CN106461573A - Method and system for optical inspection of sapphire element - Google Patents
Method and system for optical inspection of sapphire element Download PDFInfo
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- CN106461573A CN106461573A CN201480079118.6A CN201480079118A CN106461573A CN 106461573 A CN106461573 A CN 106461573A CN 201480079118 A CN201480079118 A CN 201480079118A CN 106461573 A CN106461573 A CN 106461573A
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- sapphire
- sapphire element
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
A method, system and device for optical inspection of a sapphire element are disclosed, comprising: providing the sapphire element to a measurement system comprising a light guide and a detecting device, wherein the sapphire element comprises a surface; directing light beams towards the surface of the sapphire element from an angle of inclination with respect to the sapphire element surface, wherein the light beams are provided by the light guide; detecting reflected light beams using the detecting device from the surface of the sapphire element, in response to the light beams directed towards the surface of the sapphire element, to provide a detection signal, wherein the detecting device is arranged above of the field of the view of the sapphire element; and processing the detection signal to determine defect information relating to the surface of the sapphire element.
Description
Technical field
Present invention relates in general to the optical check to optical element.The present invention is particularly but not exclusively related to sapphire
The optical check of element.
Background technology
The portable unit of such as mobile phone, panel computer and PC etc all needs when building product
The optical element of such as transparent plastic and glass etc.To quality and it is worth cognitive raising with consumer, mobile manufacturer
It is continuing with increasing quality material.For mobile phone and panel computer, witness in the past few years and moulded from use
Material screen is to more anti-zoned chemically reinforced glass (for exampleGlass) Market Change.
AlthoughGlass compared to being significant improvement for plastics, but its still can by such as Bao Nei and
The every-day object of the key in pocket or coin etc scratches.Additionally, if dropping as fruit product, glass is easily broken.Cause
This, consider all the more on consumer goodss using such as sapphire.Sapphire be in nature occur the second hard material and
Only can be scratched by diamond.Sapphire or firm material and there is very high elastic modelling quantity (rigidity).Therefore, exist
Created using sapphire in the structure of mobile device and inadvertently falling off or during impacting, be less likely to the adamantine of bending
Product.This makes sapphire become very resistant, the durable material for mobile device purposes.
Sapphire is a kind of ceramic material, and the absolute intensity of any pottery and toughness are all by being referred to as fracture toughness
Material science control.Fracture toughness is by the Defect Correlation of the premature failure of material and such as crackle and cut etc
Science.Understand fracture toughness concept straightforward procedure be consider when delineating simple glass using diamond scriber so that
Help in a controlled manner, during glass rupture, what to occur.Perfect no marking glass is very firm, but one introduces to glass
Weak spot (that is, cut or indentation), then glass will become fragile and rupture readily along this defect.Same opinion
Point is readily adaptable for use in sapphire, regardless of whether sapphire is more anti-zoned than glass.Only when material no marking, material just has it
Good intensity and toughness.
Sapphire be than plastics orThe more expensive and heavier material of glass, and such as show simultaneously
The size of the optical element of screen etc has the trend of increase.Therefore it is desirable, especially for for portable unit, needing the solution improving
, to provide the optical element being made up of sapphire, it is thinner than known solution for scheme, but still meets for portable dress
The strict demand being related to maximum intensity and robustness put.
However, when sapphire material is highly finished and does not have cut and impact, realizing the whole of sapphire element
Toughness and intensity.The detection of the microfissure in sapphire and cut is hardly possible to be seen using common microtechnique, and
And therefore, it is difficult to the definite level of cut in quantifying surface.
Gorilla glass and other chemically reinforced glass (Asahi, Dragontrail etc.) are usually designed for
Process cut and defect in the way of different with sapphire.Glass is by being pressed the surface layer of glass
The chemical enhanced process of contracting is realizing its toughness.Because the surface compression of glass, any crackle and defect are all without propagation
So that losing efficacy.Final result is,Little cut that glass can be tolerated in material surface and do not lead to lose efficacy.
There is not this strengthening/surface compression process for sapphire.Accordingly, it would be desirable to optical detection sapphire element
The defect on surface solution.Just enable sapphire maximum strong only when sapphire is processed into complete zero defect
Degree and toughness.
Content of the invention
According to first exemplary aspect of the present invention, the method providing the optical check for sapphire element, the method bag
Include：
Sapphire element is supplied to the measuring system including photoconduction and testing equipment, wherein sapphire element includes table
Face；
From the angle of inclination on the surface with respect to sapphire element, by the surface of beam direction sapphire element, wherein light
Bundle is provided by photoconduction；
In response to being directed to the light beam on the surface of sapphire element, it is derived from the table of sapphire element using testing equipment detection
The reflected beams in face, to provide detection signal, wherein testing equipment is arranged on the top of the visual field of sapphire element；And
Processing detection signal is to determine the defect information on the surface being related to sapphire element.
In one embodiment, photoconduction is set to the side of the visual field of sapphire element.
In one embodiment, photoconduction is arranged on the top of the visual field of sapphire element.
In one embodiment, defect information includes at least one of following item：
Surface scratch information；And
Surface shape information.
In one embodiment, testing equipment includes microscope.
In one embodiment, testing equipment includes the object lens for forming image based on the reflected beams.
In one embodiment, testing equipment includes the sensor for forming picture signal based on the reflected beams.
In one embodiment, photoconduction includes at least one of following item：
Prism；And
Light source.
In one embodiment, light source includes dark field.
In one embodiment, light source includes sphere shape light.
