[go: up one dir, main page]

CN106793495A - A kind of groove pcb board structure and its manufacture method for bare chip test - Google Patents

A kind of groove pcb board structure and its manufacture method for bare chip test Download PDF

Info

Publication number
CN106793495A
CN106793495A CN201611145598.9A CN201611145598A CN106793495A CN 106793495 A CN106793495 A CN 106793495A CN 201611145598 A CN201611145598 A CN 201611145598A CN 106793495 A CN106793495 A CN 106793495A
Authority
CN
China
Prior art keywords
pcb board
bare chip
groove
pcb
metal pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201611145598.9A
Other languages
Chinese (zh)
Inventor
毕文婷
舒钰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CETC 20 Research Institute
Original Assignee
CETC 20 Research Institute
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CETC 20 Research Institute filed Critical CETC 20 Research Institute
Priority to CN201611145598.9A priority Critical patent/CN106793495A/en
Publication of CN106793495A publication Critical patent/CN106793495A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/18Printed circuits structurally associated with non-printed electric components
    • H05K1/182Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
    • H05K1/183Components mounted in and supported by recessed areas of the printed circuit board
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10Measuring as part of the manufacturing process
    • H01L22/14Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/321Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2203/00Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
    • H05K2203/06Lamination

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Printing Elements For Providing Electric Connections Between Printed Circuits (AREA)

Abstract

本发明提供了一种用于裸芯片测试的凹槽PCB板结构及其制造方法,首先加工一块PCB板,在其上加工与裸芯片面积和形状一样的凹槽,并加工导流槽和焊盘;然后在两块PCB板之间添加绝缘介质层,并把两个PCB板压合,两块PCB板相对的一面不加工焊盘;使用钻孔工具在压合后的PCB板上开连接通孔;最后在凹槽处粘结裸芯片,采用超声热压焊键合工艺完成裸芯片金属PAD与PCB板上焊盘的金丝键合。本发明结构简单,成本低,易于加工,降低了PCB板设计难度,可较好的避免导电胶溢出时对裸芯片金属PAD的污染。

The invention provides a grooved PCB board structure and a manufacturing method thereof for bare chip testing. Firstly, a PCB board is processed, a groove having the same area and shape as the bare chip is processed on it, and flow guide grooves and solder joints are processed. Then add an insulating medium layer between the two PCB boards, and press the two PCB boards together, and the opposite side of the two PCB boards does not process the pads; use a drilling tool to open the connection on the pressed PCB board Through holes; finally bond the bare chip at the groove, and use the ultrasonic thermocompression welding bonding process to complete the gold wire bonding of the bare chip metal PAD and the pad on the PCB. The invention is simple in structure, low in cost, easy to process, reduces the difficulty of PCB board design, and can better avoid the pollution of bare chip metal PAD when the conductive glue overflows.

Description

一种用于裸芯片测试的凹槽PCB板结构及其制造方法A kind of groove PCB board structure and manufacturing method thereof for bare chip test

技术领域technical field

本发明涉及半导体集成电路测试领域,尤其涉及一种用于裸芯片测试的PCB板结构及其制造方法。The invention relates to the field of semiconductor integrated circuit testing, in particular to a PCB board structure used for bare chip testing and a manufacturing method thereof.

