CN106462308A - Capacitive sensing device and electronic equipment - Google Patents
Capacitive sensing device and electronic equipment Download PDFInfo
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- CN106462308A CN106462308A CN201680000683.8A CN201680000683A CN106462308A CN 106462308 A CN106462308 A CN 106462308A CN 201680000683 A CN201680000683 A CN 201680000683A CN 106462308 A CN106462308 A CN 106462308A
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- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
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- G—PHYSICS
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- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
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- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0443—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a single layer of sensing electrodes
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- G—PHYSICS
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- G06F—ELECTRIC DIGITAL DATA PROCESSING
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- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
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Abstract
本发明提供一种电容式传感装置和电子设备。所述电容式传感装置包括:多个传感单元和驱动电路。每一传感单元包括:感测电极;第一控制开关,与所述感测电极连接;和第二控制开关,与所述感测电极连接。所述驱动电路与所述多个传感单元的第一控制开关和第二控制开关分别连接,用于控制同一传感单元中第一控制开关和第二控制开关分时导通,并通过导通的第一控制开关传输激励信号给感测电极执行感测操作,通过导通的第二控制开关传输一第一参考信号给感测电极。
The invention provides a capacitive sensing device and electronic equipment. The capacitive sensing device includes: a plurality of sensing units and a driving circuit. Each sensing unit includes: a sensing electrode; a first control switch connected to the sensing electrode; and a second control switch connected to the sensing electrode. The drive circuit is connected to the first control switch and the second control switch of the plurality of sensing units respectively, and is used to control the time-sharing conduction of the first control switch and the second control switch in the same sensing unit, and through conducting The first control switch that is turned on transmits an excitation signal to the sensing electrode to perform a sensing operation, and the second control switch that is turned on transmits a first reference signal to the sensing electrode.
Description
技术领域technical field
本发明涉及传感技术领域,尤其涉及一种电容式传感装置以及具有所述电容式传感装置的电子设备。The invention relates to the field of sensing technology, in particular to a capacitive sensing device and electronic equipment with the capacitive sensing device.
背景技术Background technique
随着社会的发展,越来越多的电子设备(如:手机、平板电脑、穿戴式设备、以及智能家居等各种智能产品)一般都会设置一种或多种传感装置。所述传感装置包括如感测用户触摸操作的触摸传感装置、感测人体生物信息的生物信息传感装置等等。目前,触摸传感装置、生物信息传感装置等多采用电容式传感装置来执行感测操作。With the development of society, more and more electronic devices (such as mobile phones, tablet computers, wearable devices, and various smart products such as smart homes) are generally provided with one or more sensing devices. The sensing device includes, for example, a touch sensing device that senses a user's touch operation, a biological information sensing device that senses biological information of a human body, and the like. Currently, touch sensing devices, biological information sensing devices, etc. mostly use capacitive sensing devices to perform sensing operations.
以生物信息传感装置为例,通常,所述生物信息传感装置包括多个呈阵列式排布的感测电极以及与各感测电极相连接的驱动电路。所述驱动电路一般逐行驱动感测电极执行生物信息感测。Taking a biological information sensing device as an example, generally, the biological information sensing device includes a plurality of sensing electrodes arranged in an array and a driving circuit connected to each sensing electrode. The driving circuit generally drives the sensing electrodes row by row to perform biological information sensing.
然,当所述驱动电路每次驱动部分感测电极执行生物信息感测时,其余感测电极上的电压由于信号干扰等影响会存在不一致等情况,因此对在执行生物信息感测的感测电极的寄生影响不同且均是未知得,而生物信息传感装置对感测精度要求相对较高,从而不利于生物信息的准确检测。However, when the drive circuit drives part of the sensing electrodes to perform biological information sensing each time, the voltages on the remaining sensing electrodes may be inconsistent due to signal interference, etc. The parasitic effects of the electrodes are different and unknown, and the biological information sensing device requires relatively high sensing accuracy, which is not conducive to the accurate detection of biological information.
发明内容Contents of the invention
本发明旨在至少解决现有技术中存在的技术问题之一。为此,本发明需要提供一种电容式传感装置及电子设备。The present invention aims to solve at least one of the technical problems existing in the prior art. Therefore, the present invention needs to provide a capacitive sensing device and electronic equipment.
本发明提供一种电容式传感装置,包括:The invention provides a capacitive sensing device, comprising:
多个传感单元,每一传感单元包括:A plurality of sensing units, each sensing unit includes:
感测电极;sensing electrodes;
第一控制开关,与所述感测电极连接;和a first control switch connected to the sensing electrode; and
第二控制开关,与所述感测电极连接;和a second control switch connected to the sensing electrode; and
驱动电路,与所述多个传感单元的第一控制开关和第二控制开关分别连接,用于控制同一传感单元中第一控制开关和第二控制开关分时导通,并通过导通的第一控制开关传输激励信号给感测电极执行感测操作,通过导通的第二控制开关传输一第一参考信号给感测电极。The drive circuit is respectively connected to the first control switch and the second control switch of the plurality of sensing units, and is used to control the time-sharing conduction of the first control switch and the second control switch in the same sensing unit, and through the conduction The first control switch transmits an excitation signal to the sensing electrode to perform a sensing operation, and transmits a first reference signal to the sensing electrode through the turned-on second control switch.
可选地,所述第一参考信号与所述激励信号相同。Optionally, the first reference signal is the same as the excitation signal.
可选地,对于同一列感测电极:Optionally, for the same column of sensing electrodes:
当所述驱动电路驱动其中一传感单元中的第一控制开关导通、第二控制开关截止时,驱动其余传感单元中的部分或全部传感单元的第一控制开关截止、第二控制开关导通。When the drive circuit drives the first control switch in one of the sensing units to be turned on and the second control switch to be turned off, the first control switch to drive part or all of the other sensing units to be turned off and the second control switch to be turned off. The switch is turned on.
可选地,所述驱动电路通过导通的第一控制开关提供所述激励信号给感测电极执行生物信息感测,并接收来自感测电极输出的感测信号,以执行自电容式的感测操作。Optionally, the drive circuit provides the excitation signal to the sensing electrode to perform biological information sensing through the first control switch that is turned on, and receives the sensing signal output from the sensing electrode to perform self-capacitance sensing. test operation.
可选地,所述驱动电路包括扫描驱动电路、感测驱动电路、和参考信号产生电路,其中,所述扫描驱动电路用于驱动所述第一控制开关与所述第二控制开关的导通与截止,所述感测驱动电路用于通过导通的第一控制开关驱动感测电极执行感测操作,所述参考信号产生电路用于通过导通的第二控制开关提供所述第二参考信号给感测电极。Optionally, the driving circuit includes a scanning driving circuit, a sensing driving circuit, and a reference signal generating circuit, wherein the scanning driving circuit is used to drive the conduction between the first control switch and the second control switch and off, the sensing driving circuit is used to drive the sensing electrode to perform a sensing operation through the first control switch that is turned on, and the reference signal generation circuit is used to provide the second reference through the second control switch that is turned on signal to the sensing electrodes.
可选地,当所述扫描驱动电路驱动一行传感单元的第一控制开关导通、第二控制开关截止时,所述感测驱动电路通过导通的第一控制开关同时提供所述激励信号给部分感测电极执行感测操作,所述参考信号产生电路进一步通过导通的第一控制开关提供同一第二参考信号给其余传感单元中的部分或全部传感单元的感测电极。Optionally, when the scanning driving circuit drives the first control switch of a row of sensing units to turn on and the second control switch to turn off, the sensing driving circuit simultaneously provides the excitation signal through the turned-on first control switch The sensing operation is performed on some of the sensing electrodes, and the reference signal generation circuit further provides the same second reference signal to the sensing electrodes of some or all of the remaining sensing units through the turned-on first control switch.
可选地,所述第二参考信号与所述第一参考信号相同。Optionally, the second reference signal is the same as the first reference signal.
可选地,对于同一行的感测电极:所述驱动电路每次同时驱动部分感测电极执行感测操作,通过多次驱动,直到驱动完一行感测电极执行感测操作。Optionally, for the same row of sensing electrodes: the driving circuit simultaneously drives some of the sensing electrodes to perform a sensing operation each time, and performs multiple driving until a row of sensing electrodes is driven to perform a sensing operation.
可选地,所述驱动电路进一步包括多个数据选择器,所述多个数据选择器连接所述参考信号产生电路和所述感测驱动电路,每一数据选择器进一步通过第一控制开关连接部分传感单元的感测电极,所述数据选择器用于选择输出所述激励信号或所述第二参考信号给感测电极。Optionally, the driving circuit further includes a plurality of data selectors, the plurality of data selectors are connected to the reference signal generating circuit and the sensing driving circuit, and each data selector is further connected through a first control switch For the sensing electrodes of some sensing units, the data selector is used to select and output the excitation signal or the second reference signal to the sensing electrodes.
可选地,所述驱动电路一次同时通过各数据选择器输出所述激励信号分别给一感测电极执行感测操作,并通过各数据选择器分别输出所述第二参考信号给同一行的其余感测电极中的部分或全部感测电极。Optionally, the driving circuit simultaneously outputs the excitation signal to a sensing electrode through each data selector to perform a sensing operation, and outputs the second reference signal to the rest of the same row through each data selector. Some or all of the sensing electrodes.
可选地,所述电容式传感装置进一步包括控制单元,所述控制单元与所述扫描驱动电路和所述多个数据选择器分别连接,用于控制所述扫描驱动电路驱动各行传感单元中的第一控制开关和第二控制开关的导通时序,以及通过控制所述多个数据选择器来控制输出所述激励信号与所述第二参考信号给感测电极的时序。Optionally, the capacitive sensing device further includes a control unit, the control unit is respectively connected to the scan drive circuit and the plurality of data selectors, and is used to control the scan drive circuit to drive each row of sensing units The turn-on timing of the first control switch and the second control switch, and the timing of outputting the excitation signal and the second reference signal to the sensing electrodes by controlling the plurality of data selectors.
可选地,所述电容式传感装置进一步包括:Optionally, the capacitive sensing device further includes:
多个扫描线群组,所述扫描线群组包括第一扫描线和第二扫描线;和a plurality of scan line groups, the scan line groups including a first scan line and a second scan line; and
多个数据线群组,所述数据线群组包括第一数据线和第二数据线;a plurality of data line groups, the data line groups including a first data line and a second data line;
每一扫描线群组连接一行传感单元,每一数据线群组连接一列传感单元;Each scanning line group is connected to a row of sensing units, and each data line group is connected to a row of sensing units;
所述第一控制开关包括控制电极、第一传输电极、和第二传输电极;所述第二控制开关包括控制电极、第一传输电极、和第二传输电极;所述第一扫描线连接所述扫描驱动电路和所述第一控制开关的控制电极;所述第二扫描线连接所述扫描驱动电路和所述第二控制开关的控制电极;所述第一数据线连接所述数据选择器和第一控制开关的第一传输电极;所述第二数据线连接所述参考信号产生电路和第二控制开关的第一传输电极;所述第一控制开关的第二传输电极连接所述感测电极;所述第二控制开关的第二传输电极连接所述感测电极。The first control switch includes a control electrode, a first transfer electrode, and a second transfer electrode; the second control switch includes a control electrode, a first transfer electrode, and a second transfer electrode; the first scan line is connected to the The scan drive circuit and the control electrode of the first control switch; the second scan line is connected to the scan drive circuit and the control electrode of the second control switch; the first data line is connected to the data selector and the first transmission electrode of the first control switch; the second data line is connected to the reference signal generating circuit and the first transmission electrode of the second control switch; the second transmission electrode of the first control switch is connected to the sensor The measuring electrode; the second transmission electrode of the second control switch is connected to the sensing electrode.
可选地,所述第一数据线用于传输所述激励信号和所述第二参考信号,所述第二数据线用于传输所述第一参考信号,所述扫描驱动电路通过所述第一扫描线、第二扫描线提供扫描开启信号给第一控制开关和第二控制开关,来控制第一控制开关和第二控制开关导通,通过所述第一扫描线、第二扫描线提供扫描截止信号给第一控制开关和第二控制开关,来控制第一控制开关和第二控制开关截止。Optionally, the first data line is used to transmit the excitation signal and the second reference signal, the second data line is used to transmit the first reference signal, and the scan driving circuit passes the first One scan line and the second scan line provide scan start signals to the first control switch and the second control switch to control the conduction of the first control switch and the second control switch, and the first scan line and the second scan line provide The scanning cut-off signal is sent to the first control switch and the second control switch to control the first control switch and the second control switch to cut off.
可选地,所述电容式传感装置进一步包括:Optionally, the capacitive sensing device further includes:
第一参考信号线,连接所述参考信号产生电路和第二数据线,用于传输所述第一参考信号;a first reference signal line, connected to the reference signal generation circuit and a second data line, for transmitting the first reference signal;
第二参考信号线,连接所述参考信号产生电路和所述多个数据选择器,用于传输所述第二参考信号;和A second reference signal line, connected to the reference signal generating circuit and the plurality of data selectors, for transmitting the second reference signal; and
感测信号线,连接所述感测驱动电路和所述多个数据选择器,用于传输所述激励信号给感测电极以及传输来自感测电极的感测信号给感测驱动电路。The sensing signal line is connected to the sensing driving circuit and the plurality of data selectors, and is used for transmitting the excitation signal to the sensing electrode and transmitting the sensing signal from the sensing electrode to the sensing driving circuit.
