CN106969972B - A material biaxial compression loading device for environmental scanning electron microscope - Google Patents
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 17
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- 239000010949 copper Substances 0.000 claims description 17
- 239000002241 glass-ceramic Substances 0.000 claims description 6
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
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Abstract
Description
技术领域Technical Field
本发明属于材料科学技术领域，特别是涉及一种用于环境扫描电镜的材料双轴压缩加载装置。The invention belongs to the technical field of material science, and in particular relates to a material biaxial compression loading device for an environmental scanning electron microscope.
背景技术Background technique
在材料科学中，材料的力学性能对于材料能否为工程服务十分关键。最常见的材料力学性能指标如杨氏模量、泊松比、抗压、抗拉、抗剪强度等都反映的是材料的宏观力学特性。而实际应用中，材料的一些变形力学行为并不能通过上述指标很好的解释。另外，宏观尺度研究很少涉及对损伤的研究，以及微裂缝无法用肉眼直接观测，有的研究也是通过间接的测量手段(声发射、超声波等)反映，因此需要从细观的角度寻求解决方案。近些年来，细观力学理论的蓬勃发展和成熟为解决上述问题提供了可能。但是，材料的力学特性受环境温度和湿度的影响较大，因此材料的力学表征试验一般需要施加耦合场；然而，常规的耦合场试验装置一般只对应宏观尺度，不能观测材料在加载过程中微结构的变化。此外，现有的观测材料微结构的手段如光学显微镜、扫描电镜、CT等一般对观测条件要求苛刻，很难实现耦合场的加载。In materials science, the mechanical properties of materials are critical to whether they can serve engineering. The most common mechanical properties of materials, such as Young's modulus, Poisson's ratio, compression, tension, and shear strength, all reflect the macroscopic mechanical properties of materials. In practical applications, some deformation mechanical behaviors of materials cannot be well explained by the above indicators. In addition, macroscopic studies rarely involve research on damage, and microcracks cannot be directly observed with the naked eye. Some studies are also reflected by indirect measurement methods (acoustic emission, ultrasound, etc.), so it is necessary to seek solutions from a microscopic perspective. In recent years, the vigorous development and maturity of mesomechanics theory have provided a possibility for solving the above problems. However, the mechanical properties of materials are greatly affected by ambient temperature and humidity, so mechanical characterization tests of materials generally require the application of a coupled field; however, conventional coupled field test devices generally only correspond to the macroscopic scale and cannot observe the changes in the microstructure of the material during loading. In addition, existing means of observing the microstructure of materials, such as optical microscopes, scanning electron microscopes, and CT, generally have strict requirements on observation conditions, and it is difficult to achieve coupled field loading.
综上可知，在材料的力学性能测试中考虑微结构的变化是十分关键和必要的，然而目前对于在温度-湿度-应力耦合场(尤其是双轴应力)作用下耦合材料力学特性的细观尺度实验装置十分欠缺，这就迫切需要发明一种新的加载装置来解决这一问题。In summary, it can be seen that it is critical and necessary to consider the changes in microstructure in the mechanical properties testing of materials. However, there is currently a lack of mesoscale experimental devices for coupling the mechanical properties of materials under the action of temperature-humidity-stress coupling fields (especially biaxial stress). This urgently requires the invention of a new loading device to solve this problem.
有鉴于此，本发明人根据从事本领域和相关领域的生产设计经验，研制出一种用于环境扫描电镜的材料双轴压缩加载装置，以期解决现有技术存在的问题。In view of this, the inventor has developed a material biaxial compression loading device for an environmental scanning electron microscope based on the production design experience in this field and related fields, in order to solve the problems existing in the prior art.
发明内容Summary of the invention
本发明的目的是在于提供一种用于环境扫描电镜的材料双轴压缩加载装置，用于温度-湿度-应力三场耦合场作用下材料力学细观特性的观测，以克服现有技术的缺陷。The purpose of the present invention is to provide a material biaxial compression loading device for an environmental scanning electron microscope, which is used to observe the mechanical microscopic properties of materials under the action of a temperature-humidity-stress triple-field coupling field, so as to overcome the defects of the prior art.
