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CN106449779B - A kind of photovoltaic cell of high temperature resistance high humidity environment - Google Patents

A kind of photovoltaic cell of high temperature resistance high humidity environment Download PDF

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CN106449779B
CN106449779B CN201610672883.XA CN201610672883A CN106449779B CN 106449779 B CN106449779 B CN 106449779B CN 201610672883 A CN201610672883 A CN 201610672883A CN 106449779 B CN106449779 B CN 106449779B
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edge
humidity environment
photovoltaic cell
high temperature
temperature resistance
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CN106449779A (en
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刘润宝
周宇昊
韩苗苗
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Huadian Electric Power Research Institute Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/30Coatings
    • H10F77/306Coatings for devices having potential barriers
    • H10F77/311Coatings for devices having potential barriers for photovoltaic cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00Manufacture or treatment of devices covered by this subclass
    • H10F71/129Passivating
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/30Coatings
    • H10F77/306Coatings for devices having potential barriers
    • H10F77/311Coatings for devices having potential barriers for photovoltaic cells
    • H10F77/315Coatings for devices having potential barriers for photovoltaic cells the coatings being antireflective or having enhancing optical properties
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

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  • Photovoltaic Devices (AREA)

Abstract

本发明涉及一种抗高温高湿环境的光伏电池,属于太阳能光伏发电生产领域。目前还没有一种可靠性高、经济性好、轻便实用的光伏电池可以解决高温高湿环境引起的PID效应所带来的光电转换率下降的问题。本发明包括晶硅基片,所述晶硅基片的正面和背面均镀有一层减反射膜,其特点在于:所述晶硅基片的硅片边缘镀有一层边缘保护膜,所述边缘保护膜和减反射膜连接,通过边缘保护膜和减反射膜共同将晶硅基片完全密封起来使得晶硅基片与外界环境彻底隔离。本发明的结构设计合理,可靠性强,经济性好,轻便实用,可以有效解决高温高湿环境引起的PID效应所带来的光电转换率下降的问题。

The invention relates to a photovoltaic cell resistant to high temperature and high humidity environment, which belongs to the field of solar photovoltaic power generation production. At present, there is no high-reliability, economical, portable and practical photovoltaic cell that can solve the problem of the decrease in photoelectric conversion rate caused by the PID effect caused by the high-temperature and high-humidity environment. The invention includes a crystalline silicon substrate, the front and back of the crystalline silicon substrate are coated with a layer of anti-reflection film, and the feature is that: the edge of the silicon wafer of the crystalline silicon substrate is coated with a layer of edge protection film, and the edge The protective film is connected to the anti-reflection film, and the crystalline silicon substrate is completely sealed through the edge protective film and the anti-reflection film so that the crystalline silicon substrate is completely isolated from the external environment. The invention has reasonable structure design, strong reliability, good economy, lightness and practicality, and can effectively solve the problem of photoelectric conversion rate decrease caused by PID effect caused by high temperature and high humidity environment.

Description

一种抗高温高湿环境的光伏电池A photovoltaic cell resistant to high temperature and high humidity environment

技术领域technical field

本发明涉及一种抗高温高湿环境的光伏电池,属于太阳能光伏发电生产领域,具体用于改善光伏电池片的性能,提高抵抗高温高湿环境引起的PID效应的能力。The invention relates to a photovoltaic cell resistant to high-temperature and high-humidity environments, belonging to the field of solar photovoltaic power generation production, and is specifically used for improving the performance of photovoltaic cells and improving the ability to resist the PID effect caused by high-temperature and high-humidity environments.

背景技术Background technique

太阳能光伏电池是通过光生伏特效应直接把光能转化成电能的装置。晶硅光伏电池以其转换效率高、性能稳定、价格适中等因素,占据了光伏电池生产的绝大部分份额,已经在许多的商业化电站中投入使用,效果明显优于其他类型的光伏电池。Solar photovoltaic cells are devices that directly convert light energy into electrical energy through the photovoltaic effect. Crystalline silicon photovoltaic cells account for the vast majority of photovoltaic cell production due to their high conversion efficiency, stable performance, and moderate price. They have been put into use in many commercial power stations, and their effects are significantly better than other types of photovoltaic cells.

