CN106802375B - Aging test device and negative pressure cooling system for same - Google Patents
Aging test device and negative pressure cooling system for same Download PDFInfo
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- CN106802375B CN106802375B CN201510837516.6A CN201510837516A CN106802375B CN 106802375 B CN106802375 B CN 106802375B CN 201510837516 A CN201510837516 A CN 201510837516A CN 106802375 B CN106802375 B CN 106802375B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/003—Environmental or reliability tests
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
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Abstract
本发明相关于一种老化测试装置以及用于该老化测试装置的负压冷却系统，特别是一种用于开放式老化测试装置的负压冷却系统以及使用该负压冷却系统的开放式老化测试装置。该负压冷却系统包含横向抽风通道、集风区、以及主抽风通道。借由横向抽风通道、集风区、以及主抽风通道形成负压通道而持续地将老化测试装置周边的空气与老化测试装置内的热空气进行交换，以有效地移除老化测试炉内的积热。
The present invention relates to an aging test device and a negative pressure cooling system for the aging test device, in particular, a negative pressure cooling system for an open aging test device and an open aging test device using the negative pressure cooling system. The negative pressure cooling system comprises a transverse air exhaust channel, an air collection area, and a main air exhaust channel. The negative pressure channel is formed by the transverse air exhaust channel, the air collection area, and the main air exhaust channel to continuously exchange the air around the aging test device with the hot air in the aging test device, so as to effectively remove the accumulated heat in the aging test furnace.
Description
Technical field
Lost pressure cooling system for ageing tester and the ageing tester using the lost pressure cooling system, it is special
It is not a kind of lost pressure cooling system for open ageing tester and using the open old of the lost pressure cooling system
Change test device.
Background technique
In electronic component (such as IC element) manufacturing process, after fabrication of electronic components is completed, it will usually to electronics member
Part carries out burn-in test, with the reliability of testing electronic element.Burn-in test is will be in electronic element storing burn-in test board
It is heated, and electrical testing is carried out to electronic component in simultaneously, and whether the reliability of testing electronic element complies with standard.Always
Closed ageing tester and open aging survey can be divided into according to the framework of the aging test furnace in it by changing test device
Trial assembly sets two kinds, wherein the aging test furnace of closed ageing tester is to close and make outside air when testing
It cannot be introduced into it, open ageing tester aging test furnace is opening when testing and outside air can enter
In it.When carrying out burn-in test, by outside air constantly by the open of burn-in test board (or aging test furnace)
(such as hole, opening etc.) enters in aging test furnace, and reaches and carry out cooling to open ageing tester, avoids
Heat localization in open ageing tester, cause in open ageing tester element (such as burn-in test control
Element, burn-in board, burn-in test seat etc.) it is damaged because of overheat, and replaced, cause the increasing of testing cost
Add, therefore, can effectively carry out the cooling heat radiation system of cooling with one for open ageing tester
It is critically important.
It referring to Fig.1, is the schematic diagram of the cooling heat radiation system of existing known open ageing tester.Existing
In known open ageing tester, it is provided with multiple electronic components that can accommodate on burn-in board 1 and carries out aging survey
The burn-in test seat 2 of examination, each burn-in test seat 2 has heater (not shown), to the electricity accommodated thereon
Subcomponent is heated, and a fan 3 is both provided on each burn-in test seat 2, to constantly by burn-in test
Hot-air extraction on seat 2, avoids heat localization burn-in board 1, burn-in test seat 2 and measured electronic elements (in figure not
Show) and it is damaged.In addition, being additionally provided with fan (in figure not in existing known open ageing tester
Show), it is filled the air outside open ageing tester is constantly pumped into open burn-in test by air inlet end 4
It sets in (or aging test furnace), and flows through the elements such as burn-in board 1, burn-in test seat 2 and measured electronic elements, and by
Air outlet slit end 5 is discharged, and simultaneously takes away fan 3 by the hot-air extracted out on burn-in test seat 2, and is formed with outside air
Circulation is to achieve the effect that cooling.
