CN106931183B - Throttle valve - Google Patents

Abstract

A throttle valve comprises a throttle valve body, a valve stem, a sealing gasket, a bottom cover, a spring and a bushing. A flow channel is formed in the throttle valve body. The valve stem is arranged in the throttle valve body, wherein the opening size of the flow channel is adjusted by rotating the valve stem. The sealing gasket is arranged in the throttle valve body, and the sealing gasket abuts the valve stem. The bottom cover is connected to the throttle valve body, wherein an air outlet is formed on the bottom cover, and the bottom cover comprises a bottom cover flange, and the bottom cover flange surrounds the air outlet. The spring abuts the bottom cover flange and applies an elastic force to the sealing gasket, so that the sealing gasket is tightly attached to the valve stem. The spring sleeve is arranged on the bushing, and a first end of the bushing pushes the sealing gasket. The air outlet of the throttle valve of the present invention will not be blocked due to particle deposition, which can reduce the situation of repeatedly adjusting the throttle valve opening and improve the life of the throttle valve.

Description

throttle valve

technical field

The present invention relates to a throttle valve, and more particularly, to a throttle valve that can prevent particulate contamination.

Background technique

In a vapor deposition process, a deposition layer is deposited on a semiconductor wafer (or substrate), which typically involves heating the substrate and clamping the substrate so that the substrate is separated from the deposition gas (process gas). ) is maintained at a short distance, and deposition gas (process gas) flows toward the substrate. The deposition gas flow reacts and forms a deposition layer on the heated substrate.

At some point on the vacuum line between the chamber and the vacuum pump, a vacuum shut-off valve or throttle valve is usually provided to provide a restriction to the process chamber when closed. Volatile contaminants, which are maintained in a vapor state at high temperatures in the reaction chamber, undesirably condense on the inner walls of the cooled vacuum line, some distance from the reaction zone of the reaction chamber, but are still evacuated by the vacuum. within the containment limits of the process chamber defined by the valve. In the absence of airflow, these contaminants can return to the reaction zone of the chamber and cause undesired contamination. In an attempt to avoid this problem, the inner surfaces within the confines of the process chamber are periodically cleaned by etching (and/or plasma cleaning), etc., with a cleaning gas to remove the dielectric material deposited by the deposition gas.

However, the throttle valve is limited by its structural design, and contaminants can deposit on the internal parts of the throttle valve and affect the airflow control effect of the throttle valve. Since the throttle valve is generally controlled by a stepper motor, when contaminants are deposited on the internal parts of the throttle valve, the stepper motor will repeatedly adjust the throttle valve opening, thus affecting the pressure of the reaction chamber and reducing the Throttle valve life.

SUMMARY OF THE INVENTION

The present invention provides a throttle valve in order to solve the problems of the prior art, which comprises a throttle valve body, a valve stem, a sealing gasket, a bottom cover, a spring and a bushing. A flow channel is formed in the throttle body. The valve stem is arranged in the throttle valve body, wherein when the valve stem is rotated, the opening degree of the flow channel is adjusted. The sealing gasket is arranged in the throttle valve body, and the sealing gasket abuts the valve stem. The bottom cover is connected to the throttle body, wherein an air outlet is formed on the bottom cover, the bottom cover includes a bottom cover flange, and the bottom cover flange surrounds the air outlet. The spring abuts against the flange of the bottom cover and exerts an elastic force on the gasket to make the gasket close to the valve stem. The spring is sleeved on the bushing, and a first end of the bushing pushes against the gasket.

In one embodiment, the bushing includes a bushing flange, one end of the spring abuts the bottom cover flange, and the other end of the spring abuts the bushing flange.

In one embodiment, the bushing flange is formed at the first end.

In one embodiment, the bushing includes a second end extending through the air outlet.

In one embodiment, the bushing has a bushing through hole, and the diameter of the bushing through hole is smaller than that of the air outlet.

In one embodiment, the material of the bushing is aluminum alloy.

In one embodiment, the throttle body includes an air inlet, and the air inlet and the air outlet are located on the same straight line.

The present invention also relates to a throttle valve, comprising a throttle valve body, a valve stem, a sealing gasket, a bottom cover and a spring. A flow channel is formed in the throttle body. The valve stem is arranged in the throttle valve body, wherein when the valve stem is rotated, the opening degree of the flow channel is adjusted. The sealing gasket is arranged in the throttle valve body, and the sealing gasket abuts the valve stem. The bottom cover is connected to the throttle body, wherein an air outlet is formed on the bottom cover, the bottom cover includes a bottom cover flange, and the bottom cover flange surrounds the air outlet. The spring abuts against the flange of the bottom cover and exerts an elastic force on the gasket to make the gasket close to the valve stem.

