CN106660176B - 用于制造焊接接头的方法 - Google Patents
用于制造焊接接头的方法 Download PDFInfo
- Publication number
- CN106660176B CN106660176B CN201580044881.XA CN201580044881A CN106660176B CN 106660176 B CN106660176 B CN 106660176B CN 201580044881 A CN201580044881 A CN 201580044881A CN 106660176 B CN106660176 B CN 106660176B
- Authority
- CN
- China
- Prior art keywords
- copper
- tin
- particles
- substrate
- electronic component
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 183
- 239000010949 copper Substances 0.000 claims abstract description 183
- 229910052802 copper Inorganic materials 0.000 claims abstract description 150
- 239000002245 particle Substances 0.000 claims abstract description 129
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims abstract description 104
- 229910000679 solder Inorganic materials 0.000 claims abstract description 83
- 239000000758 substrate Substances 0.000 claims abstract description 77
- 229910052718 tin Inorganic materials 0.000 claims abstract description 72
- 238000000034 method Methods 0.000 claims abstract description 65
- 229910000881 Cu alloy Inorganic materials 0.000 claims abstract description 50
- 229910001128 Sn alloy Inorganic materials 0.000 claims abstract description 41
- 229910001316 Ag alloy Inorganic materials 0.000 claims abstract description 30
- 238000005476 soldering Methods 0.000 claims abstract description 24
- 239000000203 mixture Substances 0.000 claims abstract description 16
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims abstract description 12
- 229910052698 phosphorus Inorganic materials 0.000 claims abstract description 12
- 239000011574 phosphorus Substances 0.000 claims abstract description 12
- 229910001297 Zn alloy Inorganic materials 0.000 claims abstract description 9
- 238000001035 drying Methods 0.000 claims abstract description 6
- 238000000465 moulding Methods 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 239000002184 metal Substances 0.000 claims description 11
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 8
- 229910052709 silver Inorganic materials 0.000 claims description 8
- 239000004332 silver Substances 0.000 claims description 8
- 238000003466 welding Methods 0.000 claims description 8
- 239000012298 atmosphere Substances 0.000 claims description 4
- 239000011261 inert gas Substances 0.000 claims description 4
- 238000007639 printing Methods 0.000 claims description 4
- 238000007650 screen-printing Methods 0.000 claims description 4
- 238000000889 atomisation Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 3
- 239000002562 thickening agent Substances 0.000 claims description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 2
- 239000003990 capacitor Substances 0.000 claims description 2
- 239000003960 organic solvent Substances 0.000 claims description 2
- 229910052725 zinc Inorganic materials 0.000 claims description 2
- 239000011701 zinc Substances 0.000 claims description 2
