CN106827813A - Finger-like cantilever type piezoelectric shower nozzle and its processing method and spraying equipment - Google Patents

Abstract

The invention discloses a finger-shaped cantilever piezoelectric nozzle, a processing method thereof, and a spraying equipment including the nozzle, belonging to the field of piezoelectric ceramics. The finger-shaped cantilever piezoelectric nozzle includes at least one ink tank, and the ink tank It is covered with a flexible diaphragm to form an ink chamber. One end of the ink chamber is provided with an ink inlet, and the other end is provided with a nozzle. The flexible diaphragm is provided with a finger-shaped cantilever piezoelectric ceramic. The electric ceramic includes a connection substrate and a plurality of piezoelectric ceramic cantilever beams in d31 in-plane transverse bending deformation mode protruding from the side of the connection substrate, and the piezoelectric ceramic cantilever beams are located above the ink chamber and connected to the The ink chambers correspond to each other, and the piezoelectric ceramic cantilever beam is connected with a driving circuit. The invention has the advantages of simple structure, convenient processing, high output force, wide application range, not easy to wear and long service life.

Description

Finger-shaped cantilever piezoelectric nozzle and its processing method and spraying equipment

technical field

The invention relates to the field of piezoelectric ceramics, in particular to a finger-shaped cantilever piezoelectric nozzle, a processing method thereof, and a spraying equipment including the nozzle.

Background technique

The nozzle is the core part of the inkjet printer or dispensing machine, which accounts for the highest cost and the highest technical content. It is blank in China from research and development to manufacturing, and it is completely dependent on imports.

Taking the Epson inkjet head as an example, as shown in Figure 1 and Figure 2, it includes an ink chamber 1', a vibrating plate 2', a nozzle 3', a piezoelectric film 4', and the upper and lower surfaces connected to the piezoelectric film 4' The upper electrode 5' and the lower electrode 6', when the piezoelectric film 4' is energized, it deforms and squeezes the vibrating plate 2', causing the vibrating plate 2' to move to the inside of the ink chamber 1', so that the ink Spray from nozzle 3'.

However, this inkjet head has the following disadvantages (take the Epson piezoelectric nozzle as an example, as shown in Figure 1 and Figure 2):

1. The nozzle plate and ink chamber of the piezoelectric nozzle are made of MEMS production technology, the structure and processing technology are complicated, the dependence on ultra-precision processing equipment is strong, and the price of the nozzle is expensive.

2. The piezoelectric ceramic in the piezoelectric nozzle structure is a piezoelectric ceramic film with a thickness of 1 micron. The piezoelectric ceramic film is limited by the preparation process, and its own density is relatively low. The output force is low; and the material of the piezoelectric nozzle is mainly semiconductor silicon, the silicon material has high rigidity, and the deformation of the ink cavity is small, which further reduces the output force; due to the reduction of the output force, the piezoelectric nozzle is only suitable for home and office Printing is not suitable for industrial ceramic inkjet printing or dispensing printing that requires high jet force.

3. The entire piezoelectric ceramic film of the piezoelectric nozzle is bonded to the surface of the ink chamber substrate. When the piezoelectric ceramic film is deformed, it will cause deformation of the entire ink chamber, making the parts such as the ink chamber easy to wear and short in life. .

Contents of the invention

The invention provides a finger-like cantilever type piezoelectric spray head, its processing method and spraying equipment including the spray head. The present invention has simple structure, convenient processing, high output force, wide application range, not easy to wear and long service life.

In order to solve the problems of the technologies described above, the present invention provides technical solutions as follows:

On the one hand, there is provided a finger-like cantilever piezoelectric nozzle, comprising at least one ink tank, the ink tank is covered with a flexible diaphragm to form an ink cavity, one end of the ink cavity is provided with an ink inlet, and the other end is provided with a Nozzle, the flexible diaphragm is provided with a finger-shaped cantilever piezoelectric ceramic, and the finger-shaped cantilever piezoelectric ceramic includes a connection substrate and a plurality of d ₃₁ in-plane transverse bending deformation modes protruding from the side of the connection substrate. The piezoelectric ceramic cantilever beam is located above the ink chamber and corresponds to the ink chamber one by one, and the piezoelectric ceramic cantilever beam is connected with a driving circuit.