In one embodiment, a gap is formed on the valve stem. When the valve stem is rotated, the position of the gap is adjusted, the opening of the flow channel is adjusted, and an abutting portion is formed on the sealing gasket. The portion abuts the valve stem in a sealing manner.

With the throttle valve of the embodiment of the present invention, since a bushing is used to isolate the air flow from the spring and the flange of the bottom cover, particles are not deposited on the flange of the spring and the bottom cover. Therefore, the air outlet of the throttle valve will no longer be blocked due to particle deposition, thus reducing the situation of repeatedly adjusting the opening degree of the throttle valve. This provides stable chamber pressure and increases the life of the throttle valve.

Description of drawings

The following drawings are only intended to illustrate and explain the present invention schematically, and do not limit the scope of the present invention. in,

FIG. 1 shows a throttle valve according to a first embodiment of the present invention.

FIG. 2 shows the bottom cover flange of the first embodiment of the present invention.

FIG. 3 shows a throttle valve according to a second embodiment of the present invention.

Figure 4 shows a bushing according to a second embodiment of the present invention.

Figure 5 shows the second end of the bushing according to the second embodiment of the present invention.

Description of reference numbers:

1, 2 ~ throttle valve;

10~ the first connection component;

11～O-ring;

12～The first gasket;

13 - the first abutting part;

14～O-ring;

20 to the second connecting component;

21～O-ring;

22～Second gasket;

23～Second abutting part;

24～O-ring;

30～Throttle valve body;

31 ~ air inlet;

40～Stem unit;

41 ~ valve stem;

42～notch;

50～bottom cover;

51 ~ air outlet;

52～Bottom cover flange;

60～spring;

70 ~ bushing;

71 ~ the first end;

72 to the second end;

73 ~ bushing flange;

74 ~ Bushing through hole.

Detailed ways

In order to make more complete and clear disclosure of the technical content, purpose and effect achieved by the present invention, the specific embodiments of the present invention are now described with reference to the accompanying drawings:

Referring to FIG. 1 , a throttle valve 1 according to a first embodiment of the present invention is shown, including a first connecting component 10 , a second connecting component 20 , a throttle valve body 30 , a valve stem unit 40 and a bottom cover 50 . The first connecting assembly 10 includes an O-ring 11 , a first gasket 12 , and an O-ring 14 . The second connection assembly 20 includes an O-ring 21 , a second gasket 22 , and an O-ring 24 . The throttle body 30 includes an air inlet 31 . The valve stem unit 40 includes a valve stem 41 , and a notch 42 is formed in the valve stem 41 . An air outlet 51 is formed on the bottom cover 50 , and the bottom cover 50 is connected to the throttle body 30 .

A flow passage is formed in the throttle body 30 (from the air inlet 31 to the air outlet 51 ). In this embodiment, the flow channel is linear, and the air inlet 31 and the air outlet 51 are located on the same straight line. The valve stem 41 is arranged in the throttle body 30 , wherein, by rotating the valve stem 41 , the position of the notch 42 is adjusted, and the opening degree of the flow channel is adjusted accordingly. The O-ring 11 is provided between the first gasket 12 and an external pipeline (not shown). The O-ring 14 is provided between the throttle body 30 and the external pipeline (not shown). The O-ring 21 is arranged between the second gasket 22 and the bottom cover 50 , and the O-ring 24 is arranged between the throttle body 30 and the bottom cover 50 .

The first gasket 12 has a first abutting portion 13 having a concave-convex shape, and the first abutting portion 13 abuts the valve stem 41 in a sealable manner. The second gasket 22 has a second abutting portion 23 having a concave-convex shape, and the second abutting portion 23 abuts the valve stem 41 in a sealable manner. The second gasket 22 is disposed in the throttle body 30 .

1 and 2 , in the first embodiment, the bottom cover 50 includes a bottom cover flange 52 , the bottom cover flange 52 surrounds the air outlet, thereby preventing particles from being deposited on the bottom cover flange 52 above. Therefore, the air outlet of the throttle valve will not be blocked due to particle deposition, thus reducing the situation of repeatedly adjusting the opening degree of the throttle valve. This provides stable chamber pressure and increases the life of the throttle valve.

Referring to FIG. 3 , it shows the throttle valve 2 according to the second embodiment of the present invention, including a first connecting component 10 , a second connecting component 20 , a throttle valve body 30 , a valve stem unit 40 , and a bottom cover 50 , a spring 60 and a bushing 70 . The first connecting assembly 10 includes an O-ring 11 , a first gasket 12 , and an O-ring 14 . The second connection assembly 20 includes an O-ring 21 , a second gasket 22 , and an O-ring 24 . The throttle body 30 includes an air inlet 31 . The valve stem unit 40 includes a valve stem 41 , and a notch 42 is formed in the valve stem 41 . An air outlet 51 is formed on the bottom cover 50 , and the bottom cover 50 is connected to the throttle body 30 .

