CN106597016A - Capacitive MEMS dual-axis accelerometer - Google Patents
Capacitive MEMS dual-axis accelerometer Download PDFInfo
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- CN106597016A CN106597016A CN201611196565.7A CN201611196565A CN106597016A CN 106597016 A CN106597016 A CN 106597016A CN 201611196565 A CN201611196565 A CN 201611196565A CN 106597016 A CN106597016 A CN 106597016A
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- 238000012545 processing Methods 0.000 claims description 11
- 230000004888 barrier function Effects 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
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- 238000013461 design Methods 0.000 description 20
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- 238000001514 detection method Methods 0.000 description 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
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- 206010070834 Sensitisation Diseases 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
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Abstract
The invention discloses a capacitive MEMS dual-axis accelerometer, which sequentially comprises a substrate, an insulating layer and a sensitive device layer from bottom to top, wherein the sensitive device layer comprises a fixed frame, folded beams, sensitive mass blocks, comb tooth assemblies and anchor points; the fixed frame is fixed on the substrate by means of the insulating layer, four end corners of each sensitive mass block are each provided with a pair of folded beams, center lines of each pair of folded beams are orthogonal, one end of each folded beam is connected with the fixed frame, and the other end of each folded beam is connected with the corresponding sensitive mass block; the periphery of each sensitive mass block is provided with a plurality of the comb tooth assemblies; and each comb tooth assembly comprises fixed comb teeth and movable comb teeth, one end of each fixed comb tooth is connected with the fixed frame, and one end of each movable comb tooth is connected with the corresponding sensitive mass block. The capacitive MEMS dual-axis accelerometer realizes the technical effects of high sensitivity and small orthogonal error.
Description
Technical field
The present invention relates to mems accelerometer design studies field, in particular it relates to a kind of capacitive MEMS twin shaft accelerates
Degree meter.
Background technology
Mems accelerometer is widely used in the numerous areas such as consumer electronics, auto industry, aviation military affairs, and with
The development of microelectric technique and the continuous progress of micro-machining, mems accelerometer wearable device, unmanned plane,
The sensory fields such as Internet of Things (IoT), vibration and navigation have also embodied particularly important value, with wide market prospect.
Accelerometer is mainly used in measuring acceleration of the moving object relative to inertial space, different according to its Cleaning Principle
Pressure resistance type, piezoelectric type, resonant mode, tunnelling current formula and condenser type can be divided into, for temperature coefficient, resolution, precision etc. are required
Higher low g accelerometers are typically detected using condenser type.
Capacitive accelerometer is broadly divided into comb-tooth-type and flat two kinds, and flat accelerometer is primarily present following several
Individual problem:Dual surface lithography, bonding are needed, difficulty of processing is big, if reducing device thermal noise, improve precision, it is necessary to carry out vacuum
Encapsulation, packaging cost are high, and poor repeatability, device yield are low.Multi-finger microaccelerometer (changed area/change spacing type) is without the need for double
Face photoetching, processing technique are simple, can reduce device thermal noise by damping hole is made on mass, can carry out atmospheric packaged,
Low cost of manufacture, technical maturity are capable of achieving batch production.
Traditional accelerometer mostly is the single-axis sensors of single vector detection, with constantly changing for sensor application environment
Become, single-axis accelerometer can not meet application demand, need the accelerometer using twin shaft, and traditional twin-axis accelerometer
Using two single-axis accelerometers are orthogonally encapsulated, this necessarily introduces larger quadrature error, affects sensor accuracy,
Assembling simultaneously is difficult, device volume is big, manufacturing cost is high;Existing twin-axis accelerometer technical scheme has using comb variable area
Type structure and using orthogonal snakelike support beam comb structure carrying out two-axis acceleration measurement, both schemes are unfortunately:Before
The accelerometer response that person is constituted is relatively low, and resolution is poor, and it is sensitive that the accelerometer that the latter is constituted can produce larger intersection
Degree, stability are poor.
The content of the invention
The invention provides a kind of capacitive MEMS twin-axis accelerometer, solves existing twin-axis accelerometer sensitivity
Low, the sensitive big technical problem of intersection, realizes the little technology of capacitive MEMS twin-axis accelerometer sensitivity height, quadrature error
Effect.
