CN106795041B - The end-working and method of processing end of glass plate - Google Patents
The end-working and method of processing end of glass plate Download PDFInfo
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- CN106795041B CN106795041B CN201580046539.3A CN201580046539A CN106795041B CN 106795041 B CN106795041 B CN 106795041B CN 201580046539 A CN201580046539 A CN 201580046539A CN 106795041 B CN106795041 B CN 106795041B
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- 239000011521 glass Substances 0.000 title claims abstract description 252
- 238000000034 method Methods 0.000 title claims description 23
- 239000000463 material Substances 0.000 claims description 7
- 238000000227 grinding Methods 0.000 description 67
- 239000004575 stone Substances 0.000 description 34
- 239000012530 fluid Substances 0.000 description 14
- 239000002585 base Substances 0.000 description 13
- 235000013312 flour Nutrition 0.000 description 13
- 238000003801 milling Methods 0.000 description 13
- 238000009740 moulding (composite fabrication) Methods 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 10
- 238000003754 machining Methods 0.000 description 7
- 239000007788 liquid Substances 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 230000008569 process Effects 0.000 description 5
- 238000010521 absorption reaction Methods 0.000 description 4
- 239000003513 alkali Substances 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000003672 processing method Methods 0.000 description 4
- 238000011282 treatment Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000007246 mechanism Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000006059 cover glass Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000003280 down draw process Methods 0.000 description 2
- 230000002401 inhibitory effect Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- RZVAJINKPMORJF-UHFFFAOYSA-N Acetaminophen Chemical compound CC(=O)NC1=CC=C(O)C=C1 RZVAJINKPMORJF-UHFFFAOYSA-N 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 238000006124 Pilkington process Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical group [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910000272 alkali metal oxide Inorganic materials 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007766 curtain coating Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000000116 mitigating effect Effects 0.000 description 1
- 239000005297 pyrex Substances 0.000 description 1
- 239000005368 silicate glass Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B9/00—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor
- B24B9/02—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground
- B24B9/06—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain
- B24B9/08—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass
- B24B9/10—Machines or devices designed for grinding edges or bevels on work or for removing burrs; Accessories therefor characterised by a special design with respect to properties of materials specific to articles to be ground of non-metallic inorganic material, e.g. stone, ceramics, porcelain of glass of plate glass
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C19/00—Surface treatment of glass, not in the form of fibres or filaments, by mechanical means
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/02—Details
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Nonlinear Science (AREA)
- General Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Geochemistry & Mineralogy (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Surface Treatment Of Glass (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
- Liquid Crystal (AREA)
- Electroluminescent Light Sources (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The end-working (10) of glass plate according to the present invention has the supporting station (11) of supporting glass plate (G), implements the cover portion (16) of processing department (13) and covering processing department (13) that regulation is processed for the end (Ge) of the glass plate (G) to the state supported by supporting station (11).The second supporting part (21) of the end side region (G2) of the first supporting part (20) and supporting glass plate (G) of central side region (G1) of the supporting station (11) with supporting glass plate (G).The thickness (ts) of second supporting part (21) is set as smaller than the thickness of the first supporting part (20) and can make the second supporting part (21) in the state of end side region (G2) of supporting glass plate (G) by the size of the degree of the opening portion (19) of cover portion (16).
Description
Technical field
The present invention relates to the end-working of glass plate and method of processing end.
Background technique
In recent years, from the viewpoint of space-saving, instead of in the past universal CRT escope, liquid crystal display, etc.
The flat-panel monitors such as gas ions display, organic el display, Field Emission Display are gradually popularized.Also, these FPD
Device is required further to be thinned.
In particular, very small (thin) this point of its thickness can be utilized in organic el display, organic EL illuminating
To realize the function that can be folded, wind.Be not only convenient for carrying as a result, and in addition under previous flat state use with
Outside, additionally it is possible to the use under curved surface state is realized, it is therefore contemplated that being flexibly applied to various purposes.Therefore, these can
Glass substrate used in the electronic equipment of deformation, cover glass are also required to further increase flexibility.
In order to improve the flexibility of above-mentioned glass plate, it is effective for being thinning glass plate.Here, for example in patent document 1
In propose thickness be 300 μm of glass plates (glass plate of the size is also referred to as glass-film sometimes) below, as a result, can
Enough flexibility that the degree used under curved surface state that can be realized is assigned to glass plate.
On the other hand, to glass plate used in the electronic equipments such as flat-panel monitor, solar battery implement secondary operation,
The various electronic equipment manufacturing relevant treatments such as cleaning.However, if making glass plate thin-walled used in these electronic equipments
Change, also results in damaged situation even if then generating stress and slightly changing, when carrying out the manufacture relevant treatment of electronic equipment, deposit
Operating the problem of extremely difficult etc.On this basis, since thickness is 300 μm or less, particularly 200 μm below
Glass plate (glass-film) is rich in flexible, therefore there is also be difficult to position when carrying out various manufacture relevant treatments etc to ask
Topic.
About the above problem, such as in patent document 2, proposes and carry on the back sandwich from table on one side using a pair of of endless belt
Direction moving glass plate as defined in one edge of glass plate, and the method that the grinding stone by being configured at side is ground end.
On the other hand, for the surface of this glass plate, sometimes according to glass plate purposes and other components are installed, or be
Very high face precision is directly required with original state use.Therefore, if possible, it is desirable to do not make any component at least
The mode that the face that table carries on the back a side abuts carries out the processing such as being ground.
