CN106500911B - Pressure gauge calibration method based on gas absorption spectral line pressure broadening effect - Google Patents
Pressure gauge calibration method based on gas absorption spectral line pressure broadening effect Download PDFInfo
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- 238000010521 absorption reaction Methods 0.000 title claims abstract description 30
- 238000000034 method Methods 0.000 title claims abstract description 22
- 230000003595 spectral effect Effects 0.000 title claims abstract description 16
- 230000000694 effects Effects 0.000 title claims abstract description 11
- 238000000862 absorption spectrum Methods 0.000 claims abstract description 20
- 238000002310 reflectometry Methods 0.000 claims abstract description 4
- 238000012360 testing method Methods 0.000 claims abstract description 4
- 238000005259 measurement Methods 0.000 claims description 13
- 230000003287 optical effect Effects 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 7
- 230000008859 change Effects 0.000 claims description 5
- 238000001228 spectrum Methods 0.000 claims description 5
- 230000007423 decrease Effects 0.000 claims description 4
- 239000007789 gas Substances 0.000 description 28
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 230000008901 benefit Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000007689 inspection Methods 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 230000009878 intermolecular interaction Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 238000000180 cavity ring-down spectroscopy Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000012372 quality testing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
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Abstract
The invention discloses a pressure gauge calibration method based on a gas absorption spectral line pressure broadening effect. The tunable laser light source outputs light beams to enter a gas cell with plano-concave high-reflectivity cavity mirrors at two ends, and gas with narrow absorption spectral lines in the tuning range of the laser is filled in the gas cell. And tuning the output wavelength of the laser to obtain the gas absorption spectrum. And fitting the measured gas spectral line to obtain the line width of the gas spectral line. And obtaining the pressure parameter in the gas pool in the testing process by utilizing the relation between the line width of the spectral line and the pressure. The invention can simultaneously calibrate a plurality of pressure gauges to be calibrated in real time by utilizing the relation between the pressure broadening line width and the pressure intensity of the gas with the narrow absorption spectrum line, has simple operation and does not need to periodically calibrate a calibrating instrument.
Description
Technical field
The present invention relates to gauge calibration technical fields, in particular to a kind of to be based on gas absorption spectrum line pressure broadening effect
Gauge calibration method.
Background technique
Pressure be in the hard-core technologies fields such as biology, medical treatment, aerospace, ocean engineering and nuclear power source one it is important
Technological parameter.Pressure sensor is most widely used sensor in current pressure measurement, with small in size, frequency response is high
Advantage.With the development of national economy, increasingly higher demands are proposed to the precision of pressure sensor.The stability of environment,
Calibrating standard and precision are directly related to product quality, detection quality good or not.Therefore, have to the accurate alignment of pressure sensor
Highly important application value.Currently, pressure sensor is all demarcated in quality testing department, again in actual condition after the completion of calibration
Middle use, sensor can inevitably introduce error in transport, installation process.In practical application, tester is often desirable in work
The calibration of pressure sensor is completed at condition scene, because environment, temperature locating for sensor are all consistent with when using at this time, and is not necessarily to
Inspection greatly improves work efficiency.Traditional calibration method mainly utilizes piston gage or digital pressure to control
Device examines and determine pressure gauge.Standard piston pressure gauge is that the gravity of the power and counterweight acted on piston using pressure is equal
The instrument of weighing apparatus measurement pressure.But piston manometer calibration method to high-precision, small-range pressure vacuum ga(u)ge detectability by
Pressure generates scope limitation, produces minimum pressure between 1-20Kpa.In addition, this method is easily affected by human factors,
Accuracy is not easy to guarantee, and large labor intensity, working condition are poor, calibrating efficiency is low.In many application fields, the detection of low pressure
It is very crucial, such as the measurement of Boltzmann constant.It needs to measure the how general of atom or molecule in a low voltage state
Strangle line width.Digital pressure controller goes control pressure source to calibrate pressure gauge to be checked by the pressure gauge of higher precision.
However, calibrated pressure sensor is placed or is made after using for a period of time, and due to the influence of environmental condition, drift when can generate,
The parameters such as zero point, sensitivity, non-linear can all change, in order to guarantee that precision needs frequent calibration.
