CN106757349A - Rare earth crystal growth equipment, rare earth crystal growth technique and application - Google Patents
Rare earth crystal growth equipment, rare earth crystal growth technique and application Download PDFInfo
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- 239000013078 crystal Substances 0.000 title claims abstract description 195
- 229910052761 rare earth metal Inorganic materials 0.000 title claims abstract description 69
- 150000002910 rare earth metals Chemical class 0.000 title claims abstract description 64
- 238000000034 method Methods 0.000 title claims abstract description 42
- 230000008569 process Effects 0.000 claims abstract description 30
- 238000010438 heat treatment Methods 0.000 claims abstract description 17
- 239000000498 cooling water Substances 0.000 claims abstract description 12
- 239000012774 insulation material Substances 0.000 claims description 34
- 239000002994 raw material Substances 0.000 claims description 29
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical group O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 24
- 239000011810 insulating material Substances 0.000 claims description 19
- 230000001681 protective effect Effects 0.000 claims description 16
- 238000005245 sintering Methods 0.000 claims description 14
- 229910052741 iridium Inorganic materials 0.000 claims description 12
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical group [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 claims description 12
- 238000002156 mixing Methods 0.000 claims description 11
- 230000006698 induction Effects 0.000 claims description 8
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 claims description 7
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 claims description 7
- 238000002844 melting Methods 0.000 claims description 5
- 230000008018 melting Effects 0.000 claims description 5
- -1 rare earth orthosilicate Chemical class 0.000 claims description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- 239000000463 material Substances 0.000 description 14
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 12
- 239000007788 liquid Substances 0.000 description 11
- 239000000155 melt Substances 0.000 description 11
- 238000010899 nucleation Methods 0.000 description 11
- 239000007789 gas Substances 0.000 description 9
- 238000009413 insulation Methods 0.000 description 6
- 229910052757 nitrogen Inorganic materials 0.000 description 6
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000012768 molten material Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 239000007791 liquid phase Substances 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 2
- 229910052691 Erbium Inorganic materials 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910052775 Thulium Inorganic materials 0.000 description 1
- 229910052769 Ytterbium Inorganic materials 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000005856 abnormality Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052605 nesosilicate Inorganic materials 0.000 description 1
- 238000009206 nuclear medicine Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 239000008207 working material Substances 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/22—Complex oxides
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
- C30B15/26—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using television detectors; using photo or X-ray detectors
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
本发明提供了一种稀土晶体生长设备,该稀土生长设备包括:晶体生长炉;所述晶体生长炉的内部设置有加热元件;所述晶体生长炉的炉膛顶端设置有观测视窗;所述晶体生长炉的炉膛顶端的外部、所述观测视窗的外围设置有循环冷却水系统;所述晶体生长炉的炉膛顶端的外部、所述观测视窗的上部设置有图像观测元件。与现有技术相比,本发明在晶体生长炉的顶端的观测视窗外部设置循环冷却水系统,可带走晶体生长过程中向炉膛顶端传递的热量,为观测视窗外安装图像观测元件提供了合适的工作环境,而通过图像观测元件可实现晶体提拉炉的远程观测。
The invention provides a rare earth crystal growth equipment, which comprises: a crystal growth furnace; a heating element is arranged inside the crystal growth furnace; an observation window is arranged on the furnace top of the crystal growth furnace; A circulating cooling water system is provided outside the furnace top of the furnace and the periphery of the observation window; an image observation element is provided outside the furnace top of the crystal growth furnace and above the observation window. Compared with the prior art, the present invention arranges a circulating cooling water system outside the observation window at the top of the crystal growth furnace, which can take away the heat transferred to the top of the furnace during the crystal growth process, and provides a suitable environment for installing image observation elements outside the observation window. working environment, and the remote observation of the crystal pulling furnace can be realized through the image observation element.
Description
技术领域technical field
本发明涉及晶体材料技术领域,具体涉及由稀土晶体生长设备、稀土晶体生长工艺及应用。The invention relates to the technical field of crystal materials, in particular to rare earth crystal growth equipment, a rare earth crystal growth process and its application.
背景技术Background technique
稀土功能晶体材料作为光、声、电等转换的重要媒介,能够为多种重要关键器件提供高品质工作物质。稀土闪烁晶体具有高密度、高光输出、快衰减的特性,满足了高能物理、核医学等应用领域对闪烁体的基本要求,稀土光电晶体材料能够实现电、光的相互作用和转换,被广泛地应用于通信、宇航、医学、地质学、气象学、建筑学、军事技术等领域。Rare-earth functional crystal materials, as an important medium for the conversion of light, sound, and electricity, can provide high-quality working materials for a variety of important key devices. Rare earth scintillation crystals have the characteristics of high density, high light output, and fast attenuation, which meet the basic requirements for scintillators in high-energy physics, nuclear medicine and other application fields. Rare earth optoelectronic crystal materials can realize the interaction and conversion of electricity and light, and are widely used It is used in communication, aerospace, medicine, geology, meteorology, architecture, military technology and other fields.
法国Cyberstar公司生产的晶体生长炉被公认为具有最好的综合性能,能够实现电脑控制智能控制晶体的全程生长。但在晶体生长全过程中,需要晶体生长人员进行实时观测以便随时调节生长参数,在这一过程中,会带来频繁的人为扰动,影响稀土晶体质量。The crystal growth furnace produced by the French company Cyberstar is recognized as having the best comprehensive performance, which can realize the whole process of computer-controlled and intelligently controlled crystal growth. However, during the whole process of crystal growth, crystal growth personnel are required to conduct real-time observations to adjust growth parameters at any time. In this process, frequent artificial disturbances will be brought and affect the quality of rare earth crystals.