Accordingly, it is considered to which only the table of supporting glass plate carries on the back the face (the usually face of downside) of a side such as passing through platform
Implement the method for grinding under state to end, but in this case, adds in the glass plate to previous thickness
Working hour can lead to the problem of and I had never expected.
That is, in this processing (grinding), in general, using the mill of the flour milling with shape corresponding with processing method
Stone, in addition, when carrying out grinding using the grinding stone, according to the material, size, grinding method of glass plate, by the mill of high pressure
Liquid (water etc.) is cut mainly to be blown to the abutting part of the end of grinding stone and glass plate.Although at this point, the back side of glass plate (downside
Face) it is supported by platform etc., but based on above-mentioned reason, the surface (face of upside) of glass plate is ground in the exposed state
Cut processing.
Thus, for example proposing following abrasive machining device in patent document 3, it is arranged in the abrasive machining device
There is the cover portion of covering grinding stone, and form opening portion in the cover portion, the glass plate to be ground can be made via the opening portion
End abutted with grinding stone.Prevent the mill of the abutting part supplied to the end of grinding stone and glass plate as far as possible by cover portion as a result,
Cut the case where liquid splashes to the face center side of glass plate and is attached to the surface.
Citation
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2010-132531 bulletin
Patent document 2: Japanese Patent No. 3587104
Patent document 3: Japanese Unexamined Patent Publication 2009-172749 bulletin
However, glass plate is easy to be deformed because of external load as its thickness becomes smaller, thus because supporting with grinding stone
Load when connecing and the misgivings for generating the deformation being deflected downward increase.When implementing grinding under state deformed in this way
When, it not can avoid the adverse effect caused by the grinding accuracy of chamfer amount etc..In addition, thickness is smaller, for external load
Intensity it is also smaller, therefore worry to lead to the breakage (rupture) of glass plate due to the abutting with grinding stone.
In addition, needing through supporting glass plates such as platforms in the end for making the glass plate to be processed
It is processed in the state of the stretching such as platform.However, if implementing processing in the state of a part of not supporting glass plate,
Worry that the end of glass plate generates deflection deformation because of its self weight.In addition, since grinding fluid is usually with high pressure conditions supply (spray
Blow), therefore when grinding fluid is born in the end of the glass plate for the state not supported completely, worry that (vibration) is shaken in the end.
Above-mentioned phenomenon becomes smaller with the thickness of glass plate and shows with being more obvious.
In addition, the end of glass plate deforms or vibrates because of above-mentioned reason, it may occur that the opening portion of cover portion and glass plate
Gap expand the case where.In general, according to the supply conditions (water, hydraulic pressure etc.) of used grinding fluid, the thickness of glass plate
Size etc. and the gap is set as size appropriate, but when thickness becomes smaller, gap correspondingly increases thickness
The amount of becoming smaller, moreover, because being easy to produce above-mentioned deformation, vibration, the misgivings that gap dramatically changes (increase) also increase.In the situation
Under, since the misgivings that grinding fluid splashes and be attached to the face center side of glass plate increase, worry to surface accuracy, cleaning
The product qualities such as degree bring adverse effect.The increase in gap caused by order to cope with because of deformation etc., though it also can be in advance by glass
The gap of plate and opening portion set it is smaller, if but do so, rear extended meeting generate because the flexure of glass plate, shake due to make glass
The new problem that plate and opening portion interfere.
Summary of the invention
Subject to be solved by the invention
In view of the foregoing, in the present specification, the technical task to be solved through the invention is, even thickness gauge
It is very little than previous small glass plate, the attachment of the deformation and liquid of glass plate to glass pane surface is also prevented as much as possible, to glass
Implement high-precision processing in the end of glass plate.
Solution for solving the problem
The end-working of related glass plate solves the above subject through the invention.That is, the end-working
Have supporting glass plate supporting station, for the glass plate to the state supported by supporting station end implement regulation processing plus
The Ministry of worker and covering processing department and the cover portion for being provided with the opening portion that the end of glass plate can be made to abut with processing department,
It is characterized in that, supporting station has the first supporting part of the central side region of supporting glass plate and the end side of supporting glass plate
Second supporting part in region, the thickness of the second supporting part are set as smaller than the thickness of the first supporting part and can make
Second supporting part passes through the size of the degree of the opening portion of cover portion in the state of the end side region of supporting glass plate.It needs
Bright, center side region mentioned here is referred respectively to end side region, in the state of overlook view glass plate
Center and the middle position of end position are boundary, region more on the center side than middle position and lean on end than middle position
The region of side.
In this way, in the present invention, due to supporting station be provided with the central side region of supporting glass plate the first supporting part, with
And the second supporting part of the end side region of supporting glass plate, so even in the case where the thickness of glass plate is small,
It is capable of the end side region of reliably supporting glass plate.In addition, in this case, since the thickness of the second supporting part being set
It is set to smaller than the thickness of the first supporting part and the second supporting part can be made in the state of the end side region of supporting glass plate
Pass through the size of the opening portion of cover portion, therefore the state that can be supported in the end side region of glass plate by the second supporting part down
Under, realize end and the abutting of the processing department covered by cover portion of the glass plate.Thereby, it is possible to just bearing quilts preceding since processing
It is directed into the major part of the end side region including by the region of close end of the glass plate in cover portion, it is thus possible to inhibit
The deformation of glass plate when being abutted with processing department, and it is able to suppress the vibration because of glass plate caused by being blown grinding fluid etc., from
And realize high-precision processing.In addition, can be avoided the opening portion of cover portion and the gap of glass plate by inhibiting deformation, vibration
The case where dramatically changing.Thereby, it is possible to which above-mentioned gap is maintained defined size, prevent as much as possible the liquid such as grinding fluid to
The case where face center side of glass plate is splashed and is adhered to.
