CN106817834A - A kind of double water-cooled inductance coils of high-frequency induction plasma generator - Google Patents
A kind of double water-cooled inductance coils of high-frequency induction plasma generator Download PDFInfo
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- CN106817834A CN106817834A CN201710104246.7A CN201710104246A CN106817834A CN 106817834 A CN106817834 A CN 106817834A CN 201710104246 A CN201710104246 A CN 201710104246A CN 106817834 A CN106817834 A CN 106817834A
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- 230000006698 induction Effects 0.000 title claims abstract description 27
- 239000000919 ceramic Substances 0.000 claims abstract description 37
- 239000000498 cooling water Substances 0.000 claims abstract description 36
- 230000004087 circulation Effects 0.000 claims abstract description 27
- 238000007711 solidification Methods 0.000 claims abstract description 26
- 230000008023 solidification Effects 0.000 claims abstract description 26
- 239000010453 quartz Substances 0.000 claims abstract description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 19
- 238000001816 cooling Methods 0.000 claims abstract description 10
- 230000009977 dual effect Effects 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
- 239000003708 ampul Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 230000003197 catalytic effect Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052573 porcelain Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/28—Cooling arrangements
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
Abstract
本发明公开了一种高频感应等离子发生器双水冷电感线圈，包括电感线圈、陶瓷固化套、内循环冷却水通道和外循环冷却水通道。通过在电感线圈外部浇筑陶瓷形成陶瓷固化套，螺旋线圈与陶瓷固化套同轴布置；线圈内循环冷却水通道通过电感线圈薄壁特征实现，外循环冷却水通道在陶瓷固化套内壁和石英管外壁间形成，以此实现对电感线圈内部和外部双水冷以及对高频感应等离子发生器外石英管进行冷却。一种双水冷电感线圈应用于高频感应等离子发生器，提高了电感线圈和石英管的安全性，提高了发生器的可靠性。
The invention discloses a double water-cooled inductance coil of a high-frequency induction plasma generator, which comprises an inductance coil, a ceramic solidification sleeve, an inner circulation cooling water channel and an outer circulation cooling water channel. The ceramic curing sleeve is formed by pouring ceramics outside the inductance coil, and the helical coil and the ceramic curing sleeve are arranged coaxially; the inner circulation cooling water channel of the coil is realized by the thin-walled feature of the induction coil, and the outer circulation cooling water channel is on the inner wall of the ceramic curing sleeve and the outer wall of the quartz tube Space is formed, so as to realize the double water cooling inside and outside of the inductance coil and the cooling of the quartz tube outside the high-frequency induction plasma generator. A double water-cooled inductance coil is applied to a high-frequency induction plasma generator, which improves the safety of the inductance coil and the quartz tube, and improves the reliability of the generator.
Description
Technical field
The present invention relates to high-temperature plasma technical field, and in particular to a kind of pair of water-cooled inductance coil design.
Background technology
High frequency induction thermal plasma is high due to its frequency, also known as radio frequency induction coupled plasma.High-frequency plasma
With following features：(1) high-frequency plasma relies primarily on strong electromagnetic coupled and produces, it is not necessary to electrode, therefore does not exist
The problem of electrode evaporative emission, therefore the plasma atmosphere for producing is pure；(2) effect of joule heating effect, can make etc. from
Daughter stream reaches the excessive temperature of 3000~10000K；(3) high-frequency plasma volume is larger, and flame flow velocity degree is low, Temperature Distribution
Uniform flat.Therefore, high-frequency plasma is particularly well-suited to processing (such as nodularization, solid slope technology, the superfine powder preparation of refractory particle
Deng) and deep space probe thermally protective materials higher to thermal environment atmosphere requirements ground Heating Experiment research etc..
Catalytic behavior of materials is mainly produced by high-frequency induction plasma generator, its operation principle be high frequency etc. from
Daughter produce principle be：The high frequency electric that high frequency electric source is provided produces magnetic field and the discharge tube of change by the coil of reactor
Interior plasmon coupling, ionizes gas, the sensing alternating electric field that the alternating magnetic field in coil is produced, in gaseous conductor
In cause electric current and produce Joule heat.As can be seen here, induction coil is plasma generator core component, the circle of induction coil
Number, the matching of the size of coil and quartz burner, the cooling effect of coil, coil dimension and power parameter are matched etc. to high frequency
The ionization effect of plasma generator and safe operation all serve vital effect.
Quartz burner periphery is independently arranged in more than current high-frequency induction plasma generator induction coil using plain mode
In space, coil is fixed in inductance coil end, the reliability of induction coil only has by line under this kind of design condition
Internal enough cooling waters are enclosed to ensure, it is poor by end fixed coil steadiness, it is difficult to ensure coil and quartz burner
Axiality, at the same time, inductance coil is arranged in the open space of quartz burner periphery, because gas is deposited in the space
, it is easy to produce turn-to-turn to beat arc phenomenon when coil passes through alternating current, have impact on the service life and the whole series of inductance coil
The safe and stable operation of high-frequency plasma generator.
