CN106893989B - A kind of silver titanium alloy target crack resistence rolling mill practice - Google Patents
A kind of silver titanium alloy target crack resistence rolling mill practice Download PDFInfo
- Publication number
- CN106893989B CN106893989B CN201611243155.3A CN201611243155A CN106893989B CN 106893989 B CN106893989 B CN 106893989B CN 201611243155 A CN201611243155 A CN 201611243155A CN 106893989 B CN106893989 B CN 106893989B
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- Prior art keywords
- rolling
- silver
- titanium alloy
- casting
- alloy target
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- 238000005096 rolling process Methods 0.000 title claims abstract description 59
- 229910001069 Ti alloy Inorganic materials 0.000 title claims abstract description 25
- MZFIXCCGFYSQSS-UHFFFAOYSA-N silver titanium Chemical compound [Ti].[Ag] MZFIXCCGFYSQSS-UHFFFAOYSA-N 0.000 title claims description 11
- 238000005266 casting Methods 0.000 claims abstract description 52
- 238000000137 annealing Methods 0.000 claims abstract description 26
- 238000005098 hot rolling Methods 0.000 claims abstract description 19
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 18
- 235000014347 soups Nutrition 0.000 claims abstract description 18
- 239000010936 titanium Substances 0.000 claims abstract description 15
- 238000002791 soaking Methods 0.000 claims abstract description 14
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 14
- 229910052709 silver Inorganic materials 0.000 claims abstract description 11
- 239000004332 silver Substances 0.000 claims abstract description 11
- 229910052751 metal Inorganic materials 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims abstract description 8
- 238000005336 cracking Methods 0.000 abstract description 7
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 8
- 229910045601 alloy Inorganic materials 0.000 description 8
- 239000000956 alloy Substances 0.000 description 8
- 239000013078 crystal Substances 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 230000008018 melting Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 229910001316 Ag alloy Inorganic materials 0.000 description 1
- 208000037656 Respiratory Sounds Diseases 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 239000010946 fine silver Substances 0.000 description 1
- 238000007499 fusion processing Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 210000001161 mammalian embryo Anatomy 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Metal Rolling (AREA)
Abstract
The invention belongs to metal rolled technical field, in particular to silver and titanium are carried out casting ingot casting, then pass through the hot-rolled process roll forming above together by a kind of silver-colored titanium alloy target crack resistence rolling mill practice；Wherein when first of hot rolling, annealing temperature is 200~800 DEG C, and soaking time is 1~3 hour, and rolling direction is 10~30% perpendicular to molten soup casting direction, rolling reduction；Afterwards when road hot rolling, annealing temperature is 200~800 DEG C, and soaking time is 0.5~3 hour, and rolling direction is 10~30% perpendicular to molten soup casting direction, rolling reduction.Present invention process can make the cracking rate of silver-colored titanium alloy target hot rolling drop to 0%, avoid rolling failure bring and scrap expenditure, save rolling cost.
Description
Technical field
The present invention relates to metal rolled technical field, in particular to a kind of silver-colored titanium alloy target crack resistence rolling mill practice.
Background technique
Target by the material of " attack ", is usually applied to plated film industry as its name suggests.General target, to purity, gas
Element of volume, metallographic etc. have strict requirements, therefore, during preparation, have certain technology problem.
For alloys target, the uniformity of ingredient and microstructure is even more important.In the fusion process of alloys target, Mou Xieyuan
Element is readily volatilized or is segregated, and causes alloying element content component ratio difference or Tissue distribution in ingot casting uneven, and then influence it
Machine-shaping property.And silver-colored titanium alloy is in the certain range of Ti content, plastically deformed performance compares fine silver and solid-solution type silver
Alloy is poor, since titanium elements have alloy strengthening effect, increases the non-deformability of material, significantly reduces plasticity, increase
Brittleness.Cause to will appear various problems in the operation of rolling, for example, crackle generates, and rolls embryo side cracking, serious extrusion ingot length side
To cracking.Due to silver-colored titanium alloy roll it is easy to crack, cause material rate is low, cost of manufacture increase severely.
Therefore, it is necessary to provide a kind of silver-colored titanium alloy target crack resistence rolling mill practice formula to solve problem above.