In addition, being also possible to the second supporting part and first in the end-working of glass plate according to the present invention
Supporting part is separately formed.In addition, in this case, being also possible to the second supporting part and being configured to relative to the first supporting part
Handling.
By like this by the second supporting part and the first supporting part it is separately formed, so as to which supporting glass plate will be required
First supporting part of central side region is set as different specifications from the second supporting part of the end side region for requiring supporting glass plate.
Thereby, it is possible to prevent each supporting part specification from determining to obtain excessively high (over spec), the cost of manufacture of each supporting part can be inhibited
It is lower and be accurately proceed processing.In addition, in general, in order to smoothly and reliably carry out the processing of processing department, glass plate
End side region is so that its end is supported from the state that the second supporting part stretches out predetermined size by the second supporting part.In the situation
Under, it is sent out when studying the end of glass plate from the stretching size and the relationship of the thickness of the glass plate that the second supporting part stretches out
It is existing: since from previous size to become nearest thin-walled size (so-called for the difference of the thickness of glass plate, especially thickness
Film size), and the size appropriate (range) for stretching out size significantlys change.As a result, by the way that the second supporting part to be configured to
It is enough to be loaded and unloaded relative to the first supporting part, even if in the glass by the identical machining production line multiple types different to thickness
In the case that glass plate is processed, the bearing state of glass plate appropriate is also capable of forming as long as replacing the second supporting part.By
This, glass plate that can be different to thickness implements high-precision processing.
In addition, being also possible to be supported by supporting station in the end-working of glass plate according to the present invention
State glass plate end from the second supporting part stretch out stretching size A is set as with unit mm, by the thickness of glass plate
In the case that size is set as t with unit mm, stretches out size A and be set as meeting t × 200 A <.
It is that 300 μm of glass plates below are particularly effective when implementing processing that above-mentioned size, which is set in thickness,.That is, if
It is the glass plate of previous thickness (700 μm or 700 μm or more), even if 200 times for then stretching out size than thickness are big
(such as 300 times or so) process end to the problem of also capable of being less deformed, vibrate.On the other hand, if glass
The thickness of plate is 300 μm hereinafter, then finding to show the situation significantly different with the glass plate of previous thickness.This
Invention is to complete in view of the foregoing, especially when to thickness is that 300 μm of glass plates below implement processing, is led to
Cross and the stretching of glass plate be dimensioned to above range, can according to the thickness of glass plate appropriate supporting glass plate.
The deformation of glass plate when thereby, it is possible to effectively inhibit processing is vibrated, to implement high-precision processing.In addition, in the feelings
Under condition, by being configured to load and unload relative to the first supporting part by the second supporting part as described above, it is appropriate to replace with
Second supporting part of size stretches out size for the different of different-thickness size to be formed.Thereby, it is possible to pass through identical processing
Production line is accurately proceed processing to the glass plate in 300 μm of ranges below and the different multiple types of thickness.
Certainly, using the mixture manufacturing line mixed with the glass plate with previous thickness, pass through
In addition prepare second supporting part with the shape and size that are formed as platform of previous mode etc., manually or automatically replace
The second above-mentioned supporting part, and high-precision reliable together thus, it is possible to the glass plate of glass plate and thin-walled size to previous size
Ground is processed.
In addition, in the end-working of glass plate according to the present invention, it is also possible to the second supporting part by with
One supporting part is formed compared to the higher material of rigidity.
Pass through the opening portion this point of cover portion in the state of the end side region of supporting glass plate in view of the second supporting part,
It is preferred that the thickness of the second supporting part is small.On the other hand, if the thickness of the second supporting part is too small, it is difficult to ensure second
The rigidity of supporting part itself.In view of the above circumstances, by utilizing the higher material formation second of rigidity compared with the first supporting part
Second supporting part can be formed to the thickness of the degree of the opening portion by cover portion, and can incited somebody to action by supporting part
Second supporting part is formed as can ensure that the appropriately sized thickness of the rigidity of second supporting part itself.
In addition, being also possible to the thickness of the second supporting part in the end-working of glass plate according to the present invention
0.25mm or more is dimensioned to and 4.0mm hereinafter, being preferably set to 0.5mm or more and 2.0mm or less.
Based on above-mentioned reason, by the way that the thickness of the second supporting part is set as above-mentioned range, the second supporting part
Can be together with glass plate through the opening portion of cover portion, and can ensure required rigidity.In particular, by excellent in workability
The base portion that is formed into supporting station such as aluminium the first supporting part in the case where, if by compared with the first supporting part rigidity it is higher
Material (such as stainless steel etc.) forms the second supporting part, then can set in the relatively small region of size in the above range
The thickness of second supporting part can be realized further increasing for processability (workability).
In addition, the end-working of glass plate according to the present invention, which is suitable for thickness, is set as 300 μm or less
Glass plate.In addition, in this case, if thickness is too small, from the viewpoint of forming technique, it is believed that the forming of glass plate
Precision reduces, therefore thickness is set as 5 μm or more as much as possible.Certainly, if being not present in terms of forming technique
Problem, then the present application is readily applicable to smaller (less than the 5 μm) glass plate of thickness.