背景技术Background technique

目前,芯片流片完成后,要将裸片封装于塑料材料或陶瓷材料中,提供环境保护,才能焊接在PCB板上进行测试。而随着电子产品市场的竞争越来越激烈,各芯片厂商需要以更快的速度推出芯片产品占领早期市场,争取获得更多的利润。但封装周期会占用宝贵的测试时间,减缓产品的市场化步伐。晶圆级测试可通过晶圆探针及专用测试台对裸芯片进行测试,但只能够完成较为简单的测试任务,在芯片实际功能的测试方面有较多的局限性。目前的PCB板多用来承载封装完成后的芯片,没有专门用于承载裸芯片测试的PCB板设计加工。且裸芯片面积越大,在PCB板上直接进行粘结时所需的导电胶越多,若用胶量太多,裸片按压在PCB板上时,会造成导电胶在裸芯片侧边的外溢,极易黏附在裸芯片金属PAD上,使金属PAD间形成短路,造成裸芯片的报废。At present, after the chip tape-out is completed, the bare chip must be packaged in plastic material or ceramic material to provide environmental protection before it can be soldered on the PCB board for testing. As the competition in the electronic product market becomes more and more fierce, chip manufacturers need to launch chip products at a faster speed to occupy the early market and strive for more profits. However, the packaging cycle will take up valuable testing time and slow down the pace of product marketization. Wafer-level testing can test bare chips through wafer probes and special test benches, but only relatively simple testing tasks can be completed, and there are many limitations in testing the actual functions of chips. The current PCB boards are mostly used to carry the packaged chips, and there is no PCB board design and processing specifically for carrying bare chip tests. And the larger the area of the bare chip, the more conductive glue is needed for direct bonding on the PCB. If too much glue is used, when the bare chip is pressed on the PCB, the conductive glue will be on the side of the bare chip. Spill, it is easy to adhere to the metal PAD of the bare chip, causing a short circuit between the metal PADs, resulting in the scrapping of the bare chip.

发明内容Contents of the invention

为了克服现有技术的不足,本发明提供一种用于裸芯片测试的PCB板结构及其制造方法,实现在实验室条件下完成对PCB板上裸芯片的测试。In order to overcome the deficiencies of the prior art, the present invention provides a PCB board structure for bare chip testing and a manufacturing method thereof, so as to realize the testing of bare chips on the PCB board under laboratory conditions.

本发明解决其技术问题所采用的技术方案是:一种用于裸芯片测试的PCB板结构,所述的PCB板采用硬板PCB,PCB板一侧表面开有凹槽,凹槽的形状、面积与裸芯片一致,深度等于裸芯片厚度,凹槽的四角开有导流槽;所述凹槽四周分布有金属焊盘,金属焊盘的位置和数量与裸芯片金属PAD保持一致,用于裸芯片和PCB板间的电气连接;对应每一个金属焊盘有一个贯穿PCB板的连接通孔,将裸芯片金属PAD的电气连接引至PCB板另一侧。The technical solution adopted by the present invention to solve the technical problem is: a PCB board structure used for bare chip testing, the PCB board adopts a rigid board PCB, and a groove is formed on the surface of one side of the PCB board, the shape of the groove, The area is the same as that of the bare chip, the depth is equal to the thickness of the bare chip, and there are diversion grooves at the four corners of the groove; there are metal pads distributed around the groove, and the position and number of the metal pads are consistent with the metal PAD of the bare chip. The electrical connection between the bare chip and the PCB board; corresponding to each metal pad, there is a connection through hole through the PCB board, which leads the electrical connection of the bare chip metal PAD to the other side of the PCB board.

所述的PCB板采用两块PCB板通过绝缘介质层粘合而成。The PCB board is formed by bonding two PCB boards through an insulating medium layer.

本发明还提供一种上述用于裸芯片测试的PCB板结构的制备方法,包括以下步骤:首先加工一块PCB板,在其上加工与裸芯片面积和形状一样的凹槽,并加工导流槽和焊盘;然后在两块PCB板之间添加绝缘介质层,并把两个PCB板压合,两块PCB板相对的一面不加工焊盘;使用钻孔工具在压合后的PCB板上开连接通孔;最后在凹槽处粘结裸芯片,采用超声热压焊键合工艺完成裸芯片金属PAD与PCB板上焊盘的金丝键合。The present invention also provides a method for preparing the above-mentioned PCB board structure for bare chip testing, comprising the following steps: firstly process a PCB board, process a groove on it with the same area and shape as the bare chip, and process the diversion groove and pads; then add an insulating dielectric layer between the two PCB boards, and press the two PCB boards, and the opposite side of the two PCB boards does not process the pads; use a drilling tool on the pressed PCB board Open the connection through hole; finally bond the bare chip at the groove, and use the ultrasonic thermocompression welding bonding process to complete the gold wire bonding between the metal PAD of the bare chip and the pad on the PCB.

