CN106947396B - Lapping liquid suspension system, lapping liquid and preparation method thereof - Google Patents
Lapping liquid suspension system, lapping liquid and preparation method thereof Download PDFInfo
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- CN106947396B CN106947396B CN201710179499.0A CN201710179499A CN106947396B CN 106947396 B CN106947396 B CN 106947396B CN 201710179499 A CN201710179499 A CN 201710179499A CN 106947396 B CN106947396 B CN 106947396B
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- lapping liquid
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- emulsifier
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- hydrophobically modified
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- 239000007788 liquid Substances 0.000 title claims abstract description 66
- 238000002360 preparation method Methods 0.000 title claims abstract description 21
- 239000006194 liquid suspension Substances 0.000 title abstract description 19
- 239000003995 emulsifying agent Substances 0.000 claims abstract description 85
- 239000000839 emulsion Substances 0.000 claims abstract description 35
- 229920000058 polyacrylate Polymers 0.000 claims abstract description 35
- 239000003082 abrasive agent Substances 0.000 claims abstract description 32
- 229940051841 polyoxyethylene ether Drugs 0.000 claims description 23
- 229920000056 polyoxyethylene ether Polymers 0.000 claims description 23
- POULHZVOKOAJMA-UHFFFAOYSA-N dodecanoic acid Chemical compound CCCCCCCCCCCC(O)=O POULHZVOKOAJMA-UHFFFAOYSA-N 0.000 claims description 22
- 239000004909 Moisturizer Substances 0.000 claims description 21
- 239000002518 antifoaming agent Substances 0.000 claims description 21
- 230000001333 moisturizer Effects 0.000 claims description 21
- 239000010432 diamond Substances 0.000 claims description 20
- -1 polyoxyethylene Polymers 0.000 claims description 19
- 239000003595 mist Substances 0.000 claims description 18
- 239000003002 pH adjusting agent Substances 0.000 claims description 18
- 239000013078 crystal Substances 0.000 claims description 17
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 claims description 17
- 229920001451 polypropylene glycol Polymers 0.000 claims description 17
- 235000021355 Stearic acid Nutrition 0.000 claims description 15
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 claims description 15
- 239000008117 stearic acid Substances 0.000 claims description 15
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 239000005639 Lauric acid Substances 0.000 claims description 11
- 229940049964 oleate Drugs 0.000 claims description 11
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 claims description 10
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 claims description 10
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 claims description 10
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims description 10
- 239000005642 Oleic acid Substances 0.000 claims description 10
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 claims description 10
- NWGKJDSIEKMTRX-AAZCQSIUSA-N Sorbitan monooleate Chemical compound CCCCCCCC\C=C/CCCCCCCC(=O)OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O NWGKJDSIEKMTRX-AAZCQSIUSA-N 0.000 claims description 10
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical group OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 claims description 10
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 claims description 10
- 239000000344 soap Substances 0.000 claims description 10
- PHYFQTYBJUILEZ-IUPFWZBJSA-N triolein Chemical compound CCCCCCCC\C=C/CCCCCCCC(=O)OCC(OC(=O)CCCCCCC\C=C/CCCCCCCC)COC(=O)CCCCCCC\C=C/CCCCCCCC PHYFQTYBJUILEZ-IUPFWZBJSA-N 0.000 claims description 10
- 229910003460 diamond Inorganic materials 0.000 claims description 9
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 claims description 9
- 239000003795 chemical substances by application Substances 0.000 claims description 7
- 229920003171 Poly (ethylene oxide) Polymers 0.000 claims description 6
- 229950004959 sorbitan oleate Drugs 0.000 claims description 6
- ALSTYHKOOCGGFT-KTKRTIGZSA-N (9Z)-octadecen-1-ol Chemical compound CCCCCCCC\C=C/CCCCCCCCO ALSTYHKOOCGGFT-KTKRTIGZSA-N 0.000 claims description 4
- 238000002156 mixing Methods 0.000 claims description 4
- IJCWFDPJFXGQBN-RYNSOKOISA-N [(2R)-2-[(2R,3R,4S)-4-hydroxy-3-octadecanoyloxyoxolan-2-yl]-2-octadecanoyloxyethyl] octadecanoate Chemical compound CCCCCCCCCCCCCCCCCC(=O)OC[C@@H](OC(=O)CCCCCCCCCCCCCCCCC)[C@H]1OC[C@H](O)[C@H]1OC(=O)CCCCCCCCCCCCCCCCC IJCWFDPJFXGQBN-RYNSOKOISA-N 0.000 claims 1
- ALSTYHKOOCGGFT-UHFFFAOYSA-N cis-oleyl alcohol Natural products CCCCCCCCC=CCCCCCCCCO ALSTYHKOOCGGFT-UHFFFAOYSA-N 0.000 claims 1
- 239000001589 sorbitan tristearate Substances 0.000 claims 1
- 229960004129 sorbitan tristearate Drugs 0.000 claims 1
- 235000011078 sorbitan tristearate Nutrition 0.000 claims 1
- 238000005498 polishing Methods 0.000 abstract description 8
- 230000002209 hydrophobic effect Effects 0.000 abstract description 6
- 229920000642 polymer Polymers 0.000 abstract description 4
- 239000000725 suspension Substances 0.000 abstract description 3
- 239000006061 abrasive grain Substances 0.000 abstract description 2
