CN106841796B - The online unknown frequency microwave phase detector device of clamped beam indirect heating - Google Patents
The online unknown frequency microwave phase detector device of clamped beam indirect heating Download PDFInfo
- Publication number
- CN106841796B CN106841796B CN201710052696.6A CN201710052696A CN106841796B CN 106841796 B CN106841796 B CN 106841796B CN 201710052696 A CN201710052696 A CN 201710052696A CN 106841796 B CN106841796 B CN 106841796B
- Authority
- CN
- China
- Prior art keywords
- port
- microwave
- indirect heating
- clamped beam
- detector
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 49
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052681 coesite Inorganic materials 0.000 claims abstract description 7
- 229910052906 cristobalite Inorganic materials 0.000 claims abstract description 7
- 238000012545 processing Methods 0.000 claims abstract description 7
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 7
- 229910052682 stishovite Inorganic materials 0.000 claims abstract description 7
- 229910052905 tridymite Inorganic materials 0.000 claims abstract description 7
- 230000008878 coupling Effects 0.000 claims abstract description 6
- 238000010168 coupling process Methods 0.000 claims abstract description 6
- 238000005859 coupling reaction Methods 0.000 claims abstract description 6
- 239000004065 semiconductor Substances 0.000 claims description 11
- 238000004873 anchoring Methods 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 7
- 239000003990 capacitor Substances 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 238000001465 metallisation Methods 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims description 2
- 230000005678 Seebeck effect Effects 0.000 claims 1
- 239000004020 conductor Substances 0.000 claims 1
- 238000010276 construction Methods 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 description 14
- 238000001514 detection method Methods 0.000 description 10
- 239000010931 gold Substances 0.000 description 7
- 238000001259 photo etching Methods 0.000 description 7
- 238000005259 measurement Methods 0.000 description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 229920005591 polysilicon Polymers 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 3
- 239000003292 glue Substances 0.000 description 3
- 238000002955 isolation Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 238000005566 electron beam evaporation Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229960000935 dehydrated alcohol Drugs 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 238000002242 deionisation method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000012886 linear function Methods 0.000 description 1
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011536 re-plating Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R25/00—Arrangements for measuring phase angle between a voltage and a current or between voltages or currents
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R15/00—Details of measuring arrangements of the types provided for in groups G01R17/00 - G01R29/00, G01R33/00 - G01R33/26 or G01R35/00
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R21/00—Arrangements for measuring electric power or power factor
- G01R21/02—Arrangements for measuring electric power or power factor by thermal methods, e.g. calorimetric
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R23/00—Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
- G01R23/02—Arrangements for measuring frequency, e.g. pulse repetition rate; Arrangements for measuring period of current or voltage
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Measurement Of Resistance Or Impedance (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
The online unknown frequency microwave phase detector device of clamped beam indirect heating of the invention is made of six port clamped beam couplers, channel selection switch, microwave frequency detector, the cascade of microwave phase detector device；Six port clamped beam couplers are made of co-planar waveguide, dielectric layer, air layer and clamped beam；Co-planar waveguide is in SiO2On layer, the lower section of clamped beam is dielectric layer, and the co-planar waveguide length between two clamped beams is λ/4；First port is identical to third port, the 4th port and to the power degree of coupling of fifth port, the 6th port, measured signal is inputted through first port, junior's processing circuit is output to by second port, microwave phase detector device is output to by the 4th port and the 6th, channel selection switch is output to by third port and fifth port；7th port of channel selection switch and the 8th connects indirect heating type microwave power detector, and the 9th port and the tenth connect microwave frequency detector；Realize the 0-360 ° of phase on-line checking to unknown frequency signal.
Description
Technical field
The invention proposes the online unknown frequency microwave phase detector devices of clamped beam indirect heating, belong to microelectron-mechanical
The technical field of system.