In one embodiment, method further includes：
Sapphire element is supplied to the measuring system using rotatable support frame；
Rotation includes the support of sapphire element；
From the angle of inclination on the surface with respect to sapphire element, by the surface of beam direction sapphire element, wherein light
Bundle is provided by photoconduction；
In response to being directed to the light beam on the surface of sapphire element, using detection sensor detection from sapphire element
The reflected beams on surface, to provide the detection signal at least two different rotary moment, wherein detection sensor is set to indigo plant
The top of gemstone element；And
Process the detection signal at least two different rotary moment, to determine the defect letter on the surface being related to sapphire element
Breath.
In one embodiment, angle of inclination is different from 90 degree.
In one embodiment, testing equipment is arranged to measure the reflected beams on optical angle, and inclination angle
Degree is different from this optical angle.
According to second exemplary aspect of the present invention, provide the system of the optical check for sapphire element, this system bag
Include：
Photoconduction, for from the angle of inclination on the surface with respect to sapphire element by the table of beam direction sapphire element
Face；And
Testing equipment, for the light beam on the surface in response to being directed to sapphire element, detection is from sapphire element
The reflected beams on surface, to provide detection signal, wherein testing equipment is arranged on the top of the visual field of sapphire element, wherein
This system is configured to processing detection signal to determine the defect information on the surface being related to sapphire element.
In one embodiment, photoconduction is set to the side of the visual field of sapphire element.
In one embodiment, photoconduction is arranged on the top of the visual field of sapphire element.
In one embodiment, testing equipment is arranged to receive the reflected beams on optical angle, and angle of inclination
Different from this optical angle.
In one embodiment, system includes：
Object lens and sensor, for forming picture signal based on the reflected beams；And
Multiple prisms, around the outside setting of object lens, to provide the ring of light of the optical beam path around testing equipment.
In one embodiment, system includes：
Object lens and sensor, for forming image based on the reflected beams；And
Multiple light sources, around the outside setting of object lens, to provide the ring of light of the optical beam path around testing equipment.
In one embodiment, system includes：
For the rotatable support frame of sapphire element, this rotatable support frame is configured to make sapphire unit in measuring system
Part rotates.
In one embodiment, system includes：
Eyepiece, for forming the image for checking sapphire element for user.
According to the 3rd exemplary aspect of the present invention, provide the testing equipment of the optical check for sapphire element, this sets
Standby inclusion：
Photoconduction, for from the angle of inclination on the surface with respect to sapphire element by the table of beam direction sapphire element
Face；And
Object lens, for the light beam on the surface in response to being directed to sapphire element, receive the surface from sapphire element
The reflected beams, wherein testing equipment is arranged on the top of the visual field of sapphire element.
In one embodiment, equipment includes sensor, for forming picture signal based on the reflected beams.
In one embodiment, equipment includes microscope.
In one embodiment, equipment includes eyepiece, for forming the image for checking sapphire element for user.
According to the 4th exemplary aspect of the present invention, provide the optical element checking according to first aspect.
According to the 5th exemplary aspect of the present invention, provide the device of the optical element including fourth aspect.
In one embodiment, optical element includes display portion or the cover of device.
In one embodiment, the higher-strength axle of sapphire element is aligned with the higher stress direction of device.
Device can include such as panel computer, smart phone, mobile phone, notebook computer, digital camera or
The portable unit of person's personal digital assistant (PDA) etc.
Foregoing illustrate different unconfinement exemplary aspect and the embodiment of the present invention.Above-described embodiment is only used for solving
Release the selected aspect that can utilize in embodiments of the present invention or step.Some embodiments can be only referring to the present invention's
Some exemplary aspect are presenting.It is to be appreciated that, corresponding embodiment can also be applied to other examples aspect.
Brief description
By only by by way of, with reference to the accompanying drawings to describe the present invention, wherein：
Fig. 1 is shown in which to apply some details of the mobile device of various embodiments of the present invention；
Fig. 2 is shown in which to apply some details of the mobile device of various embodiments of the present invention；
Fig. 3 present wherein can apply various embodiments of the present invention for detecting on the surface of sapphire element
The schematic diagram of the system of defect；
Fig. 4 presents the sapphire crystalline texture for optical element that wherein can apply various embodiments of the present invention
Schematic diagram；
Fig. 5 a presents the testing equipment of such as microscope etc that wherein can apply various embodiments of the present invention
Schematic side elevation；
Fig. 5 b presents the testing equipment of such as microscope etc that wherein can apply various embodiments of the present invention
Schematic plan view；
Fig. 6 shows the flow chart showing operation of the example embodiment according to the present invention；
Fig. 7 presents the example block diagram that wherein can apply the device of various embodiments of the present invention；
Fig. 8 be shown in which to apply various embodiments of the present invention there are multiple crystal faces be also known as unit cell
The schematic diagram of the sapphire crystal structure of (unit cell)；
Fig. 9 a shows the region of the sapphire amplification of prior known solutions using such as light field inspection etc
The microscopical view of image；And
Fig. 9 b is shown in which to apply the aobvious of the area image of sapphire amplification of various embodiments of the present invention
Micro- view.
Specific embodiment
In the following description, identical reference instruction identical element.
Fig. 1 is shown in which to apply some details of the mobile device 100 of various embodiments of the present invention.
In one embodiment, mobile device 100 can include mobile phone, smart phone, panel computer, notebook electricity
Brain or any other portable unit.Device includes at least one cover 110, for providing protection to the part of device 100
And create desired outward appearance (outlook) and exterior design for device 100.Cover 110 can include some discrete lids
Part, such as protecgulum and bonnet and even body side frame.In FIG, basically illustrate protecgulum.Device 100 further includes to use
Family interface 120,130, user interface 120,130 includes at least one display 120.Display 120 could be for detection and uses
Family posture and the touch-sensitive display to device 100 offer feedback.Device 100 can also include such as keypad or touch
The user input device 130 of template etc.Additionally, device 100 can include camera 140.No matter described element 110,
120th, 130,140 it is illustrated in the same side of device 100, they may be located at the either side of device 100.No matter scheming in FIG
Multiple device elements 120 to 140 are shown, they are not required for being included.For example, it is possible to only include touch-sensitive display 120,
Without discrete user input device 130.