- 239000002923 metal particle Substances 0.000 abstract description 15
- 239000000853 adhesive Substances 0.000 abstract description 3
- 230000001070 adhesive effect Effects 0.000 abstract description 3
- 238000001465 metallisation Methods 0.000 description 21
- 230000008569 process Effects 0.000 description 9
- 230000004907 flux Effects 0.000 description 8
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 229910045601 alloy Inorganic materials 0.000 description 4
- 239000000956 alloy Substances 0.000 description 4
- 238000005496 tempering Methods 0.000 description 4
- KRKNYBCHXYNGOX-UHFFFAOYSA-N citric acid Chemical compound OC(=O)CC(O)(C(O)=O)CC(O)=O KRKNYBCHXYNGOX-UHFFFAOYSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- -1 or in other words Substances 0.000 description 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- WNLRTRBMVRJNCN-UHFFFAOYSA-N adipic acid Chemical compound OC(=O)CCCCC(O)=O WNLRTRBMVRJNCN-UHFFFAOYSA-N 0.000 description 2
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- 150000001735 carboxylic acids Chemical class 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
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- 239000011888 foil Substances 0.000 description 2
- 235000011187 glycerol Nutrition 0.000 description 2
- 150000002334 glycols Chemical class 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- KEMQGTRYUADPNZ-UHFFFAOYSA-N heptadecanoic acid Chemical compound CCCCCCCCCCCCCCCCC(O)=O KEMQGTRYUADPNZ-UHFFFAOYSA-N 0.000 description 2
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 description 1
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- FRWYFWZENXDZMU-UHFFFAOYSA-N 2-iodoquinoline Chemical compound C1=CC=CC2=NC(I)=CC=C21 FRWYFWZENXDZMU-UHFFFAOYSA-N 0.000 description 1
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- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 229920002430 Fibre-reinforced plastic Polymers 0.000 description 1
- 108010010803 Gelatin Proteins 0.000 description 1
- 229910001374 Invar Inorganic materials 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 description 1
- 239000005642 Oleic acid Substances 0.000 description 1
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- KHPCPRHQVVSZAH-HUOMCSJISA-N Rosin Natural products O(C/C=C/c1ccccc1)[C@H]1[C@H](O)[C@@H](O)[C@@H](O)[C@@H](CO)O1 KHPCPRHQVVSZAH-HUOMCSJISA-N 0.000 description 1
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- 235000021355 Stearic acid Nutrition 0.000 description 1
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- 235000011037 adipic acid Nutrition 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 150000001338 aliphatic hydrocarbons Chemical class 0.000 description 1
- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- UKXSKSHDVLQNKG-UHFFFAOYSA-N benzilic acid Chemical compound C=1C=CC=CC=1C(O)(C(=O)O)C1=CC=CC=C1 UKXSKSHDVLQNKG-UHFFFAOYSA-N 0.000 description 1
