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CN106773014A - A kind of compound double cavity structure for improving optical fiber hydrostatic sensor sensitivity - Google Patents

A kind of compound double cavity structure for improving optical fiber hydrostatic sensor sensitivity Download PDF

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Publication number
CN106773014A
CN106773014A CN201611138647.6A CN201611138647A CN106773014A CN 106773014 A CN106773014 A CN 106773014A CN 201611138647 A CN201611138647 A CN 201611138647A CN 106773014 A CN106773014 A CN 106773014A
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optical fiber
sensitivity
cavity structure
cavity
improving
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徐飞
刘奇
吴震星
陆延青
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Nanjing University
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Nanjing University
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01LMEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

本发明公开了一种提高光纤液压传感器灵敏度的复合双腔结构,在光纤的一端同轴熔接两段空芯管,两段空芯管的半径不相同。若要获得更高的液压灵敏度,与光纤端面相接的空芯管的半径和长度均小于与被测液体接触的空芯管的半径和长度。本发明的复合双腔结构简单,易于制作,可操作强。与现有技术相比,本发明的复合双腔结构使得液压传感灵敏度得到了大大的提升。

The invention discloses a composite double-cavity structure for improving the sensitivity of an optical fiber hydraulic sensor. One end of the optical fiber is coaxially welded with two sections of hollow core tubes, and the radii of the two sections of hollow core tubes are different. To obtain higher hydraulic sensitivity, the radius and length of the hollow tube connected to the end face of the optical fiber are smaller than the radius and length of the hollow tube in contact with the measured liquid. The composite double chamber of the invention has simple structure, easy manufacture and strong operability. Compared with the prior art, the composite double-cavity structure of the present invention greatly improves the sensitivity of hydraulic pressure sensing.

Description

一种提高光纤液压传感器灵敏度的复合双腔结构A Composite Dual-cavity Structure for Improving the Sensitivity of Optical Fiber Hydraulic Sensor

技术领域technical field

本发明涉及一种光纤复合型双腔结构,具体涉及一种非均匀法布里-珀罗谐振腔结构。The invention relates to an optical fiber composite double-cavity structure, in particular to a non-uniform Fabry-Perot resonant cavity structure.

背景技术Background technique

光纤传感是以光波为载体,光纤为媒质,感知和传输外界被测量信号的新型传感技术。光纤传感器,具有耐腐蚀、抗电磁干扰、质量轻、器件小等特点,并在一些危险环境或是精细探测中,有重要应用。光纤传感的应用领域十分广泛,包括折射率传感、温度传感、应力传感等等。Optical fiber sensing is a new type of sensing technology that uses light waves as the carrier and optical fiber as the medium to perceive and transmit external measured signals. Optical fiber sensors have the characteristics of corrosion resistance, anti-electromagnetic interference, light weight, and small devices, and have important applications in some dangerous environments or fine detection. Optical fiber sensing has a wide range of applications, including refractive index sensing, temperature sensing, stress sensing, and more.

压力传感的光纤传感器由于其在工业检测和环境检测中的重要应用,近年来受到了越来越多的关注,而各种类型的液压传感器,比如基于光纤布拉格光栅、光子晶体光纤等,也是层出不穷。Optical fiber sensors for pressure sensing have received more and more attention in recent years due to their important applications in industrial detection and environmental detection, and various types of hydraulic pressure sensors, such as based on fiber Bragg gratings, photonic crystal fibers, etc., are also There are endless.

法布里-珀罗谐振腔(F-P腔)的结构十分简单易懂,其包括一个腔体和两个反射界面。光在两个反射界面的反射光相互干涉,可以通过测试干涉谱的峰值移动来对外界的环境变化做出探测。对于现有的基于F-P腔的光纤传感器,F-P腔主要设置在光纤头的位置,而其靠近探测信号的反射界面材质多种多样,包括二氧化硅薄膜、聚合物薄膜、金属薄膜等等,根据需探测信号的不同而变化,灵敏度也不尽相同。同时,也存在没有薄膜的F-P腔的液压传感器,比如把光纤和空芯玻璃管熔接,就可以得到一个空气泡类型的F-P腔,外界液体压力的变化会引起空气泡的伸缩,从而达到液压传感的目的。与薄膜型的F-P腔传感器相比,虽然此方法的传感灵敏度提升了一个数量级,但是它的结构仍需要优化,以进一步提高灵敏度。The structure of the Fabry-Perot resonator (F-P cavity) is very simple and easy to understand, which includes a cavity and two reflecting surfaces. The reflected light of the two reflective interfaces interferes with each other, and the change of the external environment can be detected by testing the peak shift of the interference spectrum. For existing fiber optic sensors based on F-P cavity, the F-P cavity is mainly set at the position of the fiber head, and its reflection interface near the detection signal is made of various materials, including silicon dioxide film, polymer film, metal film, etc., according to The sensitivity varies depending on the signal to be detected. At the same time, there are also hydraulic sensors with F-P chambers without membranes. For example, by welding optical fibers and hollow glass tubes, an F-P chamber with air bubbles can be obtained. Changes in external liquid pressure will cause air bubbles to expand and contract, thereby achieving hydraulic pressure. sense of purpose. Compared with the thin-film F-P cavity sensor, although the sensing sensitivity of this method has been improved by an order of magnitude, its structure still needs to be optimized to further improve the sensitivity.