In addition, the method for processing end of glass plate involved in through the invention solves the above subject.That is, the end processes
Method, which is utilized, implements regulation processing to the end of the glass plate of the state supported by supporting station by the processing department that cover portion covers, special
Sign is, the opening portion that the end of glass plate can be made to abut with processing department is arranged in cover portion, and supporting station has supporting glass plate
Central side region the first supporting part and supporting glass plate end side region the second supporting part, the second supporting part
Thickness is set as smaller than the thickness of the first supporting part and the second supporting part can be made in the end side of supporting glass plate
By the size of the degree of the opening portion of cover portion in the state of region, so that the of the state of the end side region of supporting glass plate
Two supporting parts penetrate through insertion opening portion, carry out the end of glass plate and the abutting of processing department.
In this way, processing method involved according to the present invention, since supporting station is provided with the central lateral areas of supporting glass plate
Second supporting part of the end side region of first supporting part and supporting glass plate in domain, so even in the thickness of glass plate
In the case that size is small, also it is capable of the end side region of reliably supporting glass plate.In addition, in this case, due to by second
The thickness of supporting part is set as smaller than the thickness of the first supporting part and the second supporting part can be made in supporting glass plate
End side region in the state of by the size of the opening portion of cover portion, therefore can glass plate end side region by second
In the state of supporting part bearing, abut the end of the glass plate with the processing department covered by cover portion.Thereby, it is possible to open from processing
The major part of the end side region including by the region of close end for the glass plate that bearing is fed in cover portion before beginning,
It is thus able to suppress the deformation of glass plate when abutting with processing department, and is able to suppress because of glass caused by being blown grinding fluid etc.
The vibration of glass plate, to realize high-precision processing.In addition, by inhibiting deformation, vibration, can be avoided the opening portion of cover portion with
The case where gap of glass plate dramatically changes.Thereby, it is possible to which gap is maintained defined size, grinding fluid is prevented as much as possible
The case where equal liquid splash and adhere to the face center side of glass plate.
Invention effect
As described above, according to the present invention, even thickness can also make glass than previous small glass plate
Plate, by the opening portion of cover portion, abuts the end of glass plate with processing department in the state that its end side region is supported.By
This, can prevent the attachment of the deformation and liquid of glass plate to glass pane surface as much as possible, implement to the end of glass plate
High-precision processing.
Detailed description of the invention
Fig. 1 is the vertical view for showing the summary of end-working of glass plate involved in first embodiment of the invention
Figure.
Fig. 2 is the A-A cross-sectional view of end-working shown in FIG. 1.
Fig. 3 is the enlarged view of the main part of Fig. 2 before processing.
The enlarged view of the main part of Fig. 2 when Fig. 4 is processing.
Fig. 5 is the major part section view of the end-working of glass plate involved in second embodiment of the present invention
Figure.
Specific embodiment
Hereinafter, referring to Fig.1~Fig. 4 to the first embodiment of the end-working of glass plate according to the present invention into
Row explanation.It should be noted that " up and down direction " in following explanation be suitably set to be readily appreciated that explanation, and
Actual usage mode is not specified.
Fig. 1 is the summary progress for the end-working to glass plate involved in first embodiment of the invention
The top view of explanation.The end-working 10 is for by cutting or cutting off etc. for example from the base material glass after forming
The end Ge for being divided into glass plate G obtained from regulation shape implements the device of regulation processing, has the bearing of supporting glass plate
Platform 11 and the processing unit 12 for implementing regulation processing to the end Ge of the glass plate G of the state supported by supporting station 11.At this
In embodiment, processing unit 12 is grinding unit, passes through the grinding stone 13 as processing department for making to be set in processing unit 12
The grinding stone 13 and end are relatively moved and made along the end Ge (edge part) of the glass plate G as obtained from being cut to rectangle etc.
Portion Ge is abutted, so as to implement grinding to end Ge.
Here, glass plate G is for example formed by silicate glass, silica glass etc., preferably by pyrex shape
At more preferably being formed by alkali-free glass.If containing alkali composition in glass plate G, its surface can generate cation fall off,
I.e. it is so-called go out alkali (mono- ダ of ソ blows I) the phenomenon that.In this case, generating in glass plate G becomes defect in configuration aspects
Part, if worrying to become defect due to deterioration with age with this using glass plate G in the state of being bent glass plate G
Part be starting point lead to breakage.For the above reasons, in the feelings that there is a possibility that using glass plate G with non-flat forms state
Under condition, glass plate G is preferably formed by alkali-free glass.
It should be noted that alkali-free glass mentioned here refers to containing substantially no alkali composition (alkali metal oxide)
Glass, specifically, refer to alkali composition be 3000ppm glass below.Certainly, from slightly preventing or mitigating because above-mentioned
From the perspective of deterioration with age caused by reason, preferably 1000ppm glass below, more preferably 500ppm glass below
Glass, further preferably 300ppm glass below.
The thickness of glass plate G be set as 300 μm hereinafter, more preferably 200 μm hereinafter, further preferably 100 μm
Below.For the lower limit value of thickness, though it can set with no particular limitation, if after considering forming accuracy or forming
Treatability etc. is then set as 1 μm or more, is preferably set to 5 μm or more.
In addition, glass plate G's does not limit especially with the size of the surface roughness Ra of the surface Ga of 11 opposite side of supporting station
It is fixed.For example, preferably its surface roughness Ra is 2.0nm assuming that implementing the electronic equipments relevant treatments such as film forming
Hereinafter, more preferably 1.0nm is hereinafter, further preferably 0.2nm or less.
