CN106744975A - A kind of device for eliminating polysilicon carbon head material - Google Patents
A kind of device for eliminating polysilicon carbon head material Download PDFInfo
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- CN106744975A CN106744975A CN201611163888.6A CN201611163888A CN106744975A CN 106744975 A CN106744975 A CN 106744975A CN 201611163888 A CN201611163888 A CN 201611163888A CN 106744975 A CN106744975 A CN 106744975A
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- graphite
- silicon core
- mounting hole
- core fixture
- head material
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 194
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 50
- 229920005591 polysilicon Polymers 0.000 title claims abstract description 49
- 239000000463 material Substances 0.000 title claims abstract description 48
- 229910052799 carbon Inorganic materials 0.000 title claims abstract description 47
- 229910002804 graphite Inorganic materials 0.000 claims abstract description 150
- 239000010439 graphite Substances 0.000 claims abstract description 150
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 130
- 229910052710 silicon Inorganic materials 0.000 claims description 19
- 239000010703 silicon Substances 0.000 claims description 19
- 230000008030 elimination Effects 0.000 claims description 11
- 238000003379 elimination reaction Methods 0.000 claims description 11
- 238000009434 installation Methods 0.000 claims description 7
- 239000004575 stone Substances 0.000 claims description 4
- 239000013078 crystal Substances 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 3
- 239000002210 silicon-based material Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 235000011036 Rubus leucodermis Nutrition 0.000 description 1
- 244000111388 Rubus occidentalis Species 0.000 description 1
- 235000003942 Rubus occidentalis Nutrition 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007664 blowing Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- -1 heating Inorganic materials 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/035—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition or reduction of gaseous or vaporised silicon compounds in the presence of heated filaments of silicon, carbon or a refractory metal, e.g. tantalum or tungsten, or in the presence of heated silicon rods on which the formed silicon is deposited, a silicon rod being obtained, e.g. Siemens process
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
- C01B33/027—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material
- C01B33/03—Preparation by decomposition or reduction of gaseous or vaporised silicon compounds other than silica or silica-containing material by decomposition of silicon halides or halosilanes or reduction thereof with hydrogen as the only reducing agent
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Silicon Compounds (AREA)
Abstract
The present invention provides a kind of device for eliminating polysilicon carbon head material, belongs to field of polysilicon technology.Including graphite base, the graphite clamping petal group being placed on graphite base and graphite cap.Graphite clamping petal group has the silicon core fixture placed in the first mounting hole, the first mounting hole and be made up of polysilicon.Graphite cap has through hole, and silicon core fixture is through through hole and has the second mounting hole for being used for installing silicon core.Graphite clamping petal group loaded on graphite clamping petal group and is fixed on graphite base by graphite cap.This device for eliminating polysilicon carbon head material conductive can play a part of to clamp silicon core again, meanwhile, also deposited to when siliceous deposits is to silicon core on the silicon core fixture being made up of polysilicon, it is to avoid the generation of carbon head material.
Description
Technical field
The present invention relates to field of polysilicon technology, in particular to a kind of device for eliminating polysilicon carbon head material.
Background technology
Polysilicon is the main raw material(s) for producing photovoltaic product, and one of the main technique of Siemens Method of use is
Electronation vapour deposition.It is to react reduction by the trichlorosilane gas by multistage rectification and hydrogen under 1100 DEG C of high temperature
The process of great achievement silicon rod long on initial silicon core is deposited on into silicon and constantly, the high temperature during being somebody's turn to do passes through silicon core or silicon rod by electric current
Heating itself is maintained, and silicon rod therefore conducting in pairs, forms inverse u shape in reduction cvd furnace, the conduction electricity with silicon rod directly contact
Pole requires high temperature resistant, does not pollute silicon material.Therefore using has high temperature resistant, stable in properties, high conductivity graphite electrode as even
The metal electrode and silicon core, i.e. graphite for connecing power supply are necessary media, and by graphite, heating, polysilicon could adhere to " raw
It is long ".
