CN106517759A - Homogenizing preparation method of rare-earth-doped quartz glass rods - Google Patents
Homogenizing preparation method of rare-earth-doped quartz glass rods Download PDFInfo
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Abstract
一种稀土掺杂石英玻璃棒的均化制备方法,该方法利用高温微区加热工艺,利用旋转剪切应力,在富氧气氛下对玻璃棒进行二次熔融均化处理,提高了芯棒玻璃的均匀性。该方法利用富氧气氛减少低价态杂质离子的含量,有利于减少玻璃的损耗。
A method for homogenizing rare earth-doped quartz glass rods. The method uses a high-temperature micro-zone heating process, utilizes rotational shear stress, and performs secondary melting and homogenization treatment on the glass rods in an oxygen-enriched atmosphere, thereby improving the core rod glass. uniformity. The method utilizes an oxygen-enriched atmosphere to reduce the content of low-valence impurity ions, which is beneficial to reducing glass loss.
Description
技术领域technical field
本发明涉及光纤预制棒和激光玻璃,特别是一种大模场掺稀土石英光纤预制棒芯棒的制备方法及石英基激光玻璃的均化制备方法。The invention relates to an optical fiber prefabricated rod and laser glass, in particular to a preparation method of a large-mode field-doped rare earth-doped rare earth quartz optical fiber prefabricated rod core rod and a homogenized preparation method of quartz-based laser glass.
背景技术Background technique
为满足工业加工应用的更高激光功率的要求,同时又降低稀土掺杂石英光纤的单位面积激光承载功率,减少非线性效应和激光损伤,高功率激光光纤正在朝着大模场光纤的方向发展。自2004年以来,英国南安普顿大学(Optics Express,2004,Vol.12,No.25,pp.6088-6092)和德国Jena光子技术研究所联合Heraeus公司(SPIE会议文集,2008年的6873卷,pp.687311-1-9)进行了大模场掺Yb特种光纤的研制工作。In order to meet the higher laser power requirements of industrial processing applications, while reducing the laser power per unit area of rare earth-doped silica fibers, reducing nonlinear effects and laser damage, high-power laser fibers are developing in the direction of large-mode-field fibers. . Since 2004, the University of Southampton (Optics Express, 2004, Vol.12, No.25, pp.6088-6092) and the German Jena Photonic Technology Institute have joined forces with Heraeus (SPIE Conference Proceedings, Volume 6873 in 2008) , pp.687311-1-9) carried out the development of large mode field Yb-doped special optical fiber.
目前较成熟的稀土掺杂石英光纤预制棒的制备方法是改进的化学气相沉积(MCVD)结合溶液浸泡法。该方法的缺点是:由于掺杂均匀性和掺杂过程应力控制的限制,很难实现大芯径的稀土掺杂石英芯棒的制备。2010年公开的德国Heraeus公司和德国Jena光子技术研究所联合申请的一项美国专利(US 2010/0251771 A1)提出了一种掺杂石英玻璃的制备方法。该方法从含50wt%氧化硅纳米粉的氨水溶液出发,加入AlCl3,YbCl3的水溶液,形成均匀掺杂Al3+,Yb3+离子的SiO2颗粒。通过造粒、干燥、等静压成型、脱水、烧结和玻璃化,形成均匀掺杂的石英玻璃。采用该方法可以制备长度200mm,直径15mm的掺Yb石英玻璃芯棒,并用它制备了1200nm处背底损耗为50dB/km的掺Yb石英大模场棒状光纤。但这种方法的局限性在于只能实现Yb3+,Al3+共掺石英玻璃芯棒的制备,不能实现Yb3+,Al3+,P5+共掺,从而较难控制高功率激光输出应用情况下的光致暗化效应。并且该方法是用氧化硅纳米粉固相出发,较难从根本上解决芯棒玻璃的光学均匀性问题。At present, the relatively mature preparation method of rare earth doped silica optical fiber preform is the improved chemical vapor deposition (MCVD) combined with solution immersion method. The disadvantage of this method is: due to the limitation of doping uniformity and stress control in the doping process, it is difficult to realize the preparation of a rare earth doped quartz core rod with a large core diameter. A United States patent (US 2010/0251771 A1) jointly applied by the Heraeus company of Germany and the Institute of Photon Technology of Germany Jena, which was published in 2010, proposes a method for preparing doped quartz glass. The method starts from an ammonia solution containing 50 wt% silicon oxide nanopowder, and adds an aqueous solution of AlCl 3 and YbCl 3 to form SiO 2 particles uniformly doped with Al 3+ and Yb 3+ ions. Uniformly doped quartz glass is formed by granulation, drying, isostatic pressing, dehydration, sintering and vitrification. Using this method, a Yb-doped quartz glass core rod with a length of 200mm and a diameter of 15mm can be prepared, and a Yb-doped quartz large-mode-field rod optical fiber with a background loss of 50dB/km at 1200nm can be prepared by using it. But the limitation of this method is that it can only realize the preparation of Yb 3+ , Al 3+ co-doped quartz glass core rod, and cannot realize Yb 3+ , Al 3+ , P 5+ co-doping, so it is difficult to control high-power laser Photodarkening effect in case of output application. Moreover, this method starts from the solid phase of silicon oxide nanopowder, which is difficult to fundamentally solve the problem of optical uniformity of the core rod glass.
