CN106711745A - Wide-tuning and narrow-linewidth nanosecond pulse double-resonance medium-infrared parameter oscillator - Google Patents
Wide-tuning and narrow-linewidth nanosecond pulse double-resonance medium-infrared parameter oscillator Download PDFInfo
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Abstract
一种双共振、宽调谐、窄线宽全固态纳秒脉冲中红外光学参量振荡器,器包含:单频泵浦光、双共振谐振腔、电学控制部分和种子光四部分,采用1.064μm单频脉冲激光器泵浦准相位匹配多周期极化晶体双共振参量振荡器,获得宽调谐范围近红外信号光、中红外空闲光的双波段激光输出;输出中心波长可在宽光谱范围内调谐,结合单频连续半导体激光器种子注入技术,通过电光晶体动态调节腔长,实现光学参量振荡器的窄线宽激光输出。本发明可广泛应用于高分辨率激光光谱学、激光雷达、激光遥感、环境探测、光电对抗、激光医疗等领域。
A double-resonance, wide-tuning, narrow-linewidth all-solid-state nanosecond pulse mid-infrared optical parametric oscillator, which includes four parts: single-frequency pump light, double-resonance resonator, electrical control part and seed light. Frequency pulse laser pumps quasi-phase-matched multi-period polarized crystal dual-resonance parametric oscillator to obtain dual-band laser output with wide tuning range near-infrared signal light and mid-infrared idle light; the output center wavelength can be tuned in a wide spectral range, combined with The single-frequency continuous semiconductor laser seed injection technology dynamically adjusts the cavity length through the electro-optic crystal to realize the narrow linewidth laser output of the optical parametric oscillator. The invention can be widely used in the fields of high-resolution laser spectroscopy, laser radar, laser remote sensing, environmental detection, photoelectric countermeasures, laser medical treatment and the like.
Description
技术领域technical field
本发明涉及一种光学器件,尤其涉及宽调谐、窄线宽的纳秒脉冲双共振中红外光学参量振荡器。通过温度、周期、角度调谐实现宽调谐范围激光输出,通过双谐振环形腔实现双波段振荡,结合种子注入技术实现窄线宽激光输出。适用于激光光谱学、激光雷达、激光遥感、环境污染探测、光电探测、激光医疗等领域。The invention relates to an optical device, in particular to a nanosecond pulse double-resonance mid-infrared optical parameter oscillator with wide tuning and narrow line width. Wide tuning range laser output is realized through temperature, period and angle tuning, dual-band oscillation is realized through double-resonant ring cavity, and narrow linewidth laser output is realized by combining seed injection technology. It is suitable for laser spectroscopy, laser radar, laser remote sensing, environmental pollution detection, photoelectric detection, laser medical treatment and other fields.
背景技术Background technique
近红外和中红外是光学波段中的非常重要的大气窗口。近红外波段不仅是激光对人眼最安全的波段,且处于大气传输窗口,对烟雾的穿透能力强,由此可发展高精度的测风、雷达等,进行天气预报和全球气候探测;中红外波段对大气透过率高,受气体分子吸收和悬浮物散射的影响小,且许多污染气体(SO2、CO2、NO2、NH4、NH3等)在中红外波段具有强烈的吸收峰,因此该波段在激光测距、激光雷达、激光遥感、高灵敏度气体探测等方面具有重要应用。The near-infrared and mid-infrared are very important atmospheric windows in the optical band. The near-infrared band is not only the safest band for lasers to human eyes, but also lies in the atmospheric transmission window, which has a strong ability to penetrate smoke, so that high-precision wind measurement, radar, etc. can be developed for weather forecasting and global climate detection; The infrared band has a high transmittance to the atmosphere, and is less affected by the absorption of gas molecules and the scattering of suspended matter, and many polluting gases (SO 2 , CO 2 , NO 2 , NH 4 , NH 3 , etc.) have strong absorption in the mid-infrared band Therefore, this band has important applications in laser ranging, laser radar, laser remote sensing, and high-sensitivity gas detection.
光学参量振荡器是目前产生中红外激光最普遍的方法,但是,考虑到晶体以及膜系的损伤阈值,传统的光学参量振荡器反射线宽通常为数纳米,连续工作模式,信噪比差,探测灵敏度差,难以满足对于线宽要求比较高的光谱学、激光遥感、环境探测等领域的需求。Optical parametric oscillators are currently the most common method for generating mid-infrared lasers. However, considering the damage threshold of crystals and films, traditional optical parametric oscillators usually have reflection linewidths of several nanometers, continuous working mode, and poor signal-to-noise ratio. The sensitivity is poor, and it is difficult to meet the needs of spectroscopy, laser remote sensing, environmental detection and other fields that require relatively high line width.