- 239000000243 solution Substances 0.000 description 42
- 229910021642 ultra pure water Inorganic materials 0.000 description 22
- 239000012498 ultrapure water Substances 0.000 description 22
- 229920002125 Sokalan® Polymers 0.000 description 13
- 238000010907 mechanical stirring Methods 0.000 description 11
- 239000007787 solid Substances 0.000 description 11
- HZAXFHJVJLSVMW-UHFFFAOYSA-N 2-Aminoethan-1-ol Chemical compound NCCO HZAXFHJVJLSVMW-UHFFFAOYSA-N 0.000 description 8
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 8
- 238000003756 stirring Methods 0.000 description 8
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 6
- HVUMOYIDDBPOLL-XWVZOOPGSA-N Sorbitan monostearate Chemical compound CCCCCCCCCCCCCCCCCC(=O)OC[C@@H](O)[C@H]1OC[C@H](O)[C@H]1O HVUMOYIDDBPOLL-XWVZOOPGSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 4
- IAYPIBMASNFSPL-UHFFFAOYSA-N Ethylene oxide Chemical compound C1CO1 IAYPIBMASNFSPL-UHFFFAOYSA-N 0.000 description 4
- 150000008065 acid anhydrides Chemical class 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 4
- 229940043237 diethanolamine Drugs 0.000 description 4
- 150000002148 esters Chemical class 0.000 description 4
- 229940031098 ethanolamine Drugs 0.000 description 4
- 238000000227 grinding Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229940058020 2-amino-2-methyl-1-propanol Drugs 0.000 description 3
- 241000220324 Pyrus Species 0.000 description 3
- CBTVGIZVANVGBH-UHFFFAOYSA-N aminomethyl propanol Chemical compound CC(C)(N)CO CBTVGIZVANVGBH-UHFFFAOYSA-N 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 3
- 229940055577 oleyl alcohol Drugs 0.000 description 3
- XMLQWXUVTXCDDL-UHFFFAOYSA-N oleyl alcohol Natural products CCCCCCC=CCCCCCCCCCCO XMLQWXUVTXCDDL-UHFFFAOYSA-N 0.000 description 3
- 235000021017 pears Nutrition 0.000 description 3
- 238000004062 sedimentation Methods 0.000 description 3
- 239000004743 Polypropylene Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 229920001155 polypropylene Polymers 0.000 description 2
- 239000001587 sorbitan monostearate Substances 0.000 description 2
- 229940035048 sorbitan monostearate Drugs 0.000 description 2
- 235000011076 sorbitan monostearate Nutrition 0.000 description 2
- 239000004575 stone Substances 0.000 description 2
- 235000013618 yogurt Nutrition 0.000 description 2
- OVSKIKFHRZPJSS-UHFFFAOYSA-N 2,4-D Chemical compound OC(=O)COC1=CC=C(Cl)C=C1Cl OVSKIKFHRZPJSS-UHFFFAOYSA-N 0.000 description 1
- GOJUJUVQIVIZAV-UHFFFAOYSA-N 2-amino-4,6-dichloropyrimidine-5-carbaldehyde Chemical group NC1=NC(Cl)=C(C=O)C(Cl)=N1 GOJUJUVQIVIZAV-UHFFFAOYSA-N 0.000 description 1
- 244000147568 Laurus nobilis Species 0.000 description 1
- 235000017858 Laurus nobilis Nutrition 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 244000062793 Sorghum vulgare Species 0.000 description 1
- 235000005212 Terminalia tomentosa Nutrition 0.000 description 1
- QYKIQEUNHZKYBP-UHFFFAOYSA-N Vinyl ether Chemical compound C=COC=C QYKIQEUNHZKYBP-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 235000013339 cereals Nutrition 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 239000012459 cleaning agent Substances 0.000 description 1
- 239000006071 cream Substances 0.000 description 1
- ZZVUWRFHKOJYTH-UHFFFAOYSA-N diphenhydramine Chemical compound C=1C=CC=CC=1C(OCCN(C)C)C1=CC=CC=C1 ZZVUWRFHKOJYTH-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004945 emulsification Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000006210 lotion Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 235000019713 millet Nutrition 0.000 description 1
- 230000003020 moisturizing effect Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N n-propyl alcohol Natural products CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000004584 polyacrylic acid Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- 238000002604 ultrasonography Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
- C09K3/1454—Abrasive powders, suspensions and pastes for polishing
- C09K3/1463—Aqueous liquid suspensions
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention discloses a kind of lapping liquid suspension systems, lapping liquid and preparation method thereof, belong to precise finiss, polishing field.Lapping liquid with suspension system by mass ratio be 0.5~3:2~5:2~4 hydrophobically modified polyacrylate emulsion, the emulsifier of HLB value 11~15, HLB value 2~5 assistant for emulsifying agent form.In lapping liquid, on the one hand with emulsifier/assistant for emulsifying agent strong association occurs for hydrophobically modified polyacrylate emulsion, another aspect emulsifier/assistant for emulsifying agent micellization on or near the hydrophobic segment of hydrophobically modified polymers, system is caused to generate viscosity more higher than simple addition hydrophobically modified polymers or emulsifier/assistant for emulsifying agent, again since coarseness abrasive material shows stronger hydrophobic property, in the hydrophobic core that above-mentioned micella can be naturally entered, thus the stable suspersion in system.Lapping liquid suspension system can make coarseness abrasive grain stable suspersion in system under relatively low viscosity in the present invention.