为此，本发明提出一种用于环境扫描电镜的材料双轴压缩加载装置，其包括：To this end, the present invention proposes a material biaxial compression loading device for an environmental scanning electron microscope, which comprises:
双轴力学加载主机，其由一前侧壁、一后侧壁、一左侧壁、一右侧壁以及一底座围合而成，所述底座的中间处设置有一冷却台，以供放置试件；A biaxial mechanical loading main machine, which is surrounded by a front side wall, a rear side wall, a left side wall, a right side wall and a base, wherein a cooling platform is arranged in the middle of the base for placing the test piece;
两基座，分别水平安装于所述左侧壁及所述后侧壁上，所述基座的内端上连接有一固定压头；Two bases are horizontally mounted on the left side wall and the rear side wall respectively, and a fixed pressure head is connected to the inner end of the base;
两所述伺服电机控制加载系统，所述伺服电机控制系统包括一轴承、一滚珠丝杠、一减速机以及一驱动所述减速机工作的驱动单元，所述滚珠丝杠的内端与所述轴承的外端相连接，其外端与所述减速机的输出端相连接，所述轴承的内端与一力传感器的外端相连接，所述滚珠丝杠上嵌设有一光栅传感器，其中，两所述滚珠丝杠对应穿设于所述右侧壁及所述前侧壁；The two servo motors control the loading system, and the servo motor control system includes a bearing, a ball screw, a reducer, and a driving unit for driving the reducer to work. The inner end of the ball screw is connected to the outer end of the bearing, and its outer end is connected to the output end of the reducer. The inner end of the bearing is connected to the outer end of a force sensor. A grating sensor is embedded in the ball screw, wherein the two ball screws are correspondingly penetrated through the right side wall and the front side wall;
其中，所述力传感器的内端连接有一移动压头，当所述冷却台上放置所述试件时，各所述固定压头及各所述移动压头能对应与所述试件的侧面相接。Wherein, the inner end of the force sensor is connected to a movable pressure head, and when the test piece is placed on the cooling table, each of the fixed pressure heads and each of the movable pressure heads can be connected to the side surface of the test piece accordingly.
如上所述的用于环境扫描电镜的材料双轴压缩加载装置，其中，所述固定压头及所述移动压头与所述试件之间分别设置有一玻璃陶瓷垫板。In the above-mentioned biaxial compression loading device for materials used in an environmental scanning electron microscope, a glass ceramic pad is provided between the fixed pressure head and the movable pressure head and the test piece, respectively.
如上所述的用于环境扫描电镜的材料双轴压缩加载装置，其中，所述冷却台上设置有一铜片垫层，所述试件的底面固定于所述铜片垫层上，所述试件的顶面覆盖有一铜片，所述铜片设有一中心孔。As described above, the biaxial compression loading device for materials used in an environmental scanning electron microscope, wherein a copper sheet pad is provided on the cooling platform, the bottom surface of the specimen is fixed on the copper sheet pad, the top surface of the specimen is covered with a copper sheet, and the copper sheet is provided with a center hole.
如上所述的用于环境扫描电镜的材料双轴压缩加载装置，其中，所述固定压头及所述移动压头分别为梯形压头，所述减速机为一蜗轮蜗杆减速机。As described above, the material biaxial compression loading device for an environmental scanning electron microscope, wherein the fixed pressure head and the movable pressure head are respectively trapezoidal pressure heads, and the reducer is a worm gear reducer.
如上所述的用于环境扫描电镜的材料双轴压缩加载装置，其中，所述驱动单元包括有一伺服加载电机、一加载伺服控制器、一测量控制器以及一计算机，所述加载伺服电机的输出端与所述减速机的输入端相连接，其与所述加载伺服控制器电连接，所述测量控制器与所述力传感器、所述光栅传感器、所述加载伺服控制器以及所述计算机电连接。As described above, the material biaxial compression loading device for an environmental scanning electron microscope, wherein the driving unit includes a servo loading motor, a loading servo controller, a measurement controller and a computer, the output end of the loading servo motor is connected to the input end of the reducer, which is electrically connected to the loading servo controller, and the measurement controller is electrically connected to the force sensor, the grating sensor, the loading servo controller and the computer.