Background technique
The parameters such as amplitude, power, the frequency of microwave signal are traditional measurement parameters.Microwave signal phase measurement not only with
Power measurement is related, and itself also occupies highly important status in microwave measurement.With the increase of frequency, signal
Wavelength is gradually approached with component sizes various in circuit, and voltage, electric current exist all in the form of wave in circuit, the phase of signal
Delay is so that not only the voltage at different location, electric current are different in synchronization amplitude in circuit, but also at same position
Voltage, electric current it is also different in different moments.It therefore is necessary in the phase that signal was grasped and controlled to microwave frequency band
, the phase of microwave signal is also just at an important measurement parameter.The present invention is based on a kind of realization of Si technological design
The online unknown frequency microwave phase detector device of the clamped beam indirect heating of online phase-detection.
Summary of the invention
Technical problem: the object of the present invention is to provide a kind of online unknown frequency microwave phase inspections of clamped beam indirect heating
Device is surveyed, fraction signal is coupled using six port clamped beam couplers and carries out frequency detecting and phase-detection, and major part is examined
Surveying signal can be input in next stage processing circuit, realize the 0-360 ° of phase on-line checking to unknown frequency signal, and have
There is the benefit of low-power consumption.
Technical solution: the online unknown frequency microwave phase detector device of clamped beam indirect heating of the invention is consolidated by six ports
Strutbeam coupler, channel selection switch, microwave frequency detector, microwave phase detector device composition；
The first port of six port clamped beam couplers is to third port, the 4th port and first port to the 5th end
Mouth, the power degree of coupling difference of the 6th port are identical, and measured signal is inputted through first port, is output to junior by second port
Circuit is managed, the first Wilkinson power combiner and the of microwave phase detector device is output to by the 4th port and the 6th port
Two Wilkinson power combiners, and it is defeated by the first Wilkinson power combiner and the 2nd Wilkinson power combiner
Third indirect heating type microwave power detector and the 4th indirect heating type microwave power detector are arrived out；By third port and
Five ports are output to channel selection switch；7th port of channel selection switch and the 8th port connect the first indirect heating type respectively
Microwave power detector and the second indirect heating type microwave power detector, the 9th port of channel selection switch and the tenth port
The 3rd Wilkinson power combiner of microwave frequency detector is connect, and is output to by the 3rd Wilkinson power combiner
Five indirect heating type microwave power detectors realize the phase on-line checking to unknown frequency signal.
Wherein the structure of six port clamped beam couplers is symmetrical set with its center line, by co-planar waveguide, dielectric layer,
Air layer and across clamped beam above it constitute；Co-planar waveguide is produced on SiO2On layer, anchoring area is produced on co-planar waveguide, Gu
The lower section metallization medium layer of strutbeam, and coupled capacitor structure, being total between two clamped beams are collectively formed with air layer, clamped beam
Face waveguide length is λ/4；
The utility model has the advantages that
1) the online unknown frequency microwave phase detector device of clamped beam indirect heating of the invention by the phase of microwave signal,
Frequency is surveyed module and is integrated together, and fraction signal is coupled using six port clamped beam couplers and carries out frequency detecting and phase
Detection, and most of signal can be input in next stage processing circuit, realization exists to 0-360 ° of phase of unknown frequency signal
Line detection.
2) the online unknown frequency microwave phase detector device application indirect heating of clamped beam indirect heating of the invention declines
Wave power sensor detects the power of microwave signal, has preferable microwave property and without DC power；
3) two Wilkinson power combiners of microwave phase detector module application in the present invention, a Wilkinson
Power divider and two indirect heating type microwave power detectors realize 0-360 ° of phase-detection.
Detailed description of the invention
Fig. 1 is the functional block diagram of the online unknown frequency microwave phase detector device of clamped beam indirect heating of the present invention,
Fig. 2 is the top view of six port clamped beam couplers,
Fig. 3 is AA ' the directional profile figure of six port clamped beam coupler of Fig. 2,
Fig. 4 is the top view of channel selection switch,
Fig. 5 is AA ' the directional profile figure of Fig. 4 channel selection switch,
Fig. 6 is the top view of Wilkinson power divider/synthesizer,
Fig. 7 is the top view of indirect heating type microwave power detector,
Fig. 8 is AA ' the directional profile figure of Fig. 7 indirect heating type microwave power detector.
