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CN106884136B - A kind of metal material surface nitriding deposition wear-resisting modified layer preparation method of duplex anti-friction - Google Patents

A kind of metal material surface nitriding deposition wear-resisting modified layer preparation method of duplex anti-friction Download PDF

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CN106884136B
CN106884136B CN201710030980.3A CN201710030980A CN106884136B CN 106884136 B CN106884136 B CN 106884136B CN 201710030980 A CN201710030980 A CN 201710030980A CN 106884136 B CN106884136 B CN 106884136B
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nitriding
furnace
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CN106884136A (en
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何永勇
李杨
王伟
赵军
胡宝国
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Tsinghua University
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • C23C8/38Treatment of ferrous surfaces

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Abstract

The invention discloses a kind of preparation methods of metal material surface nitriding deposition wear-resisting modified layer of duplex anti-friction, belong to technical field of metal material surface treatment.After metal material workpiece surface is polished, is polished, is cleaned, it is placed on the anode potential platform in the nitriding furnace of hollow cathode discharge ion source, 10-15Pa is evacuated down in furnace, it is filled with ammonia and maintains operating air pressure 100-500Pa, 8h is nitrogenized in 440-520 DEG C of heat preservation, the nitriding deposition wear-resisting modified layer of duplex anti-friction is obtained after cooling.Sample is in anode potential, is not necessarily to ion bombardment, and nitrogen-atoms can also penetrate into austenitic matrix and form nitriding strengthening layer, effectively prevents edge effect problem, the hardness of whole surface is uniform;For metal works after anode nitriding, surface forms nitriding sedimentary, and properties of antifriction and wear resistance is obviously improved.

Description

一种金属材料表面渗氮沉积复合减摩耐磨改性层制备方法A method for preparing a composite anti-friction and wear-resisting modified layer by nitriding deposition on the surface of a metal material

技术领域technical field

本发明属于金属材料表面处理技术领域,具体涉及一种金属材料表面渗氮沉积复合减摩耐磨改性层制备方法。The invention belongs to the technical field of metal material surface treatment, and in particular relates to a preparation method of a metal material surface nitriding deposition compound anti-friction and wear-resisting modified layer.

背景技术Background technique

奥氏体不锈钢由于表面存在致密的钝化膜层,在氧化性介质具有优异的耐腐蚀性能。但是由于其表面硬度低和耐磨性差,导致在实际应用中,因磨损严重而失效。氮化作为改善奥氏体不锈钢表面硬度和耐磨性的重要工程技术得到广泛应用。低温离子渗氮技术处理AISI 316奥氏体不锈钢,氮化物析出被完全抑制,获得了单一相的渗氮层。XRD表明原始奥氏体基体衍射峰向低角度偏移,形成新的较宽的衍射峰。在ASTM卡片中无法找到该相,故把此新相称之为S相。S相的发现使得在提高不锈钢硬度和耐磨性能的同时,不降低其原有的耐蚀性成为可能。Due to the dense passivation film on the surface, austenitic stainless steel has excellent corrosion resistance in oxidizing media. However, due to its low surface hardness and poor wear resistance, it will fail due to severe wear in practical applications. Nitriding is widely used as an important engineering technology to improve the surface hardness and wear resistance of austenitic stainless steel. AISI 316 austenitic stainless steel is treated with low-temperature ion nitriding technology, the precipitation of nitrides is completely suppressed, and a single-phase nitrided layer is obtained. XRD shows that the diffraction peaks of the original austenite matrix shift to lower angles, forming new and wider diffraction peaks. This phase cannot be found in the ASTM card, so this new phase is called S phase. The discovery of S phase makes it possible to improve the hardness and wear resistance of stainless steel without reducing its original corrosion resistance.

在常规直流离子渗氮(DCPN)过程中,离子轰击可以消除表面钝化层,无需去钝处理。但因工件几何形状导致其电场分布差异,导致离子轰击程度不同,进而造成工件表面温度的不均匀性,最后存在工件表面传热传质的差异。AISI316L不锈钢在DCPN渗氮过程造成的“边缘效应”问题,圆环区域硬度明显高于中心区域,但耐腐蚀性能较差,显微组织结构表明圆环处的为Cr2N相,而中心区域为S相。In the conventional direct current ion nitriding (DCPN) process, ion bombardment can eliminate the surface passivation layer without depassivation treatment. However, due to the difference in electric field distribution due to the geometric shape of the workpiece, the degree of ion bombardment is different, which in turn causes the inhomogeneity of the surface temperature of the workpiece, and finally there is a difference in heat and mass transfer on the surface of the workpiece. AISI316L stainless steel has the problem of "edge effect" caused by the DCPN nitriding process. The hardness of the ring area is significantly higher than that of the center area, but the corrosion resistance is poor. The microstructure shows that the ring area is Cr2N phase, while the center area is S Mutually.