The content of the invention
The present invention provides a kind of catalytic behavior of materials generator double water-cooled inductance coils, strengthens the cooling of inductance coil
Effect, improves its steadiness in catalytic behavior of materials generator and its axiality with quartz burner, while avoiding
Turn-to-turn beats the problem of arc.
The technical scheme is that：A kind of double water-cooled inductance coils of high-frequency induction plasma generator, including inductor wire
Circle, ceramic solidification set, interior circulation cooling-water duct and outer circulation cooling-water duct；Pottery is poured outside inductance coil spiral part
Porcelain forms ceramic solidification set, and ceramic solidification set is hollow structure and coaxially arranged with inductance coil；It is solid that quartz ampoule is arranged in ceramics
Change in set cavity, outer circulation cooling-water duct, whole inductance coil are formed between covering inwall by quartzy pipe outer wall and ceramic solidification
It is hollow structure, its central passage is interior circulation cooling-water duct, and interior cooling water is by interior circulation cooling-water duct in inductor wire
Circle is internal to carry out heat exchange cooling to coil, the conductive force that the outer cooling water in outer circulation cooling-water duct is covered by ceramic solidification
To being cooled down outside inductance coil.
Further, the inductance coil number of turn is designed as 3~8 circles.
Further, inductance coil turn-to-turn distance is designed as 5~50mm.
Further, the outer ring surface of ceramic solidification set is apart from the outer face of the spiral part of inductance coil at least 10mm.
Further, apart from inductance coil, axially corresponding outer face distance is at least for the upper and lower end face of ceramic solidification set
15mm。
Further, the distance between the inwall of ceramic solidification set and quartzy pipe outer wall are not less than 3mm.
Beneficial effects of the present invention are：
1st, inductance coil is cooled down by the way that internal layer and outer layer are double, while ensureing that outer circulation cooling-water duct has enough circulating faces
Product, enhances the cooling effect of inductance coil, improves the reliability and security of coil.
2nd, inductance coil is solidificated in ceramic solidification set, and covers outer ring surface and upper and lower end face and sense by designing ceramic solidification
Answer the distance of coil helix part correspondence end face, it is ensured that inductance coil is firm on solidification set and high-frequency plasma generator
Property, meanwhile, inductance coil spiral part is improved with the axiality of generator quartz ampoule.
3rd, because inductance coil is solidificated in ceramic solidification set, coil turn-to-turn does not exist gas, it is to avoid inductance coil leads to
Turn-to-turn gas ionization beats the problem of arc when crossing alternating current.
4th, the outer quartz ampoule of high-frequency induction plasma generator is cooled down by the cooling water of outer circulation cooling-water duct,
Prevent it by high-temperature plasma scaling loss in generator, improve the reliability of a whole set of high-frequency induction plasma generator.
Brief description of the drawings
Fig. 1 is schematic diagram of the invention；
Fig. 2 is the schematic diagram of the present invention and high-frequency induction plasma generator；
Label in figure：1- inductance coils；2- ceramic solidification sets；3- interior circulation cooling-water ducts；4- outer circulations cooling water leads to
Road；5- quartz ampoules；6- high frequency electric sources.
Specific embodiment
Invention is described in further detail below in conjunction with accompanying drawing.
A kind of double water-cooled inductance coils of catalytic behavior of materials generator, include as shown in Figure 1：Inductance coil 1, ceramics
Solidification set 2, interior circulation cooling-water duct 4 and outer circulation cooling-water duct 3.By pouring ceramic formation outside inductance coil 1
Ceramic solidification set 2, inductance coil 1 is coaxially arranged with ceramic solidification set 2；Inductance coil interior circulation cooling-water duct passes through inductor wire
Circle thin-walled feature realizes that interior cooling water carries out heat exchange cooling inside inductance coil to coil, and outer circulation cooling-water duct 3 is in pottery
Formed between porcelain solidification set inwall and quartzy pipe outer wall, outer circulation cooling water is by the conductive force of ceramic solidification set 2 to inductor wire
Circle is outside to be cooled down, and inside and outside pair of water-cooled of inductance coil is realized with this, at the same time, logical by outer circulation cooling water
The cooling water in road is cooled down to the outer quartz ampoule of high-frequency induction plasma generator, prevents it by high-temperature plasma in generator
Scaling loss, improves the reliability of generator.
In a kind of double water-cooled inductance coil designs of above-mentioned high-frequency induction plasma generator, the design of the inductance coil number of turn
It is 3~8 circles.Inductance coil turn-to-turn distance is designed as 5~50mm.Spiral of the outer ring surface of ceramic solidification set 2 apart from inductance coil 1
Partial outer face at least 10mm.The upper and lower end face of ceramic solidification set 2 is apart from the corresponding outer face in the axial direction of inductance coil 1 apart from extremely
Few 15mm.The distance between the inwall of ceramic solidification set 2 and quartzy pipe outer wall are not less than 3mm.