并且,通用晶体生长炉膛上方设有观测元件,方便晶体生长人员进行前期熔料判断、引晶操作、及后期实时观察晶体生长过程,出现任何异常及时处理。为了避免观测孔受到炉顶高温的影响(高温熔体沿轴向向上传热),观测孔体积小,这种小面积上观测孔能够有效避免晶体生长人员接触过多热量。这类上观测孔观测面积小且倾斜一定的角度,使得晶体生长人员能够尽量观测到炉膛内部及温场结构内部事件,方便处理晶体提拉生长过程中的异常情况。但由于上观测元件观测面积过小,在生长大尺寸高温稀土晶体时,由保温材料搭建的温场结构观测孔开于温场上方,即只能利用上观测元件进行监测,炉膛上方观测孔过小导致晶体提拉生长过程中只能通过晶体生长人员进行肉眼观测,即生长过程图像无法实现远程监控和记录。在稀土晶体生长中,这将造成极大的人力资源浪费。此外,市售的提拉生长设备大多是通用晶体生长设备,需要晶体生长人员针对拟生长的晶体自行搭建温场结构进行生长,缺乏稀土晶体生长专用提拉生长设备。In addition, there is an observation element above the general crystal growth furnace, which is convenient for crystal growth personnel to judge the melting material in the early stage, seed the crystal operation, and observe the crystal growth process in real time in the later stage, and deal with any abnormalities in time. In order to prevent the observation hole from being affected by the high temperature of the furnace top (the high-temperature melt transfers heat upward in the axial direction), the observation hole is small in size, and the observation hole on such a small area can effectively prevent crystal growth personnel from being exposed to too much heat. This type of upper observation hole has a small observation area and is inclined at a certain angle, so that crystal growth personnel can observe events inside the furnace and the internal temperature field structure as much as possible, and it is convenient to deal with abnormal conditions during the crystal pulling and growing process. However, due to the small observation area of the upper observation element, when growing large-scale high-temperature rare earth crystals, the observation hole of the temperature field structure constructed by the insulation material is opened above the temperature field, that is, the upper observation element can only be used for monitoring, and the observation hole above the furnace is too large. Due to the small size, the crystal growth process can only be observed with the naked eye by crystal growth personnel, that is, the images of the growth process cannot be remotely monitored and recorded. In rare earth crystal growth, this will cause a great waste of human resources. In addition, most of the pulling growth equipment available on the market is general-purpose crystal growth equipment, which requires crystal growth personnel to build a temperature field structure for the crystal to be grown, and there is a lack of special pulling growth equipment for rare earth crystal growth.
发明内容Contents of the invention
有鉴于此,本发明要解决的技术问题在于提供稀土晶体生长设备、稀土晶体生长工艺及应用,该生长设备可实现晶体提拉炉的远程观测。In view of this, the technical problem to be solved by the present invention is to provide rare earth crystal growth equipment, rare earth crystal growth process and application, and the growth equipment can realize remote observation of crystal pulling furnace.
本发明提供了一种稀土晶体生长设备,包括:The invention provides a rare earth crystal growth equipment, comprising:
晶体生长炉;Crystal growth furnace;
所述晶体生长炉的内部设置有加热元件;The interior of the crystal growth furnace is provided with a heating element;
所述晶体生长炉的炉膛顶端设置有观测视窗;The top of the furnace of the crystal growth furnace is provided with an observation window;
所述晶体生长炉的炉膛顶端的外部、所述观测视窗的外围设置有循环冷却水系统;A circulating cooling water system is arranged on the outside of the furnace top of the crystal growth furnace and the periphery of the observation window;
所述晶体生长炉的炉膛顶端的外部、所述观测视窗的上部设置有图像观测元件。The outside of the top of the furnace of the crystal growth furnace and the upper part of the observation window are provided with an image observation element.
优选的,所述观测视窗的直径为50~80mm。Preferably, the observation window has a diameter of 50-80mm.
优选的,所述图像观测元件包括摄像仪与摄像仪支架;所述摄像仪可通过摄像支架旋转。Preferably, the image observation component includes a camera and a camera bracket; the camera can be rotated through the camera bracket.
优选的,所述图像观测元件还包括滤光片;所述滤光片设置于所述摄像仪的前端。Preferably, the image observation element further includes a filter; the filter is arranged at the front end of the camera.
优选的,所述晶体生长炉的炉体侧壁由炉内到炉外包括依次设置的第一保温材料层、第二保温材料层与第三保温材料层;所述第一保温材料层为氧化锆保温材料;所述第二保温材料层由氧化锆与氧化铝形成;所述第三保温材料层为氧化锆保温材料。Preferably, the side wall of the furnace body of the crystal growth furnace includes a first thermal insulation material layer, a second thermal insulation material layer and a third thermal insulation material layer arranged sequentially from the inside of the furnace to the outside of the furnace; the first thermal insulation material layer is oxidized Zirconium insulation material; the second insulation material layer is formed of zirconia and alumina; the third insulation material layer is zirconia insulation material.
优选的,所述第一保温材料层的密度为5.2~3.8g/cm3;所述第二保温材料层的密度为3.5~2.3g/cm3;所述第三保温材料层的密度为1.8~0.6g/cm3。Preferably, the density of the first insulation material layer is 5.2-3.8g/cm 3 ; the density of the second insulation material layer is 3.5-2.3g/cm 3 ; the density of the third insulation material layer is 1.8 ~0.6 g/cm 3 .
优选的,所述第一保温材料层的厚度为1~3.5cm;Preferably, the thickness of the first insulation material layer is 1-3.5cm;
所述第二保温材料层的厚度为1~4cm;The thickness of the second insulation material layer is 1-4cm;
所述第三保温材料层的厚度为0.5~1.5cm。The thickness of the third insulating material layer is 0.5-1.5 cm.
优选的,所述加热元件为铱金制品与Cu感应线圈;所述铱金制品的尺寸为φ70~140mm、深50~150mm;所述Cu感应线圈的尺寸为铱金制品尺寸的2~3倍。Preferably, the heating element is an iridium product and a Cu induction coil; the size of the iridium product is φ70-140 mm, and the depth is 50-150 mm; the size of the Cu induction coil is 2 to 3 times the size of the iridium product .
本发明还提供了一种稀土晶体生长工艺,包括:The present invention also provides a rare earth crystal growth process, comprising:
a)将高纯稀土原料进行混合后,得到混合原料;a) After mixing the high-purity rare earth raw materials, the mixed raw materials are obtained;
b)在真空或保护性气氛下,将上述步骤得到的混合原料经过烧结后,得到多晶料块;b) under vacuum or protective atmosphere, after sintering the mixed raw materials obtained in the above steps, polycrystalline blocks are obtained;
c)在真空或保护性气氛下,将上述步骤得到的多晶料块在权利要求1~8任意一项所述的稀土晶体生长设备中熔化后,采用提拉法在籽晶的引导下进行晶体生长后,得到稀土晶体。c) Under vacuum or a protective atmosphere, after melting the polycrystalline block obtained in the above steps in the rare earth crystal growth equipment described in any one of claims 1 to 8, use the pulling method under the guidance of the seed crystal to carry out After crystal growth, rare earth crystals are obtained.
本发明还提供了上述稀土晶体生长设备在生长钇铝石榴石类晶体和/或稀土正硅酸盐类晶体中的应用。The present invention also provides the application of the above-mentioned rare earth crystal growth equipment in growing yttrium aluminum garnet crystals and/or rare earth orthosilicate crystals.