为克服DCPN技术中的缺点,活性屏离子渗氮技术(ASPN)被发明出来。在ASPN渗氮过程中,工件处于悬浮状态,离子不再轰击工件表面,所以DCPN中的表面打弧、边缘效应等问题就迎刃而解。ASPN技术具有设备简单和操作方便等优势,成为离子渗氮研究领域的热点。In order to overcome the shortcomings of DCPN technology, active screen ion nitriding technology (ASPN) was invented. In the nitriding process of ASPN, the workpiece is in a suspended state, and the ions no longer bombard the surface of the workpiece, so the problems of surface arcing and edge effects in DCPN are easily solved. ASPN technology has the advantages of simple equipment and convenient operation, and has become a hot spot in the field of ion nitriding research.

发明内容Contents of the invention

本发明针对常规直流离子渗氮技术的不足,提供了一种金属材料表面渗氮沉积复合减摩耐磨改性层制备方法,其特征在于,包括以下步骤:Aiming at the deficiencies of the conventional DC ion nitriding technology, the present invention provides a method for preparing a composite anti-friction and wear-resisting modified layer of nitriding deposition on the surface of metal materials, which is characterized in that it includes the following steps:

(1)将金属材料工件表面磨平、抛光,用酒精清洗后,放置于空心阴极放电离子源渗氮炉内的阳极电位台上;(1) Grinding and polishing the surface of the metal material workpiece, after cleaning with alcohol, place it on the anode potential platform in the hollow cathode discharge ion source nitriding furnace;

(2)启动抽真空系统对渗氮炉抽真空,当炉内真空度达到10-15Pa时,向真空炉内充入净化过的氨气,使氨气均匀分布在整个渗氮炉内,调节氨气的流量,使炉内的压强保持100-500Pa;(2) Start the vacuum system to evacuate the nitriding furnace. When the vacuum in the furnace reaches 10-15Pa, fill the vacuum furnace with purified ammonia gas, so that the ammonia gas is evenly distributed in the entire nitriding furnace, and adjust The flow rate of ammonia gas keeps the pressure in the furnace at 100-500Pa;

(3)打开供电系统的电源,炉内的氨气在高压电场的作用下发生电离形成NHj +、N+和H+等离子体,到达所渗氮温度后,开始计算保温时间;(3) Turn on the power supply of the power supply system, and the ammonia gas in the furnace is ionized under the action of a high-voltage electric field to form NH j + , N + and H + plasmas. After reaching the nitriding temperature, start to calculate the holding time;

(4)保温结束后,切断电源,维持低压,使工件在氨气气氛中随炉冷却,待温度降到200℃以下出炉,得到渗氮沉积复合减摩耐磨改性层。(4) After the heat preservation is over, cut off the power supply and maintain the low pressure, let the workpiece cool with the furnace in an ammonia atmosphere, and leave the furnace when the temperature drops below 200°C to obtain a nitriding-deposited composite anti-friction and wear-resistant modified layer.

步骤(1)所述金属材料为AISI304奥氏体不锈钢,其组成为:C 0.05wt%;Si0.80wt%;Mn 1.50wt%;Cr 17.5wt%;Ni 9.50wt%;Mo 0.013wt%;T i 0.011wt%;余量为Fe。The metal material in step (1) is AISI304 austenitic stainless steel, which consists of: C 0.05wt%; Si0.80wt%; Mn 1.50wt%; Cr 17.5wt%; Ni 9.50wt%; i 0.011wt%; the balance is Fe.

步骤(1)所述空心阴极放电离子源渗氮炉采用脉冲电源,炉壁作为阳极,空心不锈钢管阵作为放电阴极,其中,空心不锈钢管直径为8~10mm。In step (1), the hollow cathode discharge ion source nitriding furnace adopts a pulse power supply, the furnace wall is used as the anode, and the hollow stainless steel tube array is used as the discharge cathode, wherein the diameter of the hollow stainless steel tube is 8-10 mm.

步骤(3)所述渗氮温度440-520℃,保温时间8h。The nitriding temperature in step (3) is 440-520° C., and the holding time is 8 hours.

步骤(4)所述渗氮沉积复合减摩耐磨改性层的厚度为6-16μm。The thickness of the nitriding-deposited composite friction-reducing and wear-resisting modified layer in step (4) is 6-16 μm.

