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CN106568720A - Metal test piece surface laser reflectivity measuring device and method - Google Patents

Metal test piece surface laser reflectivity measuring device and method Download PDF

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CN106568720A
CN106568720A CN201611004766.2A CN201611004766A CN106568720A CN 106568720 A CN106568720 A CN 106568720A CN 201611004766 A CN201611004766 A CN 201611004766A CN 106568720 A CN106568720 A CN 106568720A
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integrating sphere
metal
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CN106568720B (en
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吴涛涛
陈绍武
周孟莲
韦成华
朱永祥
王家伟
吴丽雄
王立君
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Northwest Institute of Nuclear Technology
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Abstract

本发明属于激光效应测试技术领域,涉及一种金属试件表面反射率测量装置及方法。本发明提供的装置包括测量积分球和背景积分球,测量积分球和背景积分球的连接处设置有贯通的试件安装孔;测量积分球上安装有测量光电探测器,背景积分球上安装有背景光电探测器;测量积分球上还设置有激光入孔,激光入孔位于与试件安装孔相对的另一侧球壁上。本发明通过设置串形的积分球组,采用测量积分球和背景积分球分别获取测量信号和背景热辐射信号,经过数据处理得到真实的反射率系数,克服了金属试件表面在高温下热辐射信号对反射率测量的影响。

The invention belongs to the technical field of laser effect testing, and relates to a device and a method for measuring the surface reflectance of a metal test piece. The device provided by the invention comprises a measuring integrating sphere and a background integrating sphere, and a through test piece installation hole is arranged at the joint of the measuring integrating sphere and the background integrating sphere; a measuring photodetector is installed on the measuring integrating sphere, and a The background photodetector; the measuring integrating sphere is also provided with a laser entrance hole, and the laser entrance hole is located on the other side of the ball wall opposite to the installation hole of the test piece. The present invention sets up a series of integrating sphere groups, uses measuring integrating spheres and background integrating spheres to obtain measurement signals and background thermal radiation signals respectively, obtains real reflectivity coefficients through data processing, and overcomes thermal radiation on the surface of metal specimens at high temperatures The effect of the signal on the reflectance measurement.

Description

一种金属试件表面激光反射率测量装置及方法Device and method for measuring laser reflectivity on the surface of a metal test piece

技术领域technical field

本发明属于激光效应测试技术领域,涉及一种金属试件表面反射率测量装置及方法。The invention belongs to the technical field of laser effect testing, and relates to a device and a method for measuring the surface reflectance of a metal test piece.

背景技术Background technique

研究激光与金属材料耦合规律时,通常需要测量得到效应试件的表面反射率系数随激光功率和出光时长的关系。较为常用的方法是如图1所示的积分球测量方案:第一步将标准测试板放置在积分球4内部,测量得到激光1加载在标准测试板上的光电探测器5的响应信号,第二步将效应试件3放置在积分球4内部,测量得到激光1加载在效应试件3的光电探测器5的响应信号,二者相比即为效应试件3的表面反射率系数。在实际应用中由于效应试件在激光加载过程中温度升高,对外热辐射加强,而这部分热辐射信号会混叠在有效信号中被积分球上的光电探测器测量,影响到测量结果的准确性,尤其是当试件被激光加载至高温时,反射率测量的误差变得非常大。When studying the coupling law between laser and metal materials, it is usually necessary to measure the relationship between the surface reflectance coefficient of the effect test piece and the laser power and the light emitting time. The more commonly used method is the integrating sphere measurement scheme shown in Figure 1: the first step is to place the standard test board inside the integrating sphere 4, and measure the response signal of the photodetector 5 loaded on the standard test board by the laser 1. In the second step, the effect test piece 3 is placed inside the integrating sphere 4, and the response signal of the photodetector 5 loaded by the laser 1 on the effect test piece 3 is measured, and the comparison between the two is the surface reflectance coefficient of the effect test piece 3. In practical application, due to the effect, the temperature of the specimen rises during the laser loading process, and the external thermal radiation is strengthened, and this part of the thermal radiation signal will be mixed in the effective signal and measured by the photodetector on the integrating sphere, which will affect the accuracy of the measurement results. Accuracy, especially when the specimen is laser loaded to high temperature, the error of the reflectance measurement becomes very large.

