CN106569310B - Optical image stabilization based on MEMS - Google Patents
Optical image stabilization based on MEMS Download PDFInfo
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- CN106569310B CN106569310B CN201610905935.3A CN201610905935A CN106569310B CN 106569310 B CN106569310 B CN 106569310B CN 201610905935 A CN201610905935 A CN 201610905935A CN 106569310 B CN106569310 B CN 106569310B
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- 230000006641 stabilisation Effects 0.000 title claims description 29
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B5/00—Adjustment of optical system relative to image or object surface other than for focusing
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/64—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image
- G02B27/646—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image compensating for small deviations, e.g. due to vibration or shake
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B5/00—Adjustment of optical system relative to image or object surface other than for focusing
- G03B5/02—Lateral adjustment of lens
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/60—Control of cameras or camera modules
- H04N23/68—Control of cameras or camera modules for stable pick-up of the scene, e.g. compensating for camera body vibrations
- H04N23/681—Motion detection
- H04N23/6812—Motion detection based on additional sensors, e.g. acceleration sensors
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
- H04N23/60—Control of cameras or camera modules
- H04N23/68—Control of cameras or camera modules for stable pick-up of the scene, e.g. compensating for camera body vibrations
- H04N23/682—Vibration or motion blur correction
- H04N23/685—Vibration or motion blur correction performed by mechanical compensation
- H04N23/687—Vibration or motion blur correction performed by mechanical compensation by shifting the lens or sensor position
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B2205/00—Adjustment of optical system relative to image or object surface other than for focusing
- G03B2205/0007—Movement of one or more optical elements for control of motion blur
- G03B2205/0015—Movement of one or more optical elements for control of motion blur by displacing one or more optical elements normal to the optical axis
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B2205/00—Adjustment of optical system relative to image or object surface other than for focusing
- G03B2205/0053—Driving means for the movement of one or more optical element
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Optics & Photonics (AREA)
- Studio Devices (AREA)
- Adjustment Of Camera Lenses (AREA)
Abstract
A kind of camera (800) is provided, which includes: multiple MEMS electrostatic comb actuators (1-3), and each actuator can be used to at least one lens applied force；And optical image stabilization (OIS) algoritic module (805), it is operable to respond to order multiple actuators (1-3) to activate at least one described lens in the movement of camera (800).
Description
The application be the applying date be September in 2012 28, application No. is 201280047680.1, entitled " be based on
The divisional application of the application for a patent for invention of the optical image stabilization of MEMS ".
Technical field
The disclosure relates generally to Optical devices, more particularly to being based on the image stabilization of MEMS (MEMS)
System.
Background technique
The fast development for having the cell phone cameras of such as zoom, automatic focusing and high-resolution feature has threatened
Keep user-friendly camera out-of-date.But as this miniature camera has transplanted higher and higher million pixel densities and zoom function,
The picture quality of generation is influenced by hand tremor.In fact, still holding photograph even if human user is hardy attempted
Machine is physically also impossible, this is because there is manpower peak value to be in 7 to the natural trembling between 11Hz.Camera
This about 10Hz tremble will according to the angular field of view of time for exposure and each image pixel to picture quality generate
Increasing influence.The increase of the pixel density of cell phone cameras can be introduced due to camera-shake and be generated more and more
Image it is fuzzy.
Therefore, the motion sensor based on MEMS for digital camera is had been developed that, to solve due to manpower
Image quality decrease caused by trembling.For example, the gyroscope based on MEMS can be used for sensing the movement of camera.In response to sense
The movement measured, image stabilization system attempts mobile lens, and perhaps imaging sensor is final by transporting to minimize or eliminate
Image caused by dynamic is fuzzy.However, generated actuating is executed using traditional actuator.
Therefore, this field needs the image stabilization system based on MEMS.
Summary of the invention
According to the disclosure in a first aspect, providing a kind of camera comprising: multiple electrostatic actuators；And optics
Image stabilization (OIS) algoritic module, is operable to respond to the movement in camera, orders described in multiple actuator activations extremely
Few lens.
According to the second aspect of the disclosure, a kind of image stability method is provided, comprising: sense the movement of camera；Base
In the movement sensed, the desired lens actuation for being used to stablize camera lens is determined；The desired lens actuation is turned
It is changed to desired tangential actuating；And it according to the desired tangential actuating, is tangentially activated at least using multiple tangential actuators
One lens.
According to the third aspect of the disclosure, a kind of actuator devices, comprising: platform is elastically supported with planar
Movement；Three or more actuators, each actuator are all connected to described periphery, and can be used to activating
When the power that will act in the plane be tangentially applied to described；And external frame, surround and support described and
Actuator.
By considering the following detailed description to some exemplary embodiments, especially if being carried out in conjunction with attached drawing above-mentioned
Consider, the novel actuator devices of the disclosure can be better understood and uses the upper of the certain methods of the actuator devices
It states and some other feature and advantage, wherein in one or more attached drawing shown, similar reference label is for indicating
Similar element.
