CN106767414B

CN106767414B - Single-particle magnetic field-guided micro-size measurement device based on magnetic fluorescent microspheres and measurement method based on the device

Info

Publication number: CN106767414B
Application number: CN201611228160.7A
Authority: CN
Inventors: 倪赫; 邹丽敏; 张鹏; 丁雪梅
Original assignee: Harbin Institute of Technology Shenzhen
Current assignee: Harbin Institute of Technology Shenzhen
Priority date: 2016-12-27
Filing date: 2016-12-27
Publication date: 2019-06-11
Anticipated expiration: 2036-12-27
Also published as: CN106767414A

Abstract

A single particle magnetic field guiding micro-size measuring device based on magnetic fluorescent microspheres and a measuring method based on the device relate to the technical field of industrial sample micro-size measurement. The invention aims to solve the problems that in the existing three-dimensional measuring method of the micro-size industrial sample, a probe is difficult to realize miniaturization, the measurement is limited by the inherent frequency of the probe, the measurement depends on the bearing of a high-precision motion mechanism, and the scanning measurement speed is low. The single particle magnetic field guiding micro-size measuring device based on the magnetic fluorescent microspheres and the method based on the device immerse a sample to be measured in a solution containing the single magnetic fluorescent microspheres, apply a specific changing magnetic field from the outside to enable the single magnetic fluorescent microspheres to move along the edges of the sample in the solution, collect images by a camera and fit the radial displacement of the microspheres, obtain the axial displacement of the microspheres according to the intensity of the collected fluorescent light, fit the positions of the microspheres in the collected pictures and reconstruct the images to obtain sample information, and finish sample measurement.

Description

Single-particle magnetic field based on magnetic fluorescent microspheres is oriented to Micro-dimension detection device and is based on The measurement method of the device

Technical field

The invention belongs to production piece Micro-dimension detection technical fields.

Background technique

Presently the most effective micro-dimension production piece method for three-dimensional measurement is to utilize miniature three coordinate measuring machine and contact Formula probe sensor-based system combines to measure.The measurement method measuring principle is that external movement mechanism drives probe to contact quilt It surveys part and generates touching survey signal, probe sensor-based system detects the signal, and records the position coordinates of probe gauge head at this time.According to This experimentation replacement position measures again, finally obtains a large amount of probe location coordinates, is fitted weight to position coordinates Structure obtains the three-dimensional dimension information of measured workpiece.

In the document of one delivered for 2011 entitled " the nanometer coordinate measuring system based on three-dimensional micro-touch gauge head " Discuss the current situation of nanometer coordinate measuring machine and three-dimensional micro-touch gauge head, it is noted that a variety of to be applied to micro-dimension production piece The probe sensor-based system of measurement, probe all have elongate rod-like structures.

The document intermediary of one delivered for 2011 entitled " smooth surface ring gauge measurement method based on the measurement of single ball " a kind of Continued a kind of smooth surface ring gauge single ball mensuration basic principle and operating method.Standard ball is installed and constitutes a list in connecting rod bottom Talent scout's needle, probe touching measured piece are subjected to displacement, and displacement sensor records offset displacement, the comprehensive standard radius of a ball, bits of offset Ring Gauge Inner Diameter can be obtained in shifting.

But existing measurement method described in above-mentioned document is disadvantageous in that:

(1) probe is not easy to realize micromation, and gauge head size is larger, and application range is limited；

(2) measurement is limited by probe intrinsic frequency；

(3) measurement relies on the carrying of high-precision motion mechanism；

(4) scanning survey speed is low.

Summary of the invention

The present invention be in order to solve in existing micro-dimension production piece method for three-dimensional measurement, probe be not easy realize micromation, Measurement is limited by probe intrinsic frequency, is measured the carrying of dependence high-precision motion mechanism and the problem that scanning survey speed is low, Single-particle magnetic field guiding Micro-dimension detection device based on magnetic fluorescent microspheres and the measurement method based on the device are now provided.