Further, the ink tank is a tank body with openings at both ends, wherein:

One end of the ink tank is used as an ink inlet;

The end surface of the other end of the ink tank is provided with a sealing member, the bottom of the other end of the ink tank is provided with an ink outlet, the nozzle is arranged on a nozzle plate, and the nozzle plate is glued to the ink outlet .

Further, the ink tank is a tank body with openings at both ends, wherein:

One end of the ink tank is used as an ink inlet;

The nozzles are provided on a nozzle plate, and the nozzle plate is glued to the end surface of the other end of the ink tank.

Further, the ink tank is a tank body with one end closed and one end open, wherein:

One end of the opening of the ink tank is used as an ink inlet;

A small hole is opened on the end surface or the bottom surface of the closed end of the ink tank as a nozzle.

Further, the ink tank is made by cutting grooves on the ink tank plate, and the finger-shaped cantilever piezoelectric ceramic is made by cutting grooves on the piezoelectric ceramic plate.

Further, the piezoelectric ceramic cantilever is a piezoelectric bimorph structure, including an internal electrode, the two surfaces of the internal electrode are provided with piezoelectric ceramic sheets, and the outer surface of each piezoelectric ceramic sheet is provided with an outer surface. electrode.

Further, the polarization directions of the two piezoelectric ceramic sheets of the piezoelectric ceramic cantilever beam are the same or opposite.

Further, the material of the inner electrode is silver-palladium alloy, copper or silver, the material of the piezoelectric ceramic sheet is lead zirconate titanate, the material of the outer electrode is aluminum, silver, nickel or gold; the ink tank The material of the nozzle plate is structural ceramics or silicon materials; the material of the nozzle plate is structural ceramics, nickel-iron alloy, plexiglass, engineering plastics, Teflon or semiconductor silicon materials; the material of the flexible diaphragm is an organic film.

On the other hand, a method for processing the finger-shaped cantilever piezoelectric nozzle is provided, including:

Step 1: Carry out precise groove processing on the ink tank plate to form the ink tank, wherein one end of the ink tank is opened as the ink inlet;

Step 2: Covering and sticking the flexible diaphragm on the ink tank to form the ink chamber;

Step 3: covering and adhering the piezoelectric ceramic plate on the flexible diaphragm;

Step 4: cutting the end of the piezoelectric ceramic plate away from the ink inlet to form the finger-shaped cantilever piezoelectric ceramic;

Step 5: setting the nozzle at the other end of the ink cavity.

In yet another aspect, a spraying equipment is provided, comprising any finger-shaped cantilever piezoelectric spray head mentioned above.

The present invention has the following beneficial effects:

When the finger-shaped cantilever piezoelectric nozzle of the present invention is working, the ink flows into the ink cavity from the ink inlet, and the piezoelectric ceramic cantilever beam is energized with a signal through the drive circuit, and the piezoelectric ceramic cantilever beam will deform in the direction of the flexible diaphragm. Squeeze the flexible diaphragm to make the flexible diaphragm sag into the ink cavity, squeeze the ink out from the nozzle, and complete printing or dispensing, etc.

The invention has simple structure and convenient processing. In the present invention, the finger-shaped cantilever piezoelectric ceramic is used as the driving part. Since the finger-shaped cantilever piezoelectric ceramic is an integral structure, all piezoelectric ceramic cantilevers are connected together through the beam connection substrate, so only the finger-shaped cantilever needs to be processed. type piezoelectric ceramics, and then cover it on the flexible diaphragm, there is no need to process a piezoelectric film for each ink chamber, and then place the piezoelectric films one by one above the ink chamber, which makes the structure of the present invention Simple and easy to process. In addition, compared with the prior art, the ink tank, nozzle and flexible diaphragm of the present invention also have the advantages of simple structure and convenient processing.

The invention has high output force and wide application range. The present invention uses the piezoelectric ceramic cantilever beam as the driving part, which adopts d ₃₁ in-plane transverse bending deformation, and the deformation amount is large when power is applied, and the output force is high, which can generate relatively large deformation pressure on the ink in the ink chamber, which is beneficial to increase The initial speed of ink droplet ejection improves the working efficiency of the inkjet print head, and the flexible diaphragm is used instead of the rigid silicon material, which ensures a large deformation of the ink chamber, high pressure on the ink, and further improves the output force; and the pressure The maximum displacement of the electroceramic cantilever beam occurs on the side close to the nozzle, which can form the largest ink pressure change at the position of the ink tank close to the nozzle, which further improves the output force; finally, due to the high output force, the finger-shaped The cantilever piezoelectric nozzle is not only suitable for home and office printing, but also suitable for industrial ceramic inkjet printing or dispensing printing that requires high jet force, as well as spraying glaze or electrode slurry, etc., with a wide range of applications.