双谐振振荡器同时满足信号光和空闲光振荡,可实现紫外到远红外12μm的宽调谐范围激光输出,且不受抽运波长的限制。The dual-resonant oscillator satisfies the oscillation of signal light and idle light at the same time, and can realize laser output with a wide tuning range of 12 μm from ultraviolet to far infrared, and is not limited by the pumping wavelength.
准相位匹配技术,可以最大限度的利用晶体的非线性系数,采用多种方式调谐、起振阈值低、无走离效应、结构紧凑、可实现室温运作,在选定方向的匹配可使能量持续地从基频光向参量光转换。Quasi-phase matching technology can maximize the use of the nonlinear coefficient of the crystal, adopt multiple ways of tuning, low threshold of oscillation, no walk-off effect, compact structure, and can achieve room temperature operation. Matching in the selected direction can make the energy continuous Convert from fundamental frequency light to parametric light.
掺入氧化镁的周期性极化晶体(MgO:PPLN、MgO:PPLT)是一种高效率的波长转换非线性晶体,具有透光范围广(0.4~4.5μm)、使用寿命长,有效非线性系数高,低阈值、高效率的特点,是产生近红外-中红外激光波段的重要材料,与MgO:PPLN相比,MgO:PPLT具有更高的热传导系数。通过对多周期极化晶体进行温度、周期、角度调谐,可实现宽调谐的双波长输出。Periodically polarized crystals doped with magnesium oxide (MgO:PPLN, MgO:PPLT) are high-efficiency wavelength conversion nonlinear crystals with wide light transmission range (0.4-4.5μm), long service life, effective nonlinear With the characteristics of high coefficient, low threshold and high efficiency, it is an important material for producing near-infrared-mid-infrared laser bands. Compared with MgO:PPLN, MgO:PPLT has a higher thermal conductivity. By tuning the temperature, period, and angle of the multi-period polarized crystal, a wide-tuned dual-wavelength output can be realized.
常规的种子注入激光器系统采用压电陶瓷控制激光器的腔长,但由于压电陶瓷的非线性特性和振荡,往往导致激光器输出单频特性变差。Conventional seed injection laser systems use piezoelectric ceramics to control the cavity length of the laser, but due to the nonlinear characteristics and oscillation of piezoelectric ceramics, the output single-frequency characteristics of the laser often deteriorate.
发明内容Contents of the invention
本发明的目的在于提供一种小型化、宽调谐、窄线宽全固态纳秒脉冲中红外光学参量振荡器,解决脉冲光学参量振荡器线宽压窄、频率调谐和光谱控制等关键技术难题,可以注入任一谐振单频种子光,实现近红外信号光、中红外空闲光双波段的光谱压窄,应用前景光明。The purpose of the present invention is to provide a miniaturized, wide-tunable, and narrow-linewidth all-solid-state nanosecond pulse mid-infrared optical parametric oscillator, which solves key technical problems such as linewidth narrowing, frequency tuning, and spectrum control of the pulsed optical parametric oscillator. Any resonant single-frequency seed light can be injected to realize dual-band spectral narrowing of near-infrared signal light and mid-infrared idle light, and has a bright application prospect.
本发明的技术解决方案如下:Technical solution of the present invention is as follows:
宽调谐、窄线宽纳秒脉冲双共振中红外参量振荡器,特征在于该振荡器包含:单频泵浦光、双共振谐振腔、电学控制部分和种子光四部分;A wide-tuning, narrow-linewidth nanosecond pulse double-resonance mid-infrared parametric oscillator, characterized in that the oscillator includes four parts: single-frequency pump light, double-resonance resonator, electrical control part and seed light;
所述的泵浦光路包括1.064μm泵浦源、聚焦透镜、安装在可旋转的支架上的1.064μm半波片和偏振片;The pump optical path includes a 1.064 μm pump source, a focusing lens, a 1.064 μm half-wave plate and a polarizer mounted on a rotatable bracket;
所述的双共振谐振腔包括平凹第一腔镜、固定在晶体温控炉上的多周期极化晶体、平凹第二腔镜、平面第三腔镜、平面第四腔镜和分光镜,所述的多周期极化晶体与晶体温控炉一起固定在四维调整架上,用于调节多周期极化晶体的周期和角度;在平面第三腔镜和平面第四腔镜的中间插入电光晶体,二者的延长线上设有光电二极管;The double-resonance resonator includes a plano-concave first cavity mirror, a multi-period polarized crystal fixed on a crystal temperature-controlled furnace, a plano-concave second cavity mirror, a planar third cavity mirror, a planar fourth cavity mirror and a beam splitter , the multi-period polarized crystal is fixed on the four-dimensional adjustment frame together with the crystal temperature control furnace, and is used to adjust the period and angle of the multi-period polarized crystal; it is inserted in the middle of the plane third cavity mirror and the plane fourth cavity mirror An electro-optic crystal, with a photodiode on the extension line of the two;
所述的电学控制处理部分包括光电二极管、电光晶体、电光晶体驱动源和电光调制器和PID控制系统构成。所述的电光晶体驱动源的输出端与电光晶体的输入端相连,所述的PID控制系统的输入端分别与所述的光电二极管输出端、电光调制器的输出端相连,所述的PID控制系统的输出端与所述的电光晶体驱动源的输入端相连。The electrical control processing part includes a photodiode, an electro-optic crystal, an electro-optic crystal drive source, an electro-optic modulator and a PID control system. The output end of the electro-optic crystal driving source is connected to the input end of the electro-optic crystal, the input end of the PID control system is respectively connected to the output end of the photodiode output end and the electro-optic modulator, and the PID control system The output end of the system is connected with the input end of the electro-optic crystal driving source.