Detailed description of the invention
Fig. 1 is the plan view using the illustrative image stabilizing device tangentially activated；
Fig. 2A -2F is to show illustrative image stabilizing device using Fig. 1 to realize optical element in the plane flat
Move the polar plot with rotary motion；
Fig. 3 is the perspective view of the actuator in the device of Fig. 1；
Fig. 4 A is the partial plan layout of the cross one another finger-shaped material of the comb part in the actuator for Fig. 3, is shown
Go out and has been unfolded by actuator with the finger-shaped material before carrying out operation application；
Fig. 4 B is the partial plan layout of the cross one another finger-shaped material of the comb part in the actuator for Fig. 3, is shown
The finger-shaped material after actuator is unfolded is gone out；
Fig. 4 C is the comb part after comb part has been biased to operating position, in the actuator for Fig. 3
The partial plan layout of cross one another finger-shaped material；
Fig. 5 is the plan view of the actuator latch of Fig. 3, it illustrates the actuator latch engaged with actuator rod it is each
The kind stage；
Fig. 6 A-6C is plane rotation of the erecting bed between " stagnation " state and " work " state shown in the device of Fig. 1
The dynamic polar plot of transhipment；
Fig. 6 D is the plan view of the erecting bed to stay cool；
Fig. 6 E is in running order erecting bed plan view；
The close-up illustration of the arm of the erecting bed for Fig. 6 D that Fig. 6 F is locked out；
Fig. 6 G is the close-up illustration of the arm of the erecting bed for Fig. 6 E not locked；
Fig. 7 is the block diagram using the image stabilization system of tangential actuator；
Fig. 8 is the block diagram of the embodiment of the system of Fig. 7, wherein optical image stabilization is realized in driver IC
Algorithm；
Fig. 9 shows the more details of the driver IC of Fig. 8；
Figure 10 is the flow chart of the image stabilization processing executed by the system of Fig. 8 and 9；
Figure 11 is the block diagram of the embodiment of the system of Fig. 7, wherein realizes optical imagery in image processor integrated circuit
Stable algorithm；
Figure 12 shows the driver of Figure 11 and the more details of image processor integrated circuit；And
Figure 13 is the flow chart of the image stabilization processing executed by the system of Figure 11 and 12.
Specific embodiment
Effective image stabilization system is provided using the electrostatic lens actuation based on MEMS.In one embodiment,
It only can be placed in around the optical element of such as lens there are three actuator, by realizing that image is steady using tangential actuating
It is fixed.Turning now to attached drawing, image stabilizing device 100 includes the centre bore 105 limited by circular mounting platform 110, is used to accommodate
Such as optical element of lens or lens group (not shown).It is denoted as 3 actuatings of actuator 1, actuator 2 and actuator 3
Device is symmetrically disposed in around hole 105.Each actuator activates platform 110 in a manner of tangentially activating.In other words, often
The direction vector that the linear displacement 120 that a actuator introduces limits and the circle for surrounding hole center 118 are tangent.For example, linear displacement
120 is tangent with the circle of the restriction of erecting bed 110.
Referring to the tangential actuating for being better understood generation by the cartesian coordinate system that the center 118 in hole 105 limits.Platform
110 and actuator 1,2 and 3 be located in the plane limited by the direction x and y.Z-direction is vertically protruded from the center of plane 118.Such as
Used herein, it is positive that the tangential displacement as indicated by direction 115, which is considered as each actuator,.With regard to this respect
For, each actuator thus allows for positively and negatively being displaced.As shown in Figure 2 A, if each actuator 1,2 and 3 draws
Enter identical displacement, wherein what actuator 1 and 2 introduced is negative sense displacement tangentially, and what actuator 3 introduced is tangentially
Positive-displacement, then the forward direction of the tangential actuating of the platform 110 generated in the x-direction.Opposite, as shown in Figure 2 C, if actuator 1
It is all positive and actuator 3 is equal negative sense, then the negative sense of the tangential actuating of the platform 110 generated in the x-direction with 2.Optionally,
As shown in Figure 2 B, if actuator 3 does not introduce displacement, actuator 1 negatively activates given amount, and actuator 2 is positively
Identical amount is activated, then the forward direction of the final actuating of platform 110 in the y-direction.Opposite, if actuator 3 does not introduce displacement, and cause
The switching as shown in Figure 2 D of dynamic device 1 and 2 is positively and negatively displaced, then the negative sense of the final actuating of platform 110 in the y-direction.With this
Mode, tangential actuating can generate the x and y displacement of any desired size in the moving range of actuator for platform 110.
Tangential actuating can also introduce the rotation that platform 110 surrounds z-axis.For example, in Fig. 2 E, if each actuator 1,2 and 3
The negative sense displacement of same size is introduced, then the final actuating of platform 110 is to rotate clockwise (negative θ).Opposite, if in Fig. 2 E
Actuator it is all as shown in Figure 2 F reversed, tangential actuatings all so be all it is positive, then final activate of platform 110 is
It is rotated counterclockwise around z-axis (positive θ).In this way, platform 110 both can be translated desirably in x and y plane, can also be in θ
It is rotated in direction.
