CN106896113B - Defect detection system and method - Google Patents
Defect detection system and method Download PDFInfo
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- CN106896113B CN106896113B CN201710035668.3A CN201710035668A CN106896113B CN 106896113 B CN106896113 B CN 106896113B CN 201710035668 A CN201710035668 A CN 201710035668A CN 106896113 B CN106896113 B CN 106896113B
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- 230000007547 defect Effects 0.000 title claims abstract description 77
- 238000001514 detection method Methods 0.000 title claims description 31
- 238000000034 method Methods 0.000 title claims description 12
- 239000012788 optical film Substances 0.000 claims abstract description 87
- 230000000737 periodic effect Effects 0.000 claims description 20
- 238000003384 imaging method Methods 0.000 claims 1
- 238000007689 inspection Methods 0.000 abstract description 9
- 230000003287 optical effect Effects 0.000 description 25
- 239000010408 film Substances 0.000 description 8
- 239000010409 thin film Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- QHIWVLPBUQWDMQ-UHFFFAOYSA-N butyl prop-2-enoate;methyl 2-methylprop-2-enoate;prop-2-enoic acid Chemical compound OC(=O)C=C.COC(=O)C(C)=C.CCCCOC(=O)C=C QHIWVLPBUQWDMQ-UHFFFAOYSA-N 0.000 description 1
- 229920002678 cellulose Polymers 0.000 description 1
- 239000001913 cellulose Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 230000003678 scratch resistant effect Effects 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000007514 turning Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9511—Optical elements other than lenses, e.g. mirrors
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
一种用于检测被移送的光学薄膜的缺陷检测系统，包括光源、影像捕获设备及狭缝板。光源配置于光学薄膜的一侧，影像捕获设备配置于光学薄膜的另一侧。狭缝板具有狭缝，狭缝板配置于光源与光学薄膜之间，以使入射光线穿过狭缝。其中，影像捕获设备偏移自光源与狭缝的延伸连线。
A defect inspection system for inspecting transferred optical films includes a light source, an image capture device, and a slit plate. The light source is arranged on one side of the optical film, and the image capturing device is arranged on the other side of the optical film. The slit plate has a slit, and the slit plate is arranged between the light source and the optical film, so that the incident light can pass through the slit. Wherein, the image capturing device is offset from the extending connection line between the light source and the slit.
Description
Technical Field
The present invention relates to an optical inspection system and method, and more particularly, to an optical inspection system and method for inspecting defects of an optical film.
Background
With the development of technology, the demand for various optical components used in liquid crystal display devices is also high. However, in the production process of the optical element, defects are easily generated due to various factors, thereby reducing the display quality. Therefore, a defective detection system is provided in the production system of the optical element, and the optical element having the defect is early excluded.
Disclosure of Invention
The invention relates to a defect detection system and a defect detection method.A light source and a slit are connected in an offset manner by an image capture device, and light can be scattered when irradiating concave-convex defects on an optical film, so that the offset image capture device can receive the scattered light generated by the concave-convex defects, and the image contrast of a defect area shot by the image capture device is improved.
According to an embodiment of the present invention, a defect inspection system for inspecting an optical film being transferred is provided. The defect detection system comprises a light source, an image capturing device and a slit plate. The light source is arranged on one side of the optical film. The image capturing device is arranged on the other side of the optical film. The slit plate is provided with a slit and is arranged between the light source and the optical film so as to enable an incident light to pass through the slit. Wherein the image capturing device is offset from the extended line connecting the light source and the slit.
Wherein the incident light is vertically incident into the optical film.
Wherein the width of the slit is 1.5-2.5 mm.
When the image sensor of the image capturing device is aligned with the extending connection line of the light source and the slit, the sensed image brightness is I0(ii) a When the image capture device is deviated from the extending connection line of the light source and the slit in the direction parallel to the moving direction of the optical film, the sensed image brightness is I1(ii) a Wherein, I1/I00.5 to 0.9, a defect site of the optical film can be observed.
Wherein, this defect detection system further includes: and the moving unit is used for moving the image capturing equipment in a direction parallel to the moving direction of the optical film.