本发明的有益效果是:The beneficial effects of the present invention are:

1.本发明结构简单,成本低,易于加工,工程应用可实施性较佳;1. The present invention is simple in structure, low in cost, easy to process, and has better implementability in engineering applications;

2.耳朵型导电胶导流结构的设计可较好的避免导电胶溢出时对裸芯片金属PAD的污染;2. The design of the ear-shaped conductive adhesive diversion structure can better avoid the pollution of the bare chip metal PAD when the conductive adhesive overflows;

3.承载裸芯片的凹槽对裸芯片粘结具有位置固定的作用,方便裸芯片的粘结;3. The groove carrying the bare chip has a fixed position for the bonding of the bare chip, which is convenient for the bonding of the bare chip;

4.分成两个独立板材形成最终的PCB板,并结合用于PCB板正面和背面连接通孔的设置,降低了PCB板设计难度,避免了钻头铣凹槽的精度控制难题。4. Divided into two independent plates to form the final PCB board, combined with the settings for connecting through holes on the front and back of the PCB board, it reduces the difficulty of PCB board design and avoids the difficulty of precision control of drill bit milling grooves.

附图说明Description of drawings

图1是本发明一种用于裸芯片测试的PCB板俯视图;Fig. 1 is a kind of PCB board plan view that is used for bare chip test of the present invention;

图2是本发明PCB板的层叠示意图;Fig. 2 is the lamination schematic diagram of PCB board of the present invention;

图3是本发明PCB第一PCB板俯视图;Fig. 3 is a top view of the first PCB board of the PCB of the present invention;

图4是本发明PCB第二PCB板俯视图;Fig. 4 is the top view of the second PCB board of the PCB of the present invention;

图5是本发明一种用于裸芯片测试的PCB板制备工艺流程图;Fig. 5 is a kind of PCB board preparation process flowchart that is used for bare chip test of the present invention;

图6(a)-6(h)是本发明一种用于裸芯片测试的PCB板制备过程示意图。6(a)-6(h) are schematic diagrams of a PCB board preparation process for bare chip testing according to the present invention.

具体实施方式detailed description

下面结合附图和实施例对本发明进一步说明,本发明包括但不仅限于下述实施例。The present invention will be further described below in conjunction with the accompanying drawings and embodiments, and the present invention includes but not limited to the following embodiments.

如图1所示,本发明由PCB板101、裸芯片102、凹槽103、耳朵型结构104、金属焊盘105、连接通孔106、键合金丝107组成。如图2所示,PCB板101由第一PCB板201、第二PCB板202、绝缘介质层203组成,绝缘介质层203用于第一PCB板201和第二PCB板202间的粘合,同时避免第一PCB板201和第二PCB板202间的电气短路。如图3所示,第一PCB板201上设置有通孔避铜区301,用于避免通孔106金属化时造成的第一PCB板201金属地层和连接通孔106中的非地网络通孔间的短路。如图4所示,第二PCB板202上设置有凹槽103、耳朵型结构104、通孔避铜区401,凹槽103厚度与裸芯片102厚度相等,面积和形状与裸芯片102保持一致,用于承载和固定裸芯片102,耳朵型结构104处于凹槽103的四个角上,厚度与裸芯片102厚度相等,用于对多余的导电胶进行导流,通孔避铜区401用于避免通孔106金属化时造成的第二PCB板202金属地层和连接通孔106中的非地网络通孔间的短路。As shown in FIG. 1 , the present invention is composed of a PCB board 101 , a bare chip 102 , a groove 103 , an ear structure 104 , a metal pad 105 , a connection through hole 106 , and a bonding wire 107 . As shown in Figure 2, the PCB board 101 is made up of a first PCB board 201, a second PCB board 202, and an insulating medium layer 203, and the insulating medium layer 203 is used for bonding between the first PCB board 201 and the second PCB board 202, At the same time, electrical short circuit between the first PCB board 201 and the second PCB board 202 is avoided. As shown in FIG. 3 , the first PCB board 201 is provided with a through-hole copper-avoidance area 301, which is used to avoid the non-ground network communication between the metal ground layer of the first PCB board 201 and the connection through-hole 106 caused when the through-hole 106 is metallized. Short circuit between holes. As shown in FIG. 4 , the second PCB board 202 is provided with a groove 103 , an ear-shaped structure 104 , and a through-hole copper avoidance area 401 . The thickness of the groove 103 is equal to the thickness of the bare chip 102 , and the area and shape are consistent with the bare chip 102 , used to carry and fix the bare chip 102, the ear-shaped structure 104 is located on the four corners of the groove 103, the thickness is equal to the thickness of the bare chip 102, and is used to guide the excess conductive glue, and the copper-avoiding area 401 of the through hole is used The short circuit between the metal ground layer of the second PCB board 202 and the non-ground network via hole in the connection via hole 106 caused by the metallization of the via hole 106 is avoided.