The tangential displacement that each of actuator 1 to 3 introduces can be indicated in local coordinate system.For example, can will activate
Tangential displacement of the device 3 in the direction x is appointed as in L3Displacement on direction has identical as the direction that the direction 115 of Fig. 1 indicates
Positive rule.Similar, the tangential displacement of actuator 1 and 2 can be respectively by local linear coordinate L1And L2It indicates.Depending on from
The radial distance R of effective tangential point of each actuator is arrived at center 118, and actuator 1 is in dimension L1In displacement, actuator
2 in L2In displacement and actuator 3 in L3In displacement can be directed to platform 110 in the translation of x and y-dimension and platform 110 with θ
The rotation at angle.In this respect, coordinate transform can be shown as follows:
L3=R sin θ+X
Coordinate transform above assumes that the neutral position of lens is located at origin, still, if neutral position deviation from origin,
It can correspondingly modify to it.The shake due to camera detected using these coordinate transforms or other expect not
To physical perturbation caused by translation or rotation of the platform 110 on x, y plane can be solved by corresponding tangential actuating.
Any suitable actuator (for example, pectination or gap enclosed actuator) is used equally for construction actuator 1,2 and 3.Inclined pectination
Actuator has good mobility, can such as application No. is 12/946,670 (hereinafter referred to as ' 670 for example, +/- 50 microns
Application), the applying date be on November 15th, 2010 commonly assigned U.S. Patent application discussed in as realize it is described partially
The content of the U.S. Patent application is merged into herein by comb actuator by reference.In this embodiment, each
Actuator has fixed part 121 and moveable part 122.In the image stabilizing device 100 of Fig. 1, fixed part 121 and outer
Frame 125 engages, and the comb support part 112 including multiple fixations radially extended to moveable part 122.Similar,
Moveable part 122 includes multiple comb support parts 113 radially extended to fixed part 121.Comb support part 112 and 113
It alternates to support multiple comb parts 114.For the sake of clarity, comb part 114 is not shown in Fig. 1, but is scheming
It is shown in the close-up illustration of 4A to 4C.
As that can see in further detail in Fig. 3, each actuator 1 to 3 is driven by corresponding bending part 106
Dynamic platform 110.Mobile from opposite actuator in order to allow, each bending part 106 can be relatively flexible in radial direction, and
Tangential direction (linear displacement 120 corresponding to Fig. 1) relative stiffness.For example, bending part 106 may include having and tangential direction
The V-type folded bent portions of the longitudinal axis of alignment.Such V-bend part allows radially bending, and for displacement 120
Relative stiffness.In this manner it is achieved that " virtual dynamic measures " arrangement for platform 110, it can be in stationary state essence
The true ground centre of location 118 can also realize desired x-y plane translation and during image stabilization with the rotation of the angle θ.
Linear expansion described in such as ' 670 applications can be used to realize using MEMS technology and realize actuator 1 to 3
Biasing unfolded state comb part 114 manufacture.As seen in the close-up illustration in Fig. 4 A, can mutually it hand over completely
Manufacture constitutes the cross one another finger-shaped material of each comb part 114 in the state of fork.In other words, the finger of comb part 114
Shape object is initially set to so that associated fixation and removable comb support part 112 and 113 separate in about comb part 114
The length of finger-shaped material.Therefore, applying voltage difference to the entire comb part 114 for being in undeployed configuration in Fig. 4 A will not generate
Platform 110 is relative to the linear motion in any plane of frame 125, so that any phase for the lens being connected thereto will not be generated
X, Y or θ movement answered.In order to there are actuating space, separation and exhibition that each comb part 114 should all be as shown in Figure 4 B
It opens.
As shown in Figure 4 B, in one embodiment, it may be accomplished by the expansion: by according to arrow 400
Comb support part 113 mobile (thus moveable part 122 of mobile Fig. 1) is arrived expanded position, the expanded position and phase by direction
The comb support part 112 of associated fixation is coplanar, is parallel to each other and is separated with selected distance, and then by moveable part
122 are fixed on expanded position, to carry out substantially coplanar, straight line movement relative to fixation member 121.As shown in Figure 4 C, when
When being so unfolded, the movable part of resilient support will be will lead to by applying to entire comb part 114 and removing suitable voltage difference
122 are divided to do substantially straight line as shown in double-head arrow 405 with the direction toward and away from fixed part 121 and coplanar shifting
It is dynamic, corresponding X, Y and/or θ Z movement is done so as to cause the element for being coupled to platform 110.
Have for moveable part 122 to be deployed into expanded position and is locked or is fixed on a variety of of expanded position
Different method and apparatus.For example, as shown in figure 3, a kind of method of deploying be related to it is coplanar, off-centered on frame 125
Latch 300 and fulcrum 304.Latch 300 is connected to frame 125 by latch bending part 306.Coplanar deployment rod 308 passes through
Expansion bending part 310 is connected to moveable part 122.Deployment rod 308 has the CAM table for being configured as engaging with latch 300
Face 312.In addition, bar 308 has the recess engaged with fulcrum 304, so that bar can make rotating motion relative to fulcrum 304.
