CN106643446B - Flatness detection jig and flatness detection method - Google Patents
Flatness detection jig and flatness detection method Download PDFInfo
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- CN106643446B CN106643446B CN201710003417.7A CN201710003417A CN106643446B CN 106643446 B CN106643446 B CN 106643446B CN 201710003417 A CN201710003417 A CN 201710003417A CN 106643446 B CN106643446 B CN 106643446B
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- 239000000523 sample Substances 0.000 claims abstract description 160
- 238000005259 measurement Methods 0.000 claims description 13
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- 230000003287 optical effect Effects 0.000 claims description 4
- 230000000630 rising effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
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- 238000012216 screening Methods 0.000 description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
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Abstract
The invention provides a flatness detection jig, which comprises: a horizontal carrying platform; a lifting mechanism for lifting the horizontal bearing table; the probe placing plate is arranged above the horizontal bearing table, a plurality of probes which are arranged in an array manner are placed on the probe placing plate, each probe comprises a first end and a second end opposite to the first end, the plurality of probes can move in the direction vertical to the horizontal bearing table and have a first state and a second state, the horizontal bearing table is positioned at a first position in the first state, the first ends of the probes are not contacted with a surface to be detected of a piece to be detected, and the first ends of the probes are positioned in the same plane; in the second state, the horizontal bearing table is lifted to a second position, and the first end of each probe is contacted with the surface to be detected of the piece to be detected and lifted to a preset height; and a detecting mechanism for detecting whether the current position of each probe is at a preset position when the plurality of probes are in the second state. The jig has the advantages of simple structure, simplicity in operation and capability of improving accuracy and detection efficiency.
Description
Technical Field
The invention relates to the technical field of flatness detection, in particular to a flatness detection jig and a flatness detection method.
Background
In the field of display manufacturing, flatness measurement is an important link in backlight production. The method mainly adopted in the current backlight flatness detection is as follows: and placing the backlight source by using a marble platform, detecting four sides of the backlight source by using a feeler gauge, and observing whether four corners are within the specification or not, so as to judge whether the flatness of the backlight source meets the specification or not. The disadvantages of this approach are: (1) whether the test is qualified or not is judged manually, the test is easily influenced by subjective consciousness, and the influence of human factors is great; (2) the measuring efficiency is low, the measuring time is long, and all products are difficult to measure in mass production; (3) for products with larger sizes, the deformation degree of the middle area by the measuring method cannot be ensured, and if the middle area is deformed by an irregular curved surface, the detection method by using the feeler gauge can fail. Therefore, it is necessary to measure the screening backlight by using the jig.
Disclosure of Invention
The invention aims to provide a flatness detection jig and a flatness detection method, which are used for screening flatness-exceeding products, enhancing flatness control, reducing reworking and scrapping and improving yield.
The technical scheme provided by the invention is as follows:
a flatness detection jig, comprising:
the horizontal bearing table is used for placing the to-be-detected piece;
the lifting mechanism is connected with the horizontal bearing table and can lift the horizontal bearing table;
the probe placing plate is arranged above the horizontal bearing table, a plurality of probes are arranged on the probe placing plate in an array manner, each probe comprises a first end used for being in contact with a surface to be detected of a piece to be detected and a second end opposite to the first end, the probes can move in a direction perpendicular to the horizontal bearing table and have a first state and a second state, the horizontal bearing table is in a first position in the first state, the first ends of the probes are not in contact with the surface to be detected of the piece to be detected, and the first ends of the probes are in the same plane; in the second state, the horizontal bearing table is lifted to a second position, and the first end of each probe is contacted with the surface to be detected of the piece to be detected and lifted to a preset height;
and a detection mechanism for detecting whether the current position of each probe is at a preset position when the plurality of probes are in the second state.
Further, the detection mechanism includes: the first trigger part is arranged above the probes and is provided with a preset distance from the second ends of the probes on the probe placing plate when in the first state, and the first trigger part can generate a first trigger signal when contacting with the second ends of the probes; wherein the preset distance is greater than the preset height.
Further, the first triggering part includes: the electric measurement plate can generate a first electric trigger signal when contacting with the probe, and one surface of the electric measurement plate facing the probe placing plate is of a planar structure with the flatness reaching a preset value; alternatively, the first triggering part includes: and the probe trigger grating can generate an optical trigger signal when contacting with the probe, and one surface of the probe trigger grating facing the probe placing plate is of a planar structure with the flatness reaching a preset value.
Further, the flatness detection jig further includes an adjusting part for adjusting the preset distance, the adjusting part including a height-adjustable washer provided between the probe placement plate and the first trigger portion.
Further, an insulating member for insulating between the first trigger portion and the probe placing plate is provided between the first trigger portion and the probe placing plate.
Further, the probe placing plate is provided with a plurality of through holes, and the probes are placed in the through holes;
a detecting part is arranged between the first end and the second end on the periphery of the probe;
the detection mechanism includes: a second trigger portion provided on an inner wall of the through hole, wherein in the first state, the second trigger portion corresponds to a position of a detection portion of the probe and contacts the detection portion without transmitting a trigger signal; in the second state, the second trigger part transmits a second trigger signal when contacting with the detection part of the probe.
Further, a first supporting step is formed on the inner wall of the through hole;
forming a second support step on the probe, the second support step being matched with the first support step;
the detection part comprises a second supporting step of the probe, and the second triggering part comprises a first supporting step of the through hole.
A method of flatness detection using the flatness detection jig as described above, the method comprising:
placing a piece to be detected on a horizontal bearing table at a first position;
raising the horizontal bearing table to a second position so that the first end of each probe is in contact with the surface to be detected of the piece to be detected, and raising each probe by a preset height under the support of the piece to be detected;
and detecting whether the current position of each probe is a preset position or not so as to judge whether the flatness of the surface to be detected of the part to be detected is a preset value or not.
Further, the preset value includes a preset upper deformation amount and a preset lower deformation amount, and the judging whether the flatness of the surface to be detected of the member to be detected is the preset value includes:
when the first trigger part sends a first trigger signal, judging that the upper deformation of the surface to be detected of the piece to be detected exceeds a preset upper deformation, wherein the value of the preset upper deformation is equal to the difference between the preset distance and the preset height;
when the second trigger part sends a second trigger signal, the lower deformation of the surface to be detected of the piece to be detected is judged to exceed the preset lower deformation, wherein the value of the preset lower deformation is equal to the preset height.
Further, the method further comprises the steps of:
adjusting a preset distance between the probe placing plate and the first trigger part to adjust a preset upper deformation amount of a surface to be detected of the piece to be detected; and controlling the preset height of the probe to rise so as to adjust the preset lower deformation of the surface to be detected of the piece to be detected.
The beneficial effects of the invention are as follows:
according to the flatness detection jig provided by the invention, the to-be-detected piece can be placed on the horizontal bearing table, the to-be-detected piece can be lifted along with the horizontal bearing table to be contacted with the plurality of probes arranged in the array, after the plurality of probes are jacked up to a preset height, the positions of the probes are detected, whether the flatness of the to-be-detected surface of the to-be-detected piece meets the specification is judged according to whether the probes are detected to be at the preset positions, and when the positions of the probes are detected to be not at the preset positions, the flatness of the to-be-detected piece is judged to be out of specification. The jig has the advantages of simple structure, simple operation, and capability of improving accuracy and detection efficiency and productivity compared with the manual measurement mode in the prior art.
Drawings
FIG. 1 is a schematic diagram showing the overall structure of a flatness detecting jig according to an embodiment of the present invention;
FIG. 2 is an exploded view of a flatness detecting tool according to an embodiment of the present invention;
FIG. 3 is a schematic diagram showing a structure of the flatness detecting tool in a first state according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of the flatness detection tool provided in the embodiment of the invention in the second state;
FIG. 5 shows a schematic view of the A-part structure of FIG. 3;
fig. 6 shows a schematic view of the partial structure B in fig. 4.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. It will be apparent that the described embodiments are some, but not all, embodiments of the invention. All other embodiments, which are obtained by a person skilled in the art based on the described embodiments of the invention, fall within the scope of protection of the invention.
Aiming at the problems of low accuracy, low efficiency and the like in the prior art that a manual measurement mode is adopted in the flatness detection of products such as backlight sources and the like, the invention provides the flatness detection jig and the flatness detection method, which can improve the detection accuracy and the detection efficiency, and have simple structure and low cost.
As shown in fig. 1 to 4, the flatness detection jig provided by the present invention includes:
a horizontal carrying table 100 for placing the member to be inspected 10;
a lifting mechanism 200 connected to the horizontal carrying table 100 and capable of lifting the horizontal carrying table 100;
a probe placing plate 300 disposed above the horizontal stage 100, on which a plurality of probes 301 arranged in an array are placed, each probe 301 including a first end for contacting a surface to be detected of the workpiece 10 to be detected and a second end opposite to the first end, the plurality of probes 301 being movable in a direction perpendicular to the horizontal stage 100 to have a first state in which the horizontal stage 100 is in a first position, the first ends of the probes 301 are not in contact with the surface to be detected of the workpiece 10 to be detected, and the first ends of the plurality of probes 301 are in the same plane; in the second state, the horizontal carrying platform 100 is lifted to a second position, and the first end of each probe 301 contacts with the surface to be detected of the part to be detected 10 and is lifted to a preset height;
and a detection mechanism for detecting whether the current position of each probe 301 is at a preset position when the plurality of probes 301 are in the second state.
According to the flatness detection jig provided by the invention, a piece 10 to be detected can be placed on a horizontal bearing table 100, the piece 10 to be detected can rise along with the horizontal bearing table 100 and is contacted with a plurality of probes 301 arranged in an array, after the plurality of probes 301 are jacked up to a preset height, whether the flatness of the surface to be detected of the piece 10 to be detected meets the specification is judged according to whether the probes 301 are detected to be at the preset positions or not by detecting the positions of the probes 301, and when the positions of the probes 301 are detected not to be at the preset positions, the flatness of the piece 10 to be detected is judged to be out of specification. The jig has the advantages of simple structure, simple operation, and capability of improving accuracy and detection efficiency and productivity compared with the manual measurement mode in the prior art.
The following describes a preferred embodiment of the flatness detection jig provided by the present invention.
In a preferred embodiment provided by the present invention, as shown in fig. 1 to 6, the detection mechanism includes: a first trigger part 400 disposed above the plurality of probes 301 and having a predetermined distance from the second ends of the probes 301 on the probe placement plate 300 when in the first state, the first trigger part 400 being capable of generating a first trigger signal when contacting the second ends of the probes 301; wherein the preset distance is greater than the preset height.
With the above solution, when the flatness of the part to be detected 10 is detected, the part to be detected 10 is first placed on the horizontal carrying platform 100, the horizontal carrying platform 100 moves upward to a specified position, so that the probes 301 stop when rising to a preset height, at this time, if the surface to be detected of the part to be detected 10 is an absolute plane, then the plurality of probes 301 will all contact the surface to be detected of the part to be detected 10 and be lifted up by the part to be detected 10, and since the preset distance between the first triggering portion 400 and the second end of the probes 301 on the probe placing plate 300 in the first state is H, which is greater than the rising preset height H of each probe 301, then the gap S between the second end of each probe 301 reaching the first triggering portion 400 should be s=h-H, then when the measured deformation dimension of the surface to be detected of the part to be detected 10 is greater than S, the second end of each probe 301 will contact the first triggering portion 400, and generate the first triggering signal, so that the preset deformation amount of the part to be detected 10 can be judged to be greater than the preset deformation amount (the preset deformation amount exceeds the preset value) by the preset deformation amount by the preset value.
Furthermore, in the preferred embodiment provided by the present invention, preferably, as shown in fig. 1 to 6, the first triggering part 400 includes: an electrical measurement board capable of generating a first electrical trigger signal when contacting with the probe 301, and a surface of the electrical measurement board facing the probe placement board 300 is a planar structure with a flatness reaching a preset value.
By adopting the above scheme, the first trigger part 400 is realized by adopting an electrical measurement board with a planar structure, and the probe 301 is contacted with the electrical measurement board to generate an electrical trigger signal by utilizing the electrical trigger principle, so that the device has the advantages of simple structure, accurate detection and low cost.
It should be noted that, in other embodiments of the present invention, the first triggering portion 400 may also have other structures, for example: the first triggering portion 400 includes a probe 301 triggering grating capable of generating an optical triggering signal when contacting with the probe 301, and a surface of the probe 301 triggering grating facing the probe placement board 300 has a planar structure with a flatness reaching a preset value, that is, the first triggering portion 400 may further utilize an optical triggering principle, and the contact between the probe 301 and the probe 301 triggering grating generates a triggering signal, so as to determine whether the flatness of the to-be-detected piece 10 exceeds the standard.
In addition, in the above-mentioned scheme, the detection mechanism detects the position of the probe 301 by adopting the mode that the first trigger part 400 is in direct contact with the probe 301 to generate the trigger signal, so that the structure is simple and the cost is low. It should be appreciated that in practical applications, the detection mechanism may also be implemented in other ways, for example: the detection mechanism may further adopt a laser detection component, where the laser detection component can emit a plane beam at a preset distance H between the laser detection component and the second end of the probe 301 on the probe placement board 300 in the first state, and when the measured upper deformation dimension of the surface to be detected of the part to be detected 10 is greater than S, the second end of the probe 301 contacts the first triggering portion 400 to generate a first triggering signal, so as to determine that the upper deformation of the part to be detected 10 exceeds the preset upper deformation, and the product is a flatness overscaling product.
In addition, in a preferred embodiment of the present invention, the flatness detection jig further includes an adjusting part for adjusting the preset distance. Preferably, as shown in fig. 2, the adjusting means includes a height-adjustable washer 500 disposed between the probe placement plate 300 and the first trigger part 400.
With the above solution, in the second state, the probe 301 is lifted by the surface to be detected of the part to be detected 10, and the gap S between the probe 301 and the first trigger portion 400 is s=h-H, when the size of the upper deformation of the surface to be detected of the part to be detected 10 is greater than S, the second end of the probe 301 contacts with the first trigger portion 400 to generate the first trigger signal, so that it can be determined that the upper deformation of the part to be detected 10 exceeds the preset upper deformation, and the product is a flatness overscale product, that is, the value of the preset upper deformation of the part to be detected 10 is equal to the difference between the preset distance and the preset height.
In practical applications, the adjusting member is not limited to a washer.
Furthermore, in the preferred embodiment of the present invention, as shown in fig. 5 and 6, a plurality of through holes 302 are provided on the probe placement plate 300, and the probes 301 are placed in the through holes 302; a detection part 3011 is provided on the outer periphery of the probe 301 between the first end and the second end; the detection mechanism includes: a second trigger part 3021 provided on an inner wall of the through hole 302, wherein in the first state, the second trigger part 3021 corresponds to a position of the detection part 3011 of the probe 301 and is in contact with the detection part 3011 without transmitting a trigger signal; in the second state, the second trigger 3021 transmits a second trigger signal when it contacts the detection portion 3011 of the probe 301.
By adopting the above scheme, when the flatness of the to-be-detected piece 10 is detected, the to-be-detected piece 10 is firstly placed on the horizontal carrying platform 100, the horizontal carrying platform 100 moves upwards to a designated position, so that the probe 301 is stopped when rising to a preset height, at this time, if the to-be-detected surface of the to-be-detected piece is an absolute plane, then a plurality of probes 301 are contacted with the to-be-detected surface of the to-be-detected piece 10 and jacked up by the to-be-detected piece 10, when the probe 301 and the second trigger part 3021 are in a first state, the detection part 3011 of the probe 301 is contacted with the second trigger part 3021, and when the measured to-be-detected surface of the to-be-detected piece 10 is greater than the preset height h where the probe 301 rises, the preset height 3011 is not contacted with the second trigger part 3021, and then the preset height 3011 is not contacted with the second trigger part 3021, and the measured to be greater than the preset height is equal to the preset height when the measured to the preset height where the probe 301 rises, and the preset height is still greater than the preset height is equal to the second trigger part 3021, and the deformation value can be generated.
Therefore, the flatness detection jig provided by the preferred embodiment of the invention can detect the flatness overstepping products with the upper deformation larger than S and the lower deformation larger than h. By changing the preset height of the probe 301, the preset lower deformation of the surface to be detected of the member to be detected 10 can be adjusted, so as to achieve the purpose of using the fixture for detecting products with different flatness specifications.
In a preferred embodiment provided by the present invention, as shown in fig. 5 and 6, a first supporting step is formed on the inner wall of the through hole 302; forming a second supporting step on the probe 301 to be matched with the first supporting step; wherein the detection part 3011 comprises a second support step of the probe 301, and the second trigger part 3021 comprises a first support step of the through hole 302.
By adopting the above scheme, the through hole 302 may be a T-shaped through hole 302 with a thick inner diameter and a thin inner diameter, the probe 301 may be in a structure with a thick top and a thin bottom, by matching the first supporting step with the second supporting step, on one hand, the probe 301 may be placed on the probe placing plate 300, and the probe 301 may be moved up and down in the through hole 302, on the other hand, in the first state, the second supporting step of the probe 301 may be matched with the first supporting step of the through hole 302 to place the probe 301 on the probe placing plate 300, and in the second state, if the lower deformation of the surface to be detected of the part 10 to be detected is greater than the rising preset height h of the probe 301, the probe 301 corresponding to the position where the lower deformation exceeds h may not be lifted, and the second supporting step thereof may still be contacted with the first supporting step, so as to generate the trigger signal.
The structures of the detection unit 3011 and the second trigger unit 3021 are not limited to this, and may be, for example, electrical measurement trigger pieces provided on the inner walls of the probe 301 and the through hole 302, and the like.
Further, in the embodiment provided by the present invention, preferably, as shown in fig. 2, an insulating member 600 for insulating between the first trigger part 400 and the probe placement plate 300 is provided between the first trigger part 400 and the probe placement plate 300. Insulation between the electric test board and the probe placement plate 300 is ensured without being affected by providing the insulation member 600.
In addition, in the embodiment provided by the present invention, preferably, the lifting mechanism 200 adopts a cylinder or the like structure. The flatness detection jig further comprises a control mechanism which is used for being connected with the first triggering part and the second triggering part, receiving a first triggering signal sent by the first triggering part and a second triggering signal sent by the second triggering part and sending out an indication signal. The control mechanism may be an electronic control box 700 disposed on the flatness detection jig, and the electronic control box 700 may also be used to control the operation of the cylinder.
In addition, the embodiment of the invention also provides a method for detecting the flatness by adopting the flatness detection jig, which comprises the following steps:
placing the object to be inspected 10 on the horizontal stage 100 at the first position;
raising the horizontal carrying platform 100 to a second position, so that the first end of each probe 301 contacts with the surface to be detected of the member to be detected 10, and raising each probe 301 by a preset height under the support of the member to be detected 10;
whether the current position of each probe 301 is a preset position is detected to determine whether the flatness of the surface to be detected of the member to be detected 10 is a preset value.
Further, the determining whether the flatness of the surface to be detected of the member to be detected 10 is the preset value includes:
when the first trigger part 400 sends a first trigger signal, judging that the upper deformation of the surface to be detected of the part to be detected 10 exceeds a preset upper deformation, wherein the value of the preset upper deformation is equal to the difference between the preset distance and the preset height; when the second trigger section 3021 sends the second trigger signal, it is determined that the lower deformation amount of the surface to be detected of the piece to be detected 10 exceeds a preset lower deformation amount, where the value of the preset lower deformation amount is equal to the preset height.
Further, the method further comprises the steps of:
adjusting a preset distance between the probe placement plate 300 and the first trigger part 400 to adjust a preset upper deformation amount of the surface to be detected of the part to be detected 10; the preset height of the probe 301 is controlled to adjust the preset lower deformation of the surface to be detected of the member to be detected 10.
The foregoing is merely a preferred embodiment of the present invention, and it should be noted that modifications and substitutions can be made by those skilled in the art without departing from the technical principles of the present invention, and these modifications and substitutions should also be considered as being within the scope of the present invention.
Claims (10)
1. Flatness detection tool, its characterized in that includes:
the horizontal bearing table is used for placing the to-be-detected piece;
the lifting mechanism is connected with the horizontal bearing table and can lift the horizontal bearing table;
the probe placing plate is arranged above the horizontal bearing table, a plurality of probes are arranged on the probe placing plate in an array manner, each probe comprises a first end used for being in contact with a surface to be detected of a piece to be detected and a second end opposite to the first end, the probes can move in a direction perpendicular to the horizontal bearing table and have a first state and a second state, the horizontal bearing table is in a first position in the first state, the first ends of the probes are not in contact with the surface to be detected of the piece to be detected, and the first ends of the probes are in the same plane; in the second state, the horizontal bearing table is lifted to a second position, and the first end of each probe is contacted with the surface to be detected of the piece to be detected and lifted to a preset height;
and a detection mechanism for detecting whether the current position of each probe is at a preset position when the plurality of probes are in the second state.
2. The flatness detection jig according to claim 1, characterized in that,
the detection mechanism includes: the first trigger part is arranged above the probes and is provided with a preset distance from the second ends of the probes on the probe placing plate when in the first state, and the first trigger part can generate a first trigger signal when contacting with the second ends of the probes; wherein the preset distance is greater than the preset height.
3. The flatness detection jig according to claim 2, characterized in that,
the first trigger part includes: the electric measurement plate can generate a first electric trigger signal when contacting with the probe, and one surface of the electric measurement plate facing the probe placing plate is of a planar structure with the flatness reaching a preset value; alternatively, the first triggering part includes: and the probe trigger grating can generate an optical trigger signal when contacting with the probe, and one surface of the probe trigger grating facing the probe placing plate is of a planar structure with the flatness reaching a preset value.
4. The flatness detection jig according to claim 2, characterized in that,
the flatness detection jig further comprises an adjusting part for adjusting the preset distance, and the adjusting part comprises a gasket with adjustable height, wherein the gasket is arranged between the probe placement plate and the first triggering part.
5. The flatness detection jig according to claim 2, characterized in that,
an insulating part for insulating the first trigger part from the probe placing plate is arranged between the first trigger part and the probe placing plate.
6. The flatness detection jig according to claim 1, characterized in that,
the probe placing plate is provided with a plurality of through holes, and the probes are placed in the through holes;
a detecting part is arranged between the first end and the second end on the periphery of the probe;
the detection mechanism includes: a second trigger portion provided on an inner wall of the through hole, wherein in the first state, the second trigger portion corresponds to a position of a detection portion of the probe and contacts the detection portion without transmitting a trigger signal; in the second state, the second trigger part transmits a second trigger signal when contacting with the detection part of the probe.
7. The flatness detection jig according to claim 6, characterized in that,
a first supporting step is formed on the inner wall of the through hole;
forming a second support step on the probe, the second support step being matched with the first support step;
the detection part comprises a second supporting step of the probe, and the second triggering part comprises a first supporting step of the through hole.
8. A method of flatness detection using the flatness detection jig according to any one of claims 1 to 7, characterized by comprising:
placing a piece to be detected on a horizontal bearing table at a first position;
raising the horizontal bearing table to a second position so that the first end of each probe is in contact with the surface to be detected of the piece to be detected, and raising each probe by a preset height under the support of the piece to be detected;
and detecting whether the current position of each probe is a preset position or not so as to judge whether the flatness of the surface to be detected of the part to be detected is a preset value or not.
9. The method according to claim 8, wherein the preset values include a preset upper deformation amount and a preset lower deformation amount, and the determining whether the flatness of the surface to be detected of the piece to be detected is a preset value includes:
when the first trigger part sends a first trigger signal, judging that the upper deformation of the surface to be detected of the piece to be detected exceeds a preset upper deformation, wherein the value of the preset upper deformation is equal to the difference between the preset distance and the preset height;
when the second trigger part sends a second trigger signal, the lower deformation of the surface to be detected of the piece to be detected is judged to exceed the preset lower deformation, wherein the value of the preset lower deformation is equal to the preset height.
10. The method as recited in claim 9, further comprising:
adjusting a preset distance between the probe placing plate and the first triggering part to adjust a preset upper deformation amount of a surface to be detected of the piece to be detected; and controlling the preset height of the probe to rise so as to adjust the preset lower deformation of the surface to be detected of the part to be detected.
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