CN106550528A - A kind of multimode fibre focal plane adjusting means for plasma detection - Google Patents

Abstract

The invention provides a multimode optical fiber focal plane adjustment device for plasma detection, which is used to adjust the incident plane of the multimode optical fiber to coincide with the outgoing focal plane of the Cheney-Turner optical path structure, which includes multimode An optical fiber adjustment seat, and a first adjustment device and a second adjustment device arranged side by side, wherein the Cheney-Turner optical path structure is installed on the first adjustment device, and the multimode fiber adjustment seat is installed on the second adjustment device Above, the first adjustment device and the second adjustment device each have multiple degrees of freedom, and the multimode fiber is accommodated in the multimode fiber adjustment seat so that the incident surface of the multimode fiber faces the cut Exit of the Ny-Turner light path structure. The adjustment device of the present invention can adjust the incident plane of the multimode optical fiber to coincide with the exit focal plane of the Cheney-Turner optical path structure, and can realize rapid and flexible adjustment, thereby improving the sensitivity and accuracy of plasma spectral information collection .

Description

A Multimode Optical Fiber Focal Plane Adjustment Device for Plasma Detection

technical field

The invention relates to the field of analytical instruments, in particular to a multimode optical fiber focal plane adjustment device for plasma detection.

Background technique

A spectrometer is a general-purpose spectral analysis instrument. It decomposes light with complex components into light of different wavelengths through a diffraction grating, and uses optical principles to observe, analyze and process the structure and composition of substances. It is widely used in various fields. For example, in the research and development of IC equipment, by combining the spectrometer with other components such as photomultiplier tubes, the spectral information generated by the plasma glow discharge can be collected and analyzed, the reaction phenomenon can be detected in real time, and the physical parameters of the plasma can be obtained. The device has the advantages of non-intrusive and fast response. At the same time, for the complex physical and chemical processes in the plasma in an unsteady state, it is usually necessary to collect many weak spectral lines in addition to the main strong spectral lines, which is very difficult to detect.

At present, there are two main detection methods for spectral lines: one is to split light through a spectrometer, adjust the exit slit and cooperate with a photomultiplier tube to collect an optical signal of a single wavelength; the other is to use a CCD with a two-dimensional array The camera can collect spectral signals in different wavelength ranges. The first detection method has the advantages of high sensitivity and fast response. In particular, the photomultiplier tube, as the most sensitive optical detection element at present, can realize single-photon nanosecond-level time-resolved measurement. However, ordinary CCD cameras are poor in sensitivity and time resolution. Although the enhanced CCD cameras that appear today can also achieve nanosecond-level detection accuracy, they are limited by factors such as photocathode materials and fluorescent plate luminous efficiency. Efficiency is lower than photomultiplier tubes and cannot be used for transient non-repetitive optical signal measurements.

For this reason, it has been considered in the art to replace the CCD array with an array fiber as the spectrum acquisition element, and then connect the photomultiplier tube array at the output end of the array fiber to perform photoelectric signal conversion, and the photomultiplier tube is the most sensitive known at present. Therefore, the optical fiber array used in this system needs to be highly coincident with the position of the exit focal plane in the optical path structure in order to collect accurate spectral signals. However, there is currently no adjustment device for the positional relationship between the multimode fiber and the focal plane. In the prior art, the spectrometer is directly fixed on the optical platform. Although the stability of the spectrometer is guaranteed, it is impossible to fix the spectrometer The exit focal plane coincides with the fiber array plane, resulting in lower accuracy.

Contents of the invention

The main purpose of the present invention is to provide a multimode fiber focal plane adjustment device for plasma detection, which can conveniently realize the rapid and flexible adjustment and focus of the multimode fiber incident plane and the exit focal plane of the spectrometer.

