CN106526241B - Loading device in situ based on scanning electron microscope - Google Patents
Loading device in situ based on scanning electron microscope Download PDFInfo
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- CN106526241B CN106526241B CN201611187141.4A CN201611187141A CN106526241B CN 106526241 B CN106526241 B CN 106526241B CN 201611187141 A CN201611187141 A CN 201611187141A CN 106526241 B CN106526241 B CN 106526241B
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- 238000011065 in-situ storage Methods 0.000 title claims abstract description 16
- 238000012360 testing method Methods 0.000 claims abstract description 49
- 239000000919 ceramic Substances 0.000 claims abstract description 33
- 230000007246 mechanism Effects 0.000 claims abstract description 24
- 230000033001 locomotion Effects 0.000 claims abstract description 9
- 238000006073 displacement reaction Methods 0.000 claims description 11
- 238000007789 sealing Methods 0.000 claims description 8
- 230000008878 coupling Effects 0.000 claims description 4
- 238000010168 coupling process Methods 0.000 claims description 4
- 238000005859 coupling reaction Methods 0.000 claims description 4
- 230000009471 action Effects 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 description 8
- 239000000463 material Substances 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000010720 hydraulic oil Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000008447 perception Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Investigating Strength Of Materials By Application Of Mechanical Stress (AREA)
Abstract
The invention discloses a kind of loading device in situ based on scanning electron microscope, comprising: testing stand；First grip block, the second grip block；First link block, the second link block, the first link block are oppositely arranged with the first grip block, and the second link block is oppositely arranged with the second grip block；Piezoelectric ceramics group is set between the first link block and the first grip block；Pressure sensor is set between the second link block and the second grip block；Lead-screw drive mechanism is used to make the first link block and the second link block relative motion, so that the first grip block and the second grip block clamping test pieces, and the Mechanical Data that test specimen is measured with pressure sensor is combined by piezoelectric ceramics；Gearbox is connect with lead-screw drive mechanism, and for driving lead-screw drive mechanism；Actuator is used to drive gearbox.Enable the first grip block and the second grip block quickly close to test specimen by lead-screw drive mechanism and test specimen is loaded, so as to shorten the time of loading specimen.
Description
Technical field
The present invention relates to technical field of electromechanical control more particularly to a kind of loading devices in situ based on scanning electron microscope.
Background technique
Caused by the macroscopic failure of material is often accumulated as microcosmic failure, such as metal polycrystalline material, it destroys often
It is that comparative maturity, presently relevant are studied for the macro-mechanical property of macroscopic material in addition since intercrystalline cracking
Research vision has been increasingly turned to the micro-scale mechanics performance study of material by persons, this must be related to microdeformation measurement
The problem of.Realize that the key of microdeformation measurement is to improve the spatial resolution and displacement sensitivity of measurement.High score in recent years
The development of resolution microtechnic especially scanning electron microscope provides unprecedented development for micro-nano Experimental Mechanics measuring technique
Opportunity, spatial resolution are up to nanometer scale.Mechanical property characterization is carried out using scanning electron microscope, needs to develop corresponding load
Equipment.
However, the loading mechanism in the prior art for loading specimen is Fine Feed loading mechanism, i.e., it is close and plus
It is identical to carry its feed speed of test specimen process, and speed is lower, this certainly will extend operating time (the reasonable load of load test
Mechanism be during close to test specimen feed speed it is fast, for test specimen load when feed speed it is slow).
Summary of the invention
For above-mentioned technical problem present in existing technology, of the invention implementing provides one kind and is able to solve above-mentioned one
A or Railway Project loading device in situ based on scanning electron microscope.