- 229940087675 benzilic acid Drugs 0.000 description 1
- LTPBRCUWZOMYOC-UHFFFAOYSA-N beryllium oxide Inorganic materials O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 1
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- 235000015165 citric acid Nutrition 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- KUNSUQLRTQLHQQ-UHFFFAOYSA-N copper tin Chemical compound [Cu].[Sn] KUNSUQLRTQLHQQ-UHFFFAOYSA-N 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
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- 230000000875 corresponding effect Effects 0.000 description 1
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- 235000011852 gelatine desserts Nutrition 0.000 description 1
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- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 description 1
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- WQEPLUUGTLDZJY-UHFFFAOYSA-N n-Pentadecanoic acid Natural products CCCCCCCCCCCCCCC(O)=O WQEPLUUGTLDZJY-UHFFFAOYSA-N 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
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- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid Chemical compound CCCCCCCC\C=C/CCCCCCCC(O)=O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 description 1
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- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
- B23K35/0244—Powders, particles or spheres; Preforms made therefrom
- B23K35/025—Pastes, creams, slurries
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/02—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape
- B23K35/0222—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by mechanical features, e.g. shape for use in soldering, brazing
- B23K35/0244—Powders, particles or spheres; Preforms made therefrom
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/26—Selection of soldering or welding materials proper with the principal constituent melting at less than 400 degrees C
- B23K35/262—Sn as the principal constituent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/24—Selection of soldering or welding materials proper
- B23K35/30—Selection of soldering or welding materials proper with the principal constituent melting at less than 1550 degrees C
- B23K35/302—Cu as the principal constituent
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K35/00—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting
- B23K35/22—Rods, electrodes, materials, or media, for use in soldering, welding, or cutting characterised by the composition or nature of the material
- B23K35/36—Selection of non-metallic compositions, e.g. coatings, fluxes; Selection of soldering or welding materials, conjoint with selection of non-metallic compositions, both selections being of interest
- B23K35/362—Selection of compositions of fluxes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/27—Manufacturing methods