Summary of the invention
The main object of the present invention is to provide for a kind of silver-colored titanium alloy target crack resistence rolling mill practice.
The present invention is achieved through the following technical solutions above-mentioned purpose:
A kind of silver titanium alloy target crack resistence rolling mill practice, carries out casting ingot casting for silver and titanium, then passes through one or more
Hot-rolled process roll forming；Wherein when first of hot rolling, annealing temperature is 200~800 DEG C, and soaking time is 1~3 hour,
Rolling direction is 10~30% perpendicular to molten soup casting direction, rolling reduction；Afterwards when road hot rolling, annealing temperature is 200~800
DEG C, soaking time is 0.5~3 hour, and rolling direction is 10~30% perpendicular to molten soup casting direction, rolling reduction.
Specifically, the silver titanium alloy includes the titanium, 0.5wt% foreign metal below and surplus of 0.1~5wt%
Silver.
Specifically, annealing temperature is 400~600 DEG C in first of hot rolling, soaking time is 2~3 hours.
Specifically, rolling reduction is 10~25% in first of hot rolling.
Specifically, annealing temperature is 300~500 DEG C in rear road hot rolling, soaking time is 0.5~2 hour.
Specifically, rolling reduction is 20~30% after described in road hot rolling.
Compared with prior art, a kind of beneficial effect of silver-colored titanium alloy target crack resistence rolling mill practice of the present invention is:
This technique can make the cracking rate of silver-colored titanium alloy target hot rolling drop to 0%, avoid rolling failure bring and scrap
Expenditure, saves rolling cost.
Specific embodiment
A kind of silver titanium alloy target crack resistence rolling mill practice, carries out casting ingot casting for silver and titanium, then passes through one or more
Hot-rolled process roll forming；Wherein when first of hot rolling, annealing temperature is 200~800 DEG C, and soaking time is 1~3 hour,
Rolling direction is 10~30% perpendicular to molten soup casting direction, rolling reduction；Afterwards when road hot rolling, annealing temperature is 200~800
DEG C, soaking time is 0.5~3 hour, and rolling direction is 10~30% perpendicular to molten soup casting direction, rolling reduction.
Wherein rolling reduction=(ingoing ga(u)ge-outgoing gauge)/ingoing ga(u)ge.
Crack resistence principle of the invention is that casting ingot structure presentation centre is coarse equiax crystal, and mould contact surface is tiny
Equiax crystal will appear excessive columanar structure between coarse equiax crystal and tiny equiax crystal, and perpendicular to casting direction, titanium member
Element can be precipitated in silver, so control rolling direction and rolling temperature and deflection when rolling, can effectively prevent alloy and open
Split problem.
The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention..
Embodiment 1-1
1. being cast into 0.1wt% titanium ingot, 99.9wt% silver ingot (foreign metal < 0.5wt%) congruent melting with a thickness of H1Silver-colored titanium
Alloy cast ingot；
2. silver-colored titan alloy casting ingot is turned direction, it is placed in annealing furnace, keeps the temperature 1 hour at 800 DEG C, then along vertical
Directly it is rolled into the direction of molten soup casting with a thickness of 0.9H1Level-one roll ingot casting；
3. level-one rolling ingot casting is placed in annealing furnace again, 0.5 hour is kept the temperature at 800 DEG C, then further along vertical
It is rolled into the direction of molten soup casting with a thickness of 0.7H1Second level roll ingot casting；
4. second level rolling ingot casting is placed in annealing furnace again, 0.5 hour is kept the temperature at 800 DEG C, then further along vertical
It is rolled into the direction of molten soup casting with a thickness of 0.5H1Three-level roll ingot casting, rolling total deformation is 50%, without opening
It splits.
This technique makes the cracking rate of silver-colored titanium alloy target hot rolling drop to 0%, avoids rolling failure bring and scraps branch
Out, rolling cost is saved.
