CN106793495A - A kind of groove pcb board structure and its manufacture method for bare chip test - Google Patents
A kind of groove pcb board structure and its manufacture method for bare chip test Download PDFInfo
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
- H05K1/183—Components mounted in and supported by recessed areas of the printed circuit board
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/14—Measuring as part of the manufacturing process for electrical parameters, e.g. resistance, deep-levels, CV, diffusions by electrical means
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/321—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/06—Lamination
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- Manufacturing & Machinery (AREA)
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Abstract
本发明提供了一种用于裸芯片测试的凹槽PCB板结构及其制造方法,首先加工一块PCB板,在其上加工与裸芯片面积和形状一样的凹槽,并加工导流槽和焊盘;然后在两块PCB板之间添加绝缘介质层,并把两个PCB板压合,两块PCB板相对的一面不加工焊盘;使用钻孔工具在压合后的PCB板上开连接通孔;最后在凹槽处粘结裸芯片,采用超声热压焊键合工艺完成裸芯片金属PAD与PCB板上焊盘的金丝键合。本发明结构简单,成本低,易于加工,降低了PCB板设计难度,可较好的避免导电胶溢出时对裸芯片金属PAD的污染。
The invention provides a grooved PCB board structure and a manufacturing method thereof for bare chip testing. Firstly, a PCB board is processed, a groove having the same area and shape as the bare chip is processed on it, and flow guide grooves and solder joints are processed. Then add an insulating medium layer between the two PCB boards, and press the two PCB boards together, and the opposite side of the two PCB boards does not process the pads; use a drilling tool to open the connection on the pressed PCB board Through holes; finally bond the bare chip at the groove, and use the ultrasonic thermocompression welding bonding process to complete the gold wire bonding of the bare chip metal PAD and the pad on the PCB. The invention is simple in structure, low in cost, easy to process, reduces the difficulty of PCB board design, and can better avoid the pollution of bare chip metal PAD when the conductive glue overflows.
Description
技术领域technical field
本发明涉及半导体集成电路测试领域,尤其涉及一种用于裸芯片测试的PCB板结构及其制造方法。The invention relates to the field of semiconductor integrated circuit testing, in particular to a PCB board structure used for bare chip testing and a manufacturing method thereof.
背景技术Background technique
目前,芯片流片完成后,要将裸片封装于塑料材料或陶瓷材料中,提供环境保护,才能焊接在PCB板上进行测试。而随着电子产品市场的竞争越来越激烈,各芯片厂商需要以更快的速度推出芯片产品占领早期市场,争取获得更多的利润。但封装周期会占用宝贵的测试时间,减缓产品的市场化步伐。晶圆级测试可通过晶圆探针及专用测试台对裸芯片进行测试,但只能够完成较为简单的测试任务,在芯片实际功能的测试方面有较多的局限性。目前的PCB板多用来承载封装完成后的芯片,没有专门用于承载裸芯片测试的PCB板设计加工。且裸芯片面积越大,在PCB板上直接进行粘结时所需的导电胶越多,若用胶量太多,裸片按压在PCB板上时,会造成导电胶在裸芯片侧边的外溢,极易黏附在裸芯片金属PAD上,使金属PAD间形成短路,造成裸芯片的报废。At present, after the chip tape-out is completed, the bare chip must be packaged in plastic material or ceramic material to provide environmental protection before it can be soldered on the PCB board for testing. As the competition in the electronic product market becomes more and more fierce, chip manufacturers need to launch chip products at a faster speed to occupy the early market and strive for more profits. However, the packaging cycle will take up valuable testing time and slow down the pace of product marketization. Wafer-level testing can test bare chips through wafer probes and special test benches, but only relatively simple testing tasks can be completed, and there are many limitations in testing the actual functions of chips. The current PCB boards are mostly used to carry the packaged chips, and there is no PCB board design and processing specifically for carrying bare chip tests. And the larger the area of the bare chip, the more conductive glue is needed for direct bonding on the PCB. If too much glue is used, when the bare chip is pressed on the PCB, the conductive glue will be on the side of the bare chip. Spill, it is easy to adhere to the metal PAD of the bare chip, causing a short circuit between the metal PADs, resulting in the scrapping of the bare chip.