In illustrative expansion, as shown in figure 3, acceleration pulse is applied to according to the direction of arrow 314 removable
Part 122, and it remain stationary frame 125.The pulse rotates deployment rod 308 towards latch 300 around fulcrum 304.Such as
As can be seen from Figure 5, deployment rod 308 surrounds the rotation of fulcrum 304 so that cam face 312 is engaged with latch 300.Most
Just, bar 308 is located at position 501 undeployed, but begins to rotate to middle position 502, so that 312 biased latch of cam face
300 and stretch out latch bending part 306.For the sake of clarity, it is shown that the most section view of expansion bending part 310
Figure.The continuous rotation of bar 308 makes latch bending part 306 that latch 300 is withdrawn into downwards deployment rod 308 and is fixed on locking
Position 503.Rotate bar 308 and the acceleration pulse of mobile moveable part 122 to generate, can by small probe or its
His MEMS device is inserted into pull ring 315 (Fig. 3) and correspondingly activates.In an alternate embodiment of the invention, it can be used and for example apply
Day is on November 15th, 2010, capillary described in the commonly assigned U.S. Patent application application No. is 12/946,657 is made
For moveable part 122 is unfolded, the content of the U.S. Patent application is merged into herein by reference.It is similar
, the optional structures and methods being unfolded and lock are described in ' 670 applications.
Expansion and locking can lead to as shown in Figure 4 B opposite of comb part 114 and fully open.In the position, pars pectinata
Part 114 only can effectively shrink rather than extend.In this respect, shrinking and extend all is to realize related actuating as described above
Required for the positively and negatively movement of device 1,2 and 3.Therefore, the default conditions during image stabilization can be related to realize as schemed
Medium voltage to a certain degree that is interlaced and being applied to entire comb part 114 shown in 4C.In this way, work as pectination
When voltage is lower than the default operating voltage of Fig. 4 C, comb part 114 will extend.Opposite, when pectination voltage is relative to default
When increasing for operating voltage, comb part 114 will be shunk.In this way it is possible to be applied by actuator 1,2 and 3 positive
It is activated with negative sense, as indicated by arrow 405.
To entire comb part 114 apply default voltage before, actuator can be at " starting to move ", " shutdown " or
" stagnation " state.In dead state, image stabilization does not work, but center 118 is unaffected.As F is discussed according to fig. 2
, the suitable displacement of each of actuator 1,2 and 3 generates rotating in the forward direction with θ angle, but will not generate in x-y
The translation of plane.To be enough to make that still inactive shape is unfolded shown in Fig. 4 b in this displacement of each comb part 114
State, which is transformed into shown in Fig. 4 C, defaults working condition.Fig. 6 A shows the rotation of actuator 1,2 and 3 to be transformed into work from dead state
Dynamic optical image stabilization state.As shown in Figure 6B, after comb part 114 is biased to their operating voltage,
Controllable increase optionally carried out to the operating voltage of each of actuator 1,2 and 3 or reduction will will lead to such as with
On the determination of platform 110 described in A-2F according to fig. 2 movement (thus center 118 also correspondingly moves).In order to save energy consumption, when
When without imaging, actuator 1,2 and 3 can turn again to their inactive state as shown in Figure 6 C.
With reference to Fig. 6 D to 6E, actuator 1,2 and 3 may be better understood from their dead state to motion optical image
Stable expansion.It can be advantageously employed the state of actuator device power cutoff, to protect equipment not by acting on platform
Impact force and plane concave change effect and the curved influence between equipment nonmobile phase.Therefore, in some embodiments, one
Or multiple lock arms 308 may be connected to the periphery of platform 110, wherein each of one or more of lock arms 308
All there is locking member 428 placed on it, and corresponding multiple complementary locking members 430 can for example be connected to external frame
Frame 125, and when stagnation or power cutoff state by rotating is arranged in platform 110, the complementation locking member 430 is set
One corresponding on lock arm 308 complementary locking member 428 is set to engage.Fig. 6 F is locked out component 430 and complementary lock
Determine the view that component 428 engages, and Fig. 6 G shows the state of these components expansion.In Fig. 6 G, dotted outline 432 is described
The week of in running order lock arm 308 and locking member 428 end during activated apparatus carries out image stabilization operation
The motion range on side, and show during the work, between arm 308, locking member 428 and complementary locking member 430 not
Interference can be generated.
Fig. 7 shows using tangential actuating the block diagram for controlling the control system 700 of image stabilization.In image stabilization side
Face, it is common for distinguishing the intended motion of camera and unintentionally shaking.For example, user may be intentional in 90 degree of movement
Mobile cameras is in range to shoot different objects.This intentional movement should not be detected, otherwise image stabilization system will
Lens can be made to be rotated by 90 ° to compensate this intentional movement, this is impossible complete and undesirable task.A kind of area
The method that other camera is unintentionally shaken is the tracking loop using the intended motion of prediction camera.In one embodiment,
Control system 700 includes tracking filter, for example, predicting the card of current lens position based on the camera motion previously measured
Thalmann filter 705.
