CN106769273B - A kind of automatic sample multistage manufacturing system and method under ultrahigh vacuum - Google Patents
A kind of automatic sample multistage manufacturing system and method under ultrahigh vacuum Download PDFInfo
- Publication number
- CN106769273B CN106769273B CN201510828015.1A CN201510828015A CN106769273B CN 106769273 B CN106769273 B CN 106769273B CN 201510828015 A CN201510828015 A CN 201510828015A CN 106769273 B CN106769273 B CN 106769273B
- Authority
- CN
- China
- Prior art keywords
- sample
- transmission
- magnetic coupling
- vacuum
- car walking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 238000000034 method Methods 0.000 title claims description 16
- 230000005540 biological transmission Effects 0.000 claims abstract description 102
- 230000008878 coupling Effects 0.000 claims abstract description 51
- 238000010168 coupling process Methods 0.000 claims abstract description 51
- 238000005859 coupling reaction Methods 0.000 claims abstract description 51
- 238000005086 pumping Methods 0.000 claims abstract description 16
- 238000012546 transfer Methods 0.000 claims description 30
- 229910000831 Steel Inorganic materials 0.000 claims description 21
- 239000010959 steel Substances 0.000 claims description 21
- 230000007704 transition Effects 0.000 claims description 21
- 238000009434 installation Methods 0.000 claims description 4
- 238000005259 measurement Methods 0.000 claims description 3
- 238000001514 detection method Methods 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000003466 welding Methods 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000009193 crawling Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Sampling And Sample Adjustment (AREA)
- Non-Mechanical Conveyors (AREA)
Abstract
The present invention relates to sample multistage manufacturing processes and detection technique field under ultrahigh vacuum, specifically a kind of automatic sample multistage manufacturing system under ultrahigh vacuum.Including sample car walking passageway, magnetic coupling transmission system, transmit trolley component, bracket, vacuum-pumping system and control system, wherein sample car walking passageway is installed on the bracket, vacuum-pumping system is connect with sample car walking passageway, it is vacuumized for sample car walking passageway, the transmission trolley component travelled in orbit is equipped in sample car walking passageway, the outside of sample car walking passageway is equipped with magnetic coupling transmission system, magnetic coupling transmission system is connect with control system point, and trolley component magnetic coupling is realized and transmitted by the control of control system and transmission trolley component is driven to move ahead.Present invention employs magnetic coupling transmission technology, which considers the influence of the factors such as special extremely high vacuum work condition environment and limited space, realizes the reliable and stable transmission of sample.
Description
Technical field
The present invention relates to sample multistage manufacturing processes and detection technique fields under ultrahigh vacuum, specifically a kind of for surpassing
Automatic sample multistage manufacturing system under high vacuum.
Background technique
" vacuum " refers to the gaseous state for being lower than environment atmospheric pressure in designated space, that is, gas point in the space
Subnumber density is lower than the gas molecule number density of this area's atmospheric pressure.Different vacuum state, it is meant that the space has not
The same number density of molecule.It has the advantage that in this way and carries out similar plated film, heat treatment, cleaning and fine inspection in such space
The influence of gas in air will be excluded when the techniques such as survey or detection process it may even go so far that being only added certainly according to the wish of experimenter
The participation reaction process for the gas that oneself needs.
But domestic previous vacuum types experimental facilities can only carry out a process mostly, specifically be exactly to work as to need to carry out
When other vacuum types experimentations, it is necessary to be reentered into after taking out sample under vacuum state in another vacuum chamber and take out again
Gas is simultaneously tested.But influence caused by sample contacts it with air in this process is unable to estimate, and serious person is even
It will cause sample pollution.And the process vacuumized extremely wastes time, and repeatedly pumping seriously affects working efficiency repeatedly.
Currently, domestic, there is no manufacturers to develop fully automatic vacuum interconnection class equipment, and foreign countries develop vacuum and mutually contact
The company of system is more, such as SPECS company, the CREATEC company of Germany.These companies can make phase according to customer requirement
The vacuum interacted system answered.Most such system handshaking is to carry out manually, compared with the product, what this patent was related to
Vacuum InterWorking Equipment ultimate vacuum is higher than the product of SPECE, and joining is fully automatic operation.
Summary of the invention
For the above problems of the prior art, the purpose of the present invention is to provide a kind of under ultrahigh vacuum
Automatic sample multistage manufacturing system.
