CN106461600A - Sensor element for detecting at least one property of a measuring gas in a measuring gas chamber - Google Patents
Sensor element for detecting at least one property of a measuring gas in a measuring gas chamber Download PDFInfo
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- CN106461600A CN106461600A CN201580032513.3A CN201580032513A CN106461600A CN 106461600 A CN106461600 A CN 106461600A CN 201580032513 A CN201580032513 A CN 201580032513A CN 106461600 A CN106461600 A CN 106461600A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4073—Composition or fabrication of the solid electrolyte
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Abstract
The invention relates to a sensor element (10) for detecting at least one property of a measuring gas in a measuring gas chamber, in particular for determining a proportion of a gas component in the measuring gas or a temperature of the measuring gas. The sensor element (10) comprises at least one solid electrolyte layer (12) and at least one electrode (22) in contact with the solid electrolyte layer (12). The electrode (22) has at least one first layer (30) at least partially made of a ceramic material, and a second layer (32) at least partially made of a ceramic material. The first layer (30) is facing away from the solid electrolyte layer (12). The second layer (32) is facing towards the solid electrolyte layer (12). The ceramic material of the first layer (30) and the ceramic material of the second layer (32) have yttrium-doped zirconium dioxide, in particular yttrium oxide-doped zirconium dioxide. The ceramic material of the first layer (30) has a higher level of yttrium doping than the ceramic material of the second layer (32). The first layer (30) has a higher porosity than the second layer (32).
Description
Background technology
Sensor by multiple at least one characteristics for detection measurement gas interior measurement gas known in the art
Element and method.Here can be related to measure the characteristic of the arbitrary physics and/or chemistry of gas in principle, wherein it is possible to
Detect one or more characteristic.The present invention hereinafter quality referring especially to the content of the gas component to measurement gas
And/or the detection of quantity is illustrated, with particular reference to the detection to the oxygen gas component content in measurement gas.Oxygen gas component
Content can be detected for example in the form of partial pressure and/or in the form of percentage.But alternately or additionally also can examine
Other characteristics of measurement gas, such as temperature.
This sensor element for example can be designed to so-called air inflow detector, and it is for example by Joseph Conrad sea husband
(publisher's)《Sensor in motor vehicle》(2010 the 1st edition), 160-165 page open.With broadband air inflow detector, special
It is not the broadband air inflow detector with plane, for example can determine oxygen concentration in waste gas and therefore in very large range
It is inferred to indoor air-fuel ratio of burning.Air coefficient λ illustrates this air-fuel ratio.
By the sensor element of the especially known some potteries of prior art, this ceramic sensor element is with particular solid
Based on the application of electrolyte properties, that is, based on the characteristic of the ionic conduction of this solid.This solid can be especially
The solid electrolyte of pottery, such as zirconium dioxide (ZrO2), particularly yttrium-stabile zirconium dioxide (YSZ) is that is to say, that mix yittrium oxide
Zirconium dioxide, and mix scandium zirconium dioxide (ScSZ), they may comprise aluminum oxide (Al2O3) and/or silica (SiO2) add
Thing.
This sensor element generally has at least one electrode.This electrode is made up of so-called cermet, that is,
Say, be made up of the composite that ceramic material is fabricated by the parent of metal.The material of the pottery of electrode is except real
The material of pottery outside also correspondingly there is the content of the material of metal.The material of metal is typically platinum group metal and is preferably
Platinum.
DE 198 33 087 A1 illustrates a kind of gas sensor, and it has the electricity of the solid with least one measuring electrode
Xie Zhi.Measuring electrode is designed with basal layer and another layer of conduction, and wherein, another layer is adjacent in porous with basal layer
Separate with being plated in the pore of cover layer.
DE 100 20 082 A1 illustrates a kind of measurement sensor of electrochemistry, and it carries the solid electrolytic of ionic conduction
Plastid and the electrode being arranged on this solid electrolytic plastid.Electrode has at least two layers, wherein, faces the second layer of gas compartment
Compare and face the ground floor of solid electrolytic plastid there is higher electronic conduction ability.
WO 2010/072460 A1 illustrates a kind of structurized electrode for ceramic sensor element.In solid
Intermediate layer is arranged between dielectric substrate and electrode.