在进行空心阴极离子源渗氮的过程中,金属表面的渗氮层的形成原因是反应空心阴极管溅射。在反应真空炉内,稀薄含氮气体在空心阴极管和阳极之间的直流电压下形成NHj +、N+和H+等离子体,这些正离子在空心阴极管电压降的加速作用下轰击空心阴极管工件表面。轰击产生的能量的作用是加热空心阴极管、促使工件表面产生二次电子发射、产生空心阴极管溅射从工件表面打出碳、氮、氧、铁等原子。溅射出的Fe原子能与工件表面(空心阴极管)附近的活性N原子结合形成FeN,在背散射作用下再沉积回空心阴极管表面。FeN在离子轰击以及热激活的作用下会发生如下分解:FeN→Fe2N→Fe3N→Fe4N,分解出的N原子中的一大部分会扩散渗入工件表面,另外一部分N原子则返回等离子区,并继续与溅射出的Fe原子结合。工件放置于阳极电位台,氮化表面由大量边界明晰的颗粒组成,其颗粒大小在纳米级别,这些氮化物颗粒来源于对空心阴极管的溅射。During the nitriding process of the hollow cathode ion source, the reason for the formation of the nitriding layer on the metal surface is the sputtering of the reactive hollow cathode tube. In the reaction vacuum furnace, the dilute nitrogen-containing gas forms NH j + , N + and H + plasma under the DC voltage between the hollow cathode tube and the anode, and these positive ions bombard the hollow under the acceleration of the voltage drop of the hollow cathode tube The surface of the cathode tube workpiece. The function of the energy generated by the bombardment is to heat the hollow cathode tube, promote the emission of secondary electrons on the surface of the workpiece, and generate the sputtering of the hollow cathode tube to eject carbon, nitrogen, oxygen, iron and other atoms from the surface of the workpiece. The sputtered Fe atoms can combine with the active N atoms near the workpiece surface (hollow cathode tube) to form FeN, and then deposit back to the surface of the hollow cathode tube under the action of backscattering. Under the action of ion bombardment and thermal activation, FeN will decompose as follows: FeN→Fe 2 N→Fe 3 N→Fe 4 N, a large part of the decomposed N atoms will diffuse into the surface of the workpiece, and the other part of N atoms will be Return to the plasma region and continue to combine with the sputtered Fe atoms. The workpiece is placed on the anode potential stand, and the nitrided surface is composed of a large number of well-defined grains, the grain size of which is at the nanometer level, and these nitride grains originate from the sputtering of the hollow cathode tube.

本发明的优点是:(1)试样处于阳极电位,无需离子轰击,氮原子也可渗入奥氏体基体形成渗氮强化层,有效避免了边缘效应问题,整个表面的硬度是均匀的;(2)奥氏体不锈钢经阳极渗氮后,表面形成了渗氮沉积层,减摩耐磨性能明显提升,磨损机制从基体的严重粘着机制转变为轻微的氧化和磨粒磨损机制。The advantages of the present invention are: (1) the sample is at the anode potential, without ion bombardment, nitrogen atoms can also penetrate into the austenite matrix to form a nitrided strengthening layer, effectively avoiding the edge effect problem, and the hardness of the entire surface is uniform; ( 2) After austenitic stainless steel is anodized and nitrided, a nitriding deposit layer is formed on the surface, and the anti-friction and wear resistance properties are significantly improved, and the wear mechanism changes from a severe adhesion mechanism of the substrate to a slight oxidation and abrasive wear mechanism.

附图说明Description of drawings

图1不同温度下渗氮层断面的SEM形貌图;Figure 1 SEM topography of the section of the nitrided layer at different temperatures;

图2是AISI304奥氏体不锈钢基体和不同温度氮化试样表面的XRD图谱;Fig. 2 is the XRD patterns of AISI304 austenitic stainless steel matrix and the surface of nitriding samples at different temperatures;

图3是渗氮沉积复合减摩耐磨改性层的表面SEM图;Fig. 3 is the surface SEM image of the nitrided deposition composite anti-friction and wear-resisting modified layer;

图4是AISI304奥氏体不锈钢基体与不同温度渗氮样品的显微硬度对比图;Figure 4 is a comparison of microhardness between AISI304 austenitic stainless steel substrate and nitriding samples at different temperatures;

图5是AISI304奥氏体不锈钢基体和不同氮化温度试样的摩擦系数-滑动时间曲线;Fig. 5 is the friction coefficient-sliding time curve of AISI304 austenitic stainless steel substrate and samples with different nitriding temperatures;

图6是AISI304奥氏体不锈钢基体与不同温度氮化试样磨痕的三维形貌图;Figure 6 is a three-dimensional morphology diagram of the wear marks of AISI304 austenitic stainless steel substrate and nitrided samples at different temperatures;

图7是AISI304奥氏体不锈钢基体与不同温度氮化试样磨痕的SEM形貌。Figure 7 is the SEM morphology of the AISI304 austenitic stainless steel substrate and the wear marks of the nitriding samples at different temperatures.

具体实施方式Detailed ways

本发明提供了一种金属材料表面渗氮沉积复合减摩耐磨改性层制备方法,下面结合实施例对本发明作进一步说明,但并非对本发明的限制。The present invention provides a method for preparing a composite friction-reducing and wear-resisting modified layer of nitriding deposition on the surface of a metal material. The present invention will be further described below in conjunction with the examples, but the present invention is not limited thereto.

实施例1Example 1

AISI304奥氏体不锈钢,其成分为(wt.%):0.05C;0.80Si;1.50Mn;17.5Cr;9.50Ni;0.013Mo;0.011Ti;Fe余量。用SiC砂纸从粗到细将试样表面磨平,然后进行抛光。用酒精清洗后,放置于渗氮炉内的阳极电位台上。AISI304 austenitic stainless steel, its composition is (wt.%): 0.05C; 0.80Si; 1.50Mn; 17.5Cr; 9.50Ni; 0.013Mo; The surface of the sample was smoothed from coarse to fine with SiC sandpaper, and then polished. After cleaning with alcohol, place it on the anode potential platform in the nitriding furnace.

炉内抽真空到15Pa,充入氨气并维持工作气压500Pa左右,氮化温度为440℃,保温氮化处理8h,并在氨气气氛下冷却到200℃以下出炉,得到渗氮沉积复合减摩耐磨改性层,用扫描电镜观察断面形貌如图1(a)所示,在AISI304奥氏体不锈钢表面制备了厚度均匀(约6μm)的氮化层,具有良好的耐腐蚀性。The furnace is evacuated to 15Pa, filled with ammonia gas and maintained at a working pressure of about 500Pa, the nitriding temperature is 440°C, the heat preservation nitriding treatment is carried out for 8 hours, and the furnace is cooled to below 200°C in an ammonia atmosphere to obtain a composite reduced nitriding deposition. The wear-resistant modified layer was observed by scanning electron microscope as shown in Figure 1(a). A nitrided layer with uniform thickness (about 6 μm) was prepared on the surface of AISI304 austenitic stainless steel, which has good corrosion resistance.

实施例2Example 2

AISI304奥氏体不锈钢,其成分为(wt.%):0.05C;0.80Si;1.50Mn;17.5Cr;9.50Ni;0.013Mo;0.011Ti;Fe余量。用SiC砂纸从粗到细将试样表面磨平,然后进行抛光。用酒精清洗后,放置于渗氮炉内的阳极电位台上。AISI304 austenitic stainless steel, its composition is (wt.%): 0.05C; 0.80Si; 1.50Mn; 17.5Cr; 9.50Ni; 0.013Mo; The surface of the sample was smoothed from coarse to fine with SiC sandpaper, and then polished. After cleaning with alcohol, place it on the anode potential platform in the nitriding furnace.

炉内抽真空到15Pa,充入氨气并维持工作气压500Pa左右,氮化温度为480℃,保温氮化处理8h,并在氨气气氛下冷却到200℃以下出炉,得到渗氮沉积复合减摩耐磨改性层,用扫描电镜观察断面形貌如图1(b)所示,在AISI304奥氏体不锈钢表面氮化层增厚但伴有黑色物相析出。The furnace is evacuated to 15Pa, filled with ammonia gas and maintained at a working pressure of about 500Pa, the nitriding temperature is 480°C, the heat preservation nitriding treatment is carried out for 8 hours, and the furnace is cooled to below 200°C in an ammonia atmosphere to obtain a composite reduced nitriding deposition. Wear-resistant modified layer, the cross-sectional morphology observed by scanning electron microscope is shown in Figure 1(b), the nitride layer on the surface of AISI304 austenitic stainless steel is thickened but accompanied by the precipitation of black phase.

实施例3Example 3

AISI304奥氏体不锈钢,其成分为(wt.%):0.05C;0.80Si;1.50Mn;17.5Cr;9.50Ni;0.013Mo;0.011Ti;Fe余量。用SiC砂纸从粗到细将试样表面磨平,然后进行抛光。用酒精清洗后,放置于渗氮炉内的阳极电位台上。AISI304 austenitic stainless steel, its composition is (wt.%): 0.05C; 0.80Si; 1.50Mn; 17.5Cr; 9.50Ni; 0.013Mo; The surface of the sample was smoothed from coarse to fine with SiC sandpaper, and then polished. After cleaning with alcohol, place it on the anode potential platform in the nitriding furnace.

炉内抽真空到15Pa,充入氨气并维持工作气压500Pa左右,氮化温度为520℃,保温氮化处理8h,并在氨气气氛下冷却到200℃以下出炉,得到渗氮沉积复合减摩耐磨改性层,用扫描电镜观察断面形貌如图1(c)所示,在AISI304奥氏体不锈钢表面氮化层的厚度达到16μm,同时黑色点状物相析出比例不断扩大。The furnace is evacuated to 15Pa, filled with ammonia gas and maintained at a working pressure of about 500Pa, the nitriding temperature is 520°C, the heat preservation nitriding treatment is carried out for 8 hours, and the furnace is cooled to below 200°C in an ammonia atmosphere to obtain the nitriding deposition composite reduction. The wear-resistant modified layer was observed by scanning electron microscope as shown in Figure 1(c). The thickness of the nitrided layer on the surface of AISI304 austenitic stainless steel reached 16 μm, and the proportion of black dot-like phase precipitation continued to expand.

在干摩擦条件下,采用UMT-3型摩擦磨损试验机考察基体与氮化层的摩擦磨损性能,摩擦副选用Ф4mm的GCr15球(HRC 60)。摩擦磨损试验条件为:法向载荷为5N,转速为300r/min,滑动时间为20min。采用白光干涉仪测量磨痕轮廓评价氮化层的抗磨损性能。Under dry friction conditions, UMT-3 friction and wear testing machine was used to investigate the friction and wear properties of the substrate and nitrided layer, and the friction pair was GCr15 ball (HRC 60) with Ф4mm. The friction and wear test conditions are: the normal load is 5N, the rotational speed is 300r/min, and the sliding time is 20min. The wear scar profile was measured by white light interferometer to evaluate the wear resistance of nitride layer.