According to another embodiment of the present invention, a method for detecting defects of an optical film being transferred is provided. The defect detection method includes the following steps. A light source is provided and is arranged on one side of the optical film. An image capturing device is provided, and the image capturing device is arranged on the other side of the optical film. A slit plate is provided, the slit plate is provided with a slit, and the slit plate is configured between the light source and the optical film so as to enable an incident light to pass through the slit. Then, the image capturing device is shifted from the extended connection line of the light source and the slit.
In the step of providing the light source and the slit plate, the incident light is vertically incident into the optical film.
Wherein the width of the slit is 1.5-2.5 mm.
Wherein, the defect detection method further comprises:
and providing a moving unit, wherein the moving unit moves the image capturing device in the moving direction of the optical film.
Wherein, the defect detection method further comprises:
providing an image processing unit, wherein the image processing unit receives and processes the image signal sent by the image capturing device;
providing a periodic signal generating unit, wherein the periodic signal generating unit sends a periodic signal according to the moving speed of the optical film; and
and providing a control unit, wherein the control unit is coupled with the image processing unit, receives the periodic signal from the periodic signal generating unit and transmits a camera shooting signal to the image capturing equipment.
Drawings
In order to better understand the above and other aspects of the present invention, the following detailed description of the preferred embodiments is made with reference to the accompanying drawings, in which:
FIG. 1 shows a defect detection system according to an embodiment of the invention.
FIG. 2 illustrates a top view of the defect detection system of FIG. 1.
Wherein, the reference numbers:
10: optical film
11: roller wheel
12: image processing unit
13: control unit
14: periodic signal generating unit
100: defect detection system
110: light source
110 a: luminous surface
120: image capturing device
130: slit plate
130 s: slit
D1: direction of movement
P: region(s)
LA: optical axis
Li: incident light ray
Ls: scattered light
Detailed Description
Conventional defect detection systems use the principle of light penetration to detect foreign object defects. Since the foreign matter defect on the optical element shields light, the captured transmitted light image detects a dark spot, and is therefore suitable for detecting a foreign matter defect. However, the defect detecting system is not easy to detect the concave-convex defect, i.e. the defect caused by the local variation of the thickness of the optical element.
The invention relates to a defect detection system and a method. Referring to fig. 1, a defect detection system 100 according to an embodiment of the invention is shown. The defect inspection system 100 can be used to inspect the transferred optical film 10, the optical film 10 is transported along a moving direction D1 through the roller 11 in the production line, and the defect inspection system 100 can identify the defect in real time and early remove the defect. In one embodiment, the present invention may be used to inspect optical film webs or sheet-like optical films.
The defect detection system 100 may be adapted for use with a variety of optical films. For example, the optical film 10 can be a single-layer or multi-layer film, such as a polarizer, a retardation film, a brightness enhancement film, or other films that may be useful for optical gain, alignment, compensation, turning, cross-linking, diffusion, protection, anti-sticking, scratch-resistant, anti-glare, reflection suppression, high refractive index, etc.; a polarizing plate, a retardation film, and the like, in which a protective film is attached to at least one surface of the polarizer; protective film, the material may be selected, for example, from: cellulose-based resins, acrylic resins, noncrystalline polyolefin-based resins, polyester-based resins, polycarbonate-based resins, and combinations thereof, but the present disclosure is not limited to these films.
The defect detection system 100 includes a light source 110 and an image capturing device 120. Which may be, for example, a fluorescent lamp, a metal halide lamp, or an LED lamp, the light source 110 has a light emitting surface 110 a. In a preferred embodiment, the light source 110 is an LED lamp. The image capturing Device 120 may be a line scan camera having an image sensor IS, such as a Charge Coupled Device (CCD) or any Device with photoelectric conversion capability.