本发明提供了一种稀土晶体生长设备,该稀土生长设备包括:晶体生长炉;所述晶体生长炉的内部设置有加热元件;所述晶体生长炉的炉膛顶端设置有观测视窗;所述晶体生长炉的炉膛顶端的外部、所述观测视窗的外围设置有循环冷却水系统;所述晶体生长炉的炉膛顶端的外部、所述观测视窗的上部设置有图像观测元件。与现有技术相比,本发明在晶体生长炉的顶端的观测视窗外部设置循环冷却水系统,可带走晶体生长过程中向炉膛顶端传递的热量,为观测视窗外安装图像观测元件提供了合适的工作环境,而通过图像观测元件可实现晶体提拉炉的远程观测。The invention provides a rare earth crystal growth equipment, which comprises: a crystal growth furnace; a heating element is arranged inside the crystal growth furnace; an observation window is arranged on the furnace top of the crystal growth furnace; A circulating cooling water system is provided outside the furnace top of the furnace and the periphery of the observation window; an image observation element is provided outside the furnace top of the crystal growth furnace and above the observation window. Compared with the prior art, the present invention arranges a circulating cooling water system outside the observation window at the top of the crystal growth furnace, which can take away the heat transferred to the top of the furnace during the crystal growth process, and provides a suitable environment for installing image observation elements outside the observation window. working environment, and the remote observation of the crystal pulling furnace can be realized through the image observation element.
附图说明Description of drawings
图1为本发明提供的稀土晶体生长设备的结构示意图;Fig. 1 is the structural representation of the rare earth crystal growth equipment provided by the present invention;
图2为本发明提供的循环冷却水系统的结构示意图;Fig. 2 is the structural representation of the circulating cooling water system provided by the present invention;
图3为本发明提供的晶体生长炉的结构示意图。Fig. 3 is a schematic structural diagram of the crystal growth furnace provided by the present invention.
具体实施方式detailed description
为了进一步理解本发明,下面结合实施例对本发明优选实施方案进行描述,但是应当理解,这些描述只是为了进一步说明本发明的特征和优点,而不是对发明权利要求的限制。In order to further understand the present invention, the preferred embodiments of the present invention are described below in conjunction with examples, but it should be understood that these descriptions are only to further illustrate the features and advantages of the present invention, rather than to limit the claims of the invention.
参见图1、图2与图3,图1为本发明提供的稀土晶体生长设备的结构示意图;图2为循环冷却水系统的结构示意图;图3为晶体生长炉的结构示意图。Referring to Fig. 1, Fig. 2 and Fig. 3, Fig. 1 is a schematic structural diagram of the rare earth crystal growth equipment provided by the present invention; Fig. 2 is a schematic structural diagram of a circulating cooling water system; Fig. 3 is a schematic structural diagram of a crystal growth furnace.
本发明提供了一种稀土晶体生长设备,包括:晶体生长炉;所述晶体生长炉的内部设置有加热元件;所述晶体生长炉的炉膛顶端设置有观测视窗;所述晶体生长炉的炉膛顶端的外部、所述观测视窗的外围设置有循环冷却水系统;所述晶体生长炉的炉膛顶端的外部、所述观测视窗的上部设置有图像观测元件。The invention provides a kind of rare earth crystal growth equipment, comprising: a crystal growth furnace; a heating element is arranged inside the crystal growth furnace; an observation window is arranged at the top of the furnace of the crystal growth furnace; A circulating cooling water system is arranged on the outside of the observation window and on the periphery of the observation window; an image observation element is arranged on the outside of the furnace top of the crystal growth furnace and on the upper part of the observation window.
按照本发明,所述晶体生长炉的内部设置有加热元件;所述加热元件为本领域技术人员熟知的加热元件即可,并无特殊的限制,本发明中所述加热元件优选为铱金制品与Cu感应线圈;所述铱金制品的尺寸优选为φ70~140mm、深50~150mm;所述Cu感应线圈的尺寸优选为铱金制品尺寸的2~3倍。According to the present invention, the interior of the crystal growth furnace is provided with a heating element; the heating element can be a heating element well known to those skilled in the art, and there is no special limitation. The heating element in the present invention is preferably an iridium product and the Cu induction coil; the size of the iridium product is preferably φ70-140 mm, and the depth is 50-150 mm; the size of the Cu induction coil is preferably 2 to 3 times the size of the iridium product.
所述晶体生长炉的炉体侧壁由炉内到炉外优选包括依次设置的第一保温材料层、第二保温材料层与第三保温材料层;所述第一保温材料层为氧化锆保温材料;所述第二保温材料层由氧化锆与氧化铝形成;所述第三保温材料层为氧化锆保温材料。其中,所述第一保温材料层的密度优选为5.2~3.8g/cm3,更优选为5~4g/cm3,再优选为4.8~4.2g/cm3,最优选为4.5g/cm3;所述第一保温层的厚度优选为1~3.5cm,更优选为2~3.5cm,再优选为2.5~3cm,最优选为2.5cm;所述第二保温材料层的密度优选为3.5~2.3g/cm3,更优选为3.2~2.5g/cm3,再优选为3~2.5g/cm3,最优选为2.5g/cm3;所述第二保温层的厚度优选为1~4cm,更优选为2~3.5cm,再优选为2.5~3cm,最优选为3cm;所述第三保温材料层的密度优选为1.8~0.6g/cm3,更优选为1.6~0.8g/cm3,再优选为1.4~1g/cm3,最优选为1.2g/cm3;所述第三保温层的厚度优选为0.5~1.5cm,更优选为0.8~1.2cm,再优选为1~1.2cm,最优选为1cm。The side wall of the furnace body of the crystal growth furnace preferably includes a first thermal insulation material layer, a second thermal insulation material layer and a third thermal insulation material layer arranged in sequence from the inside of the furnace to the outside of the furnace; the first thermal insulation material layer is zirconia thermal insulation material layer. material; the second insulation material layer is formed of zirconia and alumina; the third insulation material layer is zirconia insulation material. Wherein, the density of the first insulating material layer is preferably 5.2-3.8 g/cm 3 , more preferably 5-4 g/cm 3 , even more preferably 4.8-4.2 g/cm 3 , most preferably 4.5 g/cm 3 The thickness of the first insulation layer is preferably 1-3.5cm, more preferably 2-3.5cm, more preferably 2.5-3cm, most preferably 2.5cm; the density of the second insulation material layer is preferably 3.5- 2.3g/cm 3 , more preferably 3.2-2.5g/cm 3 , more preferably 3-2.5g/cm 3 , most preferably 2.5g/cm 3 ; the thickness of the second insulation layer is preferably 1-4cm , more preferably 2-3.5 cm, more preferably 2.5-3 cm, most preferably 3 cm; the density of the third insulation material layer is preferably 1.8-0.6 g/cm 3 , more preferably 1.6-0.8 g/cm 3 , more preferably 1.4-1g/cm 3 , most preferably 1.2g/cm 3 ; the thickness of the third insulation layer is preferably 0.5-1.5cm, more preferably 0.8-1.2cm, and more preferably 1-1.2cm , most preferably 1 cm.