In order to achieve the above purpose, the technical scheme adopted is as follows:

A multimode fiber focal plane adjustment device for plasma detection, which is used to adjust the incident plane of the multimode fiber to coincide with the outgoing focal plane of the Cheney-Turner optical path structure, which includes a multimode fiber adjustment seat, And a first adjustment device and a second adjustment device arranged side by side, wherein the Cheney-Turner optical path structure is installed on the first adjustment device, the multimode fiber adjustment seat is installed on the second adjustment device, the The first adjustment device and the second adjustment device each have multiple degrees of freedom, and the multimode fiber is accommodated in the multimode fiber adjustment seat so that the incident surface of the multimode fiber faces the Cheney-Turner The exit of the light path structure.

Preferably, the first adjusting device includes: a first adjusting assembly capable of rotating around a first direction; a second adjusting assembly mounted on the first adjusting assembly capable of rotating around a second direction; wherein the first adjusting assembly A direction is different from the second direction, wherein the Cheney-Turner optical path structure is mounted on the second adjustment assembly.

Preferably, the first adjustment component and/or the second adjustment component include:

a fixed bottom plate, the fixed bottom plate is provided with a first arc-shaped guide rail;

A movable platform, the movable platform is provided with a second arc-shaped guide rail matched with the first arc-shaped guide rail;

a top block fixedly connected under the movable platform, the top block has a contact surface;

A push rod device fixedly installed on the fixed base plate, preferably an electric push rod device, the push rod device has a retractable push rod, and when the push rod pushes the contact surface of the top block, it drives the movable The platform rotates relative to the fixed base.

Preferably, the contact surface includes a plurality of smoothly connected planar segments and/or curved segments; preferably, the contact surface includes an arc segment and planar segments located on the upper and lower sides of the arc segment.

Preferably, the multimode fiber adjustment seat includes:

fixedly connected to a fixing seat of said second adjustment device;

An optical fiber installation tube, the first end of which is connected to the fixing base, and the second end faces the outlet of the Cheney-Turner optical path structure, the multimode optical fiber is installed in the optical fiber installation tube with a clearance fit, the The incident plane of the multimode optical fiber is located at the second end of the optical fiber installation tube.

Preferably, the multimode optical fiber adjustment seat further includes an interface flange and a hose, wherein the interface flange is fixedly connected to the outlet side of the Cheney-Turner optical path structure, and the second fiber installation tube end protrudes into the inner hole of the interface flange, the outer diameter of the second end of the optical fiber installation tube is smaller than the diameter of the inner hole of the interface flange, the hose is made of opaque material, the A hose is sheathed on the periphery of the optical fiber installation tube, and the two ends of the hose are respectively connected to the interface flange and the fixing seat.

Preferably, the second adjustment device includes:

A third adjustment assembly, which can rotate around a third direction, on which the multimode fiber adjustment seat is installed;

a first translation mechanism capable of translation along a first direction, on which the third adjustment assembly is installed;

a second translation mechanism capable of translation along a second direction, on which the first translation mechanism is mounted;

A third translation mechanism capable of translation along a third direction, on which the second translation mechanism is installed.

Preferably, the first translation mechanism and/or the second translation mechanism include:

a support seat on which a linear guide rail is arranged;

a translation platform, which can slide along the linear guide rail;

The lead screw nut pair connects the support seat and the translation platform.

Preferably, the third translation mechanism includes: a bottom plate, a fixed plate, a fixed support rod, a third lead screw nut pair, a nut support plate, a third translation platform, and a sliding support rod, wherein the fixed support rod Installed on the bottom plate, the fixed plate is installed on the top of the fixed support rod, the lead screw in the third screw nut pair is rotatably supported between the bottom plate and the fixed plate, so The nuts in the third lead screw nut pair are fixed on the nut support plate, the sliding support rod slides through the fixed plate, and the lower end of the sliding support rod is fixed on the nut support plate, The third translation platform is fixed on the upper end of the sliding support rod.

Preferably, the area of the upper surface of the first translation mechanism is larger than the area of the bottom surface of the third adjustment assembly, and the third adjustment assembly is fixedly installed to the first translation mechanism via a right-angle block;

And/or, the area of the bottom surface of any one of the first translation mechanism, the second translation mechanism and the third translation mechanism is smaller than the area of the installation surface below it, so that it is fixedly installed to the installation surface below it via a right-angle block .