As shown in fig. 1, the light source 110 and the image capturing device 120 are disposed on opposite sides of the transferred optical film 10. Specifically, the light source 110 irradiates light from one side of the optical film 10, and the image capturing device 120 receives a transmitted light image of the light transmitted through the optical film 10 at the other side of the optical film 10. In the present disclosure, the irradiation angle of light is not particularly limited. In a preferred embodiment, the light source 110 irradiates light perpendicularly on one side of the optical film 10, that is, the incident light Li along the optical axis LA of the light emitting surface 110a of the light source 110 irradiates light perpendicularly to the surface of the optical film 10. Here, the optical axis LA is an imaginary line which is a normal line of the light emitting surface 110 a. In one embodiment, the image capturing device 120 captures an image of the optical film 10 directly opposite to the surface of the optical film 10, that is, the image capturing device 120 captures the optical film 10 in a direction parallel to the optical axis LA of the light emitting surface 110a of the light source 110, that is, the image capturing device 120 does not capture the optical film 10 at an oblique angle.
In one embodiment, the defect detection system 100 further includes a slit plate 130, and the slit plate 130 may be made of metal, ceramic or polymer material. In a preferred embodiment, the slit plate 130 is made of metal. The slit plate 130 is disposed between the light source 110 and the optical film 10 to limit the traveling angle of the light. Specifically, the slit plate 130 has a slit 130s, and the slit 130s is aligned with the optical axis LA of the light emitting surface 110a of the light source 110 to improve the directivity of the light entering the optical film 10, so that the incident light is relatively straight. In a preferred embodiment, an extending connection line between the optical axis LA of the light emitting surface 110a of the light source 110 and a central axis (not labeled) of the slit 130s is perpendicular to the surface of the optical film 10, so as to limit the incident light Li passing through the slit 130s from being irradiated perpendicular to the surface of the optical film 10.
However, as shown in fig. 1, in the present invention, the image capturing device 120 is offset from the extended line connecting the light source 110 and the slit 130 s. That is, the image capturing device 120 is not aligned with the extending connection line between the optical axis LA of the light emitting surface 110a of the light source 110 and the central axis of the slit 130 s. That is, the image capturing device 120 is not located on the extension line of the optical axis LA of the light emitting surface 110a and the central axis of the slit 130 s. Specifically, the image capturing device 120 may be moved in a direction parallel to the moving direction D1 of the optical film 10, for example, a moving unit may control the movement of the image capturing device 120, so that the image capturing device 120 is offset from the extending connection line of the light source 110 and the slit 130 s. The moving unit is, for example, installed at a position of the image capturing device 120, and can move the image capturing device 120 through manual adjustment; in another embodiment, the image capturing device 120 may also be mechanically moved by remote control, and in this embodiment, a sliding rail (not shown) and other moving units may be additionally disposed, which is not described herein again. When the image capturing device 120 is moved, the image capturing device 120 may be moved to the upstream side in the moving direction D1 of the optical film 10 or to the downstream side in the moving direction D1 of the optical film 10.
While the above embodiment describes the image capturing device 120 as being moved, in another embodiment, the image capturing device 120 may be fixed, and the light source 110 and the slit plate 130 are simultaneously and integrally moved in the direction D1 parallel to the moving direction of the optical film 10 (or in the opposite direction), so that the image capturing device 120 is shifted from the extended line of the light source 110 and the slit 130 s.
According to the above embodiment, since only the incident light Li passing through the slit 130s can be incident on the optical thin film 10, the directivity of the light incident on the optical thin film 10 can be improved, and since the diffraction effect is generated when the light passes through the slit 130s, the interference fringes of alternating bright and dark are generated on the optical thin film 10, so that the brightness change caused by the concave-convex defect on the optical thin film 10 can be more easily detected. In addition, when the incident light Li passing through the slit 130s passes through the region P (i.e., the concave-convex defect) of the optical thin film 10 where the thickness is locally changed, the light is scattered. Since the image capturing device 120 is offset from the extended line of the light source 110 and the slit 130s, the image capturing device 120 can receive a portion of the scattered light Ls, which affects the amount of light received by the image capturing device 120. On the other hand, in the case of having no concave-convex defect, since no scattered light is generated, the amount of light received by the image capturing apparatus 120 does not change. Therefore, as long as the incident light Li passes through the concave-convex defect on the optical film 10, the light will scatter to affect the light quantity received by the image capturing device 120, and compared with the area without the concave-convex defect, the brightness of the image received by the image capturing device 120 will change, so that the image contrast of the concave-convex defect area can be improved, and whether the defect exists can be detected more easily.