Silicon material is deposited to while on silicon core in the prior art, and silicon material, silicon material and graphite are also deposited on graphite clamping petal
Card valve surface is tightly combined, and causes silicon material to separate difficulty with graphite clamping petal, greatly affected the quality of polysilicon.Therefore, have
The graphite in removal carbon head material is imitated, is maximally utilised, and can turn into graphite chuck repetition recycling and be currently needed for urgent need
The problem of solution.
The content of the invention
It is an object of the invention to provide a kind of device for eliminating polysilicon carbon head material, conductive clamping silicon can be played again
The effect of core, deposit on silicon core fixture while siliceous deposits is to silicon core, it is to avoid the generation of carbon head material.
The present invention is realized using following technical scheme：
A kind of device for eliminating polysilicon carbon head material, including graphite base, the graphite clamping petal group that is placed on graphite base
And graphite cap.Graphite clamping petal group has the silicon core fixture placed in the first mounting hole, the first mounting hole and be made up of polysilicon.Stone
Black cap has through hole, and silicon core fixture is through through hole and has the second mounting hole for being used for installing silicon core.Graphite cap is loaded on graphite
Graphite clamping petal group is simultaneously fixed on graphite base by card valve group.
The beneficial effect of device of the elimination polysilicon carbon head material that presently preferred embodiments of the present invention is provided is：
The device of the elimination polysilicon carbon head material that the present invention is provided, graphite base is socketed on electrode, graphite clamping petal group
It is arranged on graphite base, then the silicon core fixture that will be made up of polysilicon is arranged in the first mounting hole of graphite clamping petal group, will
Silicon core is arranged in the second mounting hole of silicon core fixture, and graphite clamping petal group loaded on graphite clamping petal group and is fixed on stone by graphite cap
On black base, silicon core is fixed through the through hole of graphite cap to silicon core, and during siliceous deposits forms silicon rod, silicon mainly sinks
Product is on silicon core and silicon core fixture.By first mounting hole and the second mounting hole of silicon core fixture of graphite clamping petal group, make silicon core
It is easier for installation, fixed effect more preferably, also, because silicon core fixture is made up of polycrystalline silicon material, siliceous deposits to silicon core with
When on silicon core fixture, can directly be utilized, no longer be carried out secondary stripping, graphite clamping petal secondary can be utilized, be reduced disappearing for the energy
Consumption, it is to avoid produce carbon head material, the increase of silicon material utilization rate can save the human resources and financial cost because separating carbon head material.
Brief description of the drawings
Technical scheme in order to illustrate more clearly the embodiments of the present invention, below will be attached to what is used needed for embodiment
Figure is briefly described, it will be appreciated that the following drawings illustrate only certain embodiments of the present invention, thus be not construed as it is right
The restriction of scope, for those of ordinary skill in the art, on the premise of not paying creative work, can also be according to this
A little accompanying drawings obtain other related accompanying drawings and fall within protection scope of the present invention.
Fig. 1 is the sectional view of the device of elimination polysilicon carbon head material provided in an embodiment of the present invention；
Fig. 2 is the sectional view of graphite base in the device for eliminating polysilicon carbon head material provided in an embodiment of the present invention；
Fig. 3 is the sectional view of graphite cap in the device for eliminating polysilicon carbon head material provided in an embodiment of the present invention；
Fig. 4 is the sectional view of graphite clamping petal group in the device for eliminating polysilicon carbon head material provided in an embodiment of the present invention；
Fig. 5 is the cross-sectional view of graphite clamping petal group in the device for eliminating polysilicon carbon head material provided in an embodiment of the present invention；
Fig. 6 is the sectional view of silicon core fixture in the device for eliminating polysilicon carbon head material provided in an embodiment of the present invention；
Fig. 7 is sectional view of the siliceous deposits on the device for eliminating polysilicon carbon head material in the present embodiment；
Fig. 8 is the cross-sectional view of silicon core fixture in the device for eliminating polysilicon carbon head material provided in an embodiment of the present invention.