The multimode optical fiber focal plane adjustment device for plasma detection of the present invention can adjust the incident plane of the multimode optical fiber to coincide with the outgoing focal plane of the Cheney-Turner optical path structure, and can realize fast and flexible adjustment, thereby Improve the sensitivity and accuracy of plasma spectral information collection.

Description of drawings

The accompanying drawings constituting a part of the present invention are used to provide a further understanding of the present invention, and the schematic embodiments of the present invention and their descriptions are used to explain the present invention and do not constitute improper limitations to the present invention. In the attached picture:

Fig. 1 is a schematic diagram of the outline structure of a multimode fiber focal plane adjustment device according to a preferred embodiment of the present invention;

Figure 2a and Figure 2b are a schematic diagram of assembly and a schematic diagram of an exploded view of the rotating platform, respectively;

Figures 3a and 3b are the main sectional view and left view schematic diagram of the movable platform part of the rotating platform respectively;

Fig. 4 is a schematic structural diagram of the Cheney-Turner optical path;

5a and 5b are respectively an exploded schematic view and an assembly schematic view of the multimode optical fiber adjustment seat;

Figures 6a and 6b are schematic diagrams of end-view and side-view structures of multimode fibers, respectively;

Fig. 7 is a schematic diagram of the assembly structure of the first translation platform;

Fig. 8 is a left view exploded schematic view of the first translation platform;

Fig. 9 is a schematic diagram of the assembly structure of the third translation platform;

Fig. 10 is a schematic diagram of the connection structure between the third rotating platform and the first translation platform.

Wherein, the above-mentioned accompanying drawings include the following reference signs:

10. Optical platform; 20. First rotating platform; 30. Second rotating platform; 40. Cheney-Turner optical path structure; 50. Multimode optical fiber adjustment seat; 60. Third rotating platform; 70. First translation Platform; 80, the second translation platform; 90, the third translation platform; 100, fixed base; 110a, 110b, right-angle blocks; 201, movable platform; 203c, plane section; 203b, arc surface section; 203d, connection part; 204, fixed bottom plate; 205, push rod fixing seat; 206, push rod device; 206a, push rod; 401, incident slit; 402, collimated reflection Mirror; 403, diffraction grating; 404, focusing mirror; 405, focal plane; 501, fixed seat; 501a, inner hole of fixed seat; 502, hose; 503, interface flange; 503a, interface flange groove; 503b , inner hole of interface flange; 504, multimode optical fiber; 504a, incident plane; 504b, metal head; 505, optical fiber installation tube; 505a, installation tube groove; The first end of the optical fiber installation tube; 604, the fixed bottom plate of the third rotating platform; 701, the translation platform; 702, the nut; 703, the lead screw; 704, the motor; , bearing support platform; 708a, 708b, bearing; 709, linear guide rail; 901, third translation platform; 902, fixed plate; 903, fixed support rod; 904, base plate; 905, drive motor; 906, nut; 907, Leading screw; 908, sliding support rod; 909, nut support plate.

detailed description

In the following description, numerous specific details are given in order to provide a more thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without one or more of these details. In other examples, some technical features known in the art are not described in order to avoid confusion with the present invention.

In order to provide a thorough understanding of the present invention, the detailed structure will be set forth in the following description. Obviously, the embodiments of the invention are not limited to specific details familiar to those skilled in the art. Preferred embodiments of the present invention are described in detail below, however, the present invention may have other embodiments besides these detailed descriptions.

The invention provides a multimode optical fiber focal plane adjustment device for plasma detection, which is used to adjust the incident plane of the multimode optical fiber to coincide with the outgoing focal plane of the Cheney-Turner optical path structure. The adjustment device includes a multimode optical fiber adjustment seat, and a first adjustment device and a second adjustment device arranged side by side, wherein, as shown in FIG. 1 , the Cheney-Turner optical path structure 40 is installed on the first adjustment device, The multimode fiber adjustment seat 50 is installed on the second adjustment device, the first adjustment device and the second adjustment device each have multiple degrees of freedom, and the multimode fiber is accommodated in the multimode fiber adjustment In the seat 50 , the incident surface of the multimode optical fiber faces the exit of the Cheney-Turner optical path structure 40 .