文献“反射率测量中的热辐射影响及其消除方法,强激光与粒子束,2011,Vol.23(7),p1767-1770”公开了一种双探测器的积分球测量方法来消除金属材料热辐射对反射率测量干扰的方法,采用1064nm激光器发射的激光束辐照在金属材料表面,金属材料表面的反射光和热辐射被积分球收集并匀化,第一光电探测器和第二光电探测器用于测量匀化后的光强,其中第一光电探测器前装有1064nm窄带滤光片,第二光电探测器前装有1319nm窄带滤光片。测量金属材料的反射率时,采集激光加载过程金属材料升温时间段及激光加载过后降温时间段中第一光电探测器和第二光电探测器的信号,利用激光加载后金属材料降温时间段第一光电探测器和第二光电探测器的数据进行标定,得到标定关系曲线。再利用激光加载段中第二光电探测器的测量数据求出第一光电探测器中热辐射的分量,继而求出激光加载段第一光电探测器中反射率分量。文献所述方法忽略了金属材料升温和降温过程中表面氧化造成的发射率变化,降温段的热辐射定标曲线理论上不能严格描述升温段的热辐射信号,带来了较大的测量不确定度。The document "Influence of Thermal Radiation in Reflectance Measurement and Its Elimination Method, Intense Laser and Particle Beam, 2011, Vol.23(7), p1767-1770" discloses a dual-detector integrating sphere measurement method to eliminate metallic materials The method for thermal radiation to interfere with the reflectivity measurement, the laser beam emitted by the 1064nm laser is used to irradiate the surface of the metal material, the reflected light and thermal radiation on the surface of the metal material are collected and homogenized by the integrating sphere, the first photodetector and the second photoelectric The detectors are used to measure the light intensity after homogenization, wherein a 1064nm narrow-band filter is installed in front of the first photodetector, and a 1319nm narrow-band filter is installed in front of the second photodetector. When measuring the reflectivity of metal materials, collect the signals of the first photodetector and the second photodetector during the heating period of the metal material during laser loading and the cooling period after laser loading, and use the first photodetector during the cooling period of the metal material after laser loading. The data of the photodetector and the second photodetector are calibrated to obtain a calibration relationship curve. The measurement data of the second photodetector in the laser loading section is then used to obtain the thermal radiation component in the first photodetector, and then the reflectance component in the first photodetector in the laser loading section is obtained. The method described in the literature ignores the change in emissivity caused by surface oxidation of metal materials during the heating and cooling process, and the thermal radiation calibration curve in the cooling section cannot strictly describe the thermal radiation signal in the heating section in theory, which brings large measurement uncertainties Spend.

发明内容Contents of the invention

为了解决现有的效应试件表面反射率测量方法测量结果不准确的技术问题,本发明提供一种克服了热辐射信号干扰的金属试件表面激光反射率测量装置及方法。In order to solve the technical problem of inaccurate measurement results of existing effect test piece surface reflectance measurement methods, the present invention provides a metal test piece surface laser reflectance measurement device and method that overcomes thermal radiation signal interference.

本发明的技术解决方案是:一种金属试件表面激光反射率测量装置,其特殊之处在于:包括测量积分球和背景积分球,所述测量积分球和背景积分球的连接处设置有贯通的试件安装孔;所述测量积分球上安装有测量光电探测器,所述背景积分球上安装有背景光电探测器;所述测量积分球上还设置有激光入孔,所述激光入孔位于与试件安装孔相对的另一侧球壁上。The technical solution of the present invention is: a metal test piece surface laser reflectance measuring device, which is special in that it includes a measuring integrating sphere and a background integrating sphere, and the connection between the measuring integrating sphere and the background integrating sphere is provided with a through-hole The mounting hole of the test piece; the measuring integrating sphere is equipped with a measuring photodetector, and the background integrating sphere is equipped with a background photodetector; the measuring integrating sphere is also provided with a laser inlet, and the laser inlet It is located on the other side of the ball wall opposite to the mounting hole of the test piece.

上述测量积分球和背景积分球为一体式结构,所述试件安装孔处的球壁上设置有试件安装槽。The above-mentioned measuring integrating sphere and the background integrating sphere have an integrated structure, and a test piece mounting groove is arranged on the wall of the ball at the test piece mounting hole.

上述测量积分球和背景积分球的结构尺寸及内表面处理工艺均相同。The above-mentioned measurement integrating sphere and the background integrating sphere have the same structure size and inner surface treatment process.

本发明还提供一种金属试件表面激光反射率测量方法,其特殊之处在于:包括以下步骤:The present invention also provides a method for measuring laser reflectivity on the surface of a metal test piece, which is special in that it includes the following steps:

1】将激光器对准激光入孔,设定激光功率P和出光时长T;1) Aim the laser at the laser entrance hole, set the laser power P and the light output time T;

2】将标准测试板放置于试件安装孔上,加载激光;2) Place the standard test board on the mounting hole of the test piece and load the laser;

3】记录测量光电探测器随时间的变化信号V0s(t)和背景光电探测器随时间的变化信号V0b(t);然后,关闭激光,取下标准测试板;3) Record and measure the time-varying signal V 0s (t) of the photodetector and the time-varying signal V 0b (t) of the background photodetector; then, turn off the laser and remove the standard test board;

4】将待测金属试件放置于试件安装孔上,加载激光;4) Place the metal specimen to be tested on the mounting hole of the specimen and load the laser;

5】记录测量光电探测器随时间的变化信号V1s(t)和背景光电探测器随时间的变化信号V1b(t);然后,关闭激光,取下待测金属试件;5) Record and measure the time-varying signal V 1s (t) of the photodetector and the time-varying signal V 1b (t) of the background photodetector; then, turn off the laser and remove the metal specimen to be tested;

6】根据公式k=(V1s(t)-V1b(t))/(V0s(t)-V0b(t))计算得到激光功率为P条件下的金属试件表面反射率系数k;6] According to the formula k=(V 1s (t)-V 1b (t))/(V 0s (t)-V 0b (t)) to calculate the surface reflectance coefficient k of the metal specimen under the condition that the laser power is P ;

7】改变激光加载功率P和出光时长T,重复执行步骤1-6】得到不同输入条件下的金属试件表面反射率系数k;7) Change the laser loading power P and the light output time T, and repeat steps 1-6] to obtain the surface reflectance coefficient k of the metal specimen under different input conditions;

8】将金属试件表面反射率系数k与标准测试板的反射率相乘得到待测金属试件的表面激光反射率。8] Multiply the surface reflectance coefficient k of the metal test piece by the reflectance of the standard test plate to obtain the surface laser reflectance of the metal test piece to be tested.

上述标准测试板为反射率已知的惰性金属板或无机材料板。The above-mentioned standard test plate is an inert metal plate or an inorganic material plate with known reflectance.

较佳的,激光器的激光入射方向与标准测试板或待测金属试件的法线方向的夹角为α,其中0°﹤α≦8°。Preferably, the included angle between the laser incident direction of the laser and the normal direction of the standard test plate or the metal specimen to be tested is α, where 0°<α≦8°.

上述待测金属试件为厚度小于5mm的薄片结构。The above-mentioned metal test piece to be tested is a sheet structure with a thickness less than 5mm.

上述待测金属试件的两个表面采用相同的处理工艺制成。The two surfaces of the metal test piece to be tested are made by the same treatment process.

本发明的有益效果在于:The beneficial effects of the present invention are:

(1)本发明将金属试件制备成薄片状,前后表面具有相同的初始状态,在相同的温度历程下具有相同的氧化状态,使金属试件在激光辐照过程中前后表面具有相同的温升过程,因而具有相同的热辐射信号,通过设置串形的积分球组,采用测量积分球和背景积分球分别获取测量信号和背景热辐射信号,经过数据处理得到真实的反射率系数,克服了金属试件表面在高温下热辐射信号对反射率测量的影响。(1) The present invention prepares the metal test piece into a sheet shape, the front and rear surfaces have the same initial state, and have the same oxidation state under the same temperature history, so that the front and rear surfaces of the metal test piece have the same temperature during the laser irradiation process. Ascension process, so it has the same thermal radiation signal, by setting a series of integrating spheres, using the measuring integrating sphere and the background integrating sphere to obtain the measurement signal and the background thermal radiation signal respectively, and the real reflectance coefficient is obtained through data processing, which overcomes the Effect of thermal radiation signal on reflectivity measurement of metal specimen surface at high temperature.

(2)本测量装置和方法适用于不同的激光靶面光斑形状和光强分布,在测量中不使用滤光片,具有操作简单,适用范围广、布放试件方便的特点,尤其适用于大批量试件的测量标定。(2) The measurement device and method are suitable for different laser target spot shapes and light intensity distributions. No filter is used in the measurement. It has the characteristics of simple operation, wide application range, and convenient placement of test pieces. It is especially suitable for Measurement and calibration of large batches of test pieces.

附图说明Description of drawings

图1为传统的金属试件表面激光反射率测量装置图;Fig. 1 is a traditional metal test piece surface laser reflectance measuring device diagram;

图2为本发明较佳实施例的金属试件表面激光反射率测量装置图。Fig. 2 is a diagram of a device for measuring laser reflectance on the surface of a metal test piece according to a preferred embodiment of the present invention.

其中,附图标记如下:1-激光器,2-激光束,3-金属试件,4-积分球,41-测量积分球,42-背景积分球,5-光电探测器,51-测量光电探测器,52-背景光电探测器,6-试件安装孔,7-激光入孔。Wherein, reference signs are as follows: 1-laser, 2-laser beam, 3-metal specimen, 4-integrating sphere, 41-measurement integrating sphere, 42-background integrating sphere, 5-photoelectric detector, 51-measurement photoelectric detection device, 52-background photodetector, 6-test piece installation hole, 7-laser access hole.

具体实施方式detailed description

本发明提供了一种金属试件表面激光反射率测量装置和方法,通过设置测量积分球和背景积分球分别获取测量信号和背景热辐射信号,数据处理得到真实的反射率系数,克服了金属试件表面在高温下热辐射信号对测量结果的影响。本发明测量装置的较佳实施例结构如图2所示,包括紧邻设置的测量积分球41和背景积分球42,二者连接处设置有贯通的试件安装孔6;试件安装孔6用于放置待测量的金属试件或标准测试板。测量积分球41上安装有测量光电探测器51,背景积分球42上安装有背景光电探测器52;测量积分球41上还设置有激光入孔7,激光入孔7位于与试件安装孔6相对的另一侧球壁上。激光器1发出的激光束2经过激光入孔7入射至金属试件3的表面。The invention provides a device and method for measuring laser reflectivity on the surface of a metal test piece. The measurement signal and the background thermal radiation signal are respectively obtained by setting the measuring integrating sphere and the background integrating sphere, and the real reflectivity coefficient is obtained by data processing, which overcomes the problem of metal test pieces. The influence of the thermal radiation signal on the measurement results of the surface of the workpiece at high temperature. The structure of the preferred embodiment of the measuring device of the present invention is as shown in Figure 2, comprising a measurement integrating sphere 41 and a background integrating sphere 42 arranged next to each other, and a through test piece mounting hole 6 is provided at the connection between the two; Place the metal test piece or standard test plate to be measured. A measuring photoelectric detector 51 is installed on the measuring integrating sphere 41, and a background photodetector 52 is installed on the background integrating sphere 42; a laser inlet 7 is also arranged on the measuring integrating sphere 41, and the laser inlet 7 is located in the same position as the test piece mounting hole 6. On the opposite wall of the ball. The laser beam 2 emitted by the laser 1 is incident on the surface of the metal test piece 3 through the laser entrance hole 7 .

测量积分球和背景积分球可以是单独加工后拼接而成的分体式结构,二者拼合处是一个共用的贯通两个积分球内部的试件安装孔。当实际测试过程中,先将测量积分球和背景积分球拆开,安装(或者取出)待测金属试件或标准测试板后,再将两个积分球拼合。The measuring integrating sphere and the background integrating sphere can be a split structure that is spliced after being processed separately. The joint of the two is a common test piece mounting hole that penetrates the inside of the two integrating spheres. During the actual test process, first disassemble the measuring integrating sphere and the background integrating sphere, install (or take out) the metal test piece or standard test plate to be tested, and then put the two integrating spheres together.

