CN106926115B - 一种研磨垫及其制作方法 - Google Patents
一种研磨垫及其制作方法 Download PDFInfo
- Publication number
- CN106926115B CN106926115B CN201710153311.5A CN201710153311A CN106926115B CN 106926115 B CN106926115 B CN 106926115B CN 201710153311 A CN201710153311 A CN 201710153311A CN 106926115 B CN106926115 B CN 106926115B
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- layer
- grinding
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- 238000000227 grinding Methods 0.000 title claims abstract description 96
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 239000000463 material Substances 0.000 claims abstract description 22
- 229920005749 polyurethane resin Polymers 0.000 claims abstract description 16
- 229910052582 BN Inorganic materials 0.000 claims abstract description 13
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 claims abstract description 13
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 13
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 13
- 239000010439 graphite Substances 0.000 claims abstract description 13
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 13
- 238000005498 polishing Methods 0.000 claims description 65
- 238000003756 stirring Methods 0.000 claims description 24
- 238000002156 mixing Methods 0.000 claims description 23
- 239000012295 chemical reaction liquid Substances 0.000 claims description 21
- 238000005187 foaming Methods 0.000 claims description 21
- 239000004745 nonwoven fabric Substances 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 21
- 239000002245 particle Substances 0.000 claims description 15
- 239000002390 adhesive tape Substances 0.000 claims description 11
- 239000006185 dispersion Substances 0.000 claims description 11
- 238000010438 heat treatment Methods 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 239000003607 modifier Substances 0.000 claims description 8
- 238000007731 hot pressing Methods 0.000 claims description 7
- 238000000465 moulding Methods 0.000 claims description 7
- 238000003754 machining Methods 0.000 claims description 6
- 238000011049 filling Methods 0.000 claims description 5
- 229920000728 polyester Polymers 0.000 claims description 5
- 229920001296 polysiloxane Polymers 0.000 claims description 5
- 239000002994 raw material Substances 0.000 claims description 5
- 239000004094 surface-active agent Substances 0.000 claims description 5
- 230000001680 brushing effect Effects 0.000 claims description 4
- 238000006243 chemical reaction Methods 0.000 claims description 4
- XPPKVPWEQAFLFU-UHFFFAOYSA-J diphosphate(4-) Chemical compound [O-]P([O-])(=O)OP([O-])([O-])=O XPPKVPWEQAFLFU-UHFFFAOYSA-J 0.000 claims description 4
- 235000011180 diphosphates Nutrition 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 239000004970 Chain extender Substances 0.000 claims description 3
- 239000011230 binding agent Substances 0.000 claims description 3
- 239000012948 isocyanate Substances 0.000 claims description 3
- 150000002513 isocyanates Chemical class 0.000 claims description 3
- 229920005862 polyol Polymers 0.000 claims description 3
- 150000003077 polyols Chemical class 0.000 claims description 3
- 229920005989 resin Polymers 0.000 claims description 3
- 239000011347 resin Substances 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 100
- 238000005520 cutting process Methods 0.000 description 4
- 229910003460 diamond Inorganic materials 0.000 description 4
- 239000010432 diamond Substances 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- -1 polysiloxane Polymers 0.000 description 3
- 239000002344 surface layer Substances 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
- B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710153311.5A CN106926115B (zh) | 2017-03-15 | 2017-03-15 | 一种研磨垫及其制作方法 |
Applications Claiming Priority (1)
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---|---|---|---|
CN201710153311.5A CN106926115B (zh) | 2017-03-15 | 2017-03-15 | 一种研磨垫及其制作方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106926115A CN106926115A (zh) | 2017-07-07 |
CN106926115B true CN106926115B (zh) | 2022-12-09 |
Family
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Family Applications (1)