发明内容Contents of the invention
为了克服现有技术的不足,本发明提供一种用于裸芯片测试的PCB板结构及其制造方法,实现在实验室条件下完成对PCB板上裸芯片的测试。In order to overcome the deficiencies of the prior art, the present invention provides a PCB board structure for bare chip testing and a manufacturing method thereof, so as to realize the testing of bare chips on the PCB board under laboratory conditions.
本发明解决其技术问题所采用的技术方案是:一种用于裸芯片测试的PCB板结构,所述的PCB板采用硬板PCB,PCB板一侧表面开有凹槽,凹槽的形状、面积与裸芯片一致,深度等于裸芯片厚度,凹槽的四角开有导流槽;所述凹槽四周分布有金属焊盘,金属焊盘的位置和数量与裸芯片金属PAD保持一致,用于裸芯片和PCB板间的电气连接;对应每一个金属焊盘有一个贯穿PCB板的连接通孔,将裸芯片金属PAD的电气连接引至PCB板另一侧。The technical solution adopted by the present invention to solve the technical problem is: a PCB board structure used for bare chip testing, the PCB board adopts a rigid board PCB, and a groove is formed on the surface of one side of the PCB board, the shape of the groove, The area is the same as that of the bare chip, the depth is equal to the thickness of the bare chip, and there are diversion grooves at the four corners of the groove; there are metal pads distributed around the groove, and the position and number of the metal pads are consistent with the metal PAD of the bare chip. The electrical connection between the bare chip and the PCB board; corresponding to each metal pad, there is a connection through hole through the PCB board, which leads the electrical connection of the bare chip metal PAD to the other side of the PCB board.
所述的PCB板采用两块PCB板通过绝缘介质层粘合而成。The PCB board is formed by bonding two PCB boards through an insulating medium layer.
本发明还提供一种上述用于裸芯片测试的PCB板结构的制备方法,包括以下步骤:首先加工一块PCB板,在其上加工与裸芯片面积和形状一样的凹槽,并加工导流槽和焊盘;然后在两块PCB板之间添加绝缘介质层,并把两个PCB板压合,两块PCB板相对的一面不加工焊盘;使用钻孔工具在压合后的PCB板上开连接通孔;最后在凹槽处粘结裸芯片,采用超声热压焊键合工艺完成裸芯片金属PAD与PCB板上焊盘的金丝键合。The present invention also provides a method for preparing the above-mentioned PCB board structure for bare chip testing, comprising the following steps: firstly process a PCB board, process a groove on it with the same area and shape as the bare chip, and process the diversion groove and pads; then add an insulating dielectric layer between the two PCB boards, and press the two PCB boards, and the opposite side of the two PCB boards does not process the pads; use a drilling tool on the pressed PCB board Open the connection through hole; finally bond the bare chip at the groove, and use the ultrasonic thermocompression welding bonding process to complete the gold wire bonding between the metal PAD of the bare chip and the pad on the PCB.
本发明的有益效果是:The beneficial effects of the present invention are:
1.本发明结构简单,成本低,易于加工,工程应用可实施性较佳;1. The present invention is simple in structure, low in cost, easy to process, and has better implementability in engineering applications;
2.耳朵型导电胶导流结构的设计可较好的避免导电胶溢出时对裸芯片金属PAD的污染;2. The design of the ear-shaped conductive adhesive diversion structure can better avoid the pollution of the bare chip metal PAD when the conductive adhesive overflows;
3.承载裸芯片的凹槽对裸芯片粘结具有位置固定的作用,方便裸芯片的粘结;3. The groove carrying the bare chip has a fixed position for the bonding of the bare chip, which is convenient for the bonding of the bare chip;
4.分成两个独立板材形成最终的PCB板,并结合用于PCB板正面和背面连接通孔的设置,降低了PCB板设计难度,避免了钻头铣凹槽的精度控制难题。4. Divided into two independent plates to form the final PCB board, combined with the settings for connecting through holes on the front and back of the PCB board, it reduces the difficulty of PCB board design and avoids the difficulty of precision control of drill bit milling grooves.