To achieve the goals above, the invention adopts the following technical scheme:
A kind of automatic sample multistage manufacturing system under ultrahigh vacuum, including sample car walking passageway, magnetic coupling
Transmission system, transmission trolley component, bracket, vacuum-pumping system and control system are closed, wherein sample car walking passageway is mounted on
On the bracket, the vacuum-pumping system is connect with the sample car walking passageway, is taken out for the sample car walking passageway
Vacuum, the sample car walking passageway is interior to be equipped with the transmission trolley component travelled in orbit, the sample car walking passageway
Outside is equipped with magnetic coupling transmission system, and the magnetic coupling transmission system connect with control system point and by the control system
Control realize and the transmission trolley component magnetic coupling and drive the transmission trolley component forward.
The sample car walking passageway include by the sequentially connected Sample Room of Pneumatic gate valve, transition chamber, transfer chamber and
Transfer chamber is equipped with magnetic coupling transmission system on the outside of the Sample Room, transition chamber and transfer chamber.
The magnetic coupling transmission system includes toothed belt, driving cylinder, adjusts strut, positioning optocoupler, support beam, servo
Motor, limited block, guide rail and permanent magnetic steel, wherein support beam by adjust strut installation on the bracket and with it is described
Sample car walking passageway is parallel, and the support beam is equipped with guide rail, positioning optocoupler and tooth belt driver, the limited block
It is fixedly connected with the toothed belt in the tooth belt driver, the limited block is slidably connected by sliding block and the guide rail；
The driving cylinder is mounted on the limited block and output shaft is connect with the permanent magnetic steel.
The both ends of the guide rail are equipped with limit switch.Driving cylinder output power along the vertical direction.
The transmission trolley component includes cart base plate, vehicle wheel component, sample bracket and interior magnetic steel component, wherein trolley bottom
The bottom of plate is equipped with vehicle wheel component, and the top of the cart base plate is equipped with sample bracket, and the both ends of the cart base plate are equipped with
Interior magnetic steel component.
The interior magnetic steel component is mounted on the both ends of the cart base plate, the side of the cart base plate by magnet strut
Equipped with rack gear.
A kind of automatic sample multistage manufacturing method under ultrahigh vacuum, which is characterized in that
Sample car walking passageway is vacuumized by vacuum-pumping system；
Pallet equipped with sample is placed in transmission trolley component, the transmission trolley component is placed in sample car walking passageway
On interior track, the transmission trolley component is generated with the magnetic coupling transmission system being set to outside the sample car walking passageway
Magnetic drives cooperation, carry out sample transfer；
Control system control transmission trolley component completes the process joined to each experimental facilities in sample car walking passageway.
The sample car walking passageway include by the sequentially connected Sample Room of Pneumatic gate valve, transition chamber, transfer chamber and
Transfer chamber is equipped with the magnetic coupling transmission system, the transmission trolley group on the outside of the Sample Room, transition chamber and transfer chamber
Part carries out across slide valve transmission by magnetic coupling transmission system magnetic coupling, and each vacuum measurement and each slide valve are opened and transmission trolley
The transmission of component cooperates automatically.
Across the slide valve transmission process of the transmission trolley component is: the magnetic coupling transmission system is small with the transmission first
Vehicle component tail portion magnetic coupling is transmitted and pushes to next chamber across slide valve, the magnetic coupling transmission system outside next chamber
The head magnetic coupling of system and the transmission trolley component, the transmission trolley component is pulled in the chamber.
The advantages of the present invention are:
1. transition chamber pumpdown time of the present invention improves: transition chamber requires vacuum to be limited in 4 by -6Pa to -8Pa pumpdown time
Hour, it is solved using+1 sublimator of 1 400L/s ionic pump, pumpdown time can be improved in the use of sublimator.
2. vacuum of the present invention interconnection beforehand research equipment uses magnetic coupling transmission technology, which considers special high
The influence of the factors such as vaccum working condition environment and limited space realizes the reliable and stable transmission of sample.Transmission principle is to pass through electricity
Machine drives toothed belt to move outer steel, vacuum chamber internal-external magnetic steel coupling, and internal vacuum chamber trolley is driven to run along guide rail；
Crawling problems during trolley travelling are solved in such a way that NS grades of magnet steel are interspersed.
3. transfer chamber vacuum chamber welding technique of the present invention: guaranteeing 3m pipeline welding deformation by welding positioner.