Although the sensor element being used for air inflow detector disclosed in prior art has dramatic benefit, these sensings
Device element also contains and improves potentiality.Because electrode is not the whole service life in sensor element in above-mentioned prior art
Period is all efficient.High efficiency means the material dislocation (electrode of the maximum of the per unit area of electrode within a context
Capacity), the isolation (O2 isolation) for the catalysis activity of height of oxidation (HC oxidation) of hydrocarbon and oxygen and good
Good low-temperature characteristics.
Content of the invention
It is therefore proposed that a kind of sensor element of at least one characteristic for detection measurement gas interior measurement gas, its
At least avoid the defect of known sensor element as far as possible and especially carry during the whole service life of sensor element
Supply efficient electrode.Electrode can be internal pump electrode (IPE), outside pump electrode (APE), internal reference gas
Electrode (IE) and particularly outside measurement gas electrode (AE).
By the present invention at least one characteristic of detection measurement gas interior measurement gas, especially for proof
The sensor element of the temperature of the content of gas component in measurement gas or measurement gas, including at least one solid electrolyte
Layer and the electrode of at least one contacting solid electrolyte layer.Electrode here can direct or indirect contacting solid electrolytic
Matter layer.Electrode has at least one ground floor being at least partly made up of ceramic material and at least partly by ceramic material system
The second layer becoming.Ground floor is back to solid electrolyte layer.The second layer faces solid electrolyte layer.The material of the pottery of ground floor and
The material of the pottery of the second layer has mixes yttrium zirconium dioxide, particularly mixes yittrium oxide zirconium dioxide.The material of the pottery of ground floor
There is the doped yttrium degree higher than the material of the pottery of the second layer.Ground floor has the porosity higher than the second layer.
The material of the pottery of ground floor can have the Yttrium oxide doping degree of 8.0% to 11.5% molar percentage.Second
The material of the pottery of layer can have 3.5% to 6.5% molar percentage, the Yttrium oxide doping of such as 5.5% molar percentage
Degree.Ground floor can have the porosity of 10% to 40% percent by volume.The second layer can have 0% to 8% volume basis
The porosity of ratio.Ground floor can be thicker than the second layer.The ratio of the thickness of ground floor and the thickness of the second layer can for 1.25 to
50.Ground floor has 5.0 μm to 25.0 μm of thickness.The second layer can have 0.5 μm to 4.0 μm of thickness.The pottery of ground floor
The material of porcelain can also have the composition of at least one platinum group metal material.The material of the pottery of the second layer can also have only
A kind of composition of platinum group metal material.The platinum group metal material of the material of the pottery of ground floor can have at least platinum and rhodium.The
The platinum group metal material of the material of two layers of pottery only has platinum.In the platinum group metal material of the material of the pottery of the second layer
The share of platinum can be at least 99.0% percentage by weight, preferably at least 99.5% percentage by weight and also preferably
99.9% percentage by weight.Here makes every effort to particularly preferably 100% weight percent values.Material in the pottery of ground floor
The share of the rhodium in the material of platinum group metal can be 1.0% to 5.0% percentage by weight.The material of the pottery of ground floor can be
Particulate.The material of the pottery of the second layer can be the mixing of particulate and coarse grain.Doping in the material of the pottery of ground floor
The share of zirconium dioxide can be 2.0% to 8.0% percentage by weight and preferably 4.0% to 8.0% percentage by weight.?
The share mixing yttrium zirconium dioxide in the material of two layers of pottery can be 10.0% to 18.0% percentage by weight and preferably
Percentage by weight for 10.0% to 15.0%.
In the framework of the present invention, solid electrolyte refers to electrolyte properties, that is, has the basis of ionic conduction characteristic
Body or object.It can be especially the solid electrolyte of pottery.The solid electrolyte of this pottery also includes the former of solid electrolyte
Material and therefore including as the so-called green compact just becoming solid electrolyte after sintering or brown base.
Porosity refers to the cavity volume of material or material blends and the ratio of cumulative volume in the framework of the present invention.
Platinum group metal material refers to such a material, its there is platinum group metal that is to say, that the periodic table of elements
The metal of the element of VIII to X race of five cycles and period 6.These especially include ruthenium, rhodium, palladium, osmium, iridium and platinum.
Layer refers to there is specific height by unified material along what flat development length was constituted in the framework of the present invention
Degree or the object of thickness or body, its can be disposed in other objects upper and lower, between or top.