发明内容Contents of the invention

本发明提供一种全新的F-P复合双腔结构,通过控制复合双腔两部分的半径比和长度比,来达到提高压力灵敏度的目的。The invention provides a brand-new F-P composite double-cavity structure, which can achieve the purpose of improving pressure sensitivity by controlling the radius ratio and length ratio of the two parts of the composite double-cavity.

本发明采用的技术方案如下:The technical scheme that the present invention adopts is as follows:

一种提高光纤液压传感器灵敏度的复合双腔结构,在光纤的一端同轴熔接两段空芯管,两段空芯管的半径不相同。A composite double-cavity structure for improving the sensitivity of an optical fiber hydraulic sensor, in which two sections of hollow tubes are coaxially welded at one end of the optical fiber, and the radii of the two sections of hollow tubes are different.

进一步地,所述空芯管采用玻璃管。Further, the hollow tube is a glass tube.

若要获得更高的液压灵敏度,与光纤端面相接的空芯管的半径和长度均小于与被测液体接触的空芯管的半径和长度。To obtain higher hydraulic sensitivity, the radius and length of the hollow tube connected to the end face of the optical fiber are smaller than the radius and length of the hollow tube in contact with the measured liquid.

本发明的复合双腔结构简单,易于制作,可操作强。与现有技术相比,本发明的复合双腔结构使得液压传感灵敏度得到了大大的提升。The composite double chamber of the invention has simple structure, easy manufacture and strong operability. Compared with the prior art, the composite double-cavity structure of the present invention greatly improves the sensitivity of hydraulic pressure sensing.

附图说明Description of drawings

图1是本发明复合腔的结构示意图。Fig. 1 is a schematic diagram of the structure of the composite cavity of the present invention.

图2是在一定范围内,随着双腔半径比和腔长比的变化,相应的传感灵敏度的变化情况。Figure 2 is within a certain range, with the change of the ratio of the radius of the double cavity and the ratio of the length of the cavity, the change of the corresponding sensing sensitivity.

图3是应用环路器,对液压传感器灵敏度进行探测的系统。Figure 3 is a system for detecting the sensitivity of hydraulic pressure sensors using a circulator.

具体实施方式detailed description

下面结合附图和具体实施例对本发明做进一步的详细说明。The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

如图1所示,将普通光纤与两段不同的玻璃管熔接,形成一个非均匀的复合型法布里-珀罗谐振腔。反射界面1是空气-液体界面,反射界面2是光纤-空气界面。两个空芯腔的长度分别为L1和L2。当将该传感器放入液体中时,所形成的空气气泡会作为法布里-珀罗谐振腔。As shown in Figure 1, an ordinary optical fiber is fused with two different glass tubes to form a non-uniform composite Fabry-Perot resonator cavity. Reflective interface 1 is an air-liquid interface, and reflective interface 2 is an optical fiber-air interface. The lengths of the two hollow cavities are L 1 and L 2 respectively. When the sensor is placed in a liquid, the air bubbles that form act as Fabry-Perot resonators.

本发明的原理如下:Principle of the present invention is as follows:

F-P腔中的空气在一定压强范围内,可以看做理想气体,而满足理想气体状态方程:The air in the F-P cavity can be regarded as an ideal gas within a certain pressure range, and it satisfies the ideal gas state equation:

PV=nRT。PV = nRT.

其中,P,V,T分别为气体压强、气体体积和温度。而对于复合腔结构,两段腔长分别设为L1和L2,腔的半径分别设为r1和r2,那么 Among them, P, V, T are the gas pressure, gas volume and temperature, respectively. For the composite cavity structure, the lengths of the two segments are set as L 1 and L 2 respectively, and the radii of the cavity are set as r 1 and r 2 respectively, then

由于外界的压力发生变化,从而导致空气气泡变化,进而所测得的干涉谱的峰会发生移动。而F-P腔干涉谱的峰值波长可以通过计算得出。其中,m为非负整数,为初始相位。将之与理想气体状态方程联立,可以得到其液压传感灵敏度的计算公式:As the external pressure changes, the air bubbles change, and then the peak of the measured interference spectrum moves. And the peak wavelength of the FP cavity interference spectrum can be passed Calculated. Among them, m is a non-negative integer, is the initial phase. Combining it with the ideal gas state equation, the calculation formula of its hydraulic pressure sensing sensitivity can be obtained:

其中, in,

图3是本实施例液压灵敏度测试系统。核心器件是一个环路器,它外接光源、复合双腔结构的传感器和光谱仪。将复合双腔结构的传感器放置入液体中,随着液体压力的变化,会使F-P腔的腔长发生改变,从而使得光谱发生移动。通过光谱的移动量,来反推出外部液体压力的大小。Fig. 3 is the hydraulic pressure sensitivity testing system of this embodiment. The core device is a circulator, which is externally connected to a light source, a composite dual-cavity sensor and a spectrometer. Placing a sensor with a composite dual-cavity structure in a liquid will change the cavity length of the F-P cavity as the pressure of the liquid changes, thereby shifting the spectrum. The magnitude of the external liquid pressure is deduced through the shift of the spectrum.

在一定的腔长比以及半径比范围内,设空芯腔1与液体相接触且长度与直径固定,那么空芯腔2腔长越小,直径越小,灵敏度越高。从图2中可以看出,在一定范围内,随着b与的增加,压力传感灵敏度是提升的,且提升幅度很大。当压强为100kPa,波长为1550nm时,如果第一个腔和第二个腔完全等同,即为单腔模式,那么压力灵敏度为-15.5nm/kPa。如果即为复合双腔结构,那么此时的压力灵敏度为-1410.5nm/kPa,提升了近两个数量级。这说明本发明可以通过控制复合双腔的半径比和腔长比,来达到提高压力传感灵敏度的目的。Within a certain cavity length ratio and radius ratio range, assuming that the hollow cavity 1 is in contact with the liquid and the length and diameter are fixed, then the smaller the cavity length and the smaller the diameter of the hollow cavity 2, the higher the sensitivity. It can be seen from Figure 2 that within a certain range, with b and The increase of the pressure sensor sensitivity is improved, and the improvement is very large. When the pressure is 100kPa and the wavelength is 1550nm, if the first cavity and the second cavity are completely equal, that is, the single cavity mode, then the pressure sensitivity is -15.5nm/kPa. if and It is a composite dual-cavity structure, so the pressure sensitivity at this time is -1410.5nm/kPa, which has been improved by nearly two orders of magnitude. This shows that the present invention can achieve the purpose of improving the pressure sensing sensitivity by controlling the radius ratio and cavity length ratio of the composite double cavity.

Claims (3)

1. A composite double-cavity structure for improving the sensitivity of an optical fiber hydraulic sensor is characterized in that two sections of hollow pipes are coaxially welded at one end of an optical fiber, and the radiuses of the two sections of hollow pipes are different.
2. The composite dual cavity structure for improving the sensitivity of the fiber optic hydraulic sensor as claimed in claim 1, wherein the hollow tube is a glass tube.
3. The composite dual cavity structure for improving the sensitivity of the fiber optic hydraulic sensor as claimed in claim 1, wherein the radius and length of the hollow tube connected to the end face of the optical fiber are smaller than those of the hollow tube in contact with the liquid to be measured.
CN201611138647.6A 2016-12-12 2016-12-12 A kind of compound double cavity structure for improving optical fiber hydrostatic sensor sensitivity Pending CN106773014A (en)

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Cited By (1)

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CN108534929A (en) * 2018-01-09 2018-09-14 中国海洋石油集团有限公司 Superhigh temperature sapphire fiber pressure gauge and its processing method and pressure monitor system

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CN104596685A (en) * 2014-12-04 2015-05-06 刘玉珏 MEMS process based miniature packaged F-P pressure sensor and forming method
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Publication number Priority date Publication date Assignee Title
EP1359394A1 (en) * 2002-04-30 2003-11-05 Abb Research Ltd. High resolution fiberlaser sensor
CN2537970Y (en) * 2002-05-09 2003-02-26 奥诚喜 Optical fibre pressure sensor
CN101017116A (en) * 2006-10-09 2007-08-15 南京师范大学 Fabry-Perotw fiber-optic pressure sensor and manufacture method therefor
CN201600201U (en) * 2009-11-20 2010-10-06 赵德春 Optical-fiber optical-grate pressure sensor
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CN103528735A (en) * 2013-10-31 2014-01-22 南京信息工程大学 Miniature optical fiber Fabry-Perot pressure sensor and manufacturing method thereof
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CN104596685A (en) * 2014-12-04 2015-05-06 刘玉珏 MEMS process based miniature packaged F-P pressure sensor and forming method
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Publication number Priority date Publication date Assignee Title
CN108534929A (en) * 2018-01-09 2018-09-14 中国海洋石油集团有限公司 Superhigh temperature sapphire fiber pressure gauge and its processing method and pressure monitor system
CN108534929B (en) * 2018-01-09 2020-12-29 中国海洋石油集团有限公司 Ultra-high temperature sapphire optical fiber manometer and pressure monitoring system

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