To solve above-mentioned technical problem, this application provides a kind of capacitive MEMS twin-axis accelerometer, the acceleration
Meter includes from down to up successively:
Substrate, insulating barrier, Sensitive Apparatuses layer;Sensitive Apparatuses layer includes:Fixed frame, folded beam, sensitive-mass block, comb
Combination, anchor point;Wherein, fixed frame is fixed on substrate by anchor point, and 4 ends angle of sensitive-mass block is respectively equipped with a doubling
Stoplog, the center line of each pair folded beam are orthogonal, and one end of folded beam is connected with fixed frame, the other end and sensitive-mass of folded beam
Block connects;Sensitive-mass block surrounding is distributed with multiple comb combinations, and comb combination includes:Fixed fingers and movable comb, it is fixed
Comb one end is connected with fixed frame, and movable comb one end is connected with sensitive-mass block.
Wherein, the sensitive-mass block can realize quality adjustment by designing the size and number for changing cavity, can root
Need according to practical application, adjust the sensitive-mass block quality, realize that higher sensitivity is detected.
Wherein, the folded beam is relatively small in sensitive axes directional stiffness, is easily deformed, in non-sensitive direction of principal axis rigidity very
Greatly, it is unlikely to deform, cross sensitivity can be suppressed, prevents quadrature error from affecting, while the folded beam is non-linear very little, can be with
Release structure residual stress, reduces the impact of residual stress and temperature to device.
Wherein, 4 pairs of folded beams are symmetrical with regard to the geometric center of sensitive-mass block, and multiple comb are combined with regard to sensitive-mass block
Centrage it is symmetrical.
Wherein, the accelerometer also includes:Second fixed frame, second fixed frame are located at sensitive-mass block
Interior, the second fixed frame includes:First fix bar, the second fix bar, the first fix bar are in ten with the second fix bar interconnection
The center superposition of shape, the first fix bar and the second fix bar, the first fix bar both sides and the second fix bar both sides are symmetrically divided
Multiple second comb combinations are furnished with, the combination of the second comb includes:Second fixed fingers and the second movable comb, the second fixed fingers
One end is connected with fix bar, and second movable comb one end is connected with sensitive-mass block inwall.
Wherein, the two ends of the two ends of the first fix bar and the second fix bar extend towards sensitive-mass block inwall respectively, and first
The two ends of fix bar and the second fix bar are respectively arranged at two ends with position limiting structure.
Wherein, at least one cavity is uniformly provided with the sensitive-mass block.
Wherein, the insulating barrier is provided with center anchor point, and second fixed frame is fixed on by the central anchor point
On substrate, the insulating barrier is provided with surrounding anchor point, and the fixed frame is fixed on substrate by surrounding anchor point.
Wherein, fixed fingers are parallel with movable comb, and both are in the horizontal direction or vertical direction has overlapping region, are
Make accelerometer response sufficiently large, while improving the utilization of chip area, make chip structure compact, the movable comb and phase
Gap ratio between two adjacent fixed fingers is 1:4.
Wherein, the fixed fingers connection identical electrode of fixed frame surrounding is distributed in, the second fixed frame two is distributed in
The second fixed fingers connection identical electrode of side, fixed fingers are equal with the second fixed fingers quantity, and electric polarity is contrary.
Wherein, the material of substrate is silicon or glass, and Sensitive Apparatuses layer is heavily doped silicon, and accelerometer is by MEMS processing
Technique is completed.
The invention provides a kind of single-chip comb-tooth-type becomes spacing type twin-axis accelerometer, by accelerometer beam, matter
The innovative design of gauge block and position limiting structure (stopper), the traditional twin-axis accelerometer sensitivity of solution is low, resolution is poor, friendship
The problems such as fork sensitivity is big, stability is poor, while the invention effectively inhibits structural quadrature error, noise is low, small volume,
Processing technique is simple, low cost, is capable of achieving batch production.