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
- H05K3/3485—Applying solder paste, slurry or powder
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/29198—Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
- H01L2224/29199—Material of the matrix
- H01L2224/29294—Material of the matrix with a principal constituent of the material being a liquid not provided for in groups H01L2224/292 - H01L2224/29291
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/29198—Material with a principal constituent of the material being a combination of two or more materials in the form of a matrix with a filler, i.e. being a hybrid material, e.g. segmented structures, foams
- H01L2224/29298—Fillers
- H01L2224/29299—Base material
- H01L2224/293—Base material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
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Abstract
用于将电子元件与基底牢固粘接地接合的方法,其中a)提供具有第一待接合表面的电子元件和具有第二待接合表面的基底;b)将铜膏施加到所述待接合表面的至少一个上并干燥所述铜膏层;c1)将焊料施加到干燥的铜膏层上,并布置所述电子元件和所述基底以使电子元件的第一待接合表面和基底的第二待接合表面借助干燥铜膏和焊料的双层组合物接触;或c2)布置所述电子元件和所述基底以使电子元件的第一待接合表面和基底的第二待接合表面借助干燥的铜膏接触,并紧邻干燥的铜膏层施加焊料;和d)焊接在步骤c1)或c2)中制成的装置以在所述电子元件和所述基底之间生成牢固粘接的接合;其中所述铜膏含有(i)66‑99重量%的各自具有0至≤500重量ppm的磷含量并选自铜粒子、富铜的铜/锌合金粒子和富铜的铜/锡合金粒子的至少一种类型的粒子,(ii)0‑20重量%的选自锡粒子、富锡的锡/铜合金粒子、富锡的锡/银合金粒子和富锡的锡/铜/银合金粒子的至少一种类型的焊接粒子,和(iii)1‑20重量%的载体,其中金属粒子(i)和(ii)的平均粒径≤15微米。
Description
技术领域
本发明涉及用于将电子元件与基底牢固粘接地接合的方法和可在所述方法中获得的装置(Anordnung)。
背景技术
WO 2011/009597 A1公开了一种用于将电子元件与基底牢固粘接地接合的方法,其中a) 提供具有第一待接合表面的电子元件和具有第二待接合表面的基底,b) 将焊膏施加到待接合表面的至少一个上,c) 布置所述电子元件和所述基底以使电子元件的第一待接合表面和基底的第二待接合表面借助焊膏接触,和d) 焊接来自c)的装置以在所述电子元件和所述基底之间生成牢固粘接的接合。焊膏的施加厚度在此为至少20微米。该方法中所用的焊膏含有(i) 10 - 30重量%(重量%)的铜粒子,(ii) 60 - 80重量%的由选自锡和锡-铜合金的至少一种物质制成的粒子,和(iii) 3 - 30重量%的助焊剂,其中所述铜粒子和所述由选自锡和锡-铜合金的至少一种物质制成的粒子的平均粒径≤ 15微米。
在DVS-Berichte, Elektronische Baugruppen und Leiterplatten EBL 2014(ISBN 978-3-87155-573-2)中发布的文章"Standard-Reflowlöten für Anwendungen bis300 ℃ – ein WiderspruchErgebnisse aus dem Verbundprojekt HotPowCon"中,A.Fix等人尤其报道了使用两种分开施加的膏,即使用含有铜粒子的膏和含有焊接金属粒子的膏进行操作的焊接方法。
通过根据WO 2011/009597 A1的方法制成的焊接接头实现良好强度,但在本发明的研发工作的过程中已证实在均匀性和避免空腔方面并最终在可靠性,特别是在例如250至300℃的高温条件下的可靠性方面可改进。
发明内容
本发明因此涉及用于将电子元件与基底牢固粘接地接合的方法,其中
a) 提供具有第一待接合表面的电子元件和具有第二待接合表面的基底;
b) 将铜膏施加到所述待接合表面的至少一个上并干燥所述铜膏层;
c1) 将焊料施加到干燥的铜膏层上,并布置所述电子元件和所述基底以使电子元件的第一待接合表面和基底的第二待接合表面借助干燥铜膏和焊料的双层组合物接触;
或
c2) 布置所述电子元件和所述基底以使电子元件的第一待接合表面和基底的第二待接合表面借助干燥的铜膏接触,并紧邻干燥的铜膏层施加焊料;和
d) 焊接在步骤c1)或c2)中制成的装置以在所述电子元件和所述基底之间生成牢固粘接的接合;
其中所述铜膏含有(i) 66 - 99重量%的各自具有0至≤ 500重量ppm的磷含量并选自铜粒子、富铜的铜/锌合金粒子和富铜的铜/锡合金粒子的至少一种类型的粒子,(ii)0 - 20重量%的选自锡粒子、富锡的锡/铜合金粒子、富锡的锡/银合金粒子和富锡的锡/铜/银合金粒子的至少一种类型的焊接粒子,和(iii) 1 - 20重量%的载体,其中金属粒子(i)和(ii)的平均粒径≤ 15微米。
相应地,在第一实施方案中是用于将电子元件与基底牢固粘接地接合的方法,其中
a) 提供具有第一待接合表面的电子元件和具有第二待接合表面的基底;
b) 将铜膏施加到所述待接合表面的至少一个上并干燥所述铜膏层;
c) 将焊料施加到干燥的铜膏层上,并布置所述电子元件和所述基底以使电子元件的第一待接合表面和基底的第二待接合表面借助干燥铜膏和焊料的双层组合物接触;和
d) 焊接在步骤c)中制成的装置以在所述电子元件和所述基底之间生成牢固粘接的接合;
其中所述铜膏含有(i) 66 - 99重量%的各自具有0至≤ 500重量ppm的磷含量并选自铜粒子、富铜的铜/锌合金粒子和富铜的铜/锡合金粒子的至少一种类型的粒子,(ii)0 - 20重量%的选自锡粒子、富锡的锡/铜合金粒子、富锡的锡/银合金粒子和富锡的锡/铜/银合金粒子的至少一种类型的焊接粒子,和(iii) 1 - 20重量%的载体,其中金属粒子(i)和(ii)的平均粒径≤ 15微米。
