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CN106940218A - prism spectrometer - Google Patents

prism spectrometer Download PDF

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Publication number
CN106940218A
CN106940218A CN201710234377.7A CN201710234377A CN106940218A CN 106940218 A CN106940218 A CN 106940218A CN 201710234377 A CN201710234377 A CN 201710234377A CN 106940218 A CN106940218 A CN 106940218A
Authority
CN
China
Prior art keywords
prism
light
spectrometer
electric signal
speculum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710234377.7A
Other languages
Chinese (zh)
Inventor
刘杰波
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Li Li Technology Co Ltd
Original Assignee
Shenzhen Li Li Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shenzhen Li Li Technology Co Ltd filed Critical Shenzhen Li Li Technology Co Ltd
Priority to CN201710234377.7A priority Critical patent/CN106940218A/en
Publication of CN106940218A publication Critical patent/CN106940218A/en
Pending legal-status Critical Current

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/14Generating the spectrum; Monochromators using refracting elements, e.g. prisms
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/26Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/255Details, e.g. use of specially adapted sources, lighting or optical systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • G01N2021/0106General arrangement of respective parts
    • G01N2021/0112Apparatus in one mechanical, optical or electronic block

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

The present invention discloses a kind of prism spectrometer, including:Input aperture, for accessing after the composite wavelength light that external light source is sent, is transferred to collimation camera lens;The collimation camera lens, for reflecting the composite wavelength light transmitted by the input aperture, makes its collimated illumination to prism group;The prism group includes multi-disc prism, for the multiple dispersion of composite wavelength light, amasthenic lens to be transferred to after generating dispersed light;The amasthenic lens, for being transferred to optical sensor after the dispersed light is converged;The optical sensor, for the dispersed light to be converted into electric signal, is transferred to electric signal process unit;The electric signal process unit, for analyzing and processing and/or transmitting to electric signal.The present invention realizes the high dispersion of light by multiple prism arrangements of prism group, makes light path bending and the ingenious cooperation of reflecting surface, on the premise of dispersity is ensured, the efficiency of light energy utilization is significantly improved, while reducing volume.