The basic thought of the present invention is, with as a small amount of as possible using platinum build the efficient of Abgassensor
Electrode.Platinum-gold belongs to ceramic electrode here and is generally installed in silk-screen printing technique on the carrier of pottery and has after sintering
There is thickness between 5 μm to 25 μm for the typical case.Alternately, directly it is in the second electrode lay being connected especially with solid electrolyte
Also by evaporation technology or by ink/rotation that is to say, that with thin liquid shape compared with serigraphy cream, low-viscosity suspension
Liquid or " ink ", or be applied as metallic vapour.Efficiency is defined herein as electrode activity, particularly catalysis activity, Yi Ji electricity
The material dislocation of the maximum possible of the per unit area of pole.This electrode meets two subtasks, and this two subtasks are to material
Component, structure (that is porosity and density) and ceramic-metallic sintering characteristic propose partly contrary requirement.Press
According to it is proposed that, electrode is constituted by least two layers, this two layers in view of the task of each of which and optimised.Therefore face
The ground floor of measurement gas compartment for example has such task, i.e. realize the connection of gas compartment, responsible metal surface and measurement
The material exchange of the maximum between gas and the catalysis activity of maximum.It is high porosity, nano level that here meets form
Platinum, the material requirements of the maximum quantity on surface, the triple point of the every elementary volume, volume element of cermet or reaction center of division, Yi Jiman
Foot is with macroscopic cavity and oxide ion conduction ability, Yttrium oxide doping degree having very high mole for maximizing
The structuring of YSZ or ScSZ of fine distribution.The second layer facing solid electrolyte layer has and is connected on solid electrolyte layer
Task.Therefore for example must complete for example to arrive Nernst unit with the carrier pottery that the YSZ having suboxides doped yttrium degree makes
On connection.Material requirements here is the connection of good machinery, the material joint of optimization, the tooth processed by machinery and passes through
Very high share have with the attachment of the YSZ of carrier material identical component, may when the sintering of sintering adjuvant and very high
Density, the porosity of very little, do not have cavity, for as the low pass of electronics or the such charge carrier of oxonium ion cross resistance and
Good low-temperature conductive rate.
Brief description
Other optional details of the present invention and feature are by next to the preferred enforcement being shown schematically in the figures
The explanation of example draws.
In accompanying drawing:
Fig. 1 is the exploded view by sensor of the invention element;And
Fig. 2 is the cross sectional view of sensor element.
Specific embodiment
Fig. 1 shows the exploded view by sensor of the invention element 10.The sensor element 10 that figure 1 illustrates is permissible
For proving physical characteristic and/or the chemical characteristic of measurement gas, wherein it is possible to one or more characteristic of detection.The present invention exists
Hereinafter the detection of quality and/or the detection of quantity referring especially to the gas component to measurement gas are illustrated, and especially join
Examine the detection to the oxygen gas component content in measurement gas.Oxygen gas component content can be for example in the form of partial pressure and/or hundred
The form dividing ratio is detected.Other types of gas component, such as nitrogen oxide, hydrocarbon but can also be detected in principle
And/or hydrogen.But can also alternatively or additionally detect other characteristics of measurement gas, such as temperature.The present invention especially uses
In automotive field, thus the measurement gas compartment especially exhaust side of internal combustion engine and measurement gas especially waste gas.
Sensor element 10 as the air inflow detector of plane exemplary part have at least one first
Solid electrolyte layer 12.Solid electrolyte layer 12 can especially pottery solid electrolyte layer 12, such as zirconium dioxide, especially
It is yttrium-stabile zirconium dioxide and/or mixes scandium zirconium dioxide, they may comprise small amounts aluminium and/or silica additive.Pass
Sensor component 10 for example also has the second solid electrolyte layer 14.Face the first solid electrolytic in the second solid electrolyte layer 14
The heating element heater 20 being embedded between two insulating barriers 18 is for example arranged on the upside 16 of matter layer 12.
Sensor element 10 also has at least one electrode 22.Sensor element 10 for example has first electrode 22 and second
Electrode 26, first electrode is disposed on the upside 24 facing measurement gas compartment of the first solid electrolyte layer 12, second electrode
It is disposed in the reference gas room 28 facing the second solid electrolyte layer 14.Face measurement gas compartment first electrode 22, the
One solid electrolyte layer 12 and second electrode 26 for example define a so-called Nernst unit.