所述的种子光包括单频FPB种子激光器、准直透镜、隔离器、半波片、聚焦透镜和半透半反镜,所述的准直透镜、半波片和聚焦透镜均镀有对种子光高透的介质膜,半透半反镜的透射光路上设有电光调制器。Described seed light comprises single-frequency FPB seed laser, collimating lens, isolator, half-wave plate, focusing lens and semi-transparent mirror, and described collimating lens, half-wave plate and focusing lens are all coated with pair seed An electro-optic modulator is arranged on the transmission light path of the half-transparent half-mirror through a dielectric film with high light transmittance.
沿泵浦光路传播路径为:1.064μm泵浦源发出的泵浦光经过聚焦透镜耦合聚焦后,依次经1.064μm半波片、偏振片和双色镜后,再从平凹第一腔镜透射,入射到多周期极化晶体的中心位置,通过四维调整架调节多周期极化晶体的位置和角度,产生近红外信号光和中红外空闲光,剩余泵浦光从平凹第二腔镜透射出去。所述的偏振片与泵浦光路呈布儒斯特角放置,所述的偏振片与1.064μm半波片构成光强调节装置,用于调节入射泵浦光的光强;The propagation path along the pump light path is: the pump light emitted by the 1.064μm pump source is coupled and focused by the focusing lens, then passes through the 1.064μm half-wave plate, polarizer and dichroic mirror in turn, and then transmits from the plano-concave first cavity mirror. Incident to the center of the multi-periodically polarized crystal, the position and angle of the multi-periodically polarized crystal are adjusted through a four-dimensional adjustment frame to generate near-infrared signal light and mid-infrared idle light, and the remaining pump light is transmitted from the plano-concave second cavity mirror . The polarizer and the pump light path are placed at a Brewster angle, and the polarizer and the 1.064 μm half-wave plate constitute a light intensity adjustment device for adjusting the light intensity of the incident pump light;
沿种子光路传播路径为:单频FPB种子激光器发出的种子激光依次经过准直透镜、隔离器、半波片、聚焦透镜、半透半反镜和双色镜后耦合到泵浦光路,进而透过平凹第一腔镜,再经过多周期极化晶体后以15°度入射角入射到平凹第二腔镜,后依次经过平凹第二腔镜、平面第三腔镜、平面第四腔镜的全反射作用反射回平凹第一腔镜,反射后入射到平凹第一腔镜的种子激光一部分直接透过平凹第一腔镜和分光镜直接输出,另一部分经过平凹第一腔镜反射回入射种子光路,在环形腔内形成振荡闭合回路。所述的聚焦透镜用于把种子光耦合到多周期极化晶体的中心位置,所述的双色镜镀有对1.064μm高透,种子光45°高反的介质膜,所述的分光镜镀有对近红外信号光高透,对中红外空闲光高反的介质膜。The propagation path along the seed optical path is: the seed laser emitted by the single-frequency FPB seed laser passes through the collimating lens, isolator, half-wave plate, focusing lens, half-transparent mirror and dichroic mirror, and then is coupled to the pumping optical path, and then passes through the The plano-concave first cavity mirror is incident on the plano-concave second cavity mirror at an incident angle of 15° after passing through the multi-period polarized crystal, and then passes through the plano-concave second cavity mirror, the planar third cavity mirror, and the planar fourth cavity mirror in sequence The total reflection of the mirror is reflected back to the plano-concave first cavity mirror. After reflection, part of the seed laser incident on the plano-concave first cavity mirror is directly output through the plano-concave first cavity mirror and the beam splitter, and the other part is directly output through the plano-concave first cavity mirror and the beam splitter. The cavity mirror reflects back to the incident seed light path, forming an oscillating closed loop in the ring cavity. The focusing lens is used to couple the seed light to the central position of the multi-period polarized crystal. The dichroic mirror is coated with a dielectric film that is highly transparent to 1.064 μm and highly reflective at 45° for the seed light. The beam splitter is coated with There is a dielectric film that is highly transparent to near-infrared signal light and highly reflective to mid-infrared idle light.