本发明提供的一种用于裸芯片测试的凹槽PCB板结构的制备流程如图5所示。The preparation process of a grooved PCB board structure used for bare chip testing provided by the present invention is shown in FIG. 5 .

以下参照图6(a)-6(h)对本发明一种用于裸芯片测试的凹槽PCB板结构及其制造方法的制备流程进一步详细描述。The preparation process of a recessed PCB board structure for bare chip testing and its manufacturing method according to the present invention will be further described in detail with reference to FIGS. 6(a)-6(h).

一种用于裸芯片测试的凹槽PCB板结构,具体步骤如下:A grooved PCB board structure for bare chip testing, the specific steps are as follows:

步骤1,第一PCB板201加工,如图6(a)所示。In step 1, the first PCB board 201 is processed, as shown in FIG. 6( a ).

(1a)开料,将双面覆铜基材切割至需要大小;(1a) cutting, cutting the double-sided copper-clad substrate to the required size;

(1b)曝光,在覆铜基材的一面涂感光液体,经80℃烘干,使用掩膜板利用紫外线曝光机曝光;(1b) Exposure, apply a photosensitive liquid on one side of the copper-clad substrate, dry at 80°C, and use a mask plate to expose with an ultraviolet exposure machine;

(1c)刻蚀,利用单面刻蚀工艺形成电气走线及通孔避铜区301。(1c) Etching, using a single-side etching process to form electrical traces and through-hole copper-avoiding regions 301 .

步骤2,第二PCB板202加工,如图6(b)所示。In step 2, the second PCB board 202 is processed, as shown in FIG. 6( b ).

(2a)开料,将双面覆铜基材切割至需要大小;(2a) cutting, cutting the double-sided copper-clad substrate to the required size;

(2b)曝光,在覆铜基材的一面涂感光液体,经80℃烘干,使用掩膜板利用紫外线曝光机曝光;(2b) Exposure, apply a photosensitive liquid on one side of the copper-clad substrate, dry at 80°C, and use a mask plate to expose with an ultraviolet exposure machine;

(2c)刻蚀,利用单面刻蚀工艺形成电气走线及通孔避铜区401;(2c) Etching, using a single-sided etching process to form electrical traces and through-hole copper-avoiding areas 401;

步骤3,开凹槽103及耳朵型结构104加工,如图6(c)所示。采用钻铣工艺完成凹槽103及耳朵型结构104加工。In step 3, the groove 103 and the ear-shaped structure 104 are processed, as shown in FIG. 6(c). The machining of the groove 103 and the ear-shaped structure 104 is completed by a drilling and milling process.

步骤4,第一PCB板201和第二PCB板202压合,如图6(d)所示。Step 4, the first PCB board 201 and the second PCB board 202 are pressed together, as shown in FIG. 6( d ).