It include: six port clamped beam couplers 1, channel selection switch 2, microwave frequency detector 3, microwave phase inspection in figure
Survey device 4, the first indirect heating type microwave power detector 5-1, the second indirect heating type microwave power detector 5-2, between third
Connect heated microwave power sensor 5-3, the 4th indirect heating type microwave power detector 5-4, the 5th indirect heating type micro-wave
Power sensor 5-5, the first Wilkinson power combiner 6-1, the 2nd Wilkinson power combiner 6-2, third
Wilkinson power combiner 6-3, Wilkinson power divider 7, Si substrate 8, SiO2Layer 9, co-planar waveguide 10, anchoring area
11, dielectric layer 12, clamped beam 13, cantilever beam 14, air layer 15, air bridges 16, asymmetrical coplanar stripline 17, isolation resistance 18,
Terminal resistance 19, P-type semiconductor arm 20, N-type semiconductor arm 21, output electrode 22, hot end 23, cold end 24, substrate film structure
25, pull-down electrode 26, first port 1-1, second port 1-2, third port 1-3, the 4th port 1-4, fifth port 1-5, the
Six port 1-6, the 7th port 2-1, the 8th port 2-2, the 9th port 2-3, the tenth port 2-4, the tenth Single port 7-1, the tenth
Two-port netwerk 7-2, the 13rd port 7-3.
Specific embodiment
The online unknown frequency microwave phase detector device of clamped beam indirect heating of the present invention is by six port clamped beam couplers
1, channel selection switch 2, microwave frequency detector 3, the cascade composition of microwave phase detector device 4；Wherein, six port clamped beams couple
Device 1 is made of co-planar waveguide 10, dielectric layer 12, air layer 15 and clamped beam 13；Co-planar waveguide 10 is produced on SiO2On layer 9, Gu
The anchoring area 11 of strutbeam 13 is produced on co-planar waveguide 10, and the lower section of clamped beam 13 is deposited with dielectric layer 12, and with air layer 15, solid
Strutbeam 13 collectively forms coupled capacitor structure, and 10 length of co-planar waveguide between two clamped beams 13 is λ/4；Channel selection switch
2 are made of co-planar waveguide 10, anchoring area 11, dielectric layer 12, cantilever beam 14, pull-down electrode 26；The anchoring area 11 of cantilever beam 14 is produced on
On co-planar waveguide 10, pull-down electrode 26 is made below cantilever beam 14, and collectively form out with 26 upper dielectric layer 12 of pull-down electrode
Close structure；Microwave frequency detector 3 is passed by the 3rd Wilkinson power combiner 6-3 and the 5th indirect heating type microwave power
Sensor 5-5 cascade is constituted；Microwave phase detector device 4 is by third indirect heating type microwave power detector 5-3, the 4th indirect heating
Type micro-wave power sensor 5-4, the first Wilkinson power combiner 6-1, the 2nd Wilkinson power combiner 6-2,
Wilkinson power divider 7 is constituted；First Wilkinson power combiner 6-1, the 2nd Wilkinson power combiner 6-
2 is identical with the topological structure of Wilkinson power divider 7, by co-planar waveguide 10, asymmetrical coplanar stripline 17 and air bridges
15, isolation resistance 18 is constituted, and signal is Wilkinson power divider 7 from the input of port 11, and signal is inputted from port 12,13
For the first Wilkinson power combiner 6-1 or the 2nd Wilkinson power combiner 6-2；
First port 1-1 to third port 1-3, the 4th port 1-4 and the first port 1- of six port clamped beam couplers 1
1 to fifth port 1-5, the power degree of coupling difference of the 6th port 1-6 is identical；Measured signal is through six port clamped beam couplers 1
First port 1-1 input, junior's processing circuit is output to by second port 1-2, by the 4th port 1-4 and the 6th port 1-6
It is output to microwave phase detector device 4, channel selection switch 2 is output to by third port 1-3 and fifth port 1-5；Channel selecting
7th port 2-1 of switch 2 and the 8th port 1-2 is connect respectively between the first indirect heating type microwave power detector 5-1 and second
Heated microwave power sensor 5-2 is met, the third port 3 of channel selection switch 2 and the 4th port 4 connect microwave frequency detector
3, the phase-detection to unknown frequency signal is realized, and the signal after detection can be used for other processing circuits.It adds indirectly
The testing principle of hot type microwave power detector and microwave phase, frequency can be explained as follows:
Indirect heating type microwave power detector: microwave power as shown in Figure 7 is inputted from input port, passes through co-planar waveguide
10, which are input to terminal resistance 19, is converted to heat；P-type semiconductor arm 20 and N-type semiconductor arm 21 constitute thermocouple, thermocouple
Close to 19 region of terminal resistance as hot end 23, thermocouple is close to 22 region of output electrode as cold end 24；It is imitated according to Seebeck
It answers, inputs microwave power size known to the thermoelectrical potential of output electrode 22 by measuring；23 back of hot end of thermocouple subtracts substrate
Thin composition substrate film structure 25 is to improve detection sensitivity.