可选地,所述电容式传感装置包括电容式传感器,所述电容式传感器包括绝缘基板、所述多个传感单元、所述多个扫描线群组、所述多个数据线群组、和所述第一参考信号线,所述多个传感单元、所述多个扫描线群组、所述多个数据线群组、和所述第一参考信号线形成在所述绝缘基板上。Optionally, the capacitive sensing device includes a capacitive sensor, and the capacitive sensor includes an insulating substrate, the plurality of sensing units, the plurality of scanning line groups, the plurality of data line groups , and the first reference signal line, the plurality of sensing units, the plurality of scan line groups, the plurality of data line groups, and the first reference signal line are formed on the insulating substrate superior.
可选地,所述各传感单元中的第一控制开关和第二控制开关均为薄膜晶体管开关,所述绝缘基板为玻璃基板。Optionally, both the first control switch and the second control switch in each sensing unit are thin film transistor switches, and the insulating substrate is a glass substrate.
可选地,所述传感单元包括一第一控制开关和一第二控制开关,或,所述传感单元包括并联连接的二第一控制开关和并联连接的二第二控制开关。Optionally, the sensing unit includes a first control switch and a second control switch, or, the sensing unit includes two first control switches connected in parallel and two second control switches connected in parallel.
可选地,所述绝缘基板包括第一表面和与第一表面相对设置的第二表面,所述第一表面用于接收目标物体的触摸或接近输入,所述多个传感单元、所述多个扫描线群组、所述多个数据线群组、和所述第一参考信号线设置在所述第二表面。Optionally, the insulating substrate includes a first surface and a second surface opposite to the first surface, the first surface is used to receive a touch or proximity input of a target object, the plurality of sensing units, the A plurality of scan line groups, the plurality of data line groups, and the first reference signal lines are disposed on the second surface.
可选地,所述多个传感单元的感测电极相较于所述第一控制开关、所述第二控制开关、所述多个扫描线群组、和所述多个数据线群组更靠近所述第二表面。Optionally, the sensing electrodes of the plurality of sensing units are compared to the first control switch, the second control switch, the plurality of scan line groups, and the plurality of data line groups closer to the second surface.
可选地,所述第一控制开关、所述第二控制开关、所述多个扫描线群组、和所述多个数据线群组位于所述多个传感单元的感测电极背对所述绝缘基板的一侧。Optionally, the first control switch, the second control switch, the plurality of scan line groups, and the plurality of data line groups are located opposite to the sensing electrodes of the plurality of sensing units one side of the insulating substrate.
可选地,所述多个传感单元的感测电极覆盖所述第一控制开关、所述第二控制开关、所述多个扫描线群组、和所述多个数据线群组。Optionally, the sensing electrodes of the plurality of sensing units cover the first control switch, the second control switch, the plurality of scan line groups, and the plurality of data line groups.
可选地,所述电容式传感器进一步包括所述扫描驱动电路、所述多个数据选择器、所述第二参考信号线、和所述感测信号线,所述扫描驱动电路、所述多个数据选择器、所述第二参考信号线、和所述感测信号线形成在所述绝缘基板的第二表面上。Optionally, the capacitive sensor further includes the scanning driving circuit, the plurality of data selectors, the second reference signal line, and the sensing signal line, the scanning driving circuit, the multiple A data selector, the second reference signal line, and the sensing signal line are formed on the second surface of the insulating substrate.
可选地,所述扫描驱动电路、所述多个数据选择器、所述第二参考信号线、和所述感测信号线设置在所述多个传感单元的周围。Optionally, the scan driving circuit, the plurality of data selectors, the second reference signal line, and the sensing signal line are arranged around the plurality of sensing units.
可选地,所述扫描驱动电路和所述多个数据选择器均包括控制开关,所述控制开关均为薄膜晶体管开关。Optionally, both the scan driving circuit and the plurality of data selectors include control switches, and the control switches are thin film transistor switches.
可选地,每一数据选择器包括多个开关单元,每一开关单元包括第一选择开关和第二选择开关,所述第一选择开关包括控制电极、第一传输电极、和第二传输电极,所述第二选择开关包括控制电极、第一传输电极、和第二传输电极,其中,所述第一选择开关的控制电极和第二选择开关的控制电极与所述控制单元分别连接,所述第一选择开关的第一传输电极与所述感测驱动电路连接,所述第二选择开关的第一传输电极与所述参考信号产生电路连接,所述第一选择开关的第二传输电极和所述第二选择开关的第二传输电极相连接、并连接至第一数据线。Optionally, each data selector includes a plurality of switch units, each switch unit includes a first selection switch and a second selection switch, and the first selection switch includes a control electrode, a first transmission electrode, and a second transmission electrode , the second selection switch includes a control electrode, a first transmission electrode, and a second transmission electrode, wherein the control electrode of the first selection switch and the control electrode of the second selection switch are respectively connected to the control unit, the The first transmission electrode of the first selection switch is connected to the sensing driving circuit, the first transmission electrode of the second selection switch is connected to the reference signal generation circuit, and the second transmission electrode of the first selection switch It is connected to the second transmission electrode of the second selection switch and connected to the first data line.
可选地,所述控制单元控制同一开关单元中的第一选择开关和第二选择开关分时导通。Optionally, the control unit controls the first selection switch and the second selection switch in the same switch unit to be turned on in time division.
可选地,所述电容式传感器进一步包括钝化层,形成在所述多个传感单元、所述多个扫描线群组、所述多个数据线群组、和所述第一参考信号线上。Optionally, the capacitive sensor further includes a passivation layer formed on the plurality of sensing units, the plurality of scan line groups, the plurality of data line groups, and the first reference signal on-line.
可选地,所述电容式传感装置进一步包括控制芯片,所述控制芯片包括所述控制单元、所述参考信号产生电路、和所述感测驱动电路。Optionally, the capacitive sensing device further includes a control chip, and the control chip includes the control unit, the reference signal generating circuit, and the sensing driving circuit.
可选地,所述电容式传感器和所述控制芯片分别为裸片,所述控制芯片绑定在所述绝缘基板上;或者,所述控制芯片设置在一软性电路板上,通过所述软性电路板与所述电容式传感器电连接。Optionally, the capacitive sensor and the control chip are bare chips, and the control chip is bound on the insulating substrate; or, the control chip is arranged on a flexible circuit board, and the The flexible circuit board is electrically connected with the capacitive sensor.
可选地,所述驱动电路进一步包括调制电路,所述调制电路用于统一调制所述驱动电路输出给所述多个传感单元的信号,以提高感测信号的信噪比。Optionally, the driving circuit further includes a modulating circuit, and the modulating circuit is used for uniformly modulating the signals output by the driving circuit to the plurality of sensing units, so as to improve the signal-to-noise ratio of the sensing signals.
可选地,所述电容式传感装置为指纹传感装置。Optionally, the capacitive sensing device is a fingerprint sensing device.
由于本发明的电容式传感装置的传感单元进一步包括第一控制开关和第二控制开关,因此,所述驱动电路可通过控制所述第一控制开关和第二控制开关分时导通,来在通过导通的第一控制开关驱动感测电极执行感测操作的同时,进一步通过导通的第二控制开关提供第一参考信号给感测电极,从而施加有所述第一参考信号的感测电极对在执行感测的感测电极的寄生影响是可知得,相应地,所述驱动电路在获取生物信息的过程中可剔除可知的寄生影响,从而提高感测操作的精度。Since the sensing unit of the capacitive sensing device of the present invention further includes a first control switch and a second control switch, the drive circuit can be turned on in time by controlling the first control switch and the second control switch, To drive the sensing electrode to perform the sensing operation through the turned-on first control switch, and further provide the first reference signal to the sensing electrode through the turned-on second control switch, so that the first reference signal is applied The parasitic influence of the sensing electrodes on the sensing electrodes performing sensing is known, and accordingly, the drive circuit can eliminate the known parasitic influences during the process of acquiring biological information, thereby improving the accuracy of sensing operations.
进一步地,所述电容式传感装置在驱动每行感测电极中的部分感测电极执行感测操作时,提供第二参考信号给同一行的其余感测电极中的部分或全部的感测电极,从而施加有所述第二参考信号的感测电极对在执行感测的感测电极的寄生影响是可知得,相应地,所述驱动电路在获取生物信息的过程中可剔除可知的寄生影响,从而提高感测操作的精度。Further, when the capacitive sensing device drives some of the sensing electrodes in each row to perform a sensing operation, it provides a second reference signal to part or all of the remaining sensing electrodes in the same row for sensing. electrodes, so that the parasitic influence of the sensing electrodes applied with the second reference signal on the sensing electrodes performing sensing can be known, and correspondingly, the drive circuit can eliminate known parasitic effects in the process of acquiring biological information influence, thereby improving the accuracy of the sensing operation.
本发明进一步提供一种电子设备,所述电子设备包括上述中任意一项所述的电容式传感装置。The present invention further provides an electronic device, which includes the capacitive sensing device described in any one of the above.
由于所述电子设备包括所述电容式传感装置,因此,所述电子设备的用户体验较高。Since the electronic equipment includes the capacitive sensing device, the user experience of the electronic equipment is high.
附图说明Description of drawings
图1为本发明生物信息传感装置一实施方式的电路结构示意图。FIG. 1 is a schematic diagram of the circuit structure of an embodiment of the biological information sensing device of the present invention.
图2为图1所示生物信息传感装置的部分结构的俯视图。FIG. 2 is a top view of a partial structure of the biological information sensing device shown in FIG. 1 .
图3为图1所示生物信息传感装置的数据选择电路的一实施方式的电路结构示意图。FIG. 3 is a schematic diagram of the circuit structure of an embodiment of the data selection circuit of the biological information sensing device shown in FIG. 1 .
图4为本发明生物信息传感装置另一实施方式的结构示意图。Fig. 4 is a schematic structural diagram of another embodiment of the biological information sensing device of the present invention.
图5为图4所示生物信息传感装置的部分剖面结构示意图。FIG. 5 is a partial cross-sectional structural schematic diagram of the biological information sensing device shown in FIG. 4 .
图6为图4所示生物信息传感装置的使用状态图。FIG. 6 is a diagram of the use state of the biological information sensing device shown in FIG. 4 .
图7为图3所示生物信息传感器的一实施方式的制作方法流程图。FIG. 7 is a flow chart of a manufacturing method of an embodiment of the biological information sensor shown in FIG. 3 .
图8为制作第一控制开关与第二控制开关的方法流程图。FIG. 8 is a flowchart of a method for manufacturing the first control switch and the second control switch.
图9为本实用新型生物信息传感装置的又一实施方式的部分结构示意图。FIG. 9 is a partial structural schematic diagram of another embodiment of the biological information sensing device of the present invention.
图10为本实用新型生物信息传感装置的传感单元的另一实施方式的俯视图。Fig. 10 is a top view of another embodiment of the sensing unit of the biological information sensing device of the present invention.
图11为本实用新型生物信息传感装置的又一实施方式的部分结构示意图。Fig. 11 is a partial structural schematic diagram of another embodiment of the biological information sensing device of the present invention.
图12为本实用新型电子设备的一实施方式的结构示意图。FIG. 12 is a schematic structural diagram of an embodiment of the electronic device of the present invention.
图13为图12所示电子设备的一实施方式的电路结构框图。FIG. 13 is a circuit structure block diagram of an embodiment of the electronic device shown in FIG. 12 .
具体实施方式detailed description
为使本发明的上述目的、特征和优点能够更为明显易懂,下面结合附图对本发明的具体实施例做详细的说明。然而,示例实施方式能够以多种形式实施,且不应被理解为限于在此阐述的实施方式;相反,提供这些实施方式使得本发明将全面和完整,并将示例实施方式的构思全面地传达给本领域的技术人员。为了方便或清楚,可能夸大、省略或示意地示出在附图中所示的每层的厚度和大小、以及示意地示出相关元件的数量。另外,元件的大小不完全反映实际大小,以及相关元件的数量不完全反映实际数量。因为附图大小不同等原因,在不同的附图中所示的相同或相似或相关元件的数量存在并不一致的情况。在图中相同的附图标记表示相同或类似的结构。然,需要说明的是,为了使得标号具有规律性以及逻辑性等,在某些不同实施例中,相同或类似的元件或结构采用了不同的附图标记,根据技术的关联性以及相关文字说明,本领域的技术人员是可直接或间接判断得知。In order to make the above objects, features and advantages of the present invention more comprehensible, specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. Example embodiments may, however, be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. For convenience or clarity, the thickness and size of each layer shown in the drawings and the number of related elements may be exaggerated, omitted, or schematically shown. Also, the size of elements does not entirely reflect an actual size, and the number of related elements does not entirely reflect an actual number. Due to reasons such as different sizes of the drawings, the numbers of the same or similar or related elements shown in different drawings may not be consistent. The same reference numbers in the figures indicate the same or similar structures. However, it should be noted that in order to make the labels regular and logical, in some different embodiments, the same or similar elements or structures use different reference signs, according to the technical relevance and related text descriptions , those skilled in the art can determine directly or indirectly.