Description

Prism spectrometer
Technical field
The present invention relates to optical technical field, and in particular to a kind of prism spectrometer.
Background technology
Spectrometer (Spectroscope) is the instrument that the light of complicated component is decomposed into spectrum line, classical color dispersion-type spectrum Instrument mainly includes two kinds of prism spectrometer and grating spectrograph, and classical color dispersion-type spectrometer is based on slit input aperture, using rib Mirror or grating are as spatial dispersion element, the light intensity signal after collection dispersion, by spectrometer to the crawl of optical information, to shine Phase egative film develops, or computerized automatic display numerical value instrument is shown and analyzed, and which kind of element contained in article so as to predict.It is this Technology is widely used in the detection of air pollution, water pollution, food hygiene, metal industry etc..The work light of spectrometer The dispersive power of spectral limit and spatial dispersion element has much relations, therefore spatial dispersion element can show to the dispersity that light is converted Write the performance of influence spectrometer.
At present, traditional prism spectrometer is then due to reaching equal dispersion bulky, and cost is high, or volume is done Not enough, this has been industry a great problem to small rear dispersity, is substantially eliminated in miniature spectrometer field, it is difficult to find commodity The product of change, therefore the small-sized color dispersion-type spectrometer of in the market is mostly grating spectrograph, it is dispersion member that it, which is based on diffraction grating, Part, though have the advantages that dispersion is big, equal dispersity lower volume is small, but it is generally merely with one in multiple diffraction times Hot spot after the luminous energy of individual diffraction time, and imaging is in meniscus shaped, and the hot spot of this shape is irradiated to general linear array light and passed Sensor, only a fraction energy is utilized, and the sensor efficiency of light energy utilization is low.If optical sensor is square pixel, luminous energy is damaged Even up to more than 90% is lost, causes the efficiency of light energy utilization low.
The content of the invention
The main object of the present invention is to provide a kind of prism spectrometer, using multiple prism arrangements, makes light path bending and anti- Reflective surface is ingenious to be coordinated, it is intended on the premise of ensureing dispersity, improve the efficiency of light energy utilization.
To achieve the above object, prism spectrometer proposed by the present invention includes:
Input aperture, for accessing after the composite wavelength light that external light source is sent, is transferred to collimation camera lens;
The collimation camera lens, for changing the composite wavelength light transmission path transmitted by the input aperture, makes it Collimated illumination is to prism group, and the dispersion that the composite wavelength light is produced after prism group is significantly greater than monolithic prism and can be generated Dispersion;
The prism group includes multi-disc prism, transmitted after dispersed light for the multiple dispersion of composite wavelength light, being generated To amasthenic lens;
The amasthenic lens, for being transferred to optical sensor after the dispersed light is converged;
The optical sensor, for the dispersed light to be converted into electric signal;
The electric signal process unit, for analyzing and processing and/or transmitting to electric signal.
Preferably, the prism vertex angle sum in the prism group is 85 °~365 °.
Preferably, the prism group includes 2~7 prisms.
Preferably, the corner angle of the prism is 30 °~60 °.
Preferably, the prism spectrometer also includes speculum, the transmission direction for changing light path.
Preferably, the speculum reflexes to light path in the direction for causing whole light path size reduction.
Preferably, the speculum includes the first speculum, and first speculum is arranged at the prism group and described Between amasthenic lens.
Preferably, the speculum includes the first speculum and the second speculum, and first speculum is arranged at described Between prism group and the amasthenic lens, second speculum is arranged between the collimation camera lens and the prism group.
Preferably, the prism spectrometer also includes incidence hole footpath connector and electric signal connector, the incidence hole footpath One end of connector connects the input aperture, and the other end is used to connect optical fiber or enter light microscopic head, the electric signal connector One end connects the electric signal process unit, for exporting measurement signal and/or data, incidence hole footpath connector and described Electric signal connector is located at the homonymy of the prism spectrometer.
Preferably, multiple prisms in the prism group are used and focus lamp using identical size and/or collimation camera lens Head identical specification.
In technical solution of the present invention, prism spectrometer includes:Input aperture, for accessing the complex wave that external light source is sent After long light, collimation camera lens is transferred to;The collimation camera lens, for reflecting the composite wavelength transmitted by the input aperture Light, makes its collimated illumination to prism group;The prism group includes multi-disc prism, for the multiple dispersion of composite wavelength light, Amasthenic lens is transferred to after generation dispersed light;The amasthenic lens, for being transferred to optical sensor after the dispersed light is converged; The optical sensor, for the dispersed light to be converted into electric signal, is transferred to electric signal process unit;The Electric signal processing Device, for analyzing and processing and/or transmitting to electric signal.Technical scheme is real by multiple prism arrangements of prism group Now the high dispersion of light, makes light path bending and the ingenious cooperation of reflecting surface, on the premise of dispersity is ensured, significantly improves light Energy utilization rate, and reduce volume.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, drawings in the following description are only this Some embodiments of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can be with Structure according to these accompanying drawings obtains other accompanying drawings.
Fig. 1 is the structural representation of the embodiment of prism spectrometer one of the present invention;
Fig. 2 is the structural representation of another embodiment of prism spectrometer of the present invention.
Drawing reference numeral explanation:
Label Title Label Title
1 Input aperture 7 First speculum
2 Collimate camera lens 8 Second speculum
3 Prism 9 Angle regulator
4 Amasthenic lens 10 Incidence hole footpath connector
5 Optical sensor 11 Electric signal connector
6 Electric signal process unit
The realization, functional characteristics and advantage of the object of the invention will be described further referring to the drawings in conjunction with the embodiments.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete Site preparation is described, it is clear that described embodiment is only a part of embodiment of the present invention, rather than whole embodiments.Base Embodiment in the present invention, those of ordinary skill in the art obtained under the premise of creative work is not made it is all its His embodiment, belongs to the scope of protection of the invention.
It is to be appreciated that institute is directional in the embodiment of the present invention indicates that (such as up, down, left, right, before and after ...) is only used In explaining relative position relation, motion conditions under a certain particular pose (as shown in drawings) between each part etc., if should When particular pose changes, then directionality indicates also correspondingly therewith to change.
In addition, in the present invention such as relating to the description of " first ", " second " etc. be only used for describe purpose, and it is not intended that Indicate or imply its relative importance or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", At least one this feature can be expressed or be implicitly included to the feature of " second ".In the description of the invention, " multiple " contain Justice is at least two, such as two, three etc., unless otherwise specifically defined.
In the present invention, unless otherwise clearly defined and limited, term " connection ", " fixation " etc. should be interpreted broadly, For example, " fixation " can be fixedly connected or be detachably connected, or integrally;Can be mechanically connect or Electrical connection;Can be joined directly together, can also be indirectly connected to by intermediary, can be the connection or two of two element internals The interaction relationship of individual element, unless otherwise clear and definite restriction.For the ordinary skill in the art, can basis Concrete condition understands the concrete meaning of above-mentioned term in the present invention.