Frequency detecting: third port 1-3 and fiveth end of the microwave signal as shown in Figure 1 through six port clamped beam couplers 1
Mouth 1-5 is output to channel selection switch 2；7th port 2-1 of channel selection switch 2 and the 8th port 2-2 connects first and adds indirectly
Hot type microwave power detector 5-1 and the second indirect heating type microwave power detector 5-2, the 9th end of channel selection switch 2
Mouth 2-3 and the tenth port 2-4 connects microwave frequency detector 3；The cantilever beam 14 of channel selection switch 2 is grounded, and pull-down electrode 26 connects
Driving voltage, when driving voltage is more than or equal to cut-in voltage, cantilever beam 14 is pulled down into, and channel is strobed；When channel selecting is opened
When the 7th port 2-1 and the 8th port 2-2 of pass 2 are strobed, the output coupling of six port clamped beam couplers 1 can be tested out
Power P3And P5.10 length of co-planar waveguide between two clamped beams 13 of six port clamped beam couplers 1 is λ/4, at this time third
The phase difference of port 1-3 and fifth port 1-5 are 90 °, and the phase difference as shown in formula (1) is the linear function of frequency.
λ is the wavelength for inputting microwave signal, and c is the light velocity, εerIt is only related with structure for effective dielectric constant.Work as channel selecting
When the port 9 and port 10 of switch 2 are strobed, two way microwave signals carry out function by the 3rd Wilkinson power combiner 6-3
Rate synthesis, and the 5th indirect heating type microwave power detector 5-5 of application detects composite signal power PsSize, according to formula
(2) frequency of input microwave signal can be obtained.
P3, P5It, can be by indirect heating type microwave power detector for the power that third port 1-3 is coupled with fifth port 1-5
5 detections obtain.
Phase detectors: fourth port 1-4 and sixth of the microwave signal as shown in Figure 1 through six port clamped beam couplers 1
Port 1-6 is input to microwave phase detector device 4 and carries out phase-detection；Two clamped beams 13 of six port clamped beam couplers 1 it
Between 10 length of co-planar waveguide be λ/4, at this time by the two way microwave signals phase difference of the 4th port 1-4 and the 6th port 1-6
It is 90 °；Input power Pr, the reference signal of f (microwave frequency detector 3 measures) identical as measured signal frequency, reference signal
It is divided into two-way power and the identical signal of phase through Wilkinson power divider 7, with the 4th port 1-4 and the 6th port 1-6
Two-way measured signal carry out function through the first Wilkinson power combiner 6-1 and the 2nd Wilkinson power combiner 6-2
Rate synthesis；Third indirect heating type microwave power detector 5-3 and the 4th indirect heating type microwave power detector 5-4 is to left and right
Power P after two-way synthesiscs1, Pcs2It is detected, and obtains the phase difference to be measured between reference signal by formula (3)
P4, P6For the power that the 4th port 1-4 is coupled with the 6th port 1-6, and P4=P3, P6=P5。
The preparation method of the online unknown frequency microwave phase detector device of clamped beam indirect heating including the following steps:
1) prepare 4 inches of high resistant Si substrates 8, resistivity is 4000 Ω cm, with a thickness of 400mm；
2) thermally grown a layer thickness is the SiO2 layer 9 of 1.2mm；
3) chemical vapor deposition (CVD) grows one layer of polysilicon, with a thickness of 0.4mm；
4) one layer photoresist of coating and photoetching, in addition to polysilicon resistance region, other regions are photo-etched glue protection, and infuse
Enter phosphorus (P) ion, doping concentration 1015cm-2 forms isolation resistance 18 and terminal resistance 19；