此外,所描述的特征、结构可以以任何合适的方式结合在一个或更多实施方式中。在下面的描述中,提供许多具体细节从而给出对本发明的实施方式的充分理解。然而,本领域技术人员应意识到,没有所述特定细节中的一个或更多,或者采用其它的结构、组元等,也可以实践本发明的技术方案。在其它情况下,不详细示出或描述公知结构或者操作以避免模糊本发明。Furthermore, the described features and structures may be combined in any suitable manner in one or more embodiments. In the following description, numerous specific details are provided in order to give a thorough understanding of embodiments of the invention. However, those skilled in the art will appreciate that the technical solutions of the present invention may be practiced without one or more of the specific details, or with other structures, components, and the like. In other instances, well-known structures or operations are not shown or described in detail to avoid obscuring the invention.
进一步地,下列术语是示例性的,并非旨在以任何方式进行限制。在阅读本申请之后,本领域技术人员将认识到,这些术语表述适用于技术、方法、物理元件以及系统(无论目前是否知晓),包括阅读本申请之后本领域技术人员推断出或者可推断的其扩展。Further, the following terms are exemplary and not intended to be limiting in any way. After reading this application, those skilled in the art will recognize that these terms apply to techniques, methods, physical elements, and systems (whether presently known or not), including other terms that are inferred or could be inferred by those skilled in the art after reading this application. expand.
在本发明的描述中,需要理解的是:“多个”包括两个和两个以上,“多条”包括两条和两条以上,除非本发明另有明确具体的限定。“至少二列”包括二列、三列、四列、五列等逐渐增多的各种适合情况。另外,各元件名称以及信号名称中出现的“第一”、“第二”等词语并不是限定元件或信号出现的先后顺序,而是为方便元件以及信号命名,清楚区分各元件以及各信号,使得描述更简洁。In the description of the present invention, it should be understood that: "plurality" includes two or more than two, and "plurality" includes two or more, unless otherwise specifically defined in the present invention. "At least two columns" includes various suitable situations such as two columns, three columns, four columns, five columns, etc. which gradually increase. In addition, words such as "first" and "second" appearing in the names of components and signals do not limit the order in which components or signals appear, but are for the convenience of naming components and signals and clearly distinguishing components and signals. Make the description more concise.
进一步需要说明的是:本发明提供的电容式传感装置适用于生物信息传感装置,尤其指纹传感装置。然,本发明并不限于此,所述电容式传感装置也可适用其它合适类型的传感装置,如触摸传感装置等。所述生物信息传感装置用于感测目标物体的预定生物信息。所述目标物体如为用户的手指,也可为用户身体的其它部分、如手掌、脚趾、耳朵等,甚至也可为其它合适类型的物体,而并不局限为人体。所述预定生物信息如为指纹、掌纹、耳纹等。It should be further noted that: the capacitive sensing device provided by the present invention is suitable for biological information sensing devices, especially fingerprint sensing devices. However, the present invention is not limited thereto, and the capacitive sensing device can also be applied to other suitable types of sensing devices, such as touch sensing devices and the like. The biological information sensing device is used for sensing predetermined biological information of a target object. For example, the target object is a user's finger, it can also be other parts of the user's body, such as the palm, toes, ears, etc., or even other suitable types of objects, and is not limited to the human body. The predetermined biological information is, for example, fingerprints, palm prints, ear prints and the like.
下面,以电容式传感装置为生物信息传感装置为例,对本发明的各实施例进行说明。In the following, various embodiments of the present invention will be described by taking the capacitive sensing device as a biological information sensing device as an example.
请一并参阅图1与图2,图1为本发明生物信息传感装置一实施方式的电路结构示意图。图2为图1所示生物信息传感装置的部分结构的俯视图。所述生物信息传感装置1包括多个感测电极111和驱动电路20。所述驱动电路20与所述多个感测电极111相连接,用于驱动所述多个感测电极111执行生物信息感测。Please refer to FIG. 1 and FIG. 2 together. FIG. 1 is a schematic diagram of the circuit structure of an embodiment of the biological information sensing device of the present invention. FIG. 2 is a top view of a partial structure of the biological information sensing device shown in FIG. 1 . The biological information sensing device 1 includes a plurality of sensing electrodes 111 and a driving circuit 20 . The driving circuit 20 is connected to the plurality of sensing electrodes 111 for driving the plurality of sensing electrodes 111 to perform biological information sensing.
通常,电容式的传感装置包括互电容式的传感装置与自电容式的传感装置。Generally, capacitive sensing devices include mutual capacitive sensing devices and self-capacitive sensing devices.
根据驱动电路20与感测电极111的配合关系不同,生物信息传感装置1可以是自电容式的生物信息传感装置或者是互电容式的生物信息传感装置。Depending on the cooperation relationship between the driving circuit 20 and the sensing electrodes 111 , the biological information sensing device 1 may be a self-capacitive biological information sensing device or a mutual capacitance biological information sensing device.
在基于互电容式的生物信息传感装置中,所述互电容式的生物信息传感装置可包括多个驱动电极及多个感测电极。每一驱动电极与一感测电极之间形成互电容。在感测时,驱动电路提供激励信号给驱动电极,并接收来自感测电极输出的感测信号。当目标物体接近或触摸所述生物信息传感装置时,形成在驱动电极与感测电极之间的互电容的电荷量会有相应的变化,从而,感测电极会输出相应的感测信号给驱动电路,进而获取相关生物信息。In a mutual-capacitance-based biological information sensing device, the mutual-capacitance biological information sensing device may include a plurality of driving electrodes and a plurality of sensing electrodes. Mutual capacitance is formed between each driving electrode and a sensing electrode. During sensing, the driving circuit provides excitation signals to the driving electrodes and receives sensing signals output from the sensing electrodes. When the target object approaches or touches the biological information sensing device, the amount of charge formed in the mutual capacitance between the driving electrode and the sensing electrode will change accordingly, so that the sensing electrode will output a corresponding sensing signal to the Drive the circuit, and then obtain relevant biological information.
在基于自电容式的生物信息传感装置中,所述自电容式的生物信息传感装置包括多个感测电极。每一感测电极可形成对地的电容。在感测时,驱动电路提供激励信号给感测电极,并接收来自感测电极输出的感测信号。当目标物体接近或触摸所述生物信息传感装置时,目标物体与感测电极之间形成电容,引起感测电极上的电荷量的变化,从而,感测电极输出相应的感测信号给驱动电路,进而获取相关生物信息。In the self-capacitance-based bio-information sensing device, the self-capacitance-based bio-information sensing device includes a plurality of sensing electrodes. Each sense electrode may form a capacitance to ground. During sensing, the drive circuit provides excitation signals to the sensing electrodes and receives sensing signals output from the sensing electrodes. When the target object approaches or touches the biological information sensing device, a capacitance is formed between the target object and the sensing electrode, causing a change in the amount of charge on the sensing electrode, so that the sensing electrode outputs a corresponding sensing signal to the driver circuit, and then obtain relevant biological information.
在本实施方式中,所述生物信息传感装置1例如为自电容式的传感装置。In this embodiment, the biological information sensing device 1 is, for example, a self-capacitance sensing device.
所述多个感测电极111呈多行多列方式排布。然,可变更地,在其它实施方式中,所述多个感测电极111也可呈其它规则或非规则方式排布。The plurality of sensing electrodes 111 are arranged in multiple rows and multiple columns. However, alternatively, in other implementation manners, the plurality of sensing electrodes 111 may also be arranged in other regular or irregular manners.
对于同一列的感测电极111:当所述驱动电路20提供激励信号给一感测电极111执行生物信息感测时,提供一第一参考信号给其余感测电极111中的部分或全部感测电极111。较佳地,所述驱动电路20提供所述第一参考信号给其余全部感测电极111。For the sensing electrodes 111 in the same column: when the driving circuit 20 provides an excitation signal to a sensing electrode 111 to perform biological information sensing, provide a first reference signal to some or all of the other sensing electrodes 111 for sensing electrode 111. Preferably, the driving circuit 20 provides the first reference signal to all other sensing electrodes 111 .
由于所述驱动电路20在提供所述激励信号给各列感测电极111中的一感测电极111时,提供所述第一参考信号给其余部分或全部感测电极111,从而,施加有所述第一参考信号的感测电极111对在执行生物信息感测的感测电极111的寄生影响是可知的,从而,所述驱动电路20在后续对生物信息的计算时可抵消可知的寄生影响,进而提高生物信息的感测精度。Since the drive circuit 20 provides the first reference signal to the remaining part or all of the sensing electrodes 111 when providing the excitation signal to a sensing electrode 111 in each column of sensing electrodes 111, thus, the applied The parasitic influence of the sensing electrode 111 of the first reference signal on the sensing electrode 111 performing biological information sensing is known, so that the drive circuit 20 can counteract the known parasitic influence in the subsequent calculation of biological information , thereby improving the sensing accuracy of biological information.
所述第一参考信号例如为恒定的电压信号。The first reference signal is, for example, a constant voltage signal.
或者,所述第一参考信号与所述激励信号之间的压差保持不变,例如,所述第一参考信号与所述激励信号相同,从而减小其余感测电极111与在执行生物信息感测的感测电极111之间的寄生电容的充放电电量,进一步提高生物信息的感测精度。Alternatively, the voltage difference between the first reference signal and the excitation signal remains unchanged, for example, the first reference signal is the same as the excitation signal, thereby reducing the difference between the rest of the sensing electrodes 111 and the biological information being performed. Sensing the charge and discharge of the parasitic capacitance between the sensing electrodes 111 further improves the sensing accuracy of biological information.
在本实施方式中,所述驱动电路20逐行驱动感测电极111执行生物信息感测。然,可变更地,在其它实施方式中,所述驱动电路20也可一次同时驱动多行感测电极111执行生物信息感测。In this embodiment, the driving circuit 20 drives the sensing electrodes 111 row by row to perform biological information sensing. However, alternatively, in other implementation manners, the driving circuit 20 may simultaneously drive multiple rows of sensing electrodes 111 to perform biological information sensing.
进一步地,在本实施方式中,对于同一行的感测电极111:所述驱动电路20同时提供所述激励信号给部分感测电极111执行生物信息感测,并提供一第二参考信号给其余感测电极111中的部分或全部感测电极111。较佳地,提供所述第二参考信号给其余全部感测电极111。Further, in this embodiment, for the sensing electrodes 111 in the same row: the drive circuit 20 simultaneously provides the excitation signal to some of the sensing electrodes 111 to perform biological information sensing, and provides a second reference signal to the rest Some or all of the sensing electrodes 111 are sensed. Preferably, the second reference signal is provided to all other sensing electrodes 111 .
对于同一行的感测电极111:所述驱动电路20通过先后多次同时提供所述激励信号给部分感测电极111执行生物信息感测,从而驱动完一行感测电极111执行生物信息感测。For the sensing electrodes 111 in the same row: the driving circuit 20 provides the excitation signal to some of the sensing electrodes 111 multiple times simultaneously to perform biological information sensing, thereby driving a row of sensing electrodes 111 to perform biological information sensing.
当所述多个感测电极111形成在一芯片上时,采用对一行感测电极111的分时驱动方式,从而可减少所述芯片上的引脚数量,对此,后面会有相关叙述。When the plurality of sensing electrodes 111 are formed on a chip, a time-sharing driving method for a row of sensing electrodes 111 can be adopted, thereby reducing the number of pins on the chip, which will be described later.
然,可变更地,在其它实施方式中,所述驱动电路20也可同时驱动一行的感测电极111均执行生物信息感测。例如,所述多个感测电极111是形成在显示屏中。当所述多个感测电极111设置在芯片上时,所述驱动电路也是可同时驱动一行的感测电极111均执行生物信息感测。However, alternatively, in other implementation manners, the driving circuit 20 may also simultaneously drive a row of sensing electrodes 111 to perform biological information sensing. For example, the plurality of sensing electrodes 111 are formed in a display screen. When the plurality of sensing electrodes 111 are arranged on the chip, the driving circuit can simultaneously drive a row of sensing electrodes 111 to perform biological information sensing.
另外,由于所述驱动电路20在提供所述激励信号给各行感测电极111中的部分感测电极111时,提供所述第二参考信号给其余感测电极111中的部分或全部感测电极111,从而,施加有所述第二参考信号的感测电极111对在执行生物信息感测的感测电极111的寄生影响是可知的,从而,所述驱动电路20在后续对生物信息的计算时可抵消可知的寄生影响,进而提高生物信息的感测精度。In addition, since the drive circuit 20 provides the second reference signal to some or all of the remaining sensing electrodes 111 when providing the excitation signal to some of the sensing electrodes 111 in each row of sensing electrodes 111 111, thus, the parasitic influence of the sensing electrode 111 applied with the second reference signal on the sensing electrode 111 performing biological information sensing is known, thus, the driving circuit 20 subsequently calculates the biological information Known parasitic effects can be counteracted at this time, thereby improving the sensing accuracy of biological information.