Kalman filter 705 needs to carry out camera motion intentional fortune of some measurements to predict which is camera
It is dynamic, rather than be not intended to shake.Therefore, some ginsengs on the inertial sensor measurement camera of such as gyroscope 710 based on MEMS
The speed of examination point, the hole center 118 that reference point for example discusses before.The pitching and deflection that can such as will be carried out by gyroscope 710
It measures speed of the obtained center 118 on x, y plane and is respectively labeled as xgAnd yg.It can be obtained by analyzing camera images
Estimation supplements this inertia measurement.Therefore, camera images processor 720 can also be to center 118 in x, y
Speed in plane is estimated that speed of the center 118 on x, y plane is respectively labeled as xcAnd yc.Kalman filter from
Gyroscope 710 and camera processor 720 receive velocity estimation and are filtered to them, correspondingly to lens centre 118
Speed on x, y plane is predicted.Kalman filter can be respectively labeled as x to the prediction of reference position speed0With
y0.Velocity estimation is filtered to remove gyroscopic drift by high-pass filter 725, to the speed in integrator 730
Estimation integrated, and in amplifier 735 by the velocity estimation multiplied by suitable zoom factor to obtain location estimation
Value 740.In this respect, estimated value 740 indicates the lens centre that Kalman filter 705 is predicted there is no shake
118 desired location.Difference between estimated value 740 and actual lens position is considered to shake, and figure should be passed through
As stabilizing control system 700 compensates.It should be appreciated that the embodiment of control system 700 can be realized not include this prediction
Tracking loop.For example, the inertia measurement that gyroscope 710 carries out can be only high-pass filtering, to provide to expected photograph
The rough estimate of machine speed.Integral as described above can be carried out to this velocity estimation to obtain position estimation value 740.
In order to obtain actual lens position (or of equal value, the position of certain reference points (for example, center 118)), often
A actuator is all associated with position sensor.For example, actuator 1 can be with the L of discussion before sensing1The position sensing of displacement
Device 741 is associated.In this respect, position sensor 741 can sense the capacitor of entire comb part 114 to L1Displacement carries out
Estimation.Optionally, other kinds of sensor can be used, for example, Hall sensor.It is similar, actuator 2 and 3 and corresponding
Position sensor 742 and 743 it is associated.To which position sensor 742 senses L2Displacement, and sensor 743 senses L3Displacement.
Digitized processing then is carried out to the displacement that these are sensed in corresponding analog-digital converter 745 and is transmitted to coordinate converter
750.By the formula discussed before backstepping, θ=0 is enabled, L will can be tangentially activated1To L3Be converted to sensing the feedback of position xs、ys.Then make
The difference between the position of sensing and the position of Kalman filter prediction is determined with adder 755.It then can be in controller 760
The output of adder 755 is filtered in compensator 765, to obtain the x and y coordinates of final lens, wherein should be right
Lens are activated to compensate the shake of camera.
X and y coordinates are converted to tangential coordinates L according to equation as described above (enabling θ=0) by converter 7701、L2And L3。
The output of converter 770 is to indicate the desired actuating of actuator 1 to 3.Kalman filter prediction and finally desired
The generation of actuating is carried out with relatively low data rate, this is because needing to carry out a large amount of operation.But by actuator 1
Actual actuation to 3 driving to desired degrees of actuation can use relatively high data rate.Therefore, the line of demarcation in Fig. 7
771 indicate for the numeric area of control system 700 to be divided into relatively high and relatively low data rate.Similar, cut-off rule 772
It indicates control system 700 being divided into numeric area and simulated domain.
Corresponding adder can be used to determine between desired degrees of actuation and actuator 1,2 and 3 actual actuation
Difference.Corresponding controller 780 then correspondingly determines suitable control signal for its actuator.Digital-to-analogue then can be used
The digital controlled signal of generation is converted to analog control signal by converter (DAC) 790.As known in the art, static comb
Shape actuator usually requires that raising voltage level, for example, the raising voltage level obtained by charge pump.Accordingly, in response to
The analog control signal generated in DAC790 drives each of actuator 1 to 3 by corresponding driving circuit 790
It is dynamic.In this way, control system 700 is able to use the gyroscope 710 that camera motion is sensed in cartesian coordinate system, with
Advantageously image stabilization is obtained using only three tangential MEMS actuators.