Single-chip comb-tooth-type becomes spacing type twin-axis accelerometer:Including substrate, Sensitive Apparatuses layer, substrate and Sensitive Apparatuses layer
Between have insulating barrier;Sensitive Apparatuses layer includes fixed frame, anchor point, folded beam, sensitive-mass block, fixed fingers, movable comb
And stopper;In Sensitive Apparatuses layer, single mass structure combines the design of eight beam centrosymmetry and comb becomes spacing symmetric configuration
The detection of X, Y two-axis acceleration signal is realized respectively;Make multipair movable using surface silicon process technology on sensitive-mass block
Comb, correspondingly makes multipair fixed fingers on fixed frame, to constitute multipair difference sensitization capacitance, when accelerometer is in difference
When direction has acceleration signal to be input into, difference sensitization capacitance will occur corresponding capacitance variations, by the detection to changing electric capacity
Realize that two-axis acceleration is measured.
Stopper is designed on central cross chiasma type fixed frame, forms symmetrical structure.During folded beam is eight beams
Heart symmetric design, axially has four folded beams to be symmetrically distributed in the sensitive axial direction both sides angle of the mass per sensitive, while quick with non-
Four symmetrical folded beam structure pairwise orthogonals of sense direction of principal axis, one end of the folded beam are connected to the fixed frame, separately
One end is connected to the sensitive-mass block.
The folded beam is easily deformed on sensitive direction of principal axis, larger in non-sensitive direction of principal axis rigidity.The sensitive-mass
The sensitive-mass scalable of block, the sensitive-mass block mainly by four attached cavity structures little mass it is symmetrical constitute,
The size and number that cavity can be passed through to design changes the sensitive-mass block quality.
The anchor point is divided into the anchor point for being distributed in surrounding, and also including center anchor point is devised, central cross chiasma type is fixed
Framework is fixed and is linked together by central anchor point.The fixed fingers are placed in parallel with movable comb dislocation, described
Gap ratio between movable comb and two adjacent fixed fingers is 1:4.It is distributed in the fixed frame surrounding position
The fixed fingers connection identical electrode put, is centrally located the described fixed comb of fixed frame position described in decussation
Tooth connects identical electrode, and the fixed fingers quantity is equal at two positions, and electric polarity is conversely, in X or Y sensitive axes upwards
When having acceleration signal, surrounding comb structure forms total differential capacitance signal with central cross crossover location comb structure.
The present invention compared with prior art, has the advantages that:
1st, the present invention is designed using eight folded beam pairwise orthogonal centrosymmetry, realizes two sensitive axes (X-axis and Y-axis) direction
Crossing decoupling, restrained effectively structural quadrature error, with higher twin shaft accuracy of detection.
2nd, the present invention is by the quality design-adjustable of sensitive-mass block, i.e., the cavity size and number in mass is entering
Row adjustment, on the one hand can increase mass quality, realize high sensitivity, the high resolution detection of twin-axis accelerometer;The opposing party
Face also can be appropriate to reduce mass quality, the range of increased acceleration meter when sensitivity, resolution requirement is ensured.
3rd, the present invention passes through the cross fixed frame in design centre position and center anchor point structure, makes electrode metal lead
(i.e. at the center superposition of the first fix bar and the second fix bar) at a Pad Bian Kecong centers anchor point is only needed to draw, greatly
The difficulty in processing technique is reduced, product yield is improve, cost is reduced.
4th, by symmetrical stopper structures are designed on cross fixed frame, it is therefore prevented that overload that is dynamic, determining comb is inhaled
Conjunction, Problem of Failure, increased the stability and reliability of twin-axis accelerometer.
5th, by the design with chamber mass, the system damping of twin-axis accelerometer is reduced, reduces accelerometer heat
Mechanical noise, improves the signal to noise ratio of twin-axis accelerometer.
6th, using surrounding framework, the fixed fingers design of center difference same polarity connection, effectively prevent twin shaft defeated
Enter signal to interfere, twin-axis accelerometer improves the accuracy of detection of accelerometer without cross sensitivity, while and movable comb
Differential type capacitance detecting is formed, effectively suppression common mode can be disturbed, be improve accelerometer combination property.
