CN106970045A - A kind of transmission-type coating substances apparatus for measuring refractive index - Google Patents
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Abstract
Description
技术领域technical field
本发明属于光学仪器领域，更具体地，涉及一种透射式薄层物质折射率测量装置。The invention belongs to the field of optical instruments, and more specifically relates to a device for measuring the refractive index of a transmissive thin-layer material.
背景技术Background technique
折射率是物质的重要物理参数之一，人们常利用光在界面上临界角附近的反射特性，完成折射率测量，如：著名的阿贝折光计。这种测量装置原理简单、测量精确，在各行各业得到了广泛的应用。传统的目视阿贝折光计需要取样和手动对准，人眼通过目镜对准，测量效率不高，精度也将受到影响，无法满足自动在线测量要求。Refractive index is one of the important physical parameters of matter. People often use the reflection characteristics of light near the critical angle on the interface to complete the refractive index measurement, such as the famous Abbe refractometer. This kind of measuring device has simple principle and accurate measurement, and has been widely used in various industries. The traditional visual Abbe refractometer requires sampling and manual alignment. The human eye is aligned through the eyepiece, the measurement efficiency is not high, and the accuracy will also be affected, which cannot meet the requirements of automatic online measurement.
此外，阿贝折光计这种装置测量不同物质时会受到一定限制：对于液体，需要取样较多，这种限制对于价值昂贵液体不适用；对于固体，薄片测量，对准误差取决于操作者的经验，长时间测量将带来更大误差。In addition, the Abbe refractometer is subject to certain limitations when measuring different substances: for liquids, more samples are required, and this limitation is not applicable for expensive liquids; for solids and thin slices, the alignment error depends on the operator's Experience, long-term measurement will bring greater error.
在生物、医药、半导体、化工、光学等行业，存在大量薄膜和价值昂贵液体需要精确测量其折射率。在传统光学中，对于光学薄膜和少量微量液体等的折射率测量存在着一个问题：与棱镜接触的待测物质下表面发生全反射，未经处理的上表面将产生杂散光信号，这将影响系统的测量性能，。In biological, pharmaceutical, semiconductor, chemical, optical and other industries, there are a large number of thin films and expensive liquids that need to accurately measure their refractive index. In traditional optics, there is a problem in the measurement of the refractive index of optical films and small amounts of liquids: total reflection occurs on the lower surface of the substance to be measured in contact with the prism, and stray light signals will be generated on the untreated upper surface, which will affect The measurement performance of the system, .
目前，需要开发一种新的装置或者方法以满足薄膜和价值昂贵液体的折射率的精确测。At present, it is necessary to develop a new device or method to meet the precise measurement of the refractive index of thin films and expensive liquids.
发明内容Contents of the invention
针对现有技术的以上缺陷或改进需求，本发明提供了一种透射式薄层物质折射率测量装置，其目的在于，通过设计透射测量模块，能用于测量薄膜、少量或价值昂贵液体的折射率。Aiming at the above defects or improvement needs of the prior art, the present invention provides a transmission-type thin-layer material refractive index measurement device, the purpose of which is to measure the refraction of thin films, small amounts or expensive liquids Rate.
为实现上述目的，本发明提供了一种透射式薄层物质折射率测量装置，其包括透射测量模块，该透射测量模块包括第一棱镜、第二棱镜以及用于测量时容置待测对象的间隙，所述间隙为第一棱镜的测量面和第二棱镜的测量面相聚的间隔，所述间隙的高度为100nm～2mm。In order to achieve the above object, the present invention provides a transmission-type thin-layer material refractive index measurement device, which includes a transmission measurement module, the transmission measurement module includes a first prism, a second prism and a prism for accommodating the object to be measured during measurement. A gap, the gap is the gap where the measurement surface of the first prism and the measurement surface of the second prism converge, and the height of the gap is 100nm-2mm.
进一步的，所述间隙的高度为300nm～2mm。Further, the height of the gap is 300nm-2mm.
进一步的，所述间隙的高度为600nm～50μm。Further, the height of the gap is 600 nm˜50 μm.
进一步的，所述第一棱镜和所述第二棱镜为结构相同、折射率相同的等腰棱镜。Further, the first prism and the second prism are isosceles prisms with the same structure and the same refractive index.
进一步的，所述第一棱镜和所述第二棱镜为结构不相同、折射率不相同的等腰棱镜。Further, the first prism and the second prism are isosceles prisms with different structures and different refractive indices.
进一步的，所述第一棱镜的一个等腰侧面为入射面，所述第一棱镜的底面为测量面，所述第二棱镜的一个等腰侧面为入射面，所述第二棱镜的底面为测量面。Further, one isosceles side surface of the first prism is the incident surface, the bottom surface of the first prism is the measurement surface, one isosceles side surface of the second prism is the incident surface, and the bottom surface of the second prism is measuring surface.
进一步的，所述透射测量模块中，所述第一棱镜和所述第二棱镜的底面相对且相隔间隙设置。Further, in the transmission measurement module, the bottom surfaces of the first prism and the second prism are opposite and arranged with a gap therebetween.
进一步的，还包括光源，输入耦合光学模块，输出耦合光学模块，阵列器件，图像采集分析系统，其中，所述光源用于产生发散光束；所述输入耦合光学模块用于接受来自光源的光散光束并将其聚焦或发散，所述透射测量模块设置在所述输入耦合光学模块的出射光方向上，用于容置待测对象并对其进行测量，所述输出耦合光学模块设置在所述透射测量模块的透射光方向上，用于收集带有待测对象折射率信息的透射光，所述阵列器件用于接受带有待测对象折射率信息的透射光，并将其转化为光电信号，所述图像采集分析系统用于对所述光电信号进行处理和分析，以直接输出待测对象的折射率。Further, it also includes a light source, an input coupling optical module, an output coupling optical module, an array device, and an image acquisition and analysis system, wherein the light source is used to generate divergent light beams; the input coupling optical module is used to accept the scattered light from the light source The light beam is focused or diverged, the transmission measurement module is set on the outgoing light direction of the input coupling optical module, and is used to accommodate and measure the object to be measured, and the output coupling optical module is set on the In the transmitted light direction of the transmission measurement module, it is used to collect the transmitted light with the refractive index information of the object to be measured, and the array device is used to receive the transmitted light with the refractive index information of the object to be measured and convert it into a photoelectric signal , the image acquisition and analysis system is used to process and analyze the photoelectric signal, so as to directly output the refractive index of the object to be measured.
进一步的，工作时，从光源射出的光线经输入耦合光学模块后射入至第一棱镜的入射面，发生第一次折射，接着入射至第一棱镜的测量面，发生第二次折射，进一步入射至待测对象中，接着，光线入射至第二棱镜的测量面，发生第三次折射，进入第二棱镜中，最后，在第二棱镜的出射面发生第四次折射，透射的光线进入输出耦合光学模块，从输出耦合光学模块中输出的光被阵列器件接受。由于耦合光学模块输出的光线为会聚或者发散形式，其在第一棱镜测量面上的入射角各不相同，其中包括临界角，光线根据在第一棱镜测量面上的入射角不同而透射光能量不同，大于临界角的光发生全反射而无透射光，小于临界角的光发生折射而具有透射光，从而会使最终从第二棱镜射出的透射光形成具有明暗界限的光斑，该明暗界限与临界角具有对应关系，该临界角和待测对象的折射率具有对应关系，依此原理可获得待测对象的折射率。Further, when working, the light emitted from the light source enters the incident surface of the first prism through the input coupling optical module, where the first refraction occurs, and then enters the measurement surface of the first prism, where the second refraction occurs, further Incidence into the object to be measured, then, the light is incident on the measurement surface of the second prism, refracted for the third time, and enters the second prism, finally, the fourth refraction occurs on the exit surface of the second prism, and the transmitted light enters The output coupling optical module, the light output from the output coupling optical module is received by the array device. Since the light output by the coupling optical module is converging or diverging, its incident angles on the first prism measuring surface are different, including the critical angle, and the light transmits light energy according to the different incident angles on the first prism measuring surface Different, the light greater than the critical angle undergoes total reflection without transmitted light, and the light less than the critical angle undergoes refraction and has transmitted light, so that the transmitted light finally emitted from the second prism forms a light spot with a bright and dark boundary. The light and dark boundary is the same as The critical angle has a corresponding relationship, and the critical angle has a corresponding relationship with the refractive index of the object to be measured, and the refractive index of the object to be measured can be obtained according to this principle.
本发明在于提出一种薄层物质的折射率测量装置，针对透明介质通过两块棱镜构成测量光学系统，不仅实现薄层物质的折射率测量，而且经过玻璃-物质和物质-玻璃两次透射具有显著提升信号特征的特点。The present invention is to propose a device for measuring the refractive index of a thin-layer material. For a transparent medium, two prisms are used to form a measuring optical system, which not only realizes the measurement of the refractive index of a thin-layer material, but also has two transmissions through glass-substance and substance-glass. Significantly improved signal signature features.
总体而言，通过本发明所构思的以上技术方案与现有技术相比，能够取得下列有益效果：Generally speaking, compared with the prior art, the above technical solutions conceived by the present invention can achieve the following beneficial effects:
本发明设计了透射测量模块，该透射测量模块包括第一棱镜、第二棱镜以及用于测量时容置待测对象的间隙，所述间隙为第一棱镜的测量面和第二棱镜的测量面相聚间隔而形成，间隙的高度为100nm～2mm，测量时，将待测薄层物质，譬如为薄膜、少量或昂贵的待测液体置于间隙内，第一棱镜的测量面和待测对象形成第一界面、第二棱镜与待测对象形成第二界面，设计两个界面，或者说，设计一个间隙用于容置待测的薄膜、昂贵液体，使光线在两个界面处同时发生折射，收集折射光，避免了传统折射率测量过程中，光线在待测物质和空气的界面发生反射或者折射后对测量需采集光线的干扰，避免了杂散光的干扰后，可实现对薄层物质或者昂贵液体折射率的测量。The present invention designs a transmission measurement module, which includes a first prism, a second prism and a gap for accommodating the object to be measured during measurement, the gap being the measurement surface of the first prism and the measurement surface of the second prism It is formed by gathering at intervals, and the height of the gap is 100nm to 2mm. When measuring, place the thin-layer substance to be measured, such as a thin film, a small amount or expensive liquid to be measured, in the gap, and the measurement surface of the first prism and the object to be measured form. The first interface, the second prism and the object to be measured form the second interface, and two interfaces are designed, or in other words, a gap is designed to accommodate the film and expensive liquid to be tested, so that the light is refracted at the two interfaces at the same time, Collecting refracted light avoids the interference of light collected for measurement after light is reflected or refracted at the interface between the material to be measured and air in the traditional refractive index measurement process. After avoiding the interference of stray light, it can achieve thin-layer material or Measurement of the refractive index of expensive liquids.
附图说明Description of drawings
图1是本发明实施中一种薄层物质折射率测量装置的整体结构示意图。Fig. 1 is a schematic diagram of the overall structure of a device for measuring the refractive index of thin-layer materials in the practice of the present invention.
在所有附图中，相同的附图标记用来表示相同的元件或结构，其中：Throughout the drawings, the same reference numerals are used to designate the same elements or structures, wherein:
1为光源，2为输入耦合光学模块，3为第一棱镜，4为待测对象，其为固体或者液体状的薄层物质，5为第二棱镜，6为输出耦合光学模块，7为阵列器件，8为图像采集分析系统。1 is the light source, 2 is the input coupling optical module, 3 is the first prism, 4 is the object to be measured, which is a solid or liquid thin layer substance, 5 is the second prism, 6 is the output coupling optical module, 7 is the array device, 8 is an image acquisition and analysis system.
图2是本发明实施中两次透射增强信号的示意图。Fig. 2 is a schematic diagram of two transmission enhancement signals in the practice of the present invention.
具体实施方式detailed description
为了使本发明的目的、技术方案及优点更加清楚明白，以下结合附图及实施例，对本发明进行进一步详细说明。应当理解，此处所描述的具体实施例仅仅用以解释本发明，并不用于限定本发明。此外，下面所描述的本发明各个实施方式中所涉及到的技术特征只要彼此之间未构成冲突就可以相互组合。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not constitute a conflict with each other.
图1是本发明实施中一种薄层物质折射率测量装置的整体结构示意图，由图可知，其包括光源1，输入耦合光学模块2，透射测量模块、输出耦合光学模块6，阵列器件7，图像采集分析系统8。1 is a schematic diagram of the overall structure of a device for measuring the refractive index of a thin-layer material in the implementation of the present invention. It can be seen from the figure that it includes a light source 1, an input coupling optical module 2, a transmission measurement module, an output coupling optical module 6, and an array device 7. Image acquisition and analysis system8.
其中，所述光源1用于产生发散光束；所述输入耦合光学模块2用于接受来自光源1的光散光束并将其聚焦或发散，所述透射测量模块设置在所述输入耦合光学模块2的出射光方向上，用于容置待测对象4并对其折射率进行测量以获得折射率原始信息，所述输出耦合光学模块6设置在所述透射测量模块的透射光方向上，用于收集带有待测对象折射率信息的透射光，所述阵列器件7用于接受带有待测对象折射率信息的透射光，并将其转化为光电信号，所述图像采集分析系统8用于对所述光电信号进行处理和分析，以直接输出待测对象的折射率数值。Wherein, the light source 1 is used to generate a divergent light beam; the input coupling optical module 2 is used to receive the light scattered light beam from the light source 1 and focus or diverge it, and the transmission measurement module is arranged on the input coupling optical module 2 In the direction of the outgoing light, it is used to accommodate the object 4 to be measured and measure its refractive index to obtain the original information of the refractive index. The output coupling optical module 6 is arranged in the direction of the transmitted light of the transmission measurement module for Collecting the transmitted light with the refractive index information of the object to be measured, the array device 7 is used to accept the transmitted light with the refractive index information of the object to be measured, and convert it into a photoelectric signal, and the image acquisition and analysis system 8 is used to The photoelectric signal is processed and analyzed to directly output the refractive index value of the object to be measured.
在本发明的一个实施例中，所述透射测量模块包括第一棱镜3、第二棱镜5以及用于测量时容置待测对象的间隙，所述间隙为第一棱镜3的测量面和第二棱镜5的测量面相聚间隔而形成，所述间隙的高度为100nm～2mm。In one embodiment of the present invention, the transmission measurement module includes a first prism 3, a second prism 5, and a gap for accommodating the object to be measured during measurement, and the gap is the measurement surface of the first prism 3 and the second prism. The measuring surfaces of the two prisms 5 are converging and formed at intervals, and the height of the gap is 100nm-2mm.
作为优选，所述间隙的高度为500nm～2mm，作为进一步的优选，所述间隙的高度为500nm～50μm。Preferably, the height of the gap is 500 nm to 2 mm, and further preferably, the height of the gap is 500 nm to 50 μm.
在本发明的又一个实施例中，所述第一棱镜3和所述第二棱镜5为结构相同、折射率相同的等腰棱镜。或者所述第一棱镜3和所述第二棱镜5为结构不相同、折射率不相同的等腰棱镜。In yet another embodiment of the present invention, the first prism 3 and the second prism 5 are isosceles prisms with the same structure and the same refractive index. Or the first prism 3 and the second prism 5 are isosceles prisms with different structures and different refractive indices.
在本发明的又一个实施例中，所述第一棱镜3的一个等腰侧面为入射面，所述第一棱镜3的底面为测量面，所述第二棱镜5的一个等腰侧面为入射面，所述第二棱镜5的底面为测量面。所述透射测量模块中，所述第一棱镜3和所述第二棱镜5的底面相对且相隔间隙设置。In yet another embodiment of the present invention, one isosceles side surface of the first prism 3 is the incident surface, the bottom surface of the first prism 3 is the measurement surface, and one isosceles side surface of the second prism 5 is the incident surface. surface, and the bottom surface of the second prism 5 is the measurement surface. In the transmission measurement module, the bottom surfaces of the first prism 3 and the second prism 5 are opposite and arranged with a gap therebetween.
利用本发明装置进行薄膜，微量液体，或者昂贵液体折射率测量的工作过程如下：The working process of using the device of the present invention to measure the refractive index of thin films, trace liquids, or expensive liquids is as follows:
首先，将待测对象放置在间隙中，进行测量前的准备工作，准备完毕后，开启光源进行测量。Firstly, the object to be measured is placed in the gap, and the preparatory work before measurement is carried out. After the preparation is completed, the light source is turned on for measurement.
接着，光源1出射的光线射入输入耦合光学模块2中，输入耦合光学模块2用于接受来自光源1的光束并将其聚焦或发散，以形成会聚或者发散的光束，Next, the light emitted by the light source 1 enters the input coupling optical module 2, and the input coupling optical module 2 is used to receive the light beam from the light source 1 and focus or diverge it to form a converging or diverging light beam,
然后，该会聚或者发散的光束入射至耦合光学模块2的第一棱镜3的入射面S1，光线发生第一次折射，接着入射至第一棱镜3的测量面(也即底面)，发生第二次折射，进一步入射至待测对象4中，Then, the converging or diverging light beam is incident on the incident surface S1 of the first prism 3 of the coupling optical module 2, the light refracts for the first time, and then enters the measuring surface (that is, the bottom surface) of the first prism 3, and the second refraction occurs. secondary refraction, further incident into the object to be measured 4,
接着，光线入射至第二棱镜5的测量面，发生第三次折射，进入第二棱镜5中，Then, the light is incident on the measuring surface of the second prism 5, refracted for the third time, and enters the second prism 5,
最后，在第二棱镜的出射面S4发生第四次折射，透射的光线进入输出耦合光学模块6，所述输出耦合光学模块6设置在所述透射测量模块的透射光方向上，用于收集带有待测对象折射率信息的透射光，从输出耦合光学模块6中输出的光线被阵列器件7接受，所述阵列器件7用于接受带有待测对象折射率信息的透射光，并将其转化为光电信号，所述图像采集分析系统8用于对所述光电信号进行处理和分析，以直接输出待测对象的折射率数值。Finally, the fourth refraction occurs on the exit surface S4 of the second prism, and the transmitted light enters the output coupling optical module 6, and the output coupling optical module 6 is arranged on the transmitted light direction of the transmission measurement module for collecting band The transmitted light with the refractive index information of the object to be measured, the light output from the output coupling optical module 6 is accepted by the array device 7, and the array device 7 is used to accept the transmitted light with the refractive index information of the object to be measured, and convert it to Converted into a photoelectric signal, the image acquisition and analysis system 8 is used to process and analyze the photoelectric signal, so as to directly output the refractive index value of the object to be measured.
在实际工程中，如果S3面为待测对象与空气形成的界面，也即，直接将待测物质置于棱镜3表面，物质的上表面将会发射回较多的光能量，该部分的光能量相对于S2面的反射光能量是一种干扰，也即系统的杂散光。这部分杂散光会对系统的折射率测量形成较大干扰，使系统的测量结果不准确，甚至完全错误。如果待测物质为液滴，上表面将形成一个曲面，光在上表面甚至会发生全发射，造成更严重的干扰。本发明装置中，将待测物质置于两个棱镜形成的间隙中，使得待测对象上表面的光尽量多的透射，大幅度减少了反射光。In actual engineering, if the S3 surface is the interface formed between the object to be measured and the air, that is, if the substance to be measured is directly placed on the surface of the prism 3, the upper surface of the substance will emit back more light energy, and the light of this part The energy relative to the reflected light energy of the S2 surface is a kind of interference, that is, the stray light of the system. This part of stray light will greatly interfere with the measurement of the refractive index of the system, making the measurement results of the system inaccurate or even completely wrong. If the substance to be measured is a droplet, the upper surface will form a curved surface, and the light will even be fully emitted on the upper surface, causing more serious interference. In the device of the present invention, the substance to be measured is placed in the gap formed by two prisms, so that the light on the upper surface of the object to be measured is transmitted as much as possible, and the reflected light is greatly reduced.