Icon：100- eliminates the device of polysilicon carbon head material；110- graphite bases；130- graphite caps；150- graphite clamping petals
Group；170- silicon core fixtures；190- silicon cores；111- external screw threads；112- electrode holes；113- cylindrical holes；114- bellmouths；131- is installed
Portion；132- connecting portions；The mounting holes of 133- the 3rd；134- internal threads；135- through holes；160- card valves；The mounting holes of 151- first；152-
Medial surface；153- lateral surfaces；The mounting holes of 171- second；172- the first silicon core fixtures；173- the second silicon core fixtures；174- is contacted
Face.
Specific embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
A part of embodiment of the present invention, rather than whole embodiments.Present invention implementation generally described and illustrated in accompanying drawing herein
The component of example can be arranged and designed with a variety of configurations.Therefore, reality of the invention below to providing in the accompanying drawings
The detailed description for applying example is not intended to limit the scope of claimed invention, but is merely representative of selected implementation of the invention
Example.Based on the embodiment in the present invention, what those of ordinary skill in the art were obtained under the premise of creative work is not made
Every other embodiment, belongs to the scope of protection of the invention.
In the description of the invention, it is necessary to explanation, term " on ", D score, " interior ", the orientation or position of the instruction such as " outward "
The relation of putting is or the orientation or position that the invention product is usually put when using based on orientation shown in the drawings or position relationship
Relation is put, the description present invention is for only for ease of and is simplified description, it is necessary rather than the device or element for indicating or imply meaning
With specific orientation, with specific azimuth configuration and operation, therefore it is not considered as limiting the invention.Additionally, term
" first ", " second " etc. are only used for distinguishing description, and it is not intended that indicating or implying relative importance.
In the description of the invention, in addition it is also necessary to explanation, unless otherwise clearly defined and limited, term " setting ",
" installation ", " connection " should be interpreted broadly, for example, it may be being fixedly connected, or being detachably connected, or integratedly connect
Connect；Can be joined directly together, it is also possible to be indirectly connected to by intermediary, can be two connections of element internal.For this
For the those of ordinary skill in field, above-mentioned term concrete meaning in the present invention can be understood with concrete condition.
It should be noted that：Similar label and letter represents similar terms in following accompanying drawing, therefore, once a certain Xiang Yi
It is defined in individual accompanying drawing, then it need not be further defined and explained in subsequent accompanying drawing.
Embodiment
The sectional view of the device 100 of the elimination polysilicon carbon head material that Fig. 1 is provided for the present embodiment.Refer to Fig. 1, this implementation
In example, the device 100 for eliminating polysilicon carbon head material includes graphite base 110, graphite cap 130 and graphite clamping petal group 150.
The sectional view of graphite base 110 in the device 100 of the elimination polysilicon carbon head material that Fig. 2 is provided for the present embodiment.Please
In the lump refer to Fig. 1 and Fig. 2, in the present embodiment, the top of graphite base 110 is connected with graphite cap 130, graphite base 110 also with
Electrode is connected.Graphite base 110 is cylinder, and the top of graphite base 110 is provided with external screw thread 111, and graphite base 110 is set
There is the electrode hole 112 for sleeved electric pole.
Please continue to refer to Fig. 2, it is preferably provided with：Electrode hole 112 is coaxially disposed with graphite base 110, and electrode hole 112 includes circle
Post holes 113 and bellmouth 114, cylindrical hole 113 are connected with bellmouth 114, and cylindrical hole 113 runs through the upper surface of graphite base 110,
Bellmouth 114 is plugged in cylindrical hole 113 and bellmouth 114 through the lower surface of graphite base 110, electrode, makes graphite base
110 is more firm with the connection of electrode.
The sectional view of graphite cap 130 in the device 100 of the elimination polysilicon carbon head material that Fig. 3 is provided for the present embodiment.Please one
And refering to Fig. 1 and Fig. 3, in the present embodiment, graphite cap 130 is used to for graphite clamping petal group 150 and silicon core fixture 170 to be fixed on graphite
On base 110, graphite cap 130 includes connecting portion 132 and installation portion 131, and installation portion 131 is connected and positioned at even with connecting portion 132
The lower section of socket part 132, installation portion 131 is provided with the 3rd mounting hole 133, and the 3rd mounting hole 133 is provided with internal thread 134, the 3rd
The internal thread 134 of mounting hole 133 is matched with the external screw thread 111 on the top of graphite base 110, makes graphite cap 130 and graphite base 110
The threaded connection stablized, and convenient dismounting.