所述第二参考信号例如为恒定的电压信号。The second reference signal is, for example, a constant voltage signal.
或者,所述第二参考信号与所述激励信号之间的压差保持不变,例如,所述第二参考信号与所述激励信号相同,从而减小其余感测电极111与在执行生物信息感测的感测电极111之间的寄生电容的充放电电量,进一步提高生物信息的感测精度。Alternatively, the voltage difference between the second reference signal and the excitation signal remains unchanged, for example, the second reference signal is the same as the excitation signal, thereby reducing the difference between the rest of the sensing electrodes 111 and the biological information being performed. Sensing the charge and discharge of the parasitic capacitance between the sensing electrodes 111 further improves the sensing accuracy of biological information.
在一些具体实施方式中,所述生物信息传感装置1包括多个传感单元11。每一传感单元11包括一所述感测电极111、第一控制开关113、和第二控制开关115。所述第一控制开关113、所述第二控制开关115均与所述感测电极111连接。In some specific implementations, the biological information sensing device 1 includes a plurality of sensing units 11 . Each sensing unit 11 includes a sensing electrode 111 , a first control switch 113 , and a second control switch 115 . Both the first control switch 113 and the second control switch 115 are connected to the sensing electrodes 111 .
所述驱动电路20包括扫描驱动电路21、感测驱动电路22、和参考信号产生电路23。所述扫描驱动电路21与所述多个传感单元11中的第一控制开关113和第二控制开关115分别连接,用于驱动每一传感单元11中的第一控制开关113和第二控制开关115分时导通。所述感测驱动电路22通过各传感单元11中的第一控制开关113与感测电极111连接,用于通过导通的第一控制开关113提供所述激励信号给感测电极111执行生物信息感测。所述参考信号产生电路23通过各传感单元11中的第二控制开关115与所述感测电极111连接,用于通过导通的第二控制开关115提供所述第一参考信号给感测电极111。The driving circuit 20 includes a scanning driving circuit 21 , a sensing driving circuit 22 , and a reference signal generating circuit 23 . The scan driving circuit 21 is connected to the first control switch 113 and the second control switch 115 in the plurality of sensing units 11 respectively, and is used to drive the first control switch 113 and the second control switch 115 in each sensing unit 11. The control switch 115 is turned on in time division. The sensing driving circuit 22 is connected to the sensing electrode 111 through the first control switch 113 in each sensing unit 11, and is used to provide the excitation signal to the sensing electrode 111 through the turned-on first control switch 113 to execute biological control. information sensing. The reference signal generating circuit 23 is connected to the sensing electrode 111 through the second control switch 115 in each sensing unit 11, and is used to provide the first reference signal to the sensing electrode through the turned-on second control switch 115. electrode 111.
对于同一列的感测电极111:当所述扫描驱动电路21驱动一传感单元11中的第一控制开关113导通、第二控制开关115截止时,驱动其余传感单元11中的部分或全部传感单元11的第一控制开关113截止、第二控制开关115导通,所述参考信号产生电路23通过导通的第二控制开关115提供所述第一参考信号给感测电极111。For the sensing electrodes 111 in the same column: when the scanning drive circuit 21 drives the first control switch 113 in one sensing unit 11 to be turned on and the second control switch 115 to be turned off, it will drive some or all of the other sensing units 11 The first control switches 113 of all sensing units 11 are turned off, and the second control switches 115 are turned on, and the reference signal generation circuit 23 provides the first reference signal to the sensing electrodes 111 through the turned-on second control switches 115 .
所述感测驱动电路22通过导通的第一控制开关113提供所述激励信号给感测电极111执行生物信息感测,并接收来自感测电极111输出的感测信号,以获取生物信息。The sensing driving circuit 22 provides the excitation signal to the sensing electrode 111 to perform biometric information sensing through the turned-on first control switch 113 , and receives the sensing signal output from the sensing electrode 111 to obtain biometric information.
进一步地,当所述扫描驱动电路21驱动一行传感单元11的第一控制开关113导通、第二控制开关115截止时,所述感测驱动电路22通过导通的第一控制开关113同时提供所述激励信号给部分感测电极111执行生物信息感测,所述参考信号产生电路23通过导通的第一控制开关113提供所述第二参考信号给其余传感单元11中的部分或全部传感单元11的感测电极111。Further, when the scanning driving circuit 21 drives the first control switch 113 of a row of sensing units 11 to turn on and the second control switch 115 to turn off, the sensing driving circuit 22 simultaneously passes through the turned-on first control switch 113 Provide the excitation signal to some of the sensing electrodes 111 to perform biological information sensing, and the reference signal generation circuit 23 provides the second reference signal to some or all of the remaining sensing units 11 through the first control switch 113 that is turned on. Sensing electrodes 111 of all sensing units 11 .
在本实施方式中,所述驱动电路20可进一步包括数据选择电路24,所述数据选择电路24与所述感测驱动电路22和所述参考信号产生电路23分别连接。所述数据选择电路24进一步与各传感单元11中的第一控制开关113连接。对于各传感单元11,通过所述数据选择电路24来选择是输出所述参考信号产生电路23所提供的第二参考信号还是输出所述感测驱动电路22所提供的激励信号给感测电极111。当所述数据选择电路24输出所述激励信号给一感测电极111时,进一步输出所述感测电极111所感测的感测信号给所述驱动电路20。In this embodiment, the driving circuit 20 may further include a data selection circuit 24 , and the data selection circuit 24 is respectively connected to the sensing driving circuit 22 and the reference signal generating circuit 23 . The data selection circuit 24 is further connected to the first control switch 113 in each sensing unit 11 . For each sensing unit 11, the data selection circuit 24 is used to select whether to output the second reference signal provided by the reference signal generation circuit 23 or to output the excitation signal provided by the sensing drive circuit 22 to the sensing electrodes. 111. When the data selection circuit 24 outputs the excitation signal to a sensing electrode 111 , it further outputs the sensing signal sensed by the sensing electrode 111 to the driving circuit 20 .
由于所述驱动电路20设置有所述数据选择电路24,从而可以实现对各行的感测电极111进行分时执行生物信息感测。Since the driving circuit 20 is provided with the data selection circuit 24 , it is possible to perform time-division sensing of biological information on the sensing electrodes 111 of each row.
在一实施方式中,所述数据选择电路24包括多个数据选择器(Multiplexer)241。每一数据选择器241连接部分传感单元11,且进一步与所述参考信号产生电路23和所述感测驱动电路22分别连接。所述多个数据选择器241用于选择输出所述激励信号或所述第二参考信号给感测电极111。可选地,每一数据选择器241连接至少二列传感单元11。In one embodiment, the data selection circuit 24 includes a plurality of data selectors (Multiplexer) 241 . Each data selector 241 is connected to part of the sensing units 11 , and is further connected to the reference signal generating circuit 23 and the sensing driving circuit 22 respectively. The multiple data selectors 241 are used to select and output the excitation signal or the second reference signal to the sensing electrode 111 . Optionally, each data selector 241 is connected to at least two columns of sensing units 11 .
所述驱动电路20一次同时通过各数据选择器241分别输出所述激励信号给一感测电极111执行生物信息感测,并通过各数据选择器241分别输出所述第二参考信号给同一行的其余感测电极111中的部分或全部感测电极111。The drive circuit 20 simultaneously outputs the excitation signal to a sensing electrode 111 through each data selector 241 to perform biological information sensing, and outputs the second reference signal to the same row through each data selector 241 respectively. Some or all of the remaining sensing electrodes 111 are sensing electrodes 111 .
所述驱动电路20通过先后多次同时通过各数据选择器241以及导通的第一控制开关113输出所述激励信号给感测电极111,来驱动完一行感测电极111执行生物信息感测。The driving circuit 20 outputs the excitation signal to the sensing electrodes 111 through the data selectors 241 and the turned-on first control switch 113 multiple times successively, so as to drive a row of the sensing electrodes 111 to perform biological information sensing.
可变更地,在其它实施方式中,所述数据选择电路24也可为其它的合适的电路结构,并不局限于此处所述的多个数据选择器241。另外,当所述驱动电路20同时提供所述激励信号给每行的感测电极111时,所述数据选择电路24也可是省略的。Alternatively, in other implementation manners, the data selection circuit 24 may also have other suitable circuit structures, and is not limited to the plurality of data selectors 241 described here. In addition, when the driving circuit 20 provides the excitation signal to the sensing electrodes 111 of each row at the same time, the data selection circuit 24 can also be omitted.
所述驱动电路20可进一步包括控制单元30。所述控制单元30与所述扫描驱动电路21和所述多个数据选择器241分别连接,用于控制所述扫描驱动电路21驱动各行传感单元11中的第一控制开关113和第二控制开关115的导通时序,以及通过控制所述多个数据选择器241来控制输出所述激励信号与所述第二参考信号给感测电极111的时序。The driving circuit 20 may further include a control unit 30 . The control unit 30 is respectively connected to the scan drive circuit 21 and the plurality of data selectors 241, and is used to control the scan drive circuit 21 to drive the first control switch 113 and the second control switch 113 in each row of sensing units 11. The turn-on timing of the switch 115 and the timing of outputting the excitation signal and the second reference signal to the sensing electrode 111 are controlled by controlling the plurality of data selectors 241 .
例如,所述控制单元30控制所述扫描驱动电路21逐行导通第一控制开关113,并在控制各行传感单元11的第一控制开关113导通时,控制其余行中的部分行或全部行的传感单元11的第二控制开关115导通。对于同一传感单元11:所述控制单元30控制所述扫描驱动电路21分时导通第一控制开关113和第二控制开关115。For example, the control unit 30 controls the scan driving circuit 21 to turn on the first control switches 113 row by row, and controls some rows or The second control switches 115 of the sensing units 11 in all rows are turned on. For the same sensing unit 11 : the control unit 30 controls the scan driving circuit 21 to turn on the first control switch 113 and the second control switch 115 in time division.
所述控制单元30控制所述数据选择器241分时输出所述激励信号给与所述数据选择器241相连接的各传感单元11。The control unit 30 controls the data selector 241 to output the excitation signal to each sensing unit 11 connected to the data selector 241 in time division.
在一些实施方式中,所述生物信息传感装置1例如进一步包括多个扫描线群组B和多个数据线群组D。每一扫描线群组B连接一行传感单元11,每一数据线群组D连接一列传感单元11。In some implementations, the biological information sensing device 1 further includes a plurality of scanning line groups B and a plurality of data line groups D, for example. Each scan line group B is connected to a row of sensing units 11 , and each data line group D is connected to a column of sensing units 11 .
具体地,每一扫描线群组B包括第一扫描线B1和第二扫描线B2。每一数据线群组D包括第一数据线D1和第二数据线D2。Specifically, each scan line group B includes a first scan line B1 and a second scan line B2. Each data line group D includes a first data line D1 and a second data line D2.
所述第一控制开关113包括控制电极G1、第一传输电极S11、和第二传输电极S12。所述第二控制开关115包括控制电极G2、第一传输电极S21、和第二传输电极S22。所述第一扫描线B1连接所述扫描驱动电路21和所述第一控制开关113的控制电极G1。所述第二扫描线B2连接所述扫描驱动电路21和所述第二控制开关115的控制电极G2。所述第一数据线D1连接所述数据选择器241和第一控制开关113的第一传输电极S11。所述第二数据线D2连接所述参考信号产生电路23和第二控制开关115的第一传输电极S21。所述第一控制开关113的第二传输电极S12连接所述感测电极111。所述第二控制开关115的第二传输电极S22连接所述感测电极111。The first control switch 113 includes a control electrode G1, a first transmission electrode S11, and a second transmission electrode S12. The second control switch 115 includes a control electrode G2, a first transmission electrode S21, and a second transmission electrode S22. The first scanning line B1 is connected to the scanning driving circuit 21 and the control electrode G1 of the first control switch 113 . The second scanning line B2 is connected to the scanning driving circuit 21 and the control electrode G2 of the second control switch 115 . The first data line D1 is connected to the data selector 241 and the first transmission electrode S11 of the first control switch 113 . The second data line D2 is connected to the reference signal generating circuit 23 and the first transmission electrode S21 of the second control switch 115 . The second transmission electrode S12 of the first control switch 113 is connected to the sensing electrode 111 . The second transmission electrode S22 of the second control switch 115 is connected to the sensing electrode 111 .
所述第一数据线D1用于传输所述激励信号和所述第二参考信号,所述第二数据线D2用于传输所述第一参考信号,所述扫描驱动电路21通过所述第一扫描线B1、第二扫描线B2提供扫描开启信号给第一控制开关113和第二控制开关115,来控制第一控制开关113和第二控制开关115导通,通过所述第一扫描线B1、第二扫描线B2提供扫描截止信号给第一控制开关113和第二控制开关115,来控制第一控制开关113和第二控制开115关截止。The first data line D1 is used to transmit the excitation signal and the second reference signal, the second data line D2 is used to transmit the first reference signal, and the scan driving circuit 21 passes the first The scan line B1 and the second scan line B2 provide scan start signals to the first control switch 113 and the second control switch 115 to control the conduction of the first control switch 113 and the second control switch 115, through which the first scan line B1 , The second scan line B2 provides a scan cut-off signal to the first control switch 113 and the second control switch 115 to control the first control switch 113 and the second control switch 115 to be turned off.
所述第一扫描线B1和第二扫描线B2均沿行方向延伸、沿列方向排列。所述第一数据线D1和所述第二数据线D2均沿列方向延伸、沿行方向排列。Both the first scanning lines B1 and the second scanning lines B2 extend along the row direction and are arranged along the column direction. Both the first data lines D1 and the second data lines D2 extend along the column direction and are arranged along the row direction.
在一些实施方式中,所述生物信息传感装置1例如进一步包括第一参考信号线R1、第二参考信号线R2、和感测信号线L。所述第一参考信号线R1连接所述参考信号产生电路23和第二数据线D2,用于传输所述第一参考信号。所述第二参考信号线R2连接所述参考信号产生电路23和所述多个数据选择器241,用于传输所述第二参考信号。所述感测信号线L连接所述感测驱动电路22和所述多个数据选择器241,用于传输所述激励信号给感测电极111以及传输来自感测电极11的感测信号给感测驱动电路22。In some implementations, the biological information sensing device 1 further includes a first reference signal line R1, a second reference signal line R2, and a sensing signal line L, for example. The first reference signal line R1 is connected to the reference signal generating circuit 23 and the second data line D2 for transmitting the first reference signal. The second reference signal line R2 is connected to the reference signal generating circuit 23 and the plurality of data selectors 241 for transmitting the second reference signal. The sensing signal line L is connected to the sensing driving circuit 22 and the plurality of data selectors 241 for transmitting the excitation signal to the sensing electrode 111 and transmitting the sensing signal from the sensing electrode 11 to the sensing electrode 111. Test drive circuit 22.
所述第一参考信号线R1、第二参考信号线R2、和感测信号线L主要沿行方向延伸。The first reference signal line R1, the second reference signal line R2, and the sensing signal line L mainly extend along a row direction.
请参阅图3,图3为本发明图1所示的数据选择器241的一实施例的电路结构示意图。所述数据选择器241包括8个开关单元243,每个开关单元243包括一第一选择开关S1和一第二选择开关S2。所述第一选择开关S1包括控制电极G3、第一传输电极S31、和第二传输电极S32。所述第二选择开关S2包括控制电极G4、第一传输电极S41、和第二传输电极S42。所述控制单元30与各个开关单元243中的控制电极G3和控制电极G4分别连接。所述第一传输电极S31与所述感测驱动电路22连接。所述第一传输电极S41与所述参考信号产生电路23连接。每一个开关单元243中的第二传输电极S32和第二传输电极S42相连接,并连接至第一控制开关113的第一传输电极S11。Please refer to FIG. 3 . FIG. 3 is a schematic circuit diagram of an embodiment of the data selector 241 shown in FIG. 1 of the present invention. The data selector 241 includes eight switch units 243, and each switch unit 243 includes a first selection switch S1 and a second selection switch S2. The first selection switch S1 includes a control electrode G3, a first transfer electrode S31, and a second transfer electrode S32. The second selection switch S2 includes a control electrode G4, a first transmission electrode S41, and a second transmission electrode S42. The control unit 30 is respectively connected to the control electrode G3 and the control electrode G4 in each switch unit 243 . The first transmission electrode S31 is connected to the sensing driving circuit 22 . The first transmission electrode S41 is connected to the reference signal generation circuit 23 . The second transmission electrode S32 in each switch unit 243 is connected to the second transmission electrode S42 and connected to the first transmission electrode S11 of the first control switch 113 .
对于同一开关单元243:所述控制单元30控制所述第一选择开关S1和第二选择开关S2分时导通,即,当第一选择开关S1导通时,第二选择开关S2截止,当第二选择开关S2导通时,第一选择开关S1截止。对于同一数据选择器241:当所述控制单元30控制一开关单元243中的第一选择开关S1导通、第二选择开关S2截止时,控制其余开关单元243中的第一选择开关S1截止、第二选择开关S2导通。通过导通的第一选择开关S1,所述感测驱动电路22提供所述激励信号至第一控制开关113导通的传感单元11的感测电极111;通过导通的第二选择开关S2,所述参考信号产生电路23提供所述第二参考信号至第二控制开关115导通的传感单元11的感测电极111。For the same switch unit 243: the control unit 30 controls the first selection switch S1 and the second selection switch S2 to be turned on in time division, that is, when the first selection switch S1 is turned on, the second selection switch S2 is turned off; When the second selection switch S2 is turned on, the first selection switch S1 is turned off. For the same data selector 241: when the control unit 30 controls the first selection switch S1 in one switch unit 243 to be turned on and the second selection switch S2 to be turned off, it controls the first selection switch S1 in the remaining switch units 243 to be turned off, The second selection switch S2 is turned on. Through the turned-on first selection switch S1, the sensing drive circuit 22 provides the excitation signal to the sensing electrode 111 of the sensing unit 11 with the first control switch 113 turned on; through the turned-on second selection switch S2 The reference signal generating circuit 23 provides the second reference signal to the sensing electrode 111 of the sensing unit 11 where the second control switch 115 is turned on.
在本实施方式中,所述多个数据选择器241的数量例如为16个,每一数据选择器241包括8个开关单元243。对应地,同一行的感测电极111的数量为128个。In this embodiment, the number of the plurality of data selectors 241 is, for example, 16, and each data selector 241 includes 8 switch units 243 . Correspondingly, the number of sensing electrodes 111 in the same row is 128.
需要说明的是,在图1中,受限于附图的大小,图1只示出每一数据选择器241分别与二列传感单元11连接,若与图3所示的数据选择器241的结构相对应,图1实际上省略了每一数据选择器241还与另外六列传感单元11相连接的结构。另外,后述的图4的结构与图1所示的结构相对应,同样省略了每一数据选择器241还与另外六列传感单元11相连接的结构,在此一并做出说明。It should be noted that, in FIG. 1, limited by the size of the drawings, FIG. 1 only shows that each data selector 241 is connected to the two columns of sensing units 11 respectively. If it is connected with the data selector 241 shown in FIG. Corresponding to the structure of FIG. 1 , the structure in which each data selector 241 is also connected to the other six columns of sensing units 11 is actually omitted in FIG. 1 . In addition, the structure of FIG. 4 described later corresponds to the structure shown in FIG. 1 , and the structure in which each data selector 241 is also connected to the other six columns of sensing units 11 is also omitted, and will be described here together.
相应地,所述驱动电路20例如每次通过所述16个数据选择器241同时输出16个激励信号对应给同一行的16个感测电极111,并同时输出112个第二参考信号对应给同一行的112个感测电极111。Correspondingly, the driving circuit 20, for example, simultaneously outputs 16 excitation signals corresponding to the 16 sensing electrodes 111 in the same row through the 16 data selectors 241 each time, and simultaneously outputs 112 second reference signals corresponding to the same row. 112 sensing electrodes 111 in a row.
以所述生物信息传感装置1为指纹传感装置为例,当用户的手指接近或触摸所述多个传感单元11的感测电极111时,由于脊、谷与感测电极111的距离不同,因此,脊、谷与感测电极111所分别形成的电容对应不同,从而对感测电极111上的电荷量的影响就不同,从而驱动电路20可以根据感测电极111输出的感测信号可以获知相应的指纹信息。Taking the biometric information sensing device 1 as an example of a fingerprint sensing device, when the user's finger approaches or touches the sensing electrodes 111 of the plurality of sensing units 11, due to the distance between the ridges, valleys and the sensing electrodes 111 Therefore, the capacitances formed by the ridges, valleys and the sensing electrodes 111 are different, so that the influence on the amount of charge on the sensing electrodes 111 is different, so that the driving circuit 20 can output the sensing signal according to the sensing electrodes 111. Corresponding fingerprint information can be obtained.
所述生物信息传感装置1一实施方式的工作原理如下。The working principle of an embodiment of the biological information sensing device 1 is as follows.
所述控制单元30控制各数据选择器241中的一开关单元243中的第一选择开关S1导通、第二选择开关S2截止,控制各数据选择器241中的其余开关单元243中的第一选择开关S1截止,第二选择开关S2导通,相应地,所述感测驱动电路22通过各数据选择器241中导通的第一选择开关S1提供所述激励信号至第一数据线D1上,所述参考信号产生电路23通过各数据选择器241中导通的第二选择开关S2提供所述第二参考信号至第一数据线D1上。通过所述控制单元30的多次控制,所述各数据选择器241中的各开关单元243中的第一选择开关S1分时导通。The control unit 30 controls the first selection switch S1 in a switch unit 243 in each data selector 241 to turn on, the second selection switch S2 to turn off, and controls the first selection switch S2 in the remaining switch units 243 in each data selector 241. The selection switch S1 is turned off, and the second selection switch S2 is turned on. Correspondingly, the sensing drive circuit 22 provides the excitation signal to the first data line D1 through the first selection switch S1 turned on in each data selector 241 The reference signal generation circuit 23 provides the second reference signal to the first data line D1 through the second selection switch S2 turned on in each data selector 241 . Through multiple times of control by the control unit 30 , the first selection switch S1 in each switch unit 243 in each data selector 241 is time-divisionally turned on.
所述控制单元30控制所述扫描驱动电路21逐行驱动第一控制开关113导通、第二控制开关115截止,并在分别控制各行的第一控制开关113导通、第二控制开关115截止的同时,控制其余行的第一控制开关113截止、第二控制开关115导通,相应地,所述第一数据线D1上的激励信号通过导通的第一控制开关113输出给感测电极111,并接收来自感测电极111输出的感测信号,以执行生物信息感测,所述第一数据线D1上的第二参考信号通过导通的第一控制开关113输出给感测电极111,另外,所述参考信号产生电路23通过导通的第二控制开关115提供所述第一参考信号到感测电极111。The control unit 30 controls the scanning drive circuit 21 to drive the first control switch 113 to be turned on and the second control switch 115 to be turned off row by row, and control the first control switch 113 of each row to be turned on and the second control switch 115 to be turned off. At the same time, the first control switch 113 that controls the remaining rows is turned off, and the second control switch 115 is turned on. Correspondingly, the excitation signal on the first data line D1 is output to the sensing electrode through the turned-on first control switch 113 111, and receive the sensing signal output from the sensing electrode 111 to perform biological information sensing, the second reference signal on the first data line D1 is output to the sensing electrode 111 through the first control switch 113 that is turned on , in addition, the reference signal generation circuit 23 provides the first reference signal to the sensing electrode 111 through the turned-on second control switch 115 .
通过在各次驱动部分感测电极111执行生物信息感测时,提供第一参考信号与第二参考信号给其余相应的感测电极111,来提高所述生物信息感测装置1的生物信息的感测精度。By providing the first reference signal and the second reference signal to the remaining corresponding sensing electrodes 111 when the sensing electrodes 111 are driven each time to perform biological information sensing, the accuracy of the biological information of the biological information sensing device 1 is improved. Sensing accuracy.
请一并参阅图1、图4至图6,图4为本发明生物信息传感装置的另一实施方式的结构示意图。图5为图4所示生物信息传感装置的部分剖面结构示意图。图6为图4所述生物信息传感装置的使用状态图。所述生物信息传感装置1包括生物信息传感器2。所述生物信息传感器2包括绝缘基板2a、所述多个传感单元11、所述多个扫描线群组B、所述多个数据线群组D、和所述第一参考信号线R1。所述多个传感单元11、所述多个扫描线群组B、所述多个数据线群组D、和所述第一参考信号线R1形成在所述绝缘基板2a上。Please refer to FIG. 1 , FIG. 4 to FIG. 6 together. FIG. 4 is a schematic structural diagram of another embodiment of the biological information sensing device of the present invention. FIG. 5 is a partial cross-sectional structural schematic diagram of the biological information sensing device shown in FIG. 4 . FIG. 6 is a diagram of the use state of the biological information sensing device shown in FIG. 4 . The biological information sensing device 1 includes a biological information sensor 2 . The biological information sensor 2 includes an insulating substrate 2a, the plurality of sensing units 11, the plurality of scan line groups B, the plurality of data line groups D, and the first reference signal line R1. The plurality of sensing units 11, the plurality of scan line groups B, the plurality of data line groups D, and the first reference signal line R1 are formed on the insulating substrate 2a.
在本实施方式中,所述各传感单元11中的第一控制开关113和第二控制开关115例如均为薄膜晶体管(Thin Film Transistor,TFT)开关,所述绝缘基板2a例如为玻璃基板,从而,采用玻璃基板上形成TFT开关的工艺来制作所述生物信息传感器2,进而降低生物信息传感器2以及包括所述生物信息传感器2的生产制造成本。当所述第一控制开关113、第二控制开关115为薄膜晶体管开关时,所述控制电极G1、G2为栅极,所述第一传输电极S11、S21为源极,所述第二传输电极S12、S22为漏极。In this embodiment, the first control switch 113 and the second control switch 115 in each sensing unit 11 are, for example, thin film transistor (Thin Film Transistor, TFT) switches, and the insulating substrate 2a is, for example, a glass substrate. Therefore, the biological information sensor 2 is fabricated by adopting a process of forming a TFT switch on a glass substrate, thereby reducing the production cost of the biological information sensor 2 and including the biological information sensor 2 . When the first control switch 113 and the second control switch 115 are thin film transistor switches, the control electrodes G1 and G2 are gate electrodes, the first transfer electrodes S11 and S21 are source electrodes, and the second transfer electrodes S12 and S22 are drains.
然,本发明并不限制所述绝缘基板2a为玻璃基板,也可为其它合适类型的绝缘基板,同样,也不限制所述第一控制开关113和所述第二控制开关115均为薄膜晶体管开关,也可为其它合适类型的开关。However, the present invention does not limit the insulating substrate 2a to be a glass substrate, and may also be other suitable types of insulating substrates, and also does not limit the first control switch 113 and the second control switch 115 to be thin film transistors. switch, or any other suitable type of switch.
所述薄膜晶体管开关例如为低温多晶硅(LTPS)薄膜晶体管开关、氧化铟镓锌(IGZO)薄膜晶体管开关、非晶硅薄膜晶体管开关等合适类型的薄膜晶体管开关。较佳地,所述薄膜晶体管开关为低温多晶硅薄膜晶体管开关。The thin film transistor switch is, for example, a low temperature polysilicon (LTPS) thin film transistor switch, an indium gallium zinc oxide (IGZO) thin film transistor switch, an amorphous silicon thin film transistor switch and other suitable types of thin film transistor switches. Preferably, the thin film transistor switch is a low temperature polysilicon thin film transistor switch.
所述绝缘基板2a包括第一表面A1和与第一表面A1相对设置的第二表面A2,所述第一表面A1用于接收目标物体的触摸或接近输入,所述多个传感单元11、所述多个扫描线群组B、所述多个数据线群组D、和所述第一参考信号线R1设置在所述第二表面A2。The insulating substrate 2a includes a first surface A1 and a second surface A2 opposite to the first surface A1, the first surface A1 is used to receive a touch or proximity input of a target object, and the plurality of sensing units 11, The plurality of scan line groups B, the plurality of data line groups D, and the first reference signal line R1 are disposed on the second surface A2.
所述多个传感单元11的感测电极111相较于所述第一控制开关113、所述第二控制开关113、所述多个扫描线群组B、和所述多个数据线群D组更靠近所述第二表面A2。The sensing electrodes 111 of the plurality of sensing units 11 are compared to the first control switch 113, the second control switch 113, the plurality of scanning line groups B, and the plurality of data line groups Group D is closer to the second surface A2.
所述第一控制开关113、所述第二控制开关115、所述多个扫描线群组B、和所述多个数据线群组D位于所述多个传感单元11的感测电极111背对所述绝缘基板2a的一侧。The first control switch 113, the second control switch 115, the plurality of scanning line groups B, and the plurality of data line groups D are located on the sensing electrodes 111 of the plurality of sensing units 11 The side facing away from the insulating substrate 2a.
较佳地,所述多个传感单元11的感测电极111覆盖所述第一控制开关113、所述第二控制开关115、所述多个扫描线群组B、和所述多个数据线群组D。Preferably, the sensing electrodes 111 of the plurality of sensing units 11 cover the first control switch 113, the second control switch 115, the plurality of scan line groups B, and the plurality of data line group D.
所述生物信息传感器1进一步包括钝化层16,所述钝化层16设置在所述多个传感单元11、所述多个扫描线群组B、所述多个数据线群组D、和所述第一参考信号线R1上。The biological information sensor 1 further includes a passivation layer 16, and the passivation layer 16 is arranged on the plurality of sensing units 11, the plurality of scanning line groups B, the plurality of data line groups D, and the first reference signal line R1.
所述钝化层16用于平坦化所述生物信息传感器2的表面,以及对所述多个传感单元11等元件进行保护。The passivation layer 16 is used to planarize the surface of the biological information sensor 2 and protect the plurality of sensing units 11 and other components.
请一并参阅图5和图7,图7为生物信息传感器2的一实施方式的制作方法流程图。所述生物信息传感器2的制作方法如下。Please refer to FIG. 5 and FIG. 7 together. FIG. 7 is a flowchart of a manufacturing method of an embodiment of the biological information sensor 2 . The fabrication method of the biological information sensor 2 is as follows.
F1:提供一绝缘基板2a;F1: providing an insulating substrate 2a;
所述绝缘基板2a例如为玻璃基板。The insulating substrate 2a is, for example, a glass substrate.
F2:在所述绝缘基板2a上形成所述多个感测电极111;F2: forming the plurality of sensing electrodes 111 on the insulating substrate 2a;
所述感测电极111例如由金属材料制成。然,可变更地,所述感测电极111也可为有其它合适的导电材料制成,例如,所述感测电极111也可由透明的导电材料制成,所述透明导电材料例如为氧化铟锡、氧化铟锌等等。另外,所述感测电极也可由钼锂钼等合金材料制成。The sensing electrodes 111 are made of metal materials, for example. However, alternatively, the sensing electrode 111 can also be made of other suitable conductive materials, for example, the sensing electrode 111 can also be made of a transparent conductive material, such as indium oxide Tin, Indium Zinc Oxide, etc. In addition, the sensing electrodes may also be made of alloy materials such as molybdenum, lithium and molybdenum.
F3:于所述多个感测电极111上形成第一绝缘层12;F3: forming a first insulating layer 12 on the plurality of sensing electrodes 111;
所述第一绝缘层12例如为氧化硅、氮化硅等材料制成。The first insulating layer 12 is made of, for example, silicon oxide, silicon nitride and other materials.
F4:于所述第一绝缘层12上形成第一控制开关113和第二控制开关115,并于所述第一绝缘层12上形成贯穿至感测电极111的通孔H,通过所述通孔H,第一控制开关113和第二控制开关115与感测电极111连接;F4: Form a first control switch 113 and a second control switch 115 on the first insulating layer 12, and form a through hole H penetrating to the sensing electrode 111 on the first insulating layer 12, through which Hole H, the first control switch 113 and the second control switch 115 are connected to the sensing electrode 111;
每一传感单元11的第一控制开关113和第二控制开关115形成在感测电极111上方,且分别通过通孔H与感测电极111相连接。The first control switch 113 and the second control switch 115 of each sensing unit 11 are formed above the sensing electrodes 111 and connected to the sensing electrodes 111 through the through holes H respectively.
F5:于所述第一控制开关113和所述第二控制开关115上形成钝化层16。F5: forming a passivation layer 16 on the first control switch 113 and the second control switch 115 .
所述生物信息传感器2制作完毕。需要说明的是,在上述的制作方法中,省略形成所述多个扫描线群组B、多个数据线群组D、和第一参考信号线R1的步骤。The biological information sensor 2 is finished. It should be noted that, in the above manufacturing method, the step of forming the plurality of scan line groups B, the plurality of data line groups D, and the first reference signal line R1 is omitted.
由于按照上述制作方法形成的生物信息传感器2的制作工艺简单,无需再额外设置一保护盖板或形成涂覆层(Coating层),从而可节省制造成本。Since the manufacturing process of the biological information sensor 2 formed according to the above manufacturing method is simple, there is no need to additionally provide a protective cover plate or form a coating layer (Coating layer), thereby saving manufacturing cost.
然,可变更地,在其它实施方式中,所述生物信息传感器2的制作方法也可为:在所述绝缘基板2a上形成各传感单元11的第一控制开关113和第二控制开关115,于第一控制开关113和第二控制开关115上形成第一绝缘层12,并于所述第一绝缘层12上形成贯穿至第一控制开关113的第二传输电极和第二控制开关115的第二传输电极S22的通孔H,然后在所述第一绝缘层12上形成连接各传感单元11的所述第一控制开关113和所述第二控制开关115上的感测电极111,接下来,在感测电极111上设置保护盖板或者形成涂覆层(Coating层)。如此,也是可以的。需要说明的是,此处也省略了对所述多个扫描线群组B、多个数据线群组D、和第一参考信号线R1的步骤的描述。However, alternatively, in other embodiments, the manufacturing method of the biological information sensor 2 may also be: forming the first control switch 113 and the second control switch 115 of each sensing unit 11 on the insulating substrate 2a , forming a first insulating layer 12 on the first control switch 113 and the second control switch 115, and forming a second transmission electrode penetrating through the first control switch 113 and the second control switch 115 on the first insulating layer 12 The through hole H of the second transmission electrode S22 is formed on the first insulating layer 12 to connect the first control switch 113 of each sensing unit 11 and the sensing electrode 111 on the second control switch 115 , Next, a protective cover plate or a coating layer (Coating layer) is formed on the sensing electrode 111 . This is also possible. It should be noted that the description of the steps of the plurality of scan line groups B, the plurality of data line groups D, and the first reference signal line R1 is also omitted here.
下面继续参阅图5,并请一并参阅图8,图8为制作第一控制开关113与第二控制开关115的方法流程图。以第一控制开关113和第二控制开关115为非晶硅薄膜晶体管为例,对在制作生物信息传感器2的过程中形成第一控制开关113和第二控制开关115的制造方法进行说明如下。Continue to refer to FIG. 5 , and please refer to FIG. 8 together. FIG. 8 is a flowchart of a method for manufacturing the first control switch 113 and the second control switch 115 . Taking amorphous silicon thin film transistors as an example for the first control switch 113 and the second control switch 115 , the manufacturing method for forming the first control switch 113 and the second control switch 115 in the process of manufacturing the biological information sensor 2 is described as follows.
F41:于所述第一绝缘层12上形成第一控制开关113的控制电极G1和第二控制开关115的控制电极G2;F41: forming the control electrode G1 of the first control switch 113 and the control electrode G2 of the second control switch 115 on the first insulating layer 12;
F42:于所述第一绝缘层12、所述控制电极G1、G2上形成第二绝缘层13;F42: forming a second insulating layer 13 on the first insulating layer 12 and the control electrodes G1 and G2;
所述第二绝缘层13例如为氧化硅、氮化硅等材料制成。The second insulating layer 13 is made of, for example, silicon oxide, silicon nitride and other materials.
F43:于所述第二绝缘层13上形成有源层14、15;F43: forming active layers 14 and 15 on the second insulating layer 13;
所述有源层14、15为非晶硅层。The active layers 14 and 15 are amorphous silicon layers.
F44:于所述第二绝缘层13和所述第一绝缘层12上形成贯穿至所述感测电极111的通孔H;F44: forming a through hole H penetrating to the sensing electrode 111 on the second insulating layer 13 and the first insulating layer 12;
需要说明的是,步骤F4与步骤F5可合并在同一步骤实现,然,也可为在二个不同的步骤中形成。It should be noted that step F4 and step F5 can be combined and implemented in one step, however, they can also be formed in two different steps.
F45:于所述第二绝缘层13上形成第一控制开关113的第一传输电极S11和第二传输电极S12、形成第二控制开关115的第一传输电极S21和第二传输电极S22,且所述第二传输电极S12和第二传输电极S22充满所述通孔H,以分别连接所述感测电极111连接。F45: forming the first transmission electrode S11 and the second transmission electrode S12 of the first control switch 113 on the second insulating layer 13, forming the first transmission electrode S21 and the second transmission electrode S22 of the second control switch 115, and The second transmission electrode S12 and the second transmission electrode S22 are filled with the through hole H to be respectively connected to the sensing electrodes 111 .
所述第一传输电极S11和第二传输电极S12位于所述有源层14的两侧,所述第一传输电极S21和第二传输电极S22位于所述有源层15的两侧,从而形成所述第一控制开关113和所述第二控制开关115。The first transfer electrode S11 and the second transfer electrode S12 are located on both sides of the active layer 14, and the first transfer electrode S21 and the second transfer electrode S22 are located on both sides of the active layer 15, thereby forming The first control switch 113 and the second control switch 115 .
在本实施方式中,所述第一控制开关113的第二传输电极S12和所述第二控制开关115的第二传输电极S22分别通过一通孔H与所述感测电极111连接。然,在其它实施方式中,同一传感单元11中的所述第一控制开关113的第二传输电极S12和所述第二控制开关115的第二传输电极S22可通过同一通孔H与所述感测电极111连接。In this embodiment, the second transmission electrode S12 of the first control switch 113 and the second transmission electrode S22 of the second control switch 115 are respectively connected to the sensing electrode 111 through a through hole H. However, in other implementation manners, the second transmission electrode S12 of the first control switch 113 and the second transmission electrode S22 of the second control switch 115 in the same sensing unit 11 can be connected to the second transmission electrode S22 of the second control switch 115 through the same through hole H. The sensing electrodes 111 are connected.
步骤F5中:于所述第二绝缘层13、第一传输电极S11、有源层14、第二传输电极S12、第一传输电极S21、有源层15、第二传输电极S22上形成所述钝化层16。In step F5: forming the said Passivation layer 16.
上述制作方法中形成的第一控制开关113与第二控制开关115主要是底栅型(Bottom-Gate)的薄膜晶体管,然,所述第一控制开关113与第二控制开关115也可为顶栅型(Top-Gate)的薄膜晶体管,例如低温多晶硅薄膜晶体管。The first control switch 113 and the second control switch 115 formed in the above manufacturing method are mainly bottom-gate thin film transistors, however, the first control switch 113 and the second control switch 115 can also be top Gate-type (Top-Gate) thin film transistors, such as low temperature polysilicon thin film transistors.
需要进一步说明的是,所述多个扫描线群组B、多个数据线群组D、第一参考信号线R1、所述第一控制开关113、所述第二控制开关115的连接走线最后例如通过过孔等方式与所述绝缘基板2a的第二表面A2上形成的周围布线(未标示)相连接,以与前述的驱动电路20或后述的控制芯片3中相应的电路进行信号传输。It should be further explained that, the connecting wires of the plurality of scan line groups B, the plurality of data line groups D, the first reference signal line R1, the first control switch 113, and the second control switch 115 Finally, for example, it is connected with the surrounding wiring (not marked) formed on the second surface A2 of the insulating substrate 2a through a via hole, so as to communicate with the corresponding circuit in the aforementioned drive circuit 20 or the control chip 3 described later. transmission.
可选地,所述生物信息传感器2进一步包括所述扫描驱动电路21、所述多个数据选择器241、所述第二参考信号线R2、和所述感测信号线L。所述扫描驱动电路21、所述多个数据选择器241、所述第二参考信号线R2、和所述感测信号线L形成在所述绝缘基板2a的第二表面A2上。Optionally, the biological information sensor 2 further includes the scan driving circuit 21 , the plurality of data selectors 241 , the second reference signal line R2 , and the sensing signal line L. The scan driving circuit 21, the plurality of data selectors 241, the second reference signal line R2, and the sensing signal line L are formed on the second surface A2 of the insulating substrate 2a.
所述扫描驱动电路21、所述多个数据选择器241、所述第二参考信号线R2、和所述感测信号线L设置在所述多个传感单元11的周围。The scan driving circuit 21 , the plurality of data selectors 241 , the second reference signal line R2 , and the sensing signal line L are disposed around the plurality of sensing units 11 .
所述数据选择器241的第一选择开关S1和第二选择开关S2例如也均为薄膜晶体管开关。所述扫描驱动电路21一般包括多个控制开关(图未示),且所述多个控制开关例如为薄膜晶体管开关。相应地,所述多个数据选择器241和所述扫描驱动电路21在所述第一控制开关113和所述第二控制开关115形成时,通过相同或相似的制作工艺一并形成,从而提高生物信息传感器2的集成度,并降低制作成本。The first selection switch S1 and the second selection switch S2 of the data selector 241 are also thin film transistor switches, for example. The scan driving circuit 21 generally includes a plurality of control switches (not shown in the figure), and the plurality of control switches are thin film transistor switches, for example. Correspondingly, the plurality of data selectors 241 and the scan driving circuit 21 are formed together through the same or similar manufacturing process when the first control switch 113 and the second control switch 115 are formed, thereby improving The integration degree of the biological information sensor 2 is improved, and the production cost is reduced.
在一些实施方式中,所述生物信息传感装置1包括控制芯片3,所述控制芯片3包括所述控制单元30、所述参考信号产生电路23、和所述感测驱动电路22。即,前述的驱动电路20中的一部分电路形成在控制芯片3中,一部分形成在生物信息传感器2上,如此设置,一方面提高生物信息传感装置1的集成度,减小所述生物信息传感装置1的体积,另外,也可降低生物信息传感装置1的制造成本。In some implementations, the biological information sensing device 1 includes a control chip 3 , and the control chip 3 includes the control unit 30 , the reference signal generating circuit 23 , and the sensing driving circuit 22 . That is, a part of the aforementioned driving circuit 20 is formed in the control chip 3, and a part is formed on the biological information sensor 2. Such arrangement can improve the integration degree of the biological information sensing device 1 on the one hand and reduce the The volume of the sensing device 1 can be reduced, and the manufacturing cost of the biological information sensing device 1 can also be reduced.
可选地,所述生物信息传感器2和所述控制芯片3例如分别为裸片(Die),所述控制芯片3例如通过覆晶工艺(Flip-Chip)设置在所述绝缘基板2a上。当所述绝缘基板2a例如为玻璃基板时,所述控制芯片3例如通过玻璃上芯片(Chip On Glass,COG)的方式绑定(Bonding)在所述玻璃基板上。当所述绝缘基板2a例如为薄膜基板时,所述控制芯片3例如通过薄膜上芯片(Chip On Film,COF)的方式绑定在所述薄膜基板上。然,所述控制芯片3也可采用其它合适的工艺形成在所述绝缘基板2a上,并不限制为此处所述的覆晶工艺。Optionally, the biological information sensor 2 and the control chip 3 are, for example, dies, respectively, and the control chip 3 is disposed on the insulating substrate 2a by, for example, a flip-chip process (Flip-Chip). When the insulating substrate 2a is, for example, a glass substrate, the control chip 3 is bonded (Bonding) on the glass substrate by, for example, Chip On Glass (COG). When the insulating substrate 2 a is, for example, a thin film substrate, the control chip 3 is bound on the thin film substrate by, for example, a chip on film (Chip On Film, COF). However, the control chip 3 can also be formed on the insulating substrate 2a by other suitable processes, and is not limited to the flip-chip process described here.
当所述控制芯片3设置在所述生物信息传感器的绝缘基板2a上之后,再将所述控制芯片3与所述生物信息传感器1放置在模具中,通过注塑(Molding)工艺形成封装体(图未示)在所述生物信息传感器2和所述控制芯片3上,从而形成为一芯片(Chip)。所述封装体例如为环氧树脂材料制成,但不局限于所述环氧树脂材料,也可为其它合适的材料。After the control chip 3 is arranged on the insulating substrate 2a of the biological information sensor, the control chip 3 and the biological information sensor 1 are placed in a mold, and a package is formed by an injection molding (Molding) process (Fig. not shown) on the biological information sensor 2 and the control chip 3 to form a chip (Chip). The package body is made of, for example, epoxy resin material, but is not limited to the epoxy resin material, and may also be other suitable materials.
当所述生物信息传感装置1形成后,所述绝缘基板2a的第一表面A1用于接收目标物体的接近或触摸输入,或者说,当用户使用所述生物信息传感装置1感测生物信息时,所述第一表面A1相较于所述第二表面A2更邻近目标物体。After the biological information sensing device 1 is formed, the first surface A1 of the insulating substrate 2a is used to receive the approach or touch input of the target object, or in other words, when the user uses the biological information sensing device 1 to sense biological information, the first surface A1 is closer to the target object than the second surface A2.
在其它实施方式中,所述扫描驱动电路21、所述数据选择电路24、所述第二参考信号线R2、和所述感测信号线L也可非设置在所述绝缘基板2a上。例如所述扫描驱动电路21和所述数据选择电路24也可设置在所述控制芯片3中,或者,设置在另外的芯片中,又或者,以芯片之外的电路方式存在也是可以的。In other implementation manners, the scan driving circuit 21, the data selection circuit 24, the second reference signal line R2, and the sensing signal line L may not be disposed on the insulating substrate 2a. For example, the scan driving circuit 21 and the data selection circuit 24 may also be disposed in the control chip 3 , or disposed in another chip, or exist as circuits outside the chip.
请参阅图9,图9为本发明生物信息传感装置的又一实施例的结构示意图。所述生物信息传感装置1进一步包括连接件4,所述连接件4用于连接所述控制芯片3与所述生物信息传感器2。所述连接件4例如为软性电路板(Flexible Printed Circuit Board,FPCB)。所述控制芯片3例如设置在所述软性电路板4上,并通过所述软性电路板4与所述生物信息传感器2连接。通过所述软性电路板4,在所述生物信息传感器2与所述控制芯片3之间进行信号传输。Please refer to FIG. 9 . FIG. 9 is a schematic structural diagram of another embodiment of the biological information sensing device of the present invention. The biological information sensing device 1 further includes a connecting piece 4 for connecting the control chip 3 and the biological information sensor 2 . The connector 4 is, for example, a flexible printed circuit board (Flexible Printed Circuit Board, FPCB). The control chip 3 is, for example, disposed on the flexible circuit board 4 and connected to the biological information sensor 2 through the flexible circuit board 4 . Signal transmission is performed between the biological information sensor 2 and the control chip 3 through the flexible circuit board 4 .
在此实施方式中,所述生物信息传感器2和所述控制芯片3也可均为一芯片(Chip),或者,所述生物信息传感器2为裸片,所述控制芯片3为芯片,或者,所述生物信息传感器2和所述控制芯片3均为裸片。In this embodiment, the biological information sensor 2 and the control chip 3 can both be a chip (Chip), or the biological information sensor 2 is a bare chip, and the control chip 3 is a chip, or, Both the biological information sensor 2 and the control chip 3 are bare chips.
在上述各实施方式中,所述生物信息传感器2为裸片或芯片时,通过设置所述数据选择电路24来对应控制分时输出激励信号给同一行的感测电极111。由于所述数据选择电路24的每一数据选择器241分别设置与所述感测驱动电路22相连接的一端口(图未示),所述端口用于传输激励信号或感测信号,相应地,所述生物信息传感器2上对应每个端口设置一连接引脚(图未示),用以连接所述端口与所述感测驱动电路22。如此,可以减少生物信息传感器2与控制芯片3之间的连接引脚的数量。In the above-mentioned embodiments, when the biological information sensor 2 is a bare chip or a chip, the data selection circuit 24 is provided to correspondingly control the time-division output of the excitation signal to the sensing electrodes 111 in the same row. Since each data selector 241 of the data selection circuit 24 is respectively provided with a port (not shown) connected to the sensing drive circuit 22, the port is used to transmit an excitation signal or a sensing signal, correspondingly A connection pin (not shown) corresponding to each port is provided on the biological information sensor 2 for connecting the port and the sensing driving circuit 22 . In this way, the number of connecting pins between the biological information sensor 2 and the control chip 3 can be reduced.
可变更地,在其它实施方式中,例如,所述生物信息传感器2也可为形成在显示屏中或显示屏上,而并非集成为一裸片或一芯片。当所述生物信息传感器2形成在显示屏中或显示屏上时,所述控制芯片3可同时驱动一行感测电极111执行生物信息感测。Alternatively, in other implementation manners, for example, the biological information sensor 2 may also be formed in or on the display screen instead of being integrated into a bare chip or a chip. When the biological information sensor 2 is formed in or on the display screen, the control chip 3 can simultaneously drive a row of sensing electrodes 111 to perform biological information sensing.
请参阅图10,图10为本发明传感单元的另一实施例的结构示意图。所述传感单元11包括并联连接的二第一控制开关113和并联连接的二第二控制开关115。Please refer to FIG. 10 , which is a schematic structural diagram of another embodiment of the sensing unit of the present invention. The sensing unit 11 includes two first control switches 113 connected in parallel and two second control switches 115 connected in parallel.
请参阅图11,图11为本发明生物信息传感装置的又一实施方式的结构示意图。所述驱动电路20与各感测电极111之间分别通过一单独的数据线L1连接,省略第一控制开关113和第二控制开关115。相应地,所述驱动电路20通过分别输出相应的信号给各感测电极111也是可行的。Please refer to FIG. 11 . FIG. 11 is a schematic structural diagram of another embodiment of the biological information sensing device of the present invention. The driving circuit 20 is connected to each sensing electrode 111 through a separate data line L1, and the first control switch 113 and the second control switch 115 are omitted. Correspondingly, it is also feasible for the driving circuit 20 to output corresponding signals to the sensing electrodes 111 respectively.
请参阅图12,图12为本发明电子设备的一实施方式的结构示意图。所述电子设备9包括上述任一实施方式所述的生物信息传感装置1。所述电子设备9例如为可携式电子产品、家居式电子产品、或车载电子产品。然而,所述电子设备不局限此处所列的电子产品,还可以是其它合适类型的电子产品。所述可携式电子产品例如为移动终端,所述移动终端例如为手机、平板电脑、笔记本电脑、穿戴式产品等合适的移动终端。所述家居式电子产品例如为智能门锁、电视、冰箱、台式电脑等合适的家居式电子产品。所述车载电子产品例如为车载显示器、行车记录仪、导航仪、车载冰箱等合适的车载电子产品。Please refer to FIG. 12 . FIG. 12 is a schematic structural diagram of an embodiment of the electronic device of the present invention. The electronic device 9 includes the biological information sensing device 1 described in any one of the above-mentioned embodiments. The electronic device 9 is, for example, a portable electronic product, a household electronic product, or a vehicle electronic product. However, the electronic equipment is not limited to the electronic products listed here, and may also be other suitable types of electronic products. The portable electronic product is, for example, a mobile terminal, and the mobile terminal is, for example, a mobile phone, a tablet computer, a notebook computer, a wearable product, and other suitable mobile terminals. The household electronic products are, for example, smart door locks, televisions, refrigerators, desktop computers and other suitable household electronic products. The vehicle-mounted electronic products are, for example, suitable vehicle-mounted electronic products such as a vehicle-mounted display, a driving recorder, a navigator, and a vehicle-mounted refrigerator.
以所述电子设备9为手机为例,所述生物信息传感装置1例如设置在所述手机的正面、侧面、背面等任意合适的位置,另外,所述生物信息传感装置1可设置为曝露出手机的外壳,也可设置在手机的内部。在此实施方式中,所述生物信息传感装置1设置在手机的正面。Taking the electronic device 9 as a mobile phone as an example, the biological information sensing device 1 is arranged at any suitable position such as the front, side, and back of the mobile phone. In addition, the biological information sensing device 1 can be set as The shell of the mobile phone is exposed, and it can also be arranged inside the mobile phone. In this embodiment, the biological information sensing device 1 is arranged on the front of the mobile phone.
根据所述生物信息传感装置1所感测到的生物信息,所述电子设备9例如进行用户身份鉴权、在线支付、快速启动应用程序(APP)等等。According to the biological information sensed by the biological information sensing device 1 , the electronic device 9 performs, for example, user identity authentication, online payment, quick launch of an application program (APP), and the like.
由于所述电子设备9包括所述生物信息传感装置1,所述生物信息传感装置1的感测精度较高,因此,所述电子设备9的用户体验较好。Since the electronic device 9 includes the biological information sensing device 1 , the sensing accuracy of the biological information sensing device 1 is relatively high, so the user experience of the electronic device 9 is better.
请参阅图13,图13为图12所示电子设备一实施方式的电路方框图。所述电子设备9进一步包括主控芯片5。所述主控芯片5与所述生物信息传感装置1连接,用于与所述生物信息传感装置1进行数据通信。所述主控芯片5例如为单一芯片或芯片组。当主控芯片5为芯片组时,所述芯片组包括应用处理器(Application Processor,AP)和电源芯片。另外,所述芯片组可进一步包括存储芯片。当主控芯片5为单一芯片时,所述主控芯片5例如为应用处理器。进一步地,所述应用处理器也可替换为中央处理器(Central Processing Unit,CPU)。Please refer to FIG. 13 . FIG. 13 is a circuit block diagram of an embodiment of the electronic device shown in FIG. 12 . The electronic device 9 further includes a main control chip 5 . The main control chip 5 is connected with the biological information sensing device 1 for data communication with the biological information sensing device 1 . The main control chip 5 is, for example, a single chip or a chipset. When the main control chip 5 is a chipset, the chipset includes an application processor (Application Processor, AP) and a power chip. In addition, the chipset may further include a memory chip. When the main control chip 5 is a single chip, the main control chip 5 is, for example, an application processor. Further, the application processor may also be replaced by a central processing unit (Central Processing Unit, CPU).
所述主控芯片5包括接地端50,所述接地端50连接设备地,接收设备地的接地信号,接地信号在图9以GND表示。所述设备地又称系统地,例如为电子设备9的供电电源的负极,供电电源如为电池。所述接地信号GND又称系统地电压、系统地信号、设备地电压、或设备地信号等。所述接地信号GND为恒定电压,作为电子设备9中各电路的电压参考基准,所述接地信号GND例如为0V(伏)、2V、(-1)V等电压信号。通常,所述设备地并非地球大地或绝对大地。然,当电子设备9通过导体与地球大地连接时,所述设备地也可能为地球大地。The main control chip 5 includes a ground terminal 50, the ground terminal 50 is connected to the device ground, and receives a ground signal of the device ground, and the ground signal is represented by GND in FIG. 9 . The equipment ground is also called the system ground, for example, it is the negative pole of the power supply of the electronic equipment 9, such as a battery. The ground signal GND is also called system ground voltage, system ground signal, equipment ground voltage, or equipment ground signal. The ground signal GND is a constant voltage, used as a voltage reference for each circuit in the electronic device 9 , for example, the ground signal GND is a voltage signal such as 0V (volt), 2V, (-1)V, etc. Typically, the device ground is not earth earth or absolute earth. Of course, when the electronic device 9 is connected to the earth ground through a conductor, the device ground may also be the earth ground.
在前述的各实施方式中,所述生物信息传感装置1可是以一个域为电压参考基准。所述域是以接地信号GND为基准的域。所述接地信号GND作为生物信息传感装置1中各电路的电压参考基准。In the aforementioned embodiments, the biological information sensing device 1 may use one domain as a voltage reference. The domain is a domain referenced to the ground signal GND. The ground signal GND serves as a voltage reference for each circuit in the biological information sensing device 1 .
为提高生物信息传感装置1的感测信号的信噪比,本发明进一步提出利用调制技术方案来达到提高信噪比的技术目的,所述调制技术方案适用于上述各实施方式所述的生物信息传感装置1。In order to improve the signal-to-noise ratio of the sensing signal of the biological information sensing device 1, the present invention further proposes to use a modulation technical scheme to achieve the technical purpose of improving the signal-to-noise ratio. The modulation technical scheme is applicable to the biological Information Sensing Device 1.
例如,通过调制地的技术方案来达到统一调制输出给传感单元11的信号。For example, the signal output to the sensing unit 11 is uniformly modulated through a technical scheme of modulating the ground.
具体地,所述驱动电路20例如进一步包括第一接地端31、第二接地端32、调制电路33、和电压产生电路34。所述调制电路33连接于所述第一接地端31和所述第二接地端32之间。所述调制电路33进一步与所述电压产生电路34相连接。所述第一接地端31连接至设备地。所述电压产生电路34用于提供一电压驱动信号给所述调制电路33。所述调制电路33根据所述电压驱动信号和所述设备地上的接地信号GND来对应产生调制信号MGND给所述第二接地端32。所述调制信号MGND用于统一调制所述驱动电路20输出给所述传感单元11上的信号,例如,所述第一参考信号、所述第二参考信号、所述激励信号、所述扫描开启信号、和所述扫描截止信号。其中,加载所述调制信号MGND的地(例如,第二接地端32)为调制地。Specifically, the driving circuit 20 further includes, for example, a first ground terminal 31 , a second ground terminal 32 , a modulation circuit 33 , and a voltage generation circuit 34 . The modulation circuit 33 is connected between the first ground terminal 31 and the second ground terminal 32 . The modulation circuit 33 is further connected to the voltage generation circuit 34 . The first ground terminal 31 is connected to the equipment ground. The voltage generation circuit 34 is used for providing a voltage driving signal to the modulation circuit 33 . The modulation circuit 33 correspondingly generates a modulation signal MGND to the second ground terminal 32 according to the voltage driving signal and the ground signal GND on the device ground. The modulation signal MGND is used to uniformly modulate the signals output from the driving circuit 20 to the sensing unit 11, for example, the first reference signal, the second reference signal, the excitation signal, the scanning an on signal, and the scan off signal. Wherein, the ground (for example, the second ground terminal 32 ) loaded with the modulation signal MGND is the modulation ground.
例如,所述激励信号包括第一电压信号与第二电压信号。所述激励信号为第一电压信号和第二电压信号交替变化的方波脉冲信号。其中,所述第一电压信号低于所述第二电压信号,所述第一电压信号例如为接地信号GND。所述调制信号MGND用于抬高所述第二电压信号,以提高感测信号的信噪比。For example, the excitation signal includes a first voltage signal and a second voltage signal. The excitation signal is a square wave pulse signal in which the first voltage signal and the second voltage signal change alternately. Wherein, the first voltage signal is lower than the second voltage signal, and the first voltage signal is, for example, a ground signal GND. The modulation signal MGND is used to increase the second voltage signal to improve the signal-to-noise ratio of the sensing signal.
当所述驱动电路20接收到来自感测电极111输出的感测信号时,需要对感测信号进行反向调制,来获取相应的生物信息。When the driving circuit 20 receives the sensing signal output from the sensing electrode 111 , it needs to inversely modulate the sensing signal to obtain corresponding biological information.
在此实施方式中,所述生物信息传感装置1是以两个域为电压参考基准。两个域分别示出为以接地信号GND为基准的域60和以调制信号MGND为基准的域70。其中,在以接地信号GND为基准的域60中的电路的接地端均直接连接设备地,在以调制信号MGND为基准的域70中的电路的接地端均直接连接调制地。进一步地,对于以调制地为地的电路,其参考地电位为调制地所加载的调制信号MGND;对于以设备地为地的电路,其参考地电位为设备地所加载的接地信号GND。In this embodiment, the biological information sensing device 1 uses two domains as voltage references. Two domains are shown as domain 60 referenced to ground signal GND and domain 70 referenced to modulation signal MGND, respectively. The ground terminals of the circuits in the domain 60 based on the ground signal GND are directly connected to the device ground, and the ground terminals of the circuits in the domain 70 based on the modulation signal MGND are directly connected to the modulation ground. Further, for a circuit whose ground is the modulation ground, its reference ground potential is the modulation signal MGND loaded by the modulation ground; for a circuit whose ground is the equipment ground, its reference ground potential is the ground signal GND loaded by the equipment ground.
在本实施方式中,所述控制单元30、所述扫描驱动电路21、所述数据选择电路24、所述参考信号产生电路23、以及传感单元11例如设置在域70中。所述感测驱动电路22例如一部分位于域60中,一部分位于域70中。所述主控芯片5、所述调制电路33、所述电压产生电路34位于域60中。In this embodiment, the control unit 30 , the scan driving circuit 21 , the data selection circuit 24 , the reference signal generation circuit 23 , and the sensing unit 11 are arranged in the domain 70 , for example. For example, a part of the sensing driving circuit 22 is located in the domain 60 and a part is located in the domain 70 . The main control chip 5 , the modulation circuit 33 , and the voltage generation circuit 34 are located in the domain 60 .
然,可变更地,本发明并不局限上述电路在域60、70中的划分,厂商可根据实际需要,例如电路情况不同,对应做不同调整等。However, alternatively, the present invention is not limited to the division of the above-mentioned circuits in domains 60 and 70 , and manufacturers can make different adjustments according to actual needs, such as different circuit conditions.
所述生物信息传感装置1可进一步包括接地线G,所述接地线G围绕所述多个传感单元11设置,在一些实施方式中,所述接地线G为网格状,与所述感测电极111位于同一层,分别围绕所述感测电极111设置。可变更地,所述接地线G也可为在所述多个传感单元11的外围设置一圈等等也是可以的。The biological information sensing device 1 may further include a ground wire G, the ground wire G is arranged around the plurality of sensing units 11, in some embodiments, the ground wire G is grid-like, and the The sensing electrodes 111 are located on the same layer and are arranged around the sensing electrodes 111 respectively. Alternatively, the grounding wire G may also be arranged in a circle around the plurality of sensing units 11 or the like.
另外,当所述生物信息传感装置1是以一个域为电压参考基准、所述域是以接地信号GND为基准的域时,所述第一参考信号和/或所述第二参考信号例如为相对所述接地信号GND为恒定的电压信号。然,当所述生物信息传感装置1是以两个域60和70为电压参考基准时,所述第一参考信号和/或所述第二参考信号例如为相对所述接地信号GND为变化的电压信号,相对所述调制信号MGND为恒定的电压信号。In addition, when the biological information sensing device 1 uses a domain as a voltage reference, and the domain is a domain based on the ground signal GND, the first reference signal and/or the second reference signal, for example is a constant voltage signal relative to the ground signal GND. However, when the biological information sensing device 1 uses the two domains 60 and 70 as voltage references, the first reference signal and/or the second reference signal, for example, vary relative to the ground signal GND The voltage signal of is a constant voltage signal relative to the modulation signal MGND.
更进一步地,除了上述通过采用调制地的技术方案,也可采用调制电源端或参考电源的电源电压信号,来统一调制所述驱动电路20输出给所述多个传感单元11的信号。Furthermore, in addition to the above-mentioned technical solution of using modulation ground, it is also possible to uniformly modulate the signals output from the drive circuit 20 to the plurality of sensing units 11 by modulating the power supply voltage signal of the power supply terminal or the reference power supply.
需要进一步说明的是,通过设置所述第一控制开关113和第二控制开关115,可减少传感单元11与外围电路(例如,感测驱动电路22、参考信号产生电路23)相连接的引脚。It should be further explained that by setting the first control switch 113 and the second control switch 115, the number of connections between the sensing unit 11 and peripheral circuits (for example, the sensing driving circuit 22, the reference signal generating circuit 23) can be reduced. foot.
虽然实施方式这里已经关于具体的配置和操作序列进行描述,但是应该理解,替代的实施方式可增加、省略或改变元件、操作等等。因此,这里公开的实施方式意味着是实施例而不是限制。Although embodiments have been described herein with respect to specific configurations and sequences of operations, it should be understood that alternative embodiments may add, omit, or change elements, operations, and the like. Therefore, the embodiments disclosed here are meant to be examples rather than limitations.
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