In the present invention, collimation camera lens or amasthenic lens are not limited to a piece of eyeglass of diagram, also do not limit it Structure or operation principle, have referred to the optical component or component of collimation or focussing force.
In addition, the technical scheme between each embodiment of the invention can be combined with each other, but must be general with this area Logical technical staff can be implemented as basis, when the combination appearance of technical scheme is conflicting or can not realize it will be understood that this The combination of technical scheme is not present, also not within the protection domain of application claims.
Fig. 1 to Fig. 2 is refer to, in an embodiment of the present invention, prism spectrometer includes:
Input aperture 1, for accessing after the composite wavelength light that external light source (not shown) is sent, is transferred to collimation camera lens;
The collimation camera lens 2, for reflecting the composite wavelength light transmitted by the input aperture 1, shines its collimation It is mapped to prism group (not indicating);
The prism group is made up of multi-disc prism 3, passed after dispersed light for the multiple dispersion of composite wavelength light, being generated It is defeated to arrive amasthenic lens 4;
The amasthenic lens 4, for being transferred to optical sensor 5 after the dispersed light is converged;
The optical sensor 5, for the dispersed light to be converted into electric signal, is transferred to electric signal process unit 6;
The electric signal process unit 6, for analyzing and processing and/or transmitting to electric signal.
In the present embodiment, input aperture 1 is generally aperture or slit, and external light source sends composite wavelength light and passes through incidence Aperture 1 is entered inside spectrometer, is transferred to collimation camera lens 2, and the collimation camera lens 2 can gather the light beam injected by input aperture 1 Defocused collimation or close to being collimatedly irradiated on the prism 3 of prism group, prism group is made up of multi-disc prism 3, being capable of relay The lasting dispersion composite wavelength light, makes light generate very big dispersity, while avoiding producing the diffraction light of high level, significantly drops The loss of low light;Composite wavelength light is converted into dispersed light after by prism group, after the dispersed light is converged via amasthenic lens 4 again It is transferred to optical sensor 5 and is converted into electric signal, shape, chi due to the hot spot after prism group dispersion and optical sensor 5 Very little matching degree is high, and the multiorder diffractive effect without diffraction grating, therefore the light intensity that optical sensor 5 is received is also higher, energy Enough greatly improve the measurement accuracy and resolution ratio of spectrometer;Finally, the electric signal transmission that optical sensor 5 will convert into is to electric signal Processing unit 6, with specific voltage, waveform output or through Treatment Analysis, generates measurement result.The technical scheme of the present embodiment is led to The high dispersion of light is realized in the combination for crossing multiple prisms 3 of prism group, is made light path bending and the ingenious cooperation of reflecting surface, is being ensured On the premise of dispersity, the efficiency of light energy utilization is significantly improved, volume is reduced.
Preferably, the drift angle sum of prism 3 in the prism group is 85 °~365 °.
Further, the drift angle sum of prism 3 in the prism group is 85 °~365 °, using foregoing single specification On the basis of prism 3, the dispersity well beyond monolithic prism 3 can be realized, the performance of spectrometer is improved.
Preferably, the prism group includes 2~7 prisms 3.
Specifically, consider light transmittance, the cost of prism 3, and prism group overall dispersion degree, prism group can be by 2 ~7 prisms 3 are constituted, preferably three prisms 3 of the invention, to realize balance of the spectrometer between cost and performance.
Preferably, the corner angle of the prism 3 is 30 °~60 °.
As a kind of preferred embodiment, the angle of its drift angle of prism 3 is 30 °~60 °, the prism commonly used with the market Specification is suitable, it is easy to reduce production cost.
Preferably, the prism spectrometer also includes speculum (not indicating), the transmission direction for changing light path so that Light changes towards the direction of light path size reduction.
As a kind of preferred embodiment, prism spectrometer also includes speculum, and spectrometer can be changed by the speculum Inside light path, light path folding can be reduced to the geomery of spectrometer according to actual needs.
Specifically, Fig. 1 is refer to, one embodiment of the invention, the speculum includes the first speculum 7, described first Speculum 7 is arranged between the prism group and the amasthenic lens 4.
In the present embodiment, the speculum includes the first speculum 7, and first speculum 7 is arranged at the prism group Between the amasthenic lens 4 so that light path takes the shape of the letter U or C-folds, demand is arranged with the structure for being adapted to spectrometer, reduced Volume, improves the environmental suitability of spectrometer.
Specifically, Fig. 2 is refer to, another embodiment of the present invention, the speculum is anti-including the first speculum 7 and second Mirror 8 is penetrated, first speculum 7 is arranged between the prism group and the amasthenic lens 4, and second speculum 8 is set Between the collimation camera lens 2 and the prism group.
In the present embodiment, speculum includes the first speculum 7 and the second speculum 8, is separately positioned at two, and described the One speculum 7 is arranged between the prism group and the amasthenic lens 4, and second speculum 8 is arranged at the collimating mirror Between first 2 and the prism group so that light path is folded in M shapes, I shapes or X-shape, to be more preferably adapted to the structure cloth of spectrometer Demand is put, the environmental suitability of spectrometer is improved.
Meanwhile, angle regulator 9 is equipped with the prism group and speculum.It can allow the above-mentioned part can be according to reality Angle adjustment is carried out the need for operation, regulative mode can be manual, or automatically controlled driving, such as stepper motor, used Above-mentioned angle regulator 9 can provide spectrometer assembling or the convenience used.
Preferably, the prism spectrometer also include incidence hole footpath connector 10 and electric signal connector 11, it is described enter light One end of aperture connector connects the input aperture 1, and the other end is used to connect optical fiber (not shown) or enter light microscopic head (to scheme not Show), one end of the electric signal connector 11 connects the electric signal process unit 6, for output signal and/or measurement number According to incidence hole footpath connector and the electric signal connector are located at the homonymy of the prism spectrometer.
As a kind of preferred embodiment, the prism spectrometer also includes incidence hole footpath connector 10 and electric signal connector 11, one end of incidence hole footpath connector 10 connects the input aperture 1, and the other end is used to connect optical fiber or enters light microscopic head, It is easy to the access of external light source;One end of the electric signal connector 11 connects the electric signal process unit 6, for exporting letter Number and/or measurement data to need equipment, such as display device (not shown) or subsequent analysis device (not shown) are improved The ease of use of spectrometer;And incidence hole footpath connector 10 and the electric signal connector 11 are located at the prismatic light The homonymy of spectrometer, is easy to the installation and operation of spectrometer, improves the ease of use of spectrometer, while machining is also more square Just, production cost is reduced.
Preferably, multiple prisms in the prism group are used and focus lamp using identical size and/or collimation camera lens Head identical specification.
As a kind of preferred embodiment, multiple prisms 3 in the prism group use identical size, reduce prism life Die cost and Parts Inventory cost are produced, or using collimation camera lens and the scheme of amasthenic lens identical specification, reduces mirror First-born production die cost and Parts Inventory cost.
The preferred embodiments of the present invention are the foregoing is only, are not intended to limit the scope of the invention, it is every at this Under the design of invention, the equivalent structure transformation made using description of the invention and accompanying drawing content, or directly/it is used in indirectly He is included in the scope of patent protection of the present invention related technical field.