The image using system 700 can be realized by multiple optional embodiments.In this respect, it can will be filtered from Kalman
The aggregated label of digital unit and signal path that wave device 705 arrives converter 770 and 750 is OIS algoritic module.It can be various
The OIS algoritic module is realized in integrated circuit structure.As shown in figure 8, one embodiment of camera 800 includes being located at MEMS to drive
OIS algoritic module 805 in dynamic device integrated circuit (IC) 810.Camera 800 includes as described above for image stabilization
MEMS tangential actuator and the actuator for being used to focus (AF) and scaling purpose automatically.These MEMS actuators are intensively shown
For MEMS module 815.Driver IC 810 is using the AF order 820 from AF driver 830 and comes from optical image stabilization
(OIS) the tangential actuation commands 825 of the plane of driver 835 drive MEMS module 815.MEMS module 815 includes position
Sensor, for example, such driver IC 810 can receive plane tangential actuator position in conjunction with the position sensor of Fig. 7 discussion
Set 840.
Such as I2Driver IC 810 is connected to other camera components by the bus of C bus 845.It will be appreciated, however, that
Other bus protocols can be used.In camera 800, gyroscope 710, imager 720, image processor 850 and micro process
Unit (MCU) 855 is all connected to I2C bus 845.Due to I2C agreement is MS master-slave agreement, so the module in driver IC 810
805 position provides lower delay, will be further described herein to it.Fig. 9 shows the final control of camera 800
Loop processed.Bus master can be the ISP or MCU indicated by main module 900.OIS algoritic module 805 is simplified version
This, this is because having ignored tracking filter, high-pass filter is filtered by the pitching and yaw rate exported to gyroscope 710
Wave estimates the intended motion of camera.Therefore the data flow in MS master-slave bus be usually since equipment to main equipment or oneself
Main equipment so the speed of rotation of gyroscope 710 is first delivered to main module 90, and is subsequently transported to the data flow from equipment
Driver IC 810.In this respect, main module 900 controls gyroscope 710 and driver IC 810.For the sake of clarity, only exist
The channel individually merged is shown in OIS algoritic module 805.Therefore, converter 920 represents the converter 770 and 750 in Fig. 7.
925 pairs of the neutral position practical and desired lens positions using converter 920 relative to lens are converted.
Figure 10 shows the data flow generated in bus 845.Image stabilization necessarily consumes some electric currents, it is therefore desirable that
Image stabilization processing is just only being carried out when user just shoots digital photograph.At that time, in initial step 1000, main module is utilized
900 are used as I2C bus master, OIS data flow start.At that time, as shown in step 1005, gyroscope 710 can start to compare
The movement of camera carries out inertia measurement, and OIS driver 835 can order MEMS actuator 815 be transformed into from dead state
Active state.In step 1010, main module 900 then reads the gyro data of 6 bytes, so that can be in step 1015
Write data into driver IC.In step 1020, OIS algoritic module 805 can be it is later determined that properly the actuating of size be to solve
Certainly the problem of camera-shake.If user as determined by step 1025 has been completed shooting digital photos,
Step 1030 terminates the process.Otherwise, step 1010 to 1025 is repeated.The call duration time of one circulation (step 1010 to 1020)
Depending on bus clock cycle and data width.If bus 845 can accommodate 3 bytes in the clock cycle of each 10 μ s,
Then circulation time is algorithm operation time needed for 10 μ s*2*6*8+ steps 1020, when being equivalent to 0.96ms+ algorithm operation
Between.
Figure 11 shows optional control structure, wherein OIS algoritic module 805 is located in ISP 850.It is similar with Fig. 9,
Automatic focus module 940 in ISP 850 controls the AF driver 830 in driver IC 810.Driver IC 810, gyroscope
710, imager 720, ISP 850 and MCU 855 use I2C bus 845 is communicated.Figure 12 shows the control ring of generation
Road.OIS algoritic module 805 is also simplified version, this is because having omited tracking filter, high-pass filter 910 is by top
The pitching and yaw rate that spiral shell instrument 710 exports are filtered the intended motion to estimate camera.ISP 850 controls gyroscope 710
With driver IC 810.For the sake of clarity, the channel of OIS algoritic module 805 individually merged is illustrated only.
Figure 13 shows the data flow generated in bus 845 according to the embodiment of Figure 11 and 12.In response to live image
The calling of screening-mode, in initial step 1300, using ISP850 as I2C bus master, OIS data flow start.It is optional
Ground, MCU 855 can be used as main equipment.As shown in the step 1305 for carrying out with step 1300 or then carrying out simultaneously, top
Spiral shell instrument 710 can start the movement to camera and carry out inertia measurement, and OIS driver 835 can order MEMS actuator
815 are transformed into active state from dead state.In step 1310, main module 900 then reads the gyro data of 6 bytes.
In addition, ISP 855 reads the current lens position of 6 bytes from converter 920 in step 1315.In step 1320, OIS
Algoritic module 805 can be it is later determined that properly the actuating of size be to solve the problems, such as camera-shake.Then, in step 1325,
The drive command of 6 bytes can be written to corresponding driver IC by ISP 855.If as determined by step 1330
User has been completed shooting digital photos, then terminates the process in step 1335.Otherwise, step 1310 to 1325 is repeated.One
The call duration time of a circulation (step 1310 to 1325) depends on bus clock cycle and data width.If bus 845 can
3 bytes are accommodated in the clock cycle of each 10 μ s, then circulation time is algorithm operation needed for 10 μ s*3*6*8+ steps 1320
Time is equivalent to 1.44ms+ algorithm operation time.Therefore, in principal and subordinate's bus protocol system, calculate OIS as previously described
Method module 805 is located in IC driver 810 faster.On the contrary, OIS algoritic module 805 is placed in ISP 850 then need it is additional
Data moving step.