Continuing with Fig. 1 and Fig. 3 is referred in the lump, in the present embodiment, the lid of graphite cap 130 is loaded on graphite clamping petal group 150 and by stone
Black card valve group 150 is fixed on graphite base 110, and the connecting portion 132 of graphite cap 130 mainly coordinates with graphite clamping petal group 150, even
Socket part 132 is provided with through hole 135, for coordinating with graphite clamping petal group 150, when graphite cap 130 and graphite base 110 carry out screw thread
When connection, graphite cap 130 compresses graphite clamping petal group 150, and graphite clamping petal group 150 is fixed.
The sectional view of graphite clamping petal group 150 in the device 100 of the elimination polysilicon carbon head material that Fig. 4 is provided for the present embodiment.
Also referring to Fig. 1 and Fig. 4, in the present embodiment, graphite clamping petal group 150 is integrally formed, and its middle part has the first mounting hole 151,
Directly silicon core fixture 170 is plugged in the first mounting hole 151, silicon core fixture 170 is installed.
Preferably, in the present embodiment, graphite clamping petal group 150 includes multiple card valves 160, and multiple card valves 160 are resisted against stone
Black base 110, while multiple card valves 160 are arranged in through hole 135, through hole 135 is connected with the 3rd mounting hole 133, it is ensured that multiple
Card valve 160 is contacted with graphite base 110.
Continuing with Fig. 1 and Fig. 4 is referred in the lump, in the present embodiment, the first mounting hole 151 is surrounded between multiple card valves 160, the
One mounting hole 151 is used to install the silicon core fixture 170 and silicon core 190 being made up of polysilicon, meanwhile, in graphite cap 130 and graphite
When base 110 is threadedly coupled, graphite cap 130 will be compressed between multiple card valves 160, and to multiple card valves 160 and silicon
Core 190 is fixed.
The cross section of graphite clamping petal group 150 in the device 100 of the elimination polysilicon carbon head material that Fig. 5 is provided for the present embodiment
Figure.Also referring to Fig. 1, Fig. 4 and Fig. 5, in the present embodiment, graphite clamping petal group 150 includes the medial surface near silicon core fixture 170
152 and the lateral surface 153 away from silicon core fixture 170, medial surface 152 is arc surface, and lateral surface 153 is circular conical surface, each card valve
The sectional area of 160 one end away from graphite base 110 cuts less than one end of the close graphite base 110 of each card valve 160
Area, i.e., multiple card valves 160 are coupled together, and forming an inside has the round table-like structure of the first mounting hole 151 of cylinder,
Meanwhile, connecting portion 132 is provided with the round table-like through hole 135 coordinated with multiple card valves 160, makes graphite cap 130 and graphite base
During 110 carry out threaded process, the pressure of the multiple card valves 160 of 130 pairs, graphite cap gradually increases, advantageously in graphite clamping petal group
150 fixation.
Continuing with the lump refer to Fig. 1 and Fig. 4, in the present embodiment, graphite clamping petal group 150 away from the one of graphite base 110
End flushes with the upper surface of graphite cap 130, i.e. one end away from graphite base 110 of each card valve 160 is upper with graphite cap 130
End face, graphite clamping petal group 150 will not stretch out the through hole 135 of graphite cap 130, when silicon is deposited, be deposited on silicon
On core 190 and silicon core fixture 170, it is to avoid the generation of carbon head material, meanwhile, it is also convenient for silicon rod and graphite clamping petal group 150 and graphite cap
130 separation.
Please continue to refer to Fig. 5, in the present embodiment, graphite clamping petal group 150 includes three card valves 160, the one of each card valve 160
End is resisted against graphite base 110, and the first mounting hole 151 is surrounded between three card valves 160, so sets and more facilitates silicon core to press from both sides
The fixation of tool 170, meanwhile, the structure of setting is also fairly simple.