However, although such cooling heat radiation system can carry out open ageing tester (or aging test furnace)
Cooling, but since the air contacted closer to air inlet end 4 is the air just entered from external environment, so herein
The temperature of air is lower, causes the temperature in aging test furnace closer to air inlet end 4 lower, and closer to air outlet slit end
The air of 5 contacts is the air for having been subjected to part burn-in test seat 2 on burn-in board 1 and being heated, so relative to air
The air themperature of arrival end 4, the temperature of (i.e. air outlet slit end 5) air is higher herein, causes in aging test furnace closer to empty
The temperature of gas outlet end 5 is higher.Such temperature difference causes the phenomenon that non-uniform temperature is generated in aging test furnace, and because
This causes to generate sinuous flow in aging test furnace, so that the hot-air in aging test furnace is not easy to be discharged, without easy heat radiation.Secondly,
Due to the hot-air being discharged on flow direction of the air in aging test furnace of external environment and burn-in test seat 2 by fan 3
Flow direction be it is perpendicular to one another, can also make to generate due to the air-flow of two different flow directions mutually collides in aging test furnace
Sinuous flow further increases the degree of difficulty of the hot-air discharge and heat dissipation in aging test furnace.Such situation will make aging survey
Trial assembly set in element element (such as burn-in test control element, burn-in board, burn-in test seat etc.) again for a long time
Use after, be easy to damage because accumulated heat can not effectively exclude, and be replaced.In this way, not only will cause
Therefore the reduction of tested performance but will cause testing cost to increase because being replaced as frequently as part.In addition, due to entering close to air
4 continuous contact of mouth end is all the lower air of temperature, so that closer to the region (or measured electronic elements) of air inlet end 4
It is more not easy to heat, and needs to increase the power of the region any burn-in test seat 2 internal heater, can be only achieved preset test temperature
Degree, leads to the increase of testing cost.Due to close to 5 continuous contact of air outlet slit end being all the higher air of temperature, so that more
Accumulation of heat is easy close to the region (or measured electronic elements) at air outlet slit end 5 and is overheated, and part or electronics to be measured member are be easy to cause
The damage of part, and increase the risk that measured electronic elements are damaged by burn-in test.
In view of this, there is an urgent need for a kind of cooling system and open ageing tester, it can be by external environment
Air is effectively recycled with the hot-air in ageing tester and is exchanged, and effectively excludes the accumulated heat in ageing tester, and
It is not easy to cause temperature unevenness in aging test furnace and generates sinuous flow.
Summary of the invention
A purpose of the invention is to solve the disadvantage that the cooling of above-mentioned existing known open ageing tester is radiated to be,
And a kind of lost pressure cooling system for open ageing tester is provided, the air of external environment can be effectively utilized and
The accumulated heat in ageing tester is removed, and allows temperature in aging test furnace uniformly and sinuous flow will not be generated, from
And the part of ageing tester is avoided to cause to damage because long-time is in the environment of overheat, and from preventing measured electronic elements
It is damaged because of overheat, to reduce the cost and risk of burn-in test.
A purpose of the invention be ageing tester is provided, the ageing tester can when carrying out burn-in test,
It is effectively removed the accumulated heat in ageing tester using the air of external environment, and avoids the part of ageing tester because of length
Time is in the environment of overheat and causes to damage, and prevents measured electronic elements from damaging because of overheat, to reduce aging survey
The cost and risk of examination.
The object of the invention to solve the technical problems adopts the following technical solutions to realize.According to the present invention one
Purpose, the present invention provide a kind of capacitance pen for meeting ergonomics for the lost pressure cooling system of ageing tester, especially
A kind of lost pressure cooling system for open ageing tester.This includes for lost pressure cooling system of ageing tester
Lateral air draft passage, Ji Fengqu and main air draft passage.Lateral air draft passage is set to the burn-in test in ageing tester
Above plate and burn-in test seat, to the hot-air in the aging test furnace of the ageing tester by laterally exporting.Ji Fengqu
It is set in ageing tester, to collect the hot-air in ageing tester.Main air draft passage be set to Ji Fengqu with
Between lateral air draft passage, and connected set wind area and lateral air draft passage, to will the heat as derived from lateral air draft passage transverse direction
Air is sent to Ji Fengqu, and is discharged to the outside environment by ageing tester.Lateral air draft passage, main air draft passage and
Ji Fengqu forms negative pressure channel, and flows through burn-in board and aging survey in the air for importing ageing tester by ambient enviroment
Examination seat and after becoming hot-air, which is discharged ageing tester by negative pressure channel, and reach the effect of cooling heat dissipation
Fruit, to effectively exclude the accumulated heat in ageing tester.
The object of the invention to solve the technical problems also can be used following technical measures and further realize.
It is previously described for the lost pressure cooling system of ageing tester, wherein the transverse direction air draft passage is at least one pumping
Air holes and two the first choke gates, which is set to the transverse direction air draft passage bottom, to introduce heated air into the cross
Into air draft passage, this two the first choke gates are to be set to the transverse direction air draft passage two sides respectively, to control the transverse direction
Hot-air circulation speed in air draft passage, to control the negative pressure amount in the transverse direction air draft passage.
It is previously described for the lost pressure cooling system of ageing tester, wherein the transverse direction air draft passage further includes the corresponding pumping
Air holes and the second choke gate for being set to the transverse direction air draft passage bottom are surveyed to control by the burn-in board and the aging
The hot-air for trying seat enters the speed of the transverse direction air draft passage, to control the negative pressure amount in the ageing tester.
It is previously described for the lost pressure cooling system of ageing tester, wherein the transverse direction air draft passage further includes air volume meter,
The air volume meter is set to one end that the transverse direction air draft passage connects the main air draft passage, to monitor in the transverse direction air draft passage
Suction strength.
It is previously described for the lost pressure cooling system of ageing tester, wherein the Ji Fengqu has air outlet, to should
Hot-air discharge in the area Ji Feng.