然而随着应用场合的扩大,从地面到屋顶,从农业大棚到鱼塘滩涂,晶硅光伏电池也遇到了一些问题,尤其是在高温潮湿的环境,容易出现PID效应,使得光伏电池性能迅速衰减。目前光伏电池片生产工艺一般不会兼顾适用场合,只以初始转换效率指标作为判断依据;而在做成组件阶段,有采用双面玻璃夹层的方式来减少湿气对电池片的影响。虽然双玻组件对于抗高温高湿环境确实起到一定作用,但是双玻组件需两面都用玻璃,不光使得自身成本增加,还由于重量增加,使得支架和基础的成本随之增加。加上需对组件生产线有一定改动,使得双玻组件的成本一直比传统组件贵不少。现在虽然也有一些其他技术用于减少湿气对电池片的影响,如公开日为2015年04月29日,公开号为CN104576796A的中国专利中,公开了一种光伏组件背面保护膜,但是该光伏组件背面保护膜也难以有效解决高温高湿环境引起的PID效应所带来的光电转换率下降的问题。However, with the expansion of applications, from the ground to the roof, from agricultural greenhouses to fish ponds and tidal flats, crystalline silicon photovoltaic cells have also encountered some problems, especially in high temperature and humid environments, prone to PID effects, making the performance of photovoltaic cells rapidly decay . At present, the production process of photovoltaic cells generally does not take into account the applicable occasions, and only uses the initial conversion efficiency index as the basis for judgment; while in the stage of making modules, double-sided glass interlayers are used to reduce the impact of moisture on the cells. Although double-glass modules do play a certain role in resisting high-temperature and high-humidity environments, double-glass modules need to use glass on both sides, which not only increases their own cost, but also increases the cost of brackets and foundations due to increased weight. Coupled with the need to make certain changes to the module production line, the cost of double-glass modules has always been much higher than that of traditional modules. Although there are some other technologies used to reduce the impact of moisture on the battery sheet, such as the Chinese patent with the publication date of April 29, 2015 and the publication number CN104576796A, which discloses a protective film on the back of the photovoltaic module, but the photovoltaic module It is also difficult for the protective film on the back of the module to effectively solve the problem of the decrease in photoelectric conversion rate caused by the PID effect caused by the high temperature and high humidity environment.

综上所述,目前还没有一种可靠性高、经济性好、轻便实用的光伏电池可以解决高温高湿环境引起的PID效应所带来的光电转换率下降的问题。To sum up, there is currently no photovoltaic cell with high reliability, good economy, lightness and practicality that can solve the problem of the decrease of photoelectric conversion rate caused by the PID effect caused by the high temperature and high humidity environment.

发明内容Contents of the invention

本发明的目的在于克服现有技术中存在的上述不足,而提供一种结构设计合理,可靠性强,经济性好,轻便实用,且同时可以有效解决高温高湿环境引起的PID效应所带来的光电转换率下降的问题的抗高温高湿环境的光伏电池。The purpose of the present invention is to overcome the above-mentioned deficiencies in the prior art, and provide a kind of reasonable structure design, strong reliability, good economy, light and practical, and can effectively solve the PID effect caused by high temperature and high humidity environment at the same time. Photovoltaic cells resistant to high-temperature and high-humidity environments with the problem of photoelectric conversion rate decline.

本发明解决上述问题所采用的技术方案是:该抗高温高湿环境的光伏电池包括晶硅基片,所述晶硅基片的正面和背面均镀有一层减反射膜,其结构特点在于:所述晶硅基片的硅片边缘镀有一层边缘保护膜,所述边缘保护膜和减反射膜连接,通过边缘保护膜和减反射膜共同将晶硅基片完全密封起来使得晶硅基片与外界环境彻底隔离。The technical solution adopted by the present invention to solve the above problems is: the photovoltaic cell resistant to high temperature and high humidity environment includes a crystalline silicon substrate, the front and back of the crystalline silicon substrate are coated with an anti-reflection film, and its structural characteristics are: The edge of the silicon wafer of the crystalline silicon substrate is coated with a layer of edge protection film, and the edge protection film is connected to the anti-reflection film, and the crystalline silicon substrate is completely sealed together by the edge protection film and the anti-reflection film to make the crystalline silicon substrate Completely isolated from the outside environment.

作为优选,本发明所述减反射膜的材质为氮化硅。Preferably, the material of the antireflection film in the present invention is silicon nitride.

作为优选,本发明所述减反射膜的厚度为140纳米。Preferably, the thickness of the antireflection film in the present invention is 140 nanometers.