5) layer photoresist is coated, carries out photoetching with P+ photolithography plate, in addition to 20 region of P-type semiconductor arm, other regions
It is photo-etched glue protection, is then poured into boron (B) ion, doping concentration 1016cm-2 forms the P-type semiconductor arm 20 of thermocouple；
6) layer photoresist is coated, carries out photoetching with N+ photolithography plate, in addition to 21 region of N-type semiconductor arm, other regions
It is photo-etched glue protection, is then poured into phosphorus (P) ion, doping concentration 1016cm-2 forms the N-type semiconductor arm 21 of thermocouple；
7) layer photoresist, photoetching thermoelectric pile and polysilicon resistance figure are coated, then thermocouple is formed by dry etching
Arm and polysilicon resistance；
8) layer photoresist is coated, photoetching removes co-planar waveguide 10, asymmetrical coplanar stripline 17, metal interconnecting wires output electricity
Photoresist at pole 22 and pull-down electrode 26；
9) electron beam evaporation (EBE) forms first layer gold (Au), with a thickness of 0.3mm, removes on photoresist and photoresist
Au, removing forms first layer Au, output electrode 22, the thermoelectric pile metal interconnecting wires of co-planar waveguide 10 and asymmetric coplanar strip 17
And pull-down electrode 26；
10) (LPCVD) one layer of Si3N4 is deposited, with a thickness of 0.1mm；
11) layer photoresist, photoetching and the photoresist for retaining 14 lower section of clamped beam 13 and cantilever beam, dry etching are coated
Si3N4 forms dielectric layer 12；
12) uniformly one layer of air layer 15 of coating and litho pattern retain under clamped beam 13 and cantilever beam 14 with a thickness of 2mm
The polyimides of side is as sacrificial layer；
13) photoresist is coated, photoetching removes clamped beam 13, cantilever beam 14, anchoring area 11, co-planar waveguide 10, asymmetric coplanar
Photoresist with 22 position of line 17 and output electrode；
14) seed layer for evaporating 500/1500/300A ° of Ti/Au/Ti, removes one thickness of re-plating after the Ti layer at top
Degree is the Au layer of 2mm；
15) Au on photoresist and photoresist is removed, clamped beam 13, cantilever beam 14, anchoring area 11, co-planar waveguide are formed
10, asymmetrical coplanar stripline 17 and output electrode 22；
16) deep reaction ion etching (DRIE) the substrate material back side makes membrane structure 25；
17) discharge polyimide sacrificial layer: developer solution impregnates, and removes the polyimide sacrificial layer under clamped beam, deionization
Water impregnates slightly, dehydrated alcohol dehydration, volatilizees, dries under room temperature.
Difference with the prior art of the present invention is:
Present invention employs novel six ports clamped beam coupled structures, wherein the first end of six port clamped beam couplers
The power degree of coupling of mouth to third port, the 4th port and first port to fifth port, the 6th port is identical；It is this clamped
Beam coupled structure the signal of fraction is coupled out from the microwave signal of coplanar wave guide transmission come detect the frequency of microwave signal and
Phase size, and most of signal can be input in next stage processing circuit；Using indirect heating type microwave power detector
The power of microwave signal is detected, there is preferable microwave property and without DC power；Clamped beam of the invention is online unknown
Frequency microwave phase detectors realize the 0-360 ° of phase on-line checking to unknown frequency signal.
The structure for meeting conditions above is considered as the online unknown frequency microwave phase of clamped beam indirect heating of the invention
Detector.