相应地,在第二实施方案中是用于将电子元件与基底牢固粘接地接合的方法,其中
a) 提供具有第一待接合表面的电子元件和具有第二待接合表面的基底;
b) 将铜膏施加到所述待接合表面的至少一个上并干燥所述铜膏层;
c) 布置所述电子元件和所述基底以使电子元件的第一待接合表面和基底的第二待接合表面借助干燥的铜膏接触,并紧邻干燥的铜膏层施加焊料;和
d) 焊接在步骤c)中制成的装置以在所述电子元件和所述基底之间生成牢固粘接的接合;
其中所述铜膏含有(i) 66 - 99重量%的各自具有0至≤ 500重量ppm的磷含量并选自铜粒子、富铜的铜/锌合金粒子和富铜的铜/锡合金粒子的至少一种类型的粒子,(ii)0 - 20重量%的选自锡粒子、富锡的锡/铜合金粒子、富锡的锡/银合金粒子和富锡的锡/铜/银合金粒子的至少一种类型的焊接粒子,和(iii) 1 - 20重量%的载体,其中金属粒子(i)和(ii)的平均粒径≤ 15微米。
根据本发明,电子元件被理解为是指电气和/或电子电路的元件。该电子元件可以例如是芯片,优选无外壳的裸芯片(半导体芯片)、半导体二极管、晶体管、电阻器或电容器。
在本发明的范围内,基底被理解为是指将电子元件与其接合的物体。该基底可以例如是印刷电路板、直接覆铜(DBC或DCB)或引线框。
术语印刷电路板在本文中用作印刷电路卡(Leiterkarte)、电路板或印刷电路的同义词并且描述用于电子元件的载体。印刷电路板由电绝缘材料与粘接到其上的导电接点(印刷导线)构成。例如可以使用纤维增强的塑料作为电绝缘材料。
直接覆铜表示陶瓷板(例如由氧化铝、氮化铝或氧化铍制成),其中一个表面或两个具有最大面积的互相平行表面通过高温下的氧化过程与铜结合。在所选条件下,形成铜和氧的低共熔混合物(Eutektikum),其既与铜又与基底的氧化物结合。
引线框被理解为是指基本仅由芯片载体和连接导线构成的IC(集成电路、微芯片)外壳。术语引线框在本文中用作术语连接框和芯片载体的同义词。芯片载体包含构成其基础构架(Grundgerüst)并由金属例如铜、铜合金、铜和整理剂(Finisher)(例如镍、银或金)的组合、铁-镍合金或其它因瓦合金制成的基底。
该电子元件包含至少一个第一表面,其旨在用于借助在步骤c1)中由干燥铜膏和焊料的双层组合物或在步骤c2)中由干燥铜膏制成的接触层将该电子元件与基底表面接合。所述表面也可以是较大表面的一部分。
该基底包含至少一个第二表面,其旨在用于借助在步骤c1)中由干燥铜膏和焊料的双层组合物或在步骤c2)中由干燥铜膏制成的接触层将该电子元件与基底表面接合。所述表面也可以是较大表面的一部分。
根据本发明,借助在步骤c1)中由干燥铜膏和焊料的双层组合物或在步骤c2)中由干燥铜膏制成的接触层与基底接合的电子元件的表面被称作“第一待接合表面”,而借助相应的接触层与电子元件接合的基底的表面被称作“第二待接合表面”。
通常,至少在电子元件的第一待接合表面上施加金属化层。也通常至少在基底的第二待接合表面上施加金属化层。通常,电子元件和基底都至少在待接合的表面上具有金属化层。因此通常,电子元件在位于基底表面上的金属化层对面的表面上包含金属化层,并且所述金属化层经由接触层互相接合。在本发明的范围内,通常存在的电子元件的金属化层是该电子元件的一部分,且通常存在的基底的金属化层是该基底的一部分。
如果存在金属化层,该金属化层优选占该电子元件的至少一个表面的至少50%,更优选至少70%,再更优选至少90%,特别优选至少95%,例如100%的面积比例。在基底上,该金属化层优选占经由接触层与电子元件接合的表面的至少50%,更优选至少70%,再更优选至少90%,特别优选至少95%,例如100%的面积比例。
该金属化层优选是可焊接层。该金属化层优选含有选自铜、银、金、锡和钯的至少一种元素。该金属化层可以完全由这些元素、这些元素的可焊接化合物或这些元素的混合物或合金构成。
在步骤b)中,将铜膏施加到电子元件或基底的待接合表面的至少一个上,并干燥。
基于其重量计,该铜膏含有(i) 66 - 99重量%,优选68 - 95重量%,更优选70 -92重量%的各自具有0至≤ 500重量ppm,例如> 0至≤ 500重量ppm,优选≥ 0至≤ 100重量ppm,更优选≥ 0至≤ 50重量ppm,特别是≥ 0至≤ 10重量ppm的磷含量并选自铜粒子、富铜的铜/锌合金粒子和富铜的铜/锡合金粒子的至少一种类型的粒子,(ii) 0 - 20重量%,优选5 - 15重量%的选自锡粒子、富锡的锡/铜合金粒子、富锡的锡/银合金粒子和富锡的锡/铜/银合金粒子的至少一种类型的焊接粒子,和(iii) 1 - 20重量%,优选5 - 15重量%的载体,其中金属粒子(i)和(ii)的平均粒径≤ 15微米。
优选地,基于其重量计,该铜膏由(i) 66 - 99重量%,优选68 - 95重量%,更优选70 - 92重量%的各自具有0至≤ 500重量ppm,例如> 0至≤ 500重量ppm,优选≥ 0至≤100重量ppm,更优选≥ 0至≤ 50重量ppm,特别是≥ 0至≤ 10重量ppm的磷含量并选自铜粒子、富铜的铜/锌合金粒子和富铜的铜/锡合金粒子的至少一种类型的粒子,(ii) 0 - 20重量%,优选5 - 15重量%的选自锡粒子、富锡的锡/铜合金粒子、富锡的锡/银合金粒子和富锡的锡/铜/银合金粒子的至少一种类型的焊接粒子,和(iii) 1 - 20重量%,优选5 - 15重量%的载体构成,其中金属粒子(i)和(ii)的平均粒径≤ 15微米。
该铜膏中所含的铜粒子的铜的纯度优选为至少99.9%(3 N),更优选至少99.99%(4N)。在由富铜的铜/锌合金和/或富铜的铜/锡合金制成的粒子的情况下,该组成例如为60至99.5重量%的铜和相应地0.5至40重量%锌和/或锡。在每种情况下,所有粒子的磷含量为 0至≤ 500重量ppm,例如> 0至≤ 500重量ppm,优选≥ 0至≤ 100重量ppm,更优选≥ 0至≤50重量ppm,特别是≥ 0至≤ 10重量ppm。该粒子优选是通过在惰性气体气氛中雾化制成的粒子,或换言之,通过液态(熔融)铜和/或所述铜合金之一的熔体雾化到惰性气体气氛中制成的粒子。
如已所述,在一个实施方案中,该铜膏可含有选自锡粒子、富锡的锡/铜合金粒子、富锡的锡/银合金粒子和富锡的锡/铜/银合金粒子的至少一种类型的焊接金属粒子(ii)。
如果该铜膏中含有由富锡的锡/铜合金、锡/银合金和/或锡/铜/银合金制成的焊接金属粒子,则其锡含量优选为95 - 99.5重量%,而铜和/或银的含量相应地为0.5 - 5重量%。