Claims (10)

1. a kind of prism spectrometer, it is characterised in that the prism spectrometer includes:
Input aperture, for accessing after the composite wavelength light that external light source is sent, is transferred to collimation camera lens;
The collimation camera lens, the transmission path for changing the composite wavelength light transmitted by the input aperture makes it accurate Directly it is irradiated to prism group;
The prism group includes multi-disc prism, for the multiple dispersion of composite wavelength light, being transferred to after generation dispersed light poly- Zoom lens, the dispersion that the composite wavelength light is produced after prism group is significantly greater than the dispersion that monolithic prism can be generated;
The amasthenic lens, for being transferred to optical sensor after the dispersed light is converged;
The optical sensor, for the dispersed light to be converted into electric signal, is transferred to electric signal process unit;
The electric signal process unit, for analyzing and processing and/or transmitting to electric signal.
2. prism spectrometer as claimed in claim 1, it is characterised in that the prism vertex angle sum in the prism group is 85 ° ~365 °.
3. prism spectrometer as claimed in claim 1, it is characterised in that the prism group includes 2~7 prisms.
4. prism spectrometer as claimed in claim 1, it is characterised in that the corner angle of the prism is 30 °~60 °.
5. prism spectrometer as claimed in claim 1, it is characterised in that the prism spectrometer also includes speculum, is used for Change the transmission direction of light path.
6. prism spectrometer as claimed in claim 5, it is characterised in that the speculum reflexes to light path so that whole light The direction of road size reduction.
7. prism spectrometer as claimed in claim 5, it is characterised in that the speculum includes the first speculum, described the One speculum is arranged between the prism group and the amasthenic lens.
8. prism spectrometer as claimed in claim 5, it is characterised in that the speculum is anti-including the first speculum and second Mirror is penetrated, first speculum is arranged between the prism group and the amasthenic lens, and second speculum is arranged at institute State between collimation camera lens and the prism group.
9. the prism spectrometer as described in claim any one of 1-8, it is characterised in that the prism spectrometer is also included into light Aperture connector and electric signal connector, one end of incidence hole footpath connector connect the input aperture, and the other end is used for Connection optical fiber enters light microscopic head, and one end of the electric signal connector connects the electric signal process unit, for exporting measurement Signal and/or data, incidence hole footpath connector and the electric signal connector are located at the homonymy of the prism spectrometer.
10. the prism spectrometer as described in claim any one of 1-8, it is characterised in that multiple prisms in the prism group Used and amasthenic lens identical specification using identical size and/or collimation camera lens.
CN201710234377.7A 2017-04-10 2017-04-10 prism spectrometer Pending CN106940218A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710234377.7A CN106940218A (en) 2017-04-10 2017-04-10 prism spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710234377.7A CN106940218A (en) 2017-04-10 2017-04-10 prism spectrometer