附图说明Description of drawings
图1是本发明一种用于裸芯片测试的PCB板俯视图;Fig. 1 is a kind of PCB board plan view that is used for bare chip test of the present invention;
图2是本发明PCB板的层叠示意图;Fig. 2 is the lamination schematic diagram of PCB board of the present invention;
图3是本发明PCB第一PCB板俯视图;Fig. 3 is a top view of the first PCB board of the PCB of the present invention;
图4是本发明PCB第二PCB板俯视图;Fig. 4 is the top view of the second PCB board of the PCB of the present invention;
图5是本发明一种用于裸芯片测试的PCB板制备工艺流程图;Fig. 5 is a kind of PCB board preparation process flowchart that is used for bare chip test of the present invention;
图6(a)-6(h)是本发明一种用于裸芯片测试的PCB板制备过程示意图。6(a)-6(h) are schematic diagrams of a PCB board preparation process for bare chip testing according to the present invention.
具体实施方式detailed description
下面结合附图和实施例对本发明进一步说明,本发明包括但不仅限于下述实施例。The present invention will be further described below in conjunction with the accompanying drawings and embodiments, and the present invention includes but not limited to the following embodiments.
如图1所示,本发明由PCB板101、裸芯片102、凹槽103、耳朵型结构104、金属焊盘105、连接通孔106、键合金丝107组成。如图2所示,PCB板101由第一PCB板201、第二PCB板202、绝缘介质层203组成,绝缘介质层203用于第一PCB板201和第二PCB板202间的粘合,同时避免第一PCB板201和第二PCB板202间的电气短路。如图3所示,第一PCB板201上设置有通孔避铜区301,用于避免通孔106金属化时造成的第一PCB板201金属地层和连接通孔106中的非地网络通孔间的短路。如图4所示,第二PCB板202上设置有凹槽103、耳朵型结构104、通孔避铜区401,凹槽103厚度与裸芯片102厚度相等,面积和形状与裸芯片102保持一致,用于承载和固定裸芯片102,耳朵型结构104处于凹槽103的四个角上,厚度与裸芯片102厚度相等,用于对多余的导电胶进行导流,通孔避铜区401用于避免通孔106金属化时造成的第二PCB板202金属地层和连接通孔106中的非地网络通孔间的短路。As shown in FIG. 1 , the present invention is composed of a PCB board 101 , a bare chip 102 , a groove 103 , an ear structure 104 , a metal pad 105 , a connection through hole 106 , and a bonding wire 107 . As shown in Figure 2, the PCB board 101 is made up of a first PCB board 201, a second PCB board 202, and an insulating medium layer 203, and the insulating medium layer 203 is used for bonding between the first PCB board 201 and the second PCB board 202, At the same time, electrical short circuit between the first PCB board 201 and the second PCB board 202 is avoided. As shown in FIG. 3 , the first PCB board 201 is provided with a through-hole copper-avoidance area 301, which is used to avoid the non-ground network communication between the metal ground layer of the first PCB board 201 and the connection through-hole 106 caused when the through-hole 106 is metallized. Short circuit between holes. As shown in FIG. 4 , the second PCB board 202 is provided with a groove 103 , an ear-shaped structure 104 , and a through-hole copper avoidance area 401 . The thickness of the groove 103 is equal to the thickness of the bare chip 102 , and the area and shape are consistent with the bare chip 102 , used to carry and fix the bare chip 102, the ear-shaped structure 104 is located on the four corners of the groove 103, the thickness is equal to the thickness of the bare chip 102, and is used to guide the excess conductive glue, and the copper-avoiding area 401 of the through hole is used The short circuit between the metal ground layer of the second PCB board 202 and the non-ground network via hole in the connection via hole 106 caused by the metallization of the via hole 106 is avoided.
本发明提供的一种用于裸芯片测试的凹槽PCB板结构的制备流程如图5所示。The preparation process of a grooved PCB board structure used for bare chip testing provided by the present invention is shown in FIG. 5 .
以下参照图6(a)-6(h)对本发明一种用于裸芯片测试的凹槽PCB板结构及其制造方法的制备流程进一步详细描述。The preparation process of a recessed PCB board structure for bare chip testing and its manufacturing method according to the present invention will be further described in detail with reference to FIGS. 6(a)-6(h).