金属粒子(i)和(ii)的平均粒径≤ 15微米,优选≤ 13微米,更优选≤ 11微米,再更优选≤ 8微米。该平均粒径优选为2 – 15微米,更优选2 – 13微米,再更优选2 – 11微米,再更优选2 – 8微米。
本文所用的术语“平均粒径”是指可用光学显微镜测得的平均粒度(d50)。可以用与常规数字图像处理系统(CCD数码相机和评估软件)组合的例如在200倍放大率下的光学显微镜,例如用来自Microvision Instruments的测量系统进行这种类型的测量。
例如,≤ 15微米的平均粒径可以是指至少90%的粒子具有≤ 15微米的粒径且少于10%的粒子具有大于15微米的粒径。相应地,2-15微米的平均粒径是指至少90%的粒子具有2-15微米的粒径且少于10%的粒子具有小于2微米或大于15微米的粒径。
根据本发明可能优选的是,少于1%的粒子(i)和(ii)超过特定的粒径。可被少于1%的粒子(i)和(ii)超过的所述粒径优选为15微米,更优选11微米,再更优选8微米。
粒子(i)和(ii)可具有不同几何。但是,粒子(i)和(ii)优选为球形。但是,本领域技术人员显而易见的是,由于生产所致,所用的粒子(i)和(ii)中的次要部分也可以为非球形。但是优选的是,至少90重量%,更优选至少95重量%,再更优选至少99重量%或100重量%的粒子(i)和(ii)以球形存在。还优选的是,该铜膏中少于5重量%,更优选少于1重量%,再更优选少于0.1重量%,例如0重量%的粒子(i)和(ii)以薄片形存在。
除(i)类型和任选(ii)类型的金属粒子外,该铜膏还包含所谓的载体(iii),其包含一种或多种任选改性的天然增稠剂(例如明胶、淀粉、果胶、纤维素醚、天然有机油的酯)和有机溶剂(例如二醇、甘油、萜品醇、脂族烃)或由其构成。该载体的增稠剂含量为例如0.5- 15重量%,优选2 - 10重量%,更优选4 - 7重量%,而溶剂含量为85 - 99.5重量%,优选90- 98重量%,更优选93 - 96重量%。
方法步骤b)中的铜膏的施加可以通过根据现有技术已知的方法之一,例如丝网印刷法、模版印刷法、喷射-或分配技术实施。
铜膏不需要覆盖电子元件或基底的整个表面。相反,铜膏也可以仅施加到电子元件或基底的表面的一部分上,例如施加到所选焊接表面上。该铜膏例如以20 – 200微米的层厚度施加,然后在50 – 160℃的物体温度下干燥例如10 - 60分钟。然后,接着进行方法步骤c1)或c2)。
方法步骤c1)或c2)中所用的焊料可以是焊膏或一个或多个由焊接金属制成的焊接模制件。
在焊膏形式的焊料的情况下,该焊膏,基于其重量计,可含有(a) 80 - 99重量%,优选85 - 95重量%,更优选87 - 92重量%的选自锡粒子、富锡的锡/铜合金粒子、富锡的锡/银合金粒子和富锡的锡/铜/银合金粒子的至少一种类型的焊接金属粒子,和(b) 1 - 20重量%,优选5 - 15重量%,更优选8 - 13重量%的助焊剂或载体。优选地,基于其重量计,该焊膏由(a) 80 - 99重量%,优选85 - 95重量%,更优选87 - 92重量%的选自锡粒子、富锡的锡/铜合金粒子、富锡的锡/银合金粒子和富锡的锡/铜/银合金粒子的至少一种类型的焊接金属粒子,和(b) 1 - 20重量%,优选5 - 15重量%,更优选8 - 13重量%的助焊剂或载体构成。
如果该焊膏中含有由富锡的锡/铜合金、锡/银合金和/或锡/铜/银合金制成的焊接金属粒子,则其锡含量例如为95 - 99.5重量%,而铜和/或银的含量相应地为0.5 - 5重量%。
关于锡粒子或富锡粒子的平均粒径,上文对金属粒子(i)和(ii)的平均粒径所述的内容同样适用。
如果该焊膏含有助焊剂,该助焊剂的任务是在焊接过程中还原(即去氧化)基底和/或电子元件的表面,防止在焊接操作之前和之后重新形成氧化物,和减少外来物质的夹杂。此外,通过助焊剂的添加应降低该液体焊料的表面张力。例如,可以使用松香、基于松香的树脂体系、基于水的树脂体系或基于羧酸(例如羧酸如柠檬酸、己二酸、肉桂酸和二苯乙醇酸(Benzylsäure))、胺(例如叔胺)和溶剂(例如含有水和多元醇如二醇或甘油的极性溶剂)的体系作为助焊剂。
此外,该焊膏中可含有附加成分,例如醇、脂肪酸(例如饱和脂肪酸,如油酸、肉豆蔻酸、棕榈酸、十七烷酸、硬脂酸或二十烷酸)、聚硅氧烷化合物或磷化物化合物。
如已所述,该焊膏可含有所谓的载体代替助焊剂。为了避免不必要的重复,参考上文在描述铜膏的上下文中对载体所作的阐述。
方法步骤c1)或c2)中的焊膏的施加可以通过根据现有技术已知的方法之一,例如丝网印刷法、模版印刷法、喷射-或分配技术实施。在包含方法步骤c1)的本发明方法的实施方案中,将该焊膏施加到干燥的铜膏上,在包含方法步骤c2)的实施方案中紧邻干燥的铜膏施加。在后一情况中可以如下操作,以使得该焊膏从侧面接触干燥的铜膏或具有与干燥的铜膏例如最多2毫米的短距离;在稍后的方法步骤d)中的焊接过程中,该焊膏最终流动并通过毛细管效应的辅助而渗入干燥的铜膏基质。该焊膏例如以20 – 200微米的湿层厚度施加,并任选地在50 - 160℃的物体温度下干燥例如10 - 60分钟。
至少一个由焊接金属制成的模制件形式的焊料是例如小球、箔、线或圆柱体。该模制件选自锡模制件、富锡的锡/铜合金模制件、富锡的锡/银合金模制件和富锡的锡/铜/银合金模制件。在富锡的锡/铜合金、锡/银合金和/或锡/铜/银合金的情况下,其锡含量为例如95 - 99.5重量%,而铜和/或银的含量相应地为0.5 - 5重量%。
所述至少一个焊接金属模制件的施加通常在于简单的放置。在包含方法步骤c1)的本发明方法的实施方案中,将至少一个焊接金属模制件放置在干燥的铜膏上,在包含方法步骤c2)的实施方案中紧邻干燥的铜膏放置。在后一情况中可以如下操作,以使得所述至少一个焊接金属模制件从侧面接触干燥的铜膏或具有与干燥的铜膏例如最多2毫米的短距离;在稍后的方法步骤d)中的焊接过程中,所述至少一个焊接金属模制件最终熔融和流动,并通过毛细管效应的辅助而渗入干燥的铜膏基质。
所述铜膏和焊料都不含铅,因此无铅。根据本发明,无铅被理解为是指该铜膏和焊料除由于技术所致而任选存在的铅杂质外不含铅。相应地,无铅被理解为是指基于铜膏和/或焊料的重量计小于1,优选小于0.5,更优选小于0.1,再更优选小于0.01重量%,特别是0重量%的铅含量。
根据本发明,电子元件和基底通过焊接而牢固粘接地互相接合。相应地,牢固粘接的接头是其中接合配对物通过原子力或分子力粘结在一起的接头。它们优选是只能通过破坏该接合件而分开的不可分离接头。
根据本发明,首先形成由基底、电子元件和位于基底与电子元件之间的干燥铜膏和焊料的双层组合物构成或由基底、电子元件和位于基底与电子元件之间的干燥铜膏层及紧邻其施加的焊料构成的装置。相应地,布置基底和电子元件以使基底的第一待接合表面和电子元件的第二待接合表面经由干燥铜膏和焊料的双层组合物或经由干燥铜膏及紧邻其施加的焊料互相接触。