Description
Technical field
The present invention relates to a kind of lapping liquid suspension system, also relates to a kind of coarseness abrasive material and ground with low viscosity
The preparation method of liquid and the lapping liquid belongs to precise finiss, polishing field.
Background technique
With popularizing for fingerprint recognition, wireless charging and 5G function, zirconia ceramics material relies on its excellent physics
Characteristic is just gradually penetrating into the appearance member field of mobile phone.Zirconia ceramics material combines glass appearance difference, will not be as gold
Belong to the such shielded signal of material, hardness has wear-resistant, anti-zoned Flaw characterization close to sapphire, while possessing close to metal material
Excellent heat radiation, the favor by handset manufacturers.Zirconia ceramics has been selected as its cell phone back in current some mobile phones
Plate material, such as millet mix.
The processing of zirconia ceramics backboard needs to undergo multiple steps, generally includes: idiosome molding, CNC, two-sided thick
Mill, two-sided fine grinding, 2.5D arc side clears off, single side clears off, plated film etc..As selected coarseness single crystal diamond in two-sided fine grinding operation
Stone micro mist can be effectively reduced while guaranteeing removal rate using fine granularity polycrystalline diamond and class polycrystalline diamond as raw material
The processing cost of stone.But the self weight of coarseness diadust is larger, is difficult stable suspersion in aqueous solution, only passes through increasing
Add the viscosity of aqueous solution, increases the sedimentation resistance of coarseness micro mist in the solution, just can guarantee the suspended state of abrasive material.However it should
Method also has drawback, for example to guarantee that coarseness abrasive material does not settle in aqueous solution, then needs higher system viscosity, but viscous
Difficulty high and that grinding operation will be increased is spent, the inconvenient for use of customers' place is caused.
Therefore, it is necessary to provide a kind of lapping liquid with relatively low viscosity and energy stable suspersion coarseness abrasive material.
Summary of the invention
The object of the present invention is to provide a kind of lapping liquid suspension systems.
Meanwhile the present invention provides a kind of lapping liquid can making coarseness abrasive material stable suspersion, viscosity is relatively low.
Finally, the present invention provides a kind of preparation method of above-mentioned lapping liquid.
In order to achieve the goal above, the technical scheme adopted by the invention is that:
Lapping liquid suspension system is 0.5~3:2~5:2~4 hydrophobically modified polyacrylate emulsion, HLB by mass ratio
The emulsifier of value 11~15, the assistant for emulsifying agent of HLB value 2~5 form.
Commercial goods can be used in the hydrophobically modified polyacrylate emulsion, such as the ACRYSOL DR-72 of DOW Chemical, admittedly contain
Amount 30%.
It is 8~10 that the lapping liquid adjusts pH value with suspension system when in use.
It is poly- that the emulsifier can be selected from trihydroxy ethylamine oleate soap, stearic acid polyoxyethylene ether, oleic acid polyoxyethylene, oleyl alcohol
One of ethylene oxide ether, lauric acid polyoxyethylene ether are a variety of.
It is poly- that the emulsifier can be selected from trihydroxy ethylamine oleate soap, stearic acid polyoxyethylene ether, oleic acid polyoxyethylene, oleyl alcohol
One of ethylene oxide ether, lauric acid polyoxyethylene ether are a variety of.Stearic acid polyoxyethylene ether, oleic acid polyoxyethylene, laurel
Sour polyoxyethylene ether is commercial goods, and canonical name is polyoxyethylene stearic acid ester, polyoxyethylene oleic acid ester, lauric acid are poly-
Ethylene oxide ester.