2013年3月公开的长飞光纤光缆有限公司的发明专利“一种稀土均匀掺杂预制棒芯棒及其制备”(公开号:CN 102992613 A)。该方法采用10-200nm的纳米氧化硅粉作为原料,溶解在pH=7-11、含掺杂离子的水或乙醇溶液中,经过脱水、造粒处理后得到含掺杂物的氧化硅粉。采用等静压和气氛烧结获得掺稀土离子的石英玻璃芯棒。该发明获得了折射率波动在±10%以内的芯棒玻璃。但该发明采用的是纳米氧化硅原料,不是从纯溶液法制备粉末,难以从根本上解决有多种掺杂离子情况下的均匀性问题。The invention patent of YOFC Optical Fiber and Cable Co., Ltd. published in March 2013, "A Rare Earth Uniformly Doped Prefabricated Rod and Its Preparation" (Publication No.: CN 102992613 A). The method adopts 10-200nm nano-silica powder as a raw material, dissolves it in water or ethanol solution with pH=7-11 and contains dopant ions, and obtains the dopant-containing silicon oxide powder after dehydration and granulation. The quartz glass core rod doped with rare earth ions is obtained by isostatic pressing and atmosphere sintering. The invention obtains a core rod glass whose refractive index fluctuation is within ±10%. However, this invention uses nano-silicon oxide raw materials instead of preparing powder from a pure solution method, so it is difficult to fundamentally solve the uniformity problem in the case of multiple doping ions.
2013年本发明人所在课题组发展了一种以溶胶凝胶工艺制备大模场掺镱光纤预制棒芯棒的技术,并申请了发明专利“掺Yb石英光纤预制棒芯棒的制备方法”(专利公开号103373811A)。该发明专利着重介绍了大尺寸的掺镱芯棒玻璃的制备方法,其不足之处是玻璃中的二价镱离子及低价杂质离子的含量仍较高,导致最终的光纤损耗仍处于较高水平。另一方面,稀土掺杂石英玻璃的光学均匀性仍较差,无法满足激光玻璃介质的应用要求。In 2013, the inventor's research group developed a technology for preparing a large-mode-field ytterbium-doped optical fiber preform core rod by a sol-gel process, and applied for the invention patent "Preparation method of Yb-doped silica optical fiber preform core rod" ( Patent Publication No. 103373811A). This invention patent focuses on the preparation method of large-sized ytterbium-doped core rod glass. The disadvantage is that the content of divalent ytterbium ions and low-valent impurity ions in the glass is still high, resulting in a high final optical fiber loss. Level. On the other hand, the optical uniformity of rare earth-doped quartz glass is still poor, which cannot meet the application requirements of laser glass media.
发明内容Contents of the invention
本发明针对上述现有技术的不足和缺陷,根据高功率光纤激光器和固态激光器发展的需求,提供一种稀土掺杂石英玻璃棒的均化制备方法。应用该方法获得的稀土掺杂石英玻璃棒既可用来制备大尺寸、高均匀性大模场双包层掺稀土石英光纤,又可制备光学均匀性更高的稀土掺杂石英玻璃。Aiming at the deficiencies and defects of the above-mentioned prior art, the present invention provides a method for homogenizing rare earth-doped quartz glass rods according to the development requirements of high-power fiber lasers and solid-state lasers. The rare earth-doped quartz glass rod obtained by applying the method can be used not only to prepare a large-size, high-uniformity large-mode-field double-clad rare-earth-doped silica optical fiber, but also to prepare rare-earth-doped silica glass with higher optical uniformity.