(4a)粗化铜面,利用棕化药液或黑化药液对第一PCB板201和第二PCB板202的粘合面进行铜面钝化,以增加树脂与铜面的表面积,增加铜面对树脂流动的湿润性,避免发生不良反应。(4a) Copper surface is roughened, and copper surface passivation is carried out to the bonding surface of first PCB board 201 and second PCB board 202 by using browning liquid medicine or blackening liquid medicine, to increase the surface area of resin and copper surface, increase The copper surface wets the resin flow to avoid adverse reactions.

(4b)叠板,将第一PCB板201、绝缘介质层203、第二PCB板202依次叠放在一起,利用铆钉进行固定。(4b) Stacking boards, stacking the first PCB board 201 , the insulating medium layer 203 , and the second PCB board 202 together sequentially, and fixing them with rivets.

(4c)压合,通过热压方式,将第一PCB板201、绝缘介质层203、第二PCB板202压合在一起,形成多层PCB板101。(4c) Pressing, pressing the first PCB board 201 , the insulating medium layer 203 , and the second PCB board 202 together by hot pressing to form the multilayer PCB board 101 .

(4d)曝光,在多层PCB板101的顶层和底层涂感光液体,经80℃烘干,使用掩膜板利用紫外线曝光机曝光;(4d) Exposure, apply a photosensitive liquid on the top and bottom layers of the multilayer PCB board 101, dry at 80°C, and use a mask plate to expose with an ultraviolet exposure machine;

(4e)刻蚀,利用外层刻蚀工艺形成电气走线及金属焊盘105;(4e) Etching, using the outer layer etching process to form electrical traces and metal pads 105;

步骤5,钻通孔,如图6(e)所示。使用钻孔工具在多层PCB板101上形成连接通孔106,钻孔区要在第一PCB板201的通孔避铜区301和第二PCB板202的通孔避铜区401内。Step 5, drilling through holes, as shown in Figure 6(e). Drilling tools are used to form connection vias 106 on the multi-layer PCB 101 , and the drilled areas should be within the through-hole copper-avoiding area 301 of the first PCB 201 and the through-hole copper-avoiding area 401 of the second PCB 202 .

步骤6,通孔金属化,如图6(f)所示。Step 6, through-hole metallization, as shown in Figure 6(f).

(6a)化学沉铜,对连接通孔106孔壁和其它铜面沉上一层化学薄铜,用于在不导电的连接通孔106孔壁上形成电气连接;(6a) Electroless copper deposition, depositing a layer of chemical thin copper on the wall of the connecting through hole 106 and other copper surfaces, for forming an electrical connection on the wall of the non-conductive connecting through hole 106;

(6b)电镀铜,对连接通孔106孔壁和其它铜面电镀一层薄铜,用于保护沉淀的化学薄铜;(6b) electroplating copper, electroplating a layer of thin copper on the wall of the connecting through hole 106 and other copper surfaces, for protecting the deposited chemical thin copper;

(6c)电镀镍,对连接通孔106孔壁和其它铜面电镀一层金属镍,用于铜层和金层之间的阻隔层,防止金铜互相扩散;(6c) electroplating nickel, electroplating a layer of metal nickel on the wall of the connection through hole 106 and other copper surfaces, used as a barrier layer between the copper layer and the gold layer, to prevent mutual diffusion of gold and copper;

(6d)电镀金,对连接通孔106孔壁和其它铜面电镀一层软金,形成通孔金属化及镀金焊盘105。(6d) Electroplating gold, electroplating a layer of soft gold on the wall of the connecting through hole 106 and other copper surfaces to form the metallization of the through hole and the gold-plated pad 105 .

步骤7,裸芯片102粘结,如图6(g)所示。使用导电胶将裸芯片102粘结在多层PCB板101的凹槽103内,多余的导电胶将流到耳朵型结构104内。Step 7, the bare chip 102 is bonded, as shown in FIG. 6(g). The bare chip 102 is bonded in the groove 103 of the multi-layer PCB 101 with conductive glue, and excess conductive glue will flow into the ear-shaped structure 104 .