一种用于裸芯片测试的凹槽PCB板结构,具体步骤如下:A grooved PCB board structure for bare chip testing, the specific steps are as follows:
步骤1,第一PCB板201加工,如图6(a)所示。In step 1, the first PCB board 201 is processed, as shown in FIG. 6( a ).
(1a)开料,将双面覆铜基材切割至需要大小;(1a) cutting, cutting the double-sided copper-clad substrate to the required size;
(1b)曝光,在覆铜基材的一面涂感光液体,经80℃烘干,使用掩膜板利用紫外线曝光机曝光;(1b) Exposure, apply a photosensitive liquid on one side of the copper-clad substrate, dry at 80°C, and use a mask plate to expose with an ultraviolet exposure machine;
(1c)刻蚀,利用单面刻蚀工艺形成电气走线及通孔避铜区301。(1c) Etching, using a single-side etching process to form electrical traces and through-hole copper-avoiding regions 301 .
步骤2,第二PCB板202加工,如图6(b)所示。In step 2, the second PCB board 202 is processed, as shown in FIG. 6( b ).
(2a)开料,将双面覆铜基材切割至需要大小;(2a) cutting, cutting the double-sided copper-clad substrate to the required size;
(2b)曝光,在覆铜基材的一面涂感光液体,经80℃烘干,使用掩膜板利用紫外线曝光机曝光;(2b) Exposure, apply a photosensitive liquid on one side of the copper-clad substrate, dry at 80°C, and use a mask plate to expose with an ultraviolet exposure machine;
(2c)刻蚀,利用单面刻蚀工艺形成电气走线及通孔避铜区401;(2c) Etching, using a single-sided etching process to form electrical traces and through-hole copper-avoiding areas 401;
步骤3,开凹槽103及耳朵型结构104加工,如图6(c)所示。采用钻铣工艺完成凹槽103及耳朵型结构104加工。In step 3, the groove 103 and the ear-shaped structure 104 are processed, as shown in FIG. 6(c). The machining of the groove 103 and the ear-shaped structure 104 is completed by a drilling and milling process.
步骤4,第一PCB板201和第二PCB板202压合,如图6(d)所示。Step 4, the first PCB board 201 and the second PCB board 202 are pressed together, as shown in FIG. 6( d ).
(4a)粗化铜面,利用棕化药液或黑化药液对第一PCB板201和第二PCB板202的粘合面进行铜面钝化,以增加树脂与铜面的表面积,增加铜面对树脂流动的湿润性,避免发生不良反应。(4a) Copper surface is roughened, and copper surface passivation is carried out to the bonding surface of first PCB board 201 and second PCB board 202 by using browning liquid medicine or blackening liquid medicine, to increase the surface area of resin and copper surface, increase The copper surface wets the resin flow to avoid adverse reactions.
(4b)叠板,将第一PCB板201、绝缘介质层203、第二PCB板202依次叠放在一起,利用铆钉进行固定。(4b) Stacking boards, stacking the first PCB board 201 , the insulating medium layer 203 , and the second PCB board 202 together sequentially, and fixing them with rivets.
(4c)压合,通过热压方式,将第一PCB板201、绝缘介质层203、第二PCB板202压合在一起,形成多层PCB板101。(4c) Pressing, pressing the first PCB board 201 , the insulating medium layer 203 , and the second PCB board 202 together by hot pressing to form the multilayer PCB board 101 .
(4d)曝光,在多层PCB板101的顶层和底层涂感光液体,经80℃烘干,使用掩膜板利用紫外线曝光机曝光;(4d) Exposure, apply a photosensitive liquid on the top and bottom layers of the multilayer PCB board 101, dry at 80°C, and use a mask plate to expose with an ultraviolet exposure machine;
(4e)刻蚀,利用外层刻蚀工艺形成电气走线及金属焊盘105;(4e) Etching, using the outer layer etching process to form electrical traces and metal pads 105;
步骤5,钻通孔,如图6(e)所示。使用钻孔工具在多层PCB板101上形成连接通孔106,钻孔区要在第一PCB板201的通孔避铜区301和第二PCB板202的通孔避铜区401内。Step 5, drilling through holes, as shown in Figure 6(e). Drilling tools are used to form connection vias 106 on the multi-layer PCB 101 , and the drilled areas should be within the through-hole copper-avoiding area 301 of the first PCB 201 and the through-hole copper-avoiding area 401 of the second PCB 202 .