所述的电学控制部分在工作周期内,电光调制器对通过半透半反镜的种子光进行频率、振幅调制,所述的光电二极管接受近红外信号光经过平面第三腔镜透射形成的干涉信号,同经过电光调制器后的信号混合产生误差信号,该误差信号经过PID控制系统进行处理,PID控制系统的输出驱动电光晶体驱动源,通过调节电光晶体驱动源电压驱动电光晶体,调节腔长,使光学参量振荡器的信号光频率锁定在种子激光频率上,获得窄线宽激光输出。所述的电光晶体为砷化镓晶体,所述的光电二极管为铟鎵砷光电探测器。In the working cycle of the electrical control part, the electro-optical modulator performs frequency and amplitude modulation on the seed light passing through the half-mirror, and the photodiode receives the interference formed by the transmission of the near-infrared signal light through the plane third cavity mirror. The signal is mixed with the signal after the electro-optic modulator to generate an error signal. The error signal is processed by the PID control system. The output of the PID control system drives the electro-optic crystal drive source. By adjusting the voltage of the electro-optic crystal drive source, the electro-optic crystal is driven to adjust the cavity length. , so that the signal light frequency of the optical parametric oscillator is locked on the seed laser frequency, and a narrow linewidth laser output is obtained. The electro-optic crystal is a gallium arsenide crystal, and the photodiode is an indium gallium arsenide photodetector.
所述的隔离器对种子激光的隔离度不小于20dB,便于对种子激光器进行有效保护。The isolation degree of the isolator to the seed laser is not less than 20dB, which is convenient for effective protection of the seed laser.
所述的晶体温控炉的控温范围为20~200℃,控温精度为±0.1℃。The temperature control range of the crystal temperature control furnace is 20-200°C, and the temperature control accuracy is ±0.1°C.
本发明具有以下优点:The present invention has the following advantages:
1、基于单频脉冲激光器输出的1.064μm激光泵浦多周期极化晶体,通过周期、角度、温度调谐,可以获得可调谐的双谐振近红外-中红外激光输出,具有调谐方便、覆盖范围广的优点;1. Based on the 1.064μm laser-pumped multi-period polarized crystal output by a single-frequency pulse laser, through period, angle, and temperature tuning, tunable dual-resonance near-infrared-mid-infrared laser output can be obtained, with convenient tuning and wide coverage The advantages;
2、本发明的环形腔结构有利于激光模式的稳定振荡和种子激光注入,双谐振腔能够实现近红外信号光和中红外空闲光双谐振单频参量激光输出。2. The ring cavity structure of the present invention is beneficial to stable oscillation of the laser mode and seed laser injection, and the double resonator can realize dual-resonance single-frequency parametric laser output of near-infrared signal light and mid-infrared idle light.
3、本发明采用主被动结合的频率控制技术控制半导体种子激光器频率特性,进而注入到光学谐振腔,通过电光晶体,将光学参量振荡器的谐振腔锁定在种子激光器的频率上,实现压窄光学参量光的线宽,提高光参量转换的效率的特点。3. The present invention adopts active-passive combination frequency control technology to control the frequency characteristics of the semiconductor seed laser, and then injects it into the optical resonant cavity. Through the electro-optic crystal, the resonant cavity of the optical parametric oscillator is locked on the frequency of the seed laser to realize narrowing optical The line width of parametric light improves the efficiency of optical parametric conversion.
附图说明Description of drawings
图1是本发明宽调谐、窄线宽纳秒脉冲双共振中红外激光振荡器实施例的结构示意图。Fig. 1 is a schematic structural diagram of an embodiment of a wide-tuning, narrow-linewidth nanosecond pulse double-resonance mid-infrared laser oscillator of the present invention.
图2是电学控制处理连线图。Figure 2 is a wiring diagram for electrical control processing.