图2是AISI304奥氏体不锈钢基体和不同温度氮化试样表面的XRD图谱,AISI304奥氏体不锈钢主要由奥氏体相γ(111)和γ(200)组成。经440℃渗氮处理的试样,在奥氏体γ(111)和γ(200)衍射峰的低角度方向都出现了新的较宽的衍射峰S(111)和S(200),其强度和位移也随着渗氮温度的变化而改变。S相是氮原子在奥氏体中的过饱和固溶状态,同时保持原有面心立方结构的膨胀奥氏体,随着温度升高到480℃,S(111)和S(200)相的衍射峰衍射峰向更低的角度偏移。在520℃氮化处理后,XRD图谱主要由是S相、CrN和马氏体α相为主,另有的少量γ′-Fe4N相,在高温下亚稳态的S相发生转变:S→CrN+α。Figure 2 is the XRD pattern of the AISI304 austenitic stainless steel substrate and the surface of the nitrided sample at different temperatures. The AISI304 austenitic stainless steel is mainly composed of austenite phases γ(111) and γ(200). For the sample treated with nitriding at 440°C, new broad diffraction peaks S(111) and S(200) appeared in the low-angle direction of the austenite γ(111) and γ(200) diffraction peaks, which Strength and displacement also change with nitriding temperature. The S phase is a supersaturated solid solution state of nitrogen atoms in austenite, while maintaining the original face-centered cubic structure of the expanded austenite, as the temperature rises to 480 ° C, the S(111) and S(200) phases The diffraction peaks are shifted to lower angles. After nitriding treatment at 520°C, the XRD pattern is mainly composed of S phase, CrN and martensite α phase, and a small amount of γ′-Fe 4 N phase, and the metastable S phase changes at high temperature: S→CrN+α.

空心阴极离子源渗氮沉积复合减摩耐磨改性层表面均匀统一,具有亮银色,这是因为空心阴极离子源渗扩沉积处理的试样,表面不发生离子轰击和溅射,图3是实施例3空心阴极离子源渗扩沉积氮化样品表面,可见表面有明显沉积层,由直径为100纳米作用的小颗粒所构成。Hollow cathode ion source nitriding deposition composite anti-friction and wear-resisting modified layer has a uniform surface and bright silver color. This is because the surface of the sample treated with hollow cathode ion source permeation diffusion deposition does not undergo ion bombardment and sputtering, as shown in Figure 3 Example 3 The surface of the hollow cathode ion source was diffused and deposited to nitride the surface of the sample. It can be seen that there is an obvious deposition layer on the surface, which is composed of small particles with a diameter of 100 nanometers.

图4是AISI304奥氏体不锈钢基体与不同温度渗氮样品的显微硬度对比图。奥氏体不锈钢试样处于阳极电位,不再遭受含氮正离子的轰击,因此避免了边缘效应问题,整个表面的硬度是均匀的。实施例1中样品的硬度值约为620HV0.1,是未处理基体硬度(220HV0.1)近3倍。实施例2中样品的表面硬度值增加到940HV0.1,明显高于实施例1,这是由于低温(440℃)获得的氮化层较薄,测量硬度值受到较软的奥氏体基体的影响,未能显示氮化层的本征硬度。实施例3中样品硬度值达到1150HV0.1Figure 4 is a comparison chart of microhardness between AISI304 austenitic stainless steel substrate and nitriding samples at different temperatures. The austenitic stainless steel sample is at anodic potential and is no longer bombarded by nitrogen-containing positive ions, thus avoiding the edge effect problem, and the hardness of the entire surface is uniform. The hardness value of the sample in Example 1 is about 620HV 0.1 , nearly three times that of the untreated substrate (220HV 0.1 ). The surface hardness value of the sample in Example 2 increased to 940HV 0.1 , significantly higher than that of Example 1. This is because the nitrided layer obtained at low temperature (440°C) is thinner, and the measured hardness value is affected by the softer austenite matrix , failed to show the intrinsic hardness of the nitride layer. The hardness value of the sample in Example 3 reaches 1150HV 0.1 .

图5是AISI304奥氏体不锈钢基体和不同氮化温度试样的摩擦系数-滑动时间曲线。原始奥氏体基体在滑动初期(前10s)摩擦系数迅速升高1.2,又迅速降低为0.6,滑动200s后的摩擦系数逐渐升高,并在后期稳定都在0.8~1.0范围内。在前200s,低温440℃氮化试样摩擦系数逐渐升高,然后稳定在0.75附近。但480℃和520℃氮化试样的摩擦系数变化情况又与原始奥氏体不锈钢类似,先升高后降低趋于平稳,两者在0.6-0.8范围内波动,但520℃氮化试样的摩擦系数更为剧烈。总体上,氮化样品的摩擦系数率是略低于原始奥氏体不锈钢。Fig. 5 is the friction coefficient-sliding time curve of AISI304 austenitic stainless steel substrate and samples with different nitriding temperatures. The friction coefficient of the original austenite matrix increases rapidly to 1.2 at the initial stage of sliding (the first 10s), and then rapidly decreases to 0.6. After 200s of sliding, the friction coefficient gradually increases, and stabilizes in the range of 0.8 to 1.0 in the later stage. In the first 200s, the friction coefficient of the low-temperature 440°C nitrided sample gradually increased, and then stabilized at around 0.75. However, the change of the friction coefficient of the 480°C and 520°C nitrided samples is similar to that of the original austenitic stainless steel, which first increases and then decreases and tends to be stable. The coefficient of friction is more severe. Overall, the coefficient of friction rate of the nitrided samples is slightly lower than that of the pristine austenitic stainless steels.

图6是采用白光干涉仪对AISI304奥氏体不锈钢基体与氮化试样磨痕进行三维形貌表征。图6a可以看出基体表面的磨痕宽度为800μm,深度约为10μm,有明显粘着现象;实施例1中样品的磨痕变窄为450μm(图6b),深度变浅仅为2μm,与SEM形貌相同表现出粘着;实施例2中样品的磨痕变窄变浅,但存在小的犁沟(图6c);实施例3中样品的磨痕较为平滑,磨损体积远小于未处理基体(图6d),渗氮沉积明显提高了奥氏体不锈钢的耐磨性。Figure 6 is a three-dimensional morphology characterization of AISI304 austenitic stainless steel substrate and nitrided sample wear marks using white light interferometer. It can be seen from Figure 6a that the wear scar on the surface of the substrate has a width of 800 μm and a depth of about 10 μm, showing obvious adhesion; the wear scar of the sample in Example 1 is narrowed to 450 μm (Figure 6b), and the depth is only 2 μm. The appearance is the same, showing adhesion; the wear scar of the sample in Example 2 becomes narrower and shallower, but there are small furrows (Figure 6c); the wear scar of the sample in Example 3 is relatively smooth, and the wear volume is much smaller than that of the untreated substrate ( Figure 6d), nitride deposition significantly improves the wear resistance of austenitic stainless steel.

图7是AISI304奥氏体不锈钢基体与不同温度氮化试样磨损的SEM形貌。未处理奥氏体基体的磨痕较宽,磨痕上存在大量的不均匀片状堆积物(图7a),表明发生严重的粘着;实施例1中样品的磨痕开始变窄,但仍旧有的粘着现象存在(图7b),实施例2中样品的磨痕轻微,基本上不存在粘着现象,但存在着磨粒痕迹(图7c)。实施例3中样品的磨痕比较光滑(图7d),无粘着倾向,磨损最为轻微。与基体相比,氮化样品表面磨损形貌发生很大的变化。Figure 7 is the SEM morphology of AISI304 austenitic stainless steel substrate and nitrided samples at different temperatures. The wear scars of the untreated austenitic matrix are wider, and there are a large number of uneven sheet-like deposits on the wear scars (Fig. 7a), indicating that severe adhesion has occurred; The adhesion phenomenon exists (Figure 7b), and the wear marks of the sample in Example 2 are slight, basically there is no adhesion phenomenon, but there are traces of abrasive grains (Figure 7c). The wear scar of the sample in Example 3 is relatively smooth (Fig. 7d), without sticking tendency, and the wear is the slightest. Compared with the substrate, the surface wear morphology of the nitrided sample changes greatly.

渗氮沉积可在AISI304奥氏体不锈钢表面制备高硬度的强化层,提高表面的耐磨性能,磨损机制以轻微的磨粒和氧化磨损为主。Nitriding deposition can prepare a high-hardness strengthening layer on the surface of AISI304 austenitic stainless steel to improve the wear resistance of the surface. The wear mechanism is mainly slightly abrasive and oxidative wear.

Claims (3)

1.一种金属材料表面渗氮沉积复合减摩耐磨改性层制备方法,其特征在于,包括以下步骤:1. A method for preparing a metal material surface nitriding deposition compound friction-reducing and wear-resisting modified layer, is characterized in that, comprises the following steps: (1)将金属材料工件表面磨平、抛光,用酒精清洗后,放置于空心阴极放电离子源渗氮炉内的阳极电位台上;(1) Grinding and polishing the surface of the metal material workpiece, after cleaning with alcohol, place it on the anode potential platform in the hollow cathode discharge ion source nitriding furnace; 所述金属材料为AISI304奥氏体不锈钢,其组成为:C 0.05wt%;Si 0.80wt%;Mn1.50wt%;Cr 17.5wt%;Ni 9.50wt%;Mo 0.013wt%;T i0.011wt%;余量为Fe;The metal material is AISI304 austenitic stainless steel, which is composed of: C 0.05wt%; Si 0.80wt%; Mn1.50wt%; Cr 17.5wt%; Ni 9.50wt%; Mo 0.013wt%; Ti0.011wt% ; The balance is Fe; 所述空心阴极放电离子源渗氮炉采用脉冲电源,炉壁作为阳极,空心不锈钢管阵作为放电阴极,其中,空心不锈钢管直径为8~10mm;The hollow cathode discharge ion source nitriding furnace adopts a pulse power supply, the furnace wall is used as an anode, and the hollow stainless steel tube array is used as a discharge cathode, wherein the diameter of the hollow stainless steel tube is 8 to 10 mm; (2)启动抽真空系统对渗氮炉抽真空,当炉内真空度达到10-15Pa时,向真空炉内充入净化过的氨气,使氨气均匀分布在整个渗氮炉内,调节氨气的流量,使炉内的压强保持100-500Pa;(2) Start the vacuum system to evacuate the nitriding furnace. When the vacuum in the furnace reaches 10-15Pa, fill the vacuum furnace with purified ammonia gas, so that the ammonia gas is evenly distributed in the entire nitriding furnace, and adjust The flow rate of ammonia gas keeps the pressure in the furnace at 100-500Pa; (3)打开供电系统的电源,炉内的氨气在高压电场的作用下发生电离形成NHj +、N+和H+等离子体,到达所述 渗氮温度后,开始计算保温时间;(3) Turn on the power supply of the power supply system, and the ammonia gas in the furnace is ionized under the action of a high-voltage electric field to form NH j + , N + and H + plasma, and after reaching the nitriding temperature, start to calculate the holding time; 所述渗氮温度440-520℃,保温时间8h;The nitriding temperature is 440-520°C, and the holding time is 8h; (4)保温结束后,切断电源,维持低压,使工件在氨气气氛中随炉冷却,待温度降到200℃以下出炉,得到渗氮沉积复合减摩耐磨改性层;(4) After the heat preservation is over, cut off the power supply, maintain low pressure, and cool the workpiece with the furnace in an ammonia gas atmosphere. After the temperature drops below 200°C, it is released from the furnace to obtain a nitrided deposition composite anti-friction and wear-resistant modified layer; 所述渗氮沉积复合减摩耐磨改性层的厚度为6-16μm;The thickness of the nitrided deposition composite anti-friction and wear-resisting modified layer is 6-16 μm; 经440℃渗氮处理的试样,在奥氏体γ(111)和γ(200)衍射峰的低角度方向都出现了新的较宽的衍射峰S(111)和S(200),随着温度升高到480℃,S(111)和S(200)相的衍射峰衍射峰向更低的角度偏移;在520℃氮化处理后,试样表面主要由是S相、CrN和马氏体α相为主,另有的少量γ′-Fe4N相。For the sample treated with nitriding at 440 °C, new and wider diffraction peaks S(111) and S(200) appeared in the low-angle direction of the austenite γ(111) and γ(200) diffraction peaks. As the temperature increased to 480°C, the diffraction peaks of S(111) and S(200) phases shifted to lower angles; after nitriding treatment at 520°C, the surface of the sample was mainly composed of S phase, CrN and The martensite α phase is the main one, and there is a small amount of γ′-Fe 4 N phase. 2.一种金属材料表面渗氮沉积复合减摩耐磨改性层制备方法,其特征在于,包括以下步骤:2. A method for preparing a metal material surface nitriding deposition compound friction-reducing and wear-resisting modified layer, characterized in that, comprising the following steps: (1)将金属材料工件表面磨平、抛光,用酒精清洗后,放置于空心阴极放电离子源渗氮炉内的阳极电位台上;(1) Grinding and polishing the surface of the metal material workpiece, after cleaning with alcohol, place it on the anode potential platform in the hollow cathode discharge ion source nitriding furnace; 所述金属材料为AISI304奥氏体不锈钢,其组成为:C 0.05wt%;Si 0.80wt%;Mn1.50wt%;Cr 17.5wt%;Ni 9.50wt%;Mo 0.013wt%;T i0.011wt%;余量为Fe;The metal material is AISI304 austenitic stainless steel, which is composed of: C 0.05wt%; Si 0.80wt%; Mn1.50wt%; Cr 17.5wt%; Ni 9.50wt%; Mo 0.013wt%; Ti0.011wt% ; The balance is Fe; 所述空心阴极放电离子源渗氮炉采用脉冲电源,炉壁作为阳极,空心不锈钢管阵作为放电阴极,其中,空心不锈钢管直径为8~10mm;The hollow cathode discharge ion source nitriding furnace adopts a pulse power supply, the furnace wall is used as an anode, and the hollow stainless steel tube array is used as a discharge cathode, wherein the diameter of the hollow stainless steel tube is 8 to 10 mm; (2)启动抽真空系统对渗氮炉抽真空,当炉内真空度达到10-15Pa时,向真空炉内充入净化过的氨气,使氨气均匀分布在整个渗氮炉内,调节氨气的流量,使炉内的压强保持100-500Pa;(2) Start the vacuum system to evacuate the nitriding furnace. When the vacuum in the furnace reaches 10-15Pa, fill the vacuum furnace with purified ammonia gas, so that the ammonia gas is evenly distributed in the entire nitriding furnace, and adjust The flow rate of ammonia gas keeps the pressure in the furnace at 100-500Pa; (3)打开供电系统的电源,炉内的氨气在高压电场的作用下发生电离形成NHj +、N+和H+等离子体,到达所渗氮温度后,开始计算保温时间;(3) Turn on the power supply of the power supply system, and the ammonia gas in the furnace is ionized under the action of a high-voltage electric field to form NH j + , N + and H + plasmas. After reaching the nitriding temperature, start to calculate the holding time; 所述渗氮温度520℃,保温时间8h;The nitriding temperature is 520°C, and the holding time is 8h; (4)保温结束后,切断电源,维持低压,使工件在氨气气氛中随炉冷却,待温度降到200℃以下出炉,得到渗氮沉积复合减摩耐磨改性层;(4) After the heat preservation is over, cut off the power supply, maintain low pressure, and cool the workpiece with the furnace in an ammonia gas atmosphere. After the temperature drops below 200°C, it is released from the furnace to obtain a nitrided deposition composite anti-friction and wear-resistant modified layer; 所述渗氮沉积复合减摩耐磨改性层的厚度为6-16μm;The thickness of the nitrided deposition composite anti-friction and wear-resisting modified layer is 6-16 μm; 在520℃氮化处理后,试样表面主要由是S相、CrN和马氏体α相为主,另有的少量γ′-Fe4N相。After nitriding treatment at 520°C, the surface of the sample is mainly composed of S phase, CrN and martensite α phase, and a small amount of γ′-Fe 4 N phase. 3.一种金属材料表面渗氮沉积复合减摩耐磨改性层制备方法,其特征在于,包括以下步骤:3. A method for preparing a composite anti-friction and wear-resisting modified layer of nitriding deposition on the surface of a metal material, characterized in that it comprises the following steps: (1)用SiC砂纸从粗到细将试样表面磨平,然后进行抛光;用酒精清洗后,放置于空心阴极放电离子源渗氮炉内的阳极电位台上;(1) Use SiC sandpaper to grind the surface of the sample from coarse to fine, and then polish it; after cleaning with alcohol, place it on the anode potential platform in the hollow cathode discharge ion source nitriding furnace; 所述试样为AISI304奥氏体不锈钢,其成分为:0.05wt.%C;0.80wt.%Si;1.50wt.%Mn;17.5wt.%Cr;9.50wt.%Ni;0.013wt.%Mo;0.011wt.%Ti;Fe余量;The sample is AISI304 austenitic stainless steel, its composition is: 0.05wt.%C; 0.80wt.%Si; 1.50wt.%Mn; 17.5wt.%Cr; 9.50wt.%Ni; 0.013wt.%Mo ; 0.011wt.% Ti; Fe balance; 步骤(1)所述空心阴极放电离子源渗氮炉采用脉冲电源,炉壁作为阳极,空心不锈钢管阵作为放电阴极,其中,空心不锈钢管直径为8~10mm;Step (1) The hollow cathode discharge ion source nitriding furnace adopts a pulse power supply, the furnace wall is used as the anode, and the hollow stainless steel tube array is used as the discharge cathode, wherein the diameter of the hollow stainless steel tube is 8 to 10 mm; (2)启动抽真空系统对渗氮炉抽真空,当炉内真空度达到15Pa时,向真空炉内充入净化过的氨气,使氨气均匀分布在整个渗氮炉内,调节氨气的流量,使炉内的压强保持500Pa左右;(2) Start the vacuum system to evacuate the nitriding furnace. When the vacuum in the furnace reaches 15Pa, fill the vacuum furnace with purified ammonia gas so that the ammonia gas is evenly distributed throughout the nitriding furnace and adjust the ammonia gas. The flow rate keeps the pressure in the furnace around 500Pa; (3)打开供电系统的电源,炉内的氨气在高压电场的作用下发生电离形成NHj +、N+和H+等离子体,到达所渗氮温度后,开始计算保温时间;(3) Turn on the power supply of the power supply system, and the ammonia gas in the furnace is ionized under the action of a high-voltage electric field to form NH j + , N + and H + plasmas. After reaching the nitriding temperature, start to calculate the holding time; 所述氮化温度为520℃,保温氮化处理8h;The nitriding temperature is 520°C, and the nitriding treatment is carried out for 8 hours; (4)保温结束后,切断电源,维持低压,使工件在氨气气氛中随炉冷却,待温度降到200℃以下出炉,得到渗氮沉积复合减摩耐磨改性层;(4) After the heat preservation is over, cut off the power supply, maintain low pressure, and cool the workpiece with the furnace in an ammonia gas atmosphere. After the temperature drops below 200°C, it is released from the furnace to obtain a nitrided deposition composite anti-friction and wear-resistant modified layer; 所述渗氮沉积复合减摩耐磨改性层主要由是S相、CrN和马氏体α相为主,另有的少量γ′-Fe4N相;The nitriding deposition compound anti-friction and wear-resistant modified layer is mainly composed of S phase, CrN and martensite α phase, and a small amount of γ′-Fe 4 N phase; 所述空心阴极放电离子源渗扩沉积氮化样品表面有明显沉积层,由直径为100纳米作用的小颗粒所构成。The surface of the hollow cathode discharge ion source permeation and deposition nitriding sample has an obvious deposition layer, which is composed of small particles with a diameter of 100 nanometers.
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