Claims (3)
1. a kind of online unknown frequency microwave phase detector device of clamped beam indirect heating, it is characterised in that the phase detectors by
Six port clamped beam couplers (1), channel selection switch (2), microwave frequency detector (3), microwave phase detector module (4),
First indirect heating type microwave power detector (5-1) and the cascade of the second indirect heating type microwave power detector (5-2) are constituted；
Wherein, the first port (1-1) of six port clamped beam couplers (1) is to third port (1-3), the 4th port (1-4) and the
The power degree of coupling difference of Single port (1-1) to fifth port (1-5), the 6th port (1-6) is identical, and measured signal is through first end
Mouth (1-1) input, is output to junior's processing circuit by second port (1-2), by the 4th port (1-4) and the 6th port (1-6)
The first Wilkinson power combiner (6-1) and the 2nd Wilkinson power for being output to microwave phase detector module (4) close
Grow up to be a useful person (6-2), and is exported by the first Wilkinson power combiner (6-1) and the 2nd Wilkinson power combiner (6-2)
To third indirect heating type microwave power detector (5-3) and the 4th indirect heating type microwave power detector (5-4), with reference to letter
Number it is divided into two-way power and the identical signal of phase through Wilkinson power divider (7), with the 4th port (1-4) and the 6th
The two-way measured signal of port (1-6) is through the first Wilkinson power combiner (6-1) and the 2nd Wilkinson power combing
Device (6-2) carries out power combing；Channel selection switch (2) are output to by third port (1-3) and fifth port (1-5)；Channel
The 7th port (2-1) and the 8th port (2-2) of selection switch (2) connect the first indirect heating type microwave power detector respectively
(5-1) and the second indirect heating type microwave power detector (5-2), the 9th port (2-3) of channel selection switch (2) and the tenth
Port (2-4) connects the 3rd Wilkinson power combiner (6-3) of microwave frequency detector (3), and by the 3rd Wilkinson
Power combiner (6-3) is output to the 5th indirect heating type microwave power detector (5-5) and realizes to unknown frequency signal
Frequency on-line checking；
Wherein the structure of six port clamped beam couplers (1) is symmetrical set with its center line, by co-planar waveguide (10), medium
Layer (12), air layer (15) and across clamped beam above it (13) constitute；Co-planar waveguide (10) is produced on SiO2 layers (9),
Anchoring area (11) is produced on co-planar waveguide (10), the lower section metallization medium layer (12) of clamped beam (13), and with air layer (15), solid
Strutbeam (13) collectively forms coupled capacitor structure, and co-planar waveguide (10) length between two clamped beams (13) is λ/4.
2. the online unknown frequency microwave phase detector device of clamped beam indirect heating as described in claim 1, feature exist
In channel selection switch (2) by co-planar waveguide (10), anchoring area (11), dielectric layer (12), cantilever beam (14), pull-down electrode (26) structure
At；For anchoring area (11) on co-planar waveguide (10), the lower section of cantilever beam (14) makes pull-down electrode (26), and with pull-down electrode (26)
Upper dielectric layer (12) collectively forms construction of switch；The cantilever beam (14) of channel selection switch (2) is grounded, and pull-down electrode (26) connects
Driving voltage；When driving voltage is more than or equal to cut-in voltage, cantilever beam (14) is pulled down into, and channel is strobed.