本发明在晶体生长炉膛内搭建适用于稀土氧化物的温度场结构及其配套加热元件,为稀土氧化物晶体生长提供合适的轴向和径向温度梯度,实现φ30~80mm钇铝石榴石类晶体(RE:Y3Al5O12,RE=Ce,Nd,Sm,Eu,Ho,Tm,Er,Yb)和稀土正硅酸盐类(Ce:RE2SiO5,RE=La,Gd,Y)。The invention builds a temperature field structure suitable for rare earth oxides and its matching heating elements in the crystal growth furnace, provides suitable axial and radial temperature gradients for the growth of rare earth oxide crystals, and realizes yttrium aluminum garnet crystals of φ30-80mm (RE:Y 3 Al 5 O 12 , RE=Ce,Nd,Sm,Eu,Ho,Tm,Er,Yb) and rare earth orthosilicates (Ce:RE 2 SiO 5 ,RE=La,Gd,Y ).
所述晶体生长炉的炉膛顶端设置有观测视窗;所述观测视窗优选为广角观测视窗;所述观测视窗的直径优选为50~80mm。The top of the furnace of the crystal growth furnace is provided with an observation window; the observation window is preferably a wide-angle observation window; the diameter of the observation window is preferably 50-80 mm.
所述晶体生长炉的炉膛顶端的外部、所述观测视窗的外围设置有循环冷却水系统,可带走晶体生长过程中向炉膛顶端传递的热量,为观测视窗外安装图像观测元件提供了合适的工作环境。The outside of the top of the furnace of the crystal growth furnace and the periphery of the observation window are provided with a circulating cooling water system, which can take away the heat transferred to the top of the furnace during the crystal growth process, and provides a suitable environment for installing image observation elements outside the observation window. working environment.
所述晶体生长炉的炉膛顶端的外部、所述观测视窗的上部设置有图像观测元件;所述图像观测元件为本领域技术人员熟知的图像观测元件即可,并无特殊的限制,本发明中优选包括摄像仪与摄像仪支架;所述摄像仪可通过摄像支架旋转,更优选可360°旋转,充分利用上视窗口的广视角的优势,对炉膛内部环境能够实现122°~154°广视角观测;所述摄像仪优选与电脑端连接,从而实现图像远程监控功能。The outside of the furnace top of the crystal growth furnace and the upper part of the observation window are provided with an image observation element; the image observation element can be an image observation element well known to those skilled in the art, and there is no special limitation. Preferably, a camera and a camera bracket are included; the camera can be rotated through the camera bracket, more preferably 360°, fully utilizing the advantage of the wide viewing angle of the upper viewing window, and can realize a wide viewing angle of 122° to 154° for the internal environment of the furnace Observation; the video camera is preferably connected to the computer terminal, so as to realize the image remote monitoring function.
在本发明中,所述图像观测元件优选还包括滤光片;所述滤光片设置于所述摄像仪的前端。避免在熔体温度高于1800℃带来的强光过亮导致图像无法观测。In the present invention, the image observation element preferably further includes a filter; the filter is arranged at the front end of the camera. Avoid the strong light brought by the melt temperature higher than 1800°C, which will cause the image to be unobservable.
本发明在晶体生长炉的顶端的观测视窗外部设置循环冷却水系统,可带走晶体生长过程中向炉膛顶端传递的热量,为观测视窗外安装图像观测元件提供了合适的工作环境,而通过图像观测元件可实现晶体提拉炉的远程观测。The present invention arranges a circulating cooling water system outside the observation window at the top of the crystal growth furnace, which can take away the heat transferred to the top of the furnace during the crystal growth process, and provides a suitable working environment for installing image observation components outside the observation window. The observation element can realize the remote observation of the crystal pulling furnace.
本发明还提供了一种应用上述稀土晶体生长设备进行稀土晶体生长的工艺,包括:a)将高纯稀土原料进行混合后,得到混合原料;b)在真空或保护性气氛下,将上述步骤得到的混合原料经过烧结后,得到多晶料块;c)在真空或保护性气氛下,将上述步骤得到的多晶料块在上述稀土晶体生长设备中熔化后,采用提拉法在籽晶的引导下进行晶体生长后,得到稀土晶体。The present invention also provides a process for growing rare earth crystals using the above rare earth crystal growth equipment, including: a) mixing high-purity rare earth raw materials to obtain mixed raw materials; b) mixing the above steps After the obtained mixed raw material is sintered, a polycrystalline material block is obtained; c) under vacuum or a protective atmosphere, after the polycrystalline material block obtained in the above steps is melted in the above-mentioned rare earth crystal growth equipment, the seed crystal is formed by pulling After crystal growth under the guidance of , rare earth crystals are obtained.
本发明所有原料,对其来源没有特别限制,在市场上购买的或按照本领域技术人员熟知的常规方法制备的即可。All raw materials in the present invention have no particular limitation on their sources, they can be purchased from the market or prepared according to conventional methods well known to those skilled in the art.
本发明所有原料,其纯度高于0.9999(4N)。All raw materials of the present invention have a purity higher than 0.9999 (4N).
其中,所述高纯稀土原料为本领域技术人员熟知的可得到稀土晶体的高纯原料即可,并无特殊的限制,本发明中优选为可生长钇铝石榴石类晶体和/或稀土正硅酸盐类晶体的高纯稀土原料。Wherein, the high-purity rare earth raw material is a high-purity raw material known to those skilled in the art that can obtain rare earth crystals, and there is no special limitation. In the present invention, it is preferred that yttrium aluminum garnet crystals and/or rare earth normal High-purity rare earth raw materials for silicate crystals.