The assistant for emulsifying agent can be selected from olein, tristerin, sorbitan oleate (span-80), mountain
One of pears alcohol acid anhydride stearate (span-60) is a variety of.
Lapping liquid is grouped as by the group of following mass percent: coarseness abrasive material 0.1~2%, hydrophobically modified polyacrylic acid
Lotion 0.5~3%, the emulsifier 2~5% of HLB value 11~15, the assistant for emulsifying agent 2~4% of HLB value 2~5, moisturizer 3~
10%, defoaming agent 0.05~0.3%, appropriate pH adjusting agent, surplus is water, lapping liquid pH value 8~10.
The single-crystal diamond micro mist that the coarseness abrasive material is 15-25 μm of granularity.
It is poly- that the emulsifier can be selected from trihydroxy ethylamine oleate soap, stearic acid polyoxyethylene ether, oleic acid polyoxyethylene, oleyl alcohol
One of ethylene oxide ether, lauric acid polyoxyethylene ether are a variety of.
The assistant for emulsifying agent can be selected from olein, tristerin, sorbitan oleate (span-80), mountain
One of pears alcohol acid anhydride stearate (span-60) is a variety of.
The moisturizer can be selected from one of polypropylene glycol 200, polypropylene glycol 400, polypropylene glycol 600 or a variety of.
The defoaming agent can be selected from BYK093, BYK080A (German Bi Ke), in Rhodoline DF 681F (Rhodia)
It is one or more.
The pH adjusting agent is selected from one of ethanol amine, diethanol amine, 2-amino-2-methyl-1-propanol or a variety of.
The preparation method of coarseness abrasive material low viscosity lapping liquid, comprising the following steps: accurately taken according to mass percent
Each component, be uniformly mixed to get.
Preferably, preparation step is as follows:
1) coarseness abrasive material is dispersed in water, obtains solution A；By emulsifier, assistant for emulsifying agent, moisturizer, defoaming agent and
PH adjusting agent is dispersed in water, and obtains solution B；Hydrophobically modified polyacrylate emulsion is dispersed in water, solution C is obtained；
2) solution A, B are uniformly mixed, obtain solution D；Solution C is added in solution D, mixing.
The dispersion of coarseness abrasive material can be completed under ultrasound condition in step 1), such as use ultrasonic cleaning agent, power 750
10~15min is ultrasonically treated under~850W, 25~30kHz of frequency.Machinery can be used in the dispersion of hydrophobically modified polyacrylate emulsion
Stirring, 250~350r/min stir 5~10min.Mechanical stirring can also be used in the dispersion of remaining component, and 250~350r/min is stirred
Mix 20~30min.
Mechanical stirring can be used in the mixing of solution A, B in step 2), and 250~350r/min stirs 20~30min.
Solution C is added drop-wise in solution D in step 2), while be added dropwise while stir, speed of agitator with solution viscosity increase and
Increase, first increase to 350~400r/min from 80~120r/min, be added dropwise, then is continued with the revolving speed of 350~400r/min
Stir 30~50min.
Beneficial effects of the present invention:
In lapping liquid suspension system of the invention, hydrophobically modified polyacrylate emulsion on the one hand with emulsifier/help cream
Strong association occurs for agent, another aspect emulsifier/assistant for emulsifying agent on the hydrophobic segment of hydrophobically modified polymers or
Neighbouring micellization causes system to generate viscosity more higher than simple addition hydrophobically modified polymers or emulsifier/assistant for emulsifying agent, from
And promote abrasive grains stable suspersion in lapping liquid system.
In lapping liquid system of the invention, since coarseness abrasive material (such as diadust) shows stronger hydrophobic spy
Property can be naturally entered by the hydrophobic core of hydrophobically modified polyacrylate emulsion and the formed micella of emulsifier/assistant for emulsifying agent,
To make coarseness abrasive material stable suspersion in system.And simple pH adjusting agent is added in hydrophobically modified polyacrylate emulsion
Suspension system, though can also reach identical viscosity, placing with equigranular abrasive material short-term can occur sedimentation phenomenon.
The existing lapping liquid comprising coarseness abrasive material is compared, lapping liquid system can promote coarseness abrasive material in the present invention
Grain stable suspersion in system, does not occur obviously to settle for 1 month.
Specific embodiment
Only invention is further described in detail for following embodiments, but does not constitute any limitation of the invention.
Embodiment 1
Lapping liquid suspension system (is purchased from Tao Shiization by the hydrophobically modified polyacrylate emulsion that mass ratio is 1.5:3:2
Learn, ACRYSOL DR-72 model, solid content 30%), emulsifier trihydroxy ethylamine oleate soap and assistant for emulsifying agent olein group
At.