如上所述的用于环境扫描电镜的材料双轴压缩加载装置，其中，所述双轴力学加载主机放置于一环境扫描电镜的内腔中，所述加载伺服控制器、所述测量控制器以及所述计算机位于所述环境扫描电镜之外。As described above, the biaxial compression loading device for materials used in an environmental scanning electron microscope, wherein the biaxial mechanical loading host is placed in an inner cavity of an environmental scanning electron microscope, and the loading servo controller, the measurement controller and the computer are located outside the environmental scanning electron microscope.
如上所述的用于环境扫描电镜的材料双轴压缩加载装置，其中，所述环境扫描电镜是型号为FEI Quanta 650型环境扫描电镜。The material biaxial compression loading device for an environmental scanning electron microscope as described above, wherein the environmental scanning electron microscope is a FEI Quanta 650 environmental scanning electron microscope.
与现有技术相比，本发明提供的用于环境扫描电镜的材料双轴压缩加载装置，是一种基于双轴应力-温度-湿度耦合场作用下材料力学特性的细观尺度实验装置，通过冷却台控制试件的温度，通过环境扫描电镜控制试件周围的水蒸汽压，实现试件温度和相对湿度(为温度及水蒸汽压的函数)的控制，从而研究材料在饱水状态下的力学特性；Compared with the prior art, the biaxial compression loading device for materials used in an environmental scanning electron microscope provided by the present invention is a micro-scale experimental device based on the mechanical properties of materials under the action of a biaxial stress-temperature-humidity coupling field. The temperature of the specimen is controlled by a cooling table, and the water vapor pressure around the specimen is controlled by an environmental scanning electron microscope, so as to control the temperature and relative humidity (which is a function of the temperature and the water vapor pressure) of the specimen, thereby studying the mechanical properties of the material in a saturated state.
本发明在对试件加载载荷的过程中实时观测材料微结构的变化，对于不同加载阶段的环境扫描电镜图片进行数字图像相关技术分析，计算得到应变场，并通过应变场测量定量分析材料在耦合场作用下的变形、损伤及破坏过程中微结构的变化和微裂纹的发生与扩展过程，为相应的研究提供了条件。The present invention observes the changes in the material microstructure in real time during the process of loading the specimen, performs digital image correlation technology analysis on environmental scanning electron microscope pictures at different loading stages, calculates the strain field, and quantitatively analyzes the changes in the microstructure and the occurrence and expansion of microcracks during the deformation, damage and destruction of the material under the action of the coupling field through strain field measurement, providing conditions for corresponding research.
附图说明BRIEF DESCRIPTION OF THE DRAWINGS
以下附图仅旨在于对本发明做示意性说明和解释，并不限定本发明的范围。其中：The following drawings are intended only to illustrate and explain the present invention, and are not intended to limit the scope of the present invention.
图1为本发明的用于环境扫描电镜的材料双轴压缩加载装置的俯视图。FIG. 1 is a top view of the biaxial compression loading device for materials used in an environmental scanning electron microscope of the present invention.
图2为沿图1中A向的侧视图。FIG. 2 is a side view along the direction A in FIG. 1 .
图3为本发明中测量控制器与其它部件之间的电连接关系示意图。FIG. 3 is a schematic diagram showing the electrical connection relationship between the measurement controller and other components in the present invention.