7th, become spacing type capacitor design using comb, increased initial capacitance value that is dynamic, determining between comb, reduce rear end micro-
The design difficulty of small capacitances signal deteching circuit.
8th, the design of single-chip two-axis acceleration, it is to avoid the problem of combination accelerometer package verticality difference, while body
Product is little, lightweight, and without the need for Vacuum Package, processing technique is ripe, can batch micro operations, low cost.
Description of the drawings
Accompanying drawing described herein is used for providing further understanding the embodiment of the present invention, constitutes of the application
Point, do not constitute the restriction to the embodiment of the present invention;
Fig. 1 is the structural representation of capacitive MEMS twin-axis accelerometer in the application;
Fig. 2 is the structural representation of sensitive-mass block in the application.
Specific embodiment
The invention provides a kind of capacitive MEMS twin-axis accelerometer, solves existing twin-axis accelerometer sensitivity
The larger technical problem of poor, cross sensitivity, realizes capacitive MEMS twin-axis accelerometer sensitivity height, and quadrature error is little
Technique effect.
It is in order to be more clearly understood that the above objects, features and advantages of the present invention, below in conjunction with the accompanying drawings and concrete real
Apply mode to be further described in detail the present invention.It should be noted that in the case where mutually not conflicting, the application's
Feature in embodiment and embodiment can be mutually combined.
Many details are elaborated in the following description in order to fully understand the present invention, but, the present invention may be used also
With the other modes in the range of being different from being described herein using other implementing, therefore, protection scope of the present invention is not received down
The restriction of specific embodiment disclosed in face.
As shown in figure 1, single-chip comb-tooth-type according to embodiments of the present invention becomes spacing type twin-axis accelerometer, base is included
Piece 1, its material are N-shaped DOPOS doped polycrystalline silicon;There is relatively thin silicon oxide layer on substrate 1, silicon oxide layer rises and is dielectrically separated from and fixed work
With anchor point 3 is fixed on substrate by silicon oxide layer;It is Sensitive Apparatuses layer above silicon oxide layer, Sensitive Apparatuses layer material is p-type
Heavily doped silicon, Sensitive Apparatuses layer include fixed frame 2, folded beam 4, sensitive-mass block 5, movable comb 6,7,8,9,10,11,
Fixed fingers 12,13,14,15,16,17 and stopper18, each structure are completed by MEMS processing technique;Fixed frame 2
It is fixed on substrate 1 by anchor point 3, eight folded beams 4 of centrosymmetry design are connected respectively by pairwise orthogonal mode its one end
Four edges of sensitive-mass block 5 are connected on, the other end is then connected on corresponding surrounding fixed frame 2;Fixed fingers 12,
13rd, 14,15,16,17 design and produce on cross type fixed frame 2 and surrounding fixed frame 2, it is vertical with fixed frame 2,
And be distributed along centrosymmetry each other, and be distributed in the fixed fingers quantity of surrounding fixed frame 2 and be centrally located cross friendship
The fixed fingers quantity of forked type fixed frame 2 is equal, each fixed fingers 12,13,14,15,16,17 have one it is corresponding
Movable comb 6,7,8,9,10,11 constitutes a pair of differential capacitance structures therewith, and movable comb 6,7,8,9,10,11 is designed and produced
On sensitive-mass block 5, along centrosymmetry, and vertical distribution is in four sides of sensitive-mass block 5 and inwall, each movable comb 6,7,
8th, the gap-ratio between 9,10,11 and two adjacent fixed fingers is 1:4;Stopper18 designs and produces solid in cross type
Determine, on framework 2, have certain interval with the inwall of sensitive-mass block 5.
The 5 main little mass by four attached cavity structures of sensitive-mass block is symmetrical to be constituted, and is connected by folded beam 4
On fixed frame 2, folded beam 4, sensitive-mass block 5, movable comb 6,7,8,9,10,11 pass through structural cavity body and structure interval
Discharge with reference to MEMS etching process directly etching, obtain hanging structure.
It should be noted that:5 mass scalable of sensitive-mass block, as shown in Fig. 2 can pass through to change the size sum of cavity
Amount goes the quality for changing sensitive-mass block 5, and then optimizes the combination property of twin-axis accelerometer.