It is previously described for the lost pressure cooling system of ageing tester, wherein the main air draft passage includes oblique fan, should
Oblique fan is tilted towards Shangdi and is set to one end that the main air draft passage connects the Ji Fengqu, to pass the transverse direction air draft passage
The hot-air extraction being handed in the main air draft passage, and form negative pressure.
It the purpose of invention and solves its technical problem following technical scheme is also used to realize.A mesh according to the present invention
, the present invention provides a kind of ageing tester, especially a kind of open ageing tester.The ageing tester includes
Aging test furnace, carrier, at least one lateral air draft passage, Ji Fengqu and main air draft passage.Aging test furnace with for
Band surveys element and carries out burn-in test, and the open furnace body that can enter for surrounding air in wherein heating.Carrier is set to
In aging test furnace, to carry burn-in board.Each transverse direction air draft passage all corresponds to a burn-in board and is set to
Above the burn-in board, to by the hot-air in aging test furnace (or on the burn-in board) by laterally exporting.Collect wind
Area is set in ageing tester, to collect the hot-air in ageing tester and discharge it.Main air draft passage is set
It is placed between Ji Fengqu and each lateral air draft passage, and is connected to the Ji Fengqu and the transverse direction air draft passage, to will be by the cross
Ji Fengqu is sent to hot-air derived from air draft passage transverse direction.By lateral air draft passage, main air draft passage and Ji Fengqu
It is formed by negative pressure channel, the air of external environment can be imported in ageing tester, and is surveyed in the air by aging
Test plate (panel) and burn-in test seat and after becoming hot-air, by this hot-air by negative pressure channel discharge ageing tester outside, and
Achieve the effect that cooling heat dissipation, whereby, radiate to the part in ageing tester with measured electronic elements, not but not
The sinuous flow for interfering heat dissipation is wherein being generated, the temperature in aging test furnace will not be made uneven, and is avoiding ageing tester
Part cause to damage because of environment of the long-time in overheat, and prevent measured electronic elements from damaging because of overheat, thus
Reduce the cost and risk of burn-in test.
The object of the invention to solve the technical problems also can be used following technical measures and further realize.
Ageing tester above-mentioned, wherein each burn-in board is all provided with several burn-in test seats, it is each to be somebody's turn to do
Burn-in test seat all includes heater, heating to the element under test placed in the burn-in test seat, and is set to
Fan above the burn-in test seat, to by the hot-air on the burn-in test seat periphery guide to the transverse direction air draft passage and into
The cooling heat dissipation of row.
Ageing tester above-mentioned, wherein the transverse direction air draft passage has at least one exhausting hole and two the first chokes
Gate, the exhausting hole are set to the transverse direction air draft passage bottom, to introduce heated air into the transverse direction air draft passage, this two
First choke gate is to be set to the transverse direction air draft passage two sides respectively, to control hot-air circulation in the transverse direction air draft passage
Speed, to control the negative pressure amount in the transverse direction air draft passage.
Ageing tester above-mentioned, wherein the transverse direction air draft passage further includes the corresponding exhausting hole and is set to the transverse direction
Second choke gate of air draft passage bottom, to control the hot-air entrance come by the burn-in board and the burn-in test seat
The speed of the transverse direction air draft passage, to control the negative pressure amount in the ageing tester.
Ageing tester above-mentioned, wherein the transverse direction air draft passage further includes air volume meter, which is set to the cross
One end that the main air draft passage is connected to air draft passage, to monitor the suction strength in the transverse direction air draft passage.
Ageing tester above-mentioned, wherein the Ji Fengqu has air outlet, to arrange the hot-air in the area Ji Feng
Out.
Ageing tester above-mentioned, wherein the main air draft passage includes oblique fan, which is tilted towards Shangdi
It is set to one end that the main air draft passage connects the Ji Fengqu, the transverse direction air draft passage to be transferred in the main air draft passage
Hot-air extraction, and form negative pressure.
Ageing tester above-mentioned, wherein the ageing tester further includes burn-in test area moving cell, to drive
The ageing tester carries out burn-in test.
Therefore, by above-mentioned technical proposal, the present invention has at least the following advantages: the present invention provides one kind to be used for aging
The lost pressure cooling system of test device and the ageing tester for using the lost pressure cooling system, can be effectively utilized outside
The air of environment and remove the accumulated heat in ageing tester, and allow temperature in aging test furnace uniformly and will not
Sinuous flow is generated, so that the part of ageing tester be avoided to cause to damage in the environment overheated because of long-time, and is prevented
Measured electronic elements are damaged because of overheat, to reduce the cost and risk of burn-in test.
The above description is only an overview of the technical scheme of the present invention, in order to better understand the technical means of the present invention,
And it can be implemented in accordance with the contents of the specification, and in order to allow above and other objects, features and advantages of the invention can
It is clearer and more comprehensible, it is special below to lift preferred embodiment, and cooperate attached drawing, detailed description are as follows.
Detailed description of the invention
Fig. 1 is the schematic diagram of the cooling heat radiation system of existing known open ageing tester.
Fig. 2A and Fig. 2 B is respectively the lost pressure cooling system for ageing tester of one embodiment of the present of invention
Side view and enlarged drawing.