步骤8,裸芯片102键合,如图6(h)所示。使用金丝107采用超声热压焊键合工艺完成裸芯片102金属PAD与第二PCB板202上金属焊盘105的键合,最终完成用于裸芯片测试的凹槽PCB板结构。Step 8, the bare chip 102 is bonded, as shown in FIG. 6(h). The gold wire 107 is used to complete the bonding of the metal PAD of the bare chip 102 and the metal pad 105 on the second PCB 202 through an ultrasonic thermocompression bonding process, and finally complete the grooved PCB structure for bare chip testing.

Claims (3)

1. a kind of groove pcb board structure for bare chip test, it is characterised in that:Described pcb board uses hardboard PCB, PCB The side surface of plate one is provided with groove, and the shape of groove, area are consistent with bare chip, and depth is equal to bare chip thickness, the corner of groove It is provided with guiding gutter;The groove surrounding is distributed with metal pad, and the position of metal pad and quantity keep with bare chip metal PAD Unanimously, for the electrical connection between bare chip and pcb board;Corresponding each metal pad has a connection through pcb board to lead to Hole, pcb board opposite side is caused by the electrical connection of bare chip metal PAD.
2. the groove pcb board structure for bare chip test according to claim 1, it is characterised in that:Described pcb board It is bonded by insulating medium layer using two pieces of pcb boards.
3. the manufacture method of the groove pcb board structure of bare chip test is used for described in a kind of claim 1, it is characterised in that including Following step:One piece of pcb board is processed first, thereon processing and bare chip area and equiform groove, and process water conservancy diversion Groove and pad;Then insulating medium layer is added between two pieces of pcb boards, and two pcb boards is pressed, two pieces of pcb boards are relative Pad is not processed simultaneously;Connection through hole is opened on pcb board using boring bar tool after pressing;It is last to bond naked core in groove Piece, the gold wire bonding of bare chip metal PAD and pad on pcb board is completed using ultrasonic-thermocompression welding bonding technology.
CN201611145598.9A 2016-12-13 2016-12-13 A kind of groove pcb board structure and its manufacture method for bare chip test Pending CN106793495A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201611145598.9A CN106793495A (en) 2016-12-13 2016-12-13 A kind of groove pcb board structure and its manufacture method for bare chip test

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201611145598.9A CN106793495A (en) 2016-12-13 2016-12-13 A kind of groove pcb board structure and its manufacture method for bare chip test

Publications (1)

Publication Number Publication Date
CN106793495A true CN106793495A (en) 2017-05-31

Family

ID=58876399

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201611145598.9A Pending CN106793495A (en) 2016-12-13 2016-12-13 A kind of groove pcb board structure and its manufacture method for bare chip test

Country Status (1)

Country Link
CN (1) CN106793495A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107948903A (en) * 2017-12-12 2018-04-20 杭州电子科技大学 A kind of MEMS microphone tests system
CN109597254A (en) * 2019-01-08 2019-04-09 深圳市华星光电半导体显示技术有限公司 The structure and display panel in chip bonding region
CN110972399A (en) * 2019-12-19 2020-04-07 黄石星河电路有限公司 Production process of printed circuit board with groove in middle of IC bonding pad
CN111696880A (en) * 2020-06-15 2020-09-22 西安微电子技术研究所 Bare chip KGD screening method based on TSV silicon wafer reconstruction
CN114675162A (en) * 2022-03-24 2022-06-28 北京涵鑫盛科技有限公司 PCB for testing and packaging SSD main control chip

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101064260A (en) * 2006-04-26 2007-10-31 碁成科技股份有限公司 Power chip packaging process
CN202034888U (en) * 2011-01-26 2011-11-09 上海腾怡半导体有限公司 Power supply module of integrated inductor
CN102629599A (en) * 2012-04-06 2012-08-08 天水华天科技股份有限公司 Quad flat no lead package and production method thereof
CN103943573A (en) * 2013-12-31 2014-07-23 西安汐特电子科技有限公司 Novel integrated circuit internal packaging method
CN104103607A (en) * 2014-06-19 2014-10-15 中国航天科工集团第三研究院第八三五七研究所 Non-welding package for hybrid packaging BGA chip in embedded manner