Single-particle magnetic field based on magnetic fluorescent microspheres is oriented to Micro-dimension detection device, the device include: dichroscope 2, Object lens 3, sample room 5, magnetic fluorescent microspheres 6, two layers of controllable magnetic pole 7, collecting lens 9 and CCD10；

CCD10, collecting lens 9, dichroscope 2, object lens 3 and sample room 5 are from top to bottom successively arranged along optical axis；

Exciting light light beam 1 is incident upon dichroscope 2, after the reflection of dichroscope 2, is incident in sample room 5 by object lens 3, The solution containing magnetic fluorescent microspheres 6 is filled in sample room 5,

Two layers of controllable magnetic pole 7 is uniformly arranged around sample room 5, and two layers of controllable magnetic pole 7 is mutually aligned and along optical axis axis To setting,

Magnetic fluorescent microspheres 6 under the effect of exciting light light beam 1 fluorescent light beam 8 that inspires successively by object lens 3 and two to It is assembled after Look mirror 2 through collecting lens 9, images in CCD10.

Measurement method based on above-mentioned apparatus, this method are as follows:

It is partially immersed in sample 4 is to be measured in the solution containing magnetic fluorescent microspheres 6, adjusts exciting light light beam 1 light intensity, exciting light light beam 1 are incident upon dichroscope 2, and the reflected light of dichroscope 2 exposes to magnetic fluorescent microspheres 6 through object lens 3, Magnetic fluorescent microspheres 6 are made to launch fluorescence 8；

Magnetic field strength and the direction for changing two layers of controllable magnetic pole 7, enable magnetic fluorescent microspheres 6 along sample 4 to The edge of measurement part is moved, and the motion path of microballoon is the profile of sample to be tested part to be measured；

Several magnetic fluorescent microspheres 6 are acquired in different location imaging using CCD10,

Magnetic fluorescent microspheres 6 are obtained along the position of optical axis axial direction according to the light distribution of fluorescence hot spot in every piece image, Magnetic fluorescent microspheres 6 are obtained along the position of optical axis radial direction according to the position of fluorescence hot spot in every piece image,

Image reconstruction is carried out along the position of optical axis axially and radially according to magnetic fluorescent microspheres 6 in every piece image, is obtained Sample message completes the dimensional measurement of sample 4.

Magnetic fluorescent microspheres are mainly used in chemistry and field of biomedicine at present, are usually used in the purification of biological sample, carefully Born of the same parents' separation and single molecule force spectroscopy etc., and magnetic fluorescent microspheres are applied to production piece Micro-dimension detection by the present invention.

The heretofore described single-particle magnetic field based on magnetic fluorescent microspheres is oriented to Micro-dimension detection device and is based on being somebody's turn to do Sample to be tested is immersed in the solution containing single magnetic fluorescent microspheres by the measurement method of device, and the external world applies specific change Magnetic field, move single magnetic fluorescent microspheres in solution along sample edge, work of the magnetic fluorescent microspheres in exciting light Fluorescence is issued with magnetic fluorescent microsphere, acquire image with camera and fits microballoon radial displacement, according to collected fluorescence Light intensity obtains its axial displacement, acquires multiple photos, the microballoon position in the multiple pictures collected is fitted and is gone forward side by side Sample message can be obtained in row image reconstruction, completes sample three-dimensional measurement.

The present invention breaches the concepts such as conventional probe draw ratio, frequency response, does not depend on the carrying of high-precision motion mechanism, It realizes to the quick scanning survey of sample, overcomes the increase of the uncertain bring time of measuring of the position of microballoon.

The invention has the advantages that

(1) a kind of contact type probe without measuring staff is formd, it is general to breach conventional probe draw ratio, frequency response etc. It reads；

(2) carrying of high-precision motion mechanism is not depended at work, therefore avoids error caused by mechanical oscillation；

(3) it realizes the quick scanning survey to sample, overcomes the uncertain bring measurement of the position of microballoon The increase of time；

(4) gauge head size, that is, magnetic fluorescent microspheres are small-sized, and measurement can be unfolded in minimum measurement space.

Detailed description of the invention

Fig. 1 is that the single-particle magnetic field described in specific embodiment one based on magnetic fluorescent microspheres is oriented to Micro-dimension detection dress The structural schematic diagram set；

Fig. 2 is that camera acquires a photo and is fitted magnetic fluorescent microspheres position view；

Fig. 3 is camera multi collect and carries out image reconstruction schematic diagram.

Specific embodiment

Specific embodiment 1: present embodiment is illustrated referring to Fig.1, based on magnetic fluorescence described in present embodiment The single-particle magnetic field of microballoon is oriented to Micro-dimension detection device, which includes: dichroscope 2, object lens 3, sample room 5, magnetic glimmering Light microballoon 6, two layers of controllable magnetic pole 7, collecting lens 9 and CCD10 (Charge Coupled Device, charge coupling device image Sensor)；

In practical application, sample 4 is immersed in working solution, using two layers of controllable magnetic pole 7 to single magnetic fluorescence Microballoon 6 applies the magnetic field of specific change, makes the single magnetic fluorescent microspheres 6 in solution along the part to be measured of sample 4 Edge is moved, and magnetic fluorescent microspheres 6 issue fluorescence under the action of exciting light light beam 1, the fluorescence magnetic fluorescent microsphere 6 hair Fluorescent light beam 8 out successively after object lens 3 and dichroscope 2, is assembled through collecting lens 9, images in CCD10, CCD10 acquisition Image in the position containing fluorescence hot spot and intensity signal, and fit microballoon radial displacement in the photo collected Fluorescence hot spot is fitted to obtain the radial displacement of magnetic fluorescent microspheres, obtains it according to collected fluorescence hot spot light intensity magnitude Axial displacement acquires multiple photos, the microballoon position in the multiple pictures collected is intended along the displacement of optical axis direction Merging progress image reconstruction can be obtained sample message, complete sample three-dimensional measurement.

Specific embodiment 2: present embodiment be to described in specific embodiment one based on the list of magnetic fluorescent microspheres Particle magnetic field guiding Micro-dimension detection device is described further, in present embodiment, 6 particle size of used magnetic fluorescent microsphere Less than 50 microns.

Specific embodiment 3: present embodiment be to described in specific embodiment one based on the list of magnetic fluorescent microspheres Particle magnetic field guiding Micro-dimension detection device is described further, and in present embodiment, the quantity of every layer of controllable magnetic pole 7 is greater than two It is a.

Specific embodiment 4: illustrating present embodiment referring to Fig. 2 and Fig. 3, present embodiment is based on specific real Apply the measurement method of the single-particle magnetic field guiding Micro-dimension detection device described in mode one based on magnetic fluorescent microspheres, this method Are as follows:

In present embodiment, in practical application, sample 4 is immersed in the solution containing magnetic fluorescent microspheres 6, The magnetic field that using two layers of controllable magnetic pole 7 single magnetic fluorescent microspheres 6 are applied with specific change, makes the single magnetic fluorescent microspheres 6 Edge in solution along sample 4 is moved, and magnetic fluorescent microspheres 6 issue fluorescence under the action of exciting light light beam 1, The fluorescence is successively collected the collection of lens 9 after immersion objective 3 and dichroscope 2, is in using CCD10 acquisition collecting lens 9 Position containing fluorescence hot spot and intensity signal in the image revealed the image, and microballoon radial displacement is fitted to collecting Photo in fluorescence hot spot be fitted to obtain the radial displacement of magnetic fluorescent microspheres, according to collected fluorescence hot spot light intensity Size obtains its axial displacement along the displacement of optical axis direction, multiple photos is acquired, by the microballoon in the multiple pictures collected Position, which is fitted and carries out image reconstruction, can be obtained sample message, complete sample three-dimensional measurement.

The driving method of two layers of controllable magnetic pole 7, which is divided into, is axially finely divided driving, control input using current phasor method Each phase excitation winding in electric current, make it zero to can have multiple stable intermediate current states, institute between maximum phase current With corresponding magnetic vector amplitude and direction there is also multiple stable intermediate state, the exciting current of multiple and different windings is generated Magnetic field carry out it is vector superposed, to realize subdivision.Its resultant vector amplitude decision 6 stress size of magnetic fluorescent microspheres, and phase Adjacent two resultant magnetic field vector angles determine Impact direction.Similarly in axial direction, the upper layer and lower layer excitation winding of parallel alignment Driving current is proportional, the magnetic field that the exciting current of axial winding generates carry out in the axial direction it is vector superposed, to realize It is axially driving.

Wherein, while controlling the movement of magnetic fluorescent microspheres 6, it is also necessary to be determined according to the collected pictures of CCD10 institute The position of magnetic fluorescent microspheres 6, and then changes of magnetic field is controlled to drive the moving direction of magnetic fluorescent microspheres 6, realize that closed loop is anti- Feedback control.It is being distinguished in liquid and can control participation imaging magnetic fluorescent microspheres only one.

As shown in Fig. 2, the image of camera one acquisition and 6 position of magnetic fluorescent microspheres fitted.

As shown in figure 3, after camera carries out multi collect and being fitted magnetic fluorescent microspheres position, it is random then to carry out image Reconstruct obtains can be obtained by the profile of clearly sample 4, and sample profile is as shown in the figure.

Claims

1. A single-particle magnetic field-guided micro-size measurement method based on magnetic fluorescent microspheres, the method is based on the following device, the device comprising: a dichroic mirror (2), an objective lens (3), a sample chamber (5), a magnetic fluorescent micrometer a ball (6), two layers of controllable magnetic poles (7), a collecting lens (9) and a CCD (10);

A CCD (10), a collecting lens (9), a dichroic mirror (2), an objective lens (3) and a sample chamber (5) are arranged in sequence from top to bottom along the optical axis;

The excitation light beam (1) is emitted to the dichroic mirror (2), after being reflected by the dichroic mirror (2), it is incident into the sample chamber (5) through the objective lens (3), and the sample chamber (5) contains a a solution of a single magnetic fluorescent microsphere (6);

The two layers of controllable magnetic poles (7) are uniformly arranged around the sample chamber (5), and the two layers of controllable magnetic poles (7) are aligned with each other and are arranged axially along the optical axis;

The fluorescent light beam (8) excited by the magnetic fluorescent microspheres (6) under the action of the excitation light beam (1) passes through the objective lens (3) and the dichroic mirror (2) in turn, and then is converged by the collecting lens (9), and then imaged on the CCD. (10);

The method is characterized in that: the part to be measured of the sample (4) to be measured is immersed in a solution containing magnetic fluorescent microspheres (6), the light intensity of the excitation light beam (1) is adjusted, and the excitation light beam (1) is adjusted. ) to the dichroic mirror (2), the reflected light of the dichroic mirror (2) is irradiated to the magnetic fluorescent microspheres (6) through the objective lens (3), so that the magnetic fluorescent microspheres (6) emit fluorescence (8) ;

By changing the magnetic field strength and magnetic field direction of the two-layer controllable magnetic poles (7), a single magnetic fluorescent microsphere (6) in the control solution can be moved along the edge of the part to be measured of the sample (4) to be measured, and the movement path of the microsphere is to be Measure the contour of the part to be measured;

The CCD (10) is used to collect a plurality of images formed by the magnetic fluorescent microspheres (6) at different positions;

The position of the magnetic fluorescent microspheres (6) along the axis of the optical axis is obtained according to the light intensity distribution of the fluorescent light spots in each image, and the diameter of the magnetic fluorescent microspheres (6) along the optical axis is obtained according to the position of the fluorescent light spots in each image to the location;

Image reconstruction is performed according to the positions of the magnetic fluorescent microspheres (6) along the axial and radial directions of the optical axis in each image, to obtain sample information, and to complete the size measurement of the tested sample (4).

2 . The single-particle magnetic field-guided micro-size measurement method based on magnetic fluorescent microspheres according to claim 1 , wherein the particle size of the magnetic fluorescent microspheres ( 6 ) used is less than 50 microns. 3 .

3. The single-particle magnetic field-guided micro-size measurement method based on magnetic fluorescent microspheres according to claim 1, wherein the number of controllable magnetic poles (7) in each layer is greater than two.