3. the online unknown frequency microwave phase detector device of clamped beam indirect heating as described in claim 1, it is characterised in that
Indirect heating type microwave power detector is by Si substrate (8), and SiO2 layers (9), co-planar waveguide (10), terminal resistance (19), p-type is partly
Conductor arm (20), N-type semiconductor arm (21), output electrode (22) are constituted；Microwave power is input to end by co-planar waveguide (10)
End resistance (19) is converted to heat；P-type semiconductor arm (20) and N-type semiconductor arm (21) constitute thermocouple；According to Seebeck
Effect inputs microwave power size by measuring known to the thermoelectrical potential of output electrode (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710052696.6A CN106841796B (en) | 2017-01-24 | 2017-01-24 | The online unknown frequency microwave phase detector device of clamped beam indirect heating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710052696.6A CN106841796B (en) | 2017-01-24 | 2017-01-24 | The online unknown frequency microwave phase detector device of clamped beam indirect heating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106841796A CN106841796A (en) | 2017-06-13 |
| CN106841796B true CN106841796B (en) | 2019-03-19 |
Family
ID=59119887
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710052696.6A Active CN106841796B (en) | 2017-01-24 | 2017-01-24 | The online unknown frequency microwave phase detector device of clamped beam indirect heating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106841796B (en) |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101034122A (en) * | 2007-03-30 | 2007-09-12 | 东南大学 | Microelectronic machinery orthogonal double channels microwave phase online detector and manufacturing method therefor |
| WO2007101916A1 (en) * | 2006-03-09 | 2007-09-13 | Valtion Teknillinen Tutkimuskeskus | Device and method for measuring electrical power |
| CN101332971A (en) * | 2008-07-29 | 2008-12-31 | 东南大学 | Microelectromechanical cantilever beam pass-through microwave power detector and preparation method |
| JP4436065B2 (en) * | 2003-04-23 | 2010-03-24 | 三菱重工業株式会社 | Phase measuring device and space solar power generation system |
| CN101788605B (en) * | 2010-02-01 | 2012-04-11 | 东南大学 | Wireless-receiving system for detecting microelectronic mechanical microwave frequency and preparation method thereof |
| CN103278681A (en) * | 2013-05-20 | 2013-09-04 | 东南大学 | Microwave power sensor with multi-cantilever structure |
| CN103018559B (en) * | 2012-12-26 | 2015-04-15 | 东南大学 | Device and method for phase detection based on indirect type micromechanical microwave power sensor |
| CN103344831B (en) * | 2013-06-19 | 2015-04-29 | 东南大学 | Phase detector based on micromechanical direct thermoelectric power sensors and preparation method thereof |
| CN104614584A (en) * | 2015-01-15 | 2015-05-13 | 南京邮电大学 | Micro-mechanical, high-precision and fixed supporting beam type microwave power detecting system and preparation method thereof |
| CN104655921A (en) * | 2015-02-16 | 2015-05-27 | 南京邮电大学 | Microwave power detection system based on parallel-connected MEMS (micro-electromechanical system) cantilever beams and preparation method of microwave power detection system |
| CN103048540B (en) * | 2013-01-18 | 2015-09-30 | 东南大学 | Based on online microwave frequency detector and the detection method thereof of semi-girder and direct-type power sensor |
| CN104950172A (en) * | 2015-07-01 | 2015-09-30 | 东南大学 | GaAs-based low-leakage-current microwave phase detector provided with double clamped-beam switches |
-
2017
- 2017-01-24 CN CN201710052696.6A patent/CN106841796B/en active Active
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4436065B2 (en) * | 2003-04-23 | 2010-03-24 | 三菱重工業株式会社 | Phase measuring device and space solar power generation system |
| WO2007101916A1 (en) * | 2006-03-09 | 2007-09-13 | Valtion Teknillinen Tutkimuskeskus | Device and method for measuring electrical power |
| CN101034122A (en) * | 2007-03-30 | 2007-09-12 | 东南大学 | Microelectronic machinery orthogonal double channels microwave phase online detector and manufacturing method therefor |
| CN101332971A (en) * | 2008-07-29 | 2008-12-31 | 东南大学 | Microelectromechanical cantilever beam pass-through microwave power detector and preparation method |
| CN101788605B (en) * | 2010-02-01 | 2012-04-11 | 东南大学 | Wireless-receiving system for detecting microelectronic mechanical microwave frequency and preparation method thereof |