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107870149A (en) * 2017-11-01 2018-04-03 武汉能斯特科技有限公司 A kind of method and apparatus of spectrum of measurement and application thereof
WO2019084569A1 (en) * 2017-10-27 2019-05-02 Stratio Spectrometers with self-compensation of misalignment
US10281327B2 (en) 2016-02-11 2019-05-07 Stratio Spectrometers with self-compensation of rotational misalignment
CN113092379A (en) * 2021-04-16 2021-07-09 中国科学院长春光学精密机械与物理研究所 Spatially resolved transient system
CN114112873A (en) * 2021-11-23 2022-03-01 清华大学 Waveguide design for on-chip fluorescence dispersive optical path for flow cytometer

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN85109457A (en) * 1985-12-31 1986-07-02 北京工业学院 Become the beam prism chromatic dispersion and amplify optical spectroscopy and spectrometer
CN1373351A (en) * 2002-04-10 2002-10-09 天津大学 Apparatus for measuring raster angle with linear CCD array to determine wavelength
CN1811356A (en) * 2006-02-20 2006-08-02 天津大学 Spectral measuring method and instrument utilizing planar array photoelectric device
CN101021437A (en) * 2007-03-23 2007-08-22 江苏英特神斯科技有限公司 Micro-spectrograph based on micro-electronic mechanical system technique
CN103792797A (en) * 2014-01-24 2014-05-14 中国科学院长春光学精密机械与物理研究所 Structure of control system for functional adjustment of photoetching projection objective lens
CN104316342A (en) * 2014-11-18 2015-01-28 中国电子科技集团公司第三研究所 Underwater comprehensive pressure testing device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN85109457A (en) * 1985-12-31 1986-07-02 北京工业学院 Become the beam prism chromatic dispersion and amplify optical spectroscopy and spectrometer
CN1373351A (en) * 2002-04-10 2002-10-09 天津大学 Apparatus for measuring raster angle with linear CCD array to determine wavelength
CN1811356A (en) * 2006-02-20 2006-08-02 天津大学 Spectral measuring method and instrument utilizing planar array photoelectric device
CN101021437A (en) * 2007-03-23 2007-08-22 江苏英特神斯科技有限公司 Micro-spectrograph based on micro-electronic mechanical system technique
CN103792797A (en) * 2014-01-24 2014-05-14 中国科学院长春光学精密机械与物理研究所 Structure of control system for functional adjustment of photoetching projection objective lens
CN104316342A (en) * 2014-11-18 2015-01-28 中国电子科技集团公司第三研究所 Underwater comprehensive pressure testing device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10281327B2 (en) 2016-02-11 2019-05-07 Stratio Spectrometers with self-compensation of rotational misalignment
WO2019084569A1 (en) * 2017-10-27 2019-05-02 Stratio Spectrometers with self-compensation of misalignment
CN107870149A (en) * 2017-11-01 2018-04-03 武汉能斯特科技有限公司 A kind of method and apparatus of spectrum of measurement and application thereof
CN107870149B (en) * 2017-11-01 2020-07-31 武汉能斯特科技有限公司 Method and device for measuring spectrum and use thereof
CN113092379A (en) * 2021-04-16 2021-07-09 中国科学院长春光学精密机械与物理研究所 Spatially resolved transient system
CN114112873A (en) * 2021-11-23 2022-03-01 清华大学 Waveguide design for on-chip fluorescence dispersive optical path for flow cytometer

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Application publication date: 20170711