步骤6,通孔金属化,如图6(f)所示。Step 6, through-hole metallization, as shown in Figure 6(f).
(6a)化学沉铜,对连接通孔106孔壁和其它铜面沉上一层化学薄铜,用于在不导电的连接通孔106孔壁上形成电气连接;(6a) Electroless copper deposition, depositing a layer of chemical thin copper on the wall of the connecting through hole 106 and other copper surfaces, for forming an electrical connection on the wall of the non-conductive connecting through hole 106;
(6b)电镀铜,对连接通孔106孔壁和其它铜面电镀一层薄铜,用于保护沉淀的化学薄铜;(6b) electroplating copper, electroplating a layer of thin copper on the wall of the connecting through hole 106 and other copper surfaces, for protecting the deposited chemical thin copper;
(6c)电镀镍,对连接通孔106孔壁和其它铜面电镀一层金属镍,用于铜层和金层之间的阻隔层,防止金铜互相扩散;(6c) electroplating nickel, electroplating a layer of metal nickel on the wall of the connection through hole 106 and other copper surfaces, used as a barrier layer between the copper layer and the gold layer, to prevent mutual diffusion of gold and copper;
(6d)电镀金,对连接通孔106孔壁和其它铜面电镀一层软金,形成通孔金属化及镀金焊盘105。(6d) Electroplating gold, electroplating a layer of soft gold on the wall of the connecting through hole 106 and other copper surfaces to form the metallization of the through hole and the gold-plated pad 105 .
步骤7,裸芯片102粘结,如图6(g)所示。使用导电胶将裸芯片102粘结在多层PCB板101的凹槽103内,多余的导电胶将流到耳朵型结构104内。Step 7, the bare chip 102 is bonded, as shown in FIG. 6(g). The bare chip 102 is bonded in the groove 103 of the multi-layer PCB 101 with conductive glue, and excess conductive glue will flow into the ear-shaped structure 104 .
步骤8,裸芯片102键合,如图6(h)所示。使用金丝107采用超声热压焊键合工艺完成裸芯片102金属PAD与第二PCB板202上金属焊盘105的键合,最终完成用于裸芯片测试的凹槽PCB板结构。Step 8, the bare chip 102 is bonded, as shown in FIG. 6(h). The gold wire 107 is used to complete the bonding of the metal PAD of the bare chip 102 and the metal pad 105 on the second PCB 202 through an ultrasonic thermocompression bonding process, and finally complete the grooved PCB structure for bare chip testing.
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CN107948903A (en) * | 2017-12-12 | 2018-04-20 | 杭州电子科技大学 | A kind of MEMS microphone tests system |
CN109597254A (en) * | 2019-01-08 | 2019-04-09 | 深圳市华星光电半导体显示技术有限公司 | The structure and display panel in chip bonding region |
CN110972399A (en) * | 2019-12-19 | 2020-04-07 | 黄石星河电路有限公司 | Production process of printed circuit board with groove in middle of IC bonding pad |
CN111696880A (en) * | 2020-06-15 | 2020-09-22 | 西安微电子技术研究所 | Bare chip KGD screening method based on TSV silicon wafer reconstruction |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN107948903A (en) * | 2017-12-12 | 2018-04-20 | 杭州电子科技大学 | A kind of MEMS microphone tests system |
CN109597254A (en) * | 2019-01-08 | 2019-04-09 | 深圳市华星光电半导体显示技术有限公司 | The structure and display panel in chip bonding region |
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CN110972399A (en) * | 2019-12-19 | 2020-04-07 | 黄石星河电路有限公司 | Production process of printed circuit board with groove in middle of IC bonding pad |
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CN111696880B (en) * | 2020-06-15 | 2021-08-20 | 西安微电子技术研究所 | Bare chip KGD screening method based on TSV silicon wafer reconstruction |
CN114675162A (en) * | 2022-03-24 | 2022-06-28 | 北京涵鑫盛科技有限公司 | PCB for testing and packaging SSD main control chip |
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