本发明的技术解决方案为:Technical solution of the present invention is:
一种稀土掺杂石英玻璃棒的均化制备方法,包括下列步骤:A method for homogenizing a rare earth-doped quartz glass rod, comprising the following steps:
①将基于粉体烧结工艺制备的稀土掺杂石英玻璃加工成直径6-10mm、长度50-200mm的玻璃棒置于玻璃灯工车床上利用氢氧焰进行微区加热,调整火焰使得加热高温区长度小于1cm,按照化学反应比例关系,氢气和氧气按照2比1的关系反应生成水分,为了获取富氧气氛,需要增加氧气流量,使氧气与氢气的流量比例从常规的0.5提高到1,加热温度至2000℃-2100℃范围,利用车床旋转对高温加热的玻璃区域进行二次高温均化处理,车床转动速度以稀土掺杂石英玻璃不会因重力软化掉落为宜,通常旋转速度为60-70转/分钟,氢氧焰以一定的速度从一端向另一端缓慢往复移动加热,通常火焰移动速度为30-40mm/分钟;①Process the rare earth-doped quartz glass prepared based on the powder sintering process into a glass rod with a diameter of 6-10mm and a length of 50-200mm, place it on a glass lamp lathe, and use a hydrogen-oxygen flame to heat the micro-area, and adjust the flame to heat the high-temperature area The length is less than 1cm. According to the chemical reaction ratio, hydrogen and oxygen react to form water according to the relationship of 2 to 1. In order to obtain an oxygen-rich atmosphere, it is necessary to increase the flow rate of oxygen to increase the flow ratio of oxygen to hydrogen from the conventional 0.5 to 1. The temperature ranges from 2000°C to 2100°C. Use the lathe to rotate the high-temperature heated glass area to perform a second high-temperature homogenization treatment. The rotation speed of the lathe should be such that the rare earth-doped quartz glass will not soften and fall due to gravity. Usually, the rotation speed is 60 -70 revolutions per minute, the hydrogen-oxygen flame slowly reciprocates from one end to the other for heating at a certain speed, usually the flame moving speed is 30-40mm/min;
②上述稀土掺杂石英玻璃棒往复移动加热均化的次数为10次-15次;②The number of reciprocating heating and homogenization of the above-mentioned rare earth-doped quartz glass rod is 10-15 times;
③将氢氧焰温度调至1500℃-1600℃左右,对上述均化完成的稀土掺杂石英玻璃棒从一端向另一端移动加热进行退火处理,火焰移动速度为80-100mm/分钟;③ Adjust the temperature of the hydrogen-oxygen flame to about 1500°C-1600°C, move and heat the above-mentioned homogenized rare earth-doped quartz glass rod from one end to the other end for annealing treatment, and the flame moving speed is 80-100mm/min;
④完成玻璃退火后,取下稀土掺杂石英玻璃棒,得到高光学均匀性的稀土掺杂石英玻璃棒。④ After the glass annealing is completed, the rare earth doped quartz glass rod is removed to obtain a rare earth doped quartz glass rod with high optical uniformity.
将上述二次加热均化后的稀土掺杂石英玻璃棒进行光学加工得到实际应用所需直径的稀土掺杂石英玻璃棒,该玻璃棒既可以用作光纤预制棒芯棒,也可用作棒状激光玻璃介质。Optically process the rare earth-doped quartz glass rod after the above secondary heating and homogenization to obtain a rare earth-doped quartz glass rod with a diameter required for practical application. The glass rod can be used as an optical fiber preform core rod or as a rod Laser glass medium.
本发明的有益效果:Beneficial effects of the present invention:
1、可以有效提高稀土掺杂石英玻璃的光学均匀性;1. It can effectively improve the optical uniformity of rare earth doped quartz glass;
2、可以有效减少低价态稀土离子及杂质离子的含量,利于发光性能的提高及光纤损耗的降低;2. It can effectively reduce the content of low-valent rare earth ions and impurity ions, which is beneficial to the improvement of luminescence performance and the reduction of optical fiber loss;
附图说明Description of drawings
图1是实施例1掺镱石英玻璃棒微区加热二次熔融均化前后显微荧光照片对比,其中,a为实施例1掺镱石英玻璃棒微区加热二次熔融均化前微荧光照片,b为实施例1掺镱石英玻璃棒微区加热二次熔融均化后微荧光照片。Fig. 1 is a comparison of the microfluorescent photos before and after secondary melting and homogenization of the ytterbium-doped quartz glass rod in Example 1, wherein a is the micro-fluorescent photo of the ytterbium-doped quartz glass rod micro-region heating in Example 1 before the second melting and homogenization , b is the micro-fluorescent photo of Example 1 after the ytterbium-doped quartz glass rod micro-region is heated for the second time and melted and homogenized.
图2是应用例掺镱芯棒微区加热二次熔融均化前后制备得到的稀土掺杂石英光纤的显微照片,其中,a为应用例掺镱芯棒微区加热二次熔融均化前制备得到的稀土掺杂石英光纤的显微照片,b为应用例掺镱芯棒微区加热二次熔融均化后制备得到的稀土掺杂石英光纤的显微照片。Figure 2 is a photomicrograph of the rare earth-doped silica fiber prepared before and after secondary melting and homogenization of the ytterbium-doped mandrel in the application example. The photomicrograph of the prepared rare earth-doped silica fiber, b is the photomicrograph of the rare earth-doped silica fiber prepared after secondary melting and homogenization of the ytterbium-doped mandrel micro-region heating in the application example.
具体实施方式detailed description
以下结合附图和实施例分别就本发明做进一步说明。The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
本发明中将已制备的稀土掺杂石英玻璃棒置于玻璃灯工车床上,利用氢氧焰对芯棒玻璃局部微区进行加热,加热时芯棒处于转动状态。加热时使氧气过量,获得富氧气氛,在掺杂石英玻璃软化状态下,对玻璃进行氧化及高温均化处理,从而有效减少玻璃内部的低价态离子含量,同时大幅提高玻璃的均匀性。In the present invention, the prepared rare-earth-doped quartz glass rod is placed on a glass lathe, and an oxygen-hydrogen flame is used to heat a local micro-region of the mandrel glass, and the mandrel is in a rotating state during heating. Excessive oxygen is obtained during heating to obtain an oxygen-rich atmosphere. In the softened state of the doped quartz glass, the glass is oxidized and high-temperature homogenized, thereby effectively reducing the content of low-valent ions inside the glass and greatly improving the uniformity of the glass.
实施例1:Example 1:
本实施例利用粉体烧结工艺烧制的掺镱石英玻璃棒,进行高温微区加热,均化制备高质量稀土掺杂石英玻璃棒。该方法包括下列步骤:In this embodiment, the ytterbium-doped quartz glass rod fired by the powder sintering process is used for high-temperature micro-zone heating to homogenize and prepare a high-quality rare earth-doped quartz glass rod. The method includes the following steps:
①将基于粉体烧结工艺制备的稀土掺杂石英玻璃加工成直径10mm、长度50mm的玻璃棒置于玻璃灯工车床上利用氢氧焰进行微区加热,调整火焰使得加热高温区长度小于1cm,按照化学反应比例关系,氢气和氧气按照2比1的关系反应生成水分,为了获取富氧气氛,需要增加氧气流量,使氧气与氢气的流量比例从常规的0.5提高到1,加热温度至2000℃,利用车床旋转对高温加热的玻璃区域进行二次高温均化处理;车床转动速度为60转/分钟,氢氧焰以30mm/分钟的速度从一端向另一端缓慢往复移动加热。①Process the rare earth-doped quartz glass prepared based on the powder sintering process into a glass rod with a diameter of 10mm and a length of 50mm, place it on a glass lamp lathe, and use a hydrogen-oxygen flame for micro-area heating. Adjust the flame so that the length of the high-temperature heating zone is less than 1cm. According to the chemical reaction ratio, hydrogen and oxygen react to form water according to the ratio of 2 to 1. In order to obtain an oxygen-rich atmosphere, it is necessary to increase the oxygen flow rate, so that the flow ratio of oxygen and hydrogen gas is increased from the conventional 0.5 to 1, and the heating temperature is 2000 °C , using lathe rotation to carry out secondary high-temperature homogenization treatment on the high-temperature heated glass area; the lathe rotation speed is 60 rpm, and the hydrogen-oxygen flame slowly reciprocates from one end to the other end at a speed of 30 mm/min for heating.
②上述稀土掺杂石英玻璃棒往复移动加热均化15次,停止加热,完成高温均化过程。② The above-mentioned rare earth-doped quartz glass rod reciprocates, heats and homogenizes for 15 times, stops heating, and completes the high-temperature homogenization process.
③将氢氧焰温度调至1600℃左右,对上述均化完成的稀土掺杂石英玻璃棒从一端向另一端移动加热进行低温退火处理,火焰移动速度为80mm/分钟。③ Adjust the temperature of the hydrogen-oxygen flame to about 1600°C, move and heat the homogenized rare earth-doped quartz glass rod from one end to the other end for low-temperature annealing treatment, and the flame moving speed is 80mm/min.
④完成玻璃退火后,取下稀土掺杂石英玻璃棒,即制备得到高光学均匀性的稀土掺杂石英玻璃棒。④ After the glass annealing is completed, the rare earth-doped quartz glass rod is removed to prepare a rare earth-doped quartz glass rod with high optical uniformity.
对二次加热均化前后的芯棒玻璃进行显微荧光分析,结果如图1所示。可见经过高温微区加热处理后的玻璃发光变得更为均匀。Microfluorescence analysis was performed on the core rod glass before and after secondary heating and homogenization, and the results are shown in Figure 1. It can be seen that the luminescence of the glass after the high-temperature micro-area heating treatment becomes more uniform.
实施例2:Example 2:
本实施例利用粉体烧结工艺烧制的掺镱石英玻璃棒,进行高温微区加热,均化制备高质量稀土掺杂石英玻璃棒。该方法包括下列步骤:In this embodiment, the ytterbium-doped quartz glass rod fired by the powder sintering process is used for high-temperature micro-zone heating to homogenize and prepare a high-quality rare earth-doped quartz glass rod. The method includes the following steps:
①将基于粉体烧结工艺制备的稀土掺杂石英玻璃加工成直径6mm、长度200mm的玻璃棒置于玻璃灯工车床上利用氢氧焰进行微区加热,调整火焰使得加热高温区长度小于1cm,按照化学反应比例关系,氢气和氧气按照2比1的关系反应生成水分,为了获取富氧气氛,需要增加氧气流量,使氧气与氢气的流量比例从常规的0.5提高到1,加热温度至2100℃,利用车床旋转对高温加热的玻璃区域进行二次高温均化处理。车床转动速度为80转/分钟,氢氧焰以40mm/分钟的速度从一端向另一端缓慢往复移动加热。①Process the rare earth-doped quartz glass prepared based on the powder sintering process into a glass rod with a diameter of 6mm and a length of 200mm, place it on a glass lamp lathe, and use a hydrogen-oxygen flame for micro-area heating. Adjust the flame so that the length of the heating high-temperature zone is less than 1cm. According to the chemical reaction ratio, hydrogen and oxygen react to form water according to the ratio of 2 to 1. In order to obtain an oxygen-rich atmosphere, it is necessary to increase the flow rate of oxygen, so that the flow ratio of oxygen and hydrogen is increased from the conventional 0.5 to 1, and the heating temperature is 2100°C , using lathe rotation to perform secondary high-temperature homogenization treatment on the high-temperature heated glass area. The turning speed of the lathe is 80 rpm, and the oxyhydrogen flame slowly reciprocates from one end to the other end for heating at a speed of 40mm/min.
⑤上述稀土掺杂石英玻璃棒往复移动加热均化10次,停止加热,完成高温均化过程。⑤ The above-mentioned rare earth-doped quartz glass rod reciprocates, heats and homogenizes 10 times, stops heating, and completes the high-temperature homogenization process.
⑥将氢氧焰温度调至1500℃左右,对上述均化完成的稀土掺杂石英玻璃棒从一端向另一端移动加热进行低温退火处理,火焰移动速度为100mm/分钟。⑥ Adjust the temperature of the hydrogen-oxygen flame to about 1500°C, move and heat the homogenized rare earth-doped quartz glass rod from one end to the other end for low-temperature annealing treatment, and the flame moving speed is 100mm/min.
⑦完成玻璃退火后,取下稀土掺杂石英玻璃棒,即制备得到高光学均匀性的稀土掺杂石英玻璃棒。⑦ After the glass annealing is completed, the rare earth-doped quartz glass rod is removed to prepare a rare earth-doped quartz glass rod with high optical uniformity.
实施例3:Example 3:
本实施例是利用粉体烧结工艺烧制的掺钕石英玻璃棒,进行高温微区加热,均化制备高质量钕掺杂石英玻璃棒。该方法包括下列步骤:In this embodiment, high-quality Nd-doped quartz glass rods are prepared by homogenizing Nd-doped quartz glass rods fired by powder sintering technology for high-temperature micro-zone heating. The method includes the following steps:
①将基于粉体烧结工艺制备的钕掺杂石英玻璃加工成直径6mm、长度100mm的玻璃棒置于玻璃灯工车床上利用氢氧焰进行微区加热,调整火焰使得加热高温区长度小于1cm,按照化学反应比例关系,氢气和氧气按照2比1的关系反应生成水分,为了获取富氧气氛,需要增加氧气流量,使氧气与氢气的流量比例从常规的0.5 提高到1,加热温度至2000℃,利用车床旋转对高温加热的玻璃区域进行二次高温均化处理。车床转动速度为60转/分钟,氢氧焰以30mm/分钟的速度从一端向另一端缓慢往复移动加热;① Process the neodymium-doped quartz glass prepared based on the powder sintering process into a glass rod with a diameter of 6mm and a length of 100mm, place it on a glass lamp lathe, and use a hydrogen-oxygen flame for micro-area heating. Adjust the flame so that the length of the high-temperature heating zone is less than 1cm. According to the chemical reaction ratio, hydrogen and oxygen react to form water according to the ratio of 2 to 1. In order to obtain an oxygen-rich atmosphere, it is necessary to increase the flow rate of oxygen, so that the flow ratio of oxygen and hydrogen is increased from the conventional 0.5 to 1, and the heating temperature is 2000°C , using lathe rotation to perform secondary high-temperature homogenization treatment on the high-temperature heated glass area. The turning speed of the lathe is 60 rpm, and the hydrogen-oxygen flame slowly reciprocates from one end to the other end at a speed of 30 mm/min for heating;
②上述稀土掺杂石英玻璃棒往复移动加热均化10次,停止加热,完成高温均化过程;②The above-mentioned rare earth-doped quartz glass rod reciprocates, heats and homogenizes 10 times, stops heating, and completes the high-temperature homogenization process;
③将氢氧焰温度调至1600℃左右,对上述均化完成的稀土掺杂石英玻璃棒从一端向另一端移动加热进行低温退火处理,火焰移动速度为100mm/分钟;③ Adjust the temperature of the hydrogen-oxygen flame to about 1600°C, move and heat the homogenized rare earth-doped quartz glass rod from one end to the other end for low-temperature annealing treatment, and the flame moving speed is 100mm/min;
④完成玻璃退火后,取下钕掺杂石英玻璃棒,即得到高光学均匀性的钕掺杂石英玻璃棒。④ After the glass annealing is completed, the neodymium-doped quartz glass rod is removed to obtain a neodymium-doped quartz glass rod with high optical uniformity.
应用实施例Application example
利用实施例1均化制备的掺镱石英玻璃棒作为芯棒,用套管法拉制光纤,对比测试均化前后玻璃拉制光纤的显微形貌,如图2所示。可见经过高温微区加热处理后的芯棒玻璃较之未处理的芯棒所制备的光纤内部光学均匀性明显获得了提高。Using the ytterbium-doped silica glass rod homogenized in Example 1 as the core rod, the optical fiber was drawn by the sleeve method, and the microscopic appearance of the glass drawn optical fiber before and after homogenization was compared and tested, as shown in FIG. 2 . It can be seen that the internal optical uniformity of the optical fiber prepared by the core rod glass after high-temperature micro-zone heating treatment is significantly improved compared with the untreated core rod.
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