CN106645954B - Heating dish impedance measurement tooling and measurement method - Google Patents
Heating dish impedance measurement tooling and measurement method Download PDFInfo
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- CN106645954B CN106645954B CN201510736030.3A CN201510736030A CN106645954B CN 106645954 B CN106645954 B CN 106645954B CN 201510736030 A CN201510736030 A CN 201510736030A CN 106645954 B CN106645954 B CN 106645954B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
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Abstract
加热盘阻抗测量工装及测量方法，主要解决现有测量方法测量数据误差大，信号过弱的技术问题。其工装结构包括：绝缘组件、电极组件两个部分。绝缘组件包括绝缘块A、绝缘块B及弹簧；电极组件包括N连接器插座定位基座、固定螺钉、连接板、绝缘板、电极板A、绝缘座A、绝缘座B、电极板B、绝缘套及弹簧。所述N连接器插座定位基座与网络分析仪连接，网络分析仪通过端口输出快速扫频的低功率电信号，该信号通过射频电缆的传输到达加热盘，并产生反射电信号，通过测量复反射系数即可得到加热盘的阻抗ZL。其结构合理，操作方法简便，测量结果可靠，有效提高加热盘阻抗测量的稳定性。可广泛应用于半导体镀膜设备技术领域。
The heating plate impedance measurement tool and the measurement method mainly solve the technical problems of large measurement data error and too weak signal in the existing measurement method. The tooling structure includes two parts: an insulating assembly and an electrode assembly. The insulating assembly includes insulating block A, insulating block B and spring; the electrode assembly includes N connector socket positioning base, fixing screw, connecting plate, insulating plate, electrode plate A, insulating seat A, insulating seat B, electrode plate B, insulating plate Sleeves and springs. The N connector socket positioning base is connected to the network analyzer. The network analyzer outputs a low-power electrical signal with a fast frequency sweep through the port. The signal reaches the heating plate through the transmission of the radio frequency cable, and generates a reflected electrical signal. The impedance Z L of the heating plate can be obtained from the reflection coefficient. The utility model has the advantages of reasonable structure, simple and convenient operation method, reliable measurement results, and can effectively improve the stability of the impedance measurement of the heating plate. It can be widely used in the technical field of semiconductor coating equipment.
Description
Technical field
It is specifically a kind of using electrode plate point the present invention relates to a kind of heating dish impedance measurement tooling and measurement method
It is not connect with heating dish, cavity, separates heating dish and cavity with collets, be mounted on cavity middle impedance convenient for measurement heating dish
Tool structure and measurement method.Belong to semiconductor equipment RF impedance measurement applied technical field.
Background technique
With the increase of electronic product demand, semiconductor equipment is driven to rapidly develop, heating dish is to be widely used in half
Critical component in conductor device in silicon wafer deposition reaction chamber.The impedance of heating dish directly affects each ion of silicon wafer deposition process
The distribution situation of field, to influence silicon chip film-coated quality.At present for heating dish impedance measurement using Network Analyzer into
Row measurement, but the area that Network Analyzer is connect with heating dish and cavity is too small, the rapid frequency-sweeping low-power telecommunications of port output
Number become fainter in the transmission, measuring signal is faint, is unable to measure the exact value of heating dish impedance.
Summary of the invention
The present invention is for the purpose of solving the above problems, and it is big mainly to solve existing measurement method error of measured data, signal mistake
Weak technical problem provides a kind of measurement tooling of heating dish impedance, increases Network Analyzer output signal and heating dish and chamber
The contact area of body strengthens measuring signal, improves the accuracy and stability of heating dish impedance measurement.
To achieve the goals above, the present invention adopts the following technical solutions: heating dish impedance measurement tooling, mainly by insulating
(4) two parts of component (3) and electrode assembly form.The insulation assembly (3) include collets A (16), collets B (17) and
Spring (18), collets A (16) and B (17) intermediate installation spring (18) form compressible pretightning force, confrontation heating dish (2) resistance
The power that electrode assembly (4) are come from anti-measurement process, guarantees heating dish uniform force, position centering.
The electrode assembly (4) includes N connector body positioning pedestal (5), fixing screws (6), nut (7), gasket
(8), connecting plate (9), insulation board (10), electrode plate A (11), insulating base A (12), insulating base B (13), electrode plate B (14), insulation
Cover (15) and spring (18).
The N connector body positioning pedestal (5) is fixedly attached to electricity by fixing screws (6), nut (7), gasket (8)
On pole plate B (14), it connect to form first electrode with cavity (1)；Electrode plate A (11) and heating dish (2) rely on circular arc face contact shape
At second electrode；First, second electrode separation is guaranteed two electric electrode insulations, simultaneously by insulating base A (12) and insulating base B (13)
Spring (18) are installed inside insulating base A (12) and insulating base B (13), the first, second two electrodes can be squeezed, be connect respectively
It contacts cavity (1) and heating dish (2), increases rf signal and transmit area, improve the stability of signal transmission.
Using the heating dish impedance measurement method of above-mentioned tooling, this method is to obtain heating dish by measurement reflection coefficient
The single port of impedance is tested, and Network Analyzer exports the low-power electric signal of rapid frequency-sweeping by port, which passes through radio frequency
The transmission of cable reaches heating dish, and generates reflection electric signal.The reflectivity of radiofrequency signal and the impedance of heating dish have with ShiShimonoseki
It is formula
Wherein, R is complex reflection coefficient, Z0It is the impedance of transmission line, ZLIt is the impedance of load.Characteristic impedance is used determining
For 50 Ω transmission line when, it may be determined that Z0=50 Ω, thus, the impedance Z of heating dish can be obtained by measuring complex reflection coefficientL。
Network Analyzer is connected in N connector body positioning pedestal, and the transmission path of signal passes through connecting plate, electrode plate
B, cavity is reached, transmits a signal to heating dish on part connecting part in the cavity, waits the signal of heating dish complex reflection coefficient.
Further, the other end of heating dish and Network Analyzer is completely insulated, after electric signal is via electrode plate B, insulation
Plate and insulation sleeve stop electric signal to be passed to electrode plate A respectively, while insulating base A, B effectively separate electrode plate A, B, and in utilization
The spring arrangement in portion makes electrode plate A combine closely with heating dish and electrode plate B with cavity, increases signal transmission area and transmission
Stability.
Further, positional shift occurs under the action of electrode assembly contained spring between heating dish and cavity, in electrode
It is put into insulation assembly between the heating dish and cavity of the same rectilinear direction of component, the spring force inside insulation assembly is by confronting electrode group
The power of part forms balance, guarantees the position centering of heating dish and cavity, improves the accuracy of impedance measurements.
Beneficial effects of the present invention and feature are: heating dish impedance measurement tool structure is reasonable, and operating method is easy.Energy
The electric signal transmission area for enough increasing cavity and heating dish and impedance measurement tooling, increases the intensity of electric signal, makes measurement result
It is relatively reliable.Spring inside its electrode assembly and insulation assembly, in the case where guarantee in heating dish and cavity position pair, letter
Contact at number transmission is even closer, effectively improves the stability of heating dish impedance measurement.It can be widely applied to semiconductor coated film
Equipment technical field.
Detailed description of the invention
Fig. 1 is heating dish impedance measurement tooling measurement method schematic diagram.
Fig. 2 is heating dish impedance measurement tooling insulation assembly schematic internal view.
Fig. 3 is heating dish impedance measurement tooling electrode assembly structural schematic diagram.
Fig. 4 is heating dish impedance measurement tooling insulation assembly structural schematic diagram.
Fig. 5 is heating dish impedance measurement tooling electrode assembly schematic internal view.
In figure: 1, cavity；2, heating dish；3, insulation assembly；4, electrode assembly；5, N connector body positioning pedestal；6, solid
Determine screw；7, nut；8, gasket；9, connecting plate；10, insulation board；11, electrode plate A；12, insulating base A；13, insulating base B；14,
Electrode plate B；15, insulation sleeve；16, collets A；17, collets B；18, spring.
Present invention is further described in detail with reference to the accompanying drawing:
Specific embodiment
Embodiment
Referring to attached drawing 1-5, heating dish impedance measurement tooling, mainly by 4 two part groups of insulation assembly 3 and electrode assembly
At.
The insulation assembly 3, including collets A16, collets B17 and spring 18, collets A16 and B17 centre installation
Spring 18 forms compressible pretightning force, and the power from electrode assembly 4 during confrontation 2 impedance measurement of heating dish guarantees heating
Disk uniform force, position centering.
The electrode assembly 4, including N connector body positioning pedestal 5, fixing screws 6, nut 7, gasket 8, connecting plate 9,
Insulation board 10, electrode plate A11, insulating base A12, insulating base B13, electrode plate B14, insulation sleeve 15 and spring 18.
The N connector body positioning pedestal 5 is fixedly attached to electrode plate B14 by fixing screws 6, nut 7, gasket 8
On, it connect to form first electrode with cavity 1；Electrode plate A11 and heating dish 2 are by circular arc face contact formation second electrode；Insulation
First, second electrode separation is guaranteed two electric electrode insulations, while insulating base A12 and insulating base B13 by seat A12 and insulating base B13
Inside is equipped with spring 18, and the first, second two electrode seals can be made to touch cavity 1 and heating dish 2, increase radio frequency telecommunications
Number transmission area, improve signal transmission stability.
The N connector body positioning pedestal is connect with Network Analyzer, and Network Analyzer is quickly swept by port output
The low-power electric signal of frequency, which reaches heating dish by the transmission of radio-frequency cable, and generates reflection electric signal, passes through measurement
The impedance Z of heating dish can be obtained in complex reflection coefficientL.Its is structurally reasonable, and operating method is easy, and measurement result is relatively reliable, has
Effect improves the stability of heating dish impedance measurement.
From figure 1 it appears that electrode assembly 4 and insulation assembly 3 are protected between the installation cavity and heating dish of the tool structure
It holds on the same line.
Using the heating dish impedance measurement method of above-mentioned tooling, this method is to obtain heating dish by measurement reflection coefficient
The single port of impedance is tested, and Network Analyzer exports the low-power electric signal of rapid frequency-sweeping by port, which passes through radio frequency
The transmission of cable reaches heating dish, and generates reflection electric signal, and the impedance of heating dish can be obtained by measuring complex reflection coefficient
ZL。
Network Analyzer is connected in N connector body positioning pedestal, and the transmission path of signal passes through connecting plate, electrode plate
B, cavity is reached, transmits a signal to heating dish on part connecting part in the cavity, waits the signal of heating dish complex reflection coefficient.
Further, the other end of heating dish and Network Analyzer is completely insulated, after electric signal is via electrode plate B, insulation
Plate and insulation sleeve stop electric signal to be passed to electrode plate A respectively, while insulating base A, B effectively separate electrode plate A, B, and in utilization
The spring arrangement in portion makes electrode plate A combine closely with heating dish and electrode plate B with cavity, increases signal transmission area and transmission
Stability.
Further, positional shift occurs under the action of electrode assembly contained spring between heating dish and cavity, in electrode
It is put into insulation assembly between the heating dish and cavity of the same rectilinear direction of component, the spring force inside insulation assembly is by confronting electrode group
The power of part forms balance, guarantees the position centering of heating dish and cavity, improves the accuracy of impedance measurements.
Above-mentioned measurement method is easy to operate, effectively improves the stability of heating dish impedance measurement, and then improve silicon chip film-coated
Quality.
Claims (5)
1. a kind of heating dish impedance measurement tooling, it is characterised in that: it is mainly by two part groups of insulation assembly and electrode assembly
At the insulation assembly, including collets A, collets B and spring, collets A and B centre installation spring form compressible
Pretightning force, the power from electrode assembly during confrontation heating dish impedance measurement, guarantees heating dish uniform force, position centering；
The electrode assembly, including N connector body positioning pedestal, fixing screws, nut, gasket, connecting plate, insulation board, electrode plate
A, insulating base A, insulating base B, electrode plate B, insulation sleeve and spring；The N connector body positioning pedestal passes through fixing screws, spiral shell
Female, gasket is fixedly attached on electrode plate B and forms first electrode, and electrode plate A contacts to form second with heating dish by arc surface
First, second electrode separation is guaranteed two electric electrode insulations by electrode, insulating base A and insulating base B, can make the first, second two
Electrode seal touches cavity and heating dish, increases rf signal and transmits area.
2. heating dish impedance measurement tooling as described in claim 1, it is characterised in that: the installation cavity of the tool structure with plus
Between hot plate, electrode assembly and insulation assembly are kept on the same line.
3. this method is to pass through using the heating dish impedance measurement method of heating dish impedance measurement tooling as described in claim 1
Measurement reflection coefficient is tested to obtain the single port of heating dish impedance, and Network Analyzer passes through the low function that port exports rapid frequency-sweeping
Rate electric signal, which reaches heating dish by the transmission of radio-frequency cable, and generates reflection electric signal, by measuring interflection system
The impedance Z of heating dish can be obtained in numberL, Network Analyzer is connected in N connector body positioning pedestal, the transmission path of signal
By connecting plate, electrode plate B, cavity is reached, transmit a signal to heating dish on part connecting part in the cavity, waits heating dish
The signal of complex reflection coefficient.
4. heating dish impedance measurement method as claimed in claim 3, the other end of heating dish and Network Analyzer in this method
Completely insulated, after electric signal is via electrode plate B, insulation board and insulation sleeve stop electric signal to be passed to electrode plate A respectively, insulate simultaneously
Seat A, B effectively separate electrode plate A, B, and make electrode plate A and heating dish and electrode plate B and chamber using internal spring arrangement
Body is combined closely, and the stability of signal transmission area and transmission is increased.
5. heating dish impedance measurement method as claimed in claim 3, in this method between heating dish and cavity in electrode assembly
Positional shift occurs under the action of portion's spring, is put into insulation group between the heating dish and cavity of the same rectilinear direction of electrode assembly
The power of confronting electrode component is formed balance, guarantees the position pair of heating dish and cavity by part, the spring force inside insulation assembly
In, improve the accuracy of impedance measurements.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510736030.3A CN106645954B (en) | 2015-11-03 | 2015-11-03 | Heating dish impedance measurement tooling and measurement method |
| PCT/CN2015/096922 WO2017075859A1 (en) | 2015-11-03 | 2015-12-10 | Instrument for measuring impedance of heating disk and measurement method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510736030.3A CN106645954B (en) | 2015-11-03 | 2015-11-03 | Heating dish impedance measurement tooling and measurement method |
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| CN106645954A CN106645954A (en) | 2017-05-10 |
| CN106645954B true CN106645954B (en) | 2019-02-01 |
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| WO (1) | WO2017075859A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107894555B (en) * | 2017-11-08 | 2020-01-21 | 武汉航空仪表有限责任公司 | Method for testing insulating property of heating assembly |
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| CN201837647U (en) * | 2010-11-08 | 2011-05-18 | 中国计量学院 | Fixture for testing impedance |
| CN102534569A (en) * | 2011-12-23 | 2012-07-04 | 嘉兴科民电子设备技术有限公司 | Atmospheric pressure glow plasma enhanced atom layer deposition device |
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- 2015-12-10 WO PCT/CN2015/096922 patent/WO2017075859A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103074606A (en) * | 2012-02-22 | 2013-05-01 | 光达光电设备科技（嘉兴）有限公司 | Graphite plate, reaction chamber with graphite plate, and substrate heating method |
| CN103266307A (en) * | 2013-05-22 | 2013-08-28 | 光垒光电科技（上海）有限公司 | Reaction cavity |
| CN203750529U (en) * | 2014-03-21 | 2014-08-06 | 江苏李文甲化工有限公司 | Circling-type kettle inner heating device |
| CN204439721U (en) * | 2015-03-12 | 2015-07-01 | 华北电力大学（保定） | A kind of capacitive divider wideband impedance measurement system of Excavation Cluster Based on Network Analysis instrument |
| CN205079762U (en) * | 2015-09-23 | 2016-03-09 | 沈阳拓荆科技有限公司 | Heating plate level survey frock structure |
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| Publication number | Publication date |
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| WO2017075859A1 (en) | 2017-05-11 |
| CN106645954A (en) | 2017-05-10 |
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