In recent years, molecular spectrum is in absorptiometry, Chemical Kinetics and molecular structure and intermolecular interaction
Etc. application obtain common concern, more and more attention are also received to the research of optic spectrum line.Gas molecule spectrum
Line style and line width depend on the environmental factors such as intermolecular interaction and temperature, air pressure.Therefore, the line of gas absorption spectra is utilized
Wide and pressure relationship can calibrate pressure gauge to be calibrated.Optical cavity ring-down technology is as a kind of highly sensitive spectrum inspection
Survey technology is widely used in field of gas detection.It is swung intracavitary ring-down time and determines cavity total declining by measurement laser
Loss, it is intracavitary be filled with absorbing medium when can measure its absorption spectrum information, so as to avoid laser beam self-strength drift
It influences.High-precision, small-range pressure gauge can be realized based on cavity ring down spectroscopy technology and gas absorption spectra pressure broadening effect
Accurate calibration.Since gas sorbing characteristics do not change over time, this method used is without doing periodic calibration, anti-interference ability
By force.
Summary of the invention
The technical problem to be solved by the present invention is for Conventional gauges calibration instrument to high-precision, the vacuum of small-range
The limited problem of pressure gauge detection range proposes a kind of gauge calibration side based on gas absorption spectrum line pressure broadening effect
Method has the advantages that structure is simple and convenient to operate, is low in cost and can realize multiple pressure gauges while calibrate.
The technical solution adopted by the present invention to solve the technical problems is: one kind is imitated based on gas absorption spectrum line pressure broadening
The gauge calibration method answered realizes that steps are as follows:
Step (1), tunable wave length laser light incident to both ends are equipped with the gas cell of plano-concave high reflectance hysteroscope, and two plano-concaves are high
Reflecting mirror concave surface is opposite to be constituted stable declining and swings chamber, part light be coupled into from one end it is intracavitary, other end output light through poly-
Focus lens focus on detector, obtain declining and swing chamber output signal；
Step (2), tuning laser output wavelength record optical cavity ring-down signal under each wavelength X by data collecting card, and press
Single exponent ring-down Function Fitting obtains the ring-down time τ (λ) under each wavelength X, utilizes relational expressionIt calculates
Absorption coefficient α (λ) under to each wavelength X, and then absorption coefficient α (λ) and wavelength X relation curve, i.e. gas can be drawn
Body absorption spectrum, wherein τ0For it is intracavitary do not absorb when ring-down time, c is the light velocity；
Step (3), in the biggish situation of pressure, because of the random collision between a large amount of molecule, broadening of spectral lines profile
It is considered Lorentz profile.Utilize formulaIt is fitted absorption line, wherein y is normalized absorption
Intensity, γ are the spectral line halfwidth that fitting obtains, λ0It is the central wavelength of spectral line, a1And A0For constant.
Step (4), in the state of temperature T, change pressure in gas cell, repeat step (2) and step (3).Remember simultaneously
Pressure gauge reading P to be calibrated is recorded, the spectral line halfwidth γ (P, T) under different pressure readings is obtained.
Step (5), due to Lorentz line width it is directly proportional to pressure, when measurement gas in absorb gas content it is very low, that is, inhale
When partial pressure shared by getter body can be ignored, line width and pressure relationship can be similar toWherein, γair(Pref,Tref) it is to absorb gas in reference pressure PrefAnd reference
Temperature TrefUnder pressure broadening coefficient, P is total pressure, and n is a coefficient related with temperature.γair(Pref,Tref) and n
Value can all be obtained from HITRAN ir data library.
Step (6), according to the absorption gas pressure ceofficient of spread γ provided in HITRAN ir data libraryair(Pref,
Tref), observed temperature T and the obtained line half-width γ (P, T) of fitting, can theoretical pressure size in anti-pushing out gas pond
PHITRAN, draw testing pressure meter and indicate pressure P and PHITRANRelational graph, treat calibrated manometer and calibrated.
Wherein, the composition, which declines, swings the reflectivity of two pieces of plano-concave high reflection mirrors of chamber and is greater than within the scope of laser scans
99.9%, declining for being constituted swings chamber for stable cavity or confocal cavity, and the long L of chamber meets 0 < L≤2r, and wherein r is that plano-concave high reflective mirror is recessed
The radius of curvature in face.
Wherein, the light source be can broad tuning narrow linewidth laser, tuning range should cover absorption gas one to be measured
A complete absorption peak profile, line width do not influence absorption line line width.
Wherein, the absorption spectrum of the gas is related to temperature, by gas cell integrated temperature detection device to inspection
Gaseous state monitors in real time in gas cell during survey.
Compared to the prior art the present invention has the advantage that:
(1) present invention obtains absorption coefficient by ring-down time of the measurement light in optical cavity, measured result not stimulated light device
The influence of light-intensity variation, signal-to-noise ratio and anti-interference ability with higher, therefore there is higher measurement accuracy；
(2) present system structure is simple, is easy to build adjusting, easy to operate；
(3) present invention can carry out real time calibration to multiple pressure gauges simultaneously, without doing periodic calibration to calibration instrument, greatly
The cost of measurement is reduced greatly.