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CN201710153311.5A Active CN106926115B (zh) | 2017-03-15 | 2017-03-15 | 一种研磨垫及其制作方法 |
Country Status (1)
Country | Link |
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CN (1) | CN106926115B (zh) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108436793A (zh) * | 2018-03-23 | 2018-08-24 | 桂林三仕研磨材料有限责任公司 | 一种环保双面胶贴的柔性电镀金刚石磨盘及其制作方法 |
CN110744444B (zh) * | 2019-10-29 | 2022-02-15 | 武汉新芯集成电路制造有限公司 | 研磨垫及研磨装置 |
CN111360706A (zh) * | 2020-03-19 | 2020-07-03 | 惠安宇信金刚石工具有限公司 | 一种抛光垫及其制备方法和在大理石抛光中的应用 |
CN112247831B (zh) * | 2020-10-23 | 2022-02-08 | 德阳精研科技(深圳)有限公司 | 一种自动加工研磨垫工艺方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1451331A (en) * | 1973-08-24 | 1976-09-29 | Minnesota Mining Mfg Uk | Abrasive sheet material |
WO1993012911A1 (en) * | 1991-12-20 | 1993-07-08 | Minnesota Mining And Manufacturing Company | A coated abrasive belt with an endless, seamless backing and method of preparation |
EP0786803A1 (en) * | 1996-01-25 | 1997-07-30 | Shin-Etsu Handotai Company Limited | Backing pad and method for polishing semiconductor wafer therewith |
FR2820666A1 (fr) * | 2001-02-14 | 2002-08-16 | Arjo Wiggins Sa | Support autoagrippant pour un produit abrasif applique et procede de fabrication dudit produit abrasif l'incorporant |
EP1489652A2 (en) * | 1995-09-22 | 2004-12-22 | Minnesota Mining And Manufacturing Company | Method of modifying a surface of a semiconductor wafer |
CN103492124A (zh) * | 2011-04-21 | 2014-01-01 | 东洋橡胶工业株式会社 | 层叠研磨垫用热熔粘接剂片、及带有层叠研磨垫用粘接剂层的支持层 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007181907A (ja) * | 2006-01-10 | 2007-07-19 | Toyo Tire & Rubber Co Ltd | 積層研磨パッド |
JP5385653B2 (ja) * | 2009-03-25 | 2014-01-08 | 株式会社アドマテックス | 研磨用パッド及び研磨方法 |
-
2017
- 2017-03-15 CN CN201710153311.5A patent/CN106926115B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1451331A (en) * | 1973-08-24 | 1976-09-29 | Minnesota Mining Mfg Uk | Abrasive sheet material |
WO1993012911A1 (en) * | 1991-12-20 | 1993-07-08 | Minnesota Mining And Manufacturing Company | A coated abrasive belt with an endless, seamless backing and method of preparation |
EP1489652A2 (en) * | 1995-09-22 | 2004-12-22 | Minnesota Mining And Manufacturing Company | Method of modifying a surface of a semiconductor wafer |
EP0786803A1 (en) * | 1996-01-25 | 1997-07-30 | Shin-Etsu Handotai Company Limited | Backing pad and method for polishing semiconductor wafer therewith |
FR2820666A1 (fr) * | 2001-02-14 | 2002-08-16 | Arjo Wiggins Sa | Support autoagrippant pour un produit abrasif applique et procede de fabrication dudit produit abrasif l'incorporant |
CN103492124A (zh) * | 2011-04-21 | 2014-01-01 | 东洋橡胶工业株式会社 | 层叠研磨垫用热熔粘接剂片、及带有层叠研磨垫用粘接剂层的支持层 |
Also Published As
Publication number | Publication date |
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CN106926115A (zh) | 2017-07-07 |
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PB01 | Publication | ||
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CB02 | Change of applicant information |
Address after: 523843 Dongguan City, Guangdong Province, Dongcheng Street Niu Shan outside the Industrial Park Wei Feng Road No. 2 Applicant after: DONGGUAN HUAJING POWDER METALLURGY Co.,Ltd. Applicant after: Guangdong Jinsheng Intelligent Group Co.,Ltd. Address before: 523843 Dongguan City, Guangdong Province, Dongcheng Street Niu Shan outside the Industrial Park Wei Feng Road No. 2 Applicant before: DONGGUAN HUAJING POWDER METALLURGY Co.,Ltd. Applicant before: JANUS ( DONGGUAN ) PRECISION COMPONENTS Co.,Ltd. |
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TA01 | Transfer of patent application right | ||
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Effective date of registration: 20190807 Address after: 523843 No. 2 Weifeng Road, Niushan External Economic Industrial Park, Dongcheng Street, Dongguan City, Guangdong Province Applicant after: DONGGUAN HUAJING POWDER METALLURGY Co.,Ltd. Address before: 523843 No. 2 Weifeng Road, Niushan External Economic Industrial Park, Dongcheng Street, Dongguan City, Guangdong Province Applicant before: DONGGUAN HUAJING POWDER METALLURGY Co.,Ltd. Applicant before: Guangdong Jinsheng Intelligent Group Co.,Ltd. |
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