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CN106556933A - It is a kind of can multidimensional adjustment laser beam sheet apparatus for shaping and method - Google Patents

It is a kind of can multidimensional adjustment laser beam sheet apparatus for shaping and method Download PDF

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Publication number
CN106556933A
CN106556933A CN201710000689.1A CN201710000689A CN106556933A CN 106556933 A CN106556933 A CN 106556933A CN 201710000689 A CN201710000689 A CN 201710000689A CN 106556933 A CN106556933 A CN 106556933A
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cylindrical lens
shaping
sheet
laser beam
lens
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CN106556933B (en
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彭江波
于杨
于欣
常光
李晓晖
宋梦龙
吕泽方
高龙
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Harbin Institute of Technology Shenzhen
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Harbin Institute of Technology Shenzhen
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements
    • G02B27/095Refractive optical elements
    • G02B27/0955Lenses
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0916Adapting the beam shape of a semiconductor light source such as a laser diode or an LED, e.g. for efficiently coupling into optical fibers

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Lenses (AREA)

Abstract

本发明公开了一种可多维调整的激光光束片状整形装置,所述激光光束片状整形装置包括光束片状整形透镜组和直线滑台,其中:所述光束片状整形透镜组沿光路方向依次由整形凹柱透镜、整形凸柱透镜、扩束凹柱透镜和聚焦柱透镜组成;所述直线滑台采用滚珠丝杠结构,由底座、丝杆和滑块组成,其中:丝杆固定在底座上,滑块设置在丝杆上,所述滑块上设置有透镜安装孔,透镜安装孔上安装有整形凹柱透镜、整形凸柱透镜、扩束凹柱透镜和聚焦柱透镜。本发明结构简单、易于操作,有效降低了激光光束片状整形的操作难度,提高了光束整形后片状光束的质量和稳定性,满足了不同使用环境下对片状光束输出角度的要求,适用于平面激光诱导荧光技术应用的各个领域。

The invention discloses a laser beam sheet shape shaping device capable of multi-dimensional adjustment. The laser beam sheet shape shaping device includes a beam sheet shape shaping lens group and a linear slide table, wherein: the beam sheet shape shaping lens group is along the direction of the optical path It is composed of a shaping concave cylindrical lens, a shaping convex cylindrical lens, a beam expanding concave cylindrical lens and a focusing cylindrical lens in turn; the linear slide adopts a ball screw structure and consists of a base, a screw and a slider, wherein the screw is fixed on On the base, the slide block is arranged on the screw rod, and the slide block is provided with a lens mounting hole, and a shaping concave cylindrical lens, a shaping convex cylindrical lens, a beam expanding concave cylindrical lens and a focusing cylindrical lens are installed in the lens mounting hole. The invention is simple in structure and easy to operate, effectively reduces the operational difficulty of laser beam sheet shaping, improves the quality and stability of the sheet beam after beam shaping, and meets the requirements for the output angle of the sheet beam in different use environments. It is used in various fields of planar laser-induced fluorescence technology application.

Description

一种可多维调整的激光光束片状整形装置及方法A multi-dimensionally adjustable laser beam sheet shape shaping device and method

技术领域technical field

本发明属于激光诊断技术领域,涉及一种可多维调整的激光光束片状整形装置及方法。The invention belongs to the technical field of laser diagnosis, and relates to a multidimensionally adjustable laser beam sheet shape shaping device and method.

背景技术Background technique

PLIF技术(平面激光诱导荧光技术)是一种高精度的光学诊断技术,其具有诸多优点:PLIF technology (planar laser-induced fluorescence technology) is a high-precision optical diagnostic technology, which has many advantages:

1、非接触式测量,不干扰流场结构;1. Non-contact measurement without disturbing the flow field structure;

2、具有纳秒级的时间分辨率和微米级的空间分辨率;2. It has nanosecond-level time resolution and micron-level spatial resolution;

3、测量区域大,可进行二维空间测量;3. The measurement area is large, and two-dimensional space measurement can be carried out;

4、具有可视性,测量结果更为直观;4. With visibility, the measurement results are more intuitive;

5、可通过标定等手段进行定量测量。5. Quantitative measurement can be carried out by calibration and other means.

目前,PLIF技术被广泛应用于燃烧场和流场的诊断,对燃烧火焰中组份浓度、空间分布和温度及冷态流场的测量拥有巨大的应用前景。At present, PLIF technology is widely used in the diagnosis of combustion field and flow field, and has great application prospects in the measurement of component concentration, spatial distribution and temperature in combustion flame and cold flow field.

当PLIF技术被广泛使用于燃烧、流场及发动机测试中时,操作人员具有的专业素质将直接影响测量结果。其中,对激光光束的片状整形过程及调整适合不同工况输出的过程尤为重要,因此设计一种装置可简单有效操控激光光束整形及输出是非常有必要的。When PLIF technology is widely used in combustion, flow field and engine testing, the professional quality of the operator will directly affect the measurement results. Among them, the sheet shape shaping process of the laser beam and the process of adjusting the output for different working conditions are particularly important. Therefore, it is very necessary to design a device that can simply and effectively control the shaping and output of the laser beam.

发明内容Contents of the invention

本发明的目的是提供一种可多维调整的激光光束片状整形装置及方法,在PLIF诊断中用于将激光光束整形为片状光束输出,该装置中透镜组中透镜均可替换,根据不同波长激光及所需片状光尺寸来更换所需透镜,该装置可精确调整输出片状光平行度及厚度并且可选择片状光输出角度,适用于各种不同诊断目的及工况的激光诊断试验。The object of the present invention is to provide a multi-dimensionally adjustable laser beam sheet shaping device and method, which is used to shape the laser beam into a sheet-shaped beam output in PLIF diagnosis. The lenses in the lens group of the device can be replaced, according to different The wavelength of the laser and the required size of the sheet light can be used to replace the required lens. The device can precisely adjust the parallelism and thickness of the output sheet light and the output angle of the sheet light can be selected. It is suitable for laser diagnosis of various diagnostic purposes and working conditions test.

本发明的目的是通过以下技术方案实现的:The purpose of the present invention is achieved through the following technical solutions:

一种可多维调整的激光光束片状整形装置,包括光束片状整形透镜组和直线滑台,其中:A multi-dimensionally adjustable laser beam sheet shaping device, including a beam sheet shaping lens group and a linear slide table, wherein:

所述光束片状整形透镜组沿光路方向依次由整形凹柱透镜、整形凸柱透镜、扩束凹柱透镜和聚焦柱透镜组成,激光经由整形凹柱透镜和整形凸柱透镜整形为片状光,整形后的片状光通过扩束凹柱透镜和聚焦柱透镜压缩其厚度;The light beam sheet shaping lens group consists of a shaping concave cylindrical lens, a shaping convex cylindrical lens, a beam expanding concave cylindrical lens and a focusing cylindrical lens in sequence along the direction of the optical path. , the shaped sheet light compresses its thickness through the beam expanding concave cylindrical lens and the focusing cylindrical lens;

所述直线滑台采用滚珠丝杠结构,由底座、丝杆和滑块组成,其中:丝杆和滑块均为四个,丝杆固定在底座上,滑块设置在丝杆上,所述滑块上设置有透镜安装孔,透镜安装孔上安装有整形凹柱透镜、整形凸柱透镜、扩束凹柱透镜和聚焦柱透镜。The linear slide table adopts a ball screw structure, and is composed of a base, a screw and a slider, wherein: the screw and the slider are four, the screw is fixed on the base, and the slider is arranged on the screw. A lens mounting hole is arranged on the slide block, and a shaping concave cylindrical lens, a shaping convex cylindrical lens, a beam expanding concave cylindrical lens and a focusing cylindrical lens are installed in the lens mounting hole.

利用上述装置实现多维调整的激光光束片状整形并输出的方法,包括以下步骤:The method for realizing multi-dimensionally adjusted laser beam sheet shape shaping and outputting by using the above-mentioned device comprises the following steps:

步骤一、目标激光经由整形凹柱透镜和整形凸柱透镜整形为片状光;Step 1. The target laser light is shaped into sheet-like light through the shaping concave cylindrical lens and the shaping convex cylindrical lens;

步骤二、通过转动丝杆用以微调整形凹柱透镜和整形凸柱透镜对应的滑块使得片状光完全平行;Step 2. Finely adjust the slider corresponding to the shaped concave cylindrical lens and the shaped convex cylindrical lens by turning the screw to make the sheet light completely parallel;

步骤三、整形后的片状光通过扩束凹柱透镜和聚焦柱透镜压缩其厚度,通过转动丝杆用以微调扩束凹柱透镜和聚焦柱透镜对应的滑块使其厚度压缩在0.2mm以下。Step 3. The thickness of the reshaped sheet light is compressed by the beam expanding concave cylindrical lens and the focusing cylindrical lens, and the thickness is compressed to 0.2mm by turning the screw to fine-tune the corresponding sliders of the beam expanding concave cylindrical lens and the focusing cylindrical lens the following.

本发明具有如下优点:The present invention has the following advantages:

1、本发明适用于平面激光诱导荧光技术应用的各个领域。1. The present invention is applicable to various fields of application of planar laser-induced fluorescence technology.

2、本发明结构简单、易于操作,大大降低了操作难度,提高了工作效率。2. The present invention is simple in structure and easy to operate, which greatly reduces the difficulty of operation and improves work efficiency.

3、本发明直线滑台的精准微调功能消除了整形凹柱透镜和整形凸柱透镜产品本身厚度和手动调节误差带来的片状光整形后不平行问题,可以将目标激光整形为完全平行的片状光。3. The precise fine-tuning function of the linear slide table of the present invention eliminates the non-parallel problem of the flake light caused by the thickness of the shaped concave cylindrical lens and the shaped convex cylindrical lens product itself and the manual adjustment error, and can shape the target laser to be completely parallel Flaky light.

4、本发明利用扩束凹柱透镜和聚焦柱透镜组合进一步压缩了片状光的厚度,提高了诊断结果的空间分辨率。4. The present invention further compresses the thickness of the sheet light by using the combination of the beam expanding concave cylindrical lens and the focusing cylindrical lens, and improves the spatial resolution of the diagnosis result.

5、本发明可倾角底座很好地解决了目前试验光路中激光整形只可以形成水平或竖直片状光的问题,通过调整倾角使得片状光的输出角度满足所诊断工况的需求。5. The tiltable base of the present invention well solves the problem that laser shaping can only form horizontal or vertical sheet light in the current test optical path, and the output angle of the sheet light meets the needs of the diagnosed working conditions by adjusting the inclination angle.

6、利用本发明可将目标激光光束整形为厚度在0.2mm以下的片状光束并匹配输出角度对测量目标进行作用。6. Using the present invention, the target laser beam can be shaped into a sheet-like beam with a thickness below 0.2mm and the output angle can be matched to act on the measurement target.

7、本发明有效降低了激光光束片状整形的操作难度,提高了光束整形后片状光束的质量和稳定性,满足了不同使用环境下对片状光束输出角度的要求。7. The present invention effectively reduces the operational difficulty of laser beam sheet shaping, improves the quality and stability of the sheet beam after beam shaping, and satisfies the requirements for the output angle of the sheet beam in different usage environments.

附图说明Description of drawings

图1为光束片状整形透镜组的结构示意图;Fig. 1 is the structural representation of beam sheet shape shaping lens group;

图2为直线滑台的结构示意图;Figure 2 is a schematic structural view of a linear slide;

图3为可倾角底座的结构示意图。Fig. 3 is a structural schematic diagram of an inclinable base.

具体实施方式detailed description

下面结合附图对本发明的技术方案作进一步的说明,但并不局限于此,凡是对本发明技术方案进行修改或者等同替换,而不脱离本发明技术方案的精神和范围,均应涵盖在本发明的保护范围中。The technical solution of the present invention will be further described below in conjunction with the accompanying drawings, but it is not limited thereto. Any modification or equivalent replacement of the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention should be covered by the present invention. within the scope of protection.

具体实施方式一:本实施方式提供的可多维调整的激光光束片状整形装置由光束片状整形透镜组和直线滑台组成。Specific Embodiment 1: The multi-dimensionally adjustable laser beam sheet shaping device provided in this embodiment is composed of a beam sheet shaping lens group and a linear slide table.

如图1所示,所述光束片状整形透镜组沿光路方向依次由整形凹柱透镜1A、整形凸柱透镜1B、扩束凹柱透镜1C和聚焦柱透镜1D组成。As shown in FIG. 1 , the light beam sheet shaping lens group is sequentially composed of a shaping concave cylindrical lens 1A, a shaping convex cylindrical lens 1B, a beam expanding concave cylindrical lens 1C and a focusing cylindrical lens 1D along the optical path direction.

如图2所示,所述直线滑台采用滚珠丝杠结构,由底座2A、丝杆2B和滑块2C组成,其中:丝杆2B和滑块2C均为四个,丝杆2B固定在底座2A上,滑块2C设置在丝杆2B上,所述滑块上设置有透镜安装孔2E,透镜安装孔2E上安装有整形凹柱透镜1A、整形凸柱透镜1B、扩束凹柱透镜1C和聚焦柱透镜1D。As shown in Figure 2, the linear slide table adopts a ball screw structure, which is composed of a base 2A, a screw 2B and a slider 2C, wherein: the screw 2B and the slider 2C are four, and the screw 2B is fixed on the base 2A, the slider 2C is set on the screw rod 2B, the slider is provided with a lens installation hole 2E, and the lens installation hole 2E is installed with a shaping concave cylindrical lens 1A, a shaping convex cylindrical lens 1B, and a beam expanding concave cylindrical lens 1C and focusing cylindrical lens 1D.

本实施方式中,所述光束片状整形透镜组中整形凹柱透镜1A、整形凸柱透镜1B、扩束凹柱透镜1C和聚焦柱透镜1D的光轴保持同轴存在。In this embodiment, the optical axes of the shaping concave cylindrical lens 1A, the shaping convex cylindrical lens 1B, the beam expanding concave cylindrical lens 1C and the focusing cylindrical lens 1D in the beam sheet shaping lens group are coaxial.

本实施方式中,所述整形凹柱透镜1A和整形凸柱透镜1B可将目标激光整形为片状光,片状光尺寸为,其中:f+为整形凸柱透镜1B焦距,f-为整形凹柱透镜1A焦距。In this embodiment, the shaping concave cylindrical lens 1A and the shaping convex cylindrical lens 1B can shape the target laser light into a sheet-like light, and the size of the sheet-like light is , where: f + is the focal length of the shaped convex cylindrical lens 1B, and f - is the focal length of the shaped concave cylindrical lens 1A.

本实施方式中,所述扩束凹柱透镜1C和聚焦柱透镜1D的扩束和压缩方向与整形凹柱透镜1A和整形凸柱透镜1B垂直存在。In this embodiment, the beam expansion and compression directions of the beam expanding concave cylindrical lens 1C and the focusing cylindrical lens 1D are perpendicular to the shaping concave cylindrical lens 1A and the shaping convex cylindrical lens 1B.

本实施方式中,所述扩束凹柱透镜1C和聚焦柱透镜1D可将整形后的片状光厚度压缩在0.2mm以下。In this embodiment, the beam expander concave cylindrical lens 1C and the focusing cylindrical lens 1D can compress the thickness of the reshaped sheet-like light below 0.2 mm.

本实施方式中,所述整形凹柱透镜1A、整形凸柱透镜1B、扩束凹柱透镜1C和聚焦柱透镜1D上镀有针对整形激光波长的增透膜,激光透过率在99%以上。In this embodiment, the shaping concave cylindrical lens 1A, the shaping convex cylindrical lens 1B, the beam expanding concave cylindrical lens 1C and the focusing cylindrical lens 1D are coated with an anti-reflection film for the wavelength of the shaping laser, and the laser transmittance is above 99%. .

本实施方式中,所述直线滑台中四个丝杆2B均拥有独立丝杠旋钮2D。In this embodiment, the four screw rods 2B in the linear slide table all have independent screw knobs 2D.

本实施方式中,所述直线滑台可精确调整透镜间光学距离,消除各透镜本身厚度带来的误差,将激光整形为完全可行的片状光,并使得透镜组稳定的处于同一光轴上进行直线运动。In this embodiment, the linear slide table can precisely adjust the optical distance between the lenses, eliminate the error caused by the thickness of each lens itself, shape the laser light into a completely feasible sheet light, and make the lens group stably on the same optical axis Perform linear motion.

本实施方式中,所述直线滑台的调节精度为1mm。In this embodiment, the adjustment accuracy of the linear slide is 1 mm.

利用上述装置实现多维调整的激光光束片状整形并输出的方法,由以下步骤实现:The method for realizing multi-dimensionally adjusted laser beam sheet shape shaping and output by using the above-mentioned device is realized by the following steps:

步骤一、激光经由整形凹柱透镜1A和整形凸柱透镜1B整形为片状光;Step 1. The laser light is shaped into sheet light through the shaping concave cylindrical lens 1A and the shaping convex cylindrical lens 1B;

步骤二、通过旋转丝杠旋钮2D转动丝杆2B用以微调整形凹柱透镜1A和整形凸柱透镜1B对应的滑块2C使得片状光完全平行;Step 2. Turn the screw 2B by rotating the screw knob 2D to finely adjust the slider 2C corresponding to the shaped concave cylindrical lens 1A and the shaped convex cylindrical lens 1B so that the sheet light is completely parallel;

步骤三、整形后的片状光通过扩束凹柱透镜1C和聚焦柱透镜1D压缩其厚度,通过旋转丝杠旋钮2D转动丝杆2B用以微调扩束凹柱透镜1C和聚焦柱透镜1D对应的滑块2C使其厚度压缩在0.2mm以下。Step 3: The thickness of the reshaped sheet light is compressed through the beam expanding concave cylindrical lens 1C and the focusing cylindrical lens 1D, and the screw 2B is rotated by rotating the screw knob 2D to fine-tune the correspondence between the beam expanding concave cylindrical lens 1C and the focusing cylindrical lens 1D The slider 2C compresses its thickness below 0.2mm.

具体实施方式二:本实施方式与具体实施方式不同的是,所述可多维调整的激光光束片状整形装置由光束片状整形透镜组、直线滑台和可倾角底座组成。Specific Embodiment 2: The difference between this embodiment and the specific embodiment is that the multi-dimensionally adjustable laser beam sheet shaping device consists of a beam sheet shaping lens group, a linear slide and an inclinable base.

如图3所示,所述可倾角底座由安装底座3A、底座支架3B、可倾角固定台3C和直线滑台安装孔3D组成,其中:所述底座支架3B固定在安装底座3A上,可倾角固定台3C安装在底座支架3B上,所述可倾角固定台3C上设置有直线滑台安装孔3D,直线滑台安装孔3D上安装有直线滑台的底座2A。As shown in Figure 3, the tiltable base is composed of a mounting base 3A, a base bracket 3B, a tiltable fixed platform 3C and a linear slide mounting hole 3D, wherein: the base bracket 3B is fixed on the mounting base 3A, and the tiltable angle The fixed platform 3C is mounted on the base bracket 3B, the tiltable fixed platform 3C is provided with a linear slide mounting hole 3D, and the linear slide mounting hole 3D is provided with a linear slide base 2A.

本实施方式中,所述可倾角底座中可倾角固定台3C可实现0-90o任意角度可调。In this embodiment, the tiltable fixed platform 3C in the tiltable base can be adjusted at any angle from 0 to 90 ° .

本实施方式中,所述光束片状整形透镜组、直线滑台和可倾角底座安装后在多维调整过程中,所有透镜光轴同轴且保持位置不变。In this embodiment, after the beam sheet shaping lens group, the linear slide table and the tiltable base are installed, during the multi-dimensional adjustment process, the optical axes of all the lenses are coaxial and their positions remain unchanged.

利用上述装置实现多维调整的激光光束片状整形并输出的方法,由以下步骤实现:The method for realizing multi-dimensionally adjusted laser beam sheet shape shaping and output by using the above-mentioned device is realized by the following steps:

步骤一、激光经由整形凹柱透镜1A和整形凸柱透镜1B整形为片状光;Step 1. The laser light is shaped into sheet light through the shaping concave cylindrical lens 1A and the shaping convex cylindrical lens 1B;

步骤二、通过旋转丝杠旋钮2D转动丝杆2B用以微调整形凹柱透镜1A和整形凸柱透镜1B对应的滑块2C使得片状光完全平行;Step 2. Turn the screw 2B by rotating the screw knob 2D to finely adjust the slider 2C corresponding to the shaped concave cylindrical lens 1A and the shaped convex cylindrical lens 1B so that the sheet light is completely parallel;

步骤三、整形后的片状光通过扩束凹柱透镜1C和聚焦柱透镜1D压缩其厚度,通过旋转丝杠旋钮2D转动丝杆2B用以微调扩束凹柱透镜1C和聚焦柱透镜1D对应的滑块2C使其厚度压缩在0.2mm以下;Step 3: The thickness of the reshaped sheet light is compressed through the beam expanding concave cylindrical lens 1C and the focusing cylindrical lens 1D, and the screw 2B is rotated by rotating the screw knob 2D to fine-tune the correspondence between the beam expanding concave cylindrical lens 1C and the focusing cylindrical lens 1D The slider 2C makes its thickness compressed below 0.2mm;

步骤四、调整可倾角底座的可倾角固定台,实现片状光0-90o任意角度输出。Step 4. Adjust the tiltable fixed platform of the tiltable base to realize the output of sheet light at any angle from 0 to 90 o .

Claims (10)

1.一种可多维调整的激光光束片状整形装置,其特征在于所述激光光束片状整形装置包括光束片状整形透镜组和直线滑台,其中:1. A laser beam sheet shaping device capable of multidimensional adjustment, characterized in that said laser beam sheet shaping device includes a beam sheet shaping lens group and a linear slide table, wherein: 所述光束片状整形透镜组沿光路方向依次由整形凹柱透镜、整形凸柱透镜、扩束凹柱透镜和聚焦柱透镜组成,激光经由整形凹柱透镜和整形凸柱透镜整形为片状光,整形后的片状光通过扩束凹柱透镜和聚焦柱透镜压缩其厚度;The light beam sheet shaping lens group is sequentially composed of a shaping concave cylindrical lens, a shaping convex cylindrical lens, a beam expanding concave cylindrical lens and a focusing cylindrical lens along the direction of the optical path. , the shaped sheet light compresses its thickness through the beam expanding concave cylindrical lens and the focusing cylindrical lens; 所述直线滑台采用滚珠丝杠结构,由底座、丝杆和滑块组成,其中:丝杆和滑块均为四个,丝杆固定在底座上,滑块设置在丝杆上,所述滑块上设置有透镜安装孔,透镜安装孔上安装有整形凹柱透镜、整形凸柱透镜、扩束凹柱透镜和聚焦柱透镜。The linear slide table adopts a ball screw structure, and is composed of a base, a screw and a slider, wherein: the screw and the slider are four, the screw is fixed on the base, and the slider is arranged on the screw. A lens mounting hole is arranged on the slide block, and a shaping concave cylindrical lens, a shaping convex cylindrical lens, a beam expanding concave cylindrical lens and a focusing cylindrical lens are installed in the lens mounting hole. 2.根据权利要求1所述的可多维调整的激光光束片状整形装置,其特征在于所述光束片状整形透镜组中整形凹柱透镜、整形凸柱透镜、扩束凹柱透镜和聚焦柱透镜的光轴保持同轴存在。2. The multi-dimensionally adjustable laser beam sheet shaping device according to claim 1, characterized in that in the beam sheet shaping lens group, a shaping concave cylindrical lens, a shaping convex cylindrical lens, a beam expanding concave cylindrical lens and a focusing cylinder The optical axis of the lens remains coaxial. 3.根据权利要求1所述的可多维调整的激光光束片状整形装置,其特征在于所述片状光尺寸为,其中:f+为整形凸柱透镜焦距,f-为整形凹柱透镜焦距。3. The multi-dimensionally adjustable laser beam sheet shaping device according to claim 1, characterized in that the size of the sheet light is , where: f + is the focal length of the shaped convex cylindrical lens, and f - is the focal length of the shaped concave cylindrical lens. 4.根据权利要求1所述的可多维调整的激光光束片状整形装置,其特征在于所述扩束凹柱透镜和聚焦柱透镜的扩束和压缩方向与整形凹柱透镜和整形凸柱透镜垂直存在。4. The multi-dimensionally adjustable laser beam sheet shaping device according to claim 1, characterized in that the beam expansion and compression directions of the beam expanding concave cylindrical lens and the focusing cylindrical lens are the same as those of the shaping concave cylindrical lens and the shaping convex cylindrical lens exist vertically. 5.根据权利要求1所述的可多维调整的激光光束片状整形装置,其特征在于所述扩束凹柱透镜和聚焦柱透镜将整形后的片状光厚度压缩在0.2mm以下。5. The multi-dimensionally adjustable laser beam sheet shaping device according to claim 1, characterized in that the beam expanding concave cylindrical lens and the focusing cylindrical lens compress the sheet optical thickness after shaping to below 0.2mm. 6.根据权利要求1所述的可多维调整的激光光束片状整形装置,其特征在于所述整形凹柱透镜、整形凸柱透镜、扩束凹柱透镜和聚焦柱透镜上镀有针对整形激光波长的增透膜,激光透过率在99%以上。6. The multi-dimensionally adjustable laser beam sheet shaping device according to claim 1, characterized in that said shaping concave cylindrical lens, shaping convex cylindrical lens, beam expanding concave cylindrical lens and focusing cylindrical lens are coated with The anti-reflection coating for different wavelengths, the laser transmittance is above 99%. 7.根据权利要求1所述的可多维调整的激光光束片状整形装置,其特征在于所述直线滑台的调节精度为1mm。7. The multi-dimensionally adjustable laser beam sheet shaping device according to claim 1, characterized in that the adjustment accuracy of the linear slide table is 1mm. 8.根据权利要求1所述的可多维调整的激光光束片状整形装置,其特征在于所述激光光束片状整形装置还包括可倾角底座,所述可倾角底座由安装底座、底座支架、可倾角固定台和直线滑台安装孔组成,其中:所述底座支架固定在安装底座上,可倾角固定台安装在底座支架上,所述可倾角固定台上设置有直线滑台安装孔,直线滑台安装孔上安装有直线滑台的底座。8. The multi-dimensionally adjustable laser beam sheet shaping device according to claim 1, characterized in that the laser beam sheet shaping device also includes an inclinable base, and the inclinable base is composed of a mounting base, a base bracket, an adjustable It consists of an inclination fixed table and a linear slide table installation hole, wherein: the base bracket is fixed on the installation base, the inclination angle fixed table is installed on the base bracket, and the inclination angle fixed table is provided with a linear slide table installation hole, and the linear slide table The base of the linear slide table is installed on the table mounting hole. 9.一种利用权利要求1-8任一权利要求所述的激光光束片状整形装置实现多维调整的激光光束片状整形并输出的方法,其特征在于所述方法包括以下步骤:9. A method of utilizing the laser beam sheet shape shaping device according to any one of claims 1-8 to realize multi-dimensionally adjusted laser beam sheet shape shaping and output, characterized in that the method comprises the following steps: 步骤一、目标激光经由整形凹柱透镜和整形凸柱透镜整形为片状光;Step 1. The target laser light is shaped into sheet-like light through the shaping concave cylindrical lens and the shaping convex cylindrical lens; 步骤二、通过转动丝杆用以微调整形凹柱透镜和整形凸柱透镜对应的滑块使得片状光完全平行;Step 2. Finely adjust the slider corresponding to the shaped concave cylindrical lens and the shaped convex cylindrical lens by turning the screw to make the sheet light completely parallel; 步骤三、整形后的片状光通过扩束凹柱透镜和聚焦柱透镜压缩其厚度,通过转动丝杆用以微调扩束凹柱透镜和聚焦柱透镜对应的滑块使其厚度压缩在0.2mm以下。Step 3. The thickness of the reshaped sheet light is compressed through the beam expanding concave cylindrical lens and the focusing cylindrical lens, and the thickness is compressed to 0.2mm by turning the screw to fine-tune the corresponding sliders of the beam expanding concave cylindrical lens and the focusing cylindrical lens the following. 10.根据权利要求9所述的实现多维调整的激光光束片状整形并输出的方法,其特征在于所述方法还包括以下步骤:10. The method for realizing multi-dimensional adjustment of laser beam sheet shape shaping and output according to claim 9, characterized in that the method further comprises the following steps: 步骤四、调整可倾角底座的可倾角固定台,实现片状光0-90o任意角度输出。Step 4. Adjust the tiltable fixed platform of the tiltable base to realize the output of sheet light at any angle from 0 to 90 o .
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