Embodiment 1-2
1. being cast into 0.1wt% titanium ingot, 99.9wt% silver ingot (foreign metal < 0.5wt%) congruent melting with a thickness of H1Silver-colored titanium
Alloy cast ingot；
2. silver-colored titan alloy casting ingot is turned direction, it is placed in annealing furnace, keeps the temperature 3 hours at 200 DEG C, then along vertical
Directly it is rolled into the direction of molten soup casting with a thickness of 0.7H1Level-one roll ingot casting；
3. by level-one rolling ingot casting be placed in annealing furnace again, keep the temperature 3 hours at 200 DEG C, then further along perpendicular to
The direction of molten soup casting is rolled into a thickness of 0.5H1Second level roll ingot casting, rolling total deformation be 50%, no cracking.
Compared with embodiment 1-1, silver-colored titanium initial mass than close, ingot casting original depth is identical and total rolling reduction not
Become, difference is that hot-roll forming number is different, and annealing temperature is different.The latter's holding temperature is low and soaking time is long, wants to equipment
It asks low but to spend more time.
Embodiment 2-1
1. being cast into 5wt% titanium ingot, 95wt% silver ingot (foreign metal < 0.5wt%) congruent melting with a thickness of H2Silver-colored titanium alloy
Ingot casting；
2. silver-colored titan alloy casting ingot is turned direction, it is placed in annealing furnace, keeps the temperature 2 hours at 600 DEG C, then along vertical
Directly it is rolled into the direction of molten soup casting with a thickness of 0.9H2Level-one roll ingot casting；
3. by level-one rolling ingot casting be placed in annealing furnace again, keep the temperature 1 hour at 550 DEG C, then further along perpendicular to
The direction of molten soup casting is rolled into a thickness of 0.81H2Second level roll ingot casting；
4. second level rolling ingot casting is placed in annealing furnace again, 0.5 hour is kept the temperature at 500 DEG C, then further along vertical
It is rolled into the direction of molten soup casting with a thickness of 0.6H1Three-level roll ingot casting, rolling total deformation is 40%, without opening
It splits.
Because reducing as rolling number becomes more thickness, annealing heating is easier to be heated evenly, road annealing temperature after institute
It can be gradually reduced with annealing time, rolling reduction can also become larger.
Embodiment 2-2
1. being cast into 5wt% titanium ingot, 95wt% silver ingot (foreign metal < 0.5wt%) congruent melting with a thickness of H2Silver-colored titanium alloy
Ingot casting；
2. silver-colored titan alloy casting ingot is turned direction, it is placed in annealing furnace, keeps the temperature 3 hours at 300 DEG C, then along vertical
Directly it is rolled into the direction of molten soup casting with a thickness of 0.75H1Level-one roll ingot casting；
3. by level-one rolling ingot casting be placed in annealing furnace again, keep the temperature 2 hours at 300 DEG C, then further along perpendicular to
The direction of molten soup casting is rolled into a thickness of 0.6H1Second level roll ingot casting, rolling total deformation be 40%, no cracking.
Compared with embodiment 2-1, silver-colored titanium initial mass than close, ingot casting original depth is identical and total rolling reduction not
Become, difference is that hot-roll forming number is different, and annealing temperature is different.The latter's holding temperature is low and soaking time is long, wants to equipment
It asks low but to spend more time.
Above-described is only some embodiments of the present invention.For those of ordinary skill in the art, not
Under the premise of being detached from the invention design, various modifications and improvements can be made, these belong to protection model of the invention
It encloses.
Claims (5)
1. a kind of silver titanium alloy target crack resistence rolling mill practice, it is characterised in that: silver and titanium are carried out casting ingot casting, then passed through
Above hot-rolled process roll forming together；Wherein when first of hot rolling, annealing temperature is 200~800 DEG C, soaking time 1
~3 hours, rolling direction was 10~30% perpendicular to molten soup casting direction, rolling reduction；Afterwards when road hot rolling, annealing temperature is
200~800 DEG C, soaking time be 0.5~3 hour, rolling direction perpendicular to molten soup cast direction, rolling reduction be 10~
30%；The silver titanium alloy includes the silver of the titanium of 0.1~5wt%, 0.5wt% foreign metal below and surplus.
2. silver titanium alloy target crack resistence rolling mill practice according to claim 1, it is characterised in that: first of hot rolling
In, annealing temperature is 400~600 DEG C, and soaking time is 2~3 hours.