Fig. 2 shows the cross sectional view of sensor element 10.The first solid electricity can more precisely be seen in fig. 2
Solution matter layer 12 and first electrode 22.First electrode 22 is, for example, outside measurement gas electrode.For example by first electrode 22
The structure by the present invention of electrode 22 is described.It is explicitly emphasized that, second electrode 26 can as one man be constructed.Second electrode 26 is for example
It is internal measurement gas electrode.First electrode 22 contacting the first solid electrolyte layer 12.First electrode 22 has at least
Ground floor 30 and the second layer 32 being at least partly made up of ceramic material that part is made up of ceramic material.Ground floor 30 is carried on the back
To solid electrolyte layer 12.Therefore ground floor 30 faces measurement gas compartment.The second layer 32 faces solid electrolyte layer 12.Ground floor
The material of the pottery of the material of 30 pottery and the second layer 32 has mixes yttrium zirconium dioxide.The material of the pottery of ground floor 30 and
The material of two layer 32 of pottery has for example mixes yittrium oxide zirconium dioxide.The material here of the pottery of ground floor 30 has ratio second
The higher doped yttrium degree of material of the pottery of layer 32.The material of the pottery of ground floor 30 for example has 8.0% molar percentage extremely
11.5% molar percentage, the Yttrium oxide doping degree of such as 9.5% molar percentage, conversely, the pottery of the second layer 32
Material has 3.5% molar percentage to 6.5% molar percentage, the such as Yttrium oxide doping of 5.5% molar percentage
Degree.Higher Yttrium oxide doping share in the material of the pottery of ground floor 30 is responsible for maximizing electronics and oxide ion conduction
Property.Conversely, the relatively low Yttrium oxide doping share in the material of the pottery of the second layer 32 is then responsible for improving strength character and burning
Knot performance.Additionally, ground floor 30 has the porosity higher than the second layer 32.Ground floor 30 for example has 10% to 40% volume
Percentage, the porosity of such as 25% percent by volume, conversely, the second layer 32 then has 0% to 8% percent by volume, such as
The porosity of 2% percent by volume.The higher porosity of ground floor 30 is responsible for enlarged surface to maximize gas exchanges, instead
It, the relatively low porosity of the second layer 32 then causes very high density of material, and this density of material is facilitated to solid electrolyte layer
More preferable connection on 12.
Even if not being explicitly illustrated in fig. 2, ground floor 30 is also thick than the second layer 32.The thickness of ground floor 30 and second
The ratio of the thickness of layer 32 is 1.25 to 50, for example, 49.More precisely, ground floor has 5.0 μm to 25.0 μm, and such as 24.5
μm thickness, conversely, the second layer then has 0.5 μm to 4.0 μm, such as 0.5 μm of thickness.The bigger thickness example of ground floor 30
As can by silk-screen printing technique may when realize by the agent of suitable hole.Conversely, the relatively thin second layer 32 then can be by thin layer
Coating processes are applied, such as gas phase spraying plating, sputter, suspension coating or similar technique.
The either ground floor 30 or second layer 32 can be manufactured by cermet, in other words, the material of pottery divides
There is no the material of real pottery and the composition of part admixture or platinum group metal material.The material of the pottery of the second layer 32
The optional composition with a kind of uniquely platinum group metal material.In other words, the material of the pottery of the second layer 32 is ceramic-metallic
The composition of metal only includes only a kind of element of platinum group metal, such as platinum.Conversely, the platinum family of the material of the pottery of ground floor 30
Metal material can have at least platinum and rhodium.The share of the platinum in the platinum group metal material of the material of the pottery of the second layer 32 can
To be at least 99.0% percentage by weight, preferably at least 99. 5% percentage by weight and also preferably 99.9% weight
Percentage.Here makes every effort to the value of 100% percentage by weight.Therefore in the platinum group metal material of the material of the pottery of ground floor 30
In rhodium share can be for example 1.0% to 5.0% percentage by weight, preferably 3.0% percentage by weight.Here preferably makes
Rhodium powder with particulate.More precisely it is usually preferable that the material of the pottery of ground floor 30 is particulate and the second layer 32
Material be particulate and coarse grain mixing.In the framework of the present invention, term " particulate " and " coarse grain " are related to manufacture and are made
The granular size of powder, wherein, here can distinguish primary granule and the particle of caking again, and is directed to use with such as
The per surface area of the ceramic powders in the preparation of cream, suspension, ink etc..In the framework of the present invention, the pottery of particulate
Powder can by no more than 0.20 μm diameter D10,0.20 μm to 0.50 μm of diameter D50,0.50 μm to 10.0 μm straight
Footpath D90 and be described feature by the per surface area of the specific surface area (BET) of 10/g to 50/g.Conversely, the pottery of coarse grain
The powder of porcelain then can be by 50 μm to 200 μm of diameter D10,200 μm to 500 μm of diameter D50, straight more than 500.0 μm
Footpath D90 and be described feature by the per surface area of the specific surface area (BET) of 0.1/g to 2.0/g.