In one embodiment, at least one of device element 110,120,130,140 include such as slide,
The optical element of layer or glass etc.Cover 110 can include the optical element of such as clear layer coating etc, so that
There is provided attractive in appearance, firm and anti-scratch surface to device.Display 120 can include the optics unit of such as protective clear layer etc
Part to provide firm and anti-scratch surface to display, but remain as display 120 realize angled clear from institute
Observability.User input device can include the optical element similar to display in the case of touch pad, and in routine
The optical element similar to the cover for keypad framework can be included in the case of keypad.Camera 140 can include
Such as protect the optical element of lens etc.
In one embodiment, display 120 can form the permanent sections of cover 110, or in order in cover
Increase the potentiality of upgrading engine, display 120 can also be the module that can be replaced in 110 life-span.Alternatively, display
120 protective layer can be a part for cover 110 so that this layer can independently be changed.In further alternative
In, the protective layer of display 120 is integrated into cover 110.
In an embodiment of the present invention, the surface of the optical element of such as sapphire element etc can provide the behaviour of equipment
Make face.That give the bigger degree of freedom of design engineer to design the equipment with desired appearance.Operating surface can be provided with
The array of user input element 130, such as key, touch pad or this element.Shell can be conventional list part enclosure or
Concha Meretricis Seu Cyclinae or the setting of two or more part other, wherein user input element 130 or key may be located at and show
On the different face of device 120.
Fig. 2 is shown in which to apply some details of the mobile device 100 of various embodiments of the present invention.
In one embodiment, cover 110 can also include multiple in protecgulum and bonnet and in body side frame
Cap subelement.In fig. 2, basically illustrate the bonnet of device 100.Device 100 can include cap subelement, cover unit
Part includes optical element 210 to 230.This optical element 210 to 230 can be configured to provide decoration effect to elements below
Really, protection feature, or the performance characteristic of such as speaker or microphone casing body etc is provided to device 100.Shown in Fig. 2
The bonnet of cover 110 can also include the optical element 210 to 230 of such as display or touch pad etc.No matter
Show described element 210 to 230 in the same side of device 100, they may be located at the either side of device 100.No matter
Illustrate multiple device elements 210 to 230 in fig. 2, they are not required for being included.
In one embodiment, at least one of device element 210 to 230 includes such as sapphire element etc
Optical element.Cover 110 can include the optical element of such as sapphire layer coating etc, with to device provide attractive in appearance,
Firm and anti-scratch surface.
Sapphire can be used for the mobile device optics of such as display, cap subelement or touch pad etc
Element.Sapphire has high hardness and intensity, but its higher refractive index means and in itself previously known glass or mould
Material screen is compared, and more light are reflected from surface.
Present invention discusses sapphire and aluminium oxide.Both chemical compositions are all based on Al2O3.For clearly mesh
, sapphire is construed as the monocrystalline of aluminium oxide in this context, and aluminium oxide is construed as aluminium oxide
Polycrystalline form (PCA).
Fig. 3 presents the surface for detecting sapphire element 310 that wherein can apply various embodiments of the present invention
On the system 300 of defect schematic diagram.
When providing sapphire element to mobile device, in order to reach maximum intensity and the toughness of sapphire material, important
Be control and eradicate all grind and/or polishing cut.However, the possible defect in the surface of mark sapphire element is special
Not difficult problem.This is primarily due to the following fact：May weaken the cut of sapphire element and crackle very little (less than 5
Micron) and therefore only can be seen using microscope.However, because sapphire is transparent material, micro- using such as light field
The known microscopy of art etc is hardly possible to see this cut.
In one embodiment, dark field microscopy is used to such as cut and crackle etc in sapphire element
Defect is one can easily see.Details in a play not acted out on stage, but told through dialogues microtechnique is used as producing high-quality, the manufacture process of zero defect sapphire element
A part.
In one embodiment, details in a play not acted out on stage, but told through dialogues microtechnique can use at the end of manufacture process, to confirm final
High-quality zero defect sapphire element is assembled in product.
In one embodiment, sapphire element 310 is optically inspected.Photoconduction 320,333,340 and testing equipment
330 are set to system 300.
In one embodiment, at least one photoconduction 320,333,340 is included within the system 300.System is not limited to institute
The photoconduction position presenting, but they are only used as illustrated examples and are presented.Photoconduction 320 can be set to sapphire element
The side of visual field.Alternatively, photoconduction 340,333 can be arranged on the top of the visual field of sapphire element.Photoconduction 333 can be with
Testing equipment 330 or discrete photoconduction 320,340 are integrated.
Sapphire element 310 includes for example being directed to the checked surface of cut 311.
In one embodiment, light beam 321 is directed to the surface 311 of sapphire element 310 from angle of inclination (Θ).Example
As with respect to sapphire element surface 311, this angle can be less than 45 degree.Photoconduction 321 is by being set to sapphire element 310
The photoconduction 320 of the side of visual field (FOV) provide, or the light of the top by the visual field (FOV) being arranged on sapphire element 310
333,340 offers are provided.For example, photoconduction 320,333,340 can include at least one light source or prism.
If sapphire surface 311 is perfectly polished, the angle of inclination (Θ) of light beam 321 and reflection angle 322 will
Identical.In this situation, the reflected beams 322 do not enter testing equipment 330.However, if there is cut, then this presents light
Bundle 323 reflexes to the new surface 311 in detector 330.Similar to small mirror, this small mirror is at an angle of cut, makes
Obtain incident beam 322 to be reflected in detector 330 and be therefore detected as signal.