As shown in Fig. 2 the present invention is applied to high-frequency induction plasma generator, its operation principle is：The end of inductance coil 1
Connection high frequency electric source 6, the magnetic field of change is produced when the high frequency electric of alternation passes through inductance coil 1 in quartz ampoule 5, change
Magnetic field induces electric field again, by strong electromagnetic coupled so that the working gas in generator is ionized.In a whole set of high frequency
During op plasma generator, interior cooling water is cooled down by interior circulation cooling-water duct 3 to induction coil 1,
Outer cooling water passes through outer circulation cooling-water duct 4, on the one hand by the conductive force of ceramic solidification set to entering outside inductance coil 1
Row cooling, on the other hand, external quartz ampoule 5 is cooled down, and prevents it by high-temperature plasma scaling loss in generator, is improved with this
High-frequency induction plasma generator induction coil and quartz ampoule security, improve the reliability of whole system.
The undisclosed technology of the present invention belongs to general knowledge as well known to those skilled in the art.
Claims (6)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710104246.7A CN106817834A (en) | 2017-02-24 | 2017-02-24 | A kind of double water-cooled inductance coils of high-frequency induction plasma generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710104246.7A CN106817834A (en) | 2017-02-24 | 2017-02-24 | A kind of double water-cooled inductance coils of high-frequency induction plasma generator |
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| Publication Number | Publication Date |
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| CN106817834A true CN106817834A (en) | 2017-06-09 |
Family
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710104246.7A Pending CN106817834A (en) | 2017-02-24 | 2017-02-24 | A kind of double water-cooled inductance coils of high-frequency induction plasma generator |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107182164A (en) * | 2017-06-27 | 2017-09-19 | 中国航天空气动力技术研究院 | A kind of water cooling cage high-frequency induction coupled plasma reactor |
| CN107824120A (en) * | 2017-11-29 | 2018-03-23 | 郑州大学 | It is a kind of that there is the superhigh temperature reactor for extending plasma arcs area |
| CN109371384A (en) * | 2018-12-13 | 2019-02-22 | 深圳市捷佳伟创新能源装备股份有限公司 | The reaction chamber structure of plasma deposition furnace |
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|---|---|---|---|---|
| EP0791998A1 (en) * | 1996-02-22 | 1997-08-27 | Gec Alsthom Electromecanique Sa | Mixed high voltage current lead |
| JPH10241893A (en) * | 1997-02-21 | 1998-09-11 | Nippon Koshuha Kk | Microwave plasma generator |
| CN2432463Y (en) * | 2000-03-27 | 2001-05-30 | 烟台开发区龙源电力燃烧控制工程有限公司 | Plasma accelerator coil with double cooling function |
| WO2003032693A1 (en) * | 2001-10-05 | 2003-04-17 | Universite De Sherbrooke | Multi-coil induction plasma torch for solid state power supply |
| CN201621995U (en) * | 2009-03-03 | 2010-11-03 | 简临君 | Cooling device of high-frequency inductive coupling plasma gun |
| CN204425693U (en) * | 2014-12-29 | 2015-06-24 | 陈卫东 | A kind of electromagnetic heater |
| CN104867801A (en) * | 2015-05-20 | 2015-08-26 | 中国科学院宁波材料技术与工程研究所 | Inductively coupled plasma spray gun and plasma device |
| CN104956774A (en) * | 2012-12-27 | 2015-09-30 | 韩国基础科学支援研究院 | Electromagnetic wave high frequency hybrid plasma torch |
-
2017
- 2017-02-24 CN CN201710104246.7A patent/CN106817834A/en active Pending
Patent Citations (9)
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| EP0791998A1 (en) * | 1996-02-22 | 1997-08-27 | Gec Alsthom Electromecanique Sa | Mixed high voltage current lead |
| JPH10241893A (en) * | 1997-02-21 | 1998-09-11 | Nippon Koshuha Kk | Microwave plasma generator |
| CN2432463Y (en) * | 2000-03-27 | 2001-05-30 | 烟台开发区龙源电力燃烧控制工程有限公司 | Plasma accelerator coil with double cooling function |
| WO2003032693A1 (en) * | 2001-10-05 | 2003-04-17 | Universite De Sherbrooke | Multi-coil induction plasma torch for solid state power supply |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107182164A (en) * | 2017-06-27 | 2017-09-19 | 中国航天空气动力技术研究院 | A kind of water cooling cage high-frequency induction coupled plasma reactor |
| CN107182164B (en) * | 2017-06-27 | 2023-12-08 | 云航时代(重庆)科技有限公司 | Water-cooled cage type high-frequency inductively coupled plasma reactor |
| CN107824120A (en) * | 2017-11-29 | 2018-03-23 | 郑州大学 | It is a kind of that there is the superhigh temperature reactor for extending plasma arcs area |
| CN109371384A (en) * | 2018-12-13 | 2019-02-22 | 深圳市捷佳伟创新能源装备股份有限公司 | The reaction chamber structure of plasma deposition furnace |
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Application publication date: 20170609 |
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| RJ01 | Rejection of invention patent application after publication |