本发明按照设定比例将高纯原料进行混合,得到混合原料。本发明对所述混合的条件没有特别限制,以本领域技术人员熟知的此类反应的混合条件即可,本领域技术人员可以根据实际生产情况、原料情况进行调整,本发明优选为均匀混合,所述混合的时间优选为24~120h,更优选为40~120h,更优选为60~120h,最优选为80~120h。本发明对所述混合的方式没有特别限制,以本领域技术人员熟知的混合方式,本发明优选采用混料器混合。本发明对所述混合原料的其他性质没有特别限制,以本领域技术人员熟知的制备稀土闪烁晶体的混合原料的性质即可,本发明所述混合原料的粒度优选为0.05~30μm,更优选为0.1~25μm,更优选为1~15μm,最优选为2~8μm。The invention mixes the high-purity raw materials according to the set ratio to obtain the mixed raw materials. The present invention is not particularly limited to the mixing conditions, the mixing conditions of this type of reaction well known to those skilled in the art can be used, and those skilled in the art can adjust according to actual production conditions and raw material conditions. The present invention is preferably uniform mixing, The mixing time is preferably 24-120 h, more preferably 40-120 h, more preferably 60-120 h, most preferably 80-120 h. The method of mixing is not particularly limited in the present invention. In the method of mixing well known to those skilled in the art, the present invention preferably uses a mixer for mixing. The present invention has no special restrictions on other properties of the mixed raw material, and the properties of the mixed raw material for preparing rare earth scintillation crystals well known to those skilled in the art can be used. The particle size of the mixed raw material in the present invention is preferably 0.05-30 μm, more preferably 0.1 to 25 μm, more preferably 1 to 15 μm, most preferably 2 to 8 μm.
本发明随后在真空或保护性气氛下,将上述步骤得到的混合原料经过烧结后,得到多晶料块。In the present invention, the mixed raw materials obtained in the above steps are then sintered under a vacuum or a protective atmosphere to obtain a polycrystalline block.
本发明对所述真空的压力没有特别限制,以本领域技术人员熟知的烧结过程的真空压力即可,本发明所述真空的压力优选为小于等于10Pa,更优选为小于等于7Pa,更优选为小于等于5Pa,最优选为3~5Pa;本发明对所述保护性气氛没有特别限制,以本领域技术人员熟知的用于烧结稀土晶体的保护性气氛即可,本发明所述保护性气氛优选为氮气、惰性气体和还原性气体中的一种或多种,更优选为氮气和还原性气体,最优选为氮气、氩气和氢气。The present invention is not particularly limited to the pressure of the vacuum, and the vacuum pressure of the sintering process well known to those skilled in the art can be used. The vacuum pressure of the present invention is preferably less than or equal to 10Pa, more preferably less than or equal to 7Pa, more preferably Less than or equal to 5Pa, most preferably 3 to 5Pa; the present invention has no special restrictions on the protective atmosphere, the protective atmosphere for sintering rare earth crystals well known to those skilled in the art can be used, and the protective atmosphere of the present invention is preferably It is one or more of nitrogen, inert gas and reducing gas, more preferably nitrogen and reducing gas, most preferably nitrogen, argon and hydrogen.
本发明对所述烧结的具体条件没有特别限制,以本领域技术人员熟知的烧结条件即可,本发明所述烧结的温度优选为900~1300℃,更优选为950~1250℃,更优选为1000~1200℃,最优选为1050~1150℃。本发明所述烧结的时间优选为12~24h,更优选为13~22h,更优选为14~22h,最优选为15~20h。本发明对所述烧结的设备没有特别限制,以本领域技术人员熟知的烧结设备即可,本发明优选将所述混合原料放入高纯坩埚中在烧结炉内烧结。The present invention has no particular limitation on the specific conditions of the sintering, and the sintering conditions well known to those skilled in the art can be used. The temperature of the sintering in the present invention is preferably 900-1300°C, more preferably 950-1250°C, more preferably 1000-1200°C, most preferably 1050-1150°C. The sintering time of the present invention is preferably 12-24 hours, more preferably 13-22 hours, more preferably 14-22 hours, most preferably 15-20 hours. The present invention has no particular limitation on the sintering equipment, and the sintering equipment well-known to those skilled in the art can be used. In the present invention, the mixed raw materials are preferably put into a high-purity crucible and sintered in a sintering furnace.
本发明为达到更好的烧结效果,还优选将混合原料先经过压饼后,得到原料饼,再进行烧结。本发明对所述压饼的具体步骤和工艺参数没有特别限制,以本领域技术人员熟知的烧结前压坯的具体步骤和工艺参数即可,本领域技术人员可以根据实际生产情况、原料组成以及产品性能要求进行选择和调整,本发明所述压饼的压力优选为20~70MPa,更优选为30~60MPa,最优选为40~50MPa。In order to achieve a better sintering effect in the present invention, it is also preferred that the mixed raw materials are pressed into cakes to obtain raw material cakes, and then sintered. The present invention has no special restrictions on the specific steps and process parameters of the pressed cake, the specific steps and process parameters of the pre-sintered compact known to those skilled in the art can be used, and those skilled in the art can according to the actual production situation, raw material composition and The product performance needs to be selected and adjusted. The pressure of the pressed cake in the present invention is preferably 20-70 MPa, more preferably 30-60 MPa, and most preferably 40-50 MPa.
本发明最后在真空或保护性气氛下,将上述步骤得到的多晶料块在上述稀土晶体生长设备中熔化后,采用提拉法籽晶的引导下进行晶体生长后,得到稀土晶体。Finally, in the present invention, under vacuum or protective atmosphere, the polycrystalline block obtained in the above steps is melted in the above-mentioned rare earth crystal growth equipment, and the crystal is grown under the guidance of the pulling method seed crystal to obtain the rare earth crystal.
本发明对所述真空的压力没有特别限制,以本领域技术人员熟知的烧结过程的真空压力即可,本发明所述真空的压力优选为小于等于10Pa,更优选为小于等于7Pa,更优选为小于等于5Pa,最优选为3~5Pa;本发明对所述保护性气氛没有特别限制,以本领域技术人员熟知的用于烧结稀土晶体的保护性气氛即可,本发明所述保护性气氛优选为氮气、惰性气体和还原性气体中的一种或多种,更优选为氮气和还原性气体,最优选为氮气、氩气和氢气。The present invention is not particularly limited to the pressure of the vacuum, and the vacuum pressure of the sintering process well known to those skilled in the art can be used. The vacuum pressure of the present invention is preferably less than or equal to 10Pa, more preferably less than or equal to 7Pa, more preferably Less than or equal to 5Pa, most preferably 3 to 5Pa; the present invention has no special restrictions on the protective atmosphere, the protective atmosphere for sintering rare earth crystals well known to those skilled in the art can be used, and the protective atmosphere of the present invention is preferably It is one or more of nitrogen, inert gas and reducing gas, more preferably nitrogen and reducing gas, most preferably nitrogen, argon and hydrogen.