The invention is not easy to wear and has long service life. When the piezoelectric ceramic cantilever beam is deformed, only the flexible diaphragm will be deformed, and other parts of the ink chamber will not be deformed, so that the ink chamber is not easy to wear and has a long service life.

To sum up, compared with the prior art, the finger-shaped cantilever piezoelectric nozzle of the present invention has a simple structure, convenient processing, high output force, wide application range, low wear resistance and long service life.

Description of drawings

Fig. 1 is the structural representation of the nozzle of Epson printer in the prior art;

Fig. 2 is the sectional view of Epson printer nozzle in the prior art;

Fig. 3 is a perspective view 1 of Embodiment 1 of the finger-shaped cantilever piezoelectric nozzle of the present invention;

Fig. 4 is a second perspective view of Embodiment 1 of the finger-shaped cantilever piezoelectric nozzle of the present invention;

Fig. 5 is the top view of Fig. 3;

Fig. 6 is the A-A direction sectional view of Fig. 5;

Fig. 7 is the B-B direction sectional view of Fig. 5;

8 is a schematic diagram of the working process of Embodiment 1 of the finger-shaped cantilever piezoelectric nozzle of the present invention;

Fig. 9 is a B-B sectional view of Embodiment 2 of the finger-shaped cantilever piezoelectric nozzle of the present invention;

Fig. 10 is a B-B cross-sectional view of Embodiment 3 of the finger-shaped cantilever piezoelectric nozzle of the present invention;

Fig. 11 is a B-B cross-sectional view of Embodiment 4 of the finger-shaped cantilever piezoelectric nozzle of the present invention;

12 is a schematic diagram of the nozzle plate in Embodiment 5 of the finger-shaped cantilever piezoelectric nozzle of the present invention;

13 is a schematic diagram of the piezoelectric ceramic cantilever beam in Embodiment 6 of the finger-shaped cantilever piezoelectric nozzle of the present invention;

Fig. 14 is a schematic diagram of an embodiment of the manufacturing process of the finger-like cantilever piezoelectric nozzle of the present invention.

detailed description

In order to make the technical problems, technical solutions and advantages to be solved by the present invention clearer, the following will describe in detail with reference to the drawings and specific embodiments.

On the one hand, the present invention provides a finger-shaped cantilever piezoelectric nozzle, wherein the first embodiment, as shown in Figures 3 to 8, includes at least one ink tank 110, and the ink tank 110 is covered with a flexible diaphragm 120 to form an ink cavity, One end of the ink chamber is provided with an ink inlet 130, and the other end is provided with a nozzle 140. The flexible diaphragm 120 is provided with a finger-shaped cantilever piezoelectric ceramic 150. The finger-shaped cantilever piezoelectric ceramic 150 includes a connecting substrate 151 and a connecting substrate 151. A plurality of piezoceramic cantilever beams 152 that use _d31 in-plane transverse bending deformation mode protruding from the side, the piezoceramic cantilever beams 152 are located above the ink chamber and correspond to the ink chamber one by one, the piezoceramic cantilever beams 152 are connected with Drive circuit.

When the finger-like cantilever piezoelectric nozzle in this embodiment is working, the ink flows into the ink chamber from the ink inlet, and the piezoelectric ceramic cantilever beam is powered by a driving circuit, and the piezoelectric ceramic cantilever beam will deform in the direction of the flexible diaphragm. , squeeze the flexible diaphragm, make the flexible diaphragm sag into the ink cavity, squeeze the ink out from the nozzle, complete printing or dispensing, etc.

This embodiment has simple structure and convenient processing. In this embodiment, the finger-shaped cantilever piezoelectric ceramic is used as the driving part. Since the finger-shaped cantilever piezoelectric ceramic is an integral structure, all the piezoelectric ceramic cantilevers are connected together through the beam connection substrate, so only the finger-shaped piezoelectric ceramic needs to be processed. Cantilever piezoelectric ceramics, and then cover it on the flexible diaphragm, no need to process a piezoelectric film for each ink chamber, and then place the piezoelectric film above the ink chamber one by one, which makes this implementation The structure is simple and the processing is convenient. In addition, compared with the prior art, the ink tank, nozzle and flexible diaphragm of this embodiment also have the advantages of simple structure and convenient processing.