In one embodiment, in response to being directed to the light beam 321 on the surface 311 of sapphire element 310, set using detection
The reflected beams 322,323 from the surface 311 of sapphire element 310 for standby 330 detections, to provide detection signal.Testing equipment
The top of 330 visual fields (FOV) being arranged on sapphire element 310.Processing detection signal is related to sapphire element 310 to determine
Surface 311 defect information.
For example, defect information can include surface scratch information, crack information or surface shape information.
In one embodiment, testing equipment 330 includes microscope.Microscope can be included for based on the reflected beams
322nd, the object lens 331 of 323 formation images.
In one embodiment, light beam can be directed to blue treasured from the angle of inclination with respect to sapphire element surface 311
The surface 311 of stone element 310, wherein light beam are by the visual field (FOV) being arranged on according to sapphire element 310 and photoconduction 320
The photoconduction of different opposite sides is providing.
In one embodiment, photoconduction 340 can from the angle of inclination with respect to sapphire element surface 311 or at least
It is never 90 degree of angle, light beam 341 is guided the surface 311 of sapphire element 310, wherein light beam 341 is by being arranged on indigo plant
Photoconduction 340 above the visual field (FOV) of gemstone element 310 provides.The reflected beams 342 can be detected by testing equipment 330.
In one embodiment, photoconduction 333 can from the angle of inclination with respect to sapphire element surface 311 or at least
Be never 90 degree of angle, by the surface 311 of beam direction sapphire element 310, wherein light beam by the equipment that is integrated into 330 and
Being arranged on the photoconduction 333 above the visual field (FOV) of sapphire element 310 provides.The reflected beams can be examined by testing equipment 330
Survey.
In one embodiment, photoconduction 320,340 can include dark field or sphere shape light.
In one embodiment, testing equipment 330 includes object lens 331 and sensor (not shown).At least one photoconduction
320th, 333,340 provided by the illuminator discrete with testing equipment 330.
In one embodiment, testing equipment 330 includes object lens 331, sensor (not shown) and at least one photoconduction
320、333、340.
In one embodiment, sapphire element 310 can be provided to measuring system 300 using rotatable support frame 350.
When measuring sapphire element 310, the support 350 including sapphire element 310 can rotate, from respect to sapphire element table
By the surface 311 of beam direction sapphire element 310, wherein light beam is by being set to sapphire element 310 at the angle of inclination in face
The side of visual field (FOV) or sapphire element 310 visual field (FOV) above photoconduction 320,333,340 provide.In response to
It is directed to the light beam on the surface of sapphire element, it is possible to use testing equipment 330 detection is from the surface of sapphire element 310
311 the reflected beams 322,323,342, to provide the detection signal at least two different rotary moment, wherein testing equipment 330
It is arranged on the top of the visual field of sapphire element.The detection signal at least two different rotary moment then can be processed with true
Surely it is related to the defect information on the surface 311 of sapphire element 310.
In one embodiment, using dark field microscopy so that the light 321 being used for irradiating sample 310 comes from sample
310 side, and in common light field microscopy, sample is by under the optical axis (i.e. perpendicular to surface sample 310) of microscope 330
The light 360 coming and providing light field 361 to microscope 330 irradiates.
In one embodiment, some prisms 333 are around the outside setting of object lens 331.This multiple prism 333 can be effective
Ground creates aperture or the ring of light (dark field light illumination) of the optical beam path around (for example, microscopical) lens 331.Identical is imitated
Really (i.e. the ring of light) can be realized by the discrete light sources not comprising any prism 333.The continuous or semicontinuous ring of light can be created, with
All cuts are irradiated on be possible to angle.
Dark field method works and is because, cut serves as small mirror in the surface 311 of sapphire 310, therefore when
Assume using during dark-ground illumination 320 (i.e. from side), cut " lighting " and become visible.
In one embodiment, testing equipment 330 is arranged to become optics angle with respect to the visual field of sapphire element 310
Degree.This optical angle corresponds in view of the angle pointed by the testing equipment of visual field.Light beam is from respect to sapphire element table
The angle of inclination in face is directed to the surface of sapphire element, and this angle of inclination is different from optical angle.
This solution makes it possible to detection and controls the intensity of sapphire material and the cut of toughness.The reality of do so
Be meant that, can more reliable and do not lost efficacy on the mobile device using bigger and thinner sapphire element.
The present invention will allow sapphire element surface to be checked exactly, and therefore with very high standard production, this
Then allow sapphire to use in the mobile device with more design freedoms.This finally made product thinner, lighter and
And it is more sane.
In one embodiment, detecting system includes eyepiece 332, and object lens 332 are used for forming image, such that it is able to use people
Eye manually to execute inspection.
In one embodiment, the geometry of the geometry according to sapphire element 310 or specified defect, different
Different light sources 320,333,340 under irradiating angle can be used by dark-ground illumination to make cut visible.
Fig. 4 presents the sapphire crystallization for optical element 420 that wherein can apply various embodiments of the present invention
The schematic diagram 400 of structure 410.Optical element 420 can be included by the sapphire element of optical check.
Optical element 420 can be such as display element.Optical element 420 by growing sapphire crystalline texture 410
Exploitation.After the plane such as sapphire single-crystal is detected and axle, growth can be arranged in desired plane.
In one embodiment, as shown in figure 4, the desired size of optical element 420 includes length L in first axle and
Width W on two axles.
In one embodiment, the orientation of sapphire unit cell 410 can be selected so that the plane of optical element 420 corresponds to
Some planes in sapphire born of the same parents.