Operation principle of the present invention:Capacitance change signal will be converted to by sensing element by acceleration signals, be passed through
The analysis of follow-up signal process circuit, realizes the linearity test of acceleration.
Initial capacitance C between the parallel comb of adjacent pair0It is represented by (determining tooth bias as comb structure is adopted
Formula, and movable comb determines backlash ratio for 1 away from both sides:4, therefore ignore side capacitance in larger distance):
In formula, ε0For permittivity of vacuum, ε1For relative dielectric constant, a, h, d0The overlapping length respectively moved, determine between comb
Degree, thickness and spacing.
Variation delta C that a pair of electric capacity when having micro-displacement to change between comb are obtained by formula (1) is:
When the present invention is operated in one-dimensional case, accelerometer might as well be assumed only by along Y-axis negative direction acceleration effect, this
When, sensitive-mass block 5 will occur micro-displacement, outer movable comb finger 6 and fixed fingers to Y-axis positive direction due to inertia force effect
The 12 comb electric capacity for constituting will reduce as gap increases, meanwhile, the comb that internal movable comb 7 is constituted with fixed fingers 13
Electric capacity will increase as gap reduces, two parts constitute inside and outside differential capacitance detection signal, certainly, movable comb 8,9,10,
11 now also will occur small translation along Y-axis positive direction, but movable comb 8,9 and 10,11 respectively with fixed fingers 14,15 and
16th, 17 is same polarity change, and each polar capacitor variable quantity is zero, therefore is exported without differential signal at X axis capacitance detecting end, Y
Axial acceleration is input on X axis signal detection without impact;In the same manner, when accelerometer is only by along X axis acceleration effect,
Similar change can be obtained, X axis external and internal compositionses formed differential capacitance detection signal, while to Y-axis signal detection end without
Affect.Therefore, when the twin-axis accelerometer in the present invention is operated in one-dimensional case, single-axis accelerometer can be substituted completely.
When normal work of the present invention is in two-dimensional case, i.e., simultaneously by (assuming along negative along X, Y-axis acceleration effect
Direction), 6,7,8,9,10,11 change in location situation of movable comb can consider as the case may be, if sensitive-mass block 5 along X,
The micrometric displacement of Y-axis is respectively Δ x, Δ y, then can draw:
The comb capacitance change that a pair of movable comb 6 are constituted with fixed fingers 12 is:
The comb capacitance change that a pair of movable comb 7 are constituted with fixed fingers 13 is:
The comb capacitance change that a pair of movable comb 8 or 9 are constituted with fixed fingers 14 or 15 is:
The comb capacitance change that a pair of movable comb 10 or 11 are constituted with fixed fingers 16 or 17 is:
As movable comb 6,8,9 and fixed fingers 12,14,15 are same polarity change, movable comb 7,10,11 and fixation
Comb 13,16,17 is same polarity change, and the total cross interference capacitance change of each polarity is zero, is then finally obtained along X, Y
A pair of Differential Detection capacitance sizes of axial direction are respectively:
By formula (7), (8) as can be seen that the differential capacitance variable quantity and mass of the sensitive axial direction of twin-axis accelerometer are along quick
Feel that axial micrometric displacement component is linearly proportional, i.e., with extraneous acceleration input signal two sensitive axial directions components into
Linear ratio relation, and twin shaft is without cross sensitivity.Total differential capacitance variable signal is accessed after the parallel connection of multipair comb electric capacity
Back-end processing detects circuit, is just capable of achieving along the biax acceleration analysis of X, Y.
The present invention compared with prior art, has the advantages that:
1st, the present invention is designed using eight folded beam pairwise orthogonal centrosymmetry, realizes two sensitive axes (X-axis and Y-axis) direction
Crossing decoupling, restrained effectively structural quadrature error, with higher twin shaft accuracy of detection.
2nd, the present invention is by the quality design-adjustable of sensitive-mass block, i.e., the cavity size and number in mass is entering
Row adjustment, on the one hand can increase mass quality, realize high sensitivity, the high resolution detection of twin-axis accelerometer;The opposing party
Face also can be appropriate to reduce mass quality, the range of increased acceleration meter when sensitivity, resolution requirement is ensured.