In order to solve the above technical problems, the technical solution adopted by the present invention is that:
A kind of loading device in situ based on scanning electron microscope is used for loading specimen, comprising:
Testing stand；
First grip block, the second grip block；The two is oppositely arranged on the testing stand for clamping the test specimen；
First link block, the second link block, first link block are oppositely arranged with first grip block, and described second
Link block is oppositely arranged with second grip block；
Piezoelectric ceramics group is set between first link block and first grip block；
Pressure sensor is set between second link block and second grip block；
Lead-screw drive mechanism is used to make the first link block and the second link block relative motion, so that first clamping
Block and second grip block clamp the test specimen, and described in being measured by piezoelectric ceramics combination and the pressure sensor
The Mechanical Data of test specimen；
Gearbox is connect with the lead-screw drive mechanism, and for driving the lead-screw drive mechanism；
Actuator is used to drive the gearbox.
Preferably, further includes:
Sealing flange, is inside accommodated with data line, the data line respectively with the actuator, the piezoelectric ceramics group
And the pressure sensor electrical connection；
Control cabinet is electrically connected with the data line in the sealing flange, for acquiring the actuator, the piezoelectricity
The physics and Mechanical Data of ceramic group and the pressure sensor；
Computer is electrically connected with the control cabinet, for showing control cabinet physics collected and Mechanical Data,
And the physics and Mechanical Data are analyzed.
It preferably, further include grating displacement meter, the grating displacement meter is set on the testing stand, and along described first
The clamping direction of grip block and second grip block extends, to detect the decrement of the test specimen.
Preferably, the gearbox is connect with the lead-screw drive mechanism by shaft coupling.
Preferably, the piezoelectric ceramics group is spliced side by side by muti-piece piezoelectric ceramics block, and the two of the piezoelectric ceramics group
Side is fixed by the fixed device of the first piezoelectric ceramics and the fixed device of the second piezoelectric ceramics respectively.
Compared with prior art, the beneficial effect of the loading device in situ of the invention based on scanning electron microscope is: passing through silk
Thick stick transmission mechanism enables the first grip block and the second grip block quickly close to test specimen and loads to test specimen, so as to shorten
Time of loading specimen.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the loading device in situ of the invention based on scanning electron microscope.
Fig. 2 is the structural schematic diagram of the hydraulic servomechanism of the loading device in situ of the invention based on scanning electron microscope.
In figure:
1- testing stand 1；2- actuator；3- grating displacement meter；4- gearbox；5- screw body；6- bearing block；7- lead screw；8-
Second link block；The second link block of 9-；10- shaft coupling；11- sealing flange；12- control cabinet；13- computer；14- pressure passes
Sensor；15- piezoelectric ceramics group；The first grip block of 16-；The second grip block of 17-；18- test specimen；The second servo-cylinder of 19-；20-
Two servo pistons；21- second chamber；22- first chamber；23- the second servo spring；The first servo-cylinder of 24-；25- first is watched
Take piston；26- rodless cavity；27- rod chamber；28- the first servo spring；29- the first servo piston bar.
Specific embodiment
Technical solution in order to enable those skilled in the art to better understand the present invention, with reference to the accompanying drawing and specific embodiment party
Formula elaborates to the present invention.
Embodiment of the invention discloses a kind of, and the loading device in situ based on scanning electron microscope should for loading specimen 18
Loading device in situ include: testing stand 1, the first grip block 16, the second grip block 17, piezoelectric ceramics group 15, pressure sensor 14,
7 transmission mechanism of lead screw, gearbox 4, actuator 2, sealing flange 11, control cabinet 12, computer 13 and grating displacement meter 3.