作为优选,本发明所述边缘保护膜的材质为氮化硅。Preferably, the material of the edge protection film in the present invention is silicon nitride.

作为优选,本发明所述硅片边缘的表面为锯齿状或金字塔型。Preferably, the surface of the edge of the silicon wafer in the present invention is jagged or pyramidal.

作为优选,本发明镀制边缘保护膜的工艺如下:在太阳能电池片工艺流程走到镀制减反射膜这一环节的时候,会在真空环境下进行,使用等离子加强化学气相沉积法在晶硅基片上镀一层减反射膜,减反射膜的厚度是140纳米;由于硅片边缘处的位置比晶硅基片的正面和背面特殊,导致等离子加强化学气相沉积法在硅片边缘镀制的减反射膜不如晶硅基片的正面和背面上那么致密,位于硅片边缘上的减反射膜形成多孔疏松的结构,使得外界环境中的水、空气容易进入,导致太阳能电池片效率下降和性能恶化的情况;在结束等离子加强化学气相沉积法后,继续在真空环境下将多片太阳能电池片叠加起来,然后移到别的真空腔室,抽至真空,先对硅片边缘进行高能粒子轰击清洗,将硅片边缘疏松的减反射膜进行清除,并进一步消除硅片边缘扩散杂质对电池性能的影响,且形成了一层锯齿状或金字塔型的表面,有利于新镀制的边缘保护膜附着于硅片边缘;然后使用物理气相沉积法在硅片边缘镀上一层致密的边缘保护膜。As a preference, the process of coating the edge protection film of the present invention is as follows: when the process flow of the solar cell reaches the step of coating the anti-reflection film, it will be carried out in a vacuum environment, and the plasma-enhanced chemical vapor deposition method will be used on the crystal silicon A layer of anti-reflection film is coated on the substrate, and the thickness of the anti-reflection film is 140 nanometers; because the position at the edge of the silicon wafer is special compared to the front and back of the crystalline silicon substrate, the plasma-enhanced chemical vapor deposition method is coated on the edge of the silicon wafer. The anti-reflection film is not as dense as the front and back of the crystalline silicon substrate. The anti-reflection film on the edge of the silicon wafer forms a porous and loose structure, which makes it easy for water and air in the external environment to enter, resulting in a decrease in the efficiency and performance of the solar cell. Worsening situation; after the plasma-enhanced chemical vapor deposition method, continue to stack multiple solar cells in a vacuum environment, then move to another vacuum chamber, evacuate to a vacuum, and first bombard the edge of the silicon wafer with high-energy particles Cleaning, remove the loose anti-reflection film on the edge of the silicon wafer, and further eliminate the influence of the diffused impurities on the edge of the silicon wafer on the performance of the battery, and form a layer of jagged or pyramid-shaped surface, which is beneficial to the newly plated edge protection film Attached to the edge of the silicon wafer; then use the physical vapor deposition method to coat a dense edge protection film on the edge of the silicon wafer.

作为优选,本发明高能粒子轰击清洗时的真空度高于等离子加强化学气相沉积法的真空度。Preferably, the vacuum degree of the high-energy particle bombardment cleaning in the present invention is higher than that of the plasma-enhanced chemical vapor deposition method.

作为优选,本发明物理气相沉积法采用磁控溅射法。Preferably, the physical vapor deposition method of the present invention adopts the magnetron sputtering method.

作为优选,本发明镀制边缘保护膜时的真空度低于0.1帕。Preferably, the vacuum degree of the present invention is lower than 0.1 Pa when the edge protection film is plated.

作为优选,本发明多片太阳能电池片叠加起来后,所有晶硅基片中的硅片边缘相齐平。Preferably, after a plurality of solar cell sheets of the present invention are stacked, the edges of the silicon sheets in all crystalline silicon substrates are flush.