较为优选的,测量积分球和背景积分球也可以加工为一体式结构,试件安装孔处的球壁上设置一个试件安装槽。在需要测试时,将待测金属试件或标准测试板插入试件安装槽,完全遮挡住试件安装孔。测试完成后,便将金属试件或标准测试板直接拔出即可。More preferably, the measuring integrating sphere and the background integrating sphere can also be processed into an integrated structure, and a test piece mounting groove is arranged on the ball wall at the test piece mounting hole. When testing is required, insert the metal specimen to be tested or the standard test board into the specimen installation slot, completely covering the specimen installation hole. After the test is completed, just pull out the metal test piece or standard test board directly.

为了消除金属试件3在高温下热辐射信号对测量结果的影响,金属试件3为薄片状,厚度不超过5mm,金属试件3的两个表面采用相同的处理工艺制成,确保两个表面对外热辐射的信号保持一致,同时测量积分球41和背景积分球42的结构尺寸和内表面处理工艺均相同,确保获得的信号幅值基本相同,这样测量积分球41获得的信号是有效的反射信号和金属试件3的前表面热辐射信号,而背景积分球获得的信号是金属试件3后表面热辐射信号,由于金属件很薄且表面处理工艺相同,同时测量积分球41和背景积分球42的响应信号幅值基本相同,故可用二者相减获得有效的反射测量信号。In order to eliminate the influence of the thermal radiation signal of the metal test piece 3 on the measurement results at high temperatures, the metal test piece 3 is in the shape of a thin sheet with a thickness of no more than 5 mm. The two surfaces of the metal test piece 3 are made with the same treatment process to ensure that the two The signal of the external heat radiation on the surface is consistent, and the structural size and inner surface treatment process of the measuring integrating sphere 41 and the background integrating sphere 42 are all the same to ensure that the obtained signal amplitudes are basically the same, so that the signal obtained by measuring the integrating sphere 41 is effective The reflection signal and the front surface heat radiation signal of the metal test piece 3, while the signal obtained by the background integrating sphere is the heat radiation signal on the back surface of the metal test piece 3, since the metal piece is very thin and has the same surface treatment process, the integrating sphere 41 and the background heat radiation signal are measured at the same time The amplitudes of the response signals of the integrating sphere 42 are basically the same, so the two can be subtracted to obtain an effective reflection measurement signal.

本发明所提供的基于金属试件表面激光反射率测量装置的具体测试方法如下:The specific test method based on the laser reflectivity measuring device on the surface of the metal test piece provided by the present invention is as follows:

1】将激光器1对准激光入孔7,设定激光功率P和出光时长T。1] Align the laser 1 with the laser entrance hole 7, set the laser power P and the light output time T.

2】将标准测试板放置于试件安装孔6上,加载激光。标准测试板的反射率值已知且具有较强的抗激光辐照稳定性,一般为惰性金属板或无机材料板。2] Place the standard test board on the mounting hole 6 of the test piece, and load the laser. The reflectance value of the standard test plate is known and has a strong resistance to laser radiation stability, generally an inert metal plate or an inorganic material plate.

3】记录测量光电探测器随时间的变化信号V0s(t)和背景光电探测器随时间的变化信号V0b(t);然后,关闭激光,取下标准测试板。3] Record and measure the time-varying signal V 0s (t) of the photodetector and the time-varying signal V 0b (t) of the background photodetector; then, turn off the laser and remove the standard test board.

4】将待测金属试件放置于试件安装孔上,加载激光;激光器的激光入射方向与标准测试板或待测金属试件的法线方向的夹角为α,其中0°﹤α≦8°,尽量减少光线损失。4) Place the metal specimen to be tested on the mounting hole of the specimen, and load the laser; the angle between the laser incident direction of the laser and the normal direction of the standard test plate or the metal specimen to be tested is α, where 0°﹤α≦ 8° to minimize light loss.

5】记录测量光电探测器随时间的变化信号V1s(t)和背景光电探测器随时间的变化信号V1b(t);然后,关闭激光,取下待测金属试件。5) Record and measure the time-varying signal V 1s (t) of the photodetector and the time-varying signal V 1b (t) of the background photodetector; then, turn off the laser and remove the metal specimen to be tested.