Pressure testing table is for carrying and installing above-mentioned components；First grip block 16 and the second grip block 17 are oppositely arranged on testing stand 1
On be used for clamping test pieces 18；First link block 9 is oppositely arranged with the first grip block 16, the second link block 8 and the second grip block
17 are oppositely arranged；Piezoelectric ceramics group 15 is set between the first link block 9 and the first grip block 16；Piezoelectric ceramics group 15 is set to
Between first link block 9 and the first grip block 16；7 transmission mechanism of lead screw is driven by gearbox 4, to drive 9 He of the first link block
Second link block, 8 relative motion, and by piezoelectric ceramics group 15 and pressure sensor 14 so that the first grip block 16 and the second folder
17 relative motion of block is held with clamping test pieces 18, the pressure of the test specimen 18 is measured by piezoelectric ceramics group 15 and pressure sensor 14；It causes
Dynamic device 2 is for driving gearbox 4 to provide power and movement for load；Grating displacement meter 3 is set on testing stand 1, and along
The clamping direction of one grip block 16 and the second grip block 17 extends, to detect the decrement of test specimen 18.It is received in sealing flange 11
Receiving has data line, and data line is electrically connected with actuator 2, piezoelectric ceramics group 15 and pressure sensor 14 respectively；Control cabinet 12 with
Data line electrical connection in sealing flange 11, for acquiring the object of actuator 2, piezoelectric ceramics group 15 and pressure sensor 14
Reason and Mechanical Data, such as the pressure and displacement data of the revolving speed of actuator 2, test specimen 18；Computer 13 is electrically connected with control cabinet 12,
It is analyzed for the physics collected of display control case 12 and Mechanical Data, and to the physics and Mechanical Data.In this way, passing through
7 transmission mechanism of lead screw enables the first grip block 16 and the second grip block 17 quickly close to test specimen 18 and adds to test specimen 18
It carries, so as to shorten the time of loading specimen 18.
Preferably, gearbox 4 is connect with 7 transmission mechanism of lead screw by shaft coupling 10.
Preferably, piezoelectric ceramics group 15 is spliced side by side by muti-piece piezoelectric ceramics block, the two sides point of piezoelectric ceramics group 15
It is not fixed by the fixed device of the first piezoelectric ceramics and the fixed device of the second piezoelectric ceramics.
Actuator 2 can be the motor of adjustable revolving speed, when motor passes through gearbox 4 and 7 transmission mechanism of lead screw driving first
Link block 9 and the second link block 8, to drive the first grip block 16 and the second grip block 17 quickly close and pass through pressure sensor
After 14 perception contact test specimens 18, pressure sensor 14 controls motor speed by control cabinet 12 and reduces the feeding speed so that test specimen 18
Degree reduces, to realize Slow loading.
Although however, sensor can accurately measure the pressure of test specimen 18, and control cabinet 12 can be fed back in real time,
The control of control cabinet 12 is not accurately when controlling the revolving speed of motor, that is to say, that the pressure measured by the pressure sensor 14
Power increases suddenly, and when illustrating that motor speed is excessively high, for the pressure feedback to control cabinet 12, control cabinet 12 can only control motor speed drop
It is low, but the revolving speed that can not predict and calculate motor is reduced to much speed just and can make 18 uniform load of test specimen, and often exist
Under the control of control cabinet 12, the revolving speed of motor declines, and the on-load pressure of test specimen 18 is lower than required for uniform load
Pressure, so that on-load pressure be made to generate constantly fluctuation.
To solve the above problems, actuator 2 is preferably the hydraulic motor of variable displacement, specifically, 7 transmission mechanism packet of lead screw
Include lead screw 7 and the screw body 5 for forming worm drive with lead screw 7；Hydraulic motor and the first link block 9 and the second link block
Hydraulic servomechanism is provided between 8；One end of lead screw 7 is mounted on the output shaft of gearbox 4, and the other end is mounted on bearing block
On 6；Hydraulic servomechanism includes the first servo-cylinder 24 and the second servo-cylinder 19, is provided with first in the first servo-cylinder 24
Servo piston 25 is provided with the first servo piston bar 29 on first servo piston 25, which stretches out first
Servo-cylinder 24 is connect to adjust the tilt angle of swash plate with the swash plate of hydraulic motor, in the rod chamber 27 of the first servo-cylinder 24
It is provided with the first servo spring 28；Screw body 5 is set in the second servo-cylinder 19, and the both ends of screw body 5 stretch out second respectively
Servo-cylinder 19, the middle part periphery of screw body 5 form the second servo piston 20 so that the second servo-cylinder 19 is divided into the first chamber
Room 22 and second chamber 21 are provided with the second servo spring 23 in first chamber 22, and wire hole use is offered in the axial direction of screw body 5
It is worn in for lead screw 7, lead screw 7 wears the wire hole to form worm drive with screw body 5；First link block 9 and the second link block 8
It is separately positioned on the cylinder body of two the second servo-cylinders 19；The first chamber 22 and the first servo-cylinder of second servo-cylinder 19
24 rodless cavity 26 is connected to, and the second chamber 21 of the second servo-cylinder 19 is connected to the rod chamber 27 of the first servo-cylinder 24, and
The tilt angle of the swash plate of the expanding-contracting action and hydraulic motor of first servo piston bar 29 is arranged to: when the first servo piston bar 29
When overhang increases, the tilt angle of swash plate reduces, and the discharge capacity of hydraulic motor reduces, and the discharge capacity of hydraulic motor reduces so that motor
Revolving speed reduce and output torque remains unchanged, when 29 overhang of the first servo piston bar reduces, the tilt angle of swash plate increases
Greatly, the discharge capacity of hydraulic motor increases, the discharge capacity of hydraulic motor increases so that the revolving speed of motor increases and output torque remains unchanged.