The lapping liquid of coarseness abrasive material stable suspersion, is grouped as by the group of following mass percent: 20 μm of single-crystal diamonds
Micro mist 1%, hydrophobically modified polyacrylate emulsion (ibid) 1.5%, emulsifier trihydroxy ethylamine oleate soap 3%, assistant for emulsifying agent oleic acid
Glyceride 2%, moisturizer polypropylene glycol 600 5%, defoaming agent Rhodoline DF 681F 0.1%, pH adjusting agent diethanol
Amine 0.1%, surplus are ultrapure water, lapping liquid pH value 8.2.
The preparation step of above-mentioned lapping liquid is as follows:
1) component is accurately taken according to mass percent, and ultrapure water is first divided into 3 parts；Single-crystal diamond micro mist is added
Into a copy of it ultrapure water, it is put into ultrasonic disperse 10min in supersonic wave cleaning machine (power 800W, frequency 28kHz), fills it
That divides is uniformly dispersed, and obtains solution A；Emulsifier, assistant for emulsifying agent, moisturizer, defoaming agent and pH adjusting agent are added to another
In ultrapure water, 300r/min mechanical stirring 20min is uniformly mixed it adequately, obtains solution B；By hydrophobically modified polypropylene
Yogurt liquid is added in last a ultrapure water, and 300r/min mechanical stirring 5min is uniformly mixed it, obtains solution C；
2) solution A is added in solution B, 300r/min mechanical stirring 20min is uniformly mixed it adequately, obtains
Solution D；Solution C is slowly dropped in solution D, adition process suitably adjusts churned mechanically speed with the increase of solution viscosity
It spends (380r/min is increased to by 100r/min), is added dropwise to solution C and continues to stir 40min, be uniformly mixed lapping liquid, i.e.,
?.
Embodiment 2
Lapping liquid suspension system, by mass ratio be 1:2:2 hydrophobically modified polyacrylate emulsion (be purchased from DOW Chemical,
ACRYSOL DR-72 model, solid content 30%), emulsifier stearic acid polyoxyethylene ether and assistant for emulsifying agent tristerin group
At.
The lapping liquid of coarseness abrasive material stable suspersion, is grouped as by the group of following mass percent: 15 μm of single-crystal diamonds
Micro mist 0.1%, hydrophobically modified polyacrylate emulsion (ibid) 1%, emulsifier stearic acid polyoxyethylene ether 2%, assistant for emulsifying agent is hard
Glycerol 2%, moisturizer polypropylene glycol 200 5%, defoaming agent BYK080A 0.15%, pH adjusting agent diethanol amine
0.3%, surplus is ultrapure water, lapping liquid pH value 8.7.
The preparation step of above-mentioned lapping liquid is as follows:
1) component is accurately taken according to mass percent, and ultrapure water is first divided into 3 parts；Single-crystal diamond micro mist is added
Into a copy of it ultrapure water, it is put into ultrasonic disperse 15min in supersonic wave cleaning machine (power 750W, frequency 30kHz), fills it
That divides is uniformly dispersed, and obtains solution A；Emulsifier, assistant for emulsifying agent, moisturizer, defoaming agent and pH adjusting agent are added to another
In ultrapure water, 250r/min mechanical stirring 25min is uniformly mixed it adequately, obtains solution B；By hydrophobically modified polypropylene
For yogurt liquid finally in a ultrapure water, 250r/min mechanical stirring 10min is uniformly mixed it, obtains solution C；
2) solution A is added in solution B, 250r/min mechanical stirring 25min is uniformly mixed it adequately, obtains
Solution D；Solution C is slowly dropped in solution D, adition process suitably adjusts churned mechanically speed with the increase of solution viscosity
It spends (350r/min is increased to by 80r/min), is added dropwise to solution C and continues to stir 30min, be uniformly mixed lapping liquid, i.e.,
?.
Embodiment 3
Lapping liquid suspension system, by mass ratio be 2:4:1 hydrophobically modified polyacrylate emulsion (be purchased from DOW Chemical,
ACRYSOL DR-72 model, solid content 30%), emulsifier oleic acid polyoxyethylene and assistant for emulsifying agent sorbitan oleate
(span-80) it forms.
The lapping liquid of coarseness abrasive material stable suspersion, is grouped as by the group of following mass percent: 25 μm of single-crystal diamonds
Micro mist 1%, hydrophobically modified polyacrylate emulsion (ibid) 2%, emulsifier oleic acid polyoxyethylene 4%, assistant for emulsifying agent sorbierite
Acid anhydride oleate (span-80) 1%, moisturizer polypropylene glycol 600 3%, defoaming agent Rhodoline DF 681F 0.2%, pH tune
Agent ethanol amine 0.5% is saved, surplus is ultrapure water, lapping liquid pH value 9.5.