3rd, the present invention passes through the cross fixed frame in design centre position and center anchor point structure, makes electrode metal lead
(i.e. at the center superposition of the first fix bar and the second fix bar) at a Pad Bian Kecong centers anchor point is only needed to draw, greatly
The difficulty in processing technique is reduced, product yield is improve, cost is reduced.
4th, by symmetrical stopper structures are designed on cross fixed frame, it is therefore prevented that overload that is dynamic, determining comb is inhaled
Conjunction, Problem of Failure, increased the stability and reliability of twin-axis accelerometer.
5th, by the design with chamber mass, the system damping of twin-axis accelerometer is reduced, reduces accelerometer heat
Mechanical noise, improves the signal to noise ratio of twin-axis accelerometer.
6th, using surrounding framework, the fixed fingers design of center difference same polarity connection, effectively prevent twin shaft defeated
Enter signal to interfere, twin-axis accelerometer improves the accuracy of detection of accelerometer without cross sensitivity, while and movable comb
Differential type capacitance detecting is formed, effectively suppression common mode can be disturbed, be improve accelerometer combination property.
7th, become spacing type capacitor design using comb, increased initial capacitance value that is dynamic, determining between comb, reduce rear end micro-
The design difficulty of small capacitances signal deteching circuit.
8th, the design of single-chip two-axis acceleration, it is to avoid the problem of combination accelerometer package verticality difference, while body
Product is little, lightweight, and without the need for Vacuum Package, processing technique is ripe, can batch micro operations, low cost.
, but those skilled in the art once know basic creation although preferred embodiments of the present invention have been described
Property concept, then can make other change and modification to these embodiments.So, claims are intended to be construed to include excellent
Select embodiment and fall into the had altered of the scope of the invention and change.
Obviously, those skilled in the art can carry out various changes and deform the essence without deviating from the present invention to the present invention
God and scope.So, if these modifications of the present invention and deformation belong to the scope of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to comprising these changes and deforms.
Claims (10)
1. a kind of capacitive MEMS twin-axis accelerometer, it is characterised in that the accelerometer includes from down to up successively:
Substrate, insulating barrier, Sensitive Apparatuses layer;Sensitive Apparatuses layer includes:Fixed frame, folded beam, sensitive-mass block, comb group
Conjunction, anchor point;Wherein, fixed frame is fixed on substrate by anchor point, and 4 ends angle of sensitive-mass block is respectively equipped with a pair of foldings
Beam, the center line of each pair folded beam are orthogonal, and one end of folded beam is connected with fixed frame, the other end and the sensitive-mass block of folded beam
Connection;Sensitive-mass block surrounding is distributed with multiple comb combinations, and comb combination includes:Fixed fingers and movable comb, fixed comb
Tooth one end is connected with fixed frame, and movable comb one end is connected with sensitive-mass block, and the quality of sensitive-mass block is sized to adjust
Section.
2. capacitive MEMS twin-axis accelerometer according to claim 1, it is characterised in that 4 pairs of folded beams are with regard to sensitivity
The geometric center of mass is symmetrical, and multiple comb combinations are symmetrical with regard to the centrage of sensitive-mass block.
3. capacitive MEMS twin-axis accelerometer according to claim 1, it is characterised in that the accelerometer is also wrapped
Include:Second fixed frame, second fixed frame are located in sensitive-mass block, and the second fixed frame includes:First fix bar,
Second fix bar, the first fix bar are in crosswise with the second fix bar interconnection, in the first fix bar and the second fix bar
The heart overlaps, and the first fix bar both sides and the second fix bar both sides are symmetrically distributed with multiple second comb combinations, the second comb group
Conjunction includes:Second fixed fingers and the second movable comb, second fixed fingers one end are connected with fix bar, the second movable comb one
End is connected with sensitive-mass block inwall.
4. capacitive MEMS twin-axis accelerometer according to claim 3, it is characterised in that the two ends of the first fix bar and
The two ends of the second fix bar extend towards sensitive-mass block inwall respectively, the two ends point of the two ends of the first fix bar and the second fix bar
Position limiting structure is not provided with.