6】根据公式k=(V1s(t)-V1b(t))/(V0s(t)-V0b(t))计算得到激光功率为P条件下的金属试件表面反射率系数k。6] According to the formula k=(V 1s (t)-V 1b (t))/(V 0s (t)-V 0b (t)) to calculate the surface reflectance coefficient k of the metal specimen under the condition that the laser power is P .

7】改变激光加载功率P和出光时长T,重复执行步骤1-6】得到不同输入条件下的金属试件表面反射率系数k。7] Change the laser loading power P and the light output time T, and repeat steps 1-6] to obtain the surface reflectance coefficient k of the metal specimen under different input conditions.

8】将金属试件表面反射率系数k与标准测试板的反射率相乘得到待测金属试件的表面激光反射率。8] Multiply the surface reflectance coefficient k of the metal test piece by the reflectance of the standard test plate to obtain the surface laser reflectance of the metal test piece to be tested.

本发明有效克服了激光加载中热辐射对反射率测量结果的影响,具有操作简单,适用范围广、布放试件方便的特点,尤其适用于大批量试件的测量标定。The invention effectively overcomes the influence of thermal radiation on the reflectivity measurement results in laser loading, has the characteristics of simple operation, wide application range, and convenient arrangement of test pieces, and is especially suitable for measurement and calibration of large batches of test pieces.

Claims (8)

1. a kind of metal specimen surface laser measuring apparatus for reflection index, it is characterised in that:Including measurement integrating sphere and Background Integral The junction of ball, the measurement integrating sphere and background integrating sphere is provided with the test specimen installing hole of insertion;On the measurement integrating sphere Measurement photodetector is installed, background photodetector is installed in the background integrating sphere;On the measurement integrating sphere also It is provided with laser and enters hole, the laser enters hole position on the opposite side ball wall relative with test specimen installing hole.
2. metal specimen surface laser measuring apparatus for reflection index according to claim 1, it is characterised in that:The measurement product Bulb separation and background integrating sphere are integral type structure, are provided with test specimen mounting groove on the ball wall at the test specimen installing hole.
3. metal specimen surface laser measuring apparatus for reflection index according to claim 1 and 2, it is characterised in that:The survey The physical dimension and inner surface treatment process all same of amount integrating sphere and background integrating sphere.
4. a kind of metal specimen surface laser method for measuring reflectance, it is characterised in that:Comprise the following steps:
1】Laser alignment laser is entered into hole, laser power P is set and is gone out light duration T;
2】Standard test panel is positioned on test specimen installing hole, laser is loaded;
3】Record measures photodetector signal V over time0s(t) and background photodetector signal over time V0b(t);Then, laser is closed, removes standard test panel;
4】Metal specimen to be measured is positioned on test specimen installing hole, laser is loaded;
5】Record measures photodetector signal V over time1s(t) and background photodetector signal over time V1b(t);Then, laser is closed, removes metal specimen to be measured;
6】According to formula k=(V1s(t)-V1b(t))/(V0s(t)-V0b(t)) laser power is calculated for the metal under P-condition Surface of test piece reflectivity factor k;
7】Change Laser shock loading power P and go out light duration T, repeat step 1-6】Obtain the metal examination under different input conditions Part surface reflectivity coefficient k;
8】Metal specimen surface reflectivity coefficient k is multiplied with the reflectance of standard test panel and obtains the surface of metal specimen to be measured Laser reflectivity.
5. metal specimen surface laser method for measuring reflectance according to claim 4, it is characterised in that:The standard is surveyed Test plate (panel) is inert metal plate known to reflectance or inorganic material plate.
6. the metal specimen surface laser method for measuring reflectance according to claim 4 or 5, it is characterised in that:Laser instrument Laser light incident direction and standard test panel or the angle of normal direction of metal specimen to be measured be α, wherein 0 ° of ﹤ α≤8 °.
7. metal specimen surface laser method for measuring reflectance according to claim 6, it is characterised in that:The gold to be measured Category test specimen is flake structure of the thickness less than 5mm.
8. metal specimen surface laser method for measuring reflectance according to claim 7, it is characterised in that:The gold to be measured Made using identical handling process on two surfaces of category test specimen.
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