In this way, first grip block 16 and the second grip block 17 are right after the first grip block 16 and the second grip block 17 are contacted with test specimen 18
Test specimen 18 pressurizes, and test specimen 18 passes through the first grip block 16 and the second folder to the reaction force of the first grip block 16 and the second clamping
It holds block 17, the first link block 9 and the second link block 8 and passes to the second servo-cylinder 19, the first chamber in the second servo-cylinder 19
Hydraulic fluid pressure in room 22 increases so that the hydraulic oil in the rodless cavity 26 of the first servo-cylinder 24 increases, in it is hydraulic
Oil the first servo piston 25 of pushing and pressing increases the overhang of the first servo piston bar 29, to make inclining for the slope of hydraulic motor
Rake angle is smaller, so that the discharge capacity of hydraulic motor be made to reduce, revolving speed is reduced, by 7 transmission mechanism of speed changer and lead screw, so that
The first link block 9 and the second link block 8 and the first folder in the case where pressure the torque of hydraulic motor (because constant) are not changed
The movement speed for holding block 16 and the second grip block 17 reduces, thus make the first grip block 16 and the second grip block 17 to test specimen 18 into
The slow uniform pressurization of row, when hydraulic motor makes the movement speed of the first grip block 16 and the second grip block 17 too small and pressure has
When declined, the pressure in first chamber 22 and rodless cavity 26 becomes smaller, and the overhang of the first servo piston bar 29 becomes smaller, hydraulic horse
The discharge capacity reached starts to increase, to make the movement speed of the first grip block 16 and the second grip block 17 increase, to meet slow
The condition of uniform pressurization.
In this embodiment, the first grip block 16 is adjusted using the feedback of hydraulic fluid pressure in hydraulic system in the present invention
Speed with the second grip block 17 is to realize slow uniform pressurization, so as to obtain the accurate true Mechanical Data of test specimen 18,
And the time of load test will not be extended.
Above embodiments are only exemplary embodiment of the present invention, are not used in the limitation present invention, protection scope of the present invention
It is defined by the claims.Those skilled in the art can within the spirit and scope of the present invention make respectively the present invention
Kind modification or equivalent replacement, this modification or equivalent replacement also should be regarded as being within the scope of the present invention.