The preparation step of above-mentioned lapping liquid is as follows:
1) component is accurately taken according to mass percent, and ultrapure water is first divided into 3 parts；Single-crystal diamond micro mist is added
Into a copy of it ultrapure water, it is put into ultrasonic disperse 12min in ultrasonic wave (power 850W, frequency 25kHz), divides it adequately
It dissipates uniformly, obtains solution A；Emulsifier, assistant for emulsifying agent, moisturizer, defoaming agent and pH adjusting agent are added to another ultrapure water
In, 350r/min mechanical stirring 30min is uniformly mixed it adequately, obtains solution B；By hydrophobically modified polyacrylate emulsion
In last portion ultrapure water, 350r/min mechanical stirring 8min is uniformly mixed it, obtains solution C；
2) solution A is added in solution B, 350r/min mechanical stirring 30min is uniformly mixed it adequately, obtains
Solution D；Solution C is slowly dropped in solution D, adition process suitably adjusts churned mechanically speed with the increase of solution viscosity
It spends (400r/min is increased to by 120r/min), is added dropwise to solution C and continues to stir 50min, be uniformly mixed lapping liquid, i.e.,
?.
Embodiment 4
Lapping liquid suspension system (is purchased from Tao Shiization by the hydrophobically modified polyacrylate emulsion that mass ratio is 2.5:5:4
Learn, ACRYSOL DR-72 model, solid content 30%), emulsifier Brij and assistant for emulsifying agent sorbitan monostearate acid
Ester (span-60) composition.
The lapping liquid of coarseness abrasive material stable suspersion, is grouped as by the group of following mass percent: 18 μm of single-crystal diamonds
Micro mist 1.5%, hydrophobically modified polyacrylate emulsion (ibid) 2.5%, emulsifier Brij 5%, assistant for emulsifying agent mountain
Pears alcohol acid anhydride stearate (span-60) 4%, moisturizer polypropylene glycol 200 5%, defoaming agent BYK093 0.3%, pH adjusting agent
2-amino-2-methyl-1-propanol 0.8%, surplus are ultrapure water, lapping liquid pH value 9.8.
The preparation method is the same as that of Example 1 for above-mentioned lapping liquid.
Embodiment 5
Lapping liquid suspension system, by mass ratio be 1:2:1 hydrophobically modified polyacrylate emulsion (be purchased from DOW Chemical,
ACRYSOL DR-72 model, solid content 30%), emulsifier stearic acid polyoxyethylene ether and assistant for emulsifying agent tristerin group
At.
The lapping liquid of coarseness abrasive material stable suspersion, is grouped as by the group of following mass percent: 17 μm of single-crystal diamonds
Micro mist 2%, hydrophobically modified polyacrylate emulsion (ibid) 1%, emulsifier stearic acid polyoxyethylene ether 2%, assistant for emulsifying agent are stearic
Acid glyceride 1%, moisturizer polypropylene glycol 400 7%, defoaming agent BYK093 0.15%, pH adjusting agent ethanol amine 0.4% are remaining
Amount is ultrapure water, lapping liquid pH value 8.9.
The preparation method is the same as that of Example 1 for above-mentioned lapping liquid.
Embodiment 6
Lapping liquid suspension system (is purchased from Tao Shiization by the hydrophobically modified polyacrylate emulsion that mass ratio is 1.3:5:4
Learn, ACRYSOL DR-72 model, solid content 30%), emulsifier trihydroxy ethylamine oleate soap and assistant for emulsifying agent tristerin group
At.
The lapping liquid of coarseness abrasive material stable suspersion, is grouped as by the group of following mass percent: 19 μm of single-crystal diamonds
Micro mist 0.7%, hydrophobically modified polyacrylate emulsion (ibid) 1.3%, emulsifier trihydroxy ethylamine oleate soap 5%, assistant for emulsifying agent is hard
Glycerol 4%, moisturizer polypropylene glycol 200 6%, defoaming agent BYK080A 0.2%, pH adjusting agent 2- amino -2- first
Base -1- propyl alcohol 0.3%, surplus are ultrapure water, lapping liquid pH value 9.2.
The preparation method of above-mentioned lapping liquid is the same as embodiment 3.
Embodiment 7
Lapping liquid suspension system (is purchased from Tao Shiization by the hydrophobically modified polyacrylate emulsion that mass ratio is 2.8:2:3
Learn, ACRYSOL DR-72 model, solid content 30%), emulsifier stearic acid polyoxyethylene ether and assistant for emulsifying agent olein group
At.