This embodiment has high output force and wide application range. This embodiment uses the piezoelectric ceramic cantilever beam as the driving part, which adopts d ₃₁ in-plane transverse bending deformation, the deformation amount is large when power is applied, and the output force is high, which can generate a large deformation pressure on the ink in the ink chamber, which is beneficial to Increase the initial speed of ink drop ejection, improve the working efficiency of the inkjet print head, and use a flexible diaphragm instead of the rigid silicon material, which ensures a large deformation of the ink chamber, high pressure on the ink, and further improves the output force; and The maximum displacement of the piezoelectric ceramic cantilever beam occurs on the side close to the nozzle, which can form the largest ink pressure change at the position of the ink tank close to the nozzle, which further improves the output force; finally, due to the high output force, the present embodiment The finger-like cantilever piezoelectric nozzle is not only suitable for home and office printing, but also suitable for industrial ceramic inkjet printing or dispensing printing that requires high jet force, as well as spraying glaze or electrode slurry, etc., with a wide range of applications.

This embodiment is not easy to wear and has a long service life. When the piezoelectric ceramic cantilever beam is deformed, only the flexible diaphragm will be deformed, and other parts of the ink chamber will not be deformed, so that the ink chamber is not easy to wear and has a long service life.

To sum up, compared with the prior art, the finger-shaped cantilever piezoelectric nozzle of this embodiment has a simple structure, convenient processing, high output force, wide application range, low wear resistance and long service life.

In the above-mentioned first embodiment, there are multiple ways of setting the ink tank and the nozzle, etc. Here are several embodiments:

Embodiment two:

As shown in Figure 9 (220 in Figure 9 is the flexible diaphragm of this embodiment, 250 is the finger-shaped cantilever type piezoelectric ceramic of this embodiment), the ink tank 210 is a tank body with openings at both ends, wherein:

One end of the ink tank 210 is used as the ink inlet 230;

The end surface of the other end of the ink tank 210 is provided with a sealing member 260 , and the bottom of the other end of the ink tank is provided with an ink outlet 270 .

The finger-shaped cantilever type piezoelectric nozzle of this embodiment is side spraying, and in this embodiment, the ink tank is a tank body with openings at both ends, which can be processed conveniently, and the nozzle is arranged on the nozzle plate. If the nozzle breaks down, Only the nozzle plate needs to be replaced, which is convenient for maintenance.

Embodiment three:

As shown in Figure 10 (320 in Figure 10 is the flexible diaphragm of this embodiment, and 350 is the finger-shaped cantilever type piezoelectric ceramic of this embodiment), the ink tank 310 is a tank body with openings at both ends, wherein:

One end of the ink tank 310 is used as the ink inlet 330;

The nozzles 340 are provided on a nozzle plate 380 that is glued to the end surface of the other end of the ink tank 310 .

The finger-shaped cantilever piezoelectric nozzle of this embodiment is end-face spraying, and in this embodiment, the ink tank is a tank body with openings at both ends, which can be processed conveniently, and the nozzle is arranged on the nozzle plate. If the nozzle breaks down, Only the nozzle plate needs to be replaced, which is convenient for maintenance.

Embodiment four:

As shown in Figure 11 (420 in Figure 11 is the flexible diaphragm of this embodiment, 450 is the finger-shaped cantilever type piezoelectric ceramic of this embodiment), the ink tank 410 is a tank body with one end closed and one end open, wherein:

One end of the opening of the ink tank 410 is used as the ink inlet 430;

A small hole is opened on the end surface or the bottom surface of the closed end of the ink tank 410 as the nozzle 440 .

The finger-shaped cantilever piezoelectric nozzle in this embodiment is end-face spraying, and in this embodiment, the nozzle is directly arranged on the end face of the closed end of the ink tank, which makes the structure simpler and the processing more convenient.

There are many ways to process the ink tank and finger-shaped cantilever piezoelectric ceramics in the above-mentioned embodiments, and an embodiment is given here:

Embodiment five:

As shown in FIG. 12 , the ink tank 510 is made by cutting grooves on the ink tank plate 590 , and the finger-shaped cantilever piezoelectric ceramics are made by cutting grooves on the piezoelectric ceramic plate.