Through the adjustment of multiple degrees of freedom of the first adjusting device and the second adjusting device, the incident plane of the multimode fiber and the outgoing focal plane of the Cheney-Turner optical path structure can be adjusted to coincide with each other.

Specifically refer to FIG. 1 , which shows a schematic diagram of a multimode fiber focal plane adjusting device according to a preferred embodiment of the present invention. In order to facilitate the direction indication, a coordinate system composed of three directions of X, Y and Z is shown in Fig. 1, where the X direction is expressed as the transverse direction on the horizontal plane, the Y direction is expressed as the longitudinal direction on the horizontal plane, and the Z direction is expressed as is the vertical direction perpendicular to the horizontal plane. As shown in FIG. 1 , it shows, for example, a support placed on the ground, such as an optical platform 10 , and the optical platform 10 is used to place the multimode fiber focal plane adjustment device.

For example, in the multimode fiber focal plane adjustment device, the first adjustment device includes: a first adjustment assembly capable of rotating around a first direction (such as the Y direction), such as a first rotating platform 20; A second adjustment assembly on an adjustment assembly that can rotate around a second direction (such as the X direction), such as a second rotating platform 30; wherein the first direction is different from the second direction, and wherein the cutting The Ney-Turner optical path structure 40 is installed on the second adjustment assembly 30 .

Exemplarily, the second adjustment device includes:

A third adjustment assembly, which can rotate around a third direction (such as the Z direction), such as a third rotation platform 60, on which the multimode fiber adjustment seat 50 is installed;

The first translation mechanism, which can translate along the first direction, such as the first translation platform 70, on which the third adjustment assembly is installed;

The second translation mechanism, which can translate along the second direction, such as the second translation platform 80, on which the first translation mechanism is installed;

The third translation mechanism, which can translate along the third direction, is, for example, the third translation platform 90 on which the second translation mechanism is installed.

Exemplarily, there is a fixed base 100 on the optical platform 10 , and the third translation platform 90 is installed on the fixed base 100 .

Therefore, the Cheney-Turner optical path structure 40 can adjust the rotational degrees of freedom in two directions via the first rotating platform 20 and the second rotating platform 30, and the multimode fiber can pass through the third rotating platform 60 and the first translation platform 70. , the second translational platform 80 and the third translational platform 90 adjust the translational movement in three directions and the rotational degree of freedom in one direction, so as to realize the adjustment of all six degrees of freedom, and finally the incident plane of the multimode optical fiber can be easily adjusted Adjust to coincide with the outgoing focal plane of the Cheney-Turner optical path structure.

2a-3b show in detail the schematic structural view of the first rotating platform 20 according to the present invention. In the present invention, the first, second and third rotating platforms may have the same mechanical structure. As an example, only The first rotating platform 20 is described.

As shown in Figures 2a-3b, the first rotating platform 20 is composed of upper and lower parts, wherein the lower part includes a fixed base plate 204 for fixing the first rotating platform itself, and the upper part includes a movable platform for providing rotational movement 201. Wherein, the fixed bottom plate 204 is provided with a first arc-shaped guide rail 202b, and the movable platform 201 is provided with a second arc-shaped guide rail 202a matched with the first arc-shaped guide rail 202b, when the second arc-shaped guide rail 202b When there is relative movement between the guide rail 202a and the first arc-shaped guide rail 202b, the movable platform 201 will rotate relative to the fixed bottom plate 202.

In order to realize the rotation of the movable platform 201 relative to the fixed base plate 202 conveniently, a top block 203 is fixedly connected below the movable platform 201, and the top block 203 has a contact surface, which is connected to the movable platform 201 by means of a connecting portion 204d, for example. At the same time, a push rod device 206, preferably an electric push rod device, is fixedly installed on the fixed base plate 204, and the push rod device has a telescopic push rod 206a for pushing the top block 203 contact the surface, thereby driving the movable platform 201 to rotate relative to the fixed bottom plate 204 .