本发明与现有技术相比,具有以下优点和效果:晶硅基片的硅片边缘镀有一层边缘保护膜,取代了原先生成的疏松的氮化硅膜,将电池片的内部和外界环境中的水汽和空气彻底隔离,降低了高温高湿环境下PID效应发生的可能性。再加上高能粒子轰击去除了边缘浅扩散的硅基,形成了锯齿状边缘,减少了电池片边缘漏电的几率,提高了光电转换效率,进一步提升了电池的性能,尤其在抗PID效应方面性能优越。所生产的光伏电池片可直接进入下游的生产流程,无需对生产线其他部分进行改动。Compared with the prior art, the present invention has the following advantages and effects: the edge of the silicon wafer of the crystalline silicon substrate is coated with a layer of edge protection film, which replaces the original loose silicon nitride film, and protects the internal and external environment of the cell. The water vapor in the air is completely isolated from the air, which reduces the possibility of PID effect in high temperature and high humidity environment. In addition, the bombardment of high-energy particles removes the shallowly diffused silicon base at the edge, forming a jagged edge, which reduces the chance of leakage at the edge of the cell, improves the photoelectric conversion efficiency, and further improves the performance of the cell, especially in terms of anti-PID effect. superior. The produced photovoltaic cells can be directly entered into the downstream production process without changing other parts of the production line.

附图说明Description of drawings

图1是本发明实施例中抗高温高湿环境的光伏电池的结构示意图。Fig. 1 is a schematic structural diagram of a photovoltaic cell resistant to high temperature and high humidity environment in an embodiment of the present invention.

图中:1—晶硅基片;2—减反射膜;3—边缘保护膜;4—硅片边缘。In the figure: 1—crystalline silicon substrate; 2—anti-reflection film; 3—edge protection film; 4—edge of silicon wafer.

具体实施方式detailed description

下面结合附图并通过实施例对本发明作进一步的详细说明,以下实施例是对本发明的解释而本发明并不局限于以下实施例。The present invention will be further described in detail below in conjunction with the accompanying drawings and examples. The following examples are explanations of the present invention and the present invention is not limited to the following examples.

实施例。Example.

参见图1,本实施例中抗高温高湿环境的光伏电池包括晶硅基片1,晶硅基片1的正面和背面均镀有一层减反射膜2,在晶硅基片1的硅片边缘4镀有一层边缘保护膜3,边缘保护膜3和减反射膜2连接,通过边缘保护膜3和减反射膜2共同将晶硅基片1完全密封起来使得晶硅基片1与外界环境彻底隔离,可以有效解决高温高湿环境下引起的PID效应带来的光电转换率下降的问题,且可靠性高、经济性好、轻便实用。Referring to Fig. 1, the photovoltaic cell resistant to high temperature and high humidity environment in this embodiment comprises a crystalline silicon substrate 1, and the front and back sides of the crystalline silicon substrate 1 are coated with a layer of anti-reflection film 2, and the silicon wafer of the crystalline silicon substrate 1 The edge 4 is coated with a layer of edge protection film 3, the edge protection film 3 is connected with the anti-reflection film 2, and the crystal silicon substrate 1 is completely sealed by the edge protection film 3 and the anti-reflection film 2 so that the crystal silicon substrate 1 is separated from the external environment. Complete isolation can effectively solve the problem of photoelectric conversion rate drop caused by PID effect caused by high temperature and high humidity environment, and it has high reliability, good economy, light and practical.

本实施例中减反射膜2的材质可以为氮化硅。减反射膜2的厚度可以为140纳米,也就是控制在约等于太阳辐射频谱峰值的1/4波长。边缘保护膜3的材质可以为氮化硅,也可以选择其他性能更优的物质作为保护膜层。硅片边缘4的表面通常为锯齿状或金字塔型。The material of the anti-reflection film 2 in this embodiment can be silicon nitride. The thickness of the anti-reflection film 2 can be 140 nanometers, that is, controlled to be approximately equal to 1/4 wavelength of the peak value of the solar radiation spectrum. The material of the edge protection film 3 can be silicon nitride, or other materials with better performance can be selected as the protective film layer. The surface of the edge 4 of the silicon wafer is usually jagged or pyramidal.

本实施例中镀制边缘保护膜3的工艺如下:在太阳能电池片工艺流程走到镀制减反射膜2这一环节的时候,会在真空环境下进行,使用等离子加强化学气相沉积法(PECVD)在晶硅基片1上镀一层减反射膜2,减反射膜2的厚度是140纳米;由于硅片边缘4处的位置比晶硅基片1的正面和背面特殊,导致等离子加强化学气相沉积法(PECVD)在硅片边缘4镀制的减反射膜2不如晶硅基片1的正面和背面上那么致密,位于硅片边缘4上的减反射膜2形成多孔疏松的结构,使得外界环境中的水、空气容易进入,导致太阳能电池片效率下降和性能恶化的情况;在结束等离子加强化学气相沉积法(PECVD)后,继续在真空环境下将多片太阳能电池片叠加起来用于进行集中处理,然后移到别的真空腔室,抽至真空,先对硅片边缘4进行高能粒子轰击清洗,将硅片边缘4疏松的减反射膜2进行清除,并进一步消除硅片边缘4扩散杂质对电池性能的影响,且形成了一层锯齿状或金字塔型的表面,有利于新镀制的边缘保护膜3附着于硅片边缘4,提高新镀膜层和晶硅基片1的结合;然后使用物理气相沉积法(PVD)在硅片边缘4镀上一层致密的边缘保护膜3。In this embodiment, the process of coating the edge protection film 3 is as follows: when the process flow of the solar cell reaches the step of coating the anti-reflection film 2, it will be carried out in a vacuum environment, and the plasma enhanced chemical vapor deposition method (PECVD) will be used. ) Coating a layer of anti-reflection film 2 on the crystalline silicon substrate 1, the thickness of the anti-reflection film 2 is 140 nanometers; because the position at the edge 4 of the silicon wafer is special compared to the front and back of the crystalline silicon substrate 1, resulting in plasma enhanced chemical The anti-reflection film 2 plated on the edge 4 of the silicon wafer by vapor phase deposition (PECVD) is not as dense as the front and back sides of the crystalline silicon substrate 1, and the anti-reflection film 2 on the edge 4 of the silicon wafer forms a porous and loose structure, so that Water and air in the external environment are easy to enter, resulting in a decrease in the efficiency and performance of solar cells; after the end of the plasma enhanced chemical vapor deposition (PECVD), continue to stack multiple solar cells in a vacuum environment for Carry out concentrated treatment, then move to another vacuum chamber, evacuate to vacuum, first perform high-energy particle bombardment cleaning on the edge 4 of the silicon wafer, remove the loose anti-reflection film 2 on the edge 4 of the silicon wafer, and further eliminate the edge 4 of the silicon wafer. The impact of diffusion impurities on battery performance, and a layer of jagged or pyramid-shaped surface is formed, which is conducive to the adhesion of the newly plated edge protection film 3 to the edge 4 of the silicon wafer, and improves the combination of the new coating layer and the crystalline silicon substrate 1 ; Then use physical vapor deposition (PVD) to coat a layer of dense edge protection film 3 on the edge 4 of the silicon wafer.

本实施例中高能粒子轰击清洗时的真空度高于等离子加强化学气相沉积法(PECVD)的真空度。物理气相沉积法(PVD)采用磁控溅射法,也可采用其他PVD手段。镀制边缘保护膜3时的真空度低于0.1帕。多片太阳能电池片叠加起来后,所有晶硅基片1中的硅片边缘4相齐平。In this embodiment, the vacuum degree during the high-energy particle bombardment cleaning is higher than that of the plasma-enhanced chemical vapor deposition (PECVD) method. Physical vapor deposition (PVD) uses magnetron sputtering, and other PVD methods can also be used. The vacuum degree when plating the edge protection film 3 is lower than 0.1 Pa. After a plurality of solar cell sheets are stacked, the edges 4 of the silicon sheets in all the crystalline silicon substrates 1 are flush with each other.

在常规的晶硅太阳能光伏电池结构的基础上,在硅片边缘4形成一层致密薄膜作为边缘保护膜3,彻底隔离晶硅基片1与外界环境,以减少周边环境对电池片性能的影响,尤其在抗高温高湿环境引起的PID效应方面,有明显的改善。在光伏电池片常规生产流程中,完成PECVD镀制氮化硅增透膜后,继续在真空情况下,增加一道工序;将太阳能电池片层叠起来,在更高真空度的情况下,对电池片边缘进行处理,去除电池片边缘疏松的氮化硅及浅扩散的硅基片,然后通过物理气相沉积(PVD)在硅基上形成一层更为致密的保护膜,替换掉原工艺在电池片边缘处生成的疏松的氮化硅膜层;完成这道新工序后,继续进入常规光伏电池的生产工艺流程。On the basis of the conventional crystalline silicon solar photovoltaic cell structure, a dense film is formed on the edge 4 of the silicon wafer as the edge protection film 3, completely isolating the crystalline silicon substrate 1 from the external environment, so as to reduce the impact of the surrounding environment on the performance of the cell , especially in the PID effect caused by high temperature and high humidity environment, there is a significant improvement. In the conventional production process of photovoltaic cells, after PECVD plating silicon nitride anti-reflection film, continue to add a process in vacuum; stack solar cells, and in the case of higher vacuum, the cells The edge is processed to remove the loose silicon nitride and the shallowly diffused silicon substrate on the edge of the cell, and then a denser protective film is formed on the silicon substrate by physical vapor deposition (PVD), replacing the original process on the cell The loose silicon nitride film layer formed at the edge; after completing this new process, continue to enter the production process of conventional photovoltaic cells.