In this embodiment, the processing of the ink tank and the finger-shaped cantilever piezoelectric ceramic is simple and convenient.

Further, there are various structures of piezoelectric ceramic cantilever beams, here is an example:

Embodiment six

As shown in Figure 13 (in Figure 13, 655, 656, 657 are electrode leads), the piezoelectric ceramic cantilever beam 652 is a piezoelectric bimorph structure, including an internal electrode 653, and both surfaces of the internal electrode 653 are provided with piezoelectric The ceramic sheets 654, the outer surface of each piezoelectric ceramic sheet 654 is provided with an external electrode.

The piezoelectric ceramic cantilever beam with piezoelectric bimorph structure has larger deformation and higher output force, which is beneficial to improve printing efficiency.

In addition, in this embodiment, in the finger-shaped cantilever piezoelectric ceramics, the external electrodes are also cut during the grooving process, and the external electrodes connected to the substrate are also cut together to prevent multiple piezoelectric ceramics. The outer electrodes of the ceramic cantilever are connected together to conduct electricity.

Furthermore, there are many specific structures of the piezoelectric bimorph, and an example is given here:

Embodiment seven:

The polarization directions of the two piezoelectric ceramic sheets of the piezoelectric ceramic cantilever beam are the same or opposite. When the polarization direction is opposite, the electrode lead 655 is connected to the AC+, and the electrode leads 656 and 657 are connected to the AC-; when the polarization directions are the same, the electrode lead 655 is connected to the ground, the electrode lead 656 is connected to the AC+, and the electrode lead 657 is connected to the AC-. Since the AC amplitude changes at any time, + and - are only used as symbols.

In each of the above-mentioned embodiments, the materials of various components can be selected according to the knowledge of those skilled in the art, and an embodiment is given here:

Embodiment eight:

The inner electrode is made of silver-palladium alloy, copper or silver, the piezoelectric ceramic sheet is made of lead zirconate titanate, and the outer electrode is made of aluminum, silver, nickel or gold.

The ink tank is made of structural ceramics or silicon; the nozzle plate is made of structural ceramics, nickel-iron alloy, plexiglass, engineering plastics, Teflon or semiconductor silicon. The ink tank and nozzle plate are made of rigid materials, which are not easy to deform and wear, and have a longer service life.

The material of the flexible diaphragm is an organic film; the elastic modulus of the organic film is small, and it is easy to deform under the action of the piezoelectric ceramic cantilever beam, which can generate a large deformation pressure on the ink in the ink tank, which is beneficial to increase the initial ejection of ink droplets. Speed, improve the working efficiency of the inkjet print head, the ink tank seal of the existing piezoelectric nozzle is made of silicon material, ceramic material, metal material, etc. with a certain rigidity, and the deformation is small; and the organic film is corrosion-resistant and has a wide range of applications ,long life.

On the other hand, the present invention provides a method for processing the above-mentioned piezoelectric nozzle, one embodiment of which is shown in Figure 14, including:

Step 1: Carry out precise groove processing on the ink tank plate to form an ink tank, where one end of the ink tank is opened as an ink inlet; of course, further, the other end of the ink tank is also opened, as shown in Figure 14 a, b shown.

Step 2: Cover and glue the flexible diaphragm on the ink tank to form an ink chamber; as shown in c in Figure 14, further, set the sealing member at the other end of the ink tank, as shown in d in Figure 14.

Step 3: Cover and glue the piezoelectric ceramic plate on the flexible diaphragm.

Step 4: Cut the end of the piezoelectric ceramic plate away from the ink inlet to form a finger-shaped cantilever piezoelectric ceramic; as shown in e in FIG. 14 .

Step 5: Set nozzles at the other end of the ink chamber; further, the nozzles are set on the nozzle plate, and the nozzle plate covers the ink outlet, as shown by f in FIG. 14 .

This embodiment is easy to prepare nozzle structures with different physical resolutions according to actual needs, such as precision piezoelectric inkjet heads with a resolution of more than 600dpi used in the traditional printing industry, and can easily obtain nozzles with a resolution lower than 180dpi that can be used in multiple applications. Piezoelectric nozzle structure for dispensing glue, or glaze spraying. This embodiment has simple process, convenient processing, low cost and wide application range.

In yet another aspect, the present invention provides a spraying equipment, one embodiment of which includes any one of the finger-shaped cantilever piezoelectric spray heads mentioned above. Spraying equipment includes printers, glue dispensers, glaze spraying equipment or electrode slurry spraying equipment.