| CN103018559B (en) * | 2012-12-26 | 2015-04-15 | 东南大学 | Device and method for phase detection based on indirect type micromechanical microwave power sensor |
| CN103048540B (en) * | 2013-01-18 | 2015-09-30 | 东南大学 | Based on online microwave frequency detector and the detection method thereof of semi-girder and direct-type power sensor |
| CN103278681A (en) * | 2013-05-20 | 2013-09-04 | 东南大学 | Microwave power sensor with multi-cantilever structure |
| CN103344831B (en) * | 2013-06-19 | 2015-04-29 | 东南大学 | Phase detector based on micromechanical direct thermoelectric power sensors and preparation method thereof |
| CN104614584A (en) * | 2015-01-15 | 2015-05-13 | 南京邮电大学 | Micro-mechanical, high-precision and fixed supporting beam type microwave power detecting system and preparation method thereof |
| CN104655921A (en) * | 2015-02-16 | 2015-05-27 | 南京邮电大学 | Microwave power detection system based on parallel-connected MEMS (micro-electromechanical system) cantilever beams and preparation method of microwave power detection system |
| CN104950172A (en) * | 2015-07-01 | 2015-09-30 | 东南大学 | GaAs-based low-leakage-current microwave phase detector provided with double clamped-beam switches |
Non-Patent Citations (2)
| Title |
|---|
| Fabrication of the Different Microwave Power Sensor by Seesaw-Type MEMS Membrane;Zhenxiang Yi 等;《JOURNAL OF MICROELECTROMECHANICAL SYSTEMS》;20160831;第25卷(第4期);全文 |
| 基于MEMS技术的差分式微波信号相位检测器;焦永昌 等;《东南大学学报》;20090131;第39卷(第1期);全文 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106841796A (en) | 2017-06-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103048540B (en) | Based on online microwave frequency detector and the detection method thereof of semi-girder and direct-type power sensor | |
| CN103105531B (en) | The online microwave frequency detector of microelectron-mechanical and detection method thereof | |
| CN103048536B (en) | Online microwave frequency detector and detecting method thereof based on clamped beam and direct-type power sensor | |
| CN103116067A (en) | On-line microwave frequency detector and detection method thereof based on clamped beams and indirect-type power sensors | |
| CN106841796B (en) | The online unknown frequency microwave phase detector device of clamped beam indirect heating | |
| CN106645920B (en) | Clamped beam T junction indirect heating type microwave signal detector | |
| CN106872780B (en) | The online unknown frequency microwave phase detector device of clamped beam T junction indirect heating | |
| CN106841787B (en) | Clamped beam T-junction direct heating online microwave phase detector of unknown frequency | |
| CN106841789B (en) | On-Line Microwave Phase Detector of Unknown Frequency for Direct Heating of Clamped Beams | |
| CN106841793B (en) | Clamped beam indirect heating online microwave phase detector with known frequency | |
| CN106841788B (en) | The online given frequency microwave phase detector device of clamped beam T junction indirect heating | |
| CN106711164B (en) | Clamped beam indirect heating type microwave signal detector | |
| CN106841771B (en) | Clamped beam T-junction direct heating microwave signal detector | |
| CN106814259B (en) | Clamped beam direct-heating type microwave signal detector | |
| CN106841785B (en) | On-Line Microwave Phase Detector with Known Frequency for Direct Heating of Clamped Beams | |
| CN106841794B (en) | Clamped beam T-junction direct heating on-line microwave phase detector with known frequency | |
| CN106841782B (en) | Silicon substrate cantilever beam couples direct-heating type unknown frequency millimeter wave phase detectors | |
| CN106698326B (en) | Based on silicon-base micro-mechanical cantilever beam T junction direct-heating type millimeter-wave signal detector | |
| CN106872767B (en) | Clamped beam indirect heating microwave signal detection instrument | |
| CN106841781B (en) | Directly heated online millimeter-wave phase detector based on silicon-based cantilever T-junction | |
| CN106872797B (en) | Clamped beam T junction indirect heating type microwave signal detector device | |
| CN106841783B (en) | Silicon-based cantilever T-junction indirect heating unknown frequency millimeter-wave phase detector | |
| CN106771601B (en) | Silicon substrate cantilever beam T junction direct-heating type unknown frequency millimeter wave phase detectors | |
| CN106841790B (en) | Microwave Signal Detection Instrument for Direct Heating of Clamped Beam T-junction | |
| CN106771603A (en) | The online microwave phase detector device of T-shaped knot cantilever beam |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |