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CN106604514A - Exhaust pipe and low temperature plasma generation equipment - Google Patents

Exhaust pipe and low temperature plasma generation equipment Download PDF

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Publication number
CN106604514A
CN106604514A CN201710094545.7A CN201710094545A CN106604514A CN 106604514 A CN106604514 A CN 106604514A CN 201710094545 A CN201710094545 A CN 201710094545A CN 106604514 A CN106604514 A CN 106604514A
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comb
low
potential
pipes
temperature plasma
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冯金平
李文军
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Tangshan Casting Technology Co Ltd
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Tangshan Casting Technology Co Ltd
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00Generating plasma; Handling plasma
    • H05H1/24Generating plasma
    • H05H1/2406Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes

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  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

本发明提供了一种排管及低温等离子体发生设备,涉及介质阻挡放电技术领域,排管包括:导电介质和绝缘介质;绝缘介质为无底棱柱状,导电介质为棱柱状,绝缘介质套于所述导电介质外部,本发明还提供一种低温等离子体发生设备,包括:供电单元和多个排管;排管为棱柱状结构,多个排管相互平行,每两个相邻的排管之间形成间隙,且形成间隙的两个排管侧壁相互平行;排管分为高电位排管和低电位排管,每个排管周围分布与其电位不同的排管,供电单元的输出端分别与多个高电位排管的接线端连接,多个低电位排管的接线端接地,解决现有技术中低温等离子体的废气处理效率低且设备成本升高的技术问题,达到提高废气处理效率并降低成本的技术效果。

The invention provides a pipe arrangement and low-temperature plasma generating equipment, which relate to the technical field of dielectric barrier discharge. The pipe arrangement includes: a conductive medium and an insulating medium; the insulating medium is in the shape of a bottomless prism, and the conductive medium is in the shape of a prism. Outside the conductive medium, the present invention also provides a low-temperature plasma generating device, including: a power supply unit and a plurality of row tubes; the row tubes are in a prismatic structure, and the plurality of row tubes are parallel to each other, and every two adjacent row tubes A gap is formed between them, and the side walls of the two pipes forming the gap are parallel to each other; the pipes are divided into high-potential pipes and low-potential pipes, and pipes with different potentials are distributed around each pipe, and the output terminal of the power supply unit They are respectively connected to the terminals of multiple high-potential pipes, and the terminals of multiple low-potential pipes are grounded to solve the technical problems of low-temperature plasma waste gas treatment efficiency and high equipment cost in the prior art, and to improve waste gas treatment. The technical effect of efficiency and cost reduction.

Description

排管及低温等离子体发生设备Pipeline and low temperature plasma generating equipment

技术领域technical field

本发明涉及介质阻挡放电技术领域,尤其是涉及一种排管及低温等离子体发生设备。The invention relates to the technical field of dielectric barrier discharge, in particular to a pipe arrangement and low-temperature plasma generating equipment.

背景技术Background technique

低温等离子体是继固态、液态、气态之后的物质的第四态。当外加电压达到气体的着火电压时,气体被击穿,并产生包括电子、各种离子、原子和自由基在内的混合体。放电过程中虽然电子温度很高,但重粒子温度很低,整个体系呈现低温状态,所以称为低温等离子体。低温等离子体有电晕放电,介质阻挡放电等形式。Low temperature plasma is the fourth state of matter after solid state, liquid state and gas state. When the applied voltage reaches the ignition voltage of the gas, the gas is broken down and a mixture including electrons, various ions, atoms and free radicals is produced. Although the temperature of electrons is high during the discharge process, the temperature of heavy particles is very low, and the whole system presents a low-temperature state, so it is called low-temperature plasma. Low-temperature plasma has corona discharge, dielectric barrier discharge and other forms.

介质阻挡放电(Dielectric Barrier Discharge,DBD),又称无声放电,是一种有绝缘介质插入放电空间的气体放电形式,其能够在常温常压下产生大体积、高能量密度的低温等离子体。放电空间插入的绝缘介质可以使放电空间产生的电荷积聚其上,产生一个与外加电场方向相反的附加电场,阻止放电发展到电弧阶段,从而能够在大气压下产生稳定运行的低温等离子体。介质阻挡放电相对于当前工业生产中应用的低气压放电具有更为广阔的应用前景,目前已被广泛应用于臭氧合成、CO2激光器、紫外光源、绝缘材料表面改性和废气处理等工业领域,成为近年来低温等离子体及相关领域研究的热点问题之一。Dielectric Barrier Discharge (DBD), also known as silent discharge, is a form of gas discharge with an insulating medium inserted into the discharge space, which can generate low-temperature plasma with large volume and high energy density at normal temperature and pressure. The insulating medium inserted in the discharge space can make the charge generated in the discharge space accumulate on it, generate an additional electric field opposite to the direction of the applied electric field, and prevent the discharge from developing to the arc stage, so that a stable low-temperature plasma can be generated under atmospheric pressure. Compared with the low-pressure discharge used in the current industrial production, the dielectric barrier discharge has a broader application prospect. It has been widely used in industrial fields such as ozone synthesis, CO2 lasers, ultraviolet light sources, surface modification of insulating materials, and waste gas treatment. In recent years, it has been one of the hot issues in the research of low-temperature plasma and related fields.

介质阻挡放电低温等离子体降解污染物是利用低温等离子体高能电子、自由基等活性粒子和废气中的污染物作用,使污染物分子在极短的时间内发生分解,并发生后续的各种反应以达到分解污染物的目的。介质阻挡放电过程中,电子从电场中获得能量,通过碰撞将能量转化为污染物分子的内能或动能,这些获得能量的分子被激发或发生电离形成活性基团,同时空气中的氧气和水分在高能电子的作用下也可产生大量的新生态氢、臭氧和羟基氧等活性基团,废气中的污染物质与这些具有较高能量的活性基团发生反应,最终转化为CO2和H2O等物质,从而达到净化废气的目的。Dielectric barrier discharge low-temperature plasma degradation of pollutants is the use of low-temperature plasma high-energy electrons, free radicals and other active particles and pollutants in the exhaust gas to decompose pollutant molecules in a very short period of time, and subsequent various reactions occur In order to achieve the purpose of decomposing pollutants. In the process of dielectric barrier discharge, electrons obtain energy from the electric field, and convert the energy into internal energy or kinetic energy of pollutant molecules through collisions. These energy-acquired molecules are excited or ionized to form active groups, while oxygen and moisture in the air Under the action of high-energy electrons, a large number of active groups such as new ecological hydrogen, ozone, and hydroxyl oxygen can also be generated. The pollutants in the exhaust gas react with these active groups with higher energy and are finally converted into substances such as CO2 and H2O. , so as to achieve the purpose of purifying the exhaust gas.

目前环保行业一般采用连排式结构或者套筒式结构产生双介质阻挡放电型低温等离子体。采用套筒式结构,由于套管中流通面积有限,当需处理的废气流量较大时,需要布置很多组套筒,会造成设备尺寸非常庞大、笨重;而采用连排式结构,由于其放电位置为相邻两个圆管之间距离最短处,因此,连排式结构的放电形式为线状放电,当排管数量一定时,线状放电区域占总体积的比例很低,所形成的低温等离子体浓度要低于套筒式介质阻挡放电,会导致其对废气处理能力的降低,进而导致对废的处理成本升高。At present, the environmental protection industry generally adopts a row structure or a sleeve structure to generate a double dielectric barrier discharge low-temperature plasma. With the sleeve structure, due to the limited flow area in the sleeve, when the exhaust gas flow to be treated is large, many sets of sleeves need to be arranged, which will cause the equipment to be very large and heavy; while the serial structure is adopted, due to its discharge The position is the shortest distance between two adjacent circular tubes. Therefore, the discharge form of the continuous row structure is linear discharge. When the number of row tubes is constant, the proportion of the linear discharge area to the total volume is very low, and the formed The low-temperature plasma concentration is lower than that of the sleeve-type dielectric barrier discharge, which will lead to a reduction in its ability to treat waste gas, which in turn will lead to an increase in the cost of waste treatment.

发明内容Contents of the invention

有鉴于此,本发明的目的在于提供排管及低温等离子体发生设备,以缓解现有技术中存在的废气处理效率低、成本高的技术问题。In view of this, the object of the present invention is to provide pipe arrangement and low-temperature plasma generating equipment to alleviate the technical problems of low waste gas treatment efficiency and high cost in the prior art.

第一方面,本发明实施例提供了一种排管,包括:导电介质和绝缘介质;In a first aspect, an embodiment of the present invention provides a pipe arrangement, including: a conductive medium and an insulating medium;

所述绝缘介质为无底棱柱状,所述导电介质为棱柱状,所述绝缘介质套于所述导电介质外部。The insulating medium is in the shape of a bottomless prism, the conductive medium is in the shape of a prism, and the insulating medium is sleeved outside the conductive medium.

结合第一方面,本发明实施例提供了第一方面的第一种可能的实施方式,其中,所述绝缘介质的截面为矩形。With reference to the first aspect, the embodiment of the present invention provides a first possible implementation manner of the first aspect, wherein a cross section of the insulating medium is rectangular.

结合第一方面,本发明实施例提供了第一方面的第二种可能的实施方式,其中,所述导电介质为导电金属棒或导电金属粉。With reference to the first aspect, the embodiment of the present invention provides a second possible implementation manner of the first aspect, wherein the conductive medium is a conductive metal rod or a conductive metal powder.

结合第一方面,本发明实施例提供了第一方面的第三种可能的实施方式,其中,所述绝缘介质的材质为石英玻璃。With reference to the first aspect, the embodiment of the present invention provides a third possible implementation manner of the first aspect, wherein the insulating medium is made of quartz glass.

结合第一方面,本发明实施例提供了第一方面的第四种可能的实施方式,其中,所述绝缘介质的内壁的边长为5mm至7mm;所述绝缘介质的壁厚为1mm至3mm,导电介质的外壁边长为5mm至7mm。In combination with the first aspect, the embodiment of the present invention provides a fourth possible implementation manner of the first aspect, wherein, the side length of the inner wall of the insulating medium is 5 mm to 7 mm; the wall thickness of the insulating medium is 1 mm to 3 mm , the side length of the outer wall of the conductive medium is 5mm to 7mm.

结合第一方面,本发明实施例提供了第一方面的第五种可能的实施方式,其中,导电介质的外壁与绝缘介质的内壁紧密贴合。With reference to the first aspect, the embodiment of the present invention provides a fifth possible implementation manner of the first aspect, wherein the outer wall of the conductive medium is in close contact with the inner wall of the insulating medium.

结合第一方面,本发明实施例提供了第一方面的第六种可能的实施方式,其中,所述绝缘介质的长度为360mm至370mm。With reference to the first aspect, the embodiment of the present invention provides a sixth possible implementation manner of the first aspect, wherein the length of the insulating medium is 360 mm to 370 mm.

第二方面,本发明实施例提供了一种低温等离子体发生设备,包括:供电单元和多个如上述第一方面任一所述的排管;In a second aspect, an embodiment of the present invention provides a low-temperature plasma generating device, comprising: a power supply unit and a plurality of exhaust pipes as described in any one of the first aspects above;

所述排管为棱柱状结构,多个所述排管相互平行,每两个相邻的所述排管之间形成间隙,且形成所述间隙的两个排管侧壁相互平行;The row pipes have a prismatic structure, a plurality of the row pipes are parallel to each other, a gap is formed between every two adjacent row pipes, and the side walls of the two row pipes forming the gap are parallel to each other;

所述排管分为高电位排管和低电位排管,每个所述排管周围分布与其电位不同的排管,所述供电单元的输出端分别与多个所述高电位排管的接线端连接,多个所述低电位排管的接线端接地。The pipes are divided into high-potential pipes and low-potential pipes, and pipes with different potentials are distributed around each pipe, and the output terminals of the power supply unit are respectively connected to multiple high-potential pipes. The terminals are connected, and the terminals of the plurality of low-potential row pipes are grounded.

结合第二方面,本发明实施例提供了第二方面的第一种可能的实施方式,其中,每两个相邻的所述排管之间的垂直距离相等。With reference to the second aspect, the embodiment of the present invention provides a first possible implementation manner of the second aspect, wherein the vertical distances between every two adjacent rows of pipes are equal.

结合第二方面,本发明实施例提供了第二方面的第二种可能的实施方式,其中,每两个相邻的所述排管之间的垂直距离为2mm至10mm。With reference to the second aspect, the embodiment of the present invention provides a second possible implementation manner of the second aspect, wherein the vertical distance between every two adjacent row pipes is 2 mm to 10 mm.

本发明实施例带来了以下有益效果:本发明实施例中,电源调制好的电流,输送至变压器的输入端,经变压器对电压进行调整后,电流经输出端子送至高电位排管,高电位排管与低电位排管之间导通,产生低温等离子体。由于使用的是方管,当高电位排管和低电位排管导通时,可以在他们之间形成更大空间的低温等离子体区,提高低温等离子体的产生量,从而可以提高对有机气体的处理效果。使用者可将多个排管并排设置,并且多个排管之间具有间隔,然后对多个排管施加电压。当气体从多个排管之间的间隔流通时,在低温等离子体作用下被分解、净化。The embodiment of the present invention brings the following beneficial effects: In the embodiment of the present invention, the current modulated by the power supply is sent to the input terminal of the transformer, and after the voltage is adjusted by the transformer, the current is sent to the high-potential row pipe through the output terminal, and the high-potential The row tube and the low-potential row tube are connected to generate low-temperature plasma. Since the square tube is used, when the high-potential row tube and the low-potential row tube are connected, a larger space of low-temperature plasma area can be formed between them, and the generation of low-temperature plasma can be increased, thereby improving the resistance to organic gases. processing effect. The user can arrange a plurality of row pipes side by side with intervals between the plurality of row pipes, and then apply voltage to the plurality of row pipes. When the gas flows through the gaps between multiple pipes, it is decomposed and purified under the action of low-temperature plasma.

本发明实施例中,排管形式为方管(长方形、正方形等),方管外层为绝缘介质、内层为导电介质,与套管式结构相比,本发明所用技术可以有效减小设备体积、降低设备成本;与圆管连排式结构相比,本发明所用方管可以有效提高低温等离子体的产生量,从而可以降低设备成本。因此,使用本发明所用方管电极及低温等离子体发生设备,可以有效提高利用低温等离子体处理废气的效率,并且降低低温等离子体处理有机废气的成本。In the embodiment of the present invention, the pipe arrangement is a square pipe (rectangular, square, etc.), the outer layer of the square pipe is an insulating medium, and the inner layer is a conductive medium. Compared with the casing structure, the technology used in the present invention can effectively reduce equipment Smaller volume and lower equipment cost; compared with the circular tube row structure, the square tube used in the present invention can effectively increase the generation of low-temperature plasma, thereby reducing equipment cost. Therefore, using the square tube electrode and the low-temperature plasma generating equipment used in the present invention can effectively improve the efficiency of treating waste gas with low-temperature plasma, and reduce the cost of treating organic waste gas with low-temperature plasma.

本发明的其他特征和优点将在随后的说明书中阐述,并且,部分地从说明书中变得显而易见,或者通过实施本发明而了解。本发明的目的和其他优点在说明书、权利要求书以及附图中所特别指出的结构来实现和获得。Additional features and advantages of the invention will be set forth in the description which follows, and in part will be apparent from the description, or may be learned by practice of the invention. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.

为使本发明的上述目的、特征和优点能更明显易懂,下文特举较佳实施例,并配合所附附图,作详细说明如下。In order to make the above-mentioned objects, features and advantages of the present invention more comprehensible, preferred embodiments will be described in detail below together with the accompanying drawings.

附图说明Description of drawings

为了更清楚地说明本发明具体实施方式或现有技术中的技术方案,下面将对具体实施方式或现有技术描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图是本发明的一些实施方式,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to more clearly illustrate the specific implementation of the present invention or the technical solutions in the prior art, the following will briefly introduce the accompanying drawings that need to be used in the specific implementation or description of the prior art. Obviously, the accompanying drawings in the following description The drawings show some implementations of the present invention, and those skilled in the art can obtain other drawings based on these drawings without any creative work.

图1为本发明实施例提供的排管结构示意图;Fig. 1 is a schematic diagram of the pipe arrangement provided by the embodiment of the present invention;

图2为横截面为正方形的排管的俯视图;Fig. 2 is the plan view that cross section is the row pipe of square;

图3为横截面为长方形的排管的俯视图;Fig. 3 is the plan view that cross section is the row pipe of rectangle;

图4为低温等离子体发生设备的结构示意图。Fig. 4 is a schematic structural diagram of a low-temperature plasma generating device.

图标:1-导电介质;2-绝缘介质;3-供电单元;3.1-电源;3.2-变压器;4-排管;4.1-高电位排管;4.2-低电位排管;5-间隙。Icons: 1-conductive medium; 2-insulating medium; 3-power supply unit; 3.1-power supply; 3.2-transformer; 4-pipe; 4.1-high potential pipe; 4.2-low potential pipe; 5-gap.

具体实施方式detailed description

为使本发明实施例的目的、技术方案和优点更加清楚,下面将结合附图对本发明的技术方案进行清楚、完整地描述,显然,所描述的实施例是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present invention, not all of them. the embodiment. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

目前对于套筒式低温等离子体发生设备,由于套管中流通面积有限,当需处理的气体流量较大时,需要布置很多组套筒,会造成设备尺寸非常庞大、笨重;而采用连排式低温等离子体发生设备,由于其放电位置为相邻两个圆管之间距离最短处,因此,连排式结构的放电形式为线状放电,当排管数量一定时,线状放电区域占总体积的比例很低,因此,所形成的低温等离子体浓度要低于套筒式介质阻挡放电,会导致其对废气处理能力的降低,进而,导致对废气的处理成本升高,基于此,本发明实施例提供的一种排管,可以增大相邻排管之间的相对面积,增大高电位排管和低电位排管之间形成的低温等离子体区,提高低温等离子体的产生量。At present, for the sleeve-type low-temperature plasma generation equipment, due to the limited flow area in the sleeve, when the gas flow to be processed is large, many sets of sleeves need to be arranged, which will cause the equipment to be very large and heavy; For low-temperature plasma generating equipment, since the discharge position is the shortest distance between two adjacent circular tubes, the discharge form of the continuous row structure is linear discharge. When the number of row tubes is constant, the linear discharge area accounts for the total The proportion of the volume is very low, therefore, the formed low-temperature plasma concentration is lower than that of the sleeve-type dielectric barrier discharge, which will lead to a reduction in its ability to treat exhaust gas, and further lead to an increase in the cost of exhaust gas treatment. Based on this, this paper The row tube provided by the embodiment of the invention can increase the relative area between adjacent row tubes, increase the low-temperature plasma area formed between the high-potential row tube and the low-potential row tube, and increase the generation amount of low-temperature plasma .

为便于对本实施例进行理解,首先对本发明实施例所公开的一种排管进行详细介绍,如图1所示,本发明实施例中的排管包括:导电介质1和绝缘介质2。In order to facilitate the understanding of this embodiment, a pipe arrangement disclosed in the embodiment of the present invention is firstly introduced in detail. As shown in FIG. 1 , the pipe arrangement in the embodiment of the present invention includes: a conductive medium 1 and an insulating medium 2 .

所述绝缘介质2为无底棱柱状,所述导电介质1为棱柱状,所述绝缘介质2套于所述导电介质1外部。The insulating medium 2 is in the shape of a bottomless prism, the conductive medium 1 is in the shape of a prism, and the insulating medium 2 is sleeved outside the conductive medium 1 .

在本发明实施例中,绝缘介质2的形状可以为直无底棱柱等,导电介质1的形状可以为直棱柱等,绝缘介质2和导电介质1的横截面可以为矩形等。In the embodiment of the present invention, the shape of the insulating medium 2 can be a straight bottomless prism, etc., the shape of the conductive medium 1 can be a straight prism, etc., and the cross-sections of the insulating medium 2 and the conductive medium 1 can be rectangular, etc.

导电介质的材质为可以为多种,例如:铁、铜或者其他导电金属等;也可以是复合的金属或金属与非金属的复合体等,在实际应用中,所述导电介质为导电金属棒或导电金属粉,所述绝缘介质的材质为石英玻璃等,石英玻璃的绝缘性能好,便宜耐用,可以在提高排管的放电效果的同时进一步降低生产成本。The material of the conductive medium can be various, such as: iron, copper or other conductive metals, etc.; it can also be a composite metal or a composite of metal and non-metal, etc. In practical applications, the conductive medium is a conductive metal rod Or conductive metal powder, the material of the insulating medium is quartz glass, etc. Quartz glass has good insulating performance, is cheap and durable, and can further reduce production costs while improving the discharge effect of the discharge pipe.

在本发明的又一实施例中,所述绝缘介质的截面为矩形,在实际应用中,绝缘介质的横截面可以如图2所示的为正方形,也可以为如图3所示的长方形,这样的设置可使得高电位排管与低电位排管之间放电均匀。In yet another embodiment of the present invention, the cross section of the insulating medium is rectangular. In practical applications, the cross section of the insulating medium may be a square as shown in FIG. 2 or a rectangle as shown in FIG. 3 . Such an arrangement can make the discharge uniform between the high-potential row tube and the low-potential row tube.

所述绝缘介质的内壁的边长为5mm至7mm;所述绝缘介质的壁厚为1mm至3mm,导电介质的外壁边长为5mm至7mm;所述绝缘介质的长度为360mm至370mm。The side length of the inner wall of the insulating medium is 5 mm to 7 mm; the wall thickness of the insulating medium is 1 mm to 3 mm; the side length of the outer wall of the conductive medium is 5 mm to 7 mm; the length of the insulating medium is 360 mm to 370 mm.

在本发明实施例中,将绝缘介质的内壁的边长设置为5mm至7mm;绝缘介质的壁厚设置为1mm至3mm;绝缘介质的长度设置为360mm至370mm;这样的设置可方便绝缘介质与外部支撑框架及紧固片之间的配合安装,提高排管的适用性。In the embodiment of the present invention, the side length of the inner wall of the insulating medium is set to 5mm to 7mm; the wall thickness of the insulating medium is set to 1mm to 3mm; the length of the insulating medium is set to 360mm to 370mm; such setting can facilitate the insulation medium and The cooperative installation between the external support frame and the fastening piece improves the applicability of the pipe arrangement.

将导电介质的外壁边长设置为5mm至7mm,使得导电介质与外部绝缘介质可以更好的进行配合,降低对导电介质的加工及安装要求,从而提高排管的适用性。The length of the outer wall of the conductive medium is set to 5mm to 7mm, so that the conductive medium can better cooperate with the external insulating medium, reduce the processing and installation requirements for the conductive medium, and thus improve the applicability of the pipe arrangement.

为了减少电能在不相关区域的损失,提高能量使用效率,导电介质的外壁与绝缘介质的内壁紧密贴合,相应的,在绝缘介质的横截面为正方形时,导电介质的横截面也可以为正方形,在绝缘介质的横截面为长方形时,导电介质的横截面也可以为长方形。In order to reduce the loss of electric energy in irrelevant areas and improve energy use efficiency, the outer wall of the conductive medium is closely attached to the inner wall of the insulating medium. Correspondingly, when the cross-section of the insulating medium is square, the cross-section of the conductive medium can also be square. , when the cross section of the insulating medium is rectangular, the cross section of the conductive medium can also be rectangular.

如图2和图3所示,在上述实施例的基础上,进一步地,通过对加工过程的控制,使得绝缘介质和导电介质的周正度较好(正方形或长方形),即可实现将导电介质放入绝缘介质内部时,两者中心轴线较好的重合。导电介质的中心轴线与所述绝缘介质的中心轴线重合,可使得导电介质位于绝缘介质的中心处,可提高排管放电的均匀性,进而增强排管的放电效果。As shown in Figure 2 and Figure 3, on the basis of the above-mentioned embodiments, further, through the control of the processing process, the circumference of the insulating medium and the conductive medium is better (square or rectangular), and the conductive medium can be realized When placed inside the insulating medium, the central axes of the two are well coincident. The central axis of the conductive medium coincides with the central axis of the insulating medium, so that the conductive medium can be located at the center of the insulating medium, which can improve the uniformity of the discharge of the pipe discharge, thereby enhancing the discharge effect of the discharge pipe.

如图4所示,在本发明的又一实施例中,还一种低温等离子体发生设备,低温等离子体设备包括:供电单元3和多个如前述任一实施例所述的排管4;As shown in FIG. 4, in another embodiment of the present invention, there is also a low-temperature plasma generating device, which includes: a power supply unit 3 and a plurality of exhaust pipes 4 as described in any of the preceding embodiments;

所述排管4为棱柱状结构,多个所述排管4相互平行,每两个相邻的所述排管4之间形成间隙5,且形成所述间隙5的两个排管侧壁相互平行;The row pipe 4 is a prismatic structure, a plurality of the row pipes 4 are parallel to each other, a gap 5 is formed between every two adjacent row pipes 4, and the two row pipe side walls of the gap 5 are formed parallel to each other;

所述排管分为高电位排管4.1和低电位排管4.2,每个所述排管周围分布与其电位不同的排管,所述供电单元3的输出端分别与多个所述高电位排管4.1的接线端连接,多个所述低电位排管4.2的接线端接地。The row pipes are divided into high-potential row pipes 4.1 and low-potential row pipes 4.2, each of which is distributed around the row pipes with different potentials, and the output end of the power supply unit 3 is connected to multiple high-potential row pipes respectively. The terminals of the tubes 4.1 are connected, and the terminals of multiple low-potential row tubes 4.2 are grounded.

在本发明实施例中,供电单元3包括电源3.1和变压器3.2,电源3.1的输出端与变压器3.2的输入端连接,所述电源3.1向多个排管4提供电能;所述变压器3.2将电源3.1输入的电能转化成多个排管4所需的电源。In the embodiment of the present invention, the power supply unit 3 includes a power supply 3.1 and a transformer 3.2, the output end of the power supply 3.1 is connected to the input end of the transformer 3.2, and the power supply 3.1 provides electric energy to a plurality of row pipes 4; the transformer 3.2 connects the power supply 3.1 The input electric energy is converted into the power required by the plurality of row pipes 4 .

所述低温等离子体发生器中,多个排管可以按照图4中的排列方式排列,多个排管可以按照行列式排列,高电位排管和低电位排管交错设置,例如假设利用(第N行,第M列)的方式表示坐标,在图4中,在坐标为(1,1)的位置为低电位排管、坐标为(1,2)的位置为高电位排管、坐标为(1,3)的位置为低电位排管、坐标为(1,4)的位置为高电位排管、坐标为(1,5)的位置为低电位排管、坐标为(1,6)的位置为高电位排管……;In the low-temperature plasma generator, a plurality of row tubes can be arranged according to the arrangement shown in FIG. Row N, column M) to represent the coordinates. In Figure 4, the position with coordinates (1,1) is the low-potential tube, the position with coordinates (1,2) is the high-potential tube, and the coordinates are The position of (1,3) is the low potential pipe, the position of coordinates (1,4) is the high potential pipe, the position of coordinates (1,5) is the low potential pipe, and the coordinate is (1,6) The position is the high potential row pipe...;

那么相应的,在坐标为(2,1)的位置为高电位排管、坐标为(2,2)的位置为低电位排管、坐标为(2,3)的位置为高电位排管、坐标为(2,4)的位置为低电位排管、坐标为(2,5)的位置为高电位排管、坐标为(2,6)的位置为低电位排管……;Correspondingly, the position with coordinates (2,1) is the high-potential pipe, the position with coordinates (2,2) is the low-potential pipe, and the position with coordinates (2,3) is the high-potential pipe. The position with coordinates (2,4) is the low-potential pipe, the position with coordinates (2,5) is the high-potential pipe, and the position with coordinates (2,6) is the low-potential pipe...;

在坐标为(3,1)的位置为低电位排管、坐标为(3,2)的位置为高电位排管、坐标为(3,3)的位置为低电位排管、坐标为(3,4)的位置为高电位排管、坐标为(3,5)的位置为低电位排管、坐标为(3,6)的位置为高电位排管……;The position with coordinates (3,1) is the low-potential pipe, the position with coordinates (3,2) is the high-potential pipe, the position with coordinates (3,3) is the low-potential pipe, and the coordinate is (3 , the position of 4) is the high-potential pipe, the position with coordinates (3,5) is the low-potential pipe, and the position with coordinates (3,6) is the high-potential pipe...;

在坐标为(4,1)的位置为高电位排管、坐标为(4,2)的位置为低电位排管、坐标为(4,3)的位置为高电位排管、坐标为(4,4)的位置为低电位排管、坐标为(4,5)的位置为高电位排管、坐标为(4,6)的位置为低电位排管……;The position with coordinates (4,1) is the high-potential pipe, the position with coordinates (4,2) is the low-potential pipe, the position with coordinates (4,3) is the high-potential pipe, and the coordinate is (4 , the position of 4) is the low-potential pipe, the position with coordinates (4,5) is the high-potential pipe, and the position with coordinates (4,6) is the low-potential pipe...;

在坐标为(5,1)的位置为低电位排管、坐标为(5,2)的位置为高电位排管、坐标为(5,3)的位置为低电位排管、坐标为(5,4)的位置为高电位排管、坐标为(5,5)的位置为低电位排管、坐标为(5,6)的位置为高电位排管……;The position with coordinates (5,1) is the low-potential pipe, the position with coordinates (5,2) is the high-potential pipe, the position with coordinates (5,3) is the low-potential pipe, and the coordinate is (5 ,4) is the high-potential pipe, the position with coordinates (5,5) is the low-potential pipe, and the position with coordinates (5,6) is the high-potential pipe...;

那么相应的,在坐标为(6,1)的位置为高电位排管、坐标为(6,2)的位置为低电位排管、坐标为(6,3)的位置为高电位排管、坐标为(6,4)的位置为低电位排管、坐标为(6,5)的位置为高电位排管、坐标为(6,6)的位置为低电位排管……。Correspondingly, the position with coordinates (6,1) is the high-potential pipe, the position with coordinates (6,2) is the low-potential pipe, and the position with coordinates (6,3) is the high-potential pipe. The position with coordinates (6,4) is the low-potential pipe, the position with coordinates (6,5) is the high-potential pipe, and the position with coordinates (6,6) is the low-potential pipe...

由于每个排管的横截面均为正方形,所以排管为正四棱柱,按照图4方式排列后,排管的每个侧面在相邻排管的侧面上的正投影均与该侧面边四周便于重合,也就是说,在本发明实施例中,两个排管之间的相邻是指其中一个排管的侧面在另一个排管的侧面上的正投影与该另一个排管的侧面的四周边沿重合。Since the cross-section of each pipe is a square, the pipe is a regular prism. After being arranged in the manner shown in Figure 4, the orthographic projection of each side of the pipe on the side of the adjacent pipe is in line with the surrounding sides of the side. Coincident, that is to say, in the embodiment of the present invention, the adjacency between two row pipes refers to the orthographic projection of the side of one row of pipes on the side of the other row of pipes and the side of the other row of pipes. The surrounding edges overlap.

在图4中,高电位排管4.1与低电位排管4.2之间的间隙5为所需处理气体的流通通道。In FIG. 4 , the gap 5 between the high-potential row pipe 4.1 and the low-potential row pipe 4.2 is the circulation channel for the required processing gas.

由于多个排管相互平行,所以每两个相邻的排管之间的垂直距离即为排管之间的距离,每两个相邻的所述排管之间的垂直距离相等,这样将会形成均匀的低温等离子场,提高气体净化效果;而且等距离布置,有助于提高等离子体产量。Since a plurality of rows of pipes are parallel to each other, the vertical distance between every two adjacent rows of pipes is the distance between the rows of pipes, and the vertical distance between every two adjacent rows of pipes is equal, so that A uniform low-temperature plasma field will be formed to improve the gas purification effect; and the equidistant arrangement will help to increase the plasma output.

当将本发明实施例应用于不同环境时,使用者可将多个排管并排设置,每两个相邻的排管之间距离为2mm至10mm,然后对排管中的导电介质施加电压,电流自电源、经变压器升压后进入高电位排管,在高电位排管与低电位排管之间通过微放电形成电流通路,低电位排管连接接地线,从而形成完整的电流回路;当气体从多个高电位排管和低电位排管之间的间隔流通时,产生低温等离子体。When the embodiment of the present invention is applied to different environments, the user can arrange multiple pipes side by side, the distance between every two adjacent pipes is 2mm to 10mm, and then apply voltage to the conductive medium in the pipes, The current enters the high-potential row tube from the power supply after being boosted by the transformer, and forms a current path through micro-discharge between the high-potential row tube and the low-potential row tube, and the low-potential row tube is connected to the ground wire to form a complete current loop; Low-temperature plasma is generated when gas flows through the intervals between multiple high-potential calandria and low-potential calandria.

本发明实施例中,电源调制好的电流,输送至变压器的输入端,经变压器对电压进行调整后,电流经输出端子送至高电位排管,高电位排管与低电位排管之间导通,产生低温等离子体。由于使用的是方管,当高电位排管和低电位排管导通时,可以在他们之间形成更大空间的低温等离子体区,提高低温等离子体的产生量,从而可以提高对有机气体的处理效果。使用者可将多个排管并排设置,并且多个排管之间具有间隔,然后对多个排管施加电压。当气体从多个排管之间的间隔流通时,产生低温等离子体。In the embodiment of the present invention, the current modulated by the power supply is sent to the input terminal of the transformer, and after the voltage is adjusted by the transformer, the current is sent to the high-potential row tube through the output terminal, and the high-potential row tube and the low-potential row tube are connected , producing low-temperature plasma. Since the square tube is used, when the high-potential row tube and the low-potential row tube are connected, a larger space of low-temperature plasma area can be formed between them, and the generation of low-temperature plasma can be increased, thereby improving the resistance to organic gases. processing effect. The user can arrange a plurality of row pipes side by side with intervals between the plurality of row pipes, and then apply voltage to the plurality of row pipes. A low-temperature plasma is generated when gas flows through the spaces between the multiple calandria.

本发明实施例中,排管形式为方管(长方形、正方形等),方管外层为绝缘介质、内层为导电介质,与套管式结构相比,本发明所用技术可以有效减小设备体积、降低设备成本;与圆管连排式结构相比,本发明所用方管可以有效提高低温等离子体的产生量,从而可以降低设备成本。因此,使用本发明所用方管电极及低温等离子体发生设备,可以有效提高利用低温等离子体处理废气的效率,并且降低低温等离子体处理有机废气的成本。In the embodiment of the present invention, the pipe arrangement is a square pipe (rectangular, square, etc.), the outer layer of the square pipe is an insulating medium, and the inner layer is a conductive medium. Compared with the casing structure, the technology used in the present invention can effectively reduce equipment Smaller volume and lower equipment cost; compared with the circular tube row structure, the square tube used in the present invention can effectively increase the generation of low-temperature plasma, thereby reducing equipment cost. Therefore, using the square tube electrode and the low-temperature plasma generating equipment used in the present invention can effectively improve the efficiency of treating waste gas with low-temperature plasma, and reduce the cost of treating organic waste gas with low-temperature plasma.

在本发明实施例的描述中,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是固定连接,也可以是可拆卸连接,或一体地连接;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本发明中的具体含义。In the description of the embodiments of the present invention, unless otherwise clearly stipulated and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection, or Integral connection; it can be mechanical connection or electrical connection; it can be direct connection or indirect connection through an intermediary, and it can be the internal communication of two components. Those of ordinary skill in the art can understand the specific meanings of the above terms in the present invention in specific situations.

在本发明的描述中,需要说明的是,术语“中心”、“上”、“下”、“左”、“右”、“竖直”、“水平”、“内”、“外”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。此外,术语“第一”、“第二”、“第三”仅用于描述目的,而不能理解为指示或暗示相对重要性。In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, or in a specific orientation. construction and operation, therefore, should not be construed as limiting the invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and should not be construed as indicating or implying relative importance.

最后应说明的是:以上所述实施例,仅为本发明的具体实施方式,用以说明本发明的技术方案,而非对其限制,本发明的保护范围并不局限于此,尽管参照前述实施例对本发明进行了详细的说明,本领域的普通技术人员应当理解:任何熟悉本技术领域的技术人员在本发明揭露的技术范围内,其依然可以对前述实施例所记载的技术方案进行修改或可轻易想到变化,或者对其中部分技术特征进行等同替换;而这些修改、变化或者替换,并不使相应技术方案的本质脱离本发明实施例技术方案的精神和范围,都应涵盖在本发明的保护范围之内。因此,本发明的保护范围应所述以权利要求的保护范围为准。Finally, it should be noted that: the above-described embodiments are only specific implementations of the present invention, used to illustrate the technical solutions of the present invention, rather than limiting them, and the scope of protection of the present invention is not limited thereto, although referring to the foregoing The embodiment has described the present invention in detail, and those skilled in the art should understand that any person familiar with the technical field can still modify the technical solutions described in the foregoing embodiments within the technical scope disclosed in the present invention Changes can be easily thought of, or equivalent replacements are made to some of the technical features; and these modifications, changes or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention, and should be included in the scope of the present invention within the scope of protection. Therefore, the protection scope of the present invention should be based on the protection scope of the claims.

Claims (10)

1. a kind of comb, it is characterised in that include:Conducting medium and dielectric;
The dielectric is bottomless prism-shaped, and the conducting medium is prism-shaped, and the dielectric is placed on conductive Jie Outside matter.
2. comb according to claim 1, it is characterised in that the rectangular cross-section of the dielectric.
3. comb according to claim 1, it is characterised in that the conducting medium is conducting metal rod or conducting metal Powder.
4. comb according to claim 1, it is characterised in that the material of the dielectric is quartz glass.
5. comb according to claim 1, it is characterised in that the length of side of the inwall of the dielectric is 5mm to 7mm; The wall thickness of the dielectric is 1mm to 3mm, and the outer wall length of side of conducting medium is 5mm to 7mm.
6. comb according to claim 5, it is characterised in that the outer wall of conducting medium is closely pasted with the inwall of dielectric Close.
7. comb according to claim 1, it is characterised in that the length of the dielectric is 360mm to 370mm.
8. there is equipment in a kind of low temperature plasma, it is characterised in that include:Power supply unit and multiple such as claim 1 to 7 times Comb described in one;
The comb is prismatic structure, and multiple combs are parallel to each other, between being formed between the adjacent comb of each two Gap, and form two comb side walls in the gap and be parallel to each other;
The comb is divided into high potential comb and electronegative potential comb, and the rows different from its current potential are distributed around each described comb Pipe, the outfan of said supply unit is connected respectively with the terminals of multiple high potential combs, multiple electronegative potential rows The terminals ground connection of pipe.
9. there is equipment in low temperature plasma according to claim 8, it is characterised in that the adjacent comb of each two Between vertical dimension it is equal.
10. there is equipment in low temperature plasma according to claim 9, it is characterised in that the adjacent row of each two Vertical dimension between pipe is 2mm to 10mm.
CN201710094545.7A 2017-02-21 2017-02-21 Exhaust pipe and low temperature plasma generation equipment Pending CN106604514A (en)

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CN106582280A (en) * 2017-02-21 2017-04-26 唐山铸锐科技有限公司 Discharge electrode and waste gas treatment device
CN206472362U (en) * 2017-02-21 2017-09-05 唐山铸锐科技有限公司 Equipment occurs for comb and low temperature plasma

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JP2002050500A (en) * 2000-02-08 2002-02-15 Canon Inc Discharge generating device and discharge generating method
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CN103143245A (en) * 2013-02-26 2013-06-12 中维环保科技有限公司 Louver type large-area cold plasma exhaust gas processing device
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