Fig. 5 a presents the testing equipment 500 of the such as microscope etc that wherein can apply various embodiments of the present invention
Schematic side elevation.Microscope can be such as dark field microscope.
In one embodiment, testing equipment 500 includes object lens 510.Properly select the optical axis 520 of lens 510 so that
Check considered sapphire element.The reflected beams that sensor 521 can be configured to based on travelling across lens 510 carry
For picture signal.For example, picture signal can be provided to user via the eyepiece 332 of Fig. 3.
In one embodiment, at least one prism 530 can be installed in testing equipment 500 it is therefore intended that using
The light beam 550 of sphere shape light creates details in a play not acted out on stage, but told through dialogues light beam 540.
In one embodiment, testing equipment 500 includes object lens 510 and sensor 521.At least one photoconduction 530 by with
The discrete illuminator of testing equipment 330 provides.
In one embodiment, testing equipment 500 includes object lens 510, sensor 521 and at least one photoconduction 530.
Fig. 5 b presents the testing equipment 500 of the such as microscope etc that wherein can apply various embodiments of the present invention
Schematic plan view.
In one embodiment, testing equipment 500 includes object lens 510 to form image.
Light beam can be directed to the surface of the sapphire element being checked by equipment 500, and wherein light beam is provided to sapphire
The side of the visual field of element.In response to being directed to the light beam on the surface of sapphire element, using detection sensor detection from indigo plant
The reflected beams on the surface of gemstone element, to provide the detection signal of such as image etc.Testing equipment is arranged on sapphire
The top of element.Detection signal then can be processed to determine the defect information on the surface being related to sapphire element.
In one embodiment, for example, sphere shape light 560 is used for using details in a play not acted out on stage, but told through dialogues light beam 540 (being guided using prism 530)
Uniform irradiation is by the sapphire of optical detection.
Fig. 6 shows the operation in the portable unit according to the example embodiment of the present invention.
In step 600, start the method for the optical check to sapphire element.In step 610, by sapphire
Element is supplied to the measuring system including photoconduction and testing equipment, and wherein sapphire element includes surface.In step 620, light
Bundle is directed to the surface of sapphire element from the angle of inclination with respect to sapphire element surface, and wherein light beam is by being set to indigo plant
The photoconduction of the side of the visual field of gemstone element provides.In step 620, it is possible to use from multiple light beams of different angles.?
In step 630, in response to being directed to the light beam on the surface of sapphire element, using testing equipment detection from sapphire element
The reflected beams on surface, to provide detection signal, wherein testing equipment is arranged on the top of the visual field of sapphire element.In step
In rapid 640, processing detection signal is to determine the defect information on the surface being related to sapphire element.In step 650, method knot
Bundle.
Fig. 7 presents the example block diagram of the portable unit 100 that wherein can apply various embodiments of the present invention.Portable dress
Putting 100 can be such as mobile terminal, smart phone, personal digital assistant (PDA), MP3 player, notebook computer, flat board
The subscriber's installation (UE) of computer or other electronic equipment etc, user equipment or device.
The general structure of mobile device 100 includes user interface 740, communication interface 750, processor 710 and is coupled to
The memorizer 720 of processor 710.Device 100 further include to be stored in memorizer 720 and operable to be loaded into process
The software 730 of execution in device 710 and in processor 710.Software 730 can include one or more software module, and
And can be the form of computer program.Device 100 further includes optical element 760.Optical element can include by
The sapphire element of optical check.Optical element 760 can use different according to element 760 purposes in the device 100
Criterion is checking.Thus, for example, the requirement to the optical element 760 as display layer can be differently configured from the light as cover
Learn element 760.Optical element 760 can also be integrated into another element of device 100, for example, be integrated into user interface 740.
Processor 710 can be such as CPU (CPU), microprocessor, digital signal processor (DSP), figure
Shape processing unit etc..Fig. 7 shows a processor 710, but device 100 can include multiple processors.
Memorizer 720 can be for example non-volatile or volatile memory, such as read only memory (ROM), can compile
Journey read only memory (PROM), Erasable Programmable Read Only Memory EPROM (EPROM), random access storage device (RAM), flash memory storage
Device, data disks, optical storage apparatus, magnetic storage apparatus, smart card etc..Device 100 can include multiple memorizeies.Memorizer
720 parts that can be built as device 100, or it can be inserted in groove, port of device 100 etc. by user.Deposit
Reservoir 720 can be only used for the purposes of data storage, or it can be configured for other purposes (such as processing data)
Device a part.
User interface 740 can include for receive from device 100 user input (for example via keyboard, with
The auxiliary of the graphic user interface, speech recognition circuit or such as headset etc that illustrate on the display of family device 100 sets
Standby) and be used for providing a user with the circuit of output (via such as graphic user interface or speaker).User interface 740
Display can include touch-sensitive display.Optical element 760 can be integrated into such as display, keyboard or touch pad
Etc user interface 740.Optical element can also be integrated into the cover of device 100.
Optical element 760 can also be included by camera, for providing screening glass to camera opticses element.Optical element
The screening glass of 760 multiple elements that can be provided for device 100.In the exemplary embodiment, optical element 760 is configured to
There is provided screening glass to the display of device 100.Optical element even can with the front surface of cladding system 100 lid, rear surface or
At least a portion of side surface.
Communication interface modules 750 implements at least a portion wireless radio transmission.Communication interface modules 750 can be included for example no
Line Interface Module.Wave point can include such as near-field communication (NFC), WLAN, bluetooth, infrared (IR), radio frequency identification (RF
ID), GSM/GPRS, CDMA, WCDMA or LTE (Long Term Evolution) radio module.Communication interface modules 750 can be integrated
To in user's set 100 or be integrated into adapter in the suitable groove being inserted into device 100 or port, card
Deng in.Communication interface modules 750 can support a kind of radio interface technology or multiple technologies.Device 100 can include many
Individual communication interface modules 750.