When the image sensor IS of the image capturing device 120 IS aligned with the extending connection line of the light source 110 and the slit 130s, the sensed image brightness IS I0. Then, if the image capturing device 120 moves in the direction D1 parallel to the moving direction of the optical film 10 and is shifted from the extended connection line between the light source 110 and the slit 130s,the sensed image brightness is decreased to I1. In the present disclosure, may be according to I1/I0The offset of the image capturing device 120 or the optical film 10 is adjusted according to the ratio of the first to the second. When I is1/I0In the range of 0.5 to 0.9, preferably in the range of I1/I0When the brightness is between 0.8 and 0.85, the brightness variation caused by the concave-convex defect of the optical film 10 can be observed sufficiently, and the defect position point can be positioned. In one embodiment, the location of the concave-convex defect can be marked on the optical film at the same time in the process.
In one embodiment, I1/I0More preferably 0.8 to 0.83, and the observed image contrast can be better to detect the concave-convex defect position points of the optical film.
In addition, the defect detecting system 100 further includes an image processing unit 12, a periodic signal generating unit 14, and a control unit 13. The image processing unit 12 can receive and process the image signal sent by the image capturing device 120 to perform image processing on the signal, and the image processing unit 12 can be, for example, an image capturing card. The periodic signal generating unit 14 may send a periodic signal according to the moving speed of the optical film 10, such as an encoder. The control unit 13 may be coupled to the image processing unit 12, and may receive the periodic signal from the periodic signal generating unit 14 and transmit the image capturing signal to the image capturing apparatus 120, and the control unit 13 may be a computer, for example. Thereby, the operator can obtain the transmitted light image captured by the image capturing device 120 from the control unit 13 to detect whether the image is defective or not.
Referring to fig. 2, a top view of the defect detection system 100 of fig. 1 is shown. The defect inspection system 100 may include a plurality of image capturing devices 120, and the image capturing devices 120 are arranged perpendicular to the moving direction D1 of the optical film 10, so that the optical film 10 can capture an image of transmitted light by the image capturing devices 120 during the transportation process, thereby inspecting the entire optical film 10 for defects.
As shown in fig. 2, the light emitting surface 110a of the light source 110 may have a rectangular shape, and the slit plate 130 may also have a rectangular shape. As can be seen from fig. 2, the slit plate 130 is composed of two shutters, so that the width of the slit 130s can be adjusted by adjusting the distance between the two shutters. In this case, the width of the slit 130s may be 1.5 to 2.5 mm. In a preferred embodiment, the width of the slit 130s is 2 mm.
As shown in fig. 2, the longitudinal direction of the slit 130s is parallel to the longitudinal direction of the light emitting surface 110a of the light source 110, the width direction of the slit 130s is parallel to the width direction of the light emitting surface 110a of the light source 110, the longitudinal direction of the slit 130s is perpendicular to the moving direction D1 of the optical film 10, and the width direction of the slit 130s is parallel to the moving direction D1 of the optical film 10. In addition, the length of the slit 130s is longer than the width of the transferred optical film 10, and the width of the slit 130s is shorter than the width of the light emitting surface 110a, so that only the light passing through the slit 130s (i.e., the incident light Li passing through the slit 130s along the optical axis LA in fig. 1) among the light emitted from the light source 110 is incident on the optical film 10, thereby preventing the influence of ambient light from degrading the image contrast.
The defect inspection system 100 and the defect inspection method provided above can make it easier for the operator to detect whether the optical film 10 has a concave-convex defect. The defect detection system 100 arranges the slit plate 130 between the light source 110 and the optical film 10 to be transferred, and aligns the slit 130s with the optical axis LA of the light emitting surface 110a of the light source 110 to improve the directivity of the light incident on the optical film 10. Furthermore, the image capturing device 120 is not disposed aligned with the optical axis LA, but is offset from the extended line connecting the light source 110 and the slit 130 s. As a result, when the incident light Li passes through the concave-convex defect on the optical film 10, the light is scattered, and the image capturing device 120 can receive the scattered light Ls. The defect detecting system 100 can determine whether the optical film 10 has a defect by receiving the scattered light Ls, and if there is a significant change in the light received by the image capturing device 120 or there is a significant contrast, it indicates that there is a concave-convex defect.