The lapping liquid of coarseness abrasive material stable suspersion, is grouped as by the group of following mass percent: 24 μm of single-crystal diamonds
Micro mist 0.5%, hydrophobically modified polyacrylate emulsion (ibid) 2.8%, emulsifier stearic acid polyoxyethylene ether 2%, assistant for emulsifying agent
Olein 3%, moisturizer polypropylene glycol 600 5%, defoaming agent BYK093 0.3%, pH adjusting agent 2- amino-2-methyl-
1- propyl alcohol 0.3%, surplus are ultrapure water, lapping liquid pH value 8.8.
The preparation method of above-mentioned lapping liquid is the same as embodiment 3.
Embodiment 8
Lapping liquid suspension system (is purchased from Tao Shiization by the hydrophobically modified polyacrylate emulsion that mass ratio is 0.5:4.5:4
Learn, ACRYSOL DR-72 model, solid content 30%), emulsifier lauric acid polyoxyethylene ether and assistant for emulsifying agent olein group
At.
The lapping liquid of coarseness abrasive material stable suspersion, is grouped as by the group of following mass percent: 16 μm of single-crystal diamonds
Micro mist 0.3%, hydrophobically modified polyacrylate emulsion (ibid) 0.5%, emulsifier lauric acid polyoxyethylene ether 4.5% help emulsification
Agent olein 4%, moisturizer polypropylene glycol 200 9%, defoaming agent BYK080A 0.15%, pH adjusting agent diethanol amine
0.4%, surplus is ultrapure water, lapping liquid pH value 9.3.
The preparation method of above-mentioned lapping liquid is the same as embodiment 2.
Embodiment 9
Lapping liquid suspension system, by mass ratio be 3:5:4 hydrophobically modified polyacrylate emulsion (be purchased from DOW Chemical,
ACRYSOL DR-72 model, solid content 30%), emulsifier lauric acid polyoxyethylene ether and assistant for emulsifying agent tristerin group
At.
The lapping liquid of coarseness abrasive material stable suspersion, is grouped as by the group of following mass percent: 20 μm of single-crystal diamonds
Micro mist 1%, hydrophobically modified polyacrylate emulsion (ibid) 3%, emulsifier lauric acid polyoxyethylene ether 5%, assistant for emulsifying agent are stearic
Acid glyceride 4%, moisturizer polypropylene glycol 400 10%, defoaming agent Rhodoline DF 681F 0.05%, pH adjusting agent second
Hydramine 1%, surplus are ultrapure water, lapping liquid pH value 9.8.
The preparation method of above-mentioned lapping liquid is the same as embodiment 3.
Embodiment 10
Lapping liquid suspension system (is purchased from Tao Shiization by the hydrophobically modified polyacrylate emulsion that mass ratio is 1.5:3.5:3
Learn, ACRYSOL DR-72 model, solid content 30%), the emulsifier (trihydroxy ethylamine oleate soap and lauric acid polyoxy of mass ratio 1:1
Vinethene) and assistant for emulsifying agent (olein and tristerin of mass ratio 1:1) composition.
The lapping liquid of coarseness abrasive material stable suspersion, is grouped as by the group of following mass percent: 20 μm of single-crystal diamonds
Micro mist 1.5%, hydrophobically modified polyacrylate emulsion (ibid) 1.5%, emulsifier (trihydroxy ethylamine oleate soap of mass ratio 1:1 and
Lauric acid polyoxyethylene ether) 3.5%, assistant for emulsifying agent (olein and tristerin of mass ratio 1:1) 3%, moisturizing
Agent polypropylene glycol 400 5%, defoaming agent Rhodoline DF 681F 0.15%, pH adjusting agent ethanol amine 0.3%, surplus is super
Pure water, lapping liquid pH value 9.0.
The preparation method of above-mentioned lapping liquid is the same as embodiment 3.
Embodiment 11
Lapping liquid suspension system (is purchased from Tao Shiization by the hydrophobically modified polyacrylate emulsion that mass ratio is 1.5:3.5:3
Learn, ACRYSOL DR-72 model, solid content 30%), (stearic acid polyoxyethylene ether of mass ratio 1:1:1, oleic acid are poly- for emulsifier
Ethylene oxide ether and Brij) and assistant for emulsifying agent (sorbitan oleate and the sorbitan monostearate acid of mass ratio 1:1
Ester) composition.
The lapping liquid of coarseness abrasive material stable suspersion, it is grouped as by the group of following mass percent: 20 μm of single-crystal diamonds
Micro mist 1%, hydrophobically modified polyacrylate emulsion (ibid) 1.5%, emulsifier (stearic acid polyoxyethylene ether of mass ratio 1:1:1,
Oleic acid polyoxyethylene and Brij) 3.5%, the assistant for emulsifying agent (sorbitan oleate and sorb of mass ratio 1:1
Alcohol acid anhydride stearate) 3%, moisturizer polypropylene glycol 400 5%, defoaming agent Rhodoline DF 681F 0.15%, pH are adjusted
Agent 2-amino-2-methyl-1-propanol 0.4%, surplus are ultrapure water, lapping liquid pH value 9.1.
