CN106679597B - The support board of coating detection - Google Patents
The support board of coating detection Download PDFInfo
- Publication number
- CN106679597B CN106679597B CN201710002142.5A CN201710002142A CN106679597B CN 106679597 B CN106679597 B CN 106679597B CN 201710002142 A CN201710002142 A CN 201710002142A CN 106679597 B CN106679597 B CN 106679597B
- Authority
- CN
- China
- Prior art keywords
- plate
- substrate
- subelement
- groove
- support block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
- G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
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- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Geophysics And Detection Of Objects (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710002142.5A CN106679597B (en) | 2017-01-03 | 2017-01-03 | The support board of coating detection |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710002142.5A CN106679597B (en) | 2017-01-03 | 2017-01-03 | The support board of coating detection |
Publications (2)
Publication Number | Publication Date |
---|---|
CN106679597A CN106679597A (en) | 2017-05-17 |
CN106679597B true CN106679597B (en) | 2019-02-05 |
Family
ID=58848834
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710002142.5A Active CN106679597B (en) | 2017-01-03 | 2017-01-03 | The support board of coating detection |
Country Status (1)
Country | Link |
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CN (1) | CN106679597B (en) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101178543A (en) * | 2006-11-08 | 2008-05-14 | 大日本网目版制造株式会社 | Absorption workbench and base plate treating apparatus |
WO2008121561A1 (en) * | 2007-03-20 | 2008-10-09 | Kla-Tencor Corporation | Stabilizing a substrate using a vacuum preload air bearing chuck |
CN101745903A (en) * | 2008-12-15 | 2010-06-23 | 财团法人石材暨资源产业研究发展中心 | Composite platform with air floatation and adsorption bidirectional functions |
CN103217864A (en) * | 2012-01-18 | 2013-07-24 | 昆山允升吉光电科技有限公司 | Exposure method of electroformed mask plate |
CN205291881U (en) * | 2016-01-11 | 2016-06-08 | 莆田市嘉业光电电子有限公司 | Polylith LCD glass is with version silk screen printing positioning fixture |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9653338B2 (en) * | 2013-12-23 | 2017-05-16 | Kla-Tencor Corporation | System and method for non-contact wafer chucking |
-
2017
- 2017-01-03 CN CN201710002142.5A patent/CN106679597B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101178543A (en) * | 2006-11-08 | 2008-05-14 | 大日本网目版制造株式会社 | Absorption workbench and base plate treating apparatus |
WO2008121561A1 (en) * | 2007-03-20 | 2008-10-09 | Kla-Tencor Corporation | Stabilizing a substrate using a vacuum preload air bearing chuck |
CN101745903A (en) * | 2008-12-15 | 2010-06-23 | 财团法人石材暨资源产业研究发展中心 | Composite platform with air floatation and adsorption bidirectional functions |
CN103217864A (en) * | 2012-01-18 | 2013-07-24 | 昆山允升吉光电科技有限公司 | Exposure method of electroformed mask plate |
CN205291881U (en) * | 2016-01-11 | 2016-06-08 | 莆田市嘉业光电电子有限公司 | Polylith LCD glass is with version silk screen printing positioning fixture |
Also Published As
Publication number | Publication date |
---|---|
CN106679597A (en) | 2017-05-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20191202 Address after: 314300 No. 39 Donggang Road, Haiyan County Economic Development Zone, Jiaxing, Zhejiang Patentee after: Zhejiang Keteng Fastener Co., Ltd Address before: 315100 Zhejiang city of Ningbo province Yinzhou District Binhai investment center sail Road No. 218 Ningbo Aolai Star Lighting Co. Ltd Patentee before: Wu Gang |
|
CP01 | Change in the name or title of a patent holder | ||
CP01 | Change in the name or title of a patent holder |
Address after: 314300 No. 39 Donggang Road, Haiyan County Economic Development Zone, Jiaxing, Zhejiang Patentee after: Keteng environmental protection technology (Jiaxing) Co., Ltd Address before: 314300 No. 39 Donggang Road, Haiyan County Economic Development Zone, Jiaxing, Zhejiang Patentee before: Zhejiang Keteng Fastener Co., Ltd |
|
PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: Carrier plate for coating detection Effective date of registration: 20211216 Granted publication date: 20190205 Pledgee: Xitangqiao sub branch of Zhejiang Haiyan Rural Commercial Bank Co.,Ltd. Pledgor: Keteng environmental protection technology (Jiaxing) Co.,Ltd. Registration number: Y2021330002564 |