具体实施方式detailed description
为进一步说明本发明的具体技术内容,以下结合实施例及附图详细说明如下:In order to further illustrate the specific technical content of the present invention, below in conjunction with embodiment and accompanying drawing, describe in detail as follows:
先参照图1,图1是本发明宽调谐、窄线宽纳秒脉冲双共振中红外参量振荡器的结构示意图,本发明包含四部分:单频泵浦光、双共振谐振腔、电学控制部分和种子光:Referring to Fig. 1 first, Fig. 1 is a structural schematic diagram of a wide-tuning, narrow-linewidth nanosecond pulse double-resonance mid-infrared parametric oscillator of the present invention. The present invention includes four parts: single-frequency pump light, double-resonance resonator, and electrical control part and seed light:
所述的单频泵浦光包括1.064μm泵浦源1-1、聚焦透镜1-2、安装在可旋转的支架上的1.064μm半波片1-3、偏振片1-4和双色镜1-5;The single-frequency pump light includes a 1.064 μm pump source 1-1, a focusing lens 1-2, a 1.064 μm half-wave plate 1-3 installed on a rotatable bracket, a polarizer 1-4 and a dichroic mirror 1 -5;
所述的双共振谐振腔包括平凹第一腔镜2-1、固定在晶体温控炉2-3上的多周期极化晶体2-2、平凹第二腔镜2-4、平面第三腔镜2-5、平面第四腔镜2-6和分光镜2-7,所述的多周期极化晶体2-2与晶体温控炉2-3一起固定在四维调整架上,用于调节多周期极化晶体2-2的周期和角度;在平面第三腔镜2-5和平面第四腔镜2-6的中间插入电光晶体3-2,二者的延长线上设有光电二极管3-1;The double-resonance resonator includes a flat-concave first cavity mirror 2-1, a multi-period polarized crystal 2-2 fixed on a crystal temperature control furnace 2-3, a flat-concave second cavity mirror 2-4, and a planar second cavity mirror 2-4. Three-cavity mirror 2-5, plane fourth cavity mirror 2-6 and beam splitter 2-7, described multi-period polarized crystal 2-2 is fixed on the four-dimensional adjustment frame together with crystal temperature control furnace 2-3, with To adjust the period and angle of the multi-period polarized crystal 2-2; the electro-optic crystal 3-2 is inserted in the middle of the plane third cavity mirror 2-5 and the plane fourth cavity mirror 2-6, and the extension line of the two is provided with photodiode 3-1;
所述的种子光包括单频FPB种子激光器4-1、准直透镜4-2、隔离器4-3、半波片4-4、聚焦透镜4-5和半透半反镜4-6,半透半反镜4-6的透射光路上设有电光调制器3-4。Described seed light comprises single-frequency FPB seed laser 4-1, collimating lens 4-2, isolator 4-3, half-wave plate 4-4, focusing lens 4-5 and half mirror 4-6, An electro-optic modulator 3-4 is arranged on the transmitted light path of the half-mirror 4-6.
沿泵浦光路传播路径为:1.064μm泵浦源1-1发出的泵浦光经过聚焦透镜1-2耦合聚焦后,依次经1.064μm半波片1-3、偏振片1-4和双色镜1-5后,再从平凹第一腔镜2-1透射,入射到多周期极化晶体2-2的中心位置,通过四维调整架调节多周期极化晶体的位置和角度,产生近红外信号光和中红外空闲光,剩余泵浦光从平凹第二腔镜2-3透射出去。所述的偏振片1-4与泵浦光路呈布儒斯特角放置,所述的偏振片1-4与1.064μm半波片1-3构成光强调节装置,用于调节入射泵浦光的光强;The propagation path along the pump light path is: the pump light emitted by the 1.064μm pump source 1-1 is coupled and focused by the focusing lens 1-2, and then passes through the 1.064μm half-wave plate 1-3, the polarizer 1-4 and the dichroic mirror After 1-5, it is transmitted from the plano-concave first cavity mirror 2-1, incident to the center position of the multi-period polarized crystal 2-2, and the position and angle of the multi-period polarized crystal are adjusted through the four-dimensional adjustment frame to generate near-infrared The signal light and mid-infrared idle light, and the remaining pump light are transmitted from the plano-concave second cavity mirror 2-3. The polarizer 1-4 and the pump light path are placed at a Brewster angle, and the polarizer 1-4 and the 1.064 μm half-wave plate 1-3 constitute a light intensity adjustment device for adjusting the incident pump light light intensity;