进入升温阶段,多晶料块开始熔化。钇铝石榴石类和稀土正硅酸盐类晶体的熔体包含不同流体组成,在晶料完全熔化后,出现特征液流线。利用外置高温摄像仪能够清晰记录不同时刻熔体表面出现的液流线。晶体生长人员能够根据不同时段的液流线特征结合温度显示判断引晶温度,进行引晶的远程操作。单人即可完成整个引晶过程,降低人力资源。Entering the heating stage, the polycrystalline block begins to melt. The melts of yttrium aluminum garnet and rare earth orthosilicate crystals contain different fluid compositions, and after the crystal material is completely melted, characteristic liquid streamlines appear. The liquid flow lines appearing on the melt surface at different times can be clearly recorded by using an external high-temperature camera. Crystal growth personnel can judge the seeding temperature according to the liquid flow line characteristics at different time periods combined with the temperature display, and perform remote operation of the seeding. A single person can complete the entire seeding process, reducing human resources.
本发明对所述籽晶没有特别限制,以本领域技术人员熟知的用于制备稀土闪烁晶体的籽晶即可。The present invention has no special limitation on the seed crystal, and the seed crystal known to those skilled in the art for preparing rare earth scintillation crystals can be used.
本发明所述引导的温度(引晶温度)优选为1800~2050℃,更优选为1810~2000℃,更优选为1830~1970℃,最优选为1840~1950℃。The guiding temperature (seeding temperature) of the present invention is preferably 1800-2050°C, more preferably 1810-2000°C, more preferably 1830-1970°C, most preferably 1840-1950°C.
本发明对所述升温多晶料块的升温过程没有特别限制,以本领域技术人员熟知的升温过程即可。本发明所述引晶操作优选在出现特征液流线(液流线)时进行。本领域技术人员能够理解,液流线是指在液态流体场中每一点上都与速率矢量相切的曲线。本发明所述出现特征液流线在宏观表象上优选为,多晶料块由固相变为液相后当液相表面出现波纹时,即为出现特征液流线。In the present invention, there is no special limitation on the heating process of the temperature-rising polycrystalline block, and the heating process known to those skilled in the art will suffice. The seeding operation in the present invention is preferably performed when the characteristic liquid flow lines (liquid flow lines) appear. Those skilled in the art can understand that the liquid flow line refers to a curve that is tangent to the velocity vector at every point in the liquid fluid field. The appearance of the characteristic liquid streamlines in the present invention is preferably macroscopically, when the polycrystalline block changes from a solid phase to a liquid phase, when ripples appear on the surface of the liquid phase, the characteristic liquid streamlines appear.
本发明在出现特征液流线后,使用籽晶进行引晶操作,然后采用提拉法进行晶体生长,按照晶体理论计算得到的生长速率和旋转速率实现晶体生长,得到稀土晶体。本发明对所述提拉法没有特别限制,以本领域技术人员熟知的制备稀土晶体的提拉法即可;本发明对所述提拉法的工艺参数没有特别限制,本领域技术人员可以根据实际生产情况、原料组成以及产品性能要求进行选择和调整。In the present invention, after the characteristic liquid flow line appears, the seed crystal is used for seeding operation, and then the pulling method is used for crystal growth, and the crystal growth is realized according to the growth rate and rotation rate calculated by the crystal theory, and the rare earth crystal is obtained. The present invention has no special restrictions on the pulling method, and the pulling method for preparing rare earth crystals well known to those skilled in the art can be used; the present invention has no special restrictions on the process parameters of the pulling method, and those skilled in the art can according to Select and adjust according to the actual production situation, raw material composition and product performance requirements.
本发明所述晶体生长的速率优选为2.5~8.0mm/h,更优选为4~7.5mm/h,更优选为5.1~7.0mm/h,最优选为5.5~6.5mm/h;所述晶体旋转速率优选为6~30rpm,更优选为8~25rpm,更优选为10~22rpm,最优选为10~18rpm。The crystal growth rate of the present invention is preferably 2.5-8.0 mm/h, more preferably 4-7.5 mm/h, more preferably 5.1-7.0 mm/h, most preferably 5.5-6.5 mm/h; the crystal The rotation rate is preferably 6-30 rpm, more preferably 8-25 rpm, more preferably 10-22 rpm, most preferably 10-18 rpm.
本发明还提供了一种上述稀土晶体生长设备在生长钇铝石榴石类晶体和/或稀土正硅酸盐类晶体中的应用。The present invention also provides an application of the above-mentioned rare earth crystal growth equipment in growing yttrium aluminum garnet crystals and/or rare earth orthosilicate crystals.
通过实时观测钇铝石榴石晶体的生长全过程。引晶过程的图像抓拍,经过反复调控,得到合适的温度梯度,在籽晶刚刚接触熔体液面时,略有生长,证明生长温度合适。经历“缩颈”操作后,晶体进入放肩阶段,抓拍的放肩前期和中期图像显示晶体尺寸不断变大,沿生长方向投影轮廓的几何形状也逐渐改变。进入等径生长的图像显示:相较于放肩阶段晶体尺寸增大,沿生长方向投影轮廓的几何形状保持不变。该功能能够显著降低频繁人为扰动对稀土晶体质量带来的影响。By observing the whole growth process of yttrium aluminum garnet crystal in real time. The image of the seeding process was captured, and after repeated adjustments, a suitable temperature gradient was obtained. When the seed crystal just touched the melt surface, it grew slightly, which proved that the growth temperature was appropriate. After undergoing the "necking" operation, the crystal enters the shoulder-shouldering stage. The captured early and mid-stage shoulder-shouldering images show that the size of the crystal is constantly increasing, and the geometry of the projected contour along the growth direction is also gradually changing. The images entering isometric growth show that the geometry of the projected profile along the growth direction remains unchanged compared to the increase in crystal size during the shouldering phase. This function can significantly reduce the impact of frequent human disturbance on the quality of rare earth crystals.
为了进一步说明本发明,下面结合实施例对本发明提供的稀土晶体生长设备、稀土晶体生长工艺及应用进行详细说明,本发明的保护范围不受以下实施例的限制。In order to further illustrate the present invention, the rare earth crystal growth equipment, rare earth crystal growth process and application provided by the present invention will be described in detail below in conjunction with the examples, and the scope of protection of the present invention is not limited by the following examples.