In sintering, the platinum-rhodium that formed mutually extremely efficient prevents platinum grain to sinter bigger crystal grain and therefore anti-into
The minimizing on active surface during having stopped service life.Decrease platinum to discharge by evaporation.Conversely, construction does not have rhodium additive
The second layer 32 because this reduce by the very high fusing point of the rhodium of platinum-rhodium phase and the oxidation sintering inertia that causes of window and
Thus the connection of the electricity to the worse machinery of solid electrolyte layer 12.Because according to the optional suggestion of the present invention, cancel rhodium and exist
Use in the second layer 32, so improve the connection of the machinery to solid electrolyte layer 12 for the second layer 32.
Additionally, the share mixing yttrium zirconium dioxide in the material of the pottery of ground floor 30 is chosen as 2.0% to 8.0% weight
Amount percentage, and preferably 4.0% to 8.0% percentage by weight, such as 6.0% percentage by weight.Conversely, in the second layer
The share mixing yttrium zirconium dioxide in the material of 32 pottery can be 10.0% to 18.0% percentage by weight, and is preferably
12.0% to 15.0% percentage by weight, such as 14.0% percentage by weight.By mixing yttrium zirconium dioxide in ground floor 30
Less share achieves a kind of unenclosed construction of the porous having very big inner surface.By in the second layer 32 using coarse grain
Platinum and combine very high share mix yttrium zirconium dioxide it is achieved that well with solid electrolyte layer 12 sintering close layer.
Claims (12)
1. a kind of at least one characteristic for detection measurement gas interior measurement gas, especially for proving measurement gas
In the content of gas component or measurement gas temperature sensor element (10), it is solid that this sensor element includes at least one
The electrode (22) of body dielectric substrate (12) and this solid electrolyte layer of at least one contacting (12), wherein, electrode (22) has
Have at least one ground floor (30) being at least partly made up of ceramic material and at least part of be made up of ceramic material the
Two layers (32), wherein, back to solid electrolyte layer (12), wherein, the second layer (32) faces solid electrolyte layer to ground floor (30)
(12), wherein, the material of the pottery of the material of pottery of ground floor (30) and the second layer (32) has and mixes yttrium zirconium dioxide, especially
It is to mix yittrium oxide zirconium dioxide, wherein, the material of the pottery of ground floor (30) has the material of the pottery than the second layer (32) more
High doped yttrium degree, wherein, ground floor (30) has the porosity higher than the second layer (32).
2. according to the sensor element (10) described in aforementioned claim, wherein, the material tool of the pottery of described ground floor (30)
There is the Yttrium oxide doping degree of 8.0% to 11.5% molar percentage, wherein, the material of the pottery of the described second layer (32) has
The Yttrium oxide doping degree of 3.5% to 6.5% molar percentage.
3. according to the sensor element (10) described in aforementioned any one of claim, wherein, described ground floor (30) have 10% to
The porosity of 40% percent by volume, wherein, the described second layer (32) has the porosity of 0% to 8% percent by volume.
4. according to the sensor element (10) described in aforementioned any one of claim, wherein, described ground floor (30) is than described
Two layers (32) are thicker.
5. according to the sensor element (10) described in aforementioned any one of claim, wherein, the thickness of described ground floor (30) with
The ratio of the thickness of the described second layer (32) is 1.25 to 50.
6. according to the sensor element (10) described in aforementioned any one of claim, wherein, described ground floor (30) has 5.0 μm
To 25.0 μm of thickness, wherein, the described second layer (32) has 0.5 μm to 4.0 μm of thickness.
7. according to the sensor element (10) described in aforementioned any one of claim, wherein, the pottery of described ground floor (30)
Material also has the composition of at least one platinum group metal material, and wherein, the material of the pottery of the described second layer (32) also has only
A kind of composition of one platinum group metal material.
8. according to the sensor element (10) described in aforementioned claim, wherein, the material of pottery of described ground floor (30)
Platinum group metal material has at least platinum and rhodium, and wherein, the platinum group metal material of the material of pottery of the described second layer (32) has
Platinum.
9. according to the sensor element (10) described in aforementioned claim, wherein, in the material of the pottery of the described second layer (32)
The material of platinum group metal in the share at least 99.0% of platinum percentage by weight, more preferably at least 99.5% weight percent
Than and also preferably 99.9% percentage by weight.
10. according to the sensor element (10) described in aforementioned any one of claim, wherein, in the material of the pottery of ground floor (30)
The share of the rhodium in the platinum group metal material of material is 1.0% to 5.0% percentage by weight.
11. according to the sensor element (10) described in aforementioned any one of claim, wherein, the material of the pottery of ground floor (30)
It is particulate, wherein, the material of the pottery of the second layer (32) is the mixing of particulate and coarse grain.
12. according to the sensor element (10) described in aforementioned any one of claim, wherein, in the material of the pottery of ground floor (30)
The share mixing yttrium zirconium dioxide in material is 2.0% to 8.0% percentage by weight, wherein, in the material of the pottery of the second layer (32)
The share mixing yttrium zirconium dioxide in material is 10.0% to 18.0% percentage by weight.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102014211782.8 | 2014-06-18 | ||
DE102014211782.8A DE102014211782A1 (en) | 2014-06-18 | 2014-06-18 | Sensor element for detecting at least one property of a sample gas in a sample gas space |
PCT/EP2015/062005 WO2015193084A1 (en) | 2014-06-18 | 2015-05-29 | Sensor element for detecting at least one property of a measuring gas in a measuring gas chamber |
Publications (1)
Publication Number | Publication Date |
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CN106461600A true CN106461600A (en) | 2017-02-22 |
Family
ID=53268823
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201580032513.3A Pending CN106461600A (en) | 2014-06-18 | 2015-05-29 | Sensor element for detecting at least one property of a measuring gas in a measuring gas chamber |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP6305576B2 (en) |
CN (1) | CN106461600A (en) |
DE (1) | DE102014211782A1 (en) |
WO (1) | WO2015193084A1 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN110006981A (en) * | 2017-12-12 | 2019-07-12 | 日本特殊陶业株式会社 | Gas sensor element and gas sensor |
CN110612277A (en) * | 2017-05-18 | 2019-12-24 | 贺利氏先进传感器技术有限公司 | Sensor for determining gas parameters |
CN110785657A (en) * | 2017-06-23 | 2020-02-11 | 罗伯特·博世有限公司 | Sensor element for an exhaust gas sensor |
CN114414641A (en) * | 2022-01-24 | 2022-04-29 | 深圳市富济新材料科技有限公司 | A kind of platinum-rhodium composite electrode for nitrogen and oxygen sensor chip and preparation method thereof |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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DE102016226275A1 (en) * | 2016-12-28 | 2018-06-28 | Robert Bosch Gmbh | Sensor element for detecting particles of a measuring gas in a measuring gas chamber |
JP6752184B2 (en) * | 2017-09-15 | 2020-09-09 | 株式会社Soken | Gas sensor element and gas sensor |
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2015
- 2015-05-29 JP JP2016573825A patent/JP6305576B2/en active Active
- 2015-05-29 CN CN201580032513.3A patent/CN106461600A/en active Pending
- 2015-05-29 WO PCT/EP2015/062005 patent/WO2015193084A1/en active Application Filing
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CN110612277A (en) * | 2017-05-18 | 2019-12-24 | 贺利氏先进传感器技术有限公司 | Sensor for determining gas parameters |
CN110612277B (en) * | 2017-05-18 | 2022-09-23 | 贺利氏先进传感器技术有限公司 | Sensor for determining gas parameters |
CN110785657A (en) * | 2017-06-23 | 2020-02-11 | 罗伯特·博世有限公司 | Sensor element for an exhaust gas sensor |
CN110006981A (en) * | 2017-12-12 | 2019-07-12 | 日本特殊陶业株式会社 | Gas sensor element and gas sensor |
CN110006981B (en) * | 2017-12-12 | 2022-12-20 | 日本特殊陶业株式会社 | Gas sensor element and gas sensor |
CN114414641A (en) * | 2022-01-24 | 2022-04-29 | 深圳市富济新材料科技有限公司 | A kind of platinum-rhodium composite electrode for nitrogen and oxygen sensor chip and preparation method thereof |
Also Published As
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JP2017518506A (en) | 2017-07-06 |
WO2015193084A1 (en) | 2015-12-23 |
JP6305576B2 (en) | 2018-04-04 |
DE102014211782A1 (en) | 2015-12-24 |
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