沿种子光路传播路径为:单频FPB种子激光器4-1发出的种子激光依次经过准直透镜4-2、隔离器4-3、半波片4-4、聚焦透镜4-5、半透半反镜4-6和双色镜1-5后耦合到泵浦光路,进而透过平凹第一腔镜2-1,再经过多周期极化晶体2-2后以15°度入射角入射到平凹第二腔镜2-4,后依次经过平凹第二腔镜2-4、平面第三腔镜2-5、平面第四腔镜2-6的全反射作用反射回平凹第一腔镜2-1,反射后入射到平凹第一腔镜2-1的种子激光一部分直接透过平凹第一腔镜2-1和分光镜2-7直接输出,另一部分经过平凹第一腔镜2-1反射回入射种子光路,在环形腔内形成振荡闭合回路。所述的聚焦透镜4-5用于把种子光耦合到多周期极化晶体2-2的中心位置,所述的双色镜1-5镀有对1.064μm高透,种子光45°高反的介质膜,所述的分光镜2-7镀有对近红外信号光高透,对中红外空闲光高反的介质膜。The propagation path along the seed optical path is: the seed laser emitted by the single-frequency FPB seed laser 4-1 passes through the collimator lens 4-2, isolator 4-3, half-wave plate 4-4, focusing lens 4-5, semi-transparent The mirror 4-6 and the dichroic mirror 1-5 are coupled to the pump light path, and then pass through the plano-concave first cavity mirror 2-1, and then pass through the multi-period polarized crystal 2-2 and enter the The plano-concave second cavity mirror 2-4 is then reflected back to the plano-concave first cavity mirror through the total reflection of the plano-concave second cavity mirror 2-4, the plane third cavity mirror 2-5, and the plano-concave fourth cavity mirror 2-6. Cavity mirror 2-1, after reflection, part of the seed laser incident on the plano-concave first cavity mirror 2-1 is directly output through the plano-concave first cavity mirror 2-1 and the beam splitter 2-7, and the other part passes through the plano-concave first cavity mirror 2-1 and the beam splitter 2-7. A cavity mirror 2-1 reflects back to the incident seed light path, forming an oscillating closed loop in the annular cavity. The focusing lens 4-5 is used to couple the seed light to the central position of the multi-period polarized crystal 2-2, and the dichroic mirror 1-5 is coated with 1.064 μm high transparency and 45° high reflection of the seed light Dielectric film, the beam splitter 2-7 is coated with a dielectric film that is highly transparent to near-infrared signal light and highly reflective to mid-infrared idle light.
所述的电学控制部分在工作周期内,电光调制器3-4对通过半透半反镜4-6的种子光进行频率、振幅调制,所述的光电二极管3-1接受近红外信号光经过平面第三腔镜2-5透射形成的干涉信号,同经过电光调制器3-4后的种子光信号混合产生误差信号,该误差信号再经过PID控制系统3-4的处理,PID控制系统3-4的输出作用于电光晶体驱动源3-3,通过调节电光晶体驱动源电压驱动电光晶体3-2,调节腔长,使光学参量振荡器的近红外信号光频率锁定在种子激光频率上,获得窄线宽近红外信号光和中红外空闲光输出。所述的电光晶体3-2为砷化镓晶体,所述的光电二极管3-1为铟鎵砷光电探测器。In the working cycle of the electrical control part, the electro-optic modulator 3-4 performs frequency and amplitude modulation on the seed light passing through the half-mirror 4-6, and the photodiode 3-1 receives the near-infrared signal light passing through The interference signal formed by the transmission of the plane third cavity mirror 2-5 is mixed with the seed optical signal passed through the electro-optic modulator 3-4 to generate an error signal, and the error signal is processed by the PID control system 3-4, and the PID control system 3 The output of -4 acts on the electro-optic crystal drive source 3-3, and the electro-optic crystal 3-2 is driven by adjusting the voltage of the electro-optic crystal drive source, and the length of the cavity is adjusted, so that the optical frequency of the near-infrared signal of the optical parametric oscillator is locked on the seed laser frequency, Obtain narrow linewidth near-infrared signal light and mid-infrared idle light output. The electro-optic crystal 3-2 is a gallium arsenide crystal, and the photodiode 3-1 is an indium gallium arsenide photodetector.
所述的1.064μm泵浦源1-1为激光二极管泵浦的Nd:YAG调Q激光器,输出波长为1.064μm,线宽接近傅里叶变换极限。The 1.064 μm pump source 1-1 is a Nd:YAG Q-switched laser pumped by a laser diode, the output wavelength is 1.064 μm, and the linewidth is close to the Fourier transform limit.