通常,所述双层组合物或所述干燥铜膏优选与通常存在的基底的金属化层和通常存在的电子元件的金属化层接触。
优选地,在包含方法步骤c1)的本发明方法的实施方案中,为此首先如上所述在基底的待接合表面上,优选在基底的包含金属化层的表面上施加干燥铜膏和焊料的双层组合物。随后,将电子元件以表面,优选以包含金属化层的表面放置在该干燥铜膏和焊料的双层组合物上。
优选地,在包含方法步骤c2)的本发明方法的实施方案中,为此首先如上所述在基底的待接合表面上,优选在基底的包含金属化层的表面上施加干燥的铜膏层。然后,如上所述紧邻该干燥的铜膏层施加焊料。随后,将电子元件以表面,优选以包含金属化层的表面放置在干燥铜膏上。
在本发明方法的这两个可选方案中,即在包含方法步骤c1)的本发明方法的实施方案中和在包含方法步骤c2)的实施方案中,在方法步骤d)中,最后焊接由电子元件、基底和位于它们之间的干燥铜膏和焊料的双层组合物或者干燥铜膏层及紧邻其施加的焊料(即及从侧面接触干燥的铜膏或具有与干燥的铜膏例如最多2毫米的短距离的焊料)构成的装置,并形成由电子元件、基底和位于它们之间的接触层的装置。根据一般定义,焊接在此被理解为是指用于牢固粘接地接合材料而不达到该材料的固相线温度的热方法。
为了焊接,将上述装置优选均匀加热直至达到实际的焊接温度。根据一个优选实施方案,该加热以≤ 3℃/秒的速度进行。
优选地,焊接温度超过焊料中所含的焊接金属的熔融温度大约10 - 50℃,更优选大约15 - 45℃,再更优选大约25 - 35℃,例如大约30℃。根据另一优选实施方案,焊接温度低于280℃,例如为240 - 260℃。
为了焊接,将该温度保持在超过焊料中所含的焊接金属的液相线温度至少15秒,优选至少20秒,再更优选至少30秒的时间。
据推测,在将焊接的装置冷却到低于来自焊料的焊接金属的液相线温度时,源自铜膏的粒子(i)的铜扩散到在焊接操作时生成的低共熔锡-铜相中。
在焊接操作后,可以有利地对在焊接操作时获得的由电子元件、基底和位于之间的接触层构成的装置进行回火(tempern)。回火被理解为是指在低于焊料的液相线温度对该装置进行热处理。
该热处理优选在高于40℃,例如40 - 217℃,更优选100 - 210℃,再更优选150 -205℃的温度下进行。该热处理优选进行1分钟至24小时,更优选10分钟至10小时,再更优选20分钟至1小时的持续时间。回火持续时间通常与温度相关联,并且用于回火的温度越低,该持续时间越长。
本发明的方法不需要对用于制造由电子元件、基底和位于之间的接触层构成的装置的常规方法做出昂贵的修改。特别地,本发明的方法对用于传统焊接方法的机器也没有特别要求。本发明的方法因此可以例如在常规条件下和通过使用任选已存在的机器进行。
根据一个优选实施方案,本发明的装置借助上述方法可制造或制造。
在本发明的装置中,电子元件与基底之间的距离为例如20至200微米。所述距离被理解为是指电子元件和基底的待接合表面之间的距离,其中通常存在的金属化层归属于电子元件和/或基底。所述距离因此相当于在焊接后电子元件与基底之间的接触层的厚度。
根据本发明,可以在上述焊接操作时调节焊接条件、铜膏的施加厚度、焊料的量和/或施加厚度、温度和时间、以及任选的回火条件,特别是温度和时间,以获得上述接触层。通过相应显微磨片的评估,容易地追踪具有所需性质的接触层的形成。
具体实施方式
实施例:
本发明的实施例1:
制备包含91重量%的具有8微米的平均粒径和5重量ppm的磷含量的铜粒子并含有9重量%的载体(在有机溶液中的乙基纤维素)的铜膏。
将该铜膏经金属模板施加到铜板上。铜膏的施加厚度为80微米。随后,对带有该铜膏的铜板表面用机器配备包含由镍/银制成的金属化层的尺寸3 mm x 3 mm的裸芯片。为此,将裸芯片放置在铜膏上以使裸芯片的金属化层经由该铜膏与铜板接触。将焊接模制件(具有0.5毫米直径和3毫米长度的由SnAg3.0Cu0.5合金制成的焊丝)紧邻这一装置施加到铜板上。
现在,将由铜板、裸芯片和位于它们之间的铜膏和施加的焊接模制件构成的装置引入室型(Kammer)焊接炉中,以0.5 开尔文/秒的速率加热到60℃的温度,并在惰性气体气氛中在此温度下干燥1小时。此后立即将温度提高到200℃,借助甲酸饱和的氮气气氛将反应表面,即焊膏模制件、干燥铜膏中间层中的铜粒子和铜板表面活化/还原。然后,在同一焊接炉中将温度提高到260℃,并将所述装置在真空(1毫巴)中焊接10分钟的焊接时间。
本发明的实施例2:
与实施例1中相同操作,唯一的差别在于铜粒子的磷含量为500重量ppm。
对比例3:
与实施例1中相同操作,唯一的差别在于铜粒子的磷含量为1100重量ppm。
参比例4:
根据实施例1制造可比拟的装置;但这不使用铜膏进行。
根据3 mm x 3 mm的裸芯片尺寸,由SnAg3.0Cu0.5合金制造0.1毫米厚的箔形式的焊接模制件,施加到铜板上,并又将裸芯片置于其上。所述装置如实施例1中那样在相同活化参数和240℃的降低的焊接温度下焊接,但没有其中所述的干燥步骤。
在根据实施例1至4制成的焊接接头和/或焊接的装置的强度的各种试验中发现了,根据本发明的实施例1和2制成的装置的焊接接头表现出明显高于根据对比例3或根据参比例4制成的装置的在200℃下的剪切强度。
Claims (15)
1.用于将电子元件与基底牢固粘接地接合的方法,其中
a) 提供具有第一待接合表面的电子元件和具有第二待接合表面的基底;
b) 将铜膏施加到所述待接合表面的至少一个上并干燥铜膏层;
c1) 将焊料施加到干燥的铜膏层上,并布置所述电子元件和所述基底以使电子元件的第一待接合表面和基底的第二待接合表面借助干燥铜膏和焊料的双层组合物接触;
或
c2) 布置所述电子元件和所述基底以使电子元件的第一待接合表面和基底的第二待接合表面借助干燥的铜膏接触,并紧邻干燥的铜膏层施加焊料;和
d) 焊接在步骤c1)或c2)中制成的装置以在所述电子元件和所述基底之间生成牢固粘接的接合;
其中所述铜膏含有(i) 66 - 99重量%的各自具有0至≤ 500重量ppm的磷含量并选自铜粒子、富铜的铜/锌合金粒子和富铜的铜/锡合金粒子的至少一种类型的粒子,(ii) 0 -20重量%的选自锡粒子、富锡的锡/铜合金粒子、富锡的锡/银合金粒子和富锡的锡/铜/银合金粒子的至少一种类型的粒子,和(iii) 1 - 20重量%的载体,其中粒子(i)和(ii)的平均粒径≤ 15微米。
2.根据权利要求1的方法,
其中磷含量为≥ 0至≤ 100重量ppm。
3.根据权利要求1或2的方法,
其中所述富铜的铜/锌合金或富铜的铜/锡合金的组成为60至99.5重量%的铜和0.5至40重量%的锌或锡。
4.根据权利要求1或2的方法,
其中(i)类型的粒子是通过在惰性气体气氛中雾化制成的粒子。
5.根据权利要求1或2的方法,
其中所述富锡的锡/铜合金、锡/银合金或锡/铜/银合金的组成为95 - 99.5重量%的锡和0.5 - 5重量%的铜、银或铜 + 银。