Similar implementation method can also be：Graphite clamping petal group 150 includes four card valves 160, one end of each card valve 160
Graphite base 110 is resisted against, the first mounting hole 151 is surrounded between four card valves 160, it is also possible to which silicon core fixture 170 is played
Fixed effect.
The sectional view of silicon core fixture 170, Fig. 7 in the device 100 of the elimination polysilicon carbon head material that Fig. 6 is provided for the present embodiment
It is sectional view of the siliceous deposits on the device 100 for eliminating polysilicon carbon head material in the present embodiment.Also referring to Fig. 1 and Fig. 6, this
In embodiment, silicon core fixture 170 is integrally formed, and its middle part has the second mounting hole 171, and silicon core 190 directly is plugged in into second
In mounting hole 171, silicon core fixture 170 is installed.
In the present embodiment, silicon core fixture 170 is inserted in the first mounting hole 151, and silicon core fixture 170 has for installing
Second mounting hole 171 of silicon core 190, graphite cap 130 has a through hole 135, silicon core fixture 170 away from graphite clamping petal group 150
One end passes through through hole 135, i.e. the part of silicon core fixture 170 is a part of in the first mounting hole 151 of graphite clamping petal group 150
Expose graphite cap 130 through the first mounting hole 151 and through hole 135, silicon core 190 is arranged on the second mounting hole of silicon core fixture 170
In 171, make siliceous deposits on silicon core 190 and silicon core fixture 170, it is to avoid carbon head material is formed, because silicon core fixture 170 is by polysilicon
Material is made, and when on siliceous deposits to silicon core 190 and silicon core fixture 170, can directly be utilized, and no longer carries out secondary stripping, makes
The formation of silicon rod more facilitates, and facilitates silicon rod to be separated with graphite clamping petal group 150, and graphite clamping petal group 150 secondary can be utilized, drop
The consumption of low energy, it is to avoid produce carbon head material, the increase of silicon material utilization rate can save the human resources and warp because separating carbon head material
Ji cost.
In the present embodiment, the cross section of the second mounting hole 171 of integrally formed silicon core fixture 170 be it is square, can be right
Square silicon core 190 is fixed, and the cross section of the second mounting hole 171 is circle, and circular silicon core 190 can be consolidated
It is fixed.Meanwhile, the shape of the cross section of the second mounting hole 171 is unrestricted, as long as can with the form fit of silicon core 190,
Avoid occurring the phenomenon of rod during silicon rod grows.
The cross-sectional view of silicon core fixture 170 in the device 100 of the elimination polysilicon carbon head material that Fig. 8 is provided for the present embodiment.
Also referring to Fig. 1, Fig. 6, Fig. 7 and Fig. 8, it is preferable that in the present embodiment, silicon core fixture 170 includes the first silicon being oppositely arranged
The silicon core fixture 173 of core fixture 172 and second, the first silicon core fixture 172 and the second silicon core fixture 173 are inserted in the first mounting hole
In 151 and the second mounting hole 171 is surrounded, silicon core 190 is arranged in the second mounting hole 171, more facilitates the fixation of silicon core 190,
And simple structure.
In the present embodiment, the first silicon core fixture 172 and the second silicon core fixture 173 include being close to the contact surface of silicon core 190
174, the cross section of contact surface 174 is semicircle, and the silicon core fixture 173 of contact surface 174 and second of the first silicon core fixture 172 connects
After contacting surface 174 is oppositely arranged, form circular, be i.e. circle is surrounded between the first silicon core fixture 172 and the second silicon core fixture 173
Second mounting hole 171, is fixed to circular silicon core 190.
Similar implementation method can also be：First silicon core fixture 172 and the second silicon core fixture 173 are included near silicon core
190 contact surface 174, the cross section of contact surface 174 is " L " shape, the silicon core of contact surface 174 and second of the first silicon core fixture 172
After the contact surface 174 of fixture 173 is oppositely arranged, form square, i.e. the first silicon core fixture 172 and the second silicon core fixture 173 it
Between surround the second square mounting hole 171, it is adaptable to the silicon core 190 of square shaped is fixed, it is to avoid silicon rod growth process
The middle phenomenon for occurring rod.