As would be appreciated by the skilled artisan and according to specific application, without departing substantially from the disclosure spirit and
In the case where range, can application method to the actuator devices of the disclosure, material, equipment, configuration make numerous modifications, replace
Change and change, be based on this, the scope of the present disclosure should not be limited by specific embodiments described and illustrated herein, this be because
It is only some examples enumerated for them, the scope of the present invention should be with claims included below and its function equivalents
It is completely the same.
Claims (28)
1. a kind of camera, comprising:
At least one optical element；
Multiple electrostatic actuators are configured as moving the optical element to carry out image stabilization；And
Frame, the frame support the optical element and the multiple electrostatic actuator；And wherein
Each electrostatic actuator in the electrostatic actuator includes fixed part and moveable part, the moveable part quilt
It is configured to be moved to expanded position, lock and from the expanded position in the expanded position relative to the fixation
Part is substantially coplanar, the mode of linear motion is mobile so that tangential force be applied on the optical element it is described to cause
Optical element is mobile.
2. camera according to claim 1, further comprises:
At least one motion sensor is configured as detecting the movement of the camera；And wherein the multiple electrostatic actuator
It is configured as being at least partially based on the movement of the detected camera and the mobile optical element.
3. camera according to claim 2, in which:
At least one described motion sensor includes gyroscope, and the gyroscope is configured as measuring the pitching and partially of the camera
Boat；And wherein
The multiple electrostatic actuator be configured as being at least partially based on the camera the pitching and yaw and it is mobile described in
Optical element.
4. camera according to claim 2, further comprises:
Camera image processor is configured as analysis camera image and generates estimation based on the camera image；And
And
The multiple electrostatic actuator is configured as being at least partially based on the estimation and the mobile optical element.
5. camera according to claim 2 further comprises multiple positions biography corresponding to the multiple electrostatic actuator
Sensor, each position sensor in the position sensor are configured as measuring the tangential displacement of corresponding electrostatic actuator.
6. camera according to claim 2 further comprises optical image stabilization (OIS) circuit, is configured to respond to
In the detected camera movement and selectively activate the multiple electrostatic actuator.
7. camera according to claim 1 further comprises latch, it is configured as the moveable part being maintained at
In the expanded position.
8. camera according to claim 7 is answered wherein the moveable part is configured to respond to acceleration pulse
It uses the moveable part and engages the latch.
9. camera according to claim 1, wherein the multiple electrostatic actuator is configured as by moving institute in phase
The moveable part of each electrostatic actuator in multiple electrostatic actuators is stated selectively to rotate the optical element.
10. camera according to claim 1, in which:
Each electrostatic actuator in the electrostatic actuator includes electrostatic comb actuator, and the electrostatic comb actuator has
Multiple comb support parts with cross one another finger-shaped material, some comb support parts in the comb support part are arranged on
On the fixed part, and other comb support parts are arranged on the moveable part；
The comb support part on the moveable part is configured as relative to the comb on the fixed part
Shape supporting element is mobile；And
When the moveable part is in the expanded position, the cross one another relatively complete opening of finger-shaped material.
11. camera according to claim 1, further comprises:
Platform is configured as receiving the optical element；
At least three electrostatic actuators in the electrostatic actuator are uniformly spaced apart around described.
12. camera according to claim 11, further comprises:
Each electrostatic actuator in the electrostatic actuator is coupled to described by bool；And
The bool is relative to the optical element in radial directions than in the linear direction tangent with the optical element
On it is more flexible.
13. camera according to claim 12, wherein the bool be centered around with the optical element it is tangent described in
The longitudinal axis being aligned on linear direction is folded.
14. camera according to claim 1, wherein the camera is integrated into cellular phone.
15. a kind of actuator system, comprising:
Multiple electrostatic actuators are configured as moving at least one optical element to carry out image stabilization, the electrostatic actuator
In each electrostatic actuator be configured to respond to the movement of the electrostatic actuator and tangentially activate it is described at least one
Optical element；And
Frame, the frame support the multiple electrostatic actuator around the installation site of the optical element；And wherein
Each electrostatic actuator in the electrostatic actuator includes fixed part and moveable part, the moveable part quilt
It is configured to be moved to expanded position, be fixed in the expanded position and from the expanded position relative to described solid
It is mobile to determine the mode that part is substantially coplanar, moves along a straight line, to cause at least one described optical element mobile.
16. actuator system according to claim 15 further comprises latch, it is configured as the movable part
Divide and is locked in the expanded position.