Above-mentioned glass plate G is shaped by the forming of manufacturing process well known to glass tube down-drawing etc. preferably by overflow downdraw.
Alternatively, it is also possible to pass through the formings such as float glass process, curtain coating glass tube down-drawing, roll-in method, pulling method.It should be noted that also can be according to need
Implement secondary operation (stretching by drawing again to the once-forming body of glass), is set as the thickness less than 100 μm.
As shown in Figure 2, processing unit 12 has grinding stone 13, the rotary driving part 14 of rotation driving grinding stone 13, lifting
The lifting driving portion 15 of grinding stone 13 is driven, the cover portion 16 of grinding stone 13 is covered and grinding stone 13 and the horizontal shifting of cover portion 16 can be made
Dynamic moves horizontally driving portion 17.In order to realize high-precision position control, these driving portions are for example made of servo motor, but
It can certainly be made of driving mechanism (the various actuators such as working cylinder) in addition to this.In addition, though illustration omitted, processing
Unit 12 can also be also equipped with grinding fluid supply unit, and the grinding fluid supply unit is towards the end Ge of glass plate G and supporting for grinding stone 13
The periphery of socket part or abutting part supplies grinding fluid (such as pure water).The grinding fluid supply unit can be disposed in the interior of cover portion 16
Side can also be disposed in the outside of cover portion 16.
Grinding stone 13 its periphery have with will the corresponding shape of the processing content implemented of end Ge to glass plate G flour milling
18.In the present embodiment, flour milling 18 is made of the inclined-plane for implementing unilateral chamfering to end Ge.It should be noted that
In this illustrated example, the periphery of grinding stone 13 is provided with multiple flour millings 18 in order to make service intervals long life, it is of course also possible to only
It is provided with a flour milling 18.In this case, lifting driving portion 15 can be such that grinding stone 13 goes up and down relative to cover portion 16, can also make
Grinding stone 13 is integrally gone up and down with cover portion 16.In addition, for the shape of flour milling 18, it can also be with processing content (herein in grinding
Hold) correspondingly suitably set.
Being arranged in cover portion 16 can open for becoming the end Ge of the glass plate G of processing object with what grinding stone 13 abutted
Oral area 19.It is described in detail, which is formed in the position opposed with supporting station 11 in cover portion 16, is formed towards
The shape (Fig. 1 and Fig. 2) of the relative movement direction perforation cover portion 16 of grinding stone 13.In addition, the opening width size w of opening portion 19
Be set as enabling aftermentioned supporting station 11 a part and glass plate G by and glass plate when can reliably avoid processing
The size of G etc. and the degree of the interference of cover portion 16.
First supporting part 20 and supporting glass plate G of central side region G1 of the supporting station 11 with supporting glass plate G
The second supporting part 21 of end side region G2, the thickness ts of the second supporting part 21 are set as the thickness than the first supporting part 20
Size is small.In the present embodiment, the constituent element of supporting station 11 includes tabular component 22 and base station 23, the base station 23 with should
Tabular component 22 is formed seperatedly, installs tabular component 22 in the stage portion of the base station 23.As a result, tabular component 22 mainly as
Second supporting part 21 and function, and base station 23 is functioned mainly as the first supporting part 20.In the illustrated example,
Tabular component 22 serves not only as the second supporting part 21 and functions because having installation position install to base station 23, is also used as the
One supporting part 20 plays partial function.That is, entirety and first supporting part 20 of the tabular component 22 as the second supporting part 21
A part of (end side) and function, base station 23 as the first supporting part 20 remainder (center side) and function.Separately
Outside, the second supporting part 21 is shaped as corresponding with four edge parts of the glass plate G shape (framework with four corners
Shape) (Fig. 1).The most tabular component 22 for constituting the second supporting part 21 as a result, is similarly formed to have four corners
Frame shaped.
In addition, the position of positional shift when supporting station 11 can also have for keeping glass plate G and preventing processing is inclined
It is shifted elsewhere for garrison duty locking mechanism.In the present embodiment, absorption maintaining part 27 is set to supporting station 11 (base station 23), the absorption maintaining part 27 packet
It includes in the one or more hole portions 25 for the opening of bearing surface 24 for being set to the upside of the first supporting part 20 and for via hole portion
25 carry out the suction unit 26 of air-breathing.Thereby, it is possible to adsorb and be maintained at the glass plate G loaded on bearing surface 24.Wherein, hole portion 25
Such as the position that can adsorb the central side region G1 of glass plate G can be disposed in.
Here, the thickness ts of the second supporting part 21 also can be set as maintaining above-mentioned size relation and according to glass
The thickness tg of plate G is suitably set.Specifically, the thickness ts of the second supporting part 21 can also be set as to meet tg
[mm]×0.1≤ts[mm].Thereby, it is possible to ensure the rigidity of the second supporting part 21 itself, more reliably inhibit glass plate G's
Deformation.But if the second supporting part 21 is blocked up, it is difficult to not made glass plate interferingly by any in the state of supporting glass plate
By the opening portion 19 of cover portion 16, accordingly it is also possible to by the thickness ts of the second supporting part 21 be set as meeting ts [mm]≤
tg[mm]×10。
In view of the above circumstances, in the case where the thickness tg of glass plate G is 300 μm of situations below, specifically, second
The thickness ts of bearing portion 21 can be set as 0.25mm or more and 4.0mm hereinafter, being preferably set to 0.5mm or more and 2.0mm
Below.By the way that the thickness ts of the second supporting part 21 is set as above-mentioned range, the second supporting part 21 and glass can be made
Plate G passes through the opening portion 19 of cover portion 16 together, and can ensure required rigidity.