Detailed description of the invention
Fig. 1 is the gauge calibration schematic device of the invention based on absorption line pressure broadening；
Fig. 2 is the water vapor absorption spectrum in the embodiment of the present invention under different pressure gauge readings to be calibrated；
Fig. 3 is the calibration result of pressure gauge to be calibrated in the embodiment of the present invention；
Appended drawing reference meaning in figure are as follows: 1 is light source, and 2 be optoisolator, and 3 be acousto-optic modulator, and 4 be the He-Ne of 633nm
Laser, 5 be measurement chamber, and 6 be detector, and 7 be high-speed figure capture card, and 8 be computer, and 9 be function generator, and 10 be temperature
Sensor, 11 be pressure gauge to be calibrated or pressure group to be calibrated, and 12 be vacuum pump, and 13 be condenser lens, and 14 be piezoelectric ceramics, 15
It is optical source wavelength tuning controller for spectroscope, 16.
Specific embodiment
1 the gauge calibration method of the invention based on absorption line pressure broadening is described with reference to the accompanying drawing.
The present embodiment is with high light beam quality (TEM00Mould) broad tuning narrow linewidth quantum cascade laser be light source 1, tuning
Range is 1810-1985cm-1, minimum tuning step-length 0.01cm-1；It is high anti-by two pieces of identical, concave surface plating highly reflecting films plano-concaves
It penetrates the opposite composition in mirror (reflectivity is greater than 99.9%) concave surface and declines and swing chamber, declining and swinging chamber is stable cavity or confocal cavity, and the long L of chamber meets 0 < L
≤ 2r, wherein r is the radius of curvature of hysteroscope concave surface；It declines and swings hysteroscope and be installed on gas cell both ends, decline and swing chamber and sample cell composition is close
The measurement chamber 5 of envelope；Laser beam enters to decline after optoisolator 2 and acousto-optic modulator 3 swings chamber, swings what chamber Effect of Back-Cavity Mirror transmitted from declining
Laser beam converges to fast infrared detector 6 by condenser lens 13, and optical signal is converted to electric signal by detector 6, after conversion
Electric signal is recorded by high-speed data acquisition card 7 and inputs the processing of computer 8 and storage；Piezoelectricity pottery is installed in a hysteroscope wherein
Porcelain (PZT) 14 generates triangular signal cyclic drive piezoelectric ceramics 14 by function generator 9 to tune and decline that swing chamber long, with reality
The coupling of existing narrow-linewidth laser and resonant cavity.To introduce visible He-Ne light by high reflective mirror and spectroscope 15 convenient for optical path adjusting
Source 4.
Due to steam within the scope of laser tuning there are narrow absorption line abundant, be with steam spectral measurement below
Example introduces the specific steps of the gauge calibration method based on absorption line pressure broadening.
Intracavitary first to be filled with zero grade air, its main component is made of nitrogen and oxygen.Guaranteed using vacuum pump 12 intracavitary
Pressure is stablized, and adjusting two hysteroscope pitching makes optical cavity output signal amplitude maximum, passes through laser light source wavelength tuning controller
16 tune quantum cascade laser output wavelength, and tuning step-length is 0.01cm-1.It is set when the electric signal that detector 6 exports is greater than
When fixed threshold value, computer 8, which generates a trigger signal and passes to acousto-optic modulator 3, turns off incident light, by high-speed data acquisition
Card 7 records declining for optical cavity output under each wavelength X and swings signal, and presses single exponent ring-down functionFitting,
The ring-down time τ (λ) under each wavelength X is obtained, wherein A, B are fitting coefficient；High pure nitrogen is poured intracavitary, obtains no gas
Ring-down time τ when absorption0, utilize relational expressionThe absorption coefficient α under each wavelength X is calculated
(λ)。
Then the gas absorption spectra curve of absorption coefficient α (λ) and λ is drawn out as shown in Fig. 2, and pressing to the curve
According toIt is fitted processing, obtains the halfwidth γ (p, T) of spectral line, records pressure to be calibrated at this time
11 reading of meter.Change pressure in gas cell using vacuum pump 12, repeats the above steps, obtain the gas absorption spectrum under different pressure
And line half-width.Fig. 2 is water vapor absorption spectrum in the zero grade air under different pressure gauges readings to be calibrated；
Finally by formulaUsing being provided in HITRAN ir data library
Absorption gas pressure ceofficient of spread γair(Pref,Tref), observed temperature T and the obtained line half-width γ (P, T) of fitting, can
With the theoretical pressure size P in anti-pushing out gas pondHITRAN, draw testing pressure meter and indicate pressure PMeaWith PHITRANRelational graph,
Calibrated manometer is treated to be calibrated.Fig. 3 is the calibration result of pressure gauge to be calibrated.Fit correlation can be expressed as PMea=a+b
×PHITRAN, with Least Square Method parameter, it is desirable that the weighted sum of squares of measured value deviation is minimum.A is biasing, proportionality coefficient b
It is 0.9987.