Fig. 3 A, Fig. 3 B, Fig. 3 C and Fig. 3 D are respectively one embodiment of the present of invention using lost pressure cooling of the invention
Perspective view, face upwarding view, side view and the front view of the ageing tester of system.
[main element symbol description]
1: burn-in board 2: burn-in test seat
3: fan 4: air inlet end
5: air outlet slit end 10: the lost pressure cooling system for ageing tester
12: lateral air draft passage 14: Ji Fengqu
16: main air draft passage 20: burn-in board
22: burn-in test seat 24: fan
30: ageing tester 32: aging test furnace
34: carrier 36: burn-in test driving element
38: fan 121: exhausting hole
122: the first choke gate, 123: the second choke gate
124: air volume meter 141: air outlet
161: oblique fan
Specific embodiment
Some embodiments of the present invention are described in detail as follows.However, the present invention can also be extensive other than the detailed description
It is implemented in other embodiments on ground.Also it that is, the scope of the present invention is not limited by the embodiment having proposed, and is proposed with the present invention
Patent requirements protection scope subject to.Secondly, when each element or step in the embodiment of the present invention diagram is with single element
Or step description should not especially emphasize the limitation in number in this, as the cognition for having restriction, i.e., following explanation when illustrating
When of the invention spirit can be spreaded on most elements or structure and the structure and method deposited with application range.Furthermore in this theory
In bright book, for the different piece of each element there is no drawing completely in accordance with size, certain scales are compared with other scale dependents or have
It is exaggerated or is simplified, to provide clearer description to promote the understanding of the present invention.And the existing skill that the present invention is continued to use
Skill only does the reference of emphasis formula herein, to help elaboration of the invention.
It is the negative pressure for ageing tester of one embodiment of the present of invention referring to Fig. 2A and Fig. 2 B, Fig. 2A
The side view of cooling system 10, Fig. 2A are then the enlarged drawing of a part of the lost pressure cooling system 10 of ageing tester.For
The lost pressure cooling system 10 of ageing tester includes several lateral air draft passages 12, the area Ji Feng 14 and main air draft passage 16.
Each transverse direction air draft passage 12 all corresponds to a burn-in board 20, and is set to the burn-in board 20 and surveys with aging thereon
22 top of seat is tried, to the hot-air in the aging test furnace by ageing tester by laterally exporting, i.e., by burn-in board
20 hot-airs extracted out with burn-in test seat 22 by the fan 24 being set on each burn-in test seat 22 are by longitudinally flowing
It is dynamic to be changed to lateral flow, and by the air of lateral flow in it and extracted out by fan 24 and the hot-air of longitudinal flow every
It opens, and the air for exempting from different flow directions (longitudinal flow and lateral flow) is impinging one another and generates sinuous flow.In the present embodiment,
Although the lost pressure cooling system 10 for ageing tester has several lateral air draft passages 12, it is not limited thereto,
But can depending on the burn-in board in ageing tester quantity and increase and decrease, but the top of each burn-in board all must
It must be relatively set with lateral air draft passage 12, that is, the lost pressure cooling system 10 for ageing tester of the invention is all at least
With a lateral air draft passage 12.
The bottom of lateral air draft passage 12 has several exhausting holes 121, is entered with for the hot-air in aging test furnace
In lateral air draft passage 12, so that being extracted out and longitudinal (upward) flowing by the fan 24 being arranged above each burn-in test seat 22
Hot-air, entered in lateral air draft passage 12 by exhausting hole 121, and laterally exported.Lateral 12 bottom of air draft passage
121 quantity of exhausting hole of setting, can increase and decrease according to demand, in the present invention and without restriction.Secondly, logical in lateral exhausting
The two sides (front side and rear side) in road 12 are respectively arranged with the first choke gate 122, and control respectively and adjust lateral air draft passage
The openings of sizes of 12 two sides (front side and rear side) passway can be controlled separately the air into lateral air draft passage 12 whereby
Amount and the quantity of hot air that lateral air draft passage 12 is discharged, to control hot-air (or air) circulation speed in lateral air draft passage 12
Degree, discharge rate and the velocity of discharge, and then control the negative pressure amount in lateral air draft passage 12.In addition, 12 bottom of lateral air draft passage
Portion corresponds to each exhausting hole 121 and is all provided with a second choke gate 123, respectively to control and adjust each exhausting hole
121 size, whereby, control and adjusting by burn-in board 20 and burn-in test seat 22 hot-air enter lateral exhausting and lead to
The quantity and speed in road, that is, control with adjust from the fan 24 being arranged above each burn-in test seat 22 extract out and it is longitudinal (to
On) hot-air of flowing enters the quantity and speed of lateral air draft passage, to control ageing tester (or burn-in test
Furnace) in hot-air (hot-air i.e. around burn-in board 20 and burn-in test seat 22) enter number in lateral air draft passage 12
Amount and speed, and then control the negative pressure amount in lateral air draft passage 12.To control in ageing tester (or aging test furnace)
The negative pressure amount of (i.e. around burn-in board 20 and burn-in test seat 22).Furthermore of the invention for ageing tester
In lost pressure cooling system 10, air volume meter 124 can be set in one end that each lateral air draft passage 12 connects main air draft passage 16,
The quantity and speed of hot-air is discharged to monitor each lateral air draft passage 12, to monitor in each lateral air draft passage 12
Suction strength, and regulated and controled.
The area Ji Feng 14 is set in ageing tester, to collect the hot-air in ageing tester and be arranged
Out, that is, each element (such as driving element, processor etc.) generated hot-air in running in ageing tester is collected
And the hot-air that the fan 24 on burn-in board 20 and burn-in test seat 22 is extracted out, and discharge it ageing tester
Outside.The area Ji Feng 14 has air outlet 141, is discharged outside ageing tester to hot-air collected by the area Jiang Jifeng 14.
Main air draft passage 16 is set between each lateral air draft passage 12 and the area Ji Feng 14, and connected set wind area 14 and cross
To air draft passage 12, the hot-air as derived from lateral 12 transverse direction of air draft passage is sent to the area Ji Feng 14, i.e., by each wind
Fan 24, which is extracted out by burn-in board 20 and burn-in test seat 22 and imports the hot-air of lateral air draft passage 12, is sent to Ji Fengqu
14, and it is discharged to the outside environment by ageing tester by the air outlet in the area Ji Feng 14 141.Main air draft passage 16 is arranged
There are several oblique fans 161, all corresponding lateral air draft passage 12 of each oblique fan 161 is tilted towards Shangdi and is set to master
Air draft passage 16 connects the one end in the area Ji Feng 14, to the hot-air being transferred to lateral air draft passage 12 in main air draft passage 16
It constantly extracts out, and forms negative pressure.Whereby, lateral air draft passage 12, main air draft passage 16 and the area Ji Feng 14 can be formed negative
Pressure passageway flows into the air of external environment constantly in ageing tester, and old being imported by ambient enviroment
The air for changing test device flow through burn-in board 20 and burn-in test seat 22 and after becoming hot-air, thus by the hot-air
Ageing tester is persistently discharged in negative pressure channel, and achievees the effect that cooling heat dissipation, so that being formed can be surveyed with sustainable utilization aging
The lost pressure cooling system that hot-air in the air and ageing tester on device periphery swaps, effectively to survey aging
Trial assembly is set interior accumulated heat and is excluded.Although in the present embodiment, main air draft passage 16 is provided with several oblique fans 161, simultaneously
It is not limited, and makes to be increased and decreased according to burn-in board 20 and the quantity of excessively lateral air draft passage 12, but due to
Each oblique fan 161 must all correspond to a lateral air draft passage 12, so of the invention for ageing tester
The main air draft passage 16 of lost pressure cooling system 10 all has at least one oblique fan 161.In addition, though in the present embodiment, often
One lateral air draft passage 12 only corresponds to an oblique fan 161, but in other embodiments of the present invention, in order to increase to each
The exhausting amount of lateral air draft passage and exhausting rate can correspond to the same lateral air draft passage while be arranged several (such as 2
It is a, 3 or more) oblique fan 161, and increase the negative pressure value of each lateral air draft passage.
When carrying out burn-in test, open ageing tester is because its aging test furnace is open furnace body, institute
It can be entered in aging test furnace by around ageing tester or bottom with the air of ambient enviroment, and flow through aging survey
Test plate (panel) 20 and burn-in test seat 22, and burn-in board 20 and burn-in test seat 22 are carried out cooling heat.When these external rings
The air that border enters will become hot-air after flowing through burn-in board 20 and burn-in test seat 22, then, be surveyed by each aging
The fan 24 being arranged on examination seat 22 is drawn upwardly out and flows up (i.e. longitudinal flow), and passes through 12 bottom of lateral air draft passage
Exhausting hole 121 enter in lateral air draft passage 12.By main air draft passage 16 oblique fan 161 constantly exhausting and in cross
Negative pressure is formed to air draft passage 12 and main air draft passage 16, and will constantly enter lateral air draft passage 12 by exhausting hole 121
The main air draft passage 16 of hot-air laterally imported, and via main air draft passage 16 transmit the area Ru Jifeng 14, the area Zai Youjifeng 14
Air outlet is discharged outside ageing tester.