4. transfer chamber vacuum chamber welding technique of the present invention: guaranteeing the deformation of end socket shape vacuum chamber by welding positioner.
Detailed description of the invention
Fig. 1 is overall structure diagram of the invention；
Fig. 2 is the top view of Fig. 1；
Fig. 3 is the left view of Fig. 1；
Fig. 4 is the structural schematic diagram of magnetic coupling transmission system in the present invention；
Fig. 5 is the top view of Fig. 4；
Fig. 6 is the left view of Fig. 4；
Fig. 7 is the structural schematic diagram that trolley component is transmitted in the present invention；
Fig. 8 is the top view of Fig. 7；
Fig. 9 is the left view of Fig. 7；
Figure 10 is the structural schematic diagram of pallet component in the present invention；
Figure 11 is that vacuum of the invention interconnects pneumatic schematic diagram.
Wherein, 1 is ionic pump, and 2 be transfer chamber, and 3 be magnetic coupling transmission system, and 301 be toothed belt, and 302 be drag chain, 303
To drive cylinder, 304 is adjust strut, and 305 be positioning optocoupler, and 306 be bearing block, and 307 be limit switch, and 308 is horizontal for support
Beam, 309 be servo motor, and 310 be limited block, and 311 be guide rail, 312 permanent magnetic steels, and 4 be transfer chamber, and 5 be transition chamber, 6 for into
Specimen chamber, 7 be magnetic force sample presentation, and 8 be transmission trolley component, and 801 be cart base plate, and 802 be rack gear, and 803 be spring washer, and 804 are
Fillister head screw, 805 be vehicle wheel component, and 806 be hex nut, and 807 be sample bracket, and 808 be hexagon socket cap head screw,
809 be interior magnetic steel component, and 810 be magnet strut, and 811 be hex nut, and 812 be sample carrier, and 813 be sample carrier tabletting, 9 for into
Sample transition bracket, 10 be transfer chamber bracket, and 11 be Sample Room bracket, and R is mechanical pump, and T is molecular pump, and V1, V2, V3 are pneumatic
Valve, V4, V5, V6, V7, V8, V9 are hand-operated valve, and V10 is electric butterfly valve, and G1, G2, G3, G4 are slide valve, and S1, S2, S3, S4 are
Ionic pump.
Specific embodiment
The present invention is described in further details in the following with reference to the drawings and specific embodiments.
As shown in Figure 1-3, a kind of automatic sample multistage manufacturing system under ultrahigh vacuum, including sample garage
Channel, magnetic coupling transmission system 3, transmission trolley component 8, bracket, vacuum-pumping system and control system are walked, wherein sample garage
Walk channel installation on the bracket, the vacuum-pumping system is connect with the sample car walking passageway, is used for the sample
Vehicle walking passageway vacuumizes, and the transmission trolley component 8 travelled in orbit, the sample are equipped in the sample car walking passageway
The outside of vehicle walking passageway is equipped with magnetic coupling transmission system 3, and the magnetic coupling transmission system 3 connect and leads to control system point
The control of the control system is crossed to realize with 8 magnetic coupling of transmission trolley component and before driving the transmission trolley component 8
Row.
The sample car walking passageway includes passing through the sequentially connected Sample Room 6 of Pneumatic gate valve, transition chamber 5, transfer chamber 2
And transfer chamber 4, the outside of the Sample Room 6, transition chamber 5 and transfer chamber 2 are equipped with magnetic coupling transmission system 3.The transmission is small
When vehicle component 8 is transmitted to the position of transfer chamber 4 by magnetic coupling transmission system 3, the magnetic force by being set to 2 outside of transfer chamber is sent
The sample transmitted in trolley component 8 is transmitted in transfer chamber 4 by sampling device 7.The magnetic force sample conveying device 7 is commercial products, purchase
It is placed in KurtJ.Lesker company, model EPP35-1219-H.
As Figure 4-Figure 6, the magnetic coupling transmission system 3 include toothed belt 301, driving cylinder 303, adjust strut 304,
Optocoupler 305, support beam 308, servo motor 309, limited block 310, guide rail 311 and permanent magnetic steel 312 are positioned, wherein support is horizontal
Beam 308 installs on the bracket and parallel with the sample car walking passageway, the support beam by adjusting strut 304
308 are equipped with guide rail 311, positioning optocoupler 305 and tooth belt driver, and the both ends of the guide rail 311 are equipped with limit switch
307.The limited block 310 is fixedly connected with the toothed belt 301 in the tooth belt driver, and the limited block 310 passes through
Sliding block is slidably connected with the guide rail 311；The driving cylinder 303 is mounted on the limited block 310 and output shaft with it is described
Permanent magnetic steel 312 connects, the driving cylinder 303 output power along the vertical direction.
The positioning optocoupler 305 gives transmission 8 one initial positions of trolley component, starts to calculate as zero point motor
Specific stroke realizes the monitoring to trolley shift position.The limit switch 307 is used to limit the movement of transmission trolley component 8
Range is prevented when electric signal fails, and transmission trolley component 8 is out of hand in pipeline caused by external magnet steel overexercise.
The tooth belt driver includes servo motor 309, toothed belt 301 and toothed belt, the support beam 308
Both ends be respectively equipped with toothed belt, two toothed belts are sequentially connected by toothed belt 301, and the servo motor 309 is installed
In the support beam 308 and output shaft is connect with toothed belt described in one of them.
As Figure 7-9, the transmission trolley component 8 includes cart base plate 801, vehicle wheel component 805, sample bracket 807
And interior magnetic steel component 809, wherein the bottom of cart base plate 801 is equipped with vehicle wheel component 805, and the top of the cart base plate 801 is set
There is sample bracket 807, the both ends of the cart base plate 801 are equipped with interior magnetic steel component 809.The interior magnetic steel component 809 passes through
Magnet strut 810 is mounted on the both ends of the cart base plate 801, and the side of the cart base plate 801 is equipped with rack gear 802.It is described
Sample bracket 807 is equipped with pallet component, and the pallet component includes sample carrier 812 and is fixedly mounted on sample carrier 812
Sample, the sample that the sample carrier 812 is set in the groove that sample bracket 807 is equipped with and is equipped with by sample bracket 807
Product backing pressure piece 813 compresses, as shown in Figure 10.
A kind of automatic sample multistage manufacturing method under ultrahigh vacuum,
Pallet equipped with sample is placed in transmission trolley component 8, it is logical that the transmission trolley component 8 is placed in sample car walking
On track in road, the transmission trolley component 8 and the magnetic coupling transmission system 3 being set to outside the sample car walking passageway
The magnetic drives of generation cooperate, and carry out sample transfer；
Control system control transmission trolley component 8 completes the mistake joined to each experimental facilities in sample car walking passageway
Journey；The control system by the specific location and local environment of corresponding program real-time display sample on computer interface,
Program is fed back to for carrying out automatic handshaking.
The sample car walking passageway includes passing through the sequentially connected Sample Room 6 of Pneumatic gate valve, transition chamber 5, transfer chamber 2
And transfer chamber 4, the outside of 6 transition chamber 5 of Sample Room and transfer chamber 2 are equipped with the magnetic coupling transmission system 3, the transmission
Trolley component 8 passes through across the gate valve transmission of magnetic coupling transmission system 3, vacuum measurement and each valve opening and the transmission trolley component
8 transmission cooperates automatically.
Across the slide valve transmission process of the transmission trolley component 8 is: the magnetic coupling transmission system 3 first with the transmission
8 tail portion magnetic coupling of trolley component is transmitted and pushes to next chamber across slide valve, magnetic coupling corresponding with next chamber
The head magnetic coupling of Transmission system 3 and the transmission trolley component 8, the transmission trolley component 8 is pulled in the chamber.
As shown in figure 11, vacuum of the invention interconnects pneumatic schematic diagram.Its course of work is: checking whether each section prepares
Process that is ready, being vacuumized since under atmospheric condition to whole equipment presses mechanical pump R switch, mechanical pump indicator light
It is bright, working machine pump at this time, then the solenoid valve R-DF switch at molecular pump T pumping hole is opened, indicator light is bright, opens compound meter, surveys
Measure vacuum.Other pumping valve V1 is opened, butterfly valve V10 standard-sized sheet first opens molecular pump T power switch, and the vacuum degree that gauge is shown is high
When 20Pa, other pumping valve V1 is closed, and open slide valve G1 rapidly, then open molecular pump T start button, acceleration indicating lamp
Bright, display frequency on power control panel, molecular pump starts to work normally, and about 8 minutes, acceleration indicating lamp went out, and normal lamp is bright, frequency
When rate is shown as 600, molecular pump enters normal operating conditions.Molecular pump continuous air extraction is used again, and the vacuum degree of Sample Room can reach
Final vacuum.Remaining each vacuum chamber is evacuated using molecule pump assembly, after pressure reaches -5Pa, starting ionic pump into
Row pumping.After each equipment operation in each room is normal, sample is begun placing into, into workflow.Sample Room exposes atmosphere: closing lock
Plate valve G1 confirms that other pumping valve V1 and angle valve V2, V3 and slide valve G2 are in close state, stops molecular pump T, then open vent valve
V2 is filled with drying nitrogen into Sample Room.It is packed into sample: opening Sample Room after Sample Room air pressure inside and external pressure balance
Door, setting-out product adjust trolley initial position in trolley corresponding position.It puts specimen chamber door into, closes vent valve V2, Sample Room is taken out true
It is empty.It is simultaneously respectively to vacuumize to remaining using unit.Sample Room is continued to vacuumize with molecular pump T+ mechanical pump R, it is compound
Vacuum meter monitoring closes slide valve G1, opens angle valve V1 after base vacuum reaches the desired requirement of this experiment.Close electricity
From rule, air inlet stop valve V3 is slowly opened, the gas extracted in pipeline at this time is filled with after reaching expected vacuum by flowmeter
Working gas.The size of angle is opened and closed by appropriate regulating butterfly valve V10 to adjust cleaning pressure.After reaching operating pressure,
Electric supply is adjusted, sample clean is carried out.After the completion of cleaning, it is pumped into specimen chamber vacuum, reaches 5x10-5Pa, remaining room vacuum to vacuum
Up to after 5x10-8Pa, slide valve G2 is opened, using magnetic coupling principle, trolley travelling is controlled by computer, trolley both ends are all
There are magnet assemblies, trolley front end magnet be sent by transition chamber using pipeline external magnet absorption trolley rear end when across slide valve,
Its front end magnet is adsorbed by transition chamber pipeline periphery magnet again, trolley is finally introduced into transition chamber, then to trolley completely into mistake
After crossing room, magnet disengagement in transition chamber periphery looks for trolley rear end magnet automatically, is that trolley and sample enter the transmission for being used for work
It is ready room.Hereafter slide valve G2 is closed；After transition chamber vacuum is restored to 5x10-8Pa, slide valve G4 is opened, meter is passed through
Calculation machine controls trolley travelling, after trolley is completely into transfer chamber, closes slide valve G4, trolley travelling to delivery position；It opens
Slide valve G5, computer, which is controlled, requires to complete sample in the transport of each station or detection position according to the different of technique.This it
After sample can be taken out in the same way, place into new sample and carry out new a wheel experiment and detection.
Claims (9)
1. a kind of automatic sample multistage manufacturing system under ultrahigh vacuum, which is characterized in that
Including sample car walking passageway, magnetic coupling transmission system (3), transmission trolley component (8), bracket, vacuum-pumping system and
Control system, wherein the installation of sample car walking passageway on the bracket, walk by the vacuum-pumping system and the sample car
Channel connection, vacuumizes for the sample car walking passageway, is equipped in the sample car walking passageway and to travel in orbit
It transmits trolley component (8), the outside of the sample car walking passageway is equipped with magnetic coupling transmission system (3), the magnetic coupling transmission
System (3) connect with control system point and is realized by the control of the control system and transmission trolley component (8) magnetic
Couple and drive the transmission trolley component (8) to move ahead；
The magnetic coupling transmission system (3) includes toothed belt (301), driving cylinder (303), adjusts strut (304), positioning optocoupler
(305), support beam (308), servo motor (309), limited block (310), guide rail (311) and permanent magnetic steel (312), wherein propping up
Support crossbeam (308) is on the bracket and parallel with the sample car walking passageway by adjusting strut (304) installation, described
Support beam (308) is equipped with guide rail (311), positioning optocoupler (305) and tooth belt driver, the limited block (310) with
Toothed belt (301) in the tooth belt driver is fixedly connected, and the limited block (310) passes through sliding block and the guide rail
(311) it is slidably connected；The driving cylinder (303) is mounted on the limited block (310), described to drive the defeated of cylinder (303)
Shaft is connect with the permanent magnetic steel (312).
2. the automatic sample multistage manufacturing system according to claim 1 under ultrahigh vacuum, which is characterized in that
The sample car walking passageway include by the sequentially connected Sample Room of Pneumatic gate valve (6), transition chamber (5), transfer chamber (2) and
Transfer chamber (4) is equipped with magnetic coupling transmission system (3) on the outside of the Sample Room (6), transition chamber (5) and transfer chamber (2).
3. the automatic sample multistage manufacturing system according to claim 1 under ultrahigh vacuum, which is characterized in that
The both ends of the guide rail (311) are equipped with limit switch (307).
4. the automatic sample multistage manufacturing system according to claim 1 under ultrahigh vacuum, which is characterized in that
The driving cylinder (303) output power along the vertical direction.
5. the automatic sample multistage manufacturing system according to claim 1 under ultrahigh vacuum, which is characterized in that
The transmission trolley component (8) includes cart base plate (801), vehicle wheel component (805), sample bracket (807) and interior magnetic steel component
(809), wherein the bottom of cart base plate (801) is equipped with vehicle wheel component (805), and the top of the cart base plate (801) is equipped with sample
The both ends of product bracket (807), the cart base plate (801) are equipped with interior magnetic steel component (809).
6. the automatic sample multistage manufacturing system according to claim 5 under ultrahigh vacuum, which is characterized in that
The interior magnetic steel component (809) is mounted on the both ends of the cart base plate (801), the trolley bottom by magnet strut (810)
The side of plate (801) is equipped with rack gear (802).
7. a kind of utilize the automatic sample multistage manufacturing system described in any one of claims 1-6 under ultrahigh vacuum
Production method, which is characterized in that
Sample car walking passageway is vacuumized by vacuum-pumping system；
Pallet equipped with sample is placed in transmission trolley component (8), it is logical that the transmission trolley component (8) is placed in sample car walking
On track in road, transmission trolley component (8) and the magnetic coupling transmission system being set to outside the sample car walking passageway
The magnetic drives that (3) generate of uniting cooperate, and carry out sample transfer；
The process joined to each experimental facilities is completed in control system control transmission trolley component (8) in sample car walking passageway.
8. the method according to the description of claim 7 is characterized in that the sample car walking passageway includes passing through Pneumatic gate valve
Sequentially connected Sample Room (6), transition chamber (5), transfer chamber (2) and transfer chamber (4), the Sample Room (6), transition chamber (5) and
The magnetic coupling transmission system (3) is equipped on the outside of transfer chamber (2), the transmission trolley component (8) passes through magnetic coupling transmission
System (3) magnetic coupling carries out across slide valve transmission, and each vacuum measurement and each slide valve open the transmission with transmission trolley component (8)
Automatic cooperation.
9. according to the method described in claim 8, it is characterized in that, across the slide valve transmission process of the transmission trolley component (8)
Be: the magnetic coupling transmission system (3) is transmitted and with transmission trolley component (8) tail portion magnetic coupling across flashboard first
Valve pushes to next chamber, the head magnetic of the magnetic coupling transmission system (3) outside next chamber and transmission trolley component (8)
Coupling, the transmission trolley component (8) is pulled in the chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510828015.1A CN106769273B (en) | 2015-11-24 | 2015-11-24 | A kind of automatic sample multistage manufacturing system and method under ultrahigh vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510828015.1A CN106769273B (en) | 2015-11-24 | 2015-11-24 | A kind of automatic sample multistage manufacturing system and method under ultrahigh vacuum |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106769273A CN106769273A (en) | 2017-05-31 |
| CN106769273B true CN106769273B (en) | 2019-06-04 |
Family
ID=58963996
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510828015.1A Active CN106769273B (en) | 2015-11-24 | 2015-11-24 | A kind of automatic sample multistage manufacturing system and method under ultrahigh vacuum |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106769273B (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107973073B (en) * | 2017-11-30 | 2019-04-30 | 清华大学 | Sample transfer device for ultra-high vacuum sample transfer system |
| CN110441100B (en) * | 2018-05-02 | 2022-04-01 | 南京理工大学 | Vacuum interconnection system for preparing nano powder and realizing in-situ ultrahigh pressure forming |
| CN109161867B (en) * | 2018-10-11 | 2023-08-08 | 中国科学技术大学 | Separable vacuum interconnection system |
| CN111674931A (en) * | 2020-06-20 | 2020-09-18 | 上海实路真空技术工程有限公司 | Continuous driving device for conveying sample pipeline between vacuum systems |
| CN114014018B (en) * | 2021-11-16 | 2023-05-26 | 仪晟科学仪器(嘉兴)有限公司 | Ultrahigh vacuum sample transfer device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994001354A1 (en) * | 1992-07-07 | 1994-01-20 | Ebara Corporation | Magnetically levitated carrying apparatus |
| CN201010337Y (en) * | 2007-03-05 | 2008-01-23 | 张栋楠 | Workpiece conveying device |
| CN101958371A (en) * | 2010-10-13 | 2011-01-26 | 中国科学院深圳先进技术研究院 | Copper Indium Gallium Selenium Thin Film Solar Cell Preparation Device |
| JP2011029540A (en) * | 2009-07-29 | 2011-02-10 | Canon Anelva Corp | Vacuum processing device, substrate conveying device, and film forming method |
| CN103046017A (en) * | 2012-12-29 | 2013-04-17 | 中国科学院沈阳科学仪器股份有限公司 | Chain transmission mechanism applicable to field of vacuum coating |
-
2015
- 2015-11-24 CN CN201510828015.1A patent/CN106769273B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994001354A1 (en) * | 1992-07-07 | 1994-01-20 | Ebara Corporation | Magnetically levitated carrying apparatus |
| CN201010337Y (en) * | 2007-03-05 | 2008-01-23 | 张栋楠 | Workpiece conveying device |
| JP2011029540A (en) * | 2009-07-29 | 2011-02-10 | Canon Anelva Corp | Vacuum processing device, substrate conveying device, and film forming method |
| CN101958371A (en) * | 2010-10-13 | 2011-01-26 | 中国科学院深圳先进技术研究院 | Copper Indium Gallium Selenium Thin Film Solar Cell Preparation Device |
| CN103046017A (en) * | 2012-12-29 | 2013-04-17 | 中国科学院沈阳科学仪器股份有限公司 | Chain transmission mechanism applicable to field of vacuum coating |
Non-Patent Citations (1)
| Title |
|---|
| 磁力耦合器在真空设备上的应用和设计;姬全胜 等;《甘肃科技》;20130331;第50-52页 |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106769273A (en) | 2017-05-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106769273B (en) | A kind of automatic sample multistage manufacturing system and method under ultrahigh vacuum | |
| CN108152181B (en) | Whole movable double-station particulate matter monitoring device of paper feeding mechanism | |
| CN206961233U (en) | A kind of packaged type vertical lifting connects goods device | |
| CN103979133B (en) | A kind of shunting conveying line device of liquid detergent | |
| CN208050400U (en) | Test system for detecting battery aluminum shell air-tightness | |
| CN114952273A (en) | Full-automatic truckle production equipment | |
| CN102043065B (en) | Door quantitative force application device applied to automobile manufacturing process and application method thereof | |
| CN103395629B (en) | Automatic dismounting and stacking device for front windshield of car | |
| CN106841650A (en) | Chemical illumination immunity analysis instrument multi-channel testing device | |
| CN202814710U (en) | Moving flat plate type brake performance detection table | |
| CN203612546U (en) | Walking mechanism for glass fiber automatic transfer robot | |
| CN206750739U (en) | Positioning conveyer device people is used in a kind of solar thermal collector production | |
| CN105891643A (en) | Automobile door handle detecting device | |
| CN107285004A (en) | A kind of automobile production line balance positioning fixture | |
| CN110793786A (en) | Indoor ACC function offline detection device of intelligent automobile | |
| CN202484329U (en) | Electric sliding valve | |
| CN210037104U (en) | Battery steel casing gas tightness detection mechanism | |
| CN206330939U (en) | A kind of intelligent braking piece monitor station | |
| CN204154486U (en) | EFI valve body durability test desk | |
| CN104236509B (en) | Pinch roller position-changing mechanism applied to drive gear and driven gear gap detection | |
| CN114778988A (en) | High-temperature aging test system | |
| CN209193047U (en) | Automatic loading and unloading plate sucking machine for mirror steel grinding production line | |
| CN206359211U (en) | Continuous elevator | |
| CN206430895U (en) | Saucer turnover panel pushes fatigue test device under a kind of automobile | |
| CN101666713A (en) | Device for measuring flexibility of tappet body component of automobile engine fuel oil system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |