等效改变和修改,其所产生的功能作用在未超出说明书及附图所涵盖的精神时,均应在本发明保护范围之内。Although the specific embodiments of the present invention have been described and illustrated in detail above, it should be noted that those skilled in the art can make various equivalent changes and modifications to the above embodiments according to the spirit of the present invention, and the resulting When the functional effect does not exceed the spirit covered by the specification and drawings, it shall be within the protection scope of the present invention.

Claims (7)

1.基于电光调制的旋叶式表面电位测量装置,包括激光器、光纤、电光调制器、电极、光电探测器、信号显示输出装置、电机、固定叶片、旋转叶片,其中,用于产生激光的激光器通过光纤传输给电光调制器,经其调制后由光纤传输至光电探测器并转换为电信号,最终通过信号显示输出装置将电信号进行输出观测,并通过计算最终获得被测物体表面的电位值;其中,电光调制器的一对电极分别与旋叶式测试探头相连,测试探头上具有两个金属叶片即固定叶片和旋转叶片,其中旋转叶片为多等份的扇形旋转金属叶片,将固定叶片上的感应直流信号变为交流信号,旋转叶片上有开孔并固定在电机上,由其带动做旋转运动;固定叶片与旋转叶片互补,呈现出整圆的等份叶片,固定安装在电机前并与电光调制器的输入端相连,旋转叶片与电机以及电光调制器的输出端接地,当对被测表面进行电位测量时,在被测带电体的作用下,当接地旋转叶片旋转时,周期性地遮盖或打开固定叶片,使固定叶片感应出持续的交流信号。1. Rotary vane surface potential measurement device based on electro-optical modulation, including laser, optical fiber, electro-optic modulator, electrode, photodetector, signal display output device, motor, fixed blade, rotating blade, among them, the laser used to generate laser It is transmitted to the electro-optic modulator through the optical fiber, and after being modulated, it is transmitted to the photodetector and converted into an electrical signal, and finally the electrical signal is output and observed through the signal display output device, and the potential value of the surface of the measured object is finally obtained by calculation. ; Wherein, a pair of electrodes of the electro-optic modulator is connected with the rotary vane test probe respectively, and the test probe has two metal blades, namely a fixed blade and a rotating blade, wherein the rotating blade is a fan-shaped rotating metal blade with multiple equal parts, and the fixed blade The induced DC signal on the motor turns into an AC signal, and the rotating blade has a hole and is fixed on the motor, which drives it to rotate; the fixed blade and the rotating blade complement each other, presenting a full circle of equal parts, fixedly installed in front of the motor And connected to the input end of the electro-optic modulator, the rotating blade is grounded with the motor and the output end of the electro-optic modulator. Cover or open the fixed vane selectively, so that the fixed vane can induce a continuous AC signal. 2.如权利要求1所述的基于电光调制的旋叶式表面电位测量装置,其中,固定叶片固定于电动机和旋转叶片之间,随着旋转叶片周期性的遮挡和打开,所测量到的被测表面电压进行周期性变化,最终得到交流信号。2. The electro-optical modulation based rotary vane surface potential measuring device according to claim 1, wherein the fixed vane is fixed between the motor and the rotating vane, and as the rotating vane is periodically blocked and opened, the measured The measured surface voltage changes periodically, and finally an AC signal is obtained. 3.如权利要求1所述的基于电光调制的旋叶式表面电位测量装置,其中,旋转叶片和固定叶片具有四等分的扇形叶片结构。3. The electro-optic modulation-based rotary vane surface potential measurement device according to claim 1, wherein the rotary vane and the fixed vane have a quadrant fan-shaped vane structure. 4.如权利要求1-3任一项所述的基于电光调制的旋叶式表面电位测量装置,其中,旋叶式测试探头上的电压变化,加载在电光调制器信号电极上的电压发生变化,同时电光调制器中的电光晶体的折射率随之改变,导致激光器输出的光在经过电光调制器时产生相位延迟。4. The rotary vane surface potential measuring device based on electro-optic modulation according to any one of claims 1-3, wherein the voltage on the rotary vane test probe changes, and the voltage loaded on the signal electrode of the electro-optic modulator changes , and at the same time, the refractive index of the electro-optic crystal in the electro-optic modulator changes accordingly, resulting in a phase delay of the light output by the laser when passing through the electro-optic modulator. 5.如权利要求1-3任一项所述的基于电光调制的旋叶式表面电位测量装置,其中,随着电光调制器内两个臂的光会聚发生干涉,其相位的改变将导致光的振幅变化,实现对光强的调制。5. The electro-optic modulation-based rotary vane surface potential measurement device according to any one of claims 1-3, wherein, as the light convergence of the two arms in the electro-optic modulator interferes, the change of its phase will cause the light The amplitude change of the signal realizes the modulation of the light intensity. 6.如权利要求1-3任一项所述的基于电光调制的旋叶式表面电位测量装置,其中,电光调制器为波导型电光调制器,将交流信号加载到波导型电光调制器上,对经过电光调制器的激光进行调制,然后再经光电探测器将光信号转换为电信号,经处理后即可得到测量值。6. The rotary vane surface potential measuring device based on electro-optic modulation according to any one of claims 1-3, wherein the electro-optic modulator is a waveguide-type electro-optic modulator, and the AC signal is loaded on the waveguide-type electro-optic modulator, The laser light passed through the electro-optic modulator is modulated, and then the optical signal is converted into an electrical signal by the photodetector, and the measured value can be obtained after processing. 7.如权利要求1-3任一项所述的基于电光调制的旋叶式表面电位测量装置,其中,电光调制器为Mach-Zehnder(M-Z)型集成光波导电光强度调制器。7. The electro-optic modulation-based rotary vane surface potential measurement device according to any one of claims 1-3, wherein the electro-optic modulator is a Mach-Zehnder (M-Z) type integrated optical waveguide light intensity modulator.
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