17. actuator system according to claim 16, further comprises:
Coplanar deployment rod is configured around the fulcrum at the frame and pivots；And wherein when the moveable part moves
When moving the expanded position, the coplanar deployment rod is pivoted to engage the latch.
18. actuator system according to claim 17 is configured wherein the coplanar deployment rod includes cam face
To engage the latch when the moveable part is in the expanded position.
19. actuator system according to claim 18, wherein the latch is coplanar and off-centered latch, quilt
It is configured to receive the cam face of the coplanar deployment rod.
20. actuator system according to claim 19, wherein described coplanar and off-centered latch includes that latch is curved
Bent part is configured as biasing in described coplanar and deviation towards the latched position being locked in the coplanar deployment rod in position
The latch of the heart.
21. actuator system according to claim 15, wherein each electrostatic actuator in the electrostatic actuator can
Operation causes the optical element mobile for the movement based on the electronic equipment including the actuator system detected.
22. actuator system according to claim 15 further comprises corresponding to the more of the multiple electrostatic actuator
A position sensor, each position sensor in the position sensor are configured as measuring cutting for corresponding electrostatic actuator
To displacement.
23. actuator system according to claim 22, in which:
Each electrostatic actuator in the electrostatic actuator includes multiple comb support parts, and the multiple comb support part has
It is configured as selectively being moved to together and separated cross one another finger-shaped material；And
Each position sensor in the position sensor is configured as across an electrostatic associated in the electrostatic actuator
At least one comb support part of actuator and measure capacitor.
24. a kind of system for image stabilization, comprising:
Optical element；
Platform, described keeps the optical element in curved hole；And
At least three tangential actuators are symmetrically arranged in outer framework around described, and each tangential actuator can operate
To shift up described in the side with the contact of a curve limited by the curved hole；And wherein
Each tangential actuator includes moveable part, and the moveable part is configured as relative to the outer framework from stop
Position is moved to expanded position, is fixed on the expanded position and selectively moved from the expanded position, so that cutting
It is applied on the platform to power, the tangential actuator described in the stop position is inoperable.
25. system according to claim 24 further comprises latch, it is configured as locking the moveable part
In the expanded position.
26. system according to claim 24 further comprises by each tangential actuator in the tangential actuator
It is coupled to described at least one bool.
27. system according to claim 26, wherein each bool be V-arrangement and have with the contact of a curve
Direction on the longitudinal axis that is aligned.
28. system according to claim 24, further comprises:
At least one motion sensor is configured as detecting the movement of the system；And wherein in the tangential actuator
Each tangential actuator is operable to the detected movement of the system and moves described.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/247,906 | 2011-09-28 | ||
| US13/247,906 US8855476B2 (en) | 2011-09-28 | 2011-09-28 | MEMS-based optical image stabilization |
| US13/247,895 | 2011-09-28 | ||
| US13/247,895 US9019390B2 (en) | 2011-09-28 | 2011-09-28 | Optical image stabilization using tangentially actuated MEMS devices |
| PCT/US2012/058082 WO2013049688A2 (en) | 2011-09-28 | 2012-09-28 | Mems-based optical image stabilization |
| CN201280047680.1A CN103842875B (en) | 2011-09-28 | 2012-09-28 | Optical image stabilization based on MEMS |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280047680.1A Division CN103842875B (en) | 2011-09-28 | 2012-09-28 | Optical image stabilization based on MEMS |
Publications (2)
| Publication Number | Publication Date |
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| CN106569310A CN106569310A (en) | 2017-04-19 |
| CN106569310B true CN106569310B (en) | 2019-11-22 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610905935.3A Active CN106569310B (en) | 2011-09-28 | 2012-09-28 | Optical image stabilization based on MEMS |
| CN201280047680.1A Active CN103842875B (en) | 2011-09-28 | 2012-09-28 | Optical image stabilization based on MEMS |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280047680.1A Active CN103842875B (en) | 2011-09-28 | 2012-09-28 | Optical image stabilization based on MEMS |
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| CN (2) | CN106569310B (en) |
| TW (1) | TWI584001B (en) |
| WO (1) | WO2013049688A2 (en) |
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| DE102015209030B4 (en) * | 2015-05-18 | 2023-06-07 | Robert Bosch Gmbh | Micromechanical device and method of making a micromechanical device |
| US10382698B2 (en) | 2015-09-30 | 2019-08-13 | Apple Inc. | Mobile zoom using multiple optical image stabilization cameras |
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| CN112399043B (en) * | 2019-08-16 | 2022-04-12 | 华为技术有限公司 | Optical image stabilizer, optical image stabilizer system and control method |
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2013049688A3 (en) | 2013-06-27 |
| WO2013049688A2 (en) | 2013-04-04 |
| CN103842875B (en) | 2016-11-09 |
| TWI584001B (en) | 2017-05-21 |
| CN103842875A (en) | 2014-06-04 |
| CN106569310A (en) | 2017-04-19 |
| TW201319628A (en) | 2013-05-16 |
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