所述的平凹第一腔镜2-1镀有对1.064μm增透,对近红外信号光和中红外空闲光均部分透过、且透过率相同的介质膜;所述的平凹第二腔镜2-4镀有对1.064μm增透,对近红外信号光和中红外空闲光均高反的介质膜,所述的平面第三腔镜2-5,腔内反光面镀有对1.064μm高透,对近红外信号光高透,对中红外空闲光高反的介质膜,另一面镀有对1.064μm高透,对中红外空闲光的高反膜;所述的平面第四腔镜2-6镀有对1.064μm高透、近红外信号光和中红外空闲光均高反的介质膜。The plano-concave first cavity mirror 2-1 is coated with a dielectric film that is anti-reflective to 1.064 μm, partially transmits near-infrared signal light and mid-infrared idle light, and has the same transmittance; The second cavity mirror 2-4 is coated with a dielectric film that is antireflective to 1.064 μm and highly reflective to both near-infrared signal light and mid-infrared idle light. 1.064μm high transmittance, high transmittance for near-infrared signal light, high reflective dielectric film for mid-infrared idle light, the other side is coated with 1.064μm high transmittance, high reflective film for mid-infrared idle light; the fourth plane The cavity mirror 2-6 is coated with a dielectric film with high transparency of 1.064μm, high reflection of near-infrared signal light and mid-infrared idle light.
所述的多周期极化晶体2-2,其材料为MgO:PPLN或MgO:PPLT,其极化结构为多周期结构,极化周期为29μm、29.5μm、30μm、30.5μm,等间距变化,尺寸大小为50mm*3mm*7mm,该多周期极化晶体两个端面均镀有对1.064μm、近红外和中红外波段增透的介质膜。为了调谐方便,多周期极化晶体和晶体温控炉一起固定在一个四维调整架上,便于对晶体进行周期、角度和温度调谐。The material of the multi-period poled crystal 2-2 is MgO:PPLN or MgO:PPLT, and its polarization structure is a multi-period structure, and the polarization period is 29 μm, 29.5 μm, 30 μm, 30.5 μm, and the interval changes, The size is 50mm*3mm*7mm. Both ends of the multi-period polarized crystal are coated with a dielectric film that is anti-reflection for 1.064μm, near-infrared and mid-infrared bands. For the convenience of tuning, the multi-period polarized crystal and the crystal temperature control furnace are fixed together on a four-dimensional adjustment frame, which is convenient for period, angle and temperature tuning of the crystal.
所述的单频FPB种子激光器4-1为通过高精细温度和高精度电流稳频方案锁定的单一频率半导体种子激光器。The single-frequency FPB seed laser 4-1 is a single-frequency semiconductor seed laser locked by a high-precision temperature and high-precision current frequency stabilization scheme.
所述的晶体温控炉2-3的控温范围为20~200℃,控温精度为±0.1℃。The temperature control range of the crystal temperature control furnace 2-3 is 20-200°C, and the temperature control accuracy is ±0.1°C.
所述的准直透镜4-2和聚焦透镜4-5对种子激光进行光束变化,使其在环形谐振腔内与参量谐振光光斑大小一致,达到最佳的模式匹配。The collimating lens 4-2 and the focusing lens 4-5 change the beam of the seed laser so that the spot size of the parametric resonant light in the ring resonator is consistent with that of the parametric resonant light to achieve the best mode matching.
所述的隔离器4-3能保证种子激光的单向传输,避免光学器件表面反射或者从后腔镜漏出的激光进入种子激光器打坏种子激光,该隔离器对种子激光的隔离度不小于20dB。The isolator 4-3 can ensure the one-way transmission of the seed laser, avoiding the surface reflection of the optical device or the laser leaking from the rear cavity mirror entering the seed laser and damaging the seed laser. The isolation degree of the isolator to the seed laser is not less than 20dB .