In order to ensure that the push rod 206a can always reliably push the contact surface of the ejector block 203, the cross-section of the ejector block 203 is preferably configured as a dovetail, so that the contact surface includes a plurality of smoothly connected plane segments and/or curved segments. Preferably, the contact surface includes an arcuate segment 203b and planar segments 203c and 203a located on the upper and lower sides of the arcuate segment 203b, and the push rod 206 mainly pushes the arcuate segment 203b.

Preferably, on the upper surface of the fixed bottom plate 204, a pair of push rod devices 206 are symmetrically arranged on both sides of the top block 203, and both sides of the top block 203 also have symmetrical contact surfaces, so that it can be guaranteed to move in two directions at the same time. Push the top block 203 to ensure the accuracy and reliability of the rotational position of the movable platform 201 . For example, when the push rod 206a on the right side is extended to the left (while the push rod arranged on the left side is also retracted to the left), the contact between the push rod 206a and the top block 203 will push the first rotating platform 20 The upper part of the upper part slides along the guide rails 202a and 202b, thereby realizing the clockwise rotation of the first rotating platform 20 around the Y direction, and adjusting the rotation degree of freedom in the Y direction.

Wherein, the push rod device includes a push rod holder 205 connected to the upper surface of the fixed bottom plate 204, on which an electric push rod driven by a motor is arranged, for example, the push rod in the electric push rod 206a can realize telescopic movement under the action of the motor.

Preferably, the second arc guide rail 202b is a cross roller arc guide rail.

Those skilled in the art can understand that based on the same structure and principle, the rotation of the second and third rotating platforms around the X direction and the Z direction can also be realized respectively.

4 shows a Cheney-Turner optical path structure 40 according to the present invention, wherein the optical path structure includes: an incident slit 401, wherein the continuous spectrum to be detected enters the optical path structure through the incident slit 401; Straight mirror 402, which accepts the incident light from the incident slit 401 and reflects it into parallel light; diffraction grating 403, which receives the arriving parallel light, diffracts it so that the diffracted light reaches the focusing mirror 404 ; the focusing mirror 404 , the focusing mirror makes monochromatic light of different wavelengths focus to different positions of the focal plane 405 ; and the focal plane 405 on the same side as the incident slit 401 .

Figures 5a and 5b show the multimode optical fiber adjusting seat 50 of the present invention, and in Figure 5b, a multimode optical fiber 504 is installed in the multimode optical fiber adjusting seat.

Among them, the multimode fiber adjustment seat includes:

A fixed seat 501, such as a right-angle fixed seat, the multimode optical fiber adjustment seat 50 is connected to the third rotating platform 60 in the second adjustment device via the fixed seat 501, and a fixed seat is provided on the vertical section of the fixed seat 501 inner hole 501a;

An optical fiber installation tube 505, the first end of which is connected to the fixing seat 501, for example, is fitly installed in the inner hole 501a of the fixing seat, so that its second end 505d faces the outlet of the Cheney-Turner optical path structure 40, so The multimode fiber 504 is installed in the fiber installation tube 505 with a clearance fit, and the incident plane 504a of the multimode fiber 504 is located at the second end of the fiber installation tube 505, so that it can face the Cheney-Turner The exit of the optical path structure 40 is convenient to coincide with the adjustment of the focal plane.

The outer portion of the fiber installation tube 505 is provided with an outwardly protruding annular boss, and the end face of the ring boss can be used to limit the fiber installation tube itself. The fiber installation tube 505 is provided with a fiber installation hole 505b inside, and the fiber installation hole 505b is provided at the second end for clearance fit with the metal head 504b of the multimode fiber 504 (see FIGS. 6a and 6b ). Except for the optical fiber installation hole 505b, the diameter of the rest of the inner hole 505c of the optical fiber installation tube becomes larger so that the optical fiber can pass through without interference. When in use, insert the left end of the optical fiber installation tube 505 into the inner hole 501a of the fixing base 501 to complete the assembly between the two.