In short, the invention proposes the gauge calibration method based on absorption line pressure broadening, measurement result not by
Laser intensity fluctuation influence, this method have structure it is simple, be easy to build adjustings, it is easy to operate, can at the same to it is multiple to
The pressure gauge of calibration carries out real-time measurement, the advantages that without doing periodic calibration to calibration instrument.
Claims (4)
1. a kind of gauge calibration method based on gas absorption spectrum line pressure broadening effect, which is characterized in that realize step such as
Under:
Step (1), tunable wave length laser light incident to both ends are equipped with the gas cell of plano-concave high reflectance hysteroscope, two plano-concave high reflections
Rate hysteroscope concave surface is opposite to be constituted stable declining and swings chamber, part light be coupled into from one end it is intracavitary, other end output light through poly-
Focus lens focus on detector, obtain declining and swing chamber output signal；
Step (2), tuning laser output wavelength record optical cavity ring-down signal under each wavelength X by data collecting card, and by singly referring to
Number attenuation functions are fitted to obtain ring-down time τ (λ) under each wavelength X, utilize relational expressionIt is calculated each
Absorption coefficient α (λ) under wavelength X, and then absorption coefficient α (λ) and wavelength X relation curve can be drawn, i.e., gas is inhaled
Spectrum is received, wherein τ0For it is intracavitary do not absorb when ring-down time, c is the light velocity；
Step (3), in the biggish situation of pressure because the random collision between a large amount of molecule, broadening of spectral lines profile are thought
It is Lorentz profile, utilizes formulaIt is fitted absorption line, wherein y is normalized absorption intensity,
γ is the spectral line halfwidth that fitting obtains, λ0It is the central wavelength of spectral line, a1And A0For constant；
Step (4), in the state of temperature T, change pressure in gas cell, repeat step (2) and step (3), at the same record to
Calibrated manometer reads P, obtains the spectral line halfwidth γ (P, T) under different pressure readings；
Step (5), due to Lorentz line width it is directly proportional to pressure, when measurement gas in absorb gas content it is very low, i.e., absorption gas
When partial pressure shared by body can be ignored, line width and pressure relationship can be similar toIts
In, γair(Pref,Tref) it is to absorb gas in reference pressure PrefWith reference temperature TrefUnder pressure broadening coefficient, P is stagnation pressure
By force, n is a coefficient related with temperature, γair(Pref,Tref) and the value of n can all be obtained from HITRAN ir data library
It arrives；
Step (6), according to the absorption gas pressure ceofficient of spread γ provided in HITRAN ir data libraryair(Pref,
Tref), observed temperature T and the obtained line half-width γ (P, T) of fitting, can theoretical pressure size in anti-pushing out gas pond
PHITRAN, draw testing pressure meter and indicate pressure P and PHITRANRelational graph, treat calibrated manometer and calibrated.
2. a kind of gauge calibration method based on gas absorption spectrum line pressure broadening effect according to claim 1,
Be characterized in that: the reflectivity for constituting the two pieces of plano-concave high reflectance hysteroscopes for swinging chamber that decline is greater than within the scope of laser scans
99.9%, declining for being constituted swings chamber for stable cavity or confocal cavity, and the long L of chamber meets 0 < L≤2r, and wherein r is that plano-concave high reflective mirror is recessed
The radius of curvature in face.
3. a kind of gauge calibration method based on gas absorption spectrum line pressure broadening effect according to claim 1,
Be characterized in that: light source be can broad tuning narrow linewidth laser, tuning range should cover absorption gas to be measured one it is complete
Absorption peak profile, and its line width does not influence absorption line wire width measuring.
4. a kind of gauge calibration method based on gas absorption spectrum line pressure broadening effect according to claim 1,
Be characterized in that: the absorption spectrum of gas is related to temperature, by gas cell integrated temperature detection device in detection process
Gaseous state monitors in real time in gas cell.
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| CN109557045B (en) * | 2018-12-10 | 2021-05-28 | 中国科学院电工研究所 | A Fitting Method for Extracting Direct Absorption Spectra in TDLAS Technology |
| CN110736719A (en) * | 2019-11-27 | 2020-01-31 | 中国科学院电工研究所 | A gas concentration calibration and measurement method based on TDLAS direct absorption spectrum |
| CN111948179B (en) * | 2020-07-15 | 2022-10-11 | 中国科学院上海光学精密机械研究所 | Standard structure for calibrating high-transmittance reflectivity measurement system and calibration method |
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