本发明的具体实施例工作过程是,Nd:YAG泵浦激光器1-1输出的1.064μm非偏振激光经过聚焦透镜1-2,其焦点聚焦在多周期极化晶体2-2的中心处,耦合到多周期极化晶体2-2的泵浦光斑直径大小为800μm;再经过半波片1-3和偏振片1-4组成的光强调节装置,调节入射到环形谐振腔的泵浦光强;单频FPB种子激光器4-1产生的单频激光通过准直透镜4-2准直成平行光束后,经过隔离器4-3,再由聚焦透镜4-5聚焦到多周期极化晶体2-2的中心处,耦合到多周期极化晶体的种子光斑直径大小为600μm,再经过双色镜1-5与泵浦光路重合,入射到双谐振环形腔内。1.064μm泵浦光在多周期极化晶体2-2内部进行频率变换和振荡,经过多周期极化晶体2-2的频率转换过程,近红外信号光(1.3~1.7μm)和中红外空闲光(3.0~4.5μm)沿与入射泵浦光呈30°的方向由平凹第一腔镜2-1出射,剩余泵浦光由平凹第二腔镜2-4出射;输出的中红外空闲光和近红外信号光经过分光片2-7进行分离,信号光经过光纤耦合导入波长计,测量输出信号光具体的谐振波长,在通过调整单频DFB种子激光4-1的电流和温度参数进行控制,使其输出波长中心与测量的信号光输出的中心波长一致。单频FPB种子激光4-1一部分注入到双共振环形腔中,一部分通过电光调制器3-4进行频率、幅度调谐,光电二极管3-2用来探测透过平面第三腔镜的信号光信号,并转换为电信号,该电信号经过带通滤波、放大后,与经过电光调制后的信号进行混合成误差信号,然后该误差信号经过PID控制器系统3-5处理,PID控制系统的输出驱动电光晶体驱动源3-3,电光晶体驱动源给压电晶体3-2施加电压,电光晶体的折射率随之线性变化,进而快速调节腔长,使得输出信号光频率始终锁定在种子激光频率上,从而输出窄线宽的近红外信号光和中红外空闲光。The working process of the specific embodiment of the present invention is that the 1.064 μm non-polarized laser light output by the Nd:YAG pump laser 1-1 passes through the focusing lens 1-2, and its focus is focused on the center of the multi-period polarized crystal 2-2, coupled The diameter of the pump spot to the multi-period polarized crystal 2-2 is 800 μm; and then through the light intensity adjustment device composed of the half-wave plate 1-3 and the polarizer 1-4, the pump light intensity incident on the ring resonator is adjusted The single-frequency laser light produced by the single-frequency FPB seed laser 4-1 is collimated into a parallel beam by the collimating lens 4-2, passes through the isolator 4-3, and then is focused to the multi-period polarized crystal 2 by the focusing lens 4-5 At the center of -2, the diameter of the seed spot coupled to the multi-period polarized crystal is 600 μm, and then coincides with the pump light path through the dichroic mirror 1-5, and is incident into the double-resonant ring cavity. The 1.064μm pump light undergoes frequency conversion and oscillation inside the multi-period polarized crystal 2-2. (3.0~4.5μm) is emitted from the plano-concave first cavity mirror 2-1 along the direction of 30° to the incident pump light, and the remaining pump light is emitted from the plano-concave second cavity mirror 2-4; the output mid-infrared is idle Light and near-infrared signal light are separated by the beam splitter 2-7, the signal light is coupled into the wavelength meter through the optical fiber, and the specific resonance wavelength of the output signal light is measured, and the current and temperature parameters of the single-frequency DFB seed laser 4-1 are adjusted. Control so that the output wavelength center is consistent with the center wavelength of the measured signal light output. Part of the single-frequency FPB seed laser 4-1 is injected into the double-resonance ring cavity, and part of it is tuned by the electro-optic modulator 3-4 for frequency and amplitude. The photodiode 3-2 is used to detect the signal light signal transmitted through the plane third cavity mirror , and converted into an electrical signal, the electrical signal is band-pass filtered, amplified, and mixed with the electro-optical modulated signal to form an error signal, and then the error signal is processed by the PID controller system 3-5, and the output of the PID control system Drive the electro-optic crystal drive source 3-3, the electro-optic crystal drive source applies voltage to the piezoelectric crystal 3-2, the refractive index of the electro-optic crystal changes linearly, and then quickly adjusts the cavity length, so that the optical frequency of the output signal is always locked at the seed laser frequency , so as to output narrow-linewidth near-infrared signal light and mid-infrared idle light.
实验表明。本发明通过单频1.064μm激光泵浦环形双共振谐振腔,结合多周期极化晶体周期、角度、温度调谐,实现了信号光(1.3~1.7μm)和空闲光(3.0~4.5μm)的宽调谐范围激光输出;再通过注入与信号光频率相同的种子激光,可实现单频中红外空闲光、近红外信号光输出,有效压窄了线宽,使输出的激光光谱宽度小于0.1nm,克服了传统的光学参量振荡器透射线宽通常为数纳米、连续工作模式、信噪比差、探测灵敏度差的技术难题。本发明具有宽调谐、双谐振、单频性好的特点。Experiments show. The invention realizes signal light (1.3-1.7 μm) and idle light (3.0-4.5 μm) width by pumping ring-shaped dual-resonance resonator with single-frequency 1.064 μm laser, combined with multi-period polarization crystal cycle, angle, and temperature tuning. Tuning range laser output; by injecting a seed laser with the same frequency as the signal light, the output of single-frequency mid-infrared idle light and near-infrared signal light can be realized, which effectively narrows the line width and makes the output laser spectral width less than 0.1nm, overcoming The technical problems of the traditional optical parametric oscillator, such as the transmission line width of several nanometers, continuous working mode, poor signal-to-noise ratio, and poor detection sensitivity, have been overcome. The invention has the characteristics of wide tuning, double resonance and good single frequency performance.
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