Whereby, the hot-air in ageing tester (especially in aging test furnace) can with around ageing tester
(cold) air constantly exchange, and effectively cooling radiate can be carried out to ageing tester.In addition, due to burn-in test
Hot-air in device is all first to enter lateral air draft passage 12 with longitudinal flow, the lateral flow in lateral air draft passage 12
To main air draft passage 16 and the area Ji Feng 14, it is being discharged ageing tester, so the lateral flow in ageing tester
Air and the air of longitudinal flow are separated in the inside of lateral air draft passage 12 and external respectively, without mutually colliding each other
Generate sinuous flow, it is possible to generation of the cooling without having accumulated heat effectively be carried out to ageing tester.Therefore, this hair
The bright lost pressure cooling system 10 for ageing tester can't be as known that the cooling of open ageing tester is radiated
System is the same, sinuous flow can be generated because there is the air of different flow directions mutually to collide in aging test furnace, so not will cause
The temperature of different zones difference on same burn-in board, less to lead to part burn-in test seat because of temperature difference thus
It is not easy heating and reaches predetermined temperature, and the promotion of testing cost and part burn-in test seat is caused to be easy accumulated heat and exceed pre-
Determine temperature, and be easy to cause the element (burn-in board, burn-in test seat etc.) of ageing tester and measured electronic elements
Damage.In view of this, of the invention is used for aging compared to the cooling heat radiation system of existing known open ageing tester
The air of external environment can be effectively utilized really and remove in ageing tester for the lost pressure cooling system 10 of test device
Accumulated heat, and allow temperature in aging test furnace uniformly and sinuous flow will not be generated, to avoid ageing tester
Part cause to damage because of environment of the long-time in overheat, and prevent measured electronic elements from damaging because of overheat, with drop
The cost and risk of low burn-in test.
Furthermore the present invention further provides a kind of (open) ageing testers using aforementioned negative pressure cooling system.
It is respectively being born using of the invention for one embodiment of the present of invention referring to Fig. 3 A, Fig. 3 B, Fig. 3 C and Fig. 3 D
Press perspective view, face upwarding view, side view and the front view of the ageing tester 30 of cooling system 10.Burn-in test dress
Setting 30 includes 32, two carriers 34 of aging test furnace, by several lateral air draft passages 12, the area Ji Feng 14 and main air draft passage 16
Composed lost pressure cooling system 10 and two respectively correspond the burn-in test driving element 36 of different bearer frame 34.Aging
Test furnace 32 is the open furnace body that surrounding air can enter, and carries out burn-in test in wherein heating with for element under test,
Two carriers 34 are then set in aging test furnace 32, carry out burn-in test to carry burn-in board 20.This two are held
Carrier 34 is respectively in 32 two sides of aging test furnace, and vacates the intermediate region of ageing tester 30 as the area Ji Feng 14.Two
Burn-in test driving element 36 carries out burn-in test with the burn-in board 20 on driving different bearer frame 34 to control respectively.
This two burn-in test driving elements 36 respectively correspond different bearer frame 34 and are respectively in 32 two sides of aging test furnace, and will collect wind
Area 14 is sandwiched between the two, and each burn-in test driving element 36 is both provided with fan 38, to drive burn-in test
The extraction of hot-air caused by element 36, and it is sent to the area Ji Feng 14, so that ageing tester be discharged via air outlet 141
30.It is again provided with several burn-in test seats 22 on each burn-in board 20, is carried out always to carry measured electronic elements
Change test.A heater (not shown) is both provided in each burn-in test seat 22, and being both provided with thereon can will be hot
The fan 24 that air is drawn upwardly out.
Each lateral air draft passage 12 all corresponds to a burn-in board 20 and is set to 20 top of burn-in board.
12 bottom of each transverse direction air draft passage is then provided with several exhausting holes 121, corresponding exhausting hole 121 is set to lateral air draft passage 12
123, two, the second choke gate of bottom is respectively arranged at the first resistance of the two sides (front side and rear side) of lateral air draft passage 12
Air lock system 122 and air volume meter 124, wherein the first choke gate 122 and the second choke gate 123 are to control lateral exhausting
Negative pressure amount in channel 12 is being disclosed above about the detailed description of lateral air draft passage 12, so no longer superfluous in this
It states.The area Ji Feng 14 is set in ageing tester 30, and has the air outlet for being set to 30 middle position of ageing tester
141, other than collecting the hot-air in aging test furnace, the sky of heat caused by burn-in test driving element 36 can also be collected
Gas, and discharging it outside ageing tester, likewise, the detailed description about the area Ji Feng 14, in being disclosed above, so
It is repeated no more in this.Main air draft passage 16 is then set between each lateral air draft passage 12 and the area Ji Feng 14, and is connected to laterally
Air draft passage 12 and the area Ji Feng 14, and main air draft passage 16 has several oblique fans 161, each oblique fan 161 is all corresponding
One lateral air draft passage 12, and be set to one end that main air draft passage 16 is connect with transverse direction air draft passage 12, to will be lateral
Air draft passage 12 is transferred to the extraction of the hot-air in main air draft passage 16, and forms negative pressure, about the detailed of main air draft passage 16
Illustrate, be disclosed above, so details are not described herein.In the present embodiment, the oblique fan 161 of every two be arranged side by side and
Corresponding each lateral air draft passage 12 implies that each corresponding two oblique fans 161 of lateral air draft passage 12, but not as
Limit, but can be increased and decreased according to exhausting amount, exhausting rate required for lateral air draft passage and negative pressure value.
