CN106643550A - Three-dimensional topographic measurement device based on digital holographic scanning and measurement method thereof - Google Patents
Three-dimensional topographic measurement device based on digital holographic scanning and measurement method thereof Download PDFInfo
- Publication number
- CN106643550A CN106643550A CN201611083310.XA CN201611083310A CN106643550A CN 106643550 A CN106643550 A CN 106643550A CN 201611083310 A CN201611083310 A CN 201611083310A CN 106643550 A CN106643550 A CN 106643550A
- Authority
- CN
- China
- Prior art keywords
- semi
- prism
- digital hologram
- light wave
- ccd
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005259 measurement Methods 0.000 title claims abstract description 38
- 238000000691 measurement method Methods 0.000 title abstract 2
- 238000001514 detection method Methods 0.000 claims abstract description 15
- 238000006073 displacement reaction Methods 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 12
- 238000012360 testing method Methods 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 7
- 238000004088 simulation Methods 0.000 claims description 7
- 238000004422 calculation algorithm Methods 0.000 claims description 6
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000006243 chemical reaction Methods 0.000 claims description 3
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000001228 spectrum Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 2
- 230000009466 transformation Effects 0.000 claims description 2
- 230000005484 gravity Effects 0.000 claims 1
- 238000007689 inspection Methods 0.000 claims 1
- 238000009738 saturating Methods 0.000 claims 1
- 238000012876 topography Methods 0.000 abstract description 7
- 239000000523 sample Substances 0.000 description 8
- 238000001093 holography Methods 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a three-dimensional topographic measurement device based on digital holographic scanning and a measurement method thereof. The three-dimensional topographic measurement device comprises a mobile measurement device and a digital holographic detection module. The digital holographic detection module comprises a laser device. A semi-transmitting and semi-reflective prism is arranged on the emergent laser beam surface of the laser device. A spatial filter is arranged between the semi-transmitting and semi-reflective prism and the laser device. A wavelength selection beam splitting prism is arranged in the semi-transmitting direction of the semi-transmitting and semi-reflective prism. A laser range finder is arranged on the wavelength selection beam splitting prism. A CCD/CMOS photoelectric coupler and a plane reflective mirror are arranged on and below the semi-transmitting and semi-reflective prism. A workpiece to be measured is arranged on the reflective light path of the wavelength selection beam splitting prism. According to the device, laser range finding and image splicing are performed on child measurement area three-dimensional models so that the large workpiece surface three-dimensional topography can be obtained, actual measurement can be recorded, the workpiece surface three-dimensional topography can be rapidly reconstructed and the requirements of the instrument for the movement accuracy of the mobile measurement device can be reduced.
Description
Technical field
The invention belongs to measuring three-dimensional morphology field, is related to a kind of object three-dimensional profile measuring device, and in particular to be based on
The measuring three-dimensional morphology of digital hologram scanning, using three axle planer-type displacement platforms or six shaft mechanical arms the device of scanning is realized
And measuring method.
Background technology
Field is manufactured in Aero-Space, weaponry and large scale industry, with increasing material manufacturing and laser manufacture level
Develop rapidly, surface of the work retrofit ability is obviously improved, while the high precision test to work pieces process level
Demand is urgent, needs quick and precisely to measure the three-dimensional appearance of surface of the work using measuring apparatus.Measuring three-dimensional morphology master
It is divided into microscopic three-dimensional topography measurement and macroscopic three dimensional topography measurement, both differences are that the surface texture of micro-object is
It is made up of many microscopic structural units, its shape characteristic is more much more complex than macro object.Micro-object topography measurement needs indirect
Or directly by micrometering, typical measuring apparatus have the NewView800 series 3D surface profiles that ZYGO companies produce
The optical profilometer and Switzerland Lyncee of instrument, the Dektak plurality of probes formula contourgraphs of vecco companies of the U.S. and NT series
The digital holographic microscope of Tec SA companies, above metering system can obtain micron order even nanoscale transverse direction and longitudinal direction and differentiate
Rate, measurement range is less；Macro object topography measurement is mainly by measuring thing by the way of mechanical probes or optical probe
The space coordinates of body surface face each point, the type measuring apparatus mainly include the six degree of freedom machinery of Frao companies, Lecia companies
The industrial photogrammetry system of arm, the coordinate of gantry three of Zeiss company and V-STARS, such measuring apparatus can be to several meters very
Object dimensional pattern to more than ten meters is measured, and certainty of measurement is generally several microns or tens microns.In order to expand measurement model
Ensure the measuring precision while enclosing, optical probe is integrated in high-precision three axles planer-type displacement platform by portioned product,
Point by point scanning measurement is carried out to the three-D profile of large-sized object by traveling probe, object dimensional pattern, the party is finally fitted
Case needs to gather substantial amounts of cloud data, and object lateral resolution is subject to point cloud acquisition interval and displacement platform displacement simultaneously
The restriction of precision.
The content of the invention
It is an object of the invention to provide a kind of apparatus for measuring three-dimensional profile scanned based on digital hologram and measuring method.
The method substitutes the measurement probe of three axle planer-type displacement platforms or sixdegree-of-freedom simulation with digital hologram measurement module, leads to
Cross three-shaft displacement platform or mechanical arm drive digital hologram measurement module to carry out region-by-region scanning survey to large-scale workpiece surface,
Digital reconstruction is carried out to each measured zone by hologram-reproducing method, using merging algorithm for images antithetical phrase area three-dimensional reconstruction model
Carry out 3 D spliced, finally restore high-precision surface of the work three-dimensional appearance.
Used as a kind of method of measuring three-dimensional morphology, the purpose of the present invention is realized by following technical proposals.
A kind of apparatus for measuring three-dimensional profile scanned based on digital hologram, including a traverse measuring device and numeral are provided
Holographic test module, the digital hologram detection module is assemblied in a measurement apparatus, and digital hologram detection module is in measurement
Large-scale workpiece surface region is measured under the drive of device；
The digital hologram detection module include a laser instrument, laser emitting laser beam face be provided with one piece it is semi-transparent semi-reflecting
Prism, between semi-transparent semi-reflecting prism and laser instrument spatial filter is provided with；In the semi-transparent semi-reflecting prism half transmitting direction
Being provided with one piece of wavelength selects Amici prism, wavelength to select Amici prism top to be provided with a laser range finder；Described semi-transparent half
Anti- prism top is provided with a CCD/CMOS photoelectrical couplers, and below the semi-transparent semi-reflecting prism plane mirror, ripple are provided with
It is long to select the reflected light path of Amici prism to be provided with workpiece for measurement.
Further, the traverse measuring device is the coordinate of gantry three or sixdegree-of-freedom simulation.
Further, the traverse measuring device is connected with computer control system.
Further, the wavelength selects Amici prism to be coated with a layer-selective penetrating reflecting film, can make digital breath module
The light-wave transmission that laser instrument sends, makes the light wave reflection that laser range finder sends.
Further, the spatial filter includes microcobjective and the pin hole being located on microcobjective, spatial filter
Emitting light path is provided with a collimation camera lens.
Correspondingly, The present invention gives a kind of 3 D measuring method scanned based on digital hologram, including following steps
Suddenly：
1) the coordinate displacement platform of mobile gantry three or six shaft mechanical arms, by digital hologram detection module workpiece for measurement table is directed at
Face region；
2) laser instrument filters the radio-frequency component of laser emitting light through spatial filter, with flat after collimation camera lens
Row light beam is incident to semi-transparent semi-reflecting prism；
3) through semi-transparent semi-reflecting prism reflected light through the reflection of plane mirror, again pass by semi-transparent semi-reflecting prism；
4) through semi-transparent semi-reflecting prism transmitted light through wavelength select Amici prism after, through the reflection of object under test,
Again pass by wavelength and select Amici prism and semi-transparent semi-reflecting prism；
5) step 2), 3) the two-way light beam CCD/CMOS imageing sensors surface formed hologram interference picture；
6) using the distance of the measurable object plane of laser range finder to CCD/CMOS window planes, i.e. recording distance d, by this
Recording distance d is updated in Object light wave formula, and the interference for obtaining Object light wave and reference light wave on CCD/CMOS imageing sensors is strong
Degree information；
7) Object light wave and the interference strength information transmission of reference light wave that CCD/CMOS imageing sensors are obtained extremely is counted
Calculation machine, computer the image that the CCD/CMOS imageing sensors are collected is carried out denoising, Spectrum Conversion, Phase Unwrapping Algorithm,
Three-dimensional reconstruction and image mosaic, you can obtain the three-D pattern on large-scale workpiece surface.
The invention has the beneficial effects as follows：
This scan-type apparatus for measuring three-dimensional profile adopts digital hologram measurement module, region-by-region Scanning Detction, using laser
Stadia surveying object plane obtains Object light wave and reference on CCD/CMOS imageing sensors to the distance of CCD/CMOS window planes
The interference strength information of light wave；3 D spliced is completed to all subregion Three-dimension Reconstruction Model using merging algorithm for images, it is final multiple
Original goes out the three-dimensional appearance of surface of the work.It is higher compared to above-mentioned point by point scanning measurement efficiency, the table of large-scale workpiece can be rapidly completed
Face topography measurement, by antithetical phrase measured zone threedimensional model image mosaic process is carried out, and the real-time measurement of recording distance fills this
The three-dimensional appearance that surface of the work is quickly rebuild by need not strictly controlling scanning distance is put, instrument is reduced to three axle planer-types
The requirement of displacement platform and manipulator motion precision.
Description of the drawings
Fig. 1 is gantry three-coordinates measuring machine installation drawing for loading holography module；
Fig. 2 is the sixdegree-of-freedom simulation measuring instrument installation drawing for loading holography module；
Fig. 3 is digital hologram module diagram of the present invention for apparatus for measuring three-dimensional profile.
In Fig. 1：1 is traverse measuring device (three-shaft displacement platform of gantry three-coordinates measuring machine), and 2 is digital hologram measurement
Module, 3 is workpiece for measurement.
In Fig. 2：1 is traverse measuring device (sixdegree-of-freedom simulation), and 2 is digital hologram detection module, and 3 is work to be measured
Part.
In Fig. 3：2-1 is laser instrument, and 2-2 is spatial filter, and 2-3 is collimator objective, and 2-4 is semi-transparent semi-reflecting prism, 2-5
It is plane mirror, 2-6 is that wavelength selects Amici prism, and 2-7 is CCD/CMOS photoelectrical couplers, and 2-8 is laser range finder.
Specific embodiment
Below by drawings and Examples, the present invention is described further.
As shown in Figure 1 and Figure 2, the apparatus for measuring three-dimensional profile of digital hologram scanning, including a traverse measurement dress should be based on
Put 1 (coordinate of gantry three or sixdegree-of-freedom simulation) and digital Holographic test module 2.Digital hologram detection module 2 is assemblied in shifting
In dynamic measurement apparatus 1, traverse measuring device is connected with computer control system, and digital hologram detection module 2 is filled in traverse measurement
Put large-scale workpiece surface regional is measured under 1 drive.
As shown in figure 3, digital hologram detection module 2 includes a laser instrument 2-1, a spatial filter 2-2, a collimator objective
2-3, a semi-transparent semi-reflecting prism 2-4, a plane mirror 2-5 a, wavelength selects Amici prism 2-6, a CCD/CMOS photoelectricity
A coupler 2-7 and laser range finder 2-8.One piece of semi-transparent semi-reflecting prism 2-4 is provided with laser emitting laser beam face,
Spatial filter 2-2 is provided between semi-transparent semi-reflecting prism 2-4 and laser instrument 2-1；In semi-transparent semi-reflecting prism 2-4 half transmittings direction
It is provided with one piece of wavelength and selects Amici prism 2-6, a CCD/CMOS photoelectrical coupler 2- is provided with above semi-transparent semi-reflecting prism 2-4
7, a plane mirror 2-5 is provided with below semi-transparent semi-reflecting prism 2-4, wavelength selects to be set on the reflected light path of Amici prism 2-6
There is workpiece for measurement 3.
Wavelength selects Amici prism 2-6 to be coated with one layer of wavelength selectivity penetrating reflecting film, makes what holography module laser instrument 1 sent
Light-wave transmission, the light wave reflection for sending laser range finder 2-8, to separate two light waves, in order to avoid interact.Spatial filter 2-
2 include microcobjective and the pin hole being located on microcobjective, and the emitting light path of spatial filter is provided with a collimation camera lens 2-
3, collimation lens focus select to be determined regarding specific requirement.
Laser instrument 2-1 sends a light wave, and Jing spatial filter 2-2 are expanded, after collimation camera lens 2-3 collimations, into semi-transparent half
Anti- prism 2-4, reflected light travels to plane mirror 2-5 Jing after its reflection, enter back into semi-transparent semi-reflecting prism 2-4, transmitted light Jing
Wavelength selects to enter object under test 3 after Amici prism 2-6, wavelength is again passed through after reflection and selects Amici prism 2-6, into semi-transparent
Half anti-prism 2-4, two-beam is interfered on CCD/CMOS photoelectrical coupler 2-7 faces, forms holographic interference pattern.
Digital hologram detection module is assemblied on traverse measuring device, as measurement probe to a certain area in large-scale workpiece surface
Domain measures, and in the case where the coordinate displacement platform of gantry three or six shaft mechanical arms drive, completes to carry out district by district large-scale workpiece surface
Domain scanning survey.After being measured, under the drive of three-shaft displacement platform or mechanical arm, mobile digital hologram measurement probe
Position, measures to another region in large-scale workpiece surface, is scanned through and measures, and completes the Surface testing of large-scale workpiece, so
Afterwards digital reconstruction is carried out to each measured zone by the reproducting method of digital hologram, and using merging algorithm for images to each sub-district
Domain Three-dimension Reconstruction Model completes 3 D spliced, finally restores the three-dimensional appearance of surface of the work in high precision.
Concrete scheme of the present invention realizes step：
1) the coordinate displacement platform of mobile gantry three (or six shaft mechanical arms) will measure large-scale workpiece needed for holography module alignment
Surface region.
2) laser instrument filters the radio-frequency component of laser emitting light through spatial filter, with flat after collimation camera lens
Row light beam is incident to semi-transparent semi-reflecting prism.
3) through semi-transparent semi-reflecting prism reflected light through the reflection of plane mirror, again pass by semi-transparent semi-reflecting prism.
4) through semi-transparent semi-reflecting prism transmitted light through wavelength select Amici prism after, through the reflection of object under test,
Again pass by wavelength and select Amici prism and semi-transparent semi-reflecting prism.
5) above step 2), 3) two-way light beam CCD/CMOS imageing sensors surface formed hologram interference picture.
6) using the distance of the measurable object plane of laser range finder to CCD/CMOS window planes, i.e. recording distance d, by this
Recording distance d is updated in Object light wave formula, and the interference for obtaining Object light wave and reference light wave on CCD/CMOS imageing sensors is strong
Degree information；
By reproduction Object light wave formula,
U (x', y')=F-1{F{R(x,y)IH(x,y)}G(fx,fy)}
Wherein, R (x, y) be reference light wave, F for Fourier transformation mathematic sign, IH(x, y) is CCD/CMOS images biography
The interference strength information of Object light wave and reference light wave, G (f on sensorx,fy) it is transmission function of the diffraction propagation in frequency domain effect,
In formula, to rebuild optical wavelength, typically with reference light consistent wavelength, d ' is reconstruction distance to λ；
Reconstruction depends on the value of recording distance d apart from the determination of d ', is made according to the recording distance information for measuring in real time
For the value foundation of d ' in above formula, you can complete the real-time reproduction of digital hologram scanning, reduce instrument to three axle planer-type positions
Move the requirement of platform or manipulator motion precision.
7) Object light wave and the interference strength information transmission of reference light wave that CCD/CMOS imageing sensors are obtained extremely is counted
Calculation machine, computer the image that the CCD/CMOS imageing sensors are collected is carried out denoising, Spectrum Conversion, Phase Unwrapping Algorithm,
Three-dimensional reconstruction and image mosaic, you can obtain the three-D pattern on large-scale workpiece surface.
In traverse measuring device, the coordinate displacement platform of gantry three or sixdegree-of-freedom simulation measurement apparatus are not limited to, with
Related movable fixture of the invention is all in the protection authority of the present invention.
The above, the only present invention preferably specific embodiment, but protection scope of the present invention is not limited thereto,
Here simply show preferred embodiment, any those familiar with the art the invention discloses technical scope
Change or replacement that are interior, can readily occurring in, all should be included within the scope of the present invention.
Claims (7)
1. a kind of apparatus for measuring three-dimensional profile scanned based on digital hologram, an including traverse measuring device and digital hologram inspection
Survey module, it is characterised in that the digital hologram detection module is assemblied on a traverse measuring device, digital hologram detection mould
Block is measured under the drive of traverse measuring device to large-scale workpiece for measurement surface region；
The digital hologram detection module includes a laser instrument, and laser emitting laser beam face is provided with one piece of semi-transparent semi-reflecting rib
Mirror, between semi-transparent semi-reflecting prism and laser instrument spatial filter is provided with；Set in the semi-transparent semi-reflecting prism half transmitting direction
Being equipped with one piece of wavelength selects Amici prism, wavelength to select Amici prism top to be provided with a laser range finder；Described semi-transparent semi-reflecting
Prism top is provided with a CCD/CMOS photoelectrical couplers, and below the semi-transparent semi-reflecting prism plane mirror, wavelength are provided with
The reflected light path for selecting Amici prism is provided with workpiece for measurement.
2. it is according to claim 1 it is a kind of based on digital hologram scan apparatus for measuring three-dimensional profile, it is characterised in that institute
Traverse measuring device is stated for the coordinate of gantry three or sixdegree-of-freedom simulation.
3. it is according to claim 1 it is a kind of based on digital hologram scan apparatus for measuring three-dimensional profile, it is characterised in that institute
State traverse measuring device to be connected with computer control system.
4. it is according to claim 1 it is a kind of based on digital hologram scan apparatus for measuring three-dimensional profile, it is characterised in that institute
Stating wavelength selects Amici prism to be coated with a layer-selective penetrating reflecting film, and the light wave that send can digital breath module laser instrument is saturating
Penetrate, make the light wave reflection that laser range finder sends.
5. it is according to claim 1 it is a kind of based on digital hologram scan apparatus for measuring three-dimensional profile, it is characterised in that institute
Spatial filter is stated including microcobjective and the pin hole being located on microcobjective, the emitting light path of spatial filter is provided with one
Collimation camera lens.
6. it is a kind of based on digital hologram scan 3 D measuring method, it is characterised in that comprise the steps：
1) the coordinate displacement platform of mobile gantry three or six shaft mechanical arms, by digital hologram detection module workpiece for measurement surface district is directed at
Domain；
2) laser instrument filters the radio-frequency component of laser emitting light through spatial filter, with directional light after collimation camera lens
Beam is incident to semi-transparent semi-reflecting prism；
3) through semi-transparent semi-reflecting prism reflected light through the reflection of plane mirror, again pass by semi-transparent semi-reflecting prism；
4) through semi-transparent semi-reflecting prism transmitted light after wavelength selects Amici prism, through the reflection of object under test, again
Amici prism and semi-transparent semi-reflecting prism are selected through wavelength；
5) step 2), 3) the two-way light beam CCD/CMOS imageing sensors surface formed hologram interference picture；
6) using the distance of the measurable object plane of laser range finder to CCD/CMOS window planes, i.e. recording distance d, this is recorded
It is updated in Object light wave formula apart from d, obtains the interference strength letter of Object light wave and reference light wave on CCD/CMOS imageing sensors
Breath；
7) CCD/CMOS imageing sensors are obtained Object light wave and the interference strength information transmission of reference light wave to computer,
Computer carries out denoising, Spectrum Conversion, Phase Unwrapping Algorithm, Three-dimensional Gravity to the image that the CCD/CMOS imageing sensors are collected
Build and image mosaic, you can obtain the three-D pattern on large-scale workpiece surface.
7. it is according to claim 6 based on digital hologram scan 3 D measuring method, it is characterised in that the step
It is rapid 6) in, using the measurable object plane of laser range finder to CCD/CMOS window planes apart from d, by reproduction Object light wave formula,
U (x', y')=F-1{F{R(x,y)IH(x,y)}G(fx,fy)}
Wherein, R (x, y) be reference light wave, F for Fourier transformation mathematic sign, IH(x, y) is CCD/CMOS imageing sensors
The interference strength information of upper Object light wave and reference light wave, G (fx,fy) it is transmission function of the diffraction propagation in frequency domain effect,
In formula, to rebuild optical wavelength, with reference light consistent wavelength, d ' is reconstruction distance to λ；
Reconstruction depends on the value of recording distance d apart from the determination of d ', according to the recording distance information for measuring in real time as upper
The value foundation of d ' in formula.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611083310.XA CN106643550B (en) | 2016-11-30 | 2016-11-30 | Three-dimensional shape measuring device and method based on digital holographic scanning |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611083310.XA CN106643550B (en) | 2016-11-30 | 2016-11-30 | Three-dimensional shape measuring device and method based on digital holographic scanning |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106643550A true CN106643550A (en) | 2017-05-10 |
| CN106643550B CN106643550B (en) | 2022-06-14 |
Family
ID=58813675
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611083310.XA Active CN106643550B (en) | 2016-11-30 | 2016-11-30 | Three-dimensional shape measuring device and method based on digital holographic scanning |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106643550B (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108225213A (en) * | 2018-01-19 | 2018-06-29 | 北京理工大学 | The non-contact dimensionality reduction error separate detection method of free form surface and device |
| CN108267095A (en) * | 2018-01-19 | 2018-07-10 | 北京理工大学 | The bilateral dislocation differential confocal detection method of free form surface pattern and device |
| CN108362221A (en) * | 2018-01-19 | 2018-08-03 | 北京理工大学 | A kind of free form surface pattern nano-precision detection method and device |
| CN109238151A (en) * | 2018-06-29 | 2019-01-18 | 苏州富强科技有限公司 | A kind of detection device localization method |
| CN110186376A (en) * | 2019-06-18 | 2019-08-30 | 易视智瞳科技（深圳）有限公司 | A kind of three-dimensional position pick-up method and device |
| CN112304241A (en) * | 2020-10-27 | 2021-02-02 | 衡阳市智谷科技发展有限公司 | Object morphology testing method based on digital holography |
| CN113178153A (en) * | 2021-05-11 | 2021-07-27 | 上海应用技术大学 | Holographic image device and method for ancient building facade |
| WO2021196419A1 (en) * | 2020-03-30 | 2021-10-07 | 孙亮 | Metering-level 3d super-depth-of-field microscopic system and measurement method |
| CN115371587A (en) * | 2022-08-24 | 2022-11-22 | 智慧星空(上海)工程技术有限公司 | Apparatus and method for measuring surface topography, method for calculating object surface height |
| WO2023123221A1 (en) * | 2021-12-28 | 2023-07-06 | 台州南科智能传感科技有限公司 | Line laser 3d profile scanning reconstruction system and control method therefor |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5680212A (en) * | 1996-04-15 | 1997-10-21 | National Research Council Of Canada | Sensitive and fast response optical detection of transient motion from a scattering surface by two-wave mixing |
| CN1310333A (en) * | 2001-03-30 | 2001-08-29 | 中国科学院上海光学精密机械研究所 | Electronic holographic measuring method without direct light transmission and conjugate image |
| CN101514892A (en) * | 2009-04-03 | 2009-08-26 | 北京航空航天大学 | In-situ three-dimensional microscopic observation device with long working distance based on digital holography |
| CN103913127A (en) * | 2013-11-26 | 2014-07-09 | 北京航空航天大学 | Digital holography spherical surface type detection device based on subaperture phase stitching |
| CN105300312A (en) * | 2015-11-30 | 2016-02-03 | 北京航空航天大学 | High-numerical-aperture hemispherical detection system based on digital holography |
| CN205383997U (en) * | 2016-01-21 | 2016-07-13 | 华中科技大学 | Holographic three -dimensional scanning device of awl light |
-
2016
- 2016-11-30 CN CN201611083310.XA patent/CN106643550B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5680212A (en) * | 1996-04-15 | 1997-10-21 | National Research Council Of Canada | Sensitive and fast response optical detection of transient motion from a scattering surface by two-wave mixing |
| CN1310333A (en) * | 2001-03-30 | 2001-08-29 | 中国科学院上海光学精密机械研究所 | Electronic holographic measuring method without direct light transmission and conjugate image |
| CN101514892A (en) * | 2009-04-03 | 2009-08-26 | 北京航空航天大学 | In-situ three-dimensional microscopic observation device with long working distance based on digital holography |
| CN103913127A (en) * | 2013-11-26 | 2014-07-09 | 北京航空航天大学 | Digital holography spherical surface type detection device based on subaperture phase stitching |
| CN105300312A (en) * | 2015-11-30 | 2016-02-03 | 北京航空航天大学 | High-numerical-aperture hemispherical detection system based on digital holography |
| CN205383997U (en) * | 2016-01-21 | 2016-07-13 | 华中科技大学 | Holographic three -dimensional scanning device of awl light |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108225213B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | Method and device for non-contact dimensionality reduction error separation detection of free-form surface |
| CN108267095A (en) * | 2018-01-19 | 2018-07-10 | 北京理工大学 | The bilateral dislocation differential confocal detection method of free form surface pattern and device |
| CN108362221A (en) * | 2018-01-19 | 2018-08-03 | 北京理工大学 | A kind of free form surface pattern nano-precision detection method and device |
| CN108225213A (en) * | 2018-01-19 | 2018-06-29 | 北京理工大学 | The non-contact dimensionality reduction error separate detection method of free form surface and device |
| CN108362221B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | Nano-precision detection method and device for free-form surface morphology |
| CN108267095B (en) * | 2018-01-19 | 2019-12-17 | 北京理工大学 | Method and device for bilateral dislocation differential confocal detection of free-form surface topography |
| CN109238151A (en) * | 2018-06-29 | 2019-01-18 | 苏州富强科技有限公司 | A kind of detection device localization method |
| CN109238151B (en) * | 2018-06-29 | 2020-06-05 | 苏州富强科技有限公司 | Detection device positioning method |
| CN110186376A (en) * | 2019-06-18 | 2019-08-30 | 易视智瞳科技（深圳）有限公司 | A kind of three-dimensional position pick-up method and device |
| WO2021196419A1 (en) * | 2020-03-30 | 2021-10-07 | 孙亮 | Metering-level 3d super-depth-of-field microscopic system and measurement method |
| CN112304241A (en) * | 2020-10-27 | 2021-02-02 | 衡阳市智谷科技发展有限公司 | Object morphology testing method based on digital holography |
| CN113178153A (en) * | 2021-05-11 | 2021-07-27 | 上海应用技术大学 | Holographic image device and method for ancient building facade |
| WO2023123221A1 (en) * | 2021-12-28 | 2023-07-06 | 台州南科智能传感科技有限公司 | Line laser 3d profile scanning reconstruction system and control method therefor |
| CN115371587A (en) * | 2022-08-24 | 2022-11-22 | 智慧星空(上海)工程技术有限公司 | Apparatus and method for measuring surface topography, method for calculating object surface height |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106643550B (en) | 2022-06-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106643550A (en) | Three-dimensional topographic measurement device based on digital holographic scanning and measurement method thereof | |
| CN206347972U (en) | A kind of apparatus for measuring three-dimensional profile scanned based on digital hologram | |
| CN102893121B (en) | For checking optical device and the method for structured object | |
| US5467184A (en) | Method of large deformation measurement using speckle interferometry | |
| US10001405B2 (en) | Measurement device for obtaining amplitude information of an object | |
| KR20140031294A (en) | Method and device for non-contact measuring surfaces | |
| CN109163672A (en) | A kind of microscopic appearance measurement method based on white light interference zero optical path difference position picking algorithm | |
| CN106197322A (en) | A kind of area-structure light three-dimension measuring system | |
| CN203069151U (en) | Three-dimensional hole form detection system based on optical coherence tomography scanning | |
| KR102424819B1 (en) | Method for restoring the shape of an object | |
| CN103115580A (en) | Three-dimensional hole-shape detection method and detection system based on optical coherence tomography | |
| CN106154764A (en) | Alignment measurement apparatus | |
| CN109579708A (en) | Nanometer resolution displacement measuring device based on optical wedge interference | |
| CN115371587A (en) | Apparatus and method for measuring surface topography, method for calculating object surface height | |
| CN101907445A (en) | Large-diameter single-layer film thickness full-field detection device | |
| CN113946117B (en) | Scattered light field holographic range three-dimensional displacement measurement device, method and medium | |
| CN105783776A (en) | Device and method of measuring surface topography based on double-wave surface interference fringe array | |
| CN112268520B (en) | Non-contact flexible measurement method for gear tooth surface shape error | |
| CN108413872B (en) | Three-dimensional size precision measurement method based on Fabry-Perot multi-beam interference | |
| CN106482933A (en) | Non- telecentric beam path real-time light intensity transmission equation non-interfering measuring system | |
| CN205581024U (en) | Optical element surface defect detecting device of transmission type synthetic aperture digital holographic art | |
| Jiang et al. | On-Machine Metrology for Hybrid Machining | |
| CN206974549U (en) | A kind of Michelson's interferometer based on Digital Holography | |
| CN205562427U (en) | Optical element surface defect detecting device of reflection -type synthetic aperture digital holographic art | |
| CN202562444U (en) | Device utilizing multi-fissure diffraction method to measure the thickness of optical thin film |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A three-dimensional morphology measurement device and measurement method based on digital holographic scanning Effective date of registration: 20230601 Granted publication date: 20220614 Pledgee: Shaanxi Qinnong Rural Commercial Bank Co Ltd University City Sub branch Pledgor: XI'AN ZHONGKE PHOTOELECTRIC PRECISION ENGINEERING Co.,Ltd. Registration number: Y2023610000402 |
|
| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Granted publication date: 20220614 Pledgee: Shaanxi Qinnong Rural Commercial Bank Co Ltd University City Sub branch Pledgor: XI'AN ZHONGKE PHOTOELECTRIC PRECISION ENGINEERING Co.,Ltd. Registration number: Y2023610000402 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A three-dimensional morphology measurement device and measurement method based on digital holographic scanning Granted publication date: 20220614 Pledgee: Shaanxi qinnong Rural Commercial Bank Co.,Ltd. Chang'an sub branch Pledgor: XI'AN ZHONGKE PHOTOELECTRIC PRECISION ENGINEERING Co.,Ltd. Registration number: Y2024980024001 |