5. capacitive MEMS twin-axis accelerometer according to claim 3, it is characterised in that in the sensitive-mass block
It is even to be provided with least one cavity.
6. capacitive MEMS twin-axis accelerometer according to claim 3, it is characterised in that during the insulating barrier is provided with
Heart anchor point, second fixed frame are selected by the central anchor and are fixed on substrate, and the insulating barrier is provided with surrounding anchor point,
The fixed frame is fixed on substrate by surrounding anchor point.
7. capacitive MEMS twin-axis accelerometer according to claim 1, it is characterised in that fixed fingers and movable comb
It is parallel, and both are in the horizontal direction or vertical direction has overlapping region, between movable comb and two adjacent fixed fingers
Gap ratio be 1:4.
8. capacitive MEMS twin-axis accelerometer according to claim 3, it is characterised in that be distributed in fixed frame surrounding
Fixed fingers connection identical electrode, be distributed in the second fixed frame both sides the second fixed fingers connection identical electrode,
Fixed fingers are equal with the second fixed fingers quantity, and electric polarity is contrary.
9. capacitive MEMS twin-axis accelerometer according to claim 1, it is characterised in that the material of substrate is silicon or glass
Glass, Sensitive Apparatuses layer are heavily doped silicon, and accelerometer completed by MEMS processing technique.
10. capacitive MEMS twin-axis accelerometer according to claim 1, it is characterised in that sensitive-mass block is by changing
Become the size and number of sensitive-mass block inner chamber body realizing quality adjustment.
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Cited By (28)
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CN107132372A (en) * | 2017-06-29 | 2017-09-05 | 四川知微传感技术有限公司 | Structure for capacitance detection of capacitive micro-mechanical accelerometer |
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US20210132368A1 (en) | 2017-07-06 | 2021-05-06 | Hamamatsu Photonics K.K. | Optical device |
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CN108092638A (en) * | 2017-11-27 | 2018-05-29 | 东南大学 | A kind of triangle collapse beam mass block resonator system, detection method and manufacture craft |
CN108092638B (en) * | 2017-11-27 | 2021-03-19 | 东南大学 | A triangular folded beam mass block resonance system, detection method and manufacturing process |
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CN109946481A (en) * | 2019-04-02 | 2019-06-28 | 四川知微传感技术有限公司 | MEMS closed-loop accelerometer based on rigidity compensation |
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CN110806498B (en) * | 2019-10-18 | 2022-01-07 | 中国航空工业集团公司西安飞行自动控制研究所 | Comb tooth capacitance type micro-electromechanical accelerometer structure |
CN110806498A (en) * | 2019-10-18 | 2020-02-18 | 中国航空工业集团公司西安飞行自动控制研究所 | Comb tooth capacitance type micro-electromechanical accelerometer structure |
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CN111551761A (en) * | 2020-04-03 | 2020-08-18 | 四川知微传感技术有限公司 | Low-noise MEMS accelerometer |
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CN113582124A (en) * | 2021-08-17 | 2021-11-02 | 美新半导体(天津)有限公司 | Double-shaft micro-mechanical system transducer structure |
CN114814293A (en) * | 2022-06-29 | 2022-07-29 | 成都华托微纳智能传感科技有限公司 | MEMS accelerometer with sawtooth-shaped comb tooth structure |
CN115407084A (en) * | 2022-10-17 | 2022-11-29 | 北京微元时代科技有限公司 | Comb tooth capacitance accelerometer |
CN115711691A (en) * | 2022-11-09 | 2023-02-24 | 杭州电子科技大学 | Inertial interference resistant multi-force signal MEMS sensor and manufacturing method thereof |
RU2837037C1 (en) * | 2024-11-22 | 2025-03-25 | Российская Федерация, от имени которой выступает Государственная корпорация по атомной энергии "Росатом" | Linear accelerometer |
CN119568983A (en) * | 2024-12-31 | 2025-03-07 | 松山湖材料实验室 | Structure and preparation method of MEMS acceleration sensor chip |
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