Claims (5)
1. a kind of loading device in situ based on scanning electron microscope is used for loading specimen characterized by comprising
Testing stand；
First grip block, the second grip block；The two is oppositely arranged on the testing stand for clamping the test specimen；
First link block, the second link block, first link block are oppositely arranged with first grip block, second connection
Block is oppositely arranged with second grip block；
Piezoelectric ceramics group is set between first link block and first grip block；
Pressure sensor is set between second link block and second grip block；
Lead-screw drive mechanism is used to make the first link block and the second link block relative motion so that first grip block and
Second grip block clamps the test specimen, and measures the test specimen by piezoelectric ceramics combination and the pressure sensor
Mechanical Data；
Gearbox is connect with the lead-screw drive mechanism, and for driving the lead-screw drive mechanism；
Actuator is used to drive the gearbox；
The actuator is the hydraulic motor of variable displacement, and lead-screw drive mechanism includes lead screw and screw body；Hydraulic motor with
Hydraulic servomechanism is provided between first link block and the second link block；Hydraulic servomechanism includes the first servo-cylinder and the
Two servo-cylinders are provided with the first servo piston in the first servo-cylinder, the first servo piston are provided on the first servo piston
Bar, the first servo piston bar stretches out the first servo-cylinder and the swash plate of hydraulic motor is connected to adjust the tilt angle of swash plate, the
The first servo spring is provided in the rod chamber of one servo-cylinder；Screw body is set in the second servo-cylinder, the axis of screw body
Wire hole is offered upwards, and the middle part periphery of screw body forms the second servo piston so that the second servo-cylinder is divided into first chamber
And second chamber, the second servo spring is provided in first chamber, lead screw wears the wire hole to form worm drive with screw body；
First link block and the second link block are separately positioned on the cylinder body of two the second servo-cylinders；First chamber of the second servo-cylinder
Room is connected to the rodless cavity of the first servo-cylinder, and the rod chamber of the second chamber of the second servo-cylinder and the first servo-cylinder connects
It is logical, and the tilt angle of the swash plate of the expanding-contracting action and hydraulic motor of the first servo piston bar is arranged to: when the first servo piston
When bar overhang increases, the tilt angle of swash plate reduces, and the discharge capacity of hydraulic motor reduces, and the discharge capacity of hydraulic motor reduces so that horse
The revolving speed reached reduces and output torque remains unchanged, and when the first servo piston bar overhang reduces, the tilt angle of swash plate increases
Greatly, the discharge capacity of hydraulic motor increases, the discharge capacity of hydraulic motor increases so that the revolving speed of motor increases and output torque remains unchanged.
2. the loading device in situ according to claim 1 based on scanning electron microscope, which is characterized in that further include:
Sealing flange, is inside accommodated with data line, the data line respectively with the actuator, the piezoelectric ceramics group and
The pressure sensor electrical connection；
Control cabinet is electrically connected with the data line in the sealing flange, for acquiring the actuator, the piezoelectric ceramics
The physics and Mechanical Data of group and the pressure sensor；
Computer is electrically connected with the control cabinet, for showing control cabinet physics collected and Mechanical Data, and it is right
The physics and Mechanical Data are analyzed.
3. the loading device in situ according to claim 1 based on scanning electron microscope, which is characterized in that further include pattern displacement
Meter, the grating displacement meter are set on the testing stand, and along the clamping of first grip block and second grip block
Direction extends, to detect the decrement of the test specimen.
4. the loading device in situ according to claim 1 based on scanning electron microscope, which is characterized in that the gearbox and institute
Lead-screw drive mechanism is stated to connect by shaft coupling.
5. the loading device in situ according to claim 1 based on scanning electron microscope, which is characterized in that the piezoelectric ceramics group
Be spliced side by side by muti-piece piezoelectric ceramics block, the two sides of the piezoelectric ceramics group respectively by the fixed device of the first piezoelectric ceramics and
The fixed device of second piezoelectric ceramics is fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611187141.4A CN106526241B (en) | 2016-12-20 | 2016-12-20 | Loading device in situ based on scanning electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611187141.4A CN106526241B (en) | 2016-12-20 | 2016-12-20 | Loading device in situ based on scanning electron microscope |
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| Publication Number | Publication Date |
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| CN106526241A CN106526241A (en) | 2017-03-22 |
| CN106526241B true CN106526241B (en) | 2019-08-06 |
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| JPH0972839A (en) * | 1995-09-07 | 1997-03-18 | Ishikawajima Harima Heavy Ind Co Ltd | Fatigue test equipment |
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| CN106526241A (en) | 2017-03-22 |
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Effective date of registration: 20190716 Address after: 225600 Baqiao Town Industrial Park, Gaoyou City, Yangzhou City, Jiangsu Province Applicant after: Gaoyou Sina Chemical Machinery Equipment Co., Ltd. Address before: Ji'nan City, Shandong province 250000 nanxinzhuang Road No. 336 Applicant before: University of Jinan |
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