此外,需要说明的是,本说明书中所描述的具体实施例,其零、部件的形状、所取名称等可以不同,本说明书中所描述的以上内容仅仅是对本发明结构所作的举例说明。凡依据本发明专利构思所述的构造、特征及原理所做的等效变化或者简单变化,均包括于本发明专利的保护范围内。本发明所属技术领域的技术人员可以对所描述的具体实施例做各种各样的修改或补充或采用类似的方式替代,只要不偏离本发明的结构或者超越本权利要求书所定义的范围,均应属于本发明的保护范围。In addition, it should be noted that the specific embodiments described in this specification may be different in parts, shapes and names of parts, and the above content described in this specification is only an illustration of the structure of the present invention. All equivalent changes or simple changes made according to the structure, features and principles described in the patent concept of the present invention are included in the protection scope of the patent of the present invention. Those skilled in the art to which the present invention belongs can make various modifications or supplements to the described specific embodiments or adopt similar methods to replace them, as long as they do not deviate from the structure of the present invention or exceed the scope defined in the claims. All should belong to the protection scope of the present invention.

Claims (9)

1. a kind of photovoltaic cell of high temperature resistance high humidity environment, including crystalline silicon substrate, the front and back of the crystalline silicon substrate plate There is one layer of antireflective coating, it is characterised in that:The silicon chip edge of the crystalline silicon substrate is coated with one layer of edge-protected film, and the edge is protected Cuticula is connected with antireflective coating, and crystalline silicon substrate is fully sealed into crystal silicon jointly by edge-protected film and antireflective coating Substrate is thoroughly isolated with external environment;The technique for being coated with edge-protected film is as follows:Plating is gone in solar battery sheet technological process When this link of antireflective coating processed, it can carry out under vacuum conditions, using plasma-enhanced chemical vapor deposition PECVD method in crystalline substance One layer of antireflective coating is plated on silicon chip, the thickness of antireflective coating is 140 nanometers;Terminating plasma-enhanced chemical vapor deposition PECVD method Afterwards, continue that multi-disc solar battery sheet stacks up under vacuum conditions, then move on to other vacuum chamber, be evacuated to vacuum, High-energy particle bombardment cleaning first is carried out to silicon chip edge, the loose antireflective coating of silicon chip edge be purged, and further disappears Except influence of the silicon chip edge diffusion impurity to battery performance, and the surface of one layer of zigzag or pyramid is formd, be advantageous to The edge-protected film being newly coated with is attached to silicon chip edge;Then it is fine and close in silicon chip edge plating last layer using physical vaporous deposition Edge-protected film.
2. the photovoltaic cell of high temperature resistance high humidity environment according to claim 1, it is characterised in that:The material of the antireflective coating Matter is silicon nitride.
3. the photovoltaic cell of high temperature resistance high humidity environment according to claim 1, it is characterised in that:The thickness of the antireflective coating Spend for 140 nanometers.
4. the photovoltaic cell of high temperature resistance high humidity environment according to claim 1, it is characterised in that:The edge-protected film Material is silicon nitride.
5. the photovoltaic cell of high temperature resistance high humidity environment according to claim 1, it is characterised in that:The table of the silicon chip edge Face is zigzag or pyramid.
6. the photovoltaic cell of high temperature resistance high humidity environment according to claim 1, it is characterised in that:High-energy particle bombardment cleans When vacuum be higher than plasma-enhanced chemical vapor deposition PECVD method vacuum.
7. the photovoltaic cell of high temperature resistance high humidity environment according to claim 1, it is characterised in that:Physical vaporous deposition is adopted Use magnetron sputtering method.
8. the photovoltaic cell of high temperature resistance high humidity environment according to claim 1, it is characterised in that:When being coated with edge-protected film Vacuum be less than 0.1 pa.
9. the photovoltaic cell of high temperature resistance high humidity environment according to claim 1, it is characterised in that:Multi-disc solar battery sheet After stacking up, the silicon chip edge in all crystalline silicon substrates is flush.
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