By this lost pressure cooling system 10, ageing tester 30 is when carrying out burn-in test, due to aging test furnace 32
For open furnace body, so the air of ambient enviroment can enter burn-in test by around ageing tester 30 or bottom
In furnace 32, and the respectively different burn-in board 20 flowed through on different bearer frame 34 and burn-in test seat 22, and aging is surveyed
Test plate (panel) 20 is carried out cooling heat with burn-in test seat 22.When the air that these external environments enter flows through burn-in board 20 and old
Change test bench 22 after will become hot-air, then, by the fan 24 being arranged on each burn-in test seat 22 be drawn upwardly out and to
Upper flowing (i.e. longitudinal flow), and entered in lateral air draft passage 12 by the exhausting hole 121 of 12 bottom of lateral air draft passage.
By main air draft passage 16 oblique fan 161 constantly exhausting and formed in lateral air draft passage 12 with main air draft passage 16 negative
Pressure, and constantly will enter the main air draft passage 16 of hot-air laterally imported of lateral air draft passage 12 by exhausting hole 121, and pass through
The area Ru Jifeng 14 is transmitted by main air draft passage 16, the air outlet in the area Zai Youjifeng 14 is discharged outside ageing tester.Simultaneously,
Hot-air caused by each burn-in test driving element 36 is drawn to by fan 38 is sent to the area Ji Feng 14, and together
Ageing tester 30 is discharged via air outlet 141.Whereby, in ageing tester 30 (comprising be in aging test furnace 32 with
Produced by burn-in test driving element 36) hot-air can constantly be exchanged with (cold) air around ageing tester,
And effectively cooling heat dissipation can be carried out to ageing tester, and by the air for separating lateral flow to air draft passage 12
Avoid generating sinuous flow in aging test furnace 32 with the air of longitudinal flow, thus in aging test furnace 32 each region temperature
Too big difference will not be generated, and generation of the cooling without having accumulated heat effectively can be carried out to ageing tester,
To avoid the part of ageing tester from causing to damage in the environment overheated because of long-time, and prevent electronics member to be measured
Part is damaged because of overheat, to reduce the cost and risk of burn-in test.
In view of above-described embodiment, the present invention provides a kind of lost pressure cooling system for ageing tester and make
With the ageing tester of the lost pressure cooling system, the air of external environment can be effectively utilized and remove ageing tester
Interior accumulated heat, and allow temperature in aging test furnace uniformly and sinuous flow will not be generated, so that burn-in test be avoided to fill
The part set causes to damage because of long-time in the environment overheated, and prevents measured electronic elements from damaging because of overheat, with
Reduce the cost and risk of burn-in test.
The above described is only a preferred embodiment of the present invention, limitation in any form not is done to the present invention, though
So the present invention has been disclosed as a preferred embodiment, and however, it is not intended to limit the invention, any technology people for being familiar with this profession
Member, without departing from the scope of the present invention, when the technology contents using the disclosure above are modified or are modified
For the equivalent embodiment of equivalent variations, but anything that does not depart from the technical scheme of the invention content, according to the technical essence of the invention
Any simple modification, equivalent change and modification made to the above embodiment, all of which are still within the scope of the technical scheme of the invention.
Claims (14)
1. a kind of lost pressure cooling system for ageing tester, it is characterised in that include:
Lateral air draft passage is set to above burn-in board and burn-in test seat in ageing tester, to this is old
Change the hot-air in the aging test furnace of test device by laterally exporting；
Ji Fengqu is set in the ageing tester, to collect the hot-air in the ageing tester；And
Main air draft passage is set between the Ji Fengqu and the transverse direction air draft passage, and is connected to the Ji Fengqu and the transverse direction exhausting
Channel, the hot-air as derived from the transverse direction air draft passage transverse direction is sent to the Ji Fengqu；
Wherein, the transverse direction air draft passage, the main air draft passage and the Ji Fengqu form negative pressure channel, and by ambient enviroment
The air for importing the ageing tester flow through the burn-in board and the burn-in test seat and after becoming hot-air, by the heat
The ageing tester is discharged by the negative pressure channel in air, and achievees the effect that cooling heat dissipation.
2. the lost pressure cooling system according to claim 1 for ageing tester, it is characterised in that: the wherein transverse direction
Air draft passage has at least one exhausting hole and two the first choke gates, which is set to the transverse direction air draft passage bottom
Portion, to introduce heated air into the transverse direction air draft passage, this two the first choke gates are to be set to the transverse direction exhausting respectively
Channel two sides, to control hot-air circulation speed in the transverse direction air draft passage, to control the negative pressure in the transverse direction air draft passage
Amount.
3. the lost pressure cooling system according to claim 2 for ageing tester, it is characterised in that: the wherein transverse direction
Air draft passage further includes the corresponding exhausting hole and is set to the second choke gate of the transverse direction air draft passage bottom, to control by
The hot-air that the burn-in board and the burn-in test seat come enters the speed of the transverse direction air draft passage, to control the burn-in test
Negative pressure amount in device.
4. the lost pressure cooling system according to claim 1 for ageing tester, it is characterised in that: the wherein transverse direction
Air draft passage further includes air volume meter, which is set to one end that the transverse direction air draft passage connects the main air draft passage, to
Monitor the suction strength in the transverse direction air draft passage.