Technical staff will understand, and in addition to the element shown in except Fig. 7, device 100 can include other elements.
What Fig. 8 was shown in which to apply various embodiments of the present invention has also being claimed of multiple crystal faces 810 to 840
Schematic diagram for the sapphire crystal structure 800 of unit cell.
Sapphire is monocrystal material, and that is, it is grown to the continuous large single crystal not having crystal boundary.This monocrystalline can cut into
Grow before desired size for optical element and shape.
Sapphire single-crystal (i.e. Al2O3) it is used for the purposes of wider range, because it has higher hardness and toughness.Blue
The monocrystalline of gem can be lifted, and grows the seed crystal contacting with the surface of aloxite (AI2O3), monocrystalline is produced into bigger list
Crystalline substance, to be generally processed into desired shape by monocrystalline.
In one embodiment, sapphire crystal is cut or growth is so that the specific plane in crystal is parallel to indigo plant
The piece orientation of gem.Thus, for example, sapphire can be referred to as A plane sapphire or C plane sapphire.Therefore, for A
Plane sapphire, A plane is parallel to the shield direction of optical element.
Sapphire single-crystal is anisotropic material.This means to depend on the direction of crystal, material has different machineries
Property (intensity, hardness, optical property etc.).In simple terms, the usually firm plane of A plane sapphire, and C plane has
Best optical property.
In sapphire crystal structure (as shown in Figure 8), sapphire crystal is hexagonal crystal system, and wherein C axle is formed vertically
And it is orthogonal to the central shaft of C plane 820.Due to the symmetry of sapphire crystal structure, A plane has a large amount of A in fig. 8
Axle, for example will be in three side upwardly extending axle a1 to a3 perpendicular to C axle.Respectively, A plane 810 figure 8 illustrates.M puts down
Face 830 is perpendicular to C plane 820 and A plane 810.R plane 840 is tilted with the constant angle with C axle.
No matter illustrate only four planes 810 to 840, structure cell can include other planes.Further, since Crystals in Symmetry
Property, can there are some same levels for each principal plane.For example, unit cell 800 can include 810, three, such as three A planes
840, C plane 820 of R plane and three M planes 830.
C axle is commonly angled relative to the angle that R axle becomes approximate 57.6 degree.R axle is commonly angled relative to the angle that M axle becomes approximate 32.4 degree
Degree.Sapphire plane and axle can for example be analyzed using X-ray or electronic diffraction, and can be with regard to actual blue treasured
Determination made by stone monocrystalline.
In one embodiment, the measurement to sapphire crystal discloses, and A plane is usually the firmest for mechanical stress
Plane.However, even passing through further to control anisotropy (sometimes referred to as secondary plane), can adopt and sapphire is integrated into
The optical element of portable unit is so that for maximum intensity and therefore reliability, sapphire is oriented in the optics unit of device
In part.
In one embodiment, the crystal face in hexagonal crystal system and direction can be indexed using Miller (Miller) index,
Wherein in crystallography, equivalent plane has the index seeming different.In order to overcome this point, it is possible to use Miller-Bradley dimension
(Bravais) directory system, wherein introduces the 4th index to three indexes of Miller system.
Then carry out given plane using four indexes (hkil), wherein h, k, i and l is integer.3rd index always before
The negative of two index sums, and can be determined by Miller system.
Direction is designated as [uvtw], and wherein u, v, t and w are integers.Adjust u, v and t value so that they
With for zero.Direction index can not be write down by equivalent Miller index.
See Fig. 8 and using Miller-Bravias indices to limit plane when, it is possible to use map below：
- C plane 820 corresponds to { 0001 } of Miller-Bravias indices；
- R plane 840 corresponds to Miller-Bravias indices
- A plane 810 corresponds to Miller-Bravias indicesAnd
- M plane 830 corresponds to Miller-Bravias indices
With reference to Fig. 4, show the A plane of sapphire born of the same parents 410.As seen from Figure 4, length L in this embodiment is big
In width W.Sapphire crystalline texture is configured to so that the principal plane of sapphire born of the same parents 410 is arranged to parallel to optical element
420 surface plane, and two secondary planes are arranged to parallel to first axle and the second axle (W and L).
In one embodiment, the optical element 420 of device has length L on the direction of first axle and in the second axle
Direction on width W, wherein length L be more than or equal to width W.Develop optical element 420, and it includes sapphire
Crystalline texture 410, sapphire crystalline texture 410 has multiple crystal faces, and multiple crystal faces have corresponding normal axis and (are expressed as example
C axle, A axle and M axle).First crystal face axle is configured to perpendicular to first axle L and the second axle W.Second crystal face axle is configured to
Parallel to first axle L, and the 3rd crystal face axle is configured to parallel to the second axle W.
In one embodiment, sapphire crystalline texture has multiple crystal faces, and wherein three principal planes can by three just
Quadrature axis represents, the wherein first crystal face axle is configured to perpendicular to the second crystal face axle, and the 3rd crystal face axle be configured to perpendicular to
First crystal face axle and the second crystal face axle.
Multiple crystal faces at least include：
There is the A plane of A axle, A axle is configured to the normal axis of A plane；
There is the C plane of C axle, C axle is configured to the normal axis of C plane, and C axle is perpendicular to A axle；And
There is the M plane of M axle, M axle is configured to the normal axis of M plane, M axle is perpendicular to A axle and C axle.