In the present invention, when device 100 for eliminating polysilicon carbon head material are needed to use, in the electrode of chassis of reducing furnace
Electrode is installed in hole 112, be placed on graphite base 110 on electrode by the electrode hole 112 for first passing through graphite base 110, graphite
Card valve group 150 is placed on graphite base 110 and graphite clamping petal group 150 has the first mounting hole 151, then by silicon core fixture 170
It is arranged in the first mounting hole 151 of graphite clamping petal group 150, and silicon core fixture 170 has the second mounting hole 171, by silicon core 190
It is arranged in the second mounting hole 171, graphite cap 130 covers dress from top to bottom, silicon core 190, silicon core fixture 170 is passed through graphite cap
130 through hole 135, and the 3rd mounting hole 133 of graphite cap 130 is coordinated with graphite clamping petal group 150, by graphite cap 130
It is pressed downward, graphite cap 130 is threadedly coupled with graphite base 110, during graphite cap 130 constantly threaded connection downwards,
Graphite cap 130 constantly compresses silicon core fixture 170 and graphite clamping petal group 150, and to silicon core 190, silicon core fixture 170 and graphite clamping
Valve group 150 is fixed, and covers reduction furnace bell jar, and when certain temperature is reached, silicon will deposit to silicon core 190 and silicon core folder
On tool 170, blowing out when growing 120 hours grows into the silicon rod of certain diameter.
The preferred embodiments of the present invention are the foregoing is only, is not intended to limit the invention, for the skill of this area
For art personnel, the present invention can have various modifications and variations.It is all within the spirit and principles in the present invention, made any repair
Change, equivalent, improvement etc., should be included within the scope of the present invention.
Claims (10)
1. a kind of device for eliminating polysilicon carbon head material, including graphite base, the graphite clamping petal being placed on the graphite base
Group and graphite cap, the graphite clamping petal group have the first mounting hole, it is characterised in that placed by many in first mounting hole
The silicon core fixture that crystal silicon is made, the graphite cap has through hole, and the silicon core fixture is through the through hole and has for installing
The graphite clamping petal group loaded on the graphite clamping petal group and is fixed on the stone by the second mounting hole of silicon core, the graphite cap
Black base.
2. it is according to claim 1 eliminate polysilicon carbon head material device, it is characterised in that the silicon core fixture include phase
To the first silicon core fixture and the second silicon core fixture that set, the first silicon core fixture and the second silicon core fixture are inserted in
First mounting hole is interior and surrounds second mounting hole.
3. it is according to claim 2 eliminate polysilicon carbon head material device, it is characterised in that the first silicon core fixture and
The second silicon core fixture includes the contact surface near the silicon core, and the cross section of the contact surface is semicircle.
4. it is according to claim 2 eliminate polysilicon carbon head material device, it is characterised in that the first silicon core fixture and
The second silicon core fixture includes the contact surface near the silicon core, and the cross section of the contact surface is " L " shape.
5. it is according to claim 1 eliminate polysilicon carbon head material device, it is characterised in that the graphite clamping petal group includes
Three card valves, one end of each card valve is resisted against the graphite base, and described first is surrounded between three card valves
Mounting hole.
6. it is according to claim 5 eliminate polysilicon carbon head material device, it is characterised in that the graphite clamping petal group has
Near the medial surface and the lateral surface away from the silicon core fixture of the silicon core fixture, the medial surface is arc surface, described outer
Side is circular conical surface, sectional area the leaning on less than each card valve of one end away from the graphite base of each card valve
The sectional area of one end of the nearly graphite base.
7. it is according to claim 6 eliminate polysilicon carbon head material device, it is characterised in that the graphite cap include connection
Portion, the connecting portion is provided with the round table-like through hole that conjunction is assembled with the graphite clamping petal.
8. it is according to claim 7 eliminate polysilicon carbon head material device, it is characterised in that the graphite clamping petal group it is remote
Flushed with the upper surface of the graphite cap from one end of the graphite base.