5. the lost pressure cooling system according to claim 1 for ageing tester, it is characterised in that: the wherein collection wind
Area has air outlet, the hot-air in the area Ji Feng to be discharged.
6. the lost pressure cooling system according to claim 1 for ageing tester, it is characterised in that: the wherein main pumping
Wind channel includes oblique fan, which is tilted towards Shangdi and is set to one end that the main air draft passage connects the Ji Fengqu,
To the hot-air extraction transverse direction air draft passage being transferred in the main air draft passage, and form negative pressure.
7. a kind of ageing tester, it is characterised in that include:
Aging test furnace surveys element to ribbon supply and carries out burn-in test in wherein heating, and the aging test furnace is surrounding air
The open furnace body being able to enter；
Carrier is set in aging test furnace, to carry burn-in board, wherein each burn-in board is all provided with
Several burn-in test seats；
At least one lateral air draft passage, each transverse direction air draft passage all correspond to a burn-in board and are set to aging survey
Above test plate (panel), to by the hot-air in the aging test furnace by laterally exporting；
Ji Fengqu is set in the ageing tester, to collect the hot-air in the ageing tester；And
Main air draft passage is set between the Ji Fengqu and each transverse direction air draft passage, and is connected to the Ji Fengqu and the transverse direction
Air draft passage, the hot-air as derived from the transverse direction air draft passage transverse direction is sent to the Ji Fengqu, wherein the transverse direction exhausting
Channel, the main air draft passage and the Ji Fengqu form negative pressure channel, and are importing the ageing tester by ambient enviroment
Air flows through the burn-in board and the burn-in test seat after becoming hot-air, which is discharged by the negative pressure channel
The ageing tester, and achieve the effect that cooling heat dissipation.
8. ageing tester according to claim 7, it is characterised in that: wherein each burn-in test seat all includes and adds
Hot device heating to the element under test placed in the burn-in test seat, and is set to above the burn-in test seat
Fan is carried out cooling heat guiding the hot-air on the burn-in test seat periphery to the transverse direction air draft passage.
9. ageing tester according to claim 7, it is characterised in that: wherein the transverse direction air draft passage has at least one
A exhausting hole and two the first choke gates, which is set to the transverse direction air draft passage bottom, to introduce heated air into
In the transverse direction air draft passage, this two the first choke gates are to be set to the transverse direction air draft passage two sides respectively, to control this
Hot-air circulation speed in lateral air draft passage, to control the negative pressure amount in the transverse direction air draft passage.
10. ageing tester according to claim 9, it is characterised in that: wherein the transverse direction air draft passage further includes pair
Should exhausting hole and be set to the second choke gate of the transverse direction air draft passage bottom, to control by the burn-in board with should
The hot-air that burn-in test seat comes enters the speed of the transverse direction air draft passage, to control the negative pressure amount in the ageing tester.
11. ageing tester according to claim 7, it is characterised in that: wherein the transverse direction air draft passage further includes wind
Meter, the air volume meter are set to one end that the transverse direction air draft passage connects the main air draft passage, logical to monitor the transverse direction exhausting
Suction strength in road.
12. ageing tester according to claim 7, it is characterised in that: wherein the Ji Fengqu has air outlet, to
By the hot-air discharge in the area Ji Feng.
13. ageing tester according to claim 7, it is characterised in that: wherein the main air draft passage includes oblique wind
Fan, which is tilted towards Shangdi and is set to one end that the main air draft passage connects the Ji Fengqu, to by the transverse direction exhausting
Channel is transferred to the extraction of the hot-air in the main air draft passage, and forms negative pressure.
14. ageing tester according to claim 7, it is characterised in that: wherein the ageing tester further includes always
Change Test driver element, to drive the burn-in board to carry out burn-in test.
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| CN201510837516.6A CN106802375B (en) | 2015-11-26 | 2015-11-26 | Aging test device and negative pressure cooling system for same |
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| CN201510837516.6A CN106802375B (en) | 2015-11-26 | 2015-11-26 | Aging test device and negative pressure cooling system for same |
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| CN106802375B true CN106802375B (en) | 2019-04-09 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112230122A (en) * | 2019-07-15 | 2021-01-15 | 京元电子股份有限公司 | Burn-in test device and burn-in test equipment |
| CN110837034A (en) * | 2019-11-26 | 2020-02-25 | 深圳市矽电半导体设备有限公司 | A burn-in board testing method, electrical connector and burn-in board testing equipment |
| CN111289877B (en) * | 2020-03-03 | 2022-07-19 | 武汉精鸿电子技术有限公司 | Aging test equipment |
| CN111489785B (en) * | 2020-03-28 | 2022-06-03 | 武汉精鸿电子技术有限公司 | Heat dissipation and air supply device for aging test board card in semiconductor memory aging test equipment |
| CN115235282B (en) * | 2022-09-22 | 2022-12-02 | 四川恩巨实业有限公司 | Aging system and control method thereof |
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