Preferably, the multimode optical fiber adjustment seat further includes an interface flange 503 and a hose 502 . Wherein, the interface flange 503 is preferably connected to the outlet side of the Cheney-Turner optical path structure 40 by threaded fasteners, the interface flange 503 has an annular boss and a flange inner hole 503b, and the first optical fiber installation tube 505 Two ends extend into the inner hole 503b of the interface flange 503, wherein the diameter of the interface flange inner hole 503b is greater than the diameter of the second end 505d of the optical fiber installation tube 505, so that the optical fiber installation tube 505 can be positioned relative to the interface method. Lan 503 for radial position adjustment. The hose 502 is preferably made of opaque material and has good elasticity. The two ends of the hose 502 are respectively installed on the boss of the interface flange 503 and the boss of the installation pipe 505, and are sleeved on the optical fiber installation pipe 505. Preferably, a groove 503a can be processed on the radially outer surface of the boss of the interface flange 503, and a groove 505a can be processed on the radially outer surface of the boss of the installation pipe 505, and then the hose 502 can be clamped The two ends are fixed in two grooves.

The right end of the optical fiber installation tube 505 is installed in the inner hole 501a of the fixing seat 501, and is preferably fixed by a top screw (not shown). When the fixed seat 501 drives the optical fiber installation tube 505 to move, the multimode optical fiber 504 can realize flexible movement. Through the movement of each moving structure, the incident end face 504a of the multimode optical fiber 504 can be aligned with the focal plane of the Cheney-Turner optical path structure 40. 405 coincident.

Fig. 6a and Fig. 6b show the end-view and side-view structural schematic diagrams of the multimode optical fiber head according to the present invention. As shown in the figure, the fiber incident plane 504a of the multimode fiber 504 is rectangularly distributed and embedded in the metal head 504b, wherein the number of arrays of optical fibers in the fiber incident plane 504a can be customized according to actual needs, but the size of the fiber incident plane 504a needs to be smaller than the size of the metal head 504b.

The structure of the first translation platform 70 is shown in FIGS. 7-8 . In the present invention, the second translation platform 80 may have the same mechanical structure, and as an example, only the first translation platform 70 is described.

Specifically, the first translational platform is a mechanism in which the motor drives the lead screw to rotate so that the nut pair drives the translational platform to move linearly. The first translation platform includes:

The support base 706 is provided with a linear guide rail 709 on it, and it is used for fixedly installing the first platform itself, and the linear guide rail 709 is fixedly installed on the support base 706 by means of the guide rail support member 705;

Translation platform 701, which can slide along the linear guide rail 709, for example, includes a guide rail slider (not shown);

Lead screw nut pair, which connects the support base 706 and the translation platform 701, including a nut 702 and a leading screw 703, for example, the nut 702 is fixed on the lower surface of the translation platform 701, and the leading screw 703 passes through the bearing support platform 707 The bearings 708a and 708b in (specifically including two bearing support platforms 707a and 707b located at both ends) are rotatably supported, and the bearing support platform 707 is fixedly connected to the support base 706 . One end of the lead screw 703 is connected with a motor 704 .

When the motor 704 rotates, it drives the lead screw 703 to rotate. Since the nut 702 and the lead screw 703 are connected by a screw drive, along with the rotation of the lead screw 703, the nut 702 will be displaced along the linear direction on the lead screw 703. Further, the translation platform 701 is driven to perform translation in the X or Y direction relative to the support base 706 .

FIG. 9 shows a structural diagram of a third translation platform 90 moving in the Z direction. Wherein the third translation platform 90 includes: a base plate 904, a fixed plate 902, a fixed support rod 903, a third lead screw nut pair (comprising a lead screw 907 and a nut 906), a nut support plate 909, a third translation platform 901, and a sliding support rod 908. Wherein, the fixed support rod 903 is installed on the bottom plate 904, and the fixed flat plate 902 is installed on the top of the fixed support rod 903, and the three form a stable frame structure. The leading screw 907 in the third leading screw nut pair is rotatably supported between the base plate 904 and the fixed plate 902, the motor 905 is connected with the leading screw 907 at the bottom end, and the third leading screw The nut 906 in the nut pair is fixed on the nut support plate 909, the sliding support rod 908 slides through the fixed plate 902, and the lower end of the sliding support rod 908 is fixed on the nut support plate 909 , the third translation platform 901 is fixed on the upper end of the sliding support rod 908, and the nut support plate 909, the third translation platform 901 and the sliding support rod 908 also form a stable frame structure.

When the motor 905 rotates, it drives the lead screw 907 to rotate. Since the nut 906 and the lead screw 907 are connected by a screw drive, along with the rotation of the lead screw 907, the nut 906 will move vertically on the lead screw 907. , and then drive the nut support plate 909 and the third translation platform 901 fixedly connected thereto to translate in the Z direction.

FIG. 10 shows a connection structure diagram between adjacent rotating platforms and/or translation platforms. As an example, a connection structure diagram between the third rotating platform 60 rotating around the Z direction and the first translation platform 70 translating along the X direction is shown. Wherein the area of the bottom surface of the third rotating platform 60 (i.e. the bottom surface of the fixed base plate 604) is smaller than the area of the mounting surface below it (in this example, being the upper surface of the first translation platform 70), on the side of the fixed base plate 604 Threaded holes are processed, and threaded holes are also processed on the upper surface of the translation platform 701 of the first translation platform 70. The translation platform 701 and the fixed base plate 604 can be fixed together through the right-angle blocks 110a and 110b, that is, The third rotating platform 60 is fixed to the first translation platform 70 . Similarly, in the present invention, between the optical table 10 and the first rotating platform 20 rotating around the Y direction, between the first rotating platform 20 rotating around the Y direction and the second rotating platform 30 rotating around the X direction, along Between the first translation platform 70 that translates in the X direction and the second translation platform 80 that translates in the Y direction, the second translation platform 80 that translates in the Y direction and the third translation platform that translates in the Z direction Between the platforms 90, between the third translational platform 90 and the fixed base 100 that translates along the Z direction, between the fixed base 100 and the optical table 10, etc., these right-angle blocks 110a, 110b can be used for installation and positioning .

The operation method of the multimode fiber focal plane adjusting device according to the present invention will be described below.

When in use, the rotation around the Y direction and the X direction can be realized through the first adjustment device, and the translation around the Z direction and along the three directions of XYZ can be realized through the second adjustment device, so three-dimensional can be realized between the two The three-dimensional 6-degree-of-freedom adjustment can make the focal plane of the Cheney-Turner optical path structure strictly coincide with the incident surface of the multimode fiber, so as to accurately collect the spectral signals transmitted by the Cheney-Turner optical path structure.

Those skilled in the art can easily understand that, on the premise of no conflict, the above-mentioned preferred solutions can be freely combined and superimposed.

It should be understood that the above-mentioned implementations are only exemplary rather than limiting, and those skilled in the art can make various obvious or equivalent solutions to the above-mentioned details without departing from the basic principles of the present invention. Any modification or replacement will be included in the scope of the claims of the present invention.

Claims (10)

1. it is a kind of for plasma detection multimode fibre focal plane adjusting means, which is used for the plane of incidence of multimode fibre Adjust to overlapping with the outgoing focal plane of Cheney-Tener light channel structure, it is characterised in that including multimode fibre adjust seat and The first adjusting apparatus being set up in parallel and the second adjusting apparatus, wherein, the Cheney-Tener light channel structure is installed in the first adjustment On device, the multimode fibre adjustment seat is arranged in the second adjusting apparatus, and first adjusting apparatus and described second are adjusted Device each has multiple degree of freedom, and the multimode fibre is contained in the multimode fibre adjustment seat so that multimode fibre Outlet of the plane of incidence towards the Cheney-Tener light channel structure.

2. adjusting means according to claim 1, it is characterised in that first adjusting apparatus include：Can be around first The first adjustment component that direction rotates；Second tune on the described first adjustment component, can rotating around second direction Whole group part；Wherein described first direction is different from the second direction, wherein, the Cheney-Tener light channel structure is arranged on institute State on the second adjustment component.

3. adjusting means according to claim 2, it is characterised in that the first adjustment component and/or the second adjustment group Part includes：

Fixed base plate, is provided with the first arc-shaped guide rail on the fixed base plate；

Traverser, the traverser are provided with the second arc-shaped guide rail being engaged with first arc-shaped guide rail；

The jacking block being fixedly connected on below the traverser, the jacking block have contact surface；

The push rod device being fixedly mounted on the fixed base plate, preferred electric pushrod device, the push rod device has can stretch The push rod of contracting, described in the push rod pushing tow during contact surface of jacking block, drives the traverser relative to the fixed base plate Rotate.

4. adjusting means according to claim 3, it is characterised in that the contact surface includes in smoothing junction flat of multistage Face section and/or curved sections；Preferably, the contact surface includes side plate bending and the plane positioned at the upper and lower both sides of the side plate bending Section.

5. the adjusting means according to one of claim 1-4, it is characterised in that the multimode fibre adjustment seat includes：

It is fixedly attached to the fixed seat of second adjusting apparatus；

Optical fiber installing pipe, its first end are connected to the fixed seat, and the second end goes out towards the Cheney-Tener light channel structure Mouthful, the multimode fibre gap is ordinatedly arranged in the optical fiber installing pipe, and the plane of incidence of the multimode fibre is located at institute State the second end of optical fiber installing pipe.

6. adjusting means according to claim 5, it is characterised in that the multimode fibre adjustment seat also includes flange And flexible pipe, wherein, the flange is fixedly attached to the outlet side of the Cheney-Tener light channel structure, and the optical fiber is installed Second end of pipe is stretched in the endoporus of the flange, and the external diameter at the second end of the optical fiber installing pipe is less than the interface method The diameter of blue endoporus, the flexible pipe are made up of light-proof material, and the flexible pipe is set in the periphery of the optical fiber installing pipe, institute The two ends for stating flexible pipe are connected respectively to the flange and the fixed seat.

7. the adjusting means according to one of claim 1-6, it is characterised in that second adjusting apparatus include：

3rd adjustment component, which can be rotated around third direction, be provided with the multimode fibre adjustment seat thereon；

First parallel moving mechanism, its can translation in the first direction, be provided with thereon it is described 3rd adjustment component；

Second parallel moving mechanism, its can translation in a second direction, first parallel moving mechanism is installed thereon；

3rd parallel moving mechanism, which can be provided with second parallel moving mechanism thereon along third direction translation.

8. adjusting means according to claim 7, it is characterised in that first parallel moving mechanism and/or described second flat Motivation structure includes：

Support base, which is provided with line slideway；

Translation platform, which can slide along the line slideway；

Screw pair, which connects the support base and the translation platform.

9. adjusting means according to claim 7, it is characterised in that the 3rd parallel moving mechanism includes：Base plate, fixation are flat Plate, fixed support bar, the 3rd screw pair, nut support plate, the 3rd translation platform and sliding supporting bar, wherein, it is described solid Determine support bar to be installed on the base plate, the fixed flat planar is installed on the top of the fixed support bar, the 3rd leading screw Leading screw in pair of nut is rotatably supported between the base plate and the fixed flat planar, in the 3rd screw pair Nut is fixed on the nut support plate, and the sliding supporting bar passes through the fixed flat planar, the slip with being slidably matched The lower end of support bar is fixed on the nut support plate, and the 3rd translation platform is fixed on the upper end of the sliding supporting bar.

10. adjusting means according to claim 7, it is characterised in that the area of the upper surface of first parallel moving mechanism More than the area of the bottom surface of the described 3rd adjustment component, the 3rd adjustment component is fixedly installed to described first via right angle block Parallel moving mechanism；

And/or, the area of the bottom surface of any one in the first parallel moving mechanism, the second parallel moving mechanism and the 3rd parallel moving mechanism is less than which The area of the installation surface of lower section, so as to which is fixedly installed to the installation surface of lower section via right angle block.