A flow passage is formed in the throttle body 30 (from the air inlet 31 to the air outlet 51 ). In this embodiment, the flow channel is linear, and the air inlet 31 and the air outlet 51 are located on the same straight line. The valve stem 41 is arranged in the throttle body 30 , wherein, by rotating the valve stem 41 , the position of the notch 42 is adjusted, and the opening degree of the flow channel is adjusted accordingly. The O-ring 11 is provided between the first gasket 12 and an external pipeline (not shown). The O-ring 14 is provided between the throttle body 30 and the external pipeline (not shown). The O-ring 21 is arranged between the second gasket 22 and the bottom cover 50 , and the O-ring 24 is arranged between the throttle body 30 and the bottom cover 50 .

The first gasket 12 has a first abutting portion 13 having a concave-convex shape, and the first abutting portion 13 abuts the valve stem 41 in a sealable manner. The second gasket 22 has a second abutting portion 23 having a concave-convex shape, and the second abutting portion 23 abuts the valve stem 41 in a sealable manner.

The spring 60 abuts against the bottom cover flange 52 and exerts an elastic force on the second gasket 22 , so that the second gasket 22 is in close contact with the valve stem 41 . The spring 60 is sleeved on the bushing 70 , and a first end 71 of the bushing 70 pushes against the second gasket 22 . In this embodiment, the first end 71 abuts the O-ring 21 .

Referring to FIG. 3 and FIG. 4 , in this embodiment, the bushing 70 includes a bushing flange 73 , the bushing flange 73 is formed on the first end 71 , and one end of the spring 60 abuts against the bottom cover The flange 52, the other end of the spring 60 abuts the bushing flange 73. The bushing further includes a second end 72 . Referring to FIG. 5 , in one embodiment, the second end 72 extends through the air outlet 51 . In one embodiment, the bushing 70 has a bushing through hole 74 , and the diameter of the bushing through hole 74 is smaller than the diameter of the air outlet 51 .

In one embodiment, the material of the bushing 70 is aluminum alloy, so as to resist the erosion of ozone. The above disclosure does not limit the present invention, and the bushing 70 can also be made of Teflon or other materials.

Similar to the first embodiment, in this embodiment, by properly designing the width of the bottom cover flange 52 , the aperture of the air outlet 51 can be maximized, and still provide sufficient support for the spring 60 .

With the throttle valve of the second embodiment of the present invention, since a bushing is used to isolate the air flow from the spring and the flange of the bottom cover, particles are not deposited on the flange of the spring and the bottom cover. Therefore, the air outlet of the throttle valve will no longer be blocked due to particle deposition, thus reducing the situation of repeatedly adjusting the opening degree of the throttle valve. This provides stable chamber pressure and increases the life of the throttle valve.

Although the present invention has been disclosed above with specific preferred embodiments, it is not intended to limit the present invention. Anyone skilled in the art can still make some changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention should be determined by the scope of the claims.

Claims (5)

1. A choke valve, characterized in that the choke valve comprises:

a throttle body, wherein a flow passage is formed in the throttle body;

a valve rod arranged in the throttle valve body, wherein, when the valve rod is rotated, the opening of the flow passage is adjusted, a gap is formed on the valve rod, the position of the gap is adjusted by rotating the valve rod, and the opening of the flow passage is adjusted accordingly;

the first sealing gasket is arranged in the throttle valve body and is abutted against the valve rod, wherein the first sealing gasket is provided with a first abutting part in a concave-convex shape, and the first abutting part is abutted against the valve rod in a sealable mode;

the second sealing gasket is arranged in the throttle valve body and is abutted against the valve rod, wherein the second sealing gasket is provided with a concave-convex second abutting part which is abutted against the valve rod in a sealable mode;

a bottom cover connected to the throttle body, wherein an air outlet is formed on the bottom cover, the bottom cover includes a bottom cover flange surrounding the air outlet;

the spring is abutted against the flange of the bottom cover and applies elastic force to the second sealing gasket so that the second sealing gasket is tightly attached to the valve rod; and

a bushing, the spring is sleeved on the bushing, a first end of the bushing pushes the second sealing gasket,

wherein the bushing includes a bushing flange, one end of the spring abuts the bottom cap flange, the other end of the spring abuts the bushing flange, and the bushing includes a second end that extends through the air outlet.

2. The choke valve of claim 1, wherein the bushing flange is formed at the first end.

3. The throttling valve of claim 1, wherein the bushing has a bushing through hole, and the diameter of the bushing through hole is smaller than that of the outlet.

4. The throttling valve of claim 1, wherein the bushing is an aluminum alloy.

5. The choke valve of claim 1, wherein the choke body includes an inlet port, the inlet port being collinear with the outlet port.