The spraying equipment in this embodiment has a simple structure and convenient processing; it has high output force and wide application range; it is not easy to wear and has a long service life.

The above description is a preferred embodiment of the present invention, it should be pointed out that for those of ordinary skill in the art, without departing from the principle of the present invention, some improvements and modifications can also be made, and these improvements and modifications can also be made. It should be regarded as the protection scope of the present invention.

Claims (10)

1. A finger-shaped cantilever piezoelectric nozzle, characterized in that it comprises at least one ink tank, the ink tank is covered with a flexible diaphragm to form an ink chamber, one end of the ink chamber is provided with an ink inlet, and the other end A nozzle is provided, and a finger-shaped cantilever piezoelectric ceramic is provided on the flexible diaphragm, and the finger-shaped cantilever piezoelectric ceramic includes a connection substrate and a plurality of d ₃₁ in-plane transverse bending protruding from the side of the connection substrate. A piezoelectric ceramic cantilever beam in deformation mode, the piezoelectric ceramic cantilever beam is located above the ink cavity and corresponds to the ink cavity one by one, and the piezoelectric ceramic cantilever beam is connected with a driving circuit. 2. The finger-shaped cantilever piezoelectric nozzle according to claim 1, wherein the ink tank is a tank body with two ends open, wherein: One end of the ink tank is used as an ink inlet; The end surface of the other end of the ink tank is provided with a sealing member, the bottom of the other end of the ink tank is provided with an ink outlet, the nozzle is arranged on a nozzle plate, and the nozzle plate is glued to the ink outlet . 3. The finger-shaped cantilever piezoelectric nozzle according to claim 1, wherein the ink tank is a tank body with openings at both ends, wherein: One end of the ink tank is used as an ink inlet; The nozzles are provided on a nozzle plate, and the nozzle plate is glued to the end surface of the other end of the ink tank. 4. The finger-shaped cantilever piezoelectric nozzle according to claim 1, wherein the ink tank is a tank body with one end closed and one end open, wherein: One end of the opening of the ink tank is used as an ink inlet; A small hole is opened on the end surface or the bottom surface of the closed end of the ink tank as a nozzle. 5. The finger-shaped cantilever piezoelectric nozzle according to any one of claims 1-4, wherein the ink tank is made by cutting grooves on the ink tank plate, and the finger-shaped cantilever piezoelectric ceramic Manufactured by cutting grooves on piezoelectric ceramic plates. 6. The finger-shaped cantilever piezoelectric nozzle according to claim 5, characterized in that, the piezoelectric ceramic cantilever is a piezoelectric bimorph structure, including internal electrodes, and both surfaces of the internal electrodes are provided with The piezoelectric ceramic sheets are provided with external electrodes on the outer surface of each piezoelectric ceramic sheet. 7 . The finger-shaped cantilever piezoelectric nozzle according to claim 6 , wherein the polarization directions of the two piezoelectric ceramic sheets of the piezoelectric ceramic cantilever beam are the same or opposite. 8. The finger-shaped cantilever piezoelectric nozzle according to claim 7, wherein the material of the inner electrode is silver-palladium alloy, copper or silver, and the material of the piezoelectric ceramic sheet is lead zirconate titanate, The material of the external electrode is aluminum, silver, nickel or gold; the material of the ink tank is structural ceramics or silicon material; the material of the nozzle plate is structural ceramics, nickel-iron alloy, plexiglass, engineering plastics, Teflon or Semiconductor silicon material; the material of the flexible diaphragm is an organic film. 9. The processing method of the finger-shaped cantilever type piezoelectric nozzle according to claim 5, characterized in that, comprising: Step 1: Carry out precise groove processing on the ink tank plate to form the ink tank, wherein one end of the ink tank is opened as the ink inlet; Step 2: Covering and sticking the flexible diaphragm on the ink tank to form the ink chamber; Step 3: covering and adhering the piezoelectric ceramic plate on the flexible diaphragm; Step 4: cutting the end of the piezoelectric ceramic plate away from the ink inlet to form the finger-shaped cantilever piezoelectric ceramic; Step 5: setting the nozzle at the other end of the ink cavity. 10. A spraying equipment, characterized in that it comprises the finger-shaped cantilever piezoelectric spray head according to any one of claims 1-8.