主要元件标号说明：Description of main component numbers:
1 双轴力学加载主机 11 前侧壁1 Biaxial mechanical loading host 11 Front side wall
12 后侧壁 13 左侧壁12 Rear side wall 13 Left side wall
14 右侧壁 16 底座14 Right side wall 16 Base
17 冷却台 171 铜片垫层17 Cooling table 171 Copper sheet pad
2 基座 21 固定压头2 Base 21 Fixed pressure head
3 伺服电机控制加载系统 31 轴承3 Servo motor controlled loading system 31 Bearing
32 滚珠丝杠 33 减速机32 Ball screw 33 Speed reducer
34 伺服加载电机 35 加载伺服控制器34 Servo loading motor 35 Loading servo controller
36 测量控制器 37 计算机36 Measurement controller 37 Computer
4 力传感器 41 移动压头4 Force sensor 41 Moving pressure head
5 光栅传感器5 Grating Sensor
6 试件 61 玻璃陶瓷垫板6 Specimen 61 Glass ceramic backing plate
62 铜片62 Copper Sheet
具体实施方式Detailed ways
为此，本发明提出一种用于环境扫描电镜的材料双轴压缩加载装置，其包括：双轴力学加载主机，其由一前侧壁、一后侧壁、一左侧壁、一右侧壁以及一底座围合而成，所述底座的中间处设置有一冷却台，以供放置试件；两基座，分别水平安装于所述左侧壁及所述后侧壁上，所述基座的内端上连接有一固定压头；两伺服电机控制加载系统，所述伺服电机控制系统包括一轴承、一滚珠丝杠、一减速机以及一驱动所述减速机工作的驱动单元，所述滚珠丝杠的内端与所述轴承的外端相连接，其外端与所述减速机的输出端相连接，所述轴承的内端与一力传感器的外端相连接，所述滚珠丝杠上嵌设有一光栅传感器，其中，两所述滚珠丝杠对应穿设于所述右侧壁及所述前侧壁；其中，所述力传感器的内端连接有一移动压头，当所述冷却台上放置所述试件时，各所述固定压头及各所述移动压头能对应与所述试件的侧面相接。To this end, the present invention proposes a material biaxial compression loading device for an environmental scanning electron microscope, which includes: a biaxial mechanical loading host, which is surrounded by a front side wall, a rear side wall, a left side wall, a right side wall and a base, and a cooling platform is arranged in the middle of the base for placing a specimen; two bases are horizontally installed on the left side wall and the rear side wall respectively, and a fixed pressure head is connected to the inner end of the base; two servo motors control the loading system, and the servo motor control system includes a bearing, a ball screw, a reducer and a drive The drive unit drives the reducer to work, the inner end of the ball screw is connected to the outer end of the bearing, and the outer end is connected to the output end of the reducer, the inner end of the bearing is connected to the outer end of a force sensor, and a grating sensor is embedded in the ball screw, wherein the two ball screws are correspondingly penetrated through the right side wall and the front side wall; wherein the inner end of the force sensor is connected to a movable pressure head, and when the specimen is placed on the cooling table, each of the fixed pressure heads and each of the movable pressure heads can be connected to the side of the specimen accordingly.
本发明的用于环境扫描电镜的材料双轴压缩加载装置，用于温度-湿度-应力三场耦合场作用下材料力学细观特性的观测，以克服现有技术的缺陷。The material biaxial compression loading device for an environmental scanning electron microscope of the present invention is used for observing the mechanical microscopic properties of materials under the action of a temperature-humidity-stress triple field coupling field, so as to overcome the defects of the prior art.
为了对本发明的技术特征、目的和效果有更加清楚的理解，以下结合附图及较佳实施例，对本发明提出的用于环境扫描电镜的材料双轴压缩加载装置的具体实施方式、结构、特征及功效，详细说明如后。需要说明的是，在本发明的描述中，术语“上”、“下”、“左”、“右”、“顶”、“底”、“内”、“外”等指示的方位或位置关系均是基于附图所示的方位或位置关系，仅是为了便于描述本发明和简化描述，而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作，因此不能理解为对本发明的限制。In order to have a clearer understanding of the technical features, purposes and effects of the present invention, the specific implementation, structure, features and effects of the biaxial compression loading device for materials used in an environmental scanning electron microscope proposed by the present invention are described in detail below in conjunction with the accompanying drawings and preferred embodiments. It should be noted that in the description of the present invention, the orientations or positional relationships indicated by the terms "upper", "lower", "left", "right", "top", "bottom", "inside", "outside", etc. are all based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention.
图1为本发明的用于环境扫描电镜的材料双轴压缩加载装置的俯视图。图2为为沿图1中A向的侧视视图。图3为本发明中测量控制器与其它部件之间的电连接关系示意图。Fig. 1 is a top view of a biaxial compression loading device for an environmental scanning electron microscope of the present invention. Fig. 2 is a side view along the A direction in Fig. 1. Fig. 3 is a schematic diagram of the electrical connection relationship between the measurement controller and other components of the present invention.
如图1所示，本发明提出的用于环境扫描电镜的材料双轴压缩加载装置，包括：As shown in FIG1 , the biaxial compression loading device for environmental scanning electron microscope proposed by the present invention comprises:
双轴力学加载主机1，其由一前侧壁11、一后侧壁12、一左侧壁13、一右侧壁14以及一底座16围合而成，所述底座16的中间处设置有一冷却台17，以供放置试件，在使用时该冷却台17用于控制试件周围的环境温度；The biaxial mechanical loading host 1 is enclosed by a front side wall 11, a rear side wall 12, a left side wall 13, a right side wall 14 and a base 16. A cooling platform 17 is provided in the middle of the base 16 for placing the specimen. When in use, the cooling platform 17 is used to control the ambient temperature around the specimen.
两基座2，分别水平安装于所述左侧壁13及所述后侧壁12上，所述基座2的内端上连接有一固定压头21；Two bases 2 are horizontally mounted on the left side wall 13 and the rear side wall 12 respectively, and a fixed pressure head 21 is connected to the inner end of the base 2;
两伺服电机控制加载系统3，所述伺服电机控制系统3包括一轴承31、一滚珠丝杠32、一减速机33以及一驱动所述减速机33工作的驱动单元，所述滚珠丝杠32的内端与所述轴承31的外端相连接，其外端与所述减速机33的输出端相连接，所述轴承31的内端与一力传感器4的外端相连接，所述滚珠丝杠32上嵌设有一光栅传感器5，以测量所述滚珠丝杠32的位移，其中，两所述滚珠丝杠32对应穿设于所述右侧壁14及所述前侧壁11；Two servo motors control the loading system 3, the servo motor control system 3 includes a bearing 31, a ball screw 32, a reducer 33 and a driving unit for driving the reducer 33 to work, the inner end of the ball screw 32 is connected to the outer end of the bearing 31, and the outer end thereof is connected to the output end of the reducer 33, the inner end of the bearing 31 is connected to the outer end of a force sensor 4, a grating sensor 5 is embedded in the ball screw 32 to measure the displacement of the ball screw 32, wherein the two ball screws 32 are correspondingly penetrated through the right side wall 14 and the front side wall 11;
其中，所述力传感器4的内端连接有一移动压头41，如图1、图2所示，当所述冷却台17上放置所述试件6时，各所述固定压头21及各所述移动压头41能对应与所述试件的侧面相接。Among them, the inner end of the force sensor 4 is connected to a movable pressure head 41. As shown in Figures 1 and 2, when the test piece 6 is placed on the cooling platform 17, each of the fixed pressure heads 21 and each of the movable pressure heads 41 can be connected to the side of the test piece accordingly.
较佳地，所述固定压头21及所述移动压头41与所述试件6之间分别设置有一玻璃陶瓷垫板61。其中，通过设置玻璃陶瓷垫板61，一方面可以减缓热传导，另一方面，由于玻璃陶瓷与岩石试件模量相近，可以防止加载过程中的刚度效应。Preferably, a glass ceramic pad 61 is respectively provided between the fixed pressure head 21 and the movable pressure head 41 and the specimen 6. The glass ceramic pad 61 can slow down heat conduction on the one hand, and prevent stiffness effect during loading on the other hand because the modulus of glass ceramic and rock specimens are similar.
另外，所述冷却台17上设置有一铜片垫层171，所述试件6的底面固定于所述铜片垫层171上，所述试件6的顶面覆盖有一铜片62，所述铜片61设有一中心孔(图中未标示)。其中，所述铜片垫层171能加速冷却台17与试件之间的热传递，而所述铜片62则用于减缓试件向空气的热传递。In addition, a copper sheet pad 171 is provided on the cooling platform 17, the bottom surface of the test piece 6 is fixed on the copper sheet pad 171, and the top surface of the test piece 6 is covered with a copper sheet 62, and the copper sheet 61 is provided with a central hole (not shown in the figure). The copper sheet pad 171 can accelerate the heat transfer between the cooling platform 17 and the test piece, and the copper sheet 62 is used to slow down the heat transfer from the test piece to the air.
如图所示，所述固定压头21及所述移动压头41分别为梯形压头，所述减速机33为一蜗轮蜗杆减速机。As shown in the figure, the fixed pressure head 21 and the movable pressure head 41 are respectively trapezoidal pressure heads, and the reducer 33 is a worm gear reducer.
在优选的实施方式中，所述驱动单元包括有一伺服加载电机34、一加载伺服控制器35、一测量控制器36以及一计算机37，所述加载伺服电机34的输出端与所述减速机33的输入端相连接，其与所述加载伺服控制器35电连接，所述测量控制器36与所述力传感器4、所述光栅传感器5、所述加载伺服控制器35以及所述计算机37电连接(请一并参见图3)。在工作时，所述力传感器5以及光栅传感器9实时采集力和位移数据，并将其传送到测量控制器36以及计算机37上，测量控制器36利用反馈机制通过所述加载伺服控制器35调节所述加载伺服电机34的转速来控制加载的稳定性，计算机37用于采集和实时显示测量参数及曲线，安全可靠。其中，由于该伺服加载电机34、所述加载伺服控制器35、所述测量控制器36等均为公知技术，对其具体组成结构及工作原理在此不再赘述，图中采用的也是示意性的画法。In a preferred embodiment, the driving unit includes a servo loading motor 34, a loading servo controller 35, a measurement controller 36 and a computer 37. The output end of the loading servo motor 34 is connected to the input end of the reducer 33, which is electrically connected to the loading servo controller 35. The measurement controller 36 is electrically connected to the force sensor 4, the grating sensor 5, the loading servo controller 35 and the computer 37 (please refer to Figure 3). When working, the force sensor 5 and the grating sensor 9 collect force and displacement data in real time and transmit them to the measurement controller 36 and the computer 37. The measurement controller 36 uses the feedback mechanism to adjust the speed of the loading servo motor 34 through the loading servo controller 35 to control the stability of loading. The computer 37 is used to collect and display the measurement parameters and curves in real time, which is safe and reliable. Among them, since the servo loading motor 34, the loading servo controller 35, the measurement controller 36, etc. are all well-known technologies, their specific composition structure and working principle are not repeated here, and the figure also adopts a schematic drawing method.
如图2所示，所述双轴力学加载主机1放置于一环境扫描电镜7的内腔中，所述加载伺服控制器35、所述测量控制器36以及所述计算机37位于所述环境扫描电镜7之外。在实施应用时，优选所述环境扫描电镜7是型号为FEI Quanta 650的环境扫描电镜。As shown in Fig. 2, the dual-axis mechanical loading host 1 is placed in the inner cavity of an environmental scanning electron microscope 7, and the loading servo controller 35, the measurement controller 36 and the computer 37 are located outside the environmental scanning electron microscope 7. When implementing the application, it is preferred that the environmental scanning electron microscope 7 is an environmental scanning electron microscope of model FEI Quanta 650.
在实际工作时，是将所述环境扫描电镜7上自带的数据插座(图中未示出)与所述加载伺服电机34、所述伺服控制器35以及所述计算机37电连接,以用于数据传输，并且，利用所述环境扫描电镜7上的水蒸气产生控制系统(气体注入系统,图中未示出)，能产生水蒸汽以控制所述环境扫描电镜腔内的水蒸汽压，至于该环境扫描电镜及其数据插座、水蒸气产生控制系统，均为现有技术，对其具体组成结构及工作原理不再赘述。In actual operation, the data socket (not shown in the figure) on the environmental scanning electron microscope 7 is electrically connected to the loading servo motor 34, the servo controller 35 and the computer 37 for data transmission, and the water vapor generation control system (gas injection system, not shown in the figure) on the environmental scanning electron microscope 7 can generate water vapor to control the water vapor pressure in the cavity of the environmental scanning electron microscope. As for the environmental scanning electron microscope and its data socket and water vapor generation control system, they are all existing technologies, and their specific composition structure and working principle will not be described in detail.
本发明提出的用于环境扫描电镜的材料双轴压缩加载装置，在具体应用时，是先将所述试件6放置所述冷却台17上，并通过各所述固定压头21及所述移动压头41夹持定位，之后将所述双轴力学加载主机1放到所述环境扫描电镜7内的承载台上，将水蒸汽产生控制系统和加载伺服控制器35通过数据插座连接到腔室外的所述测量控制器36上，并将该环境扫描电镜7顶部的物镜71与所述铜片61的中心孔相对，具体工作过程如下：The biaxial compression loading device for materials used in an environmental scanning electron microscope proposed in the present invention, in specific application, is to first place the test piece 6 on the cooling platform 17, and clamp and position it by the fixed pressure heads 21 and the movable pressure heads 41, then place the biaxial mechanical loading host 1 on the supporting platform in the environmental scanning electron microscope 7, connect the water vapor generation control system and the loading servo controller 35 to the measurement controller 36 outside the chamber through the data socket, and place the objective lens 71 on the top of the environmental scanning electron microscope 7 opposite to the center hole of the copper sheet 61, and the specific working process is as follows:
在两所述加载伺服控制器35上设置一定的加载速率，以控制相对应的所述加载伺服电机34以一定转述带动减速机33来驱动滚珠丝杆32对所述轴承31、力传感器4以及移动压头41的串联元件施加载荷，从而对所述试件6进行双向加载，其中，各所述力传感器4以及所述光栅传感器5实时采集力和位移的数据，并传送到各自的测量控制器23以及计算机37上，各测量控制器36利用反馈机制调节相对应的加载伺服电机34的转速，从而控制加载的稳定性；当加载到某一设定荷载之后，保持荷载的同时，利用物镜71扫描试件表面的图像并保存，供后续分析使用，之后，重复上述步骤，对试件施加其它数值的荷载，并通过物镜71记录相应的图像，直到实验结束。A certain loading rate is set on the two loading servo controllers 35 to control the corresponding loading servo motor 34 to drive the reducer 33 to drive the ball screw 32 to apply load to the series elements of the bearing 31, the force sensor 4 and the moving pressure head 41, thereby bidirectionally loading the specimen 6, wherein each of the force sensors 4 and the grating sensor 5 collects force and displacement data in real time and transmits them to their respective measurement controllers 23 and the computer 37, and each measurement controller 36 uses a feedback mechanism to adjust the speed of the corresponding loading servo motor 34, thereby controlling the stability of the loading; after loading to a certain set load, while maintaining the load, use the objective lens 71 to scan the image of the specimen surface and save it for subsequent analysis, and then repeat the above steps to apply loads of other values to the specimen, and record the corresponding image through the objective lens 71 until the end of the experiment.
本发明提供的用于环境扫描电镜的材料双轴压缩加载装置，通过冷却台控制试样的温度，通过环境扫描电镜控制试样周围的水蒸汽压，从而实现试样温度和相对湿度(为温度及水蒸汽压的函数)的控制，从而研究材料在饱水状态下的力学特性；本发明可以实现在环境扫描电镜腔体内温度-湿度-应力耦合加载实验过程中实时观察材料微结构的变化。此外，本发明可对不同加载阶段的环境扫描电镜图片进行数字图像相关技术分析，计算得到应变场，并通过应变场测量定量分析材料在耦合场作用下的变形、损伤及破坏过程中微结构的变化和微裂纹的发生与扩展过程。The biaxial compression loading device for materials used in an environmental scanning electron microscope provided by the present invention controls the temperature of the sample through a cooling platform and controls the water vapor pressure around the sample through an environmental scanning electron microscope, thereby realizing the control of the sample temperature and relative humidity (which is a function of temperature and water vapor pressure), thereby studying the mechanical properties of the material in a saturated state; the present invention can realize real-time observation of changes in the microstructure of the material during the temperature-humidity-stress coupled loading experiment in the cavity of the environmental scanning electron microscope. In addition, the present invention can perform digital image correlation technology analysis on environmental scanning electron microscope images at different loading stages, calculate the strain field, and quantitatively analyze the changes in the microstructure and the occurrence and expansion of microcracks during the deformation, damage and destruction of the material under the action of the coupling field through strain field measurement.
以上所述仅为本发明示意性的具体实施方式，并非用以限定本发明的范围。任何本领域的技术人员，在不脱离本发明的构思和原则的前提下所作的等同变化与修改，均应属于本发明保护的范围。The above description is only an illustrative embodiment of the present invention and is not intended to limit the scope of the present invention. Any equivalent changes and modifications made by any person skilled in the art without departing from the concept and principle of the present invention shall fall within the scope of protection of the present invention.
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