The preparation method of above-mentioned lapping liquid is the same as embodiment 3.
In other embodiments of the invention, emulsifier, assistant for emulsifying agent, moisturizer, defoaming agent, pH adjusting agent can be selected
Two kinds or more.
Test example
Lapping liquid in Example 1~11, the viscosity of lapping liquid is measured using rotational viscometer respectively, and observes diamond
Abrasive material (1 month) sedimentation phenomenon placed of long-time in lapping liquid system；Using dedicated twin grinder, (Lanzhou is auspicious simultaneously
Moral, model X62 1020B2M-7PT) 4.7 inches of potsherd × 35 of polishing treatment, polishing pad is using global grinding pad, polishing pressure
Power 10kg/ piece, polishing fluid (i.e. lapping liquid in embodiment 1~11) flow 15mL/min, polishing time 60min polish forward and backward pottery
The roughness and removal rate of tile see the table below 1.
1 lapping liquid characteristic of table and polishing treatment effect
Claims (3)
1. lapping liquid, it is characterised in that: be grouped as by the group of following mass percent: coarseness abrasive material 0.1 ~ 2%, hydrophobically modified
Polyacrylate emulsion 0.5 ~ 3%, the emulsifier 2 ~ 5% of HLB value 11 ~ 15, the assistant for emulsifying agent 2 ~ 4% of HLB value 2 ~ 5, moisturizer 3 ~ 10%,
Defoaming agent 0.05 ~ 0.3%, appropriate pH adjusting agent, surplus are water, lapping liquid pH value 8 ~ 10；
The emulsifier is selected from trihydroxy ethylamine oleate soap, stearic acid polyoxyethylene ether, oleic acid polyoxyethylene, oleic alcohol polyoxyethylene
One of ether, lauric acid polyoxyethylene ether are a variety of；
The assistant for emulsifying agent is in olein, tristerin, sorbitan oleate, sorbitan tristearate
It is one or more；
The single-crystal diamond micro mist that the coarseness abrasive material is 15-25 μm of granularity；
The preparation step of lapping liquid is as follows:
1) coarseness abrasive material is dispersed in water, obtains solution A；By emulsifier, assistant for emulsifying agent, moisturizer, defoaming agent and pH tune
Section agent is dispersed in water, and obtains solution B；Hydrophobically modified polyacrylate emulsion is dispersed in water, solution C is obtained；
2) solution A, B are uniformly mixed, obtain solution D；Solution C is added in solution D, mixing.
2. lapping liquid according to claim 1, it is characterised in that: the moisturizer is selected from polypropylene glycol 200, polypropylene glycol
400, one of polypropylene glycol 600 or a variety of.
3. the preparation method of lapping liquid described according to claim 1 ~ any one of 2, it is characterised in that: preparation step is as follows:
1) coarseness abrasive material is dispersed in water, obtains solution A；By emulsifier, assistant for emulsifying agent, moisturizer, defoaming agent and pH tune
Section agent is dispersed in water, and obtains solution B；Hydrophobically modified polyacrylate emulsion is dispersed in water, solution C is obtained；
2) solution A, B are uniformly mixed, obtain solution D；Solution C is added in solution D, mixing.
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| CN100565813C (en) * | 2005-12-16 | 2009-12-02 | Jsr株式会社 | Aqueous dispersion for chemical mechanical polishing and chemical and mechanical grinding method and the kit that is used to modulate aqueous dispersion for chemical mechanical polishing |
| TWI573864B (en) * | 2012-03-14 | 2017-03-11 | 卡博特微電子公司 | Cmp compositions selective for oxide and nitride with high removal rate and low defectivity |
| SG11201502225XA (en) * | 2012-09-21 | 2015-05-28 | 3M Innovative Properties Co | Incorporating additives into fixed abrasive webs for improved cmp performance |
| SG11201506296VA (en) * | 2013-02-21 | 2015-09-29 | Fujimi Inc | Polishing composition and method for producing polished article |
| JP5857310B2 (en) * | 2013-09-30 | 2016-02-10 | 株式会社フジミインコーポレーテッド | Polishing composition and method for producing the same |
| WO2016089660A1 (en) * | 2014-12-05 | 2016-06-09 | 3M Innovative Properties Company | Abrasive composition |
| CN105647475B (en) * | 2015-12-31 | 2017-12-01 | 河南联合精密材料股份有限公司 | Oily two molten diamond grinding fluids of a kind of water and preparation method thereof |
| CN106397656B (en) * | 2016-10-20 | 2018-09-11 | 上海佰奥聚新材料科技有限公司 | A kind of preparation and application of water-based hydrophobic modified polymethyl hydrochlorate dispersant |
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