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101064260A (en) * 2006-04-26 2007-10-31 碁成科技股份有限公司 Power chip packaging process
CN202034888U (en) * 2011-01-26 2011-11-09 上海腾怡半导体有限公司 Power supply module of integrated inductor
CN102629599A (en) * 2012-04-06 2012-08-08 天水华天科技股份有限公司 Quad flat no lead package and production method thereof
CN103943573A (en) * 2013-12-31 2014-07-23 西安汐特电子科技有限公司 Novel integrated circuit internal packaging method
CN104103607A (en) * 2014-06-19 2014-10-15 中国航天科工集团第三研究院第八三五七研究所 Non-welding package for hybrid packaging BGA chip in embedded manner

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107948903A (en) * 2017-12-12 2018-04-20 杭州电子科技大学 A kind of MEMS microphone tests system
CN109597254A (en) * 2019-01-08 2019-04-09 深圳市华星光电半导体显示技术有限公司 The structure and display panel in chip bonding region
WO2020143127A1 (en) * 2019-01-08 2020-07-16 深圳市华星光电半导体显示技术有限公司 Structure of chip binding region, and display panel
CN110972399A (en) * 2019-12-19 2020-04-07 黄石星河电路有限公司 Production process of printed circuit board with groove in middle of IC bonding pad
CN111696880A (en) * 2020-06-15 2020-09-22 西安微电子技术研究所 Bare chip KGD screening method based on TSV silicon wafer reconstruction
CN111696880B (en) * 2020-06-15 2021-08-20 西安微电子技术研究所 Bare chip KGD screening method based on TSV silicon wafer reconstruction
CN114675162A (en) * 2022-03-24 2022-06-28 北京涵鑫盛科技有限公司 PCB for testing and packaging SSD main control chip

Similar Documents

Publication Publication Date Title
TW393709B (en) Flip chip assembly with via interconnection
US9226382B2 (en) Printed wiring board
CN106793495A (en) A kind of groove pcb board structure and its manufacture method for bare chip test
JP4800606B2 (en) Method for manufacturing element-embedded substrate
CN101887874A (en) Single-layer metal layer substrate structure, manufacturing method thereof and package structure applied thereby
CN104902678B (en) Flexible printed circuit board and preparation method thereof
CN106793454A (en) A kind of dual-cavity pcb board structure and its manufacture method for bare chip test
CN103477423B (en) Encapsulation method for embedding chip into substrate and structure thereof
CN102738319B (en) Manufacturing method of heat dissipation substrate
TWI446508B (en) Coreless package substrate and method of making same
CN103874346B (en) Manufacturing method of circuit board
CN107079582A (en) Circuit board and manufacturing method thereof, circuit board and manufacturing method thereof
CN101252092B (en) Multi-chip packaging structure and manufacturing method thereof
CN101677066A (en) How to make a build-up circuit board
WO2024022273A1 (en) Fanout system-level packaging structure and manufacturing method therefor
JP2008263188A (en) Circuit substrate manufacturing method
JP2014507809A (en) Chip module embedded in PCB substrate
CN108882558A (en) The gold plating method and golden finger circuit board of golden finger
CN106684050A (en) Metal post conduction embedded chip circuit board structure and technological method thereof
CN115332220B (en) A chip interconnection packaging structure and its manufacturing method
CN102931095A (en) Manufacturing method of package substrate and semiconductor package structure thereof
CN103915356A (en) Chip packaging method
CN101924037B (en) Manufacturing method of coreless package substrate
US20120118618A1 (en) Printed circuit board and method for manufacturing the same
US20090090548A1 (en) Circuit board and fabrication method thereof

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20170531