3. silver titanium alloy target crack resistence rolling mill practice according to claim 1, it is characterised in that: first of hot rolling
In, rolling reduction is 10~25%.
4. silver titanium alloy target crack resistence rolling mill practice according to claim 1, it is characterised in that: in rear road hot rolling, move back
Fiery temperature is 300~500 DEG C, and soaking time is 0.5~2 hour.
5. silver titanium alloy target crack resistence rolling mill practice according to claim 1, it is characterised in that: road hot rolling after described
In, rolling reduction is 20~30%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611243155.3A CN106893989B (en) | 2016-12-29 | 2016-12-29 | A kind of silver titanium alloy target crack resistence rolling mill practice |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611243155.3A CN106893989B (en) | 2016-12-29 | 2016-12-29 | A kind of silver titanium alloy target crack resistence rolling mill practice |
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| Publication Number | Publication Date |
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| CN106893989A CN106893989A (en) | 2017-06-27 |
| CN106893989B true CN106893989B (en) | 2019-10-01 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1480554A (en) * | 2002-09-03 | 2004-03-10 | 铼宝科技股份有限公司 | Alloy target material for conductive film and manufacturing method |
| CN101374611A (en) * | 2006-03-07 | 2009-02-25 | 卡伯特公司 | Methods of producing deformed metal articles |
| CN102307685A (en) * | 2009-02-09 | 2012-01-04 | 新日本制铁株式会社 | Titanium slab for hot rolling, and method of producing and method of rolling the same |
| CN102421931A (en) * | 2009-10-06 | 2012-04-18 | 三菱综合材料株式会社 | Silver alloy target for forming reflection electrode film for organic el element, and method for manufacturing the silver alloy target |
| CN103298970A (en) * | 2012-01-10 | 2013-09-11 | 三菱综合材料株式会社 | Silver-alloy sputtering target for conductive-film formation, and method for producing same |
| CN103572230A (en) * | 2013-11-05 | 2014-02-12 | 研创应用材料（赣州）有限公司 | Method for preparing novel conductive indium tin zinc oxide thin film |
| CN104995329A (en) * | 2013-03-11 | 2015-10-21 | 三菱综合材料株式会社 | Silver alloy sputtering target for forming electroconductive film, and method for manufacturing same |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2725328B1 (en) * | 1977-06-04 | 1978-07-06 | Duerrwaechter E Dr Doduco | Method for producing a solderable bimetal semi-finished product for contacts |
-
2016
- 2016-12-29 CN CN201611243155.3A patent/CN106893989B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1480554A (en) * | 2002-09-03 | 2004-03-10 | 铼宝科技股份有限公司 | Alloy target material for conductive film and manufacturing method |
| CN101374611A (en) * | 2006-03-07 | 2009-02-25 | 卡伯特公司 | Methods of producing deformed metal articles |
| CN102307685A (en) * | 2009-02-09 | 2012-01-04 | 新日本制铁株式会社 | Titanium slab for hot rolling, and method of producing and method of rolling the same |
| CN102421931A (en) * | 2009-10-06 | 2012-04-18 | 三菱综合材料株式会社 | Silver alloy target for forming reflection electrode film for organic el element, and method for manufacturing the silver alloy target |
| CN103298970A (en) * | 2012-01-10 | 2013-09-11 | 三菱综合材料株式会社 | Silver-alloy sputtering target for conductive-film formation, and method for producing same |
| CN104995329A (en) * | 2013-03-11 | 2015-10-21 | 三菱综合材料株式会社 | Silver alloy sputtering target for forming electroconductive film, and method for manufacturing same |
| CN103572230A (en) * | 2013-11-05 | 2014-02-12 | 研创应用材料（赣州）有限公司 | Method for preparing novel conductive indium tin zinc oxide thin film |
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Address after: 215300 No. 135 CHENFENG East Road, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee after: Guangyang new material technology (Kunshan) Co.,Ltd. Address before: 215300 south of CHENFENG Road, Wusongjiang Industrial Park, Yushan Town, Kunshan City, Suzhou City, Jiangsu Province Patentee before: KUNSHAN MULTIRESOURCE TECHNOLOGY Inc. |