In addition, the end side region G2 of the glass plate G of state supported by supporting station 11 in setting from the second supporting part
When stretching size Lg [mm] of 21 stretchings, it can will stretch out size Lg and be set as Lg [mm] < tg [mm] × 200.
In addition, in view of the above circumstances, in the case where the thickness tg of glass plate G is 300 μm of situations below, specifically,
The stretching size Lg of glass plate G is set as 0.5mm or more and 20mm hereinafter, being preferably set to 1.0mm or more and 10mm or less.It is logical
Size Lg will be stretched out by, which crossing, is set as above-mentioned range, even if glass plate G thickness tg than in the past small (300 μm or less)
In the case of, it also being capable of steadily supporting glass plate G.
It should be noted that in the present embodiment, as shown in Figure 1, in four edge parts of glass plate G, glass
Plate G is stretched out from supporting station 11, but can certainly be according to the set-up mode etc. of processing unit 12, using glass plate G one
The mode that a or two or three edge parts are stretched out from supporting station 11.
It, can also be with it should be noted that for the second supporting part 21 from the first supporting part 20 prominent size Ls outstanding
Set according to the thickness tg for the glass plate G to be supported, specifically, glass plate G thickness tg be 300 μm with
In the case where lower, prominent size Ls can be set as 10mm or more and 50mm hereinafter, be preferably set to 15mm or more and 35mm with
Under.
Next, to an example of the grinding for using the end-working 10 of above structure to carry out with it is of the invention excellent
Point is illustrated together.
Firstly, driving processing unit 12 moves horizontally driving portion 17 from state shown in Fig. 3, make grinding stone 13 and cover
Portion 16 is mobile in a manner of close to supporting station 11.In the present embodiment, it is disposed in from the glass to be processed unit 12 will be processed
After the position (not opposed position) that the end Ge of glass plate G deviates, grinding stone 13 and cover portion 16 is made to be moved horizontally to end Ge
Imaginary extended line on (position shown in double dot dash line in Fig. 1).Then, make to process unit 12 close to the end of glass plate G
Ge is abutted with the length direction one end Ge1 (Fig. 1) of end Ge.At this point, first passing through lifting driving portion 15 in advance for the mill of grinding stone 13
Face 18 is set as height level identical with the end Ge of glass plate G to be processed.To the thickness tg with glass plate G not
When same glass plate tg is processed, flour milling 18 is adjusted according to its thickness tg.In addition, making to grind by rotary driving part 14
Stone 13 is with the rotation of defined revolution.Grinding is implemented to the end Ge of glass plate G as a result, end Ge is processed to and grinds
18 corresponding shape (Fig. 4) of face.In the present embodiment, it is made of due to flour milling 18 inclined-plane of cone cell, is added by above-mentioned
Work only implements the chamfering (unilateral chamfering) of cone cell to the upside of end Ge.Then, make grinding stone 13 along end Ge from the state
Length direction it is mobile, so that the end Ge of glass plate G is carried out grinding in its whole length direction region, be processed
At shape as described above.
At this point, the thickness ts of the second supporting part 21 is set as smaller than the thickness of the first supporting part 20, and set
It is set to the opening that can make the second supporting part 21 perforation insertion cover portion 16 together with glass plate G in the state of supporting glass plate G
The size of the degree in portion 19.The second supporting part 21 can be together with glass plate G not by any interferingly opening as a result,
19, the end Ge of glass plate G can be made to abut with grinding stone 13.In addition, as shown in Figure 4, the end Ge that makes glass plate G with
In the state that the flour milling 18 of grinding stone 13 abuts, the gap C between the surface Ga of the upside of opening portion 19 and glass plate G is maintained
5mm or less.Thereby, it is possible to be effectively prevented the abutting part from grinding fluid supply unit (not shown) towards glass plate G and grinding stone 13
Or its periphery supplies and the case where the grinding fluid to splash reaches by gap C and is attached to surface Ga.But if gap
C is too small, then worries that glass plate G and opening portion 19 interfere, therefore preferably gap C ensures at least 1mm or more.
In addition, in the present embodiment, in the end side region G2 of the glass plate G for the state that setting is supported by supporting station 11
Stretching size Lg [mm] stretched out from the second supporting part 21 when, will stretch out size Lg be set as meeting Lg [mm] < tg [mm] ×
200.As a result, especially when to thickness is that 300 μm of glass plate G below implement processing, by by the stretching of glass plate G
Size Lg is set as above range, can be according to the appropriate supporting glass plate G of thickness tg of glass plate G.Thereby, it is possible to effective
Ground inhibits the deformation of glass plate G when processing, vibrates, and implements high-precision processing.
In this way, being moved to processing unit 12 after the grinding of an end Ge (edge part) of glass plate G
The position opposed with adjacent another end (edge part), by repeating above-mentioned movement, thus to another end
Also implement same grinding.Grinding as defined in all implementing to four ends (edge part) of glass plate G as a result,
(unilateral chamfer machining), grinding terminates.