实施例1Example 1
提供稀土晶体生长设备:晶体生长炉;所述晶体生长炉的内部设置有加热元件,加热元件优选为铱金制品与Cu感应线圈;所述铱金制品的尺寸优选为φ130mm、深130mm;所述Cu感应线圈的尺寸优选为铱金制品尺寸的2~3倍;所述晶体生长炉的炉体侧壁由炉内到炉外优选包括依次设置的第一保温材料层、第二保温材料层与第三保温材料层;所述第一保温材料层为氧化锆保温材料;所述第二保温材料层由氧化锆与氧化铝形成;所述第三保温材料层为氧化锆保温材料;所述第一保温材料层的密度优选为4.5g/cm3;所述第一保温层的厚度为2.5cm;所述第二保温材料层的密度优选为2.5g/cm3;所述第二保温层的厚度为3cm;所述第三保温材料层的密度优选为1.2g/cm3;所述第三保温层的厚度为1cm;所述晶体生长炉的炉膛顶端设置有观测视窗,所述观测视窗的直径为55mm;所述晶体生长炉的炉膛顶端的外部、所述观测视窗的外围设置有循环冷却水系统;所述晶体生长炉的炉膛顶端的外部、所述观测视窗的上部设置有图像观测元件,图像观测元件包括摄像仪与摄像仪支架;所述摄像仪可通过摄像支架可360°旋转。Rare earth crystal growth equipment is provided: a crystal growth furnace; a heating element is provided inside the crystal growth furnace, and the heating element is preferably an iridium product and a Cu induction coil; the size of the iridium product is preferably φ130mm and a depth of 130mm; the The size of the Cu induction coil is preferably 2 to 3 times the size of the iridium product; the side wall of the furnace body of the crystal growth furnace preferably includes a first heat insulating material layer, a second heat insulating material layer and The third insulating material layer; the first insulating material layer is zirconia insulating material; the second insulating material layer is formed of zirconia and alumina; the third insulating material layer is zirconia insulating material; the second insulating material layer is formed of zirconia insulating material; The density of a thermal insulation material layer is preferably 4.5g/cm 3 ; the thickness of the first thermal insulation layer is 2.5cm; the density of the second thermal insulation material layer is preferably 2.5g/cm 3 ; the thickness of the second thermal insulation layer The thickness is 3cm; the density of the third insulation material layer is preferably 1.2g/cm 3 ; the thickness of the third insulation layer is 1cm; the furnace top of the crystal growth furnace is provided with an observation window, and the observation window The diameter is 55mm; the outside of the furnace top of the crystal growth furnace and the periphery of the observation window are provided with a circulating cooling water system; the outside of the furnace top of the crystal growth furnace and the top of the observation window are provided with image observation elements , the image observation element includes a camera and a camera bracket; the camera can be rotated by 360° through the camera bracket.
将纯度高于99.995%的Y2O3、Al2O3粉料,按照Y2O3:Al2O3=3:5配比称料,压制并烧结成圆饼状Y3Al5O12多晶原料。将5000g依次晶料块累叠装入上述稀土生长设备的晶体生长炉膛中的Ir坩埚内,在籽晶杆前端装入[111]方向的籽晶。调整晶体生长炉上方高温摄像仪观测位置及角度,在熔体表面中心处聚焦。炉膛抽真空后充入高纯N2气作为保护气,升温熔料(多晶料块)。利用结晶生长的化学键合理论计算确定优势生长方向[111],计算Y3Al5O12沿[111]方向的提拉生长速率2.5~6.0mm/h,旋转速率8~18rpm。引晶过程远程观测籽晶和熔体表面的接触及生长/熔化情况,远程执行“引晶”操作,经过反复调控,得到合适的温度梯度,在籽晶刚刚接触熔体液面时,略有生长,证明生长温度合适。经历“缩颈”操作后,晶体进入生长阶段,利用远程观测功能原位监测生长全过程。该功能能够显著降低频繁人为扰动对稀土晶体质量带来的影响。Y 2 O 3 and Al 2 O 3 powders with a purity higher than 99.995% are weighed according to the ratio of Y 2 O 3 :Al 2 O 3 =3:5, pressed and sintered into a round cake-shaped Y 3 Al 5 O 12 polycrystalline raw materials. 5000g of crystal material blocks are successively loaded into the Ir crucible in the crystal growth furnace of the above-mentioned rare earth growth equipment, and the seed crystal in the [111] direction is loaded at the front end of the seed rod. Adjust the observation position and angle of the high-temperature camera above the crystal growth furnace to focus on the center of the melt surface. After the furnace is evacuated, it is filled with high-purity N 2 gas as a protective gas to heat up the molten material (polycrystalline material block). Using the chemical bonding theory of crystal growth to determine the dominant growth direction [111], the calculated growth rate of Y 3 Al 5 O 12 along the [111] direction is 2.5-6.0mm/h, and the rotation rate is 8-18rpm. During the seeding process, the contact between the seed crystal and the melt surface and the growth/melting situation were observed remotely, and the "seed crystal" operation was performed remotely. After repeated adjustments, a suitable temperature gradient was obtained. When the seed crystal just touched the melt surface, there was a slight Prove that the growth temperature is suitable. After undergoing the "necking" operation, the crystal enters the growth stage, and the whole growth process is monitored in situ by using the remote observation function. This function can significantly reduce the impact of frequent human disturbance on the quality of rare earth crystals.
生长Y3Al5O12晶体尺寸:等径尺寸φ78mm,晶体全长240mm,总重量3.24kg。无开裂,晶体质量完好。The size of the grown Y 3 Al 5 O 12 crystal: the equal diameter is φ78mm, the total length of the crystal is 240mm, and the total weight is 3.24kg. No cracks, crystal quality intact.
实施例2Example 2
提供实施例1中的稀土晶体生长设备。The rare earth crystal growth apparatus in Example 1 is provided.