In one embodiment, multiple crystal faces include：
There is the A plane of A axle, A axle is configured to the normal axis of A plane, and A axle is perpendicular to C axle and perpendicular to M axle；With
And
There is the C plane of C axle, C axle is configured to the normal axis of C plane, and C axle is perpendicular to A axle and perpendicular to M axle；With
And
There is the M plane of M axle, M axle is configured to the normal axis of M plane, and M axle is perpendicular to A axle and perpendicular to C axle.
In one embodiment, the first crystal face axle is perpendicular to the A axle of W axle and L axle, and the second crystal face axle is parallel to L axle
M axle, and the 3rd crystal face axle is parallel to the C axle of W axle.
Sapphire crystal 410 planar configuration is to make A plane (such as flat parallel to the surface plane of optical element 420
Smooth display screen), the intensity of improvement is provided to optical element 420.By the M axle of M plane is aligned to parallel to optics unit
Longer side L of the part 420 and C axle of C plane is aligned to shorter side parallel to optical element 420 it is achieved that optical element
Even preferably intensity.
Fig. 9 a shows the region of the sapphire amplification of prior known solutions using such as light field inspection etc
The microscopical view of image 900.Area image 900 can be sapphire 100 times of magnification regions.As visible from Fig. 9 a, in figure
There is no visible cut as in 900 (such as bright field image).
Fig. 9 b is shown in which to apply the area image 910 of the sapphire amplification of various embodiments of the present invention
Microscopical view.Area image 910 can be sapphire 100 times of magnification regions, and corresponds to and the image 900 in Fig. 9 a
Region identical region.Area image 910 is also can correspond to the image that the visual field (FOV) from Fig. 3 creates.
Visible a large amount of cuts in area image 910, and two images 900 and 910 of sapphire same area
Difference is very big.The image 900 being captured using prior known solutions (such as light field) is undistinguishable, does not have any visible stroke
Trace, and show a lot of cuts in image 910 using the solution of embodiments of the invention.
Have been presented for various embodiments.It is to be appreciated that, in the document, word " includes, comprises and contains "
Respectively it is used as open language, and be not intended to exclusiveness.
Above description is by way of the non-limiting example of only certain exemplary embodiments of this invention and embodiment, there is provided right
The abundant and informational description of the optimal mode that inventor currently envisions to execute the present invention.However, art technology
Personnel are clear that the details that the invention is not restricted to embodiment presented above, but it can be using equivalent manners
Implement, without deviating from the characteristic of the present invention in other embodiments or in the various combination of embodiment.
Furthermore, it is possible to be advantageously employed some features of disclosed embodiment above the present invention, and accordingly do not use
Further feature.Therefore, above description is only considered as the explanation of the principle to the present invention, rather than it is limited.Therefore,
The scope of the present invention only to be limited by appended Patent right requirement.
Claims (26)
1. a kind of method of the optical check for sapphire element, methods described includes：
Described sapphire element is supplied to the measuring system including photoconduction and testing equipment, wherein said sapphire element includes
Surface；
From the angle of inclination with respect to sapphire element surface, by the described surface of sapphire element described in beam direction, wherein
Described light beam is provided by described photoconduction；
In response to being directed to the described light beam on the described surface of described sapphire element, it is derived from institute using the detection of described testing equipment
State the reflected beams on the described surface of sapphire element, to provide detection signal, wherein said testing equipment is arranged on described
The top of the visual field of sapphire element；And
Process described detection signal to determine the defect information on the described surface being related to described sapphire element.
2. method according to claim 1, wherein said photoconduction is set to the described visual field of described sapphire element
Side.
3. method according to claim 1, wherein said photoconduction is arranged on the described visual field of described sapphire element
Side.
4. the method according to any one of claims 1 to 3, wherein said defect information is included in following item at least
One：
Surface scratch information；And
Surface shape information.
5. the method according to any one of Claims 1-4, wherein said testing equipment includes microscope.
6. the method according to any one of claim 1 to 5, wherein said testing equipment is included for based on described anti-
Irradiating light beam is forming the object lens of image.
7. the method according to any one of claim 1 to 6, wherein said testing equipment is included for based on described anti-
Irradiating light beam is forming the sensor of picture signal.
8. the method according to any one of claim 1 to 7, wherein said photoconduction includes in following item at least one
Individual：
Prism；And
Light source.
9. method according to claim 8, wherein said light source includes dark field.
10. method according to claim 9, wherein said light source includes sphere shape light.
11. methods according to any one of claim 1 to 10, further include：
Described sapphire element is supplied to the measuring system using rotatable support frame；
Rotation includes the described support of described sapphire element；
From the angle of inclination with respect to sapphire element surface, by the described surface of sapphire element described in beam direction, wherein
Described light beam is provided by described photoconduction；
In response to being directed to the described light beam on the described surface of described sapphire element, using detection sensor detection from described
The reflected beams on the described surface of sapphire element, to provide the detection signal at least two different rotary moment, wherein said
Detection sensor is set to the top of described sapphire element；And
Process the described detection signal at least two different rotary moment, to determine the described surface being related to described sapphire element
Defect information.
12. methods according to any one of claim 1 to 11, wherein said angle of inclination is different from 90 degree.
13. methods according to any one of claim 1 to 12, wherein said testing equipment is arranged to measure optics
The reflected beams in angle, and described angle of inclination is different from described optical angle.
A kind of 14. systems of the optical check for sapphire element, described system includes：
Photoconduction, for from the angle of inclination with respect to sapphire element surface by the described table of sapphire element described in beam direction
Face；And
Testing equipment, for the described light beam on the described surface in response to being directed to described sapphire element, detection is from described
The reflected beams on the described surface of sapphire element, to provide detection signal, wherein testing equipment is arranged on described sapphire
Above the visual field of element, wherein said system is configured to process described detection signal and is related to described sapphire element to determine
The defect information on described surface.