6.根据权利要求1或2的方法,
其中所述载体包含0.5 - 15重量%的一种或多种任选改性的天然增稠剂和85 - 99.5重量%的有机溶剂或由0.5 - 15重量%的一种或多种任选改性的天然增稠剂和85 - 99.5重量%的有机溶剂构成。
7.根据权利要求1或2的方法,
其中方法步骤c1)或c2)中所用的焊料是焊膏或一个或多个由焊接金属制成的焊接模制件。
8.根据权利要求1或2的方法,
其中方法步骤c2)中的焊料紧邻干燥的铜膏施加以使其从侧面接触干燥的铜膏或具有与干燥的铜膏最多2毫米的短距离。
9.根据权利要求1或2的方法,
其中所述电子元件是芯片、半导体二极管、晶体管、电阻器或电容器。
10.根据权利要求1或2的方法,
其中所述基底是印刷电路板、直接覆铜或引线框。
11.根据权利要求1或2的方法,
其中所述铜膏通过丝网印刷法、模版印刷法、喷射技术或分配技术施加。
12.根据权利要求7的方法,
其中所述焊膏通过丝网印刷法、模版印刷法、喷射技术或分配技术施加。
13.根据权利要求1或2的方法,
其中所述焊接温度为240 - 260℃。
14.根据权利要求1或2的方法,
其中在步骤d)结束后获得的装置在40 - 217℃的温度下回火1分钟直至24小时的持续时间。
15.根据前述权利要求任一项的方法获得的装置。
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EP1464431B1 (en) | 2002-01-10 | 2011-03-02 | Senju Metal Industry Co., Ltd. | Soldering method with refiling with solder having an oxidation suppressing element |
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EP1665337A4 (en) * | 2003-09-08 | 2007-10-31 | Honeywell Int Inc | DOPED ALLOYS FOR ELECTRIC INTERCONNECTIONS AND METHODS OF MAKING AND USING SAID ALLOYS |
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US20070172381A1 (en) * | 2006-01-23 | 2007-07-26 | Deram Brian T | Lead-free solder with low copper dissolution |
KR20070115660A (ko) * | 2006-05-30 | 2007-12-06 | 마쯔시다덴기산교 가부시키가이샤 | 솔더 페이스트 |
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DE102008039828A1 (de) * | 2008-08-27 | 2010-03-04 | W.C. Heraeus Gmbh | Steuerung der Porosität von Metallpasten für den druckfreien Niedertemperatursinterprozess |
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WO2013024829A1 (ja) * | 2011-08-12 | 2013-02-21 | 日立化成工業株式会社 | はんだ接着体、はんだ接着体の製造方法、素子、太陽電池、素子の製造方法および太陽電池の製造方法 |
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JP2013119089A (ja) * | 2011-12-06 | 2013-06-17 | Fujitsu Ltd | 導電性接合材料、並びに電子部品及び電子機器 |
CN103659053B (zh) | 2012-09-13 | 2016-05-04 | 苏州铜宝锐新材料有限公司 | 一种钎焊用铜焊膏及其制备方法与应用 |
US10232472B2 (en) * | 2014-11-12 | 2019-03-19 | University Of Maryland College Park | Transient liquid phase sinter pastes and application and processing methods relating thereto |
-
2015
- 2015-08-21 WO PCT/EP2015/069222 patent/WO2016030287A1/de active Application Filing
- 2015-08-21 CN CN201580044881.XA patent/CN106660176B/zh not_active Expired - Fee Related
- 2015-08-21 HU HUE15760397A patent/HUE038343T2/hu unknown
- 2015-08-21 EP EP15760397.8A patent/EP3186032B1/de not_active Not-in-force
- 2015-08-21 US US15/506,456 patent/US10456870B2/en not_active Expired - Fee Related
- 2015-08-27 TW TW104128207A patent/TW201618627A/zh unknown
Also Published As
Publication number | Publication date |
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US20170252869A1 (en) | 2017-09-07 |
TW201618627A (zh) | 2016-05-16 |
EP3186032B1 (de) | 2018-04-25 |
EP3186032A1 (de) | 2017-07-05 |
US10456870B2 (en) | 2019-10-29 |
WO2016030287A1 (de) | 2016-03-03 |
HUE038343T2 (hu) | 2018-10-29 |
CN106660176A (zh) | 2017-05-10 |
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