By as described above, by the tabular component 22 of the second supporting part of main composition 21 and the first supporting part of main composition
20 base station 23 is formed seperatedly, so as to will require supporting glass plate G central side region G1 the first supporting part 20 with
It is required that the second supporting part 21 of the end side region G2 of supporting glass plate G is set as different size.Thereby, it is possible to prevent each bearing
Portion 20,21 specifications are excessively highly fixed, so as to the cost of manufacture of each supporting part 20,21 is inhibited lower and accurately into
Row processing.The major part of supporting station 11 is accounted for simultaneously for example, can be formed by excellent in workability and relatively inexpensive aluminum or aluminum alloy
And for equal and need to be processed into the base station 23 of complicated shape, another aspect of installing absorption maintaining part 27, can by stainless steel,
The high rigid material such as titanium forms while requiring the second thin and rigid supporting part 21.
In addition, by the way that the second supporting part 21 is configured to load and unload relative to the first supporting part 20, even if passing through phase
In the case that the glass plate G of same machining production line multiple types different to thickness tg is processed, as long as also replacing
Second supporting part 21 is just capable of forming the bearing state of glass plate G appropriate.Thereby, it is possible to the glass plates different to thickness
G implements high-precision processing.
More than, the first embodiment party of end-working and method of processing end to glass plate according to the present invention
Formula is illustrated, but the processing unit (plant) and processing method can use arbitrary mode within the scope of the invention certainly.
Such as in the above-described embodiment, it instantiates seperatedly with the first supporting part 20 to form the second supporting part 21 and (incite somebody to action
Separately formed supporting station 11 is tabular component 22 and base station 23) the case where, but supporting station 11 can certainly be formed as one
Part.Fig. 5 shows the main portion sectional view of end-working 10 ' involved in second embodiment of the present invention.At the end
In portion's processing unit (plant) 10 ', the second supporting part 21 and the first supporting part 20 are formed as one.In this way, by by the second supporting part
21 are formed as one with the first supporting part 20, so that supporting station 11 is formed as one part, therefore can obtain the feelings of score body
The higher dimensional accuracy of condition.Certainly, in this case, the second supporting part 21 is also capable of forming as the framework with four corners
Shape.
It should be noted that in the above-described embodiment, instantiating and processing the movement of unit 12 and the ground connection of supporting station 11 is fixed
The case where, but it is certainly not limited to which.For example, it is also possible to which and supporting station 11 fixed using the processing ground connection of unit 12 be not by scheming
The driving mechanism shown carries out mobile mode.In this case, by using supporting station 11 can around the structure that vertical axis rotates,
Even if make to process the ground connection of unit 12 it is fixed in the state of, also can four ends (edge part) to glass plate G all implement
Processing.
In addition, in the above-described embodiment, instantiating and carrying out end by the grinding stone 13 for the flour milling 18 for being provided with cone-shaped
The case where grinding (unilateral chamfer machining) of Ge, but can certainly be using processing method in addition to this.For example, also can
Enough shapes that flour milling 18 is formed as to two sides chamfering, to end Ge and abutted by making the flour milling 18 with the entire surface of end Ge
Implement two sides chamfer machining.In addition, chamfer shape is naturally also arbitrary (R shape etc.).
In addition, in the above-described embodiment, as the processing implemented to glass plate G, instantiates and carried out using grinding stone 13
Grinding, but the processing etc. of the end Ge carried out using tool in addition to this can certainly be applied the present invention to.Example
Such as, although illustration omitted, also the present invention can be applied to the grindings for using lapping stick (tape), abrasive band (belt) to carry out
(grinding) processing, etching and processing etc..In the case where implementing etching and processing as an example, can pass through with the following method
The roller is abutted with end Ge while making containing the sponge roller rotation for being soaked with etching solution, and etching process is implemented to end Ge,
Thus R corner portion is formed in end Ge.In addition, Japanese spy can be used for example as the method for grinding for using lapping stick, abrasive band
Open method and device disclosed in 2008-264914 bulletin, Japanese Unexamined Patent Publication 5-329760 bulletin.
In addition, for the glass plate G for being carried out above processing, purposes is unlimited.It can apply the present invention to previous
The processing of glass plate used in the various uses such as glass substrate used in well known electronic equipment, cover glass.
Description of symbols
10 end-workings
11 supporting stations
12 processing units
13 grinding stones
14 rotary driving parts
15 lifting driving portions
16 cover portions
17 move horizontally driving portion
18 flour millings
19 opening portions
20 first supporting parts
21 second supporting parts
22 tabular components
23 base stations
24 bearing surfaces
25 hole portions
26 suction units
27 absorption maintaining parts
Claims (8)
1. a kind of end-working of glass plate has the supporting station of supporting glass plate, for supporting to by the supporting station
State the glass plate end implement regulation processing processing department and cover the processing department and be provided with and can make
The cover portion for the opening portion that the end of the glass plate is abutted with the processing department, wherein
The supporting station has the first supporting part of the central side region for supporting the glass plate and supports the glass plate
Second supporting part of end side region,
The thickness of second supporting part is set as smaller than the thickness of first supporting part and can make described
Two supporting parts pass through the degree of the opening portion of the cover portion in the state of supporting the end side region of the glass plate
Size.
2. the end-working of glass plate according to claim 1, wherein
Second supporting part and first supporting part are separately formed, and second supporting part be configured to relative to
The first supporting part handling.
3. the end-working of glass plate according to claim 1 or 2, wherein
The glass plate for the state that will be supported by the supporting station end side region from second supporting part stretch out
Stretching size A is set as with unit mm, in the case that the thickness of the glass plate is set as t with unit mm, stretch out size A
It is set as meeting t × 200 A <.
4. the end-working of glass plate according to claim 1 or 2, wherein
Second supporting part is formed by higher material rigid compared with first supporting part.
5. the end-working of glass plate according to claim 1 or 2, wherein
The thickness of second supporting part is set as 0.25mm or more and 4.0mm or less.