本发明中，主要改进点在于巧妙通过两块棱镜设置了间隙，该间隙用于在测量或者装置工作时放置待测液体或者薄膜，待测液体或者薄膜分别与第一棱镜3以及第二棱镜5形成界面S2以及界面S3，由于界面S3的存在，避免了由于待测对象较薄，待测对象的上下两个面对于测量光同时反射和折射后，对测量需要收集光线的干扰，避免了杂散光的干扰后，就能测量获得薄层物质或者昂贵液体的折射率了。In the present invention, the main improvement is that a gap is cleverly provided by two prisms, and the gap is used to place the liquid or film to be measured during measurement or device operation. The liquid to be measured or film is connected to the first prism 3 and the second prism 5 respectively. The interface S2 and the interface S3 are formed. Due to the existence of the interface S3, the object to be measured is thin, and the upper and lower surfaces of the object to be measured reflect and refract the measurement light at the same time. After the interference of astigmatism, the refractive index of thin-layer materials or expensive liquids can be measured.
本发明中，由于耦合光学模块输出的光线为会聚或者发散形式，其在第一棱镜测量面上的入射角各不相同，其中包括临界角，光线根据在第一棱镜测量面上的入射角不同而透射光能量不同，大于临界角的光发生全反射而无透射光，小于临界角的光发生折射而具有透射光，从而会使最终从第二棱镜射出的透射光形成具有明暗界限的光斑，该明暗界限与临界角具有对应关系，该临界角和待测对象的折射率具有对应关系，依此原理可获得待测对象的折射率。In the present invention, since the light output by the coupling optical module is in the form of convergence or divergence, its incident angles on the first prism measurement surface are different, including the critical angle, and the light rays are different according to the incident angles on the first prism measurement surface. The energy of the transmitted light is different. The light greater than the critical angle is totally reflected without transmitted light, and the light smaller than the critical angle is refracted to have transmitted light, so that the transmitted light finally emitted from the second prism forms a light spot with a bright and dark boundary. The light-dark boundary has a corresponding relationship with the critical angle, and the critical angle has a corresponding relationship with the refractive index of the object to be measured, and the refractive index of the object to be measured can be obtained according to this principle.
本发明的测量原理是常见的，其巧妙之处在于光路的结构设计，具体的，待测量的透明介质(也是待测量的薄膜或者昂贵液体)通过两块棱镜构成测量光学系统，不仅实现薄层物质的折射率测量，而且经过玻璃-待测物质和待测物质-玻璃两次透射，大于临界角的光束将由于两次折射过程中发生全反射，能量透射率接近为0；而小于临界角的光束将由于两次折射过程中发生两次折射透射，能量透射率接近为1。明暗界限的光斑中明暗对比度将提升，如图2所示，图2是本发明实施中两次透射增强信号的示意图，这样，两次透射使得本发明装置具有显著提升信号特征的优点。The measurement principle of the present invention is common, and its ingenuity lies in the structural design of the optical path. Specifically, the transparent medium to be measured (also the film or expensive liquid to be measured) constitutes a measurement optical system through two prisms, which not only realizes thin-layer The refractive index of the substance is measured, and through the glass-substance to be measured and the substance to be measured-glass transmitted twice, the beam greater than the critical angle will be totally reflected due to the two refraction processes, and the energy transmittance is close to 0; while the beam smaller than the critical angle The light beam will be transmitted due to two refractions in the two refraction processes, and the energy transmittance is close to 1. The light-dark contrast in the light spot at the light-dark boundary will be improved, as shown in Figure 2, which is a schematic diagram of the double-transmission enhanced signal in the implementation of the present invention, so that the double-transmission makes the device of the present invention have the advantage of significantly improving the signal characteristics.
本发明装置中，待测量的透明介质通过两块棱镜构成测量光学系统，不仅实现薄层物质的折射率测量，而且经过玻璃-待测物质和待测物质-玻璃两次透射，使得本发明装置具有显著提升信号特征的优点。In the device of the present invention, the transparent medium to be measured constitutes a measuring optical system through two prisms, which not only realizes the measurement of the refractive index of thin-layer substances, but also passes through glass-substance to be measured and substance-glass to be transmitted twice, so that the device of the present invention It has the advantage of significantly improving signal characteristics.
本领域的技术人员容易理解，以上所述仅为本发明的较佳实施例而已，并不用以限制本发明，凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等，均应包含在本发明的保护范围之内。It is easy for those skilled in the art to understand that the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention, All should be included within the protection scope of the present invention.
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