15. systems according to claim 14, wherein said photoconduction is set to the described visual field of described sapphire element
Side.
16. systems according to claim 14, wherein said photoconduction is arranged on the described visual field of described sapphire element
Top.
The system of 17. optical checks for sapphire element according to any one of claim 14 to 16, wherein
Described testing equipment is arranged to receive the reflected beams on optical angle, and described angle of inclination is with described optical angle not
With.
The system of 18. optical checks for sapphire element according to any one of claim 14 to 17, wherein
Described system includes：
Object lens and sensor, for forming picture signal based on described the reflected beams；And
Multiple prisms, around the outside setting of described object lens, to provide the ring of light of the optical beam path around described testing equipment.
The system of 19. optical checks for sapphire element according to any one of claim 14 to 17, wherein
Described system includes：
Object lens and sensor, for forming picture signal based on described the reflected beams；And
Multiple light sources, around the outside setting of described object lens, to provide the ring of light of the optical beam path around described testing equipment.
The system of 20. optical checks for sapphire element according to any one of claim 14 to 19, described
System includes：
For the rotatable support frame of described sapphire element, described rotatable support frame is configured to make institute in described measuring system
State sapphire element rotation.
The system of 21. optical checks for sapphire element according to any one of claim 14 to 20, described
System includes：
Eyepiece, for forming the image for checking described sapphire element for user.
A kind of 22. testing equipments of the optical check for sapphire element, described equipment includes：
Photoconduction, for from the angle of inclination with respect to sapphire element surface by the described table of sapphire element described in beam direction
Face；And
Object lens, for the described light beam on the described surface in response to being directed to described sapphire element, receive from described blue precious
The reflected beams on the described surface of stone element, wherein said testing equipment is arranged on above the visual field of described sapphire element.
The testing equipment of 23. optical checks for sapphire element according to claim 22, described equipment includes：
Object lens, for forming image based on described the reflected beams.
The testing equipment of 24. optical checks for sapphire element according to claim 22 or 23, described equipment
Including：
Sensor, for forming picture signal based on described the reflected beams.
The testing equipment of 25. optical checks for sapphire element according to any one of claim 22 to 24,
Described equipment includes microscope.
The testing equipment of 26. optical checks for sapphire element according to any one of claim 22 to 25,
Described equipment includes eyepiece, and described eyepiece is used for forming the image for checking described sapphire element for user.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2014/056644 WO2015149851A1 (en) | 2014-04-03 | 2014-04-03 | Method and system for optical inspection of sapphire element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106461573A true CN106461573A (en) | 2017-02-22 |
Family
ID=50439367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480079118.6A Pending CN106461573A (en) | 2014-04-03 | 2014-04-03 | Method and system for optical inspection of sapphire element |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN106461573A (en) |
| WO (1) | WO2015149851A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109813730A (en) * | 2019-02-01 | 2019-05-28 | 江苏吉星新材料有限公司 | A kind of chipping method for quickly detecting after sapphire substrate sheet slice |
| CN110082361A (en) * | 2019-05-27 | 2019-08-02 | 成都领益科技有限公司 | A kind of object appearance and crack detection device and detection method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3637477A1 (en) * | 1986-11-04 | 1988-05-11 | Wacker Chemitronic | METHOD AND DEVICE FOR DETERMINING THE QUALITY OF SURFACES, IN PARTICULAR OF SEMICONDUCTOR DISC |
| US5127726A (en) * | 1989-05-19 | 1992-07-07 | Eastman Kodak Company | Method and apparatus for low angle, high resolution surface inspection |
| US5897195A (en) * | 1997-12-09 | 1999-04-27 | Optical Gaging, Products, Inc. | Oblique led illuminator device |
| FR2846096B1 (en) * | 2002-10-16 | 2005-02-11 | DEVICE FOR DETECTING, ANALYZING AND LOCATING DEFECTS PRESENTED ON TRANSPARENT AND / OR REFLECTIVE SURFACE | |
| US7684032B1 (en) * | 2005-01-06 | 2010-03-23 | Kla-Tencor Corporation | Multi-wavelength system and method for detecting epitaxial layer defects |
| US7274445B1 (en) * | 2005-03-11 | 2007-09-25 | Kla-Tencor Technologies Corporation | Confocal scatterometer and method for single-sided detection of particles and defects on a transparent wafer or disk |
| JP2009014510A (en) * | 2007-07-04 | 2009-01-22 | Hitachi High-Technologies Corp | Inspection method and inspection apparatus |
| DE102011087460B3 (en) * | 2011-11-30 | 2013-06-06 | Intego Gmbh | Method for checking defects on crystalline body i.e. sapphire crystal, involves irradiating sapphire crystal with light, and determining path of refracted light for reconstruction of distribution of defects on sapphire crystal |
| KR101442792B1 (en) * | 2012-08-31 | 2014-09-23 | (주)유텍시스템 | Method for Inspecting Sapphire Wafer |
-
2014
- 2014-04-03 CN CN201480079118.6A patent/CN106461573A/en active Pending
- 2014-04-03 WO PCT/EP2014/056644 patent/WO2015149851A1/en active Application Filing
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109813730A (en) * | 2019-02-01 | 2019-05-28 | 江苏吉星新材料有限公司 | A kind of chipping method for quickly detecting after sapphire substrate sheet slice |
| CN110082361A (en) * | 2019-05-27 | 2019-08-02 | 成都领益科技有限公司 | A kind of object appearance and crack detection device and detection method |
| CN110082361B (en) * | 2019-05-27 | 2024-04-30 | 成都领益科技有限公司 | Object appearance and crack detection device and detection method |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2015149851A1 (en) | 2015-10-08 |
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