6. the end-working of glass plate according to claim 1 or 2, wherein
The thickness of the glass plate is set as 300 μm or less.
7. the end-working of glass plate according to claim 6, wherein
The thickness of the glass plate is set as 5 μm or more.
8. a kind of method of processing end of glass plate, the glass using the processing department covered by cover portion to the state supported by supporting station
Implement regulation processing in the end of glass plate, wherein
The opening portion that the end of the glass plate can be made to abut with the processing department is provided in the cover portion,
The supporting station has the first supporting part of the central side region for supporting the glass plate and supports the glass plate
Second supporting part of end side region,
The thickness of second supporting part is set as smaller than the thickness of first supporting part and can make described
Two supporting parts pass through the degree of the opening portion of the cover portion in the state of supporting the end side region of the glass plate
Size, so that the opening portion is inserted into second supporting part perforation for supporting the state of the end side region of the glass plate,
Carry out the end of the glass plate and the abutting of the processing department.
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JP2014-196881 | 2014-09-26 | ||
JP2014196881A JP6344566B2 (en) | 2014-09-26 | 2014-09-26 | End processing apparatus and end processing method for glass plate |
PCT/JP2015/076646 WO2016047582A1 (en) | 2014-09-26 | 2015-09-18 | End-section processing device and end-section processing method for glass plate |
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CN106795041A CN106795041A (en) | 2017-05-31 |
CN106795041B true CN106795041B (en) | 2019-10-18 |
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JP (1) | JP6344566B2 (en) |
KR (1) | KR102274705B1 (en) |
CN (1) | CN106795041B (en) |
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KR101830617B1 (en) * | 2015-06-04 | 2018-02-22 | 주식회사 케이엔제이 | Substrate polishing apparatus and method of using the same |
FR3093662A1 (en) * | 2019-03-14 | 2020-09-18 | Saint-Gobain Glass France | FLAT GLASS SHAPING and BRUSHING OF USED WHEELS |
CN110653719A (en) * | 2019-10-08 | 2020-01-07 | 彩虹(合肥)液晶玻璃有限公司 | Polishing apparatus and polishing line |
CN111451869A (en) * | 2020-05-08 | 2020-07-28 | 吴学彪 | Card chip processing equipment |
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CN2328656Y (en) * | 1998-01-20 | 1999-07-14 | 章鼎铭 | Portable glass edge grinder |
JP2006026764A (en) * | 2004-07-13 | 2006-02-02 | Nakamura Tome Precision Ind Co Ltd | Side machining device and side part holder |
WO2006025507A1 (en) * | 2004-09-03 | 2006-03-09 | Mitsuboshi Diamond Industrial Co., Ltd. | Polishing apparatus and polishing method |
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JP2013215823A (en) * | 2012-04-05 | 2013-10-24 | Asahi Glass Co Ltd | Grinding device and grinding method for plate-like body |
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JPS587104A (en) | 1981-07-06 | 1983-01-14 | Toshiba Corp | Optical transmission device |
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JP5435267B2 (en) | 2008-10-01 | 2014-03-05 | 日本電気硝子株式会社 | Glass roll, glass roll manufacturing apparatus, and glass roll manufacturing method |
WO2012132368A1 (en) * | 2011-03-30 | 2012-10-04 | AvanStrate株式会社 | Production method for glass sheet and glass sheet production device |
SG192302A1 (en) * | 2012-01-18 | 2013-08-30 | Avanstrate Inc | Method of making glass sheet |
JP5994676B2 (en) * | 2013-02-21 | 2016-09-21 | Hoya株式会社 | Glass molded body manufacturing apparatus and glass molded body manufacturing method |
CN203845937U (en) * | 2014-04-11 | 2014-09-24 | 洛阳兰迪玻璃机器股份有限公司 | Plate glass toughening device |
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2014
- 2014-09-26 JP JP2014196881A patent/JP6344566B2/en active Active
-
2015
- 2015-09-18 WO PCT/JP2015/076646 patent/WO2016047582A1/en active Application Filing
- 2015-09-18 CN CN201580046539.3A patent/CN106795041B/en active Active
- 2015-09-18 KR KR1020177005186A patent/KR102274705B1/en active Active
- 2015-09-23 TW TW104131475A patent/TWI640399B/en active
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CN2328656Y (en) * | 1998-01-20 | 1999-07-14 | 章鼎铭 | Portable glass edge grinder |
JP2006026764A (en) * | 2004-07-13 | 2006-02-02 | Nakamura Tome Precision Ind Co Ltd | Side machining device and side part holder |
WO2006025507A1 (en) * | 2004-09-03 | 2006-03-09 | Mitsuboshi Diamond Industrial Co., Ltd. | Polishing apparatus and polishing method |
CN101161410A (en) * | 2006-10-11 | 2008-04-16 | 中村留精密工业株式会社 | Device for machining edges of sheet material |
JP2013215823A (en) * | 2012-04-05 | 2013-10-24 | Asahi Glass Co Ltd | Grinding device and grinding method for plate-like body |
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JP2016069198A (en) | 2016-05-09 |
CN106795041A (en) | 2017-05-31 |
TW201627100A (en) | 2016-08-01 |
KR20170059978A (en) | 2017-05-31 |
TWI640399B (en) | 2018-11-11 |
WO2016047582A1 (en) | 2016-03-31 |
JP6344566B2 (en) | 2018-06-20 |
KR102274705B1 (en) | 2021-07-08 |
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