9. it is according to claim 8 eliminate polysilicon carbon head material device, it is characterised in that the graphite cap also include peace
Dress portion, the installation portion is connected with the connecting portion, and the installation portion is provided with the 3rd mounting hole, the 3rd mounting hole and institute
Through hole connection is stated, the 3rd mounting hole is provided with internal thread, and the graphite base is provided with outer with the screw-internal thread fit
Screw thread.
10. according to claim any one of 1-9 elimination polysilicon carbon head material device, it is characterised in that the graphite
Base is provided with the electrode hole for being socketed electrode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611163888.6A CN106744975A (en) | 2016-12-16 | 2016-12-16 | A kind of device for eliminating polysilicon carbon head material |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611163888.6A CN106744975A (en) | 2016-12-16 | 2016-12-16 | A kind of device for eliminating polysilicon carbon head material |
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| CN106744975A true CN106744975A (en) | 2017-05-31 |
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| CN201611163888.6A Pending CN106744975A (en) | 2016-12-16 | 2016-12-16 | A kind of device for eliminating polysilicon carbon head material |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108675303A (en) * | 2018-08-14 | 2018-10-19 | 亚洲硅业（青海）有限公司 | A kind of silicon core clamping device for polysilicon reduction furnace and clamp method |
| CN111646475A (en) * | 2020-06-03 | 2020-09-11 | 洛阳中硅高科技有限公司 | Integrated graphite base and electronic-grade polycrystalline silicon production system |
| CN114014323A (en) * | 2022-01-06 | 2022-02-08 | 南通友拓新能源科技有限公司 | High-temperature high-pressure carbon-silicon separation process and device |
| CN115159528A (en) * | 2022-07-13 | 2022-10-11 | 洛阳中硅高科技有限公司 | Graphite assembly for polycrystalline silicon reduction furnace and using method thereof |
| CN117921550A (en) * | 2024-03-22 | 2024-04-26 | 四川禾牧机械制造有限公司 | Automatic carbon head cleaning system and method |
| CN118324141A (en) * | 2024-06-14 | 2024-07-12 | 江苏墨标碳素科技有限公司 | A graphite chuck for polysilicon production |
Citations (5)
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| CN202072476U (en) * | 2011-06-07 | 2011-12-14 | 周英军 | Rectangular-hole graphite clamping claw for square silicon chip |
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| CN108675303A (en) * | 2018-08-14 | 2018-10-19 | 亚洲硅业（青海）有限公司 | A kind of silicon core clamping device for polysilicon reduction furnace and clamp method |
| CN108675303B (en) * | 2018-08-14 | 2019-07-26 | 亚洲硅业（青海）有限公司 | A kind of silicon core clamping device for polysilicon reduction furnace and clamp method |
| CN111646475A (en) * | 2020-06-03 | 2020-09-11 | 洛阳中硅高科技有限公司 | Integrated graphite base and electronic-grade polycrystalline silicon production system |
| CN111646475B (en) * | 2020-06-03 | 2024-06-11 | 洛阳中硅高科技有限公司 | Integrated graphite base and electronic grade polysilicon production system |
| CN114014323A (en) * | 2022-01-06 | 2022-02-08 | 南通友拓新能源科技有限公司 | High-temperature high-pressure carbon-silicon separation process and device |
| CN114014323B (en) * | 2022-01-06 | 2022-03-15 | 南通友拓新能源科技有限公司 | High-temperature high-pressure carbon-silicon separation process and device |
| CN115159528A (en) * | 2022-07-13 | 2022-10-11 | 洛阳中硅高科技有限公司 | Graphite assembly for polycrystalline silicon reduction furnace and using method thereof |
| CN117921550A (en) * | 2024-03-22 | 2024-04-26 | 四川禾牧机械制造有限公司 | Automatic carbon head cleaning system and method |
| CN117921550B (en) * | 2024-03-22 | 2024-06-04 | 四川禾牧机械制造有限公司 | Automatic carbon head cleaning system and method |
| CN118324141A (en) * | 2024-06-14 | 2024-07-12 | 江苏墨标碳素科技有限公司 | A graphite chuck for polysilicon production |
| CN118324141B (en) * | 2024-06-14 | 2024-11-08 | 江苏墨标碳素科技有限公司 | A graphite chuck for polysilicon production |
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