The present invention is capable of other embodiments, and various changes and modifications may be made by one skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (10)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW105143448A TWI628429B (en) | 2016-12-27 | 2016-12-27 | Defect inspection system and defect inspection method |
| TW105143448 | 2016-12-27 |
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| CN106896113A CN106896113A (en) | 2017-06-27 |
| CN106896113B true CN106896113B (en) | 2021-08-17 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109781743A (en) * | 2017-11-14 | 2019-05-21 | 鹤立精工股份有限公司 | Optical detection method |
| TWI629665B (en) * | 2017-11-24 | 2018-07-11 | 住華科技股份有限公司 | Defect inspection method and defect inspection system |
| JP7051445B2 (en) * | 2018-01-10 | 2022-04-11 | 日東電工株式会社 | Continuous inspection method and continuous inspection device for optical display panel, and continuous manufacturing method and continuous manufacturing system for optical display panel. |
| CN108414531A (en) * | 2018-04-18 | 2018-08-17 | 常州市安视智能科技有限公司 | A kind of fexible film defect detecting device and its detection method based on machine vision |
| KR20200015050A (en) * | 2018-08-02 | 2020-02-12 | (주)제이티 | Slit light source and vision inspection apparatus having the same |
| TWI676797B (en) * | 2019-03-12 | 2019-11-11 | 住華科技股份有限公司 | Optical film detecting device and optical film detecting method |
| CN111929317A (en) * | 2020-07-08 | 2020-11-13 | 昆山之奇美材料科技有限公司 | Polarizing film defect detection system and method |
| CN115326828A (en) * | 2022-08-09 | 2022-11-11 | 福清轩朗光电科技有限公司 | AOI detection mechanism for optical diaphragm |
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| US6796697B1 (en) * | 2001-10-04 | 2004-09-28 | Kla-Tencor, Inc. | Illumination delivery system |
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| JP5563372B2 (en) * | 2010-05-20 | 2014-07-30 | 第一実業ビスウィル株式会社 | Appearance inspection device |
| FR2981161B1 (en) * | 2011-10-10 | 2014-06-13 | Altatech Semiconductor | BLACK FIELD SEMICONDUCTOR PLATELET INSPECTION DEVICE |
| CN203965318U (en) * | 2013-12-17 | 2014-11-26 | 长春博信光电子有限公司 | Coating of optical lens layer pick-up unit |
| KR20150086633A (en) * | 2014-01-20 | 2015-07-29 | 동우 화인켐 주식회사 | Apparatus of inspecting optical film and method of inspecting the same |
| CN104316541A (en) * | 2014-11-12 | 2015-01-28 | 京东方科技集团股份有限公司 | Defect detection device and polaroid attaching equipment |
| TWI534008B (en) * | 2015-04-30 | 2016-05-21 | 住華科技股份有限公司 | Optical film, manufacturing method of the same and display panel using the same |
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2016
- 2016-12-27 TW TW105143448A patent/TWI628429B/en active
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| US5691811A (en) * | 1995-02-10 | 1997-11-25 | Central Glass Company, Limited | Method of and apparatus for detecting defect of transparent sheet as sheet glass |
| CN101551343A (en) * | 2008-03-31 | 2009-10-07 | 富士胶片株式会社 | Method and apparatus for detecting film defect |
| CN105372257A (en) * | 2014-08-19 | 2016-03-02 | 东友精细化工有限公司 | Optical membrane inspecting device |
| CN204330626U (en) * | 2014-12-24 | 2015-05-13 | 日东电工株式会社 | Transmission-type flaw detection apparatus |
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| TW201823710A (en) | 2018-07-01 |
| CN106896113A (en) | 2017-06-27 |
| TWI628429B (en) | 2018-07-01 |
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