将纯度高于99.995%的CeO2、Y2O3、Al2O3粉料,按照CeO2:Y2O3:Al2O3=0.03:2.97:5配比称料,压制并烧结成圆饼状Ce:Y3Al5O12多晶原料。将1000g依次晶料块累叠装入上述晶体生长炉膛中的Ir坩埚内,在籽晶杆前端装入[111]方向的籽晶。调整晶体生长炉上方高温摄像仪观测位置及角度,在熔体表面中心处聚焦。炉膛抽真空后充入高纯N2气作为保护气,升温熔料(多晶料块)。利用结晶生长的化学键合理论计算确定优势生长方向[111],计算Ce:Y3Al5O12沿[111]方向的提拉生长速率2.5~6.0mm/h,旋转速率8~18rpm。引晶过程远程观测籽晶和熔体表面的接触及生长/熔化情况,远程执行“引晶”操作,经过反复调控,得到合适的温度梯度,在籽晶刚刚接触熔体液面时,略有生长,证明生长温度合适。经历“缩颈”操作后,晶体进入“放肩”阶段,晶体尺寸增大,沿生长方向投影轮廓的几何形状也逐渐改变,从最初的六边形向截角六边形演变。进入等径生长后,沿生长方向投影轮廓的几何形状呈现截角六边形。等径生长结束后进入降温阶段,晶体图像清晰可见,Ce:Y3Al5O12晶体生长完好。CeO 2 , Y 2 O 3 , and Al 2 O 3 powders with a purity higher than 99.995% are weighed according to the ratio of CeO 2 :Y 2 O 3 :Al 2 O 3 =0.03:2.97:5, pressed and sintered into Round cake Ce:Y 3 Al 5 O 12 polycrystalline raw material. 1000 g of crystal material blocks are stacked and loaded into the Ir crucible in the above-mentioned crystal growth furnace, and the seed crystal in the [111] direction is loaded at the front end of the seed rod. Adjust the observation position and angle of the high-temperature camera above the crystal growth furnace to focus on the center of the melt surface. After the furnace is evacuated, it is filled with high-purity N 2 gas as a protective gas to heat up the molten material (polycrystalline material block). Using the chemical bonding theory of crystal growth to determine the dominant growth direction [111], the calculated growth rate of Ce:Y 3 Al 5 O 12 along the [111] direction is 2.5-6.0mm/h, and the rotation rate is 8-18rpm. During the seeding process, the contact between the seed crystal and the melt surface and the growth/melting situation were observed remotely, and the "seed crystal" operation was performed remotely. After repeated adjustments, a suitable temperature gradient was obtained. When the seed crystal just touched the melt surface, there was a slight Prove that the growth temperature is suitable. After undergoing the "necking" operation, the crystal enters the "shouldering" stage, the crystal size increases, and the geometry of the projected contour along the growth direction gradually changes, evolving from the initial hexagon to the truncated hexagon. After entering the equal-diameter growth, the geometric shape of the projected contour along the growth direction presents a truncated hexagon. After the equal-diameter growth, it enters the cooling stage, the crystal image is clearly visible, and the Ce:Y 3 Al 5 O 12 crystal grows well.
生长Ce:Y3Al5O12晶体尺寸:等径尺寸φ40mm,晶体全长90mm,总重量0.42kg。无开裂,晶体质量完好。晶体发射峰位置位于~460nm,衰减时间~100ns。Growth Ce:Y 3 Al 5 O 12 crystal size: equal diameter φ40mm, total crystal length 90mm, total weight 0.42kg. No cracks, crystal quality intact. The crystal emission peak position is located at ~460nm with a decay time of ~100ns.
实施例3Example 3
提供实施例1中的稀土晶体生长设备。The rare earth crystal growth apparatus in Example 1 is provided.
按照上述过程,将纯度高于99.995%的Lu2O3、SiO2、CeO2粉料,按照Lu2O3:SiO2:CeO2=1.195:1:0.005配比称料,压制并烧结成圆饼状Ce:Lu2SiO5多晶原料。将3400g依次晶料块累叠装入上述晶体生长炉膛中的Ir坩埚内,在籽晶杆前端装入[010]方向的籽晶。调整晶体生长炉上方高温摄像仪观测位置及角度,在熔体表面中心处聚焦。炉膛抽真空后充入高纯Ar作为保护气,升温熔料(多晶料块)。利用结晶生长的化学键合理论计算确定优势生长方向[010],计算Ce:Lu2SiO5沿[010]方向的提拉生长速率4.0~6.5mm/h,旋转速率2.5~6.0mm/h,旋转速率10~25rpm。远程观测不同时段的液流线特征,判断引晶温度,执行“引晶”操作。经历“缩颈”操作后,晶体进入生长阶段,利用远程观测功能原位监测生长全过程。该功能能够显著降低频繁人为扰动对稀土晶体质量带来的影响。According to the above process, Lu 2 O 3 , SiO 2 , and CeO 2 powders with a purity higher than 99.995% were weighed according to the ratio of Lu 2 O 3 : SiO 2 :CeO 2 =1.195:1:0.005, pressed and sintered into Round cake-shaped Ce:Lu 2 SiO 5 polycrystalline raw material. 3400 g of crystal material blocks are stacked and loaded into the Ir crucible in the above-mentioned crystal growth furnace, and the seed crystal in the [010] direction is loaded at the front end of the seed rod. Adjust the observation position and angle of the high-temperature camera above the crystal growth furnace to focus on the center of the melt surface. After the furnace is evacuated, it is filled with high-purity Ar as a protective gas, and the molten material (polycrystalline material) is heated up. Using the chemical bonding theory of crystal growth to determine the dominant growth direction [010], the calculated growth rate of Ce:Lu 2 SiO 5 along the [010] direction is 4.0-6.5mm/h, the rotation rate is 2.5-6.0mm/h, and the rotation Speed 10 ~ 25rpm. Remotely observe the characteristics of the liquid flow line at different time periods, judge the seeding temperature, and perform the "seeding" operation. After undergoing the "necking" operation, the crystal enters the growth stage, and the whole growth process is monitored in situ by using the remote observation function. This function can significantly reduce the impact of frequent human disturbance on the quality of rare earth crystals.
生长Ce:Lu2SiO5晶体尺寸:等径尺寸φ40mm,晶体全长140mm,总重量1.46kg。无开裂,晶体质量完好。晶体发射峰位置位于~420nm,光输出28000photos/MeV@622keV,衰减时间~40ns。Growth Ce: Lu 2 SiO 5 crystal size: equal diameter φ40mm, total crystal length 140mm, total weight 1.46kg. No cracks, crystal quality intact. The emission peak position of the crystal is at ~420nm, the light output is 28000photos/MeV@622keV, and the decay time is ~40ns.
以上实施例的说明只是用于帮助理解本发明的方法及其核心思想。应当指出,对于本技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以对本发明进行若干改进和修饰,这些改进和修饰也落入本发明权利要求的保护范围内。The descriptions of the above embodiments are only used to help understand the method and core idea of the present invention. It should be pointed out that for those skilled in the art, without departing from the principle of the present invention, some improvements and modifications can be made to the present invention, and these improvements and modifications also fall within the protection scope of the claims of the present invention.
对所公开的实施例的上述说明,使本领域专业技术人员能够实现或使用本发明。对这些实施例的多种修改对本领域的专业技术人员来说将是显而易见的,本文中所定义的一般原理可以在不脱离本发明的精神或范围的情况下,在其它实施例中实现。因此,本发明将不会被限制于本文所示的这些实施例,而是要符合与本文所公开的原理和新颖特点相一